Dust removal device

Abstract

The dust removal device (10) comprises two dust removal heads (21) and a cover (11), each dust removal head (21) is provided with a cuboid-shaped main body (22) and a plurality of spraying parts (70) for spraying gas obliquely downwards, a supply chamber extending in the length direction of the main body is formed in the main body, and the spraying parts are arranged in the length direction and communicate with the supply chamber. The cover (11) is provided with a connecting part (16) and a pair of side surface parts (13), the connecting part (16) is connected with a pipeline for sucking gas, the pair of side surface parts (13) are fixed in a way that the two dust removal heads are oppositely arranged in a way that the orientations of the length directions of the two dust removal heads are consistent with each other, and the cover (11) forms a sucking flow path for sucking gas between a space (S) between the main bodies of the two dust removal heads and the connecting part. The connecting portion is provided in the cover at a central upper portion in the longitudinal direction, and the cover has a partitioning portion (60) that partitions both end portions in the longitudinal direction obliquely from the height of the lower portion (22a) of the main body toward the connecting portion in a space between the main bodies facing each other.

Description

Technical Field

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is based on Japanese patent application No. 2023-146401 filed on September 8, 2023, and the contents described therein are incorporated herein by reference.

[0003] The present invention relates to a dust removal device for removing dust from a precise dust removal object such as an exposure mask or a glass substrate. Background Art

[0004] For example, a dust removal device includes: two dust removal heads that eject gas onto the dust removal object; and a rectangular cylindrical cover whose upper opening is connected to a pipe for sucking air and sucks air from the lower opening, and the two dust removal heads are relatively mounted on the cover in such a manner that the gas ejected from the two dust removal heads is directed toward the lower inner side of the cover, so that the gas ejected from the two dust removal heads collides on the lower inner side of the cover and is sucked into the pipe through the cover (refer to patent document 1). The dust removal head described in patent document 1 includes a main body formed in a rectangular parallelepiped shape and a plurality of ejection parts that eject gas. A supply chamber extending along the length direction of the main body (hereinafter referred to as the "length direction") is formed inside the main body, and a plurality of ejection parts arranged along the length direction are respectively connected to the supply chamber. Moreover, gas is introduced into the supply chamber, and gas is supplied to the plurality of ejection parts through the supply chamber.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2022-160252 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, in the dust removal device described in Patent Document 1, a duct is connected to the upper center of the cover in the length direction. Moreover, the cover is used to suck the space between the main bodies of the dust removal heads that are opposite to each other toward the upper direction. In order to supply the necessary amount of gas from the supply chamber to the multiple ejection parts, it is necessary to increase the flow path area of ​​the supply chamber, which easily leads to the height of the main body of the dust removal head becoming higher. Therefore, in the space between the main bodies of the dust removal heads that are opposite to each other, the gas at the two ends in the length direction does not flow in the direction of the duct and is easily retained. As a result, the attraction force at the two ends in the length direction of the dust removal device is reduced, and dust may remain on the dust removal object in the portion where the attraction force is reduced. In particular, when a frame is installed on the outer edge of the dust removal object and the frame portion is higher than other portions, dust is likely to remain near the inner side of the frame.

[0010] The present disclosure is proposed to solve the above-mentioned problems, and its main purpose is to improve the suction force of both ends of the dust removal device in the longitudinal direction.

[0011] Methods for solving problems

[0012] In the first aspect for solving the above-mentioned problem, the dust removal device includes two dust removal heads and a cover, the dust removal head has a main body formed in a rectangular shape and a plurality of ejection parts for ejecting gas obliquely downward toward the dust removal object, a supply chamber extending along the length direction of the main body is formed inside the main body, the plurality of ejection parts are arranged along the length direction and are respectively connected to the supply chamber, the cover has a connecting part and a pair of side parts, the connecting part is connected to a pipe for sucking gas, the pair of side parts are fixed so that the two dust removal heads are opposed to each other with the same direction in the length direction, the cover forms a suction flow path for sucking gas between the space between the main bodies of the two dust removal heads and the connecting part, the connecting part is arranged in the upper part of the cover in the center of the length direction, the cover includes a dividing part, which divides the two ends in the length direction from the height of the lower part of the main body toward the connecting part in the space between the mutually opposing main bodies.

