A method for processing data

Abstract

The present application provides a method for processing processing data, wherein the method comprises: extracting multiple preset data tables from multiple data sources corresponding to a wafer processing process at intervals of a preset update period, wherein the multiple preset data tables are used to describe processing data pre-configured based on the wafer processing process; in response to a query operation for target query data, querying at least one processing batch matching the target query data in the multiple preset data tables; and displaying a processing status table for each processing batch in the user interaction interface.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a method for processing processing data. Background Art

[0002] In the production process of semiconductor manufacturing, the production of a product (product) and its batch (lot) must go through a set of processing flows (process flow). A set of processes consists of multiple processing steps (stages) set according to product requirements. Each processing step needs to be executed (run) in processing equipment (equipment) with corresponding capabilities (capability).

[0003] Among them, process management is usually implemented through the enterprise MES system (manufacturing execution system). Each processing step in the processing flow and its required processing equipment, formula and other information are configured on the MES system, and the product will be processed according to the set rules. In addition, all formulas are registered through the formula management system. The staff frequently switches the MES system and the formula management system to view the processing batches being processed or about to be processed, as well as the various formulas required for each processing step, so that the staff can formulate special rule processes based on actual business, and manage and allocate resources for equipment and formulas. Since there are too many execution steps in the semiconductor manufacturing process, frequent switching of systems for viewing affects work efficiency. Summary of the invention

[0004] In view of this, the purpose of the present application is to at least provide a method for processing processing data, by extracting multiple preset data tables from multiple data sources at intervals of preset update cycles, and when a query operation for target query data is received, querying at least one processing batch matching the target query data in the multiple preset data tables, and displaying the processing status table of each processing batch through a user interaction interface, thereby solving the technical problem in the prior art of requiring manual switching of different systems to view information related to the processing batch, and achieving the technical effect of improving efficiency.

[0005] This application mainly includes the following aspects:

[0006] In a first aspect, an embodiment of the present application provides a method for processing processing data, providing a user interaction interface corresponding to a wafer processing process through a terminal device, the method comprising: extracting multiple preset data tables from multiple data sources corresponding to the wafer processing process at preset update intervals, the multiple preset data tables being used to describe processing data pre-configured based on the wafer processing process; in response to a query operation for target query data, querying at least one processing batch matching the target query data in the multiple preset data tables; and displaying a processing status table for each processing batch in the user interaction interface.

[0007] Optionally, the processing status table includes display data of the target processing steps of the processing batch, and the display data includes the processing step name, the equipment capability required to execute the processing step, the equipment identification and equipment quantity of all equipment that meets the equipment capability, and the number of equipment that meets the processing conditions of the processing step, wherein the processing status table of each processing batch is displayed in the user interaction interface in the following manner: the display data of the target processing steps of the processing batch is queried in multiple preset data tables, and the display data of the target processing steps of the processing batch is displayed in the user interaction interface.

[0008] Optionally, the target query data includes at least one of the following: a processing batch identifier, a processed wafer product identifier, processing equipment capability, a processing area, and a processing procedure status, wherein the target processing step includes a current processing step or a screened processing step, the current processing step refers to the current processing step of the processing batch queried only through preset query conditions, the preset query conditions are used to indicate the query conditions when the target query data is the processing batch identifier and / or the processed wafer product identifier, and the screened processing step refers to the processing step of the processing batch queried through query conditions other than the preset query conditions.

[0009] Optionally, the method further includes: in response to a selection operation for a target processing batch, displaying a subsequent status table of the target processing batch in the user interaction interface, the subsequent status table including display data of a preset number of subsequent processing steps that are located after the current processing step in the processing flow of the target processing batch.

[0010] Optionally, the method further includes: for each processing batch, determining whether the processing data corresponding to the preset processing step of the processing batch meets the step execution condition according to the subsequent status table of the processing batch, and the preset processing step refers to at least one continuous designated processing step located after the target processing step of the target processing batch; for each processing batch, if the processing data corresponding to the preset processing step of the processing batch does not meet the step execution condition, a prompt message is displayed on the user interaction interface.

[0011] Optionally, the multiple preset data tables include at least one of the following: an equipment capability table, used to describe the capabilities of each processing equipment; an equipment basic information table, used to describe the equipment and operating status of the processing area where each processing equipment is located; a processing batch status table, used to record the data of each processing step; a processing flow data table, used to describe the multiple processing steps covered by the processing flow of different wafer products and the required recipes; an equipment constraint information table, used to store the preset constraints of each processing equipment; a recipe material table, used to store the materials and constraints covered by each recipe.

[0012] Optionally, whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined in the following manner: the preset constraints of the preset processing equipment corresponding to the preset processing steps are determined through the equipment constraint information table; and whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined through the current state of the preset processing equipment and the preset constraints of the preset processing equipment.

[0013] Optionally, whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined in the following manner: the preset formula corresponding to the preset processing steps is determined through the processing flow data table; and whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined through the preset formula and its constraints in the formula material table.

[0014] In a second aspect, an embodiment of the present application further provides an electronic device, comprising: a processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate through the bus, and the machine-readable instructions are executed by the processor to execute the steps of the processing data processing method described in the first aspect or any possible implementation manner of the first aspect.

[0015] In a third aspect, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the method for processing data described in the first aspect or any possible implementation manner of the first aspect are executed.

