Detection device for automatically detecting whether Thivik is placed or not

Abstract

The invention relates to the field of semiconductor sealing inspection, and discloses a detection device for automatically detecting whether Thivik is placed or not, the detection device comprises a workbench, a detection mechanism and a tray limiting mechanism, and the workbench is provided with a display and a touch controller for real-time monitoring and operation; the aluminum back frame and the track ensure the stability and accurate movement of the detection mechanism, the detection mechanism is composed of a camera, a tray detection sensor, a shadowless ring light source and a coaxial light source, the camera automatically detects the placement condition of the IC chip and the Taylor paper in a tray, and static damage or displacement of the IC chip caused by missing placement of the Taylor paper is prevented; according to the tray limiting mechanism, through the design of a sliding block, a rear sliding groove and a side sliding groove, accurate limiting of trays of different sizes is achieved, meanwhile, a Z-axis motor arranged on the device can drive a threaded rod to achieve lifting adjustment, when it is detected that no Taylor paper exists, an alarm can be automatically given, upward moving operation is stopped, and therefore human negligence is reduced, and the detection precision is improved; and the method has good compatibility and operation convenience.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor sealing and inspection, and in particular to a detection device for automatically detecting whether a Tyvek is placed. Background Art

[0002] In the current semiconductor processing process, each wafer is divided into multiple IC chips, and the IC chips are placed in a tray by a robotic arm. In the tray, the size of the crystal cavity is slightly larger than the IC chip, which is used to stably carry the IC chip. As the packaging and shipping process progresses, five trays full of IC chips are usually stacked one by one, and an empty tray is added on top. A square Tyvek paper of the corresponding size is placed between each tray to ensure the safety of the IC chip.

[0003] Tyvek paper plays two key roles in the pallet: first, it can effectively eliminate static electricity that may be generated by IC chips during transportation, preventing IC chips from being damaged by static electricity breakdown; second, it prevents IC chips from tipping over or overlapping during transportation, thereby ensuring that the chips are placed smoothly in subsequent processes. However, in actual operations, since Tyvek paper is usually placed manually by personnel, this process is prone to omissions, resulting in abnormalities such as static electricity damage or positional displacement of IC chips during transportation, which ultimately affects the subsequent IC chip boarding operations.

[0004] Most of the existing inspection systems are IC chip quality inspection equipment, but they have not been widely used to automatically detect the placement of Tyvek paper in the tray. The lack of Tyvek paper detection will cause incorrectly placed trays to continue to enter the subsequent production process, which will cause chips to be damaged during storage and transportation. In addition, the current tray inspection equipment lacks compatibility with trays of different sizes, and the adjustment is cumbersome, which limits its applicability under different tray specifications. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a detection device for automatically detecting whether Tyvek paper is placed in a tray. The device can automatically detect whether Tyvek paper is placed in a tray and is compatible with detection devices for trays of different sizes, so as to improve detection efficiency and accuracy and reduce product defective rate and rework costs caused by missing Tyvek paper.

[0006] To achieve the above objectives, the present invention is implemented through the following technical solutions: A detection device for automatically detecting whether Tyvek is placed, comprising a workbench, a detection mechanism and a tray limiting mechanism, wherein an aluminum back frame is arranged on the back of the upper surface of the workbench, a display is arranged on one side of the upper part of the front surface of the aluminum back frame, a touch controller is arranged on the rear side of the upper surface of the workbench, a power box is fixed at the lower part of the inside of the workbench, a track is symmetrically arranged on the other side of the front surface of the aluminum back frame, the track is vertically arranged, and the cross section of the track is T-shaped, a top plate extends forward from the upper surface of the aluminum back frame, a Z-axis motor is fixed on the surface of the top plate, and an output end of the Z-axis motor is vertically installed with A threaded rod, wherein the threaded rod is placed between the two rails, the bottom of the threaded rod is screwed onto the upper surface of the workbench, the detection mechanism comprises a lifting beam sliding on the surfaces of the two rails, the lifting beam is screwed onto the surface of the threaded rod, the lifting beam is horizontally arranged, a mounting plate is vertically arranged at the center of the front side of the lifting beam, a camera is installed above the front surface of the mounting plate, a pallet detection sensor is installed below the front surface of the mounting plate, the pallet limiting mechanism is placed on the upper surface of the workbench, the pallet limiting mechanism is placed directly below the camera, and the pallet detection sensor corresponds to the pallet limiting mechanism.