[0013] According to the above configuration, the two dust removal heads have a main body formed in a rectangular shape and a plurality of ejection parts that eject gas obliquely downward toward the dust removal object. Furthermore, a supply chamber extending along the length direction of the main body is formed inside the main body, and the plurality of ejection parts are arranged along the length direction and are respectively connected to the supply chamber. Therefore, by introducing gas into the supply chamber, gas can be supplied to the plurality of ejection parts respectively through the supply chamber. Furthermore, gas can be ejected obliquely downward toward the dust removal object from the plurality of ejection parts arranged along the length direction, so that dust attached to the dust removal object can be blown away.

[0014] A pair of side surfaces of the cover are fixed so that the two dust removal heads face each other in the same direction in the longitudinal direction. Moreover, the cover forms a suction flow path for sucking the gas between the space between the main bodies of the two dust removal heads and the connection part connected to the pipe for sucking the gas. Therefore, the dust blown off the dust removal object and the gas ejected from the ejection parts of the two dust removal heads can be sucked from the space between the main bodies of the two dust removal heads toward the pipe through the cover.

[0015] Here, in order to supply the necessary amount of gas from the supply chamber to the multiple ejection parts, it is necessary to increase the flow path area of ​​the supply chamber, which easily leads to the height of the main body of the dust removal head becoming higher. Therefore, in the space between the mutually opposing main bodies, the gas at the two ends in the length direction does not flow in the direction of the pipeline and is easily retained. In view of this, the cover is configured to have a partitioning portion, which divides the two ends in the length direction in the space between the mutually opposing main bodies from the height of the lower part of the main body toward the connecting part at an angle. Therefore, even in the case where the height of the main body of the dust removal head becomes higher, it is easy to make the gas at the two ends in the length direction in the space between the mutually opposing main bodies flow along the partitioning portion toward the connecting part, i.e., the pipeline. Therefore, the attraction of the two ends in the length direction of the dust removal device can be improved, and the situation of residual dust on the dust removal object can be suppressed.

[0016] In the second aspect, the cover has a covering portion that covers the upper part of the main body of the two dust removal heads and the upper part of the partition portion. According to such a configuration, the covering portion can easily cover the space between the main bodies of the two dust removal heads and the connecting portion, thereby suppressing gas leakage from the cover.

[0017] In the third aspect, the partitioning portion is fixed to the covering portion. According to such an arrangement, the partitioning portion can be easily attached using the covering portion.

[0018] In the fourth aspect, rectangular parallelepiped intermediate blocks are provided at both ends of the mutually opposed main bodies in the longitudinal direction, the intermediate blocks are clamped by the mutually opposed main bodies and are respectively in contact with the main bodies. An inclined surface inclined relative to the bottom surface of the intermediate block is formed at the lower portion of the intermediate block on the space side, and the lower portion of the partition portion is fixed to the inclined surface.

[0019] According to the above configuration, at both ends of the mutually opposed main bodies in the length direction, there are provided rectangular parallelepiped intermediate blocks which are clamped by the mutually opposed main bodies and respectively abut against the main bodies. Therefore, the distance between the mutually opposed main bodies can be limited by the intermediate blocks, that is, the width of the space between the mutually opposed main bodies can be limited. Moreover, an inclined surface inclined relative to the bottom surface of the intermediate block is formed at the lower part of the intermediate block on the space side, and the lower part of the partition part is fixed on the inclined surface. Therefore, the partition part can be easily installed by using the intermediate block that limits the width of the space between the mutually opposed main bodies.

[0020] In the fifth aspect, the portion of the partition part that is above the space is connected to the upper part of the main body and the pair of side parts, and the upper part of the partition part is not covered. According to such a configuration, a gas suction flow path can be formed by the partition part and the pair of side parts at a position above the space between the mutually opposed main bodies. Therefore, even if the covering part covering the upper part of the partition part is omitted, the gas suction flow path can be formed by the cover.

[0021] In the sixth aspect, a connecting member is included for connecting the main body of the two dust removal heads and the partitioning portion. According to such a configuration, even if the covering portion covering the upper part of the main body of the two dust removal heads and the upper part of the partitioning portion is omitted, the partitioning portion can be easily installed using the connecting member.

