A light beam scanning stage for objective image quality detection

Abstract

The application belongs to the technical field of microelectronic experiment auxiliary equipment, in particular to a light beam scanning table for objective image quality detection, which is composed of a base, a supporting device, a light beam guiding device and a light collecting cylinder adjusting device; a drawer groove is formed in the top front side of the base, a mask plate is inserted into the drawer groove, the supporting device is installed on the top rear side of the base, the light beam guiding device is installed on the supporting device, the light collecting cylinder adjusting device is installed on the rear side of the base and located directly below the light beam guiding device; the scheme provides a simple and practical light beam scanning table for objective image quality detection, which has a modular structure, can be combined into a complete scanning table through the installation and cooperation between different module devices, can realize flexible switching of light collecting mirrors, greatly improves the efficiency of replacing light collecting cylinders with different focal lengths in the experimental process and provides a more efficient operation mode for obtaining multiple sets of comparison data.

Description

Technical Field

[0001] This invention relates to the field of microelectronic experimental auxiliary equipment technology, specifically a beam scanning stage for object image quality detection. Background Technology

[0002] Photolithography is a crucial step in semiconductor device manufacturing. This process involves exposing and developing a photoresist layer to create geometric patterns, which are then transferred layer by layer onto the substrate via etching. Ultimately, this results in a complex circuit structure with dozens of layers on the silicon wafer. The imaging quality of the objective lens directly affects the quality of the lithographic pattern and overlay, making objective lens image quality inspection particularly important.

[0003] However, existing scanning stages are bulky, expensive, and use many precision components, making them prone to damage and resulting in high usage and maintenance costs. It is also necessary to consider how to reduce the cost of objective image quality detection while ensuring the imaging quality of the objective lens. Therefore, we propose a new type of beam scanning stage that is ready for immediate use, has a reasonable structure, and is low in cost, specifically for the detection and experimentation of objective image quality. Summary of the Invention

[0004] The purpose of this invention is to provide a beam scanning stage for object image quality inspection, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a beam scanning stage for object image quality detection, comprising a base, a support device, a beam guiding device, and a condenser tube adjustment device;

[0006] The base has a drawer slot on the top front side, and a mask template is inserted into the drawer slot. A support device is installed on the top rear side of the base. The beam guide device is installed on the support device. A focusing tube adjustment device is installed on the rear side of the base, and the focusing tube adjustment device is located directly below the beam guide device.

[0007] The main body of the support device is a fixed rod. An upper reflector and a lower reflector are respectively sleeved on the upper and lower parts of the fixed rod. The lower reflector reflects the light beam to the upper reflector. A connecting rod is fixed to the rear end of both the reflector and the lower reflector. The connecting rod is inserted through the fixed rod. The orientation of the upper reflector and the lower reflector can be adjusted by rotating the connecting rod.

[0008] The beam guiding device consists of a guide tube mounting base and a guide tube. The guide tube mounting base is sleeved on a fixed rod. A guide tube is installed at the front end of the guide tube mounting base. The guide tube is located below the upper reflector, and the upper reflector reflects the beam into the guide tube.

[0009] The focusing tube adjustment device consists of a focusing tube mounting frame, an adjustment shaft, and several focusing tubes. The focusing tube mounting frame is bolted to the right side of the base, and the top of the focusing tube mounting frame is rotatably mounted with an adjustment shaft and a drive shaft.

[0010] Several focusing tubes are arranged around the outside of the adjusting shaft. The leftmost focusing tube is located directly below the guide tube. The light beam reflected by the upper reflector passes through the guide tube and illuminates the focusing tube. A focusing mirror is installed inside the focusing tube. The focusing tube is located directly above the mask template. The light beam focused by the focusing mirror illuminates the mask template.

[0011] Preferably, a fixing frame is sleeved on the outer side of the guide cylinder, and an adjusting ridge is provided on the side of the fixing frame near the guide cylinder mounting seat. An adjusting groove is opened on the side of the guide cylinder mounting seat near the fixing frame, and the adjusting ridge is slidably inserted into the adjusting groove. A mounting seat locking bolt is installed on the left side of the guide cylinder mounting seat, and the mounting seat locking bolt is screwed inward to the adjusting ridge. The guide cylinder is fixed by the friction between the mounting seat locking bolt and the adjusting ridge.

[0012] Preferably, a mounting seat locking bolt is also installed on the rear side of the guide cylinder mounting seat, and the rear mounting seat locking bolt is screwed to the fixing rod. The guide cylinder mounting seat is fixed by the friction between the rear mounting seat locking bolt and the fixing rod.