[0016] A method for processing processing data provided by an embodiment of the present application provides a user interaction interface corresponding to a wafer processing process through a terminal device, and the method includes: extracting multiple preset data tables from multiple data sources corresponding to the wafer processing process at intervals of a preset update cycle, and the multiple preset data tables are used to describe the processing data pre-configured based on the wafer processing process; in response to a query operation for target query data, querying at least one processing batch matching the target query data in the multiple preset data tables; and displaying a processing status table for each processing batch in the user interaction interface. By extracting multiple preset data tables from multiple data sources at intervals of a preset update cycle, querying at least one processing batch matching the target query data in multiple preset data tables when a query operation for the target query data is received, and displaying a processing status table for each processing batch through a user interaction interface, the technical problem of the prior art that it is necessary to manually switch different systems to view information related to the processing batch is solved, and the technical effect of improving efficiency is achieved.

[0017] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the attached drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A flow chart of a method for processing data provided in an embodiment of the present application is shown.

[0020] Figure 2 A functional module diagram of a processing device for processing data provided in an embodiment of the present application is shown.

[0021] Figure 3 A schematic structural diagram of an electronic device provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0022] To make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It should be understood that the drawings in the present application only serve the purpose of explanation and description and are not used to limit the scope of protection of the present application. In addition, it should be understood that the schematic drawings are not drawn in real proportion. The flowchart used in this application shows the operations implemented according to some embodiments of the present application. It should be understood that the operations of the flowchart can be implemented out of sequence, and the steps without logical context can be reversed in order or implemented simultaneously. In addition, those skilled in the art, under the guidance of the content of the present application, can add one or more other operations to the flowchart, or remove one or more operations from the flowchart.

[0023] In addition, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0024] In the existing technology, the production process of wafers is complicated and numerous, with dozens of major categories such as lithography, etching, and diffusion, and hundreds of subcategories. Secondly, there are many production steps, with an average of more than 400 steps, and some even more than 1,000, which leads to a long process of formulating the process. A wafer processing factory may have an average of 3,000 batches to be produced every day, and there may be more than 800 batches of higher priority, so there are a large number of batches that need to be planned and managed. In addition, the equipment may be affected by constraints on each other, resulting in some equipment being unable to actually produce products. At the same time, equipment failures and product process adjustments may also lead to production waiting or equipment idleness, which affects production efficiency. Finally, the costs of manpower, materials, equipment, energy, etc. involved in the processing process are high. It is normal for new product tape-outs to cost tens of millions, and the production process does not have so many fault-tolerant opportunities.

[0025] At present, if administrators need to manage production in a special way due to business needs, they can only do so through the basic operations of the company's MES system. However, production ultimately serves business needs, and special needs or changes require production processes outside the "rules", such as some products that require urgent replenishment when the delivery date is approaching, some products that frequently change process steps during the R&D period, and some products that require restrictions on designated equipment due to quality requirements. Find the batch number of the batch where the target product is located in the MES system, check the current processing steps and unexecuted processing steps in the processing flow according to the batch number, and find processing equipment that meets the capacity in accordance with the current processing steps or unexecuted processing steps, and occupy the processing equipment in advance or contact the relevant departments for negotiation and adjustment based on the equipment resources. Among them, searching for steps on the MES system takes up most of the operation time, and because there are many processing steps, it will cause repeated work and consume a lot of time. At the same time, the setting of the previous and next steps cannot guarantee the optimal choice.

[0026] Based on this, the embodiment of the present application provides a method for processing processing data, which extracts multiple preset data tables from multiple data sources at intervals of preset update cycles, queries at least one processing batch matching the target query data in multiple preset data tables when a query operation for target query data is received, and displays a processing status table for each processing batch through a user interaction interface, thereby solving the technical problem in the prior art of manually switching different systems to view relevant information of the processing batch, and achieving the technical effect of improving efficiency, which is specifically as follows:

[0027] See also Figure 1 , Figure 1 A flowchart of a method for processing data provided by an embodiment of the present application. Figure 1 As shown, the processing method of processing data provided in the embodiment of the present application includes the following steps:

[0028] S101: extracting a plurality of preset data tables from a plurality of data sources corresponding to wafer processing techniques at intervals of a preset update period.

[0029] Among them, the user interaction interface corresponding to the wafer processing technology is provided by the terminal device. The terminal device mainly refers to a terminal used to provide the user interaction interface and can respond to the user's operation performed on the user interaction interface. The terminal device may include but is not limited to any one of the following devices: laptops, smart phones, tablet computers, desktop computers, game consoles, MP4 (Moving Picture Experts Group Audio Layer IV, dynamic image expert compression standard audio layer 4) players, personal digital assistants (PDAs), e-book readers, etc. The terminal device has an application program that supports the method of the present application installed and running.

[0030] Among them, the user interaction interface is an interface display format for communication between people and computers, allowing users to manipulate icons, logos or menu options on the screen using input devices such as a mouse or keyboard, and also allowing users to manipulate icons or menu options on the screen by performing touch operations on the touch screen of a touch terminal to select commands, start programs or perform other tasks.

[0031] Specifically, multiple preset data tables are used to describe the processing data pre-configured based on the wafer processing technology. The multiple preset data tables include at least one of the following: an equipment capability table, which is used to describe the capabilities of each processing equipment; an equipment basic information table, which is used to describe the processing area equipment and operating status of each processing equipment; a processing batch status table, which is used to record the data of each processing step; a processing flow data table, which is used to describe the multiple processing steps and the required formulas covered by the processing flow of different wafer products; an equipment constraint information table, which is used to store the preset constraints of each processing equipment; and a formula material table, which is used to store the materials and constraints covered by each formula.