[0022] When the lower end of the partition is arranged at the same height as the lower end of the main body, the distance from the lower end of the main body to the partition at both ends in the length direction of the dust removal device becomes too short, and the gas is difficult to flow upward. As a result, at both ends in the length direction of the dust removal device, the upward attraction is reduced, and the gas ejected from the ejection portion may leak out from the bottom of the main body.

[0023] In this regard, in the seventh aspect, the lower end of the partition is arranged at a predetermined height upward from the lower end of the main body. Therefore, at both ends in the length direction of the dust removal device, the distance from the lower end of the main body to the partition can be prevented from becoming too short, and the upward attraction force can be prevented from decreasing. Therefore, the gas ejected from the ejection portion can be prevented from leaking from the lower side of the main body to the outside.

[0024] Specifically, according to the eighth aspect, a configuration in which the predetermined height is 5 mm to 30 mm can be adopted. According to such a configuration, the upward suction force can be increased at both ends in the length direction of the dust removal device.

[0025] Specifically, according to the ninth aspect, the partition portion may be configured to include a narrow portion inserted into the space between the mutually opposing main bodies and a wide portion connected to the pair of side portions at a position above the space.

[0026] In the tenth aspect, the dust removal device includes a support member for supporting the lower portion of the wide portion. According to this configuration, the center of the partition portion can be supported by the support member, and gas leakage from the gap between the dust removal head and the partition portion can be suppressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The above and other objects, features and advantages of the present disclosure will become more apparent by referring to the accompanying drawings in conjunction with the following detailed description.

[0028] Figure 1 It is a perspective view showing the dust removing device according to the first embodiment.

[0029] Figure 2 It is a three-dimensional diagram of the dust removal head assembly.

[0030] Figure 3 It is a vertical cross-sectional stereogram of the dust removal head assembly.

[0031] Figure 4 It is a perspective view of the supply block.

[0032] Figure 5 It is a perspective view showing the connection state of the supply block.

[0033] Figure 6 It is a three-dimensional diagram of the connecting ring.

[0034] Figure 7 yes Figure 3 Enlarged stereogram of part A.

[0035] Figure 8 It is a perspective view of the lower part of the supply block and the ejection plate.

[0036] Fig. 9 It is an exploded perspective view showing the upper surface side of the ejection plate.

[0037] Fig.10 It is an exploded perspective view showing the lower surface side of the ejection plate.

[0038] Fig.11 It is a three-dimensional diagram of the ejection plate.

[0039] Fig.12 It is a vertical section stereogram of two dust removal heads.

[0040] Fig.13 It is a side view showing the angle of the ejection plate relative to the photomask.

[0041] Fig.14 It is a perspective view showing the dust removing device in a state where one first long side surface portion and one second long side surface portion are removed.

[0042] Fig.15 It is a longitudinal sectional perspective view showing a fixed state of the partitioning portion according to the first embodiment.

[0043] Fig.16 It is a longitudinal sectional perspective view showing a fixed state of the partitioning portion according to the first embodiment.

[0044] Fig.17 It is a perspective view showing a fixed state of the partitioning portion according to the first embodiment.

[0045] Fig.18 It is a perspective view showing a dust removing device according to a second embodiment.

[0046] Fig.19 It is a perspective view of the cover according to the second embodiment.

[0047] Fig. 20 It is a perspective view showing a fixed state of the partitioning portion according to the second embodiment. DETAILED DESCRIPTION

[0048] (First Embodiment)

[0049] Hereinafter, a first embodiment of a dust removal device is described with reference to the accompanying drawings, wherein the dust removal device removes dust from a photomask used in an exposure device. The dust removal device sprays air (gas) onto the upper surface of the photomask to remove dust, and sucks the removed dust and discharges it into a duct.

[0050] like Figure 1 As shown, the dust removal device 10 includes a dust removal head assembly 20 and a cover 11, etc.