[0013] Preferably, each of the plurality of condenser tubes is provided with a condenser lens of different focal length. When the condenser tubes of different focal lengths are adjusted below the guide tube, multiple sets of comparative data can be obtained. A driven gear ring is fixed at the lower part of the adjusting shaft. The driving shaft is installed on the right side of the adjusting shaft. A toothed ridge is installed on the top of the driving shaft, and the toothed ridge meshes with the driven gear ring to the left. By rotating the driving shaft, the adjusting shaft can be rotated. By rotating the adjusting shaft, the condenser tube below the guide tube can be replaced.

[0014] Preferably, the upper inner wall of the focusing tube is provided with mounting grooves at equal intervals, and the edge of the focusing lens is fixed with mounting blocks at equal intervals. The focusing lens is installed in the mounting groove of the focusing tube using the mounting blocks.

[0015] Preferably, a limiting ring is also sleeved on the fixing rod. The limiting ring is located at the bottom of the guide cylinder mounting seat, and the limiting ring supports and limits the guide cylinder mounting seat upward. A locking bolt is also provided on the limiting ring for locking.

[0016] Preferably, a reflector locking ring is sleeved at the connection position of the fixing rod and the connecting rod, and a locking bolt is screwed onto the locking ring. When the locking bolt is turned inward, it abuts against the side wall of the connecting rod, and the connecting rod is fixed by the friction between the locking bolt and the connecting rod.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] This solution provides a simple and practical beam scanning stage for object image quality inspection. The upper and lower reflectors in the support device are connected by a connecting rod that passes through a fixed rod. This design allows the orientation of the reflectors to be adjusted by rotating the connecting rod. Compared to traditional complex mechanical adjustment structures, this adjustment method is simpler and more direct, enabling rapid and precise changes in the reflector angle to adapt to different beam incident angles and reflection paths, achieving convenient angle adjustment.

[0019] The fixed rod is a telescopic rod, which allows the support device to be flexibly adjusted in height and spatial position according to different experimental environments and equipment layout requirements;

[0020] The modular condenser adjustment device features several condenser tubes arranged around the outer side of the adjustment shaft. The drive shaft engages with the toothed ribs and driven toothed ring on the adjustment shaft; rotating the drive shaft causes the adjustment shaft to rotate, thus allowing the replacement of the condenser tube below the guide tube. This design enables quick and convenient condenser tube replacement, significantly improving the efficiency of changing condenser tubes with different focal lengths during experiments compared to the traditional method of disassembling and installing condenser tubes one by one. It also provides a more efficient way to obtain multiple sets of comparative data.

[0021] The upper inner wall of the condenser tube has equidistant mounting slots, and mounting blocks are fixed equidistantly to the edge of the condenser lens. The condenser lens is then installed in the mounting slots of the condenser tube using these mounting blocks. This method of installing the condenser lens is simple and secure. Compared to some complex gluing or nesting installation methods, it is not only easier to install and disassemble, but also ensures the positional accuracy of the condenser lens within the condenser tube, which is beneficial for a stable focusing effect. Attached Figure Description

[0022] Figure 1 This is the front view of the present invention;

[0023] Figure 2 This is a right view of the present invention;

[0024] Figure 3 This is a rear view of the present invention;

[0025] Figure 4 For the present invention Figure 3 Enlarged view of a specific area;

[0026] Figure 5 This is an exploded view of the focusing tube of the present invention.

[0027] In the diagram: 10. Base; 101. Drawer slot; 102. Cover plate.

[0028] 20 Support device, 201 Fixing rod, 202 Limiting ring, 203 Upper reflector, 204 Lower reflector, 205 Reflector locking ring, 206 Connecting rod;

[0029] 30 Beam guiding device, 301 Guide tube mounting base, 302 Mounting base locking bolt, 303 Guide tube, 304 Adjusting rib;

[0030] 40 Concentrator adjustment device, 401 Concentrator mounting bracket, 402 Adjustment shaft, 403 Concentrator, 404 Driven gear ring, 405 Drive shaft;

[0031] 403-1 Condenser lens, 403-2 Mounting block, 403-3 Mounting slot. Detailed Implementation

[0032] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0034] Example:

[0035] Please see Figure 1-5 The present invention provides a beam scanning stage for object image quality detection: it consists of a base 10, a support device 20, a beam guiding device 30 and a condenser tube adjustment device 40;

[0036] A drawer slot 101 is provided on the front top of the base 10, and a mask template 102 is inserted into the drawer slot 101. A support device 20 is installed on the rear top of the base 101, and a beam guide device 30 is installed on the support device 20. A focusing tube adjustment device 40 is installed on the rear side of the base 10, and the focusing tube adjustment device 40 is located directly below the beam guide device 30.