[0007] Furthermore, a shadowless ring light is arranged at the center of the front surface of the mounting plate, the shadowless ring light is placed between the tray limiting mechanism and the camera, and a coaxial light source is installed on the upper surface of the shadowless ring light.

[0008] Furthermore, protective plates are symmetrically arranged on the front surface of the aluminum back frame, and the two protective plates protect the detection mechanism. A gap is left between the two protective plates, and the pallet detection sensor, coaxial light source, shadowless ring light and camera are all placed on the outside of the two protective plates.

[0009] Furthermore, the tray limiting mechanism includes two rear slide grooves opened longitudinally and side slide grooves opened symmetrically on both sides, the two rear slide grooves are arranged in parallel, and the rear slide grooves and the side slide grooves are distributed vertically.

[0010] Furthermore, sliders are slidably installed inside the rear slide groove and the side slide grooves, and the sliders are respectively placed on the rear side and both sides of the pallet. Limiting plates are symmetrically arranged above both sides of the sliders, and the limiting plates are placed on the upper surface of the workbench. One side surface of the four sliders close to the center is vertically slid with a telescopic plate, and the telescopic plate is in contact with the side surface of the pallet.

[0011] Furthermore, sleeves are provided on the surfaces of the two side sliders, and the sliders are fixed to the sleeves by bolts, and a connecting beam is installed between the two rear sliders, and the sleeves and the connecting beams are both placed on the lower surface of the workbench.

[0012] Furthermore, a gear plate is rotatably mounted on the lower surface of the workbench, and three connecting rods are hinged on the lower surface of the gear plate. The three connecting rods are distributed at 90 degrees, and two symmetrical ends of the connecting rods are respectively hinged on two sleeves, and the other end of the connecting rod is hinged on the central surface of the connecting beam.

[0013] Furthermore, a plurality of protrusions are evenly arranged along a straight line on the lower surface of the workbench, a gear rod is slidably installed between two of the protrusions, the gear rod is meshed with a gear plate, an adjustment screw is screwed through the surface of the front end of the protrusion, the rear end of the adjustment screw is rotatably installed on the front end surface of the gear rod, and a knob is provided at the rear end of the adjustment screw.

[0014] The present invention provides a detection device for automatically detecting whether a Tyvek is placed. It has the following beneficial effects: First of all, this device effectively solves the problem of missing Tyvek paper. Through the coordinated work of the tray detection sensor and the camera, each time the tray is placed in place, the camera automatically detects the tray, and uses the software algorithm to determine whether the quality and quantity of the IC chips in the tray are qualified, and at the same time detects the presence of Tyvek paper in the tray. In this way, the risk of electrostatic breakdown and IC chip displacement caused by missing Tyvek paper can be significantly reduced, improving product quality and safety, and ensuring the stability of each tray in the subsequent production process.

[0015] Secondly, the device has a high level of automation, which reduces manual operations and improves detection efficiency. The existing manual placement of Tyvek paper is prone to omissions, but this device can ensure that Tyvek paper is placed accurately through an automatic detection mechanism. When no Tyvek paper is detected, the system will automatically sound an alarm and stop the tray from moving up. This not only reduces production defects caused by human negligence, but also significantly improves production efficiency and detection accuracy, providing a guarantee for the continuity of the production process.

[0016] In addition, the detection device is compatible with pallets of different sizes, which improves the applicability of the equipment. Through the design of the pallet limit mechanism, the equipment can be adjusted according to different pallet sizes to ensure that each pallet can be accurately fixed in the detection position to avoid detection errors caused by pallet position offset. The limit mechanism realizes flexible adjustment of pallets of different sizes through the combination of multiple structures such as sliders, rear slides, side slides and gear rods. It has strong adaptability and simple adjustment operation, which provides convenience for diversified production needs.