[0032] Exemplarily, the capabilities of each processing equipment described in the equipment capability table include photolithography, etching, thin film, etc.; the equipment basic information table stores the physical location of each processing equipment, such as an area in a workshop, and the operating status of the processing equipment includes under maintenance, in operation, shut down, etc.; the processing batch status table includes the processing batch identification, name, production data of each production stage, priority, number of processed pieces, stacking time, etc.; the equipment constraint information table displays at least one preset constraint for each processing equipment, each processing equipment corresponds to a processing equipment identification, and each preset constraint corresponds to a constraint identification. Then, the processing equipment identification and the constraint identification are combined to uniquely limit a constraint of a processing equipment. A constraint has an enabled state and a disabled state, and its effective time range can be set. For example, Article 5 set for device A The constraint is to limit the production of a certain product B to x hours, which means that the equipment only supports the production of product B for x hours, and after x hours, the fifth constraint becomes invalid, and the equipment can produce other products; the recipe material table describes the raw materials required to execute each processing step. A fixed material combination is a recipe RECIPE. Each recipe corresponds to a recipe ID, and all recipes are registered in the recipe management system. Since different recipes have different effects on equipment and products in production, in order for the equipment to meet the production conditions, in addition to having the corresponding capability, it is also necessary to configure the constraints and processing equipment that allow the use of the corresponding recipe, that is, mark the application environment and other restrictions for each recipe and identify the applied processing equipment ID, which means that the recipe is allowed to execute the production steps on the processing equipment.

[0033] Among them, the formula can use historical formulas. For example, a fixed volume of pure water used in the cleaning step is also a formula, which will be used multiple times in different products. If this type of historical formula has not expired in the formula management system, there is no need to re-register the formula material list in the formula management system; there can also be no constraint adjustment, and not setting constraints does not affect the normal production of a batch.

[0034] The method also includes: displaying multiple preset data tables on the user interaction interface. Exemplarily, the preset update cycle is 5 minutes, and the multiple data sources include an MES system (manufacturing execution system) and a recipe management system. That is, every five minutes, a pre-configured equipment capability table, equipment basic information table, processing batch status table, processing flow data table, and equipment constraint information table are extracted from the MES system, and a recipe material table is extracted from the recipe management system, so that the extracted multiple preset data tables are displayed in the user interaction interface, so that the user can view the required preset data tables.

[0035] For example, a combination of HTML (Hypertext Markup Language, a markup language for creating web page structure and content), CSS (Cascading Style Sheets, a language for setting web page style and layout), and JavaScript (a scripting language for adding interactive and dynamic effects to web pages) is selected as the front-end development language, and axios (a front-end and back-end protocol communication framework tool), handsontable (an Excel-like spreadsheet tool), and layui (a front-end interface framework tool) are combined for front-end development to develop user interaction pages. Oracle database system is selected, and Java language is selected as the server-side programming language to realize the function of front-end and back-end data transmission, and Spring Boot rapid development platform is combined to encapsulate JAR files; kettle is selected as the design tool for ETL (Extract Transform Load) jobs, and Tank is used as the scheduling platform for ETL jobs; network and database access qualifications are opened and port management is performed. DBeaver (database development tool) is used to display various tables in the local database, including the fields to be used and simple comments.

[0036] For example, by using SQL language for development on kettle, multiple preset data tables are stored in the local database, that is, the preset data tables corresponding to the MES system and the recipe management system are stored one by one in the local database. Through the Tank scheduling platform, multiple preset data tables are extracted from multiple data sources at intervals of 5 minutes each time in incremental mode to automatically maintain the preset data tables in the local database.

[0037] In addition, when the wafer processing company determines to produce a product, it updates the corresponding preset data table by operating the MES system, such as the newly added processing batch identification, processing product identification, processing quantity and other related production information. In this way, when the extraction time arrives, the updated preset data table on the MES is automatically extracted through the data port of the MES system and loaded into the local database.

[0038] S102: In response to a query operation on target query data, query the plurality of preset data tables to find at least one processing batch matching the target query data.

[0039] Specifically, the user interaction interface includes a query box and a query identifier corresponding to the target query data, wherein the target query data includes at least one of the following: a processing batch identifier, a processed wafer product identifier, a processing equipment capability, a processing area, and a processing process status.

[0040] Exemplarily, the query box corresponding to the processing batch identification is an input box, which is used to enter the processing batch identification in the input box of the processing batch identification to query the processing batch, and the processing batch number can be represented by sequentially increasing numbers; the query box corresponding to the processing wafer product identification is an input box, which is used to enter the processing wafer product in the input box of the processing wafer product identification to query the processing wafer product, and the processing wafer product identification can be set according to the specifications and names of the wafer products to be processed; the query box corresponding to the processing equipment capability is a drop-down box, and the drop-down box displays the capabilities of all equipment, including lithography, etching, thin film, etc.; the query box corresponding to the processing area is a drop-down box, and the drop-down box displays the processing areas in all physical locations where all equipment are located; the query box corresponding to the processing procedure progress status is a drop-down box, and the drop-down box displays all process statuses of the processing batch, including running, waiting status (processing batches that stop running due to lack of recipe or equipment maintenance during operation), non-running status (processing batches whose first processing step has not been executed), etc.