[0051] A cover 11 is installed on the upper part of the dust removal head assembly 20. The cover 11 includes a pair of first long side portions 12, a pair of second long side portions 13, a pair of short side portions 14, an upper base 15, a connecting portion 16, etc., and is formed into a cylindrical shape as a whole. An opening 15a is formed on the upper base 15. The connecting portion 16 is formed into a cylindrical shape. The lower part of the connecting portion 16 is connected to the upper base 15, and the upper part of the connecting portion 16 is connected to a pipe (omitted from the figure). The pipe is connected to a suction device (not shown), which sucks the air in the cover 11, and then sucks the air from the lower opening of the cover 11. That is, the cover 11 forms a suction flow path for sucking air between the dust removal head assembly 20 and the connecting portion 16.

[0052] The first long side portion 12 is formed in a rectangular plate shape. The length direction of the first long side portion 12 is consistent with the length direction of the dust removal head assembly 20 and the length direction of the dust removal device 10. The length direction of the first long side portion 12 is consistent with the horizontal direction, and the width direction of the first long side portion 12 is consistent with the vertical direction.

[0053] The second long side surface portion 13 is formed into a trapezoidal plate shape. The length direction of the second long side surface portion 13 (the length direction of the long side), the length direction of the first long side surface portion 12, the length direction of the dust removal head assembly 20, and the length direction of the dust removal device 10 are consistent. The length direction of the second long side surface portion 13 is consistent with the horizontal direction, and the width direction of the second long side surface portion 13 (the height direction of the trapezoid) is consistent with the vertical direction. In addition, the side surface portion is composed of the first long side surface portion 12 and the second long side surface portion 13, and a pair of side surfaces is composed of a pair of first long side surfaces 12 and a pair of second long side surfaces 13.

[0054] The short side portion 14 is formed into a rectangular plate shape. The length direction of the short side portion 14 is consistent with the length direction of the hypotenuse of the second long side portion 13. The width direction of the short side portion 14 is consistent with the horizontal direction. A pair of long sides of the short side portion 14 are respectively connected to the hypotenuse of the second long side portion 13. Thus, the short side portion 14 is inclined obliquely upward from the end of the length direction of the dust removal head assembly 20 toward the connecting portion 16.

[0055] The upper base 15 is formed in a plate shape, and its plate surface (main surface) is arranged horizontally. The upper base 15 is connected to the upper ends of a pair of second long side portions 13 and the upper ends of a pair of short side portions 14. The lower end of the connecting portion 16 is connected to the upper surface of the upper base 15. The connecting portion 16 is arranged at the upper part of the center of the length direction of the cover 11. The suction flow path formed inside the pair of second long side portions 13 and the pair of short side portions 14 is connected to the suction flow path formed inside the connecting portion 16 via the opening 15a of the upper base 15. In addition, the covering portion is composed of a pair of second long side portions 13, a pair of short side portions 14 and the upper base 15.

[0056] Figure 2 2 is a perspective view of the dust removal head assembly 20. The dust removal head assembly 20 includes two dust removal heads 21, four joint blocks 50, two intermediate blocks 42, a connecting plate 20a, and the like.

[0057] The two dust removal heads 21 are arranged parallel to each other. The two dust removal heads 21 are respectively mounted on the pair of first long side portions 12 (see Figure 1 ) on. The length direction of the two dust removal heads 21 is consistent with the length direction of the dust removal head assembly 20. The dust removal head 21 includes six (plural) supply blocks 22. The six supply blocks 22 are arranged in the length direction (predetermined direction) of the dust removal head 21 (dust removal device 10) and connected to each other. The length of the dust removal head 21 in the length direction is, for example, 600 to 800 mm. In addition, the main body is composed of six supply blocks 22, and the main body is divided into six supply blocks 22 (main body constituent part).

[0058] The two intermediate blocks 42 are arranged parallel to each other. The intermediate blocks 42 are formed into a rectangular parallelepiped. The two intermediate blocks 42 are clamped by the supply blocks 22 and the joint blocks 50 that are opposite to each other at the two ends in the length direction of the dust removal heads 21 that are opposite to each other. The intermediate blocks 42 are respectively in contact with the joint blocks 50 that are opposite to each other. That is, the intermediate blocks 42 limit the distance between the joint blocks 50 that are opposite to each other. The intermediate blocks 42 are respectively in contact with the supply blocks 22 that are opposite to each other. The intermediate blocks 42 limit the distance between the supply blocks 22 that are opposite to each other, that is, limit the width of the space S between the supply blocks 22 that are opposite to each other.