[0017] Finally, the structural design of this device ensures the stability and durability of the equipment. The aluminum back frame, rails, top plate, Z-axis motor and other components together form a stable detection bracket, ensuring the smooth movement of the detection mechanism in the vertical direction; in addition, the setting of the protective plate effectively protects the detection mechanism from the influence of the external environment and extends the service life of the equipment. In general, this detection device realizes the automated, precise and efficient Tyvek detection function, providing a strong guarantee for the safe storage and transportation of IC chips. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional diagram of the installation three-dimensional structure of the present invention; Figure 2 It is a right view structural schematic diagram of the present invention; Figure 3 It is a schematic diagram of the internal structure of the protective plate of the present invention; Figure 4 It is a schematic diagram of the lower surface structure of the workbench of the present invention; Figure 5 For the present invention Figure 1 A magnified schematic diagram of area A; Figure 6 For the present invention Figure 4 Schematic diagram of the enlarged structure of area B; Figure 7 It is a schematic diagram of the installation structure of the slider and the telescopic plate of the present invention.

[0019] Among them, 1. workbench; 101. aluminum back frame; 102. power box; 103. display; 104. touch controller; 105. protective plate; 106. track; 107. top plate; 108. Z-axis motor; 109. threaded rod; 2. detection mechanism; 201. lifting beam; 202. mounting plate; 203. coaxial light source; 204. shadowless ring light; 205. camera; 206. pallet detection sensor; 3. pallet limit mechanism; 301. rear slide; 302. side slide; 303. slider; 304. limit plate; 305. telescopic plate; 306. connecting beam; 307. connecting rod; 308. gear plate; 309. bump; 310. gear rod; 311. adjustment screw; 312. knob; 313. sleeve. DETAILED DESCRIPTION

[0020] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] Embodiment 1: See also Figure 1-7 , a detection device for automatically detecting whether Tyvek is placed, comprising a workbench 1, a detection mechanism 2 and a tray limiting mechanism 3; an aluminum back frame 101 is fixedly installed on the back of the upper surface of the workbench 1, and the aluminum back frame 101 has a strong load-bearing capacity and stability; a display 103 is arranged on the upper side of the front side surface of the aluminum back frame 101, and the display 103 is used to display images and data in the detection process in real time, so as to facilitate monitoring by operators; a touch controller 104 is fixedly arranged on the rear side of the upper surface of the workbench 1, and the touch controller 104 is used to adjust the parameters of the equipment and control the operation, so that the operation is easier; a power box 102 is arranged at the lower part of the workbench 1, and the power box 102 is the whole The machine provides power support to ensure stable operation of the equipment; two rails 106 are symmetrically installed on the other side of the front surface of the aluminum back frame 101, and the rails 106 are vertically arranged. The cross-section of the rails 106 is a T-shaped structure, which can slide with the lifting beam 201 to ensure the stable movement of the detection mechanism 2 in the vertical direction; a top plate 107 is extended forward from the upper surface of the aluminum back frame 101, and a Z-axis motor 108 is fixedly installed on the surface of the top plate 107. The Z-axis motor 108 can drive the rotation of the threaded rod 109 to realize the up and down movement of the lifting beam 201; the threaded rod 109 is vertically installed on the upper surface of the workbench 1, and cooperates with the lifting beam 201 through a threaded connection to achieve precise height adjustment.

[0022] The detection mechanism 2 includes a lifting beam 201 slidably mounted on two rails 106; the lifting beam 201 is screwed on the outer surface of the threaded rod 109, and the lifting beam 201 can be accurately lifted and lowered on the rail 106 by the drive of the Z-axis motor 108; the lifting beam 201 is horizontally arranged so that the lifting beam 201 is limited by the rails 106 on both sides to ensure stability during lifting, and a mounting plate 202 is vertically fixedly installed at the center of the front side of the lifting beam 201, and the lifting beam 201 and the mounting plate 202 form a stacked cross structure, and the mounting plate 202 is placed in the front to ensure that the camera 205 and the tray detection sensor 206 can move synchronously. Perform detection operations; the mounting plate 202 serves as a mounting base for the camera 205, the tray detection sensor 206 and the shadowless ring light 204, and has good stability and supporting force; a camera 205 is fixedly installed above the front surface of the mounting plate 202, and the camera 205 shoots vertically downward. The camera 205 is used to capture images of the tray and Tyvek paper, and process and analyze the images through software algorithms; a tray detection sensor 206 is arranged below the front surface of the mounting plate 202, and the tray detection sensor 206 is used to detect whether the tray is in place, and is used to control the start of the Z-axis motor 108 to ensure that the camera 205 shoots at the right time.