[0037] The main body of the support device 20 is a fixed rod 201. The upper part and the lower part of the fixed rod 201 are respectively fitted with an upper reflector 203 and a lower reflector 204. The lower reflector 204 reflects the light beam to the upper reflector 203. The rear ends of the reflector 203 and the lower reflector 204 are fixed with connecting rods 206. The connecting rods 206 are inserted through the fixed rod 201. By rotating the connecting rods 206, the orientation of the upper reflector 203 and the lower reflector 204 can be adjusted. The connection position between the fixed rod 201 and the connecting rod 206 is fitted with a reflector locking ring 205. The locking ring 205 is screwed with a locking bolt. When the locking bolt is inward, it abuts against the side wall of the connecting rod 206. The connecting rod 206 is fixed by the friction between the locking bolt and the connecting rod 206.

[0038] The fixed rod 201 is a telescopic rod body. The length can be adjusted by the nested sleeve structure. It is fixed inward by the limiting ring 202 below the guide tube mounting seat 301. The locking bolt on the limiting ring 202 is screwed to the internal telescopic sleeve. The friction of the locking bolt is used to fix the telescopic sleeve to adapt to different working requirements.

[0039] The beam guiding device 30 consists of a guide tube mounting base 301 and a guide tube 303. The guide tube mounting base 301 is sleeved on the fixed rod 201. A limit ring 202 is also sleeved on the fixed rod 201. The limit ring 202 is located at the bottom of the guide tube mounting base 301 and supports and limits the guide tube mounting base 301 upwards. A locking bolt is also provided on the limit ring 202 for locking.

[0040] A guide cylinder 303 is installed at the front end of the guide cylinder mounting base 301. The guide cylinder 303 is located below the upper reflector 203, and the upper reflector 203 reflects the light beam into the guide cylinder 303.

[0041] A fixing frame is sleeved on the outer side of the guide cylinder 303. An adjusting rib 304 is provided on the side of the fixing frame near the guide cylinder mounting base 301. An adjusting groove is opened on the side of the guide cylinder mounting base 301 near the fixing frame. The adjusting rib is slidably inserted into the adjusting groove. A mounting base locking bolt 302 is installed on the left side of the guide cylinder mounting base 301. The mounting base locking bolt 302 is screwed inward to the adjusting rib 304. The guide cylinder 303 is fixed by the friction between the mounting base locking bolt 302 and the adjusting rib 304.

[0042] A mounting base locking bolt 302 is also installed on the rear side of the guide tube mounting base 301, and the rear mounting base locking bolt 302 is screwed to the fixing rod 201. The guide tube mounting base 301 is fixed by friction between the rear mounting base locking bolt 302 and the fixing rod 201.

[0043] The focusing tube adjustment device 40 consists of a focusing tube mounting frame 401, an adjustment shaft 402, and several focusing tubes 403. The focusing tube mounting frame 401 is bolted to the right side of the base 10. The adjustment shaft 402 and the drive shaft 405 are rotatably mounted on the top of the focusing tube mounting frame 401.

[0044] Several condenser tubes 403 are arranged around the outer side of the adjusting shaft 402. The leftmost condenser tube 403 is located directly below the guide tube 303. The light beam reflected by the upper reflector 203 passes through the guide tube 303 and illuminates the condenser tube 403. A condenser lens 403-1 is arranged inside the condenser tube 403. The condenser tube 403 is located directly above the mask 102. The light beam focused by the condenser lens 403-1 illuminates the mask 102.

[0045] Several condenser tubes 403 are equipped with condenser lenses 403-1 of different focal lengths. When the condenser tubes 403 of different focal lengths are adjusted to be below the guide tube 303, multiple sets of comparative data can be obtained. A driven gear ring 404 is fixed at the lower part of the adjusting shaft 402. A drive shaft 405 is installed on the right side of the adjusting shaft 402. A toothed edge is installed on the top of the drive shaft 405, and the toothed edge meshes with the driven gear ring 404 to the left. By rotating the drive shaft 405, the adjusting shaft 402 can be rotated. By rotating the adjusting shaft 402, the condenser tube 403 below the guide tube 303 can be replaced.

[0046] The upper inner wall of the condenser tube 403 is provided with mounting grooves 403-3 at equal intervals, and mounting blocks 403-2 are fixed at equal intervals on the edge of the condenser lens 403. The condenser lens 403-1 is installed in the mounting groove 403-3 of the condenser tube 403 using the mounting blocks 403-2. This layout provides a reasonable structure for beam transmission, adjustment and focusing operations.

[0047] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or basic characteristics. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of the invention is defined by the appended claims rather than the foregoing description. Therefore, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention, and no reference numerals in the claims should be construed as limiting the scope of the claims.