[0059] A joint block 50 is provided between the dust removal head 21 and the intermediate block 42. The connecting plate 20a is a rectangular frame-shaped plate, and connects two dust removal heads 21, two intermediate blocks 42, and four joint blocks 50 into a rectangular frame shape.

[0060] A port 51 for supplying high-pressure (predetermined pressure) clean air (clean dry air) is provided on a joint block 50 disposed at one end in the length direction of the dust removal head 21. An equal flow of air is supplied to the ports 51 of the two dust removal heads 21. The port 51 is disposed at one end in the length direction of the dust removal device 10.

[0061] like Figure 3 As shown, each supply chamber 23 is formed inside each supply block 22. The supply chamber 23 is formed as a quadrangular prism-shaped space, extending along the length direction of the dust removal head 21. Adjacent supply chambers 23 are connected to each other. The supply chamber 23 of the supply block 22 at one end in the length direction of the dust removal head 21 is connected to the port 51 via a joint flow path 52 formed inside the joint block 50. The supply chamber 23 of the supply block 22 at the other end in the length direction of the dust removal head 21 is blocked by a blind bolt 53 (blind cover) at the front end after being connected to the joint flow path 52 formed inside the joint block 50. The flow path area of ​​the supply chamber 23 is larger than the flow path area of ​​the joint flow path 52.

[0062] Figure 4 It is a perspective view of the supply block 22 .

[0063] The supply block 22 is formed in a rectangular parallelepiped shape. A triangular groove 29 having a right-angled triangular cross-section is formed at the lower bottom (bottom) of the supply block 22. The triangular groove 29 is formed over the entire length of the supply block 22 in the longitudinal direction (predetermined direction). Two openings 33 are formed on the bottom surface 29a (predetermined plane) of the triangular groove 29, which is the bottom surface with a larger area (see FIG. 2 ). Figure 8 ). At the bottom of the supply block 22, receiving grooves 34 for receiving sealing components such as O-rings are formed around the two openings 30 respectively.

[0064] A first communication passage 24 is formed at both ends of the supply block 22 in the longitudinal direction, so that the supply chamber 23 communicates with the outside in the longitudinal direction. Two openings 30 are formed at the upper bottom (bottom) of the supply block 22. At the upper bottom of the supply block 22, receiving grooves 31 for receiving sealing components such as O-rings are respectively formed around the two openings 30.

[0065] A communication passage 25 is formed in the supply block 22 so that the supply chamber 23 is connected to the two openings 30 respectively. A communication passage 27 is formed in the supply block 22 so as to extend in parallel with the communication passage 25. A communication passage 26 is formed in the supply block 22 so that the communication passage 25 is connected to the communication passage 27. A communication passage 28 is formed in the supply block 22 so that the communication passage 27 is connected to the opening 33. In the longitudinal direction of the supply block 22, the lengths of the communication passages 25, 27, and 28 are equal. The flow passage area of ​​the communication passage 26 is smaller than the flow passage area of ​​the communication passage 25 and the flow passage area of ​​the communication passage 27.

[0066] The two openings 30 are covered by the connecting plate 20a. The upper bottom of the supply block 22 and the connecting plate 20a are sealed by a sealing member accommodated in the receiving groove 31. In addition, the second connecting passage is formed by the connecting passages 25 to 28. That is, the second connecting passage extends from the supply chamber 23 to the opposite side of the opening 33, then folds back to the opening 33 side and connects to the opening 33. In the second connecting passage, the flow passage area of ​​the connecting passage 26 as the folded portion is smaller than the flow passage area of ​​other portions. The second connecting passage opens at the bottom surface 29a.

[0067] In the longitudinal direction of the supply block 22, a first engaging portion 35 communicating with the supply chamber 23 is provided at one end of the supply block 22, and a second engaging portion 36 communicating with the supply chamber 23 and engaging with the first engaging portion 35 of the adjacent supply block 22 is provided at the other end of the supply block 22. The first engaging portion 35 and the second engaging portion 36 are formed as annular recessed portions.