[0023] The tray limiting mechanism 3 is arranged on the upper surface of the workbench 1; the tray limiting mechanism 3 is directly opposite to the bottom of the camera 205 and corresponds to the tray detection sensor 206; the tray limiting mechanism 3 is used to fix and limit trays of different sizes to ensure that the position of the tray is accurate during the detection process. The tray limiting mechanism 3 can adapt to trays of various sizes, effectively improving the applicability of the equipment.

[0024] See also Figure 3 A shadowless ring light 204 is arranged at the center of the front surface of the mounting plate 202, and the shadowless ring light 204 is used to evenly illuminate the tray to avoid detection errors caused by uneven ambient light; the shadowless ring light 204 is located between the tray limiting mechanism 3 and the camera 205, ensuring that the camera 205 can shoot the tray and Tyvek paper under optimal lighting conditions; a coaxial light source 203 is installed on the upper surface of the shadowless ring light 204, and the coaxial light source 203 is used for supplementary lighting to ensure that the captured image has higher clarity.

[0025] See also Figure 1-2 , protective plates 105 are symmetrically arranged on the front surface of the aluminum back frame 101. The two protective plates 105 are used to protect the detection mechanism 2 from the influence of the external environment. The protective plates 105 are L-shaped structures to protect the internal equipment. A gap of a certain width is left between the two protective plates 105 to facilitate the detection operation of the pallet detection sensor 206, the coaxial light source 203, the shadowless ring light 204 and the camera 205; these components are placed on the outside of the two protective plates 105 for easy maintenance and debugging.

[0026] See also Figure 5-7 The tray limiting mechanism 3 includes two rear slide grooves 301 opened longitudinally and side slide grooves 302 opened symmetrically on both sides; the two rear slide grooves 301 are arranged in parallel to limit the rear side of the tray; the rear slide grooves 301 and the side slide grooves 302 are distributed vertically, so that the tray can be accurately fixed in the specified position, which is convenient for the detection operation of the detection mechanism.

[0027] See also Figure 5-7 , sliders 303 are slidably installed inside the rear slide groove 301 and the side slide groove 302; the sliders 303 are used to limit the position during the adjustment of pallets of different sizes; the sliders 303 are respectively placed on the rear side and both sides of the pallet to ensure that the pallet does not shake during the detection process; limit plates 304 are symmetrically arranged above the two sides of the slider 303, and the limit plates 304 are fixed to the upper surface of the workbench 1, further enhancing the fixing effect of the pallet, so that the slider 303 can only move along the track of the slide groove 302; the side surface of the four sliders 303 close to the center is vertically slid with a telescopic plate 305, the telescopic plate 305 is in contact with the side surface of the pallet, to ensure that the pallet remains stable during the detection process, the telescopic plate 305 is flush with the side of the slider 303, and the telescopic plate 305 can slide in the vertical direction to adjust the distance that the telescopic plate 305 exceeds the slider 303.

[0028] See also Figure 6-7 The surfaces of the two side sliders 303 are sleeved with sleeves 313; the slider 303 and the sleeve 313 are fixed by bolts to ensure that the connection between the slider 303 and the sleeve 313 is firm. At this time, the slider 303 is limited by the limit plate 304 at the top and the sleeve 313 at the bottom; a connecting beam 306 is fixedly installed between the two rear sliders 303, and the connecting beam 306 further improves the overall stability of the slider 303, so that the two rear sliders 303 move synchronously; the sleeve 313 and the connecting beam 306 are both arranged on the lower surface of the workbench 1 to provide additional support and adjustment functions.

[0029] See also Figure 6 A gear plate 308 is rotatably mounted on the lower surface of the workbench 1, and three connecting rods 307 are hinged on the lower surface of the gear plate 308; the three connecting rods 307 are distributed at 90°, wherein the ends of two symmetrical connecting rods 307 are respectively hinged on two sleeves 313, and the end of the other connecting rod 307 is hinged on the central surface of the connecting beam 306, ensuring that the sleeve 313 and the connecting beam 306 can move synchronously during the adjustment process and the moving distance is consistent.