[0048] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A beam scanning stage for objective image quality inspection, comprising a base (10), a support device (20), a beam guiding device (30), and a condenser tube adjustment device (40), characterized in that: The base (10) has a drawer slot (101) on the front top side, and a mask template (102) is inserted into the drawer slot (101). A support device (20) is installed on the rear top side of the base (101). The beam guide device (30) is installed on the support device (20). A focusing tube adjustment device (40) is installed on the rear side of the base (10), and the focusing tube adjustment device (40) is located directly below the beam guide device (30). The main body of the support device (20) is a fixed rod (201). The upper part and the lower part of the fixed rod (201) are respectively fitted with an upper reflector (203) and a lower reflector (204). The lower reflector (204) reflects the light beam to the upper reflector (203). The rear ends of the reflector (203) and the lower reflector (204) are fixed with connecting rods (206). The connecting rods (206) are inserted through the fixed rod (201). The orientation of the upper reflector (203) and the lower reflector (204) can be adjusted by rotating the connecting rods (206). The beam guiding device (30) consists of a guide tube mounting base (301) and a guide tube (303). The guide tube mounting base (301) is sleeved on the fixed rod (201). The guide tube (303) is installed at the front end of the guide tube mounting base (301). The guide tube (303) is located below the upper reflector (203), and the upper reflector (203) reflects the beam into the guide tube (303). The focusing tube adjustment device (40) consists of a focusing tube mounting frame (401), an adjustment shaft (402), and several focusing tubes (403). The focusing tube mounting frame (401) is bolted to the right side of the base (10). The adjustment shaft (402) and the drive shaft (405) are rotatably mounted on the top of the focusing tube mounting frame (401). Several condenser tubes (403) are arranged around the outside of the adjusting shaft (402). The leftmost condenser tube (403) is located directly below the guide tube (303). The light beam reflected by the upper reflector (203) passes through the guide tube (303) and illuminates the condenser tube (403). A condenser lens (403-1) is arranged inside the condenser tube (403). The condenser tube (403) is located directly above the mask (102). The light beam focused by the condenser lens (403-1) illuminates the mask (102).

2. The beam scanning stage for objective image quality inspection according to claim 1, characterized in that: A fixing frame is sleeved on the outer side of the guide cylinder (303). An adjusting rib (304) is provided on the side of the fixing frame near the guide cylinder mounting base (301). An adjusting groove is opened on the side of the guide cylinder mounting base (301) near the fixing frame. The adjusting rib is slidably inserted into the adjusting groove. A mounting base locking bolt (302) is installed on the left side of the guide cylinder mounting base (301). The mounting base locking bolt (302) is screwed inward to the adjusting rib (304). The guide cylinder (303) is fixed by the friction between the mounting base locking bolt (302) and the adjusting rib (304).

3. A beam scanning stage for objective image quality inspection according to claim 2, characterized in that: The rear side of the guide tube mounting base (301) is also equipped with a mounting base locking bolt (302), and the rear mounting base locking bolt (302) is screwed to the fixing rod (201). The guide tube mounting base (301) is fixed by friction between the rear mounting base locking bolt (302) and the fixing rod (201).

4. A beam scanning stage for objective image quality inspection according to claim 1, characterized in that: Several condenser tubes (403) are respectively equipped with condenser lenses (403-1) with different focal lengths. When the condenser tubes (403) with different focal lengths are adjusted to be below the guide tube (303), multiple sets of comparative data can be obtained. The lower part of the adjusting shaft (402) is fixed with a driven gear ring (404). The driving shaft (405) is installed on the right side of the adjusting shaft (402). The top of the driving shaft (405) is equipped with a toothed edge, and the toothed edge meshes with the driven gear ring (404) to the left. By rotating the driving shaft (405), the adjusting shaft (402) can be driven to rotate. By rotating the adjusting shaft (402), the condenser tube (403) below the guide tube (303) can be replaced.

5. A beam scanning stage for objective image quality inspection according to claim 1 or 4, characterized in that: The upper inner wall of the condenser tube (403) is provided with mounting grooves (403-3) at equal intervals, and the edge of the condenser lens (403) is fixed with mounting blocks (403-2) at equal intervals. The condenser lens (403-1) is installed in the mounting groove (403-3) of the condenser tube (403) using the mounting blocks (403-2).

6. A beam scanning stage for objective image quality inspection according to claim 1, characterized in that: A limiting ring (202) is also sleeved on the fixing rod (201). The limiting ring (202) is located at the bottom of the guide tube mounting base (301), and the limiting ring (202) supports and limits the guide tube mounting base (301) upward. A locking bolt is also provided on the limiting ring (202) for locking.

7. A beam scanning stage for objective image quality inspection according to claim 1, characterized in that: The fixed rod (201) and the connecting rod (206) are both fitted with a reflector locking ring (205). Each locking ring (205) is screwed with a locking bolt. When the locking bolt is turned inward, it abuts against the side wall of the connecting rod (206). The connecting rod (206) is fixed by the friction between the locking bolt and the connecting rod (206).

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