[0068] like Figure 5 As shown, adjacent supply blocks 22 are connected by a connecting ring 37. Figure 6 As shown, the connecting ring 37 includes a ring body 37b in a quadrangular cylindrical (ring-shaped) shape. An annular protrusion 37a is provided on the outer peripheral edge of the ring body 37b. The protrusion 37a is provided at the center of the ring body 37b in the central axis direction.

[0069] Figure 7 It is a magnified representation Figure 3A stereoscopic view of the A portion. The connecting ring 37 is engaged with the inner circumferential surfaces of the two first connecting passages 24, the first engaging portion 35 and the second engaging portion 36. That is, the first engaging portion 35 and the second engaging portion 36 are engaged through the connecting ring 37. The first engaging portion 35 and the second engaging portion 36 are separated by the protrusion 37a of the connecting ring 37. Sealing components 38 such as O-rings are respectively accommodated on the first engaging portion 35 and the second engaging portion 36. The first engaging portion 35 (supply block 22) and the ring body 37b of the connecting ring 37 are sealed by the sealing component 38. The second engaging portion 36 (supply block 22) and the ring body 37b of the connecting ring 37 are sealed by the sealing component 38. The sealing component 38 is compressed in the radial direction of the connecting ring 37. Therefore, even if the relative positions of the adjacent supply blocks 22 in the longitudinal direction are misaligned, the sealing member 38 can stably seal between the first engagement portion 35 and the connecting ring 37 and between the second engagement portion 36 and the connecting ring 37 .

[0070] Figure 8 2 is a perspective view showing the lower part of the supply block 22 and the ejection plate 70. The ejection plate 70 is mounted on the bottom surface 29a. The bottom surface 29a (the lower bottom of the supply block 22) and the ejection plate 70 are sealed by a sealing member accommodated in the accommodation groove 34. The ejection plate 70 ejects air that is blown onto the photomask.

[0071] Fig. 9 2 is an exploded perspective view showing the upper surface side of the ejection plate 70. Fig.10 1 is an exploded perspective view showing the lower surface side of the ejection plate 70. The ejection plate 70 (ejection portion, ejection portion for dust removal device) includes a first plate 71, a second plate 72, a third plate 80, and the like.

[0072] The first plate 71 (first component) is formed, for example, of stainless steel (metal) of a certain thickness into a rectangular plate shape having a width direction and a length direction. The thickness of the first plate 71 is, for example, 0.3 mm to 0.7 mm, preferably 0.4 mm to 0.6 mm, and 0.5 mm in the present embodiment. The first plate 71 is formed by rolling, and the thickness tolerance is ±5 μm. Two threaded holes 71 a arranged in the width direction are respectively formed at both ends and the central portion in the length direction of the first plate 71. The threaded hole 71 a is formed by etching the first plate 71.

[0073] The second plate 72 (second component) is formed of, for example, stainless steel (metal) of a certain thickness into a rectangular plate shape having a width direction and a length direction. The shape of the second plate 72 corresponds to the shape of the first plate 71. The thickness of the second plate 72 is, for example, preferably 0.1 mm to 0.3 mm, and is 0.1 mm in the present embodiment. The second plate 72 is formed by rolling, and the thickness tolerance is ±5 μm. Two threaded holes 72a arranged in the width direction are respectively formed at both ends and the central portion in the length direction of the second plate 72.

[0074] On the second plate 72, a plurality of cutouts 73 are formed adjacently (adjacently) over the entire length in the longitudinal direction, and are open at one end in the width direction. The cutouts 73 are formed in a rectangular shape. In the plurality of cutouts 73, within a predetermined range from the opening end 73a to the width direction of the second plate 72, an inclined portion 73b is formed such that the length of the cutout 73 in the longitudinal direction becomes longer as it approaches the opening end 73a. That is, the plurality of cutouts 73 are shaped so that the opening end 73a side is expanded. The screw hole 72a and the cutout 73 are formed by etching the second plate 72.

[0075] In the second plate 72, each boundary portion 74, which is a portion between the cutouts 73, is formed to be line-symmetrical with respect to the center line C defining the center of the second plate 72 in the longitudinal direction. That is, each boundary portion 74 is a shape that is line-symmetrical with respect to the center line C. In the longitudinal direction of the second plate 72, the width of the front end of each boundary portion 74, that is, the interval between the opening ends 73a of the adjacent cutouts 73 is preferably 0.5 mm or less, and is 0.4 mm in the present embodiment.