[0030] See also Figure 6-7 A plurality of protrusions 309 are evenly arranged along a straight line on the lower surface of the workbench 1; a gear rod 310 is slidably installed between the two protrusions 309, and the gear rod 310 is meshed with the gear plate 308, and the precise movement of the slider 303 is achieved through the mutual cooperation of the gear and the gear rod; an adjustment screw 311 is screwed through the surface of the front end protrusion 309, and the rear end of the adjustment screw 311 is rotatably installed on the front end surface of the gear rod 310, and the rotation of the adjustment screw 311 can be operated by the front end knob 312, so as to adjust the gear rod 310 and the gear plate 308, and further control the moving position of the slider 303 to adapt to the limiting work of pallets of different sizes, and the threaded connection method can ensure that the gear rod 310 remains fixed after adjustment, and will not be displaced after the slider 303 is hit.

[0031] Example 2: In this example, in order to verify the compatibility of the Tyvek detection device of the present invention with pallets of different sizes and its effectiveness in reducing the missing of Tyvek paper, we used three different specifications of pallets, namely 200mm×200mm, 300mm×300mm and 400mm×400mm pallets for experiments, and each group of experiments was repeated 5 times. In order to ensure the accuracy of the experiment, we used a precision camera of model XYZ-3000 and a pallet detection sensor of model ABC-500 for detection. The experimental environment was controlled at room temperature (25±2℃) and in a dust-free room to ensure that the detection was not affected by external factors.

[0032] In each test, the pallet is first placed in the pallet limit mechanism. After the pallet detection sensor at the bottom confirms that the pallet is in place, the camera automatically detects the placement of the IC chip and the Tyvek paper in the pallet. During the detection process, the camera uses a software algorithm to determine whether there is Tyvek paper in the pallet. If it detects that it is missing, the system will immediately issue an alarm signal and stop the pallet from moving up. The experimental results show that for three different specifications of pallets, the detection device can accurately identify the placement of Tyvek paper in 5 repeated tests without missing a single detection. In particular, when using a 400mm×400mm pallet, the limit mechanism ensures the stability of the pallet by adjusting the coordinated action of the screw and the gear plate. The experimental data are shown in Table 1.

[0033]

[0034] It can be seen from the experimental results that the detection device of the present invention has high adaptability and accuracy, and can effectively reduce production defects caused by missing Tyvek paper.

[0035] Example 3: In order to evaluate the effect of the device in improving production efficiency and reducing manual misoperation, this example conducted a continuous detection experiment. In the experiment, the process of automated detection on the production line was simulated, and the Z-axis motor model DEF-700 and the threaded rod MNO-250 were used to test the stability and accuracy of the equipment under continuous operation for 8 hours. The size of the experimental tray is uniformly 300mm×300mm. There are 5 groups in the experiment, each with 100 trays, and each tray is randomly placed or not placed with Tyvek paper.

[0036] During the experiment, the detection system automatically identified the Tyvek paper in the tray. When it detected that there was no Tyvek paper, the system would immediately alarm and stop the tray from moving up until the operator manually placed the Tyvek paper. The entire experiment was conducted in an environment with a constant temperature (25±2℃) and a relative humidity below 50% to ensure that the experimental results were not affected by environmental changes.

[0037] The experimental data are shown in Table 2 below:

[0038] As can be seen from the table, the detection device did not have any detection errors during the 8-hour continuous operation, and the detection efficiency was stable at about 120 pallets per hour. Compared with manual operation, the production efficiency was increased by about 3 times. In addition, the system's automatic alarm function effectively prevented the omission of Tyvek paper, greatly improving the continuity and reliability of production.

[0039] Example 4: In order to verify the effect of the detection device on the static elimination effect, this example designed a comparative experiment to test the static voltage change of the IC chip with and without Tyvek paper. The experiment used an electrostatic tester model STU-900 to test 100 trays with IC chips, of which 50 trays were correctly placed with Tyvek paper, and the other 50 were not placed. The experimental environment was a dry environment with a relative humidity of less than 30% to increase the possibility of static accumulation.

[0040] The electrostatic voltage test results of the IC chips in each tray are shown in Table 3:

[0041] It can be seen from the experimental results that the electrostatic voltage of the IC chip in the tray without Tyvek paper is much higher than that in the tray with Tyvek paper, and the maximum electrostatic voltage reaches 250V, which is easy to cause breakdown damage to the IC chip. The electrostatic voltage in the tray with Tyvek paper is maintained at a lower level, effectively eliminating the threat of static electricity to the IC chip. Therefore, the detection device of the present invention can ensure that Tyvek paper is correctly placed in each tray, thereby reducing the risk of electrostatic breakdown.