[0041] Exemplarily, when a processing batch identifier is input in a query box corresponding to the processing batch identifier, it is used to indicate that various data corresponding to the input processing batch identifier are determined by querying multiple preset data tables, and the input processing batch identifier is used as the processing batch matching the target query data; when a processed wafer product identifier is input in a query box corresponding to the processing batch identifier, it is used to indicate that at least one processing batch for producing the processed wafer product corresponding to the processed wafer product identifier is determined by querying multiple preset data tables, and at least one processing batch matching the target query data is obtained; when equipment capacity is selected in a drop-down box corresponding to processing equipment capacity, it is used to indicate that at least one processing batch requiring the equipment capacity for the processing step is determined by querying multiple preset data tables, and at least one processing batch matching the target query data is obtained; when a processing area is selected in a drop-down box corresponding to a processing area, it is used to indicate that at least one processing batch matching the target query data is obtained by querying the equipment capacity of at least one processing equipment that needs to be located in the processing area; when a process status is selected in a drop-down box corresponding to a processing step process status, it is used to indicate that at least one processing batch matching the target query data is obtained by querying at least one processing batch that needs to be in the process status.

[0042] Among them, you can select at least one query box corresponding to the target query data from the processing batch identification, processing wafer product identification, processing equipment capacity, processing area and processing procedure status for input or selection, and select the processing batches that meet the input query conditions at the same time through multiple preset data tables. When the entered query conditions are contradictory, it will be displayed that no query is found, or the query box is given priority as the target query data of the input box for query. This application does not limit this.

[0043] Exemplarily, the user interaction interface also includes a query button, and a query operation on the target query data is implemented in response to a click operation on the query button, wherein the click operation can be implemented by a mouse, a keyboard, etc.

[0044] Exemplarily, when the target query data is the processed wafer product identification and the processing equipment capability, and the processing equipment capability is selected as lithography, the processing flow of the processed wafer product identification is determined by querying the processing flow data table, and it is determined whether there are processing steps that need to perform lithography in the processing flow. If there are no processing steps that need to perform lithography, it is displayed that it is not retrieved. If there are processing steps that need to perform lithography, at least one processing batch corresponding to the corresponding production of the processed wafer product identification is found in the processing batch status table, and at least one processing batch is displayed in the user interaction interface.

[0045] Exemplarily, if dark field monitoring is selected in the processing equipment capabilities, at least one processing batch that includes the processing capabilities of dark field detection is screened out, and the at least one processing batch can preferentially display the processing batches of the processing equipment that is undergoing dark field monitoring, and then display the processing batches of the processing equipment that needs to be subsequently subjected to dark field monitoring, and the processing batches of the processing equipment that has already performed dark field monitoring may not be displayed.

[0046] Exemplarily, the target query data is allowed to be empty. When the target query data is empty, data that does not meet the requirements will not be excluded according to the condition value.

[0047] S103: Displaying a processing status table of each processing batch in the user interaction interface.

[0048] Wherein, the processing status table includes display data of the target processing steps of the processing batch, and the display data includes the processing step name, the equipment capacity required to execute the processing step, the equipment identification and equipment quantity of all equipment that meets the equipment capacity, and the number of equipment that meets the processing conditions of the processing step. Wherein, the processing status table of each processing batch is displayed in the user interaction interface in the following manner: the display data of the target processing steps of the processing batch is queried in multiple preset data tables, and the display data of the target processing steps of the processing batch is displayed in the user interaction interface.

[0049] That is, the processing status table displays the processing step name of the target processing step corresponding to each processing batch, the equipment capacity required to execute the processing step, the equipment identification and equipment quantity of all equipment that meets the equipment capacity, and the number of equipment that meets the processing conditions of the processing step. The displayed data may also include the priority of the processing batch. The priority of the processing batch is used to describe the urgency of production for the processing batch. The higher the priority of the processing batch, the more priority the processing batch should be executed. In addition, a processing batch corresponds to a piece of data in the processing status table, and the display data of the processing batch is reflected by a piece of data.

[0050] Exemplarily, when the target query data is the processing batch identification and the processing equipment capacity, and the selected processing equipment capacity is lithography, the processing batch status table is queried to find out the processing wafer product corresponding to the input processing batch identification, the current processing step being executed, and the production data corresponding to the previous processing step before the current processing step, and other information, and the processing flow corresponding to the processed wafer product is determined through the processing flow data table, and the processing steps that have not been executed are determined through the processing flow, and it is determined whether the entire processing flow includes the lithography step. If the lithography step is included, it can be displayed in the user interaction The interface displays the processing step name (photolithography) corresponding to the lithography step under the processing batch identification, the equipment capability (photolithography capability) required to execute the processing step, and the equipment identification (the identification of at least one photolithography machine) and equipment quantity (the number of all photolithography machines) of all equipment with lithography capability are queried through the equipment capability table. The recipe required for the lithography step of the processing batch identification is queried through the processing flow data table, the recipe constraints are queried through the recipe material table, and the lithography steps required for the wafer processing product and the number of equipment that meets the recipe constraints are queried through the equipment constraint information table.

[0051] Among them, the target processing step includes a current processing step or a screening processing step, the current processing step refers to the current processing step of a processing batch queried only through preset query conditions, the preset query conditions are used to indicate the query conditions when the target query data is the processing batch identifier and / or the processed wafer product identifier, and the screening processing step refers to the processing step of a processing batch queried through query conditions other than the preset query conditions.