[0042] Example 5: In this example, the protective effect of the protective plate on the detection mechanism and its adaptability in different environments were tested. The experiment selected three environmental conditions for testing, namely, a clean room environment (Group A), an ordinary production workshop environment (Group B) and a dusty environment (Group C). In each environment, the equipment was tested for 24 hours of continuous operation, and the image clarity captured by the camera was recorded every 1 hour. The camera used a high-definition camera model GHI-450.

[0043] The experimental results are shown in Table 4:

[0044] From the experimental results, it can be seen that in the clean room environment, the image clarity of the detection device remains the highest, reaching an average of 99.5%. In ordinary production workshops and dusty environments, although the image is clear The image clarity of the equipment was reduced, but due to the effective protection of the protective plate, the equipment could still work normally at 95.3% and 85.7% image clarity, ensuring the effectiveness and accuracy of the detection. This shows that the protective plate design of the present invention can reduce the impact of the external environment on the detection device to a certain extent, especially in an environment with a lot of dust, the protection effect is particularly significant.

[0045] Example 6: In order to further verify the structural stability and long-term operating reliability of the detection device, a fatigue test was performed in this example. The test was carried out under the condition that the equipment was continuously operated for 500 hours, during which the operation of the Z-axis motor and the displacement accuracy of the lifting beam were recorded every 10 hours. The Z-axis motor model is JKL-600, and the displacement accuracy is measured using a laser rangefinder model PQR-800.

[0046] The test data is shown in Table 5 below:

[0047] It can be seen from the table that after 500 hours of continuous operation, the Z-axis motor always maintains a normal working state, and the maximum change in the displacement accuracy of the lifting beam is 0.05mm, which is still within the acceptable range. This shows that the detection device of the present invention has good stability and reliability in long-term operation and can meet the long-term and high-frequency use requirements in actual production.

[0048] Working principle: During the inspection, the tray is placed inside the area of ​​the tray limit mechanism 3, and the tray detection sensor 206 at the bottom detects whether the tray is placed. After the tray is in place, the camera 205 automatically starts to detect the tray below, and the quality and quantity of the IC chips in the tray are judged by the software algorithm logic. Then, the Tyvek paper is laid, and the camera 205 automatically starts to take pictures and judges whether the Tyvek paper is placed through the software algorithm. If the Tyvek paper is detected, after the single-layer tray is placed, the Z-axis motor 108 starts to drive the threaded rod 109 to rotate, so that the lifting crossbar The beam 201 moves up, and then drives the tray detection sensor 206, the shadowless ring light 204, the coaxial light source 203 and the camera 205 to move up the distance of a tray, and repeats the detection of the tray and the Tyvek paper. If an alarm is issued when no Tyvek paper is detected, and the equipment will not move up, making it impossible to add a tray, after placing the fifth tray with IC chip and Tyvek, an empty tray is placed on the top and the whole is moved out. When the tray detection sensor 206 detects that there is no tray, the Z-axis motor 108 controls each device to descend to the initial position, and a working cycle ends at this time.

[0049] The tray limiting mechanism 3 can be effectively adapted to trays of different sizes. The knob 312 is rotated at the front end to control the axial movement of the gear rod 310 by adjusting the rotation of the screw rod 311, so that the gear plate 308 can be driven to rotate through the gear rod 310. When the gear plate 308 rotates, the sleeve 313 and the connecting beam 306 can be pushed closer or farther away through three connecting rods 307 in different directions, and the moving distances of the sleeve 313 and the connecting beam 306 are kept consistent, thereby adapting to the limiting work of trays of different sizes. At this time, the sliders 303 on both sides limit the sides of the tray respectively, and the two sliders 303 on the rear side limit the rear side of the tray, and the front side is open to facilitate the placement of the tray.