[0052] That is to say, the processing batch identification and / or the processed wafer product identification can locate the processing batch more directly, and there are no restrictions on the processing equipment capacity, processing area and processing process status, and there are no special restrictions on the processing steps. Therefore, it is only necessary to display the display data of the current processing steps of the queried processing batch. When the target query data is the processing batch identification, it is necessary to display the display data of the current processing steps of the input processing batch identification. When the target query data is the processing batch identification and the processing wafer product identification, it is necessary to display the display data of the current processing steps of the processing batch of the input processing wafer product identification. When the target query data is the processing batch identification and the processing wafer product identification, it is necessary to display the display data of the current processing steps of the processing batch that conforms to the input processing batch identification and the processing wafer product identification.

[0053] That is to say, when the target query data is a case where only the processing batch identification and / or the processing wafer product identification is input, at least one of the processing equipment capability, processing area and processing procedure progress status will be limited, thereby limiting the processing steps, such as limiting the processing steps that require the input processing equipment capability, limiting the processing steps corresponding to the processing equipment that meets the processing area, and limiting the processing steps corresponding to the processing equipment in the selected processing procedure progress status. Furthermore, it is necessary to display the display data of the filtered processing steps limited by the target query data.

[0054] Exemplarily, when the input processing equipment capability is lithography, at least one processing batch that needs to execute the lithography step is determined, and the lithography steps corresponding to the at least one processing batch are taken as target processing steps, and display data of the lithography steps corresponding to the at least one processing batch are displayed.

[0055] Exemplarily, when the input processing procedure process status is running, at least one processing batch that is running needs to be displayed, and the target processing step displayed at this time is the current processing step of each processing batch; when the input processing procedure process status is waiting, at least one processing batch in waiting state needs to be displayed, and the target processing step displayed at this time is the processing step in waiting state of each processing batch.

[0056] For example, by inputting the target query data for screening, it can be clearly checked whether each processing batch will arrive at a certain device at the same time, causing a large number of processing batches of the processing steps related to the device to wait, and whether there is no subsequent processing step that requires the processing equipment, resulting in the equipment being idle. If the processing equipment is vacant or the number is small, then if the low-priority or slow-processing processing batches enter the processing equipment first for processing, whether it will cause the high-priority or fast-processing processing batches that need the processing equipment to wait, so that the user can perform scheduling processing in advance by checking the processing status table.

[0057] The method also includes: in response to a selection operation for a target processing batch, displaying a subsequent status table of the target processing batch in the user interaction interface, the subsequent status table including display data of a preset number of subsequent processing steps that are located after a current processing step in the processing flow of the target processing batch.

[0058] That is, the selection operation is performed on at least one processing batch in the processing status table, and the selection operation on the target processing batch in the at least one processing batch in the processing status table can be realized by clicking the mouse, pressing the keyboard, etc. Thus, display data of a preset number of subsequent processing steps in the processing flow of the target processing batch of the target processing batch after the current processing step is displayed in the user interaction interface.

[0059] Exemplarily, if the current processing step of the target processing batch is also step 10, the display data of the 10 subsequent processing steps after step 10 (steps 11 to 21) are displayed in the processing status table. One subsequent processing step corresponds to one piece of data in the subsequent status table, and the piece of data shows the display data of one subsequent processing step. The subsequent status table is arranged from top to bottom in the order of execution of the unexecuted subsequent processing steps. Therefore, it is convenient for the staff to view the equipment and other information required for the subsequent processing steps through the subsequent status table, so as to schedule them before the subsequent processing steps are actually executed, thereby preventing the target processing batch from being unable to execute the subsequent processing steps.

[0060] The method also includes: for each processing batch, determining whether the processing data corresponding to the preset processing step of the processing batch meets the step execution condition according to the subsequent status table of the processing batch, wherein the preset processing step refers to at least one continuous designated processing step located after the target processing step of the target processing batch; for each processing batch, if the processing data corresponding to the preset processing step of the processing batch does not meet the step execution condition, a prompt message is displayed on the user interaction interface.

[0061] Among them, the preset processing step refers to at least one continuous designated processing step after the target processing step of the target processing batch, and the designated processing step refers to a processing step after the target processing step. Exemplarily, the preset processing step refers to three processing steps after the target processing step. If the target processing step is step 10, the preset processing step refers to steps 11 to 13. The preset processing step can also indicate that three processing steps are taken after the target processing step with an interval of one processing step. If the target processing step is step 10, the preset processing step refers to steps 12 to 14 to prevent a lack of time for scheduling, so one processing step can be left vacant. Furthermore, it is only necessary to set the preset processing step to be at least one continuous processing step after the target processing step. The preset processing step may not be continuous with the target processing step, nor does it need to be all processing steps after the target processing step.

[0062] Among them, the step execution condition is used to describe whether the processing step can be executed. Through multiple preset data tables, it is checked whether the preset processing step meets its corresponding step execution condition, for example, whether the equipment required for the processing step meets the constraint conditions, whether the formula does not correspond to the processing equipment, whether the formula is in the formula material table, etc., and the step execution condition required for each step can be set.

[0063] For example, if the preset processing step indicates that a device with photolithography capability is required to execute, and there are two devices with this capability registered, the preset processing step displays the device identifications of the two photolithography machines, but because the recipe for the photolithography step is not configured in the processing step, and the two devices are not configured with the recipe for executing the photolithography step, the execution conditions of the step are not met, and the photolithography step cannot be executed. Furthermore, when the photolithography step is carried out, the processing batch will temporarily enter a waiting state because there is no qualified equipment to execute production, and the staff needs to coordinate to configure the corresponding recipe for the photolithography machine so that the photolithography steps of the processing batch can be executed continuously. Furthermore, it is necessary to display a prompt message on the user interaction interface to prompt the staff to process the processing steps that do not meet the step execution conditions.