[0050] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection device for automatically detecting whether a Tyvek is placed, comprising a workbench (1), a detection mechanism (2) and a tray limiting mechanism (3), characterized in that: An aluminum back frame (101) is arranged on the back of the upper surface of the workbench (1), a display (103) is arranged on the upper side of one side of the front surface of the aluminum back frame (101), a touch controller (104) is arranged on the rear side of the upper surface of the workbench (1), a power supply box (102) is fixed at the lower part of the inside of the workbench (1), and tracks (106) are symmetrically arranged on the other side of the front surface of the aluminum back frame (101), the tracks (106) are arranged vertically, and the cross section of the tracks (106) is T-shaped, and a top plate (107) extends forward from the upper surface of the aluminum back frame (101), a Z-axis motor (108) is fixed on the surface of the top plate (107), and a threaded rod (109) is vertically installed at the output end of the Z-axis motor (108), and the threaded rod (109) is placed between the two tracks (10 6), the bottom of the threaded rod (109) is screwed onto the upper surface of the workbench (1), the detection mechanism (2) comprises a lifting beam (201) sliding on the surfaces of the two rails (106), the lifting beam (201) is screwed onto the surface of the threaded rod (109), the lifting beam (201) is arranged horizontally, a mounting plate (202) is vertically arranged at the center of the front side of the lifting beam (201), a camera (205) is mounted above the front surface of the mounting plate (202), a tray detection sensor (206) is mounted below the front surface of the mounting plate (202), the tray limiting mechanism (3) is placed on the upper surface of the workbench (1), the tray limiting mechanism (3) is placed directly below the camera (205), and the tray detection sensor (206) corresponds to the tray limiting mechanism (3).

2. The detection device for automatically detecting whether Tyvek is placed according to claim 1, characterized in that: A shadowless ring light (204) is arranged at the centre of the front surface of the mounting plate (202); the shadowless ring light (204) is placed between the tray limiting mechanism (3) and the camera (205); and a coaxial light source (203) is installed on the upper surface of the shadowless ring light (204).

3. The detection device for automatically detecting whether Tyvek is placed according to claim 2, characterized in that: The front surface of the aluminum back frame (101) is symmetrically provided with protective plates (105), the two protective plates (105) protect the detection mechanism (2), a gap is left between the two protective plates (105), and the tray detection sensor (206), the coaxial light source (203), the shadowless ring light (204) and the camera (205) are all placed outside the two protective plates (105).

4. The detection device for automatically detecting whether a Tyvek is placed according to claim 1, characterized in that: The tray limiting mechanism (3) comprises two rear slide grooves (301) opened longitudinally and side slide grooves (302) opened symmetrically on both sides. The two rear slide grooves (301) are arranged in parallel, and the rear slide grooves (301) and the side slide grooves (302) are distributed vertically.

5. The detection device for automatically detecting whether Tyvek is placed according to claim 4, characterized in that: Slide blocks (303) are slidably installed inside the rear slide groove (301) and the side slide groove (302), and the slide blocks (303) are respectively placed on the rear side and both sides of the tray. Limit plates (304) are symmetrically arranged above both sides of the slide blocks (303), and the limit plates (304) are placed on the upper surface of the workbench (1). A telescopic plate (305) is vertically slidably installed on one side surface of the four slide blocks (303) close to the center, and the telescopic plate (305) is in contact with the side surface of the tray.

6. The detection device for automatically detecting whether a Tyvek is placed according to claim 5, characterized in that: The surfaces of the two side sliders (303) are sleeved with sleeves (313), and the sliders (303) and the sleeves (313) are fixed by bolts. A connecting beam (306) is installed between the two rear sliders (303), and the sleeves (313) and the connecting beam (306) are both placed on the lower surface of the workbench (1).

7. The detection device for automatically detecting whether Tyvek is placed according to claim 6, characterized in that: A gear plate (308) is rotatably mounted on the lower surface of the workbench (1), and three connecting rods (307) are hinged on the lower surface of the gear plate (308). The three connecting rods (307) are distributed at 90 degrees, wherein the ends of two symmetrical connecting rods (307) are respectively hinged on two sleeves (313), and the end of the other connecting rod (307) is hinged on the central surface of the connecting beam (306).

8. The detection device for automatically detecting whether Tyvek is placed according to claim 7, characterized in that: The lower surface of the workbench (1) is evenly provided with a plurality of protrusions (309) along a straight line, a gear rod (310) is slidably mounted between two of the protrusions (309), the gear rod (310) is meshed with a gear plate (308), wherein an adjustment screw (311) is screwed through the surface of the front end protrusion (309), the rear end of the adjustment screw (311) is rotatably mounted on the front end surface of the gear rod (310), and a knob (312) is arranged at the rear end of the adjustment screw (311).

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