[0064] Whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined in the following manner: the preset constraints of the preset processing equipment corresponding to the preset processing steps are determined through the equipment constraint information table; and whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions is determined through the current state of the preset processing equipment and the preset constraints of the preset processing equipment.

[0065] Exemplarily, the preset constraints of the device B required for the preset processing step include that the current cumulative number of wafers in operation is less than or equal to 500. This constraint is set for reasons such as protecting the device, ensuring product quality, and special management production needs. This constraint is due to the need for component replacement and overhaul of the device after running 500 wafers. That is to say, after the cumulative number of wafers in operation of the device reaches 500, the current state information of the device will be 500, and it is determined that the step execution condition is not met when running to the preset processing step. Then, at this time, prompt information for the preset processing step and device B will be displayed on the user interaction interface to prompt the staff to promote the maintenance of the equipment. After the parts are updated to complete the maintenance of the equipment, the current cumulative number of wafers of the equipment will be cleared, and the condition value of less than or equal to 500 is reached, and the preset processing step can be run. The constraint can also be removed by changing the device constraint information table to skip the operation of this constraint. Since these special situations are taken into consideration when setting the constraint conditions, some fault tolerance space is often left. These fault tolerance spaces ensure that batches with special needs can be safely completed without damaging the equipment and ensuring product quality.

[0066] Determine whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions in the following manner: determine the preset formula corresponding to the preset processing steps through the processing flow data table; determine whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions through the preset formula and its constraints in the formula material table.

[0067] Exemplarily, it is possible to first determine whether there is a preset formula corresponding to the preset processing step in the formula material table. If there is no preset formula corresponding to the preset processing step, it also means that the step execution condition is not met, and a prompt message indicating that there is no preset formula that meets the processing step is required. Among them, after the production process of each product is determined, the formula used in a specific step is fixed. For example, if the preset formula of the preset processing step is 1500 ml of 40% hydrogen chloride aqueous solution, after process optimization, or based on test results when it is taken out for observation midway, or based on other cost considerations, 1750 ml of 38% hydrogen chloride aqueous solution is used instead, and it is only modified into a formula in the processing flow data table, but the formula material table is not added, then a prompt message indicating that there is no preset formula that meets the processing step is required.

[0068] Exemplarily, if there is a preset recipe corresponding to a preset processing step, it is determined whether the processing equipment executing the step meets the constraints of the recipe, that is, it is possible to check whether there is processing equipment matching the step according to the schedule of each processing batch. If there is no processing equipment matching the step due to the constraints of the preset recipe, it is necessary to send a prompt message that no processing equipment meets the constraints of the recipe. For example, the constraints of equipment C and equipment D are that only products below 1000 degrees are allowed to be processed, and equipment E is allowed to process products above any temperature. If the processing environment requirement of the formula materials used in batch number 1 is 900 degrees, the processing environment requirement of the formula materials used in batch number 2 is 900 degrees, the processing environment requirement of the formula materials used in batch number 3 is 900 degrees, the processing environment requirement of the formula materials used in batch number 4 is 1100 degrees, the processing environment requirement of the formula materials used in batch number 5 is 900 degrees, and the processing environment requirement of the formula materials used in batch number 6 are all 900 degrees, then the batches are sorted according to the actual construction schedule to obtain the aforementioned batch number sequence and execute this step in sequence. Batches 1 to 3 will enter equipment C, equipment D, and equipment E respectively for processing and make reservations for occupancy before entering equipment C, equipment D, and equipment E. When it is the turn of equipment 4, it cannot be used because equipment E has been occupied. As a result, a prompt message will be issued that there is no processing equipment that meets the constraints of the preset formula. Furthermore, the staff can arrange for batch number 1 to reserve equipment C, batch number 2 to reserve equipment D, and batch number 4 to reserve equipment E, to prevent equipment E from processing the products of batch number 3 first, which will cause batch number 4 to wait for equipment E regardless of whether equipment C and equipment D are idle, while batch number 3 can wait for equipment C and equipment D. The number of equipment that batch number 3 waits for is larger, which reduces the execution time of all batches. That is, the processing order of the adjusted batch numbers is 1, 2, 4, 3, 5, 6, and the processing order of the batch numbers that have not been adjusted is 1, 2, 3, 5, 6, 4, which results in a later end time for batch 4, which has a greater impact on the actual completion time of the project. Obviously, the adjusted execution order is closer to the ideal completion order of the project 123456.

[0069] Furthermore, in the prior art, due to the enterprise production network management strategy, only some servers are allowed to access production data. The present application can simultaneously extract multiple preset data tables from multiple data sources to have a more independent environment and loose resources; increase efficiency and user experience. After the extraction and analysis themselves implement fixed ETL scheduling, the query efficiency of the front-end accessing the target table is higher than that of directly accessing the source data table; prevent the modeling and use direction of the preset data table of the data source itself from being based on production business and cannot fully meet the actual production preparation needs. Through query, data of the processing batch steps that are more in line with the production arrangement can be provided.

[0070] Furthermore, this application reduces the time spent on switching multiple data sources for searching, and improves work efficiency. In traditional MES tools, data is displayed independently, the search steps are too cumbersome, and too many interface jumps make it impossible to effectively form an effective information matrix, making it even more difficult to make decisions on multiple product batches. This system associates the data, and one interface can summarize and display all the information that needs to be paid attention to in this configuration management. Manual multi-step retrieval is no longer required, which can greatly improve work efficiency.

[0071] In addition, the data displayed on the platform can be used to intervene in planning management earlier, reducing production waiting time and improving factory production capacity. Production waiting time is directly related to production efficiency. The longer the waiting time, the longer the idle time caused by unreasonable planning, and the lower the daily output. The tool can directly display the 50 processing steps that the product needs to execute in the future on the interface, that is, from the moment of search, within three days at the shortest and ten days at the longest, the equipment resources required for product production can be mastered at this moment. For some production waiting caused by missing configuration formulas or equipment resources not being released in time, the administrator can intervene earlier to contact relevant engineers to solve the problem, which can reduce the situation where many unnecessary batches enter the waiting state.

[0072] In addition, the resource allocation of this application is more reasonable. When managing resources, administrators often only focus on the current product batches, that is, as long as there are equipment available, which makes it easier for some tight equipment resources to be occupied by some regular production batches, just like minor illnesses in a hospital occupying expert appointments for difficult and complicated diseases. When you have a more macro perspective, you can push for the earlier release of ordinary equipment resources or adjust production plans, so that those tight and scarce equipment resources can be used for products with more complex production requirements or higher priorities.

[0073] This application displays data to facilitate staff to adjust the batch execution order based on business, cost and other comprehensive factors. For example, lots with approaching delivery dates or high priorities often need to be given the green light all the way. For multiple batches produced at the same time, such as furnace tubes, it is also necessary to choose whether to speed up the following batches to catch up with this tube, or to slow down the following batches to match the start time of the next tube according to the actual scenario. The ideal situation is that multiple batches of the maximum capacity of a single tube arrive at the same time without waiting for each other to achieve the highest efficiency; the other is to follow the high requirements of first making constraints to select equipment.

[0074] This application facilitates the staff to handle multiple demands more efficiently and set constraints more reasonably by displaying data. When there is a high-priority product that requires a low waiting time to complete processing output, the administrator's practice is usually to establish equipment constraints for this demand, so that this equipment only allows this product to run during this period of time. Especially when equipment resources are tight, and products with the same high priority can only be forced to wait for the constraint to fail to automatically release equipment resources at this time, or the administrator intervenes to check the current execution status of the former and find free time to temporarily fill in the latter. When the tool displays the next 50 steps, for those devices that have been occupied for a long time, the administrator can allocate the time period that will not be used to other products for production in advance based on the production situation of the batch occupying this equipment, while leaving enough fault tolerance space, and reserve production windows for other product batches when setting constraints, thereby reducing the overall production waiting time.

[0075] Assume that batch number 1 has a high priority and an urgent production task, and needs to be completed within three days. If batch number 1 needs to occupy equipment A in the first step of the execution process, you can set a preset constraint on equipment A so that equipment A can only process batch number 1. In actual production, it can be estimated that batch number 1 will only occupy equipment A for 1 day, so there is no need to set the constraint on equipment A for 3 days. Just set it for one day, so that equipment A can only process batch number 1 within 1 day. In this way, equipment A can continue to process other batches on the second day, instead of using equipment A on the fourth day. The overall constraint design will be more reasonable.

[0076] Finally, this application can provide a reference for equipment purchase management, etc. by displaying data. The problem of production waiting time can be alleviated by increasing equipment resources. In the past, equipment resource management and allocation made it difficult to distinguish whether some production waiting scenarios were caused by insufficient equipment or inefficient and unreasonable planning. However, increasing equipment resources requires a supporting basis, and the wooden barrel can only achieve twice the result with half the effort if the real shortcomings are filled. After combining tools to improve the level of management planning, most unnecessary waiting scenarios have been resolved, and production waiting time has become more and more related to the equipment resources themselves. There is a basis for equipment purchase management, and higher production capacity can be achieved at a lower cost.

[0077] Based on the same application concept, the embodiments of the present application also provide a processing device for processing data corresponding to the processing method for processing data provided in the above embodiments. Since the principle of solving the problem by the device in the embodiments of the present application is similar to the processing method for processing data in the above embodiments of the present application, the implementation of the device can refer to the implementation of the method, and the repeated parts will not be repeated.

[0078] like Figure 2 As shown, Figure 2A functional module diagram of a processing data processing device provided in an embodiment of the present application. The processing data processing device 10 includes: an extraction module 101, which is used to extract multiple preset data tables from multiple data sources corresponding to the wafer processing process at intervals of a preset update cycle, and the multiple preset data tables are used to describe the processing data pre-configured based on the wafer processing process; a query module 102, which is used to respond to a query operation for target query data and query at least one processing batch matching the target query data in the multiple preset data tables; a display module 103, which is used to display the processing status table of each processing batch in the user interaction interface.

[0079] Based on the same application concept, see Figure 3 As shown, it is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application, the electronic device 20 includes: a processor 201, a memory 202 and a bus 203, the memory 202 stores machine-readable instructions executable by the processor 201, when the electronic device 20 is running, the processor 201 communicates with the memory 202 through the bus 203, and the machine-readable instructions are executed by the processor 201 when running, as in the steps of the processing method for processing data described in any of the above embodiments.

[0080] Specifically, when the machine-readable instructions are executed by the processor 201, the following processing can be performed: extracting multiple preset data tables from multiple data sources corresponding to the wafer processing process at preset update period intervals, and the multiple preset data tables are used to describe processing data pre-configured based on the wafer processing process; in response to a query operation on target query data, querying at least one processing batch matching the target query data in the multiple preset data tables; and displaying a processing status table for each processing batch in the user interaction interface.

[0081] Based on the same application concept, an embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the processing method for processing data provided in the above embodiment are executed.

[0082] Specifically, the storage medium can be a general storage medium, such as a mobile disk, a hard disk, etc. When the computer program on the storage medium is run, it can execute the above-mentioned processing data processing method, extract multiple preset data tables from multiple data sources at intervals of a preset update cycle, and when a query operation for target query data is received, query at least one processing batch matching the target query data in multiple preset data tables, and display the processing status table of each processing batch through a user interaction interface, thereby solving the technical problem in the prior art of requiring manual switching of different systems to view processing batch related information, and achieving the technical effect of improving efficiency.

[0083] Those skilled in the art can clearly understand that, for the convenience and simplicity of description, the specific working process of the system and device described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here. In the several embodiments provided in the present application, it should be understood that the disclosed system, device and method can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some communication interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0084] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0085] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0086] If the function is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a non-volatile computer-readable storage medium that is executable by a processor. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art or the part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, server, or network device, etc.) to execute all or part of the steps of the method described in each embodiment of the present application. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk, and other media that can store program codes.

[0087] The above are only specific implementations of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

Claims

1. A method for processing processed data, characterized in that: Providing a user interaction interface corresponding to a wafer processing process through a terminal device, the method comprising: Extracting multiple preset data tables from multiple data sources corresponding to the wafer processing technology at preset update intervals, the multiple preset data tables are used to describe processing data pre-configured based on the wafer processing technology, wherein the multiple data sources include a production execution system and a recipe management system, the preset data tables corresponding to the production execution system include pre-configured equipment capability tables, equipment basic information tables, processing batch status tables, processing flow data tables, and equipment constraint information tables, and the preset data tables corresponding to the recipe management system include extracted recipe material tables; In response to a query operation on the target query data, querying at least one processing batch matching the target query data in the plurality of preset data tables; A processing status table for each processing batch is displayed in the user interaction interface, the processing status table including display data of a target processing step of the processing batch, the display data including a processing step name, a device capability required to execute the processing step, device identifiers and device quantities of all devices that meet the device capability, and a device quantity that meets the processing conditions of the processing step; The processing status table of each processing batch is displayed in the user interaction interface in the following manner: Searching for display data of the target processing step of the processing batch in a plurality of preset data tables, and displaying the display data of the target processing step of the processing batch in the user interaction interface; The target query data includes at least one of the following: a processing batch identifier, a processed wafer product identifier, processing equipment capability, a processing area, and a processing procedure status, wherein the target processing step includes a current processing step or a screened processing step, the current processing step refers to the current processing step of the processing batch queried only through a preset query condition, the preset query condition is used to indicate the query condition when the target query data is the processing batch identifier and / or the processed wafer product identifier, and the screened processing step refers to the processing step of the processing batch queried through a query condition other than the preset query condition.

2. The method according to claim 1, characterized in that The method further comprises: In response to a selection operation for a target processing batch, a subsequent status table of the target processing batch is displayed in the user interaction interface, wherein the subsequent status table includes display data of a preset number of subsequent processing steps in the processing flow of the target processing batch that are located after the current processing step.

3. The method according to claim 2, characterized in that The method further comprises: For each processing batch, determining whether the processing data corresponding to the preset processing step of the processing batch meets the step execution condition according to the subsequent state table of the processing batch, wherein the preset processing step refers to at least one continuous designated processing step located after the target processing step of the target processing batch; For each processing batch, if the processing data corresponding to the preset processing steps of the processing batch does not meet the step execution conditions, a prompt message is displayed on the user interaction interface.

4. The method according to claim 3, characterized in that The multiple preset data tables include at least one of the following: an equipment capability table, used to describe the capability of each processing equipment; an equipment basic information table, used to describe the processing area equipment and operation status of each processing equipment; a processing batch status table, used to record the data of each processing step; a processing flow data table, used to describe the multiple processing steps and the required recipes covered by the processing flow of different wafer products; an equipment constraint information table, used to store the preset constraints of each processing equipment; The recipe material table is used to store the materials and constraints covered by each recipe.

5. The method according to claim 4, characterized in that Determine whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions in the following ways: Determining preset constraints of preset processing equipment corresponding to preset processing steps through the equipment constraint information table; Through the current state of the preset processing equipment and the preset constraints of the preset processing equipment, it is determined whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions.

6. The method according to claim 5, characterized in that Determine whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions in the following ways: Determining a preset recipe corresponding to a preset processing step through the processing flow data table; Through the preset formula and its constraint conditions in the formula material table, it is determined whether the processing data corresponding to the preset processing steps of the processing batch meets the step execution conditions.

7. An electronic device, characterized in that: include: A processor, a memory and a bus, wherein the memory stores machine-readable instructions executable by the processor, and when the electronic device is running, the processor and the memory communicate via the bus, and the machine-readable instructions are executed by the processor to execute the steps of the method for processing data as described in any one of claims 1 to 6.

8. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of the method for processing processed data according to any one of claims 1 to 6 are executed.

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