[0076] In the longitudinal direction of the second plate 72, split portions 74h are formed at both ends of the second plate 72 in a shape that divides the boundary portion 74 into two. In the longitudinal direction of the second plate 72, when two second plates 72 are adjacent, one boundary portion 74 is formed by two split portions 74h (adjacent split portions 74h).

[0077] The third plate 80 (third component) is formed of, for example, stainless steel (metal) of a certain thickness into a rectangular plate shape having a width direction and a length direction. The shape of the third plate 80 corresponds to the shape of the first plate 71. The thickness of the third plate 80 is preferably, for example, 0.8 mm to 1.2 mm, and is 1.0 mm in the present embodiment. The third plate 80 is formed by rolling, and the thickness tolerance is ±5 μm. Two threaded holes 80 a arranged in the width direction are respectively formed at both ends and the central portion in the length direction of the third plate 80.

[0078] Two (plural) through holes 81 are formed in the third plate 80. The through holes 81 (introduction ports) are formed in a rectangular shape and extend in the longitudinal direction of the third plate 80 between the screw holes 80a. The screw holes 80a are formed by etching the third plate 80.

[0079] A plurality of grooves 82 are formed on the third plate 80, extending from the through hole 81 to the open end 73a side of the above-mentioned cutout 73 in the width direction of the third plate 80. The depth of the groove 82 is preferably 0.46 mm to 0.6 mm, and is 0.5 mm in the present embodiment. The groove 82 is formed by half-etching the third plate 80. The groove 82 is connected to the through hole 81. When the ejection plate 70 is assembled, each groove 82 constitutes a flow path that connects the through hole 81 with each cutout 73. The end 82a of the groove 82 on the open end 73a side is located closer to the front than the above-mentioned inclined portion 73b of the cutout 73 (refer to Fig.11 ) In the plurality of grooves 82 , the flow path areas of the communicating portions with the through-hole 81 are equal to each other.

[0080] A plurality of grooves 83 are formed on the third plate 80 based on the groove 82. The plurality of grooves 83 are connected to both ends of the through hole 81 in the longitudinal direction of the third plate 80. Each groove 83 is connected to two notches 73 (see Fig.11 ). The other configurations of the groove 83 are the same as those of the groove 82. The two through holes 81 are connected to ten (the same number) of the cutouts 73 through the plurality of grooves 82 and 83 (flow paths).

[0081] The first plate 71, the second plate 72 and the third plate 80 are formed of the same material (for example, SUS304). The first plate 71 and the third plate 80 sandwich the second plate 72, and the first plate 71, the second plate 72 and the third plate 80 are diffusion bonded. Diffusion bonding is performed by, for example, pressing the first plate 71, the second plate 72 and the third plate 80 with a predetermined pressure in the thickness direction and heating them to 800°C to 900°C in a vacuum furnace. In a state where the first plate 71, the second plate 72 and the third plate 80 are integrally bonded, each slit is formed by the internal space of each cutout 73 divided by the first plate 71, the second plate 72 and the third plate 80. The width of the slit in the thickness direction of the first plate 71, the second plate 72 and the third plate 80 is limited by the thickness of the second plate 72 and is 0.1 mm.

[0082] Fig.12 It is a vertical cross-sectional perspective view of two dust removal heads 21. In addition, the first long side surface portion 12 and the second long side surface portion 13 on the front side are omitted from the illustration.

[0083] The second communication passage formed by the communication passages 25 to 28 communicates the supply chamber 23 with the plurality of through holes 81 of the ejection plate 70. That is, the through holes 81 are opposed to the opening end of the second communication passage on the bottom surface 29a of the supply block 22 (see Figure 8 ). In the longitudinal direction of the supply block 22 (dust removal head 21), the length of the second communication path is equal to the length of the through hole 81.

[0084] Each ejection plate 70 is mounted on each supply block 22. That is, six (plural) ejection plates 70 are mounted side by side along the longitudinal direction of the main body formed by six (plural) supply blocks 22. The supply chamber 23 extends along the ejection plates 70 in the longitudinal direction of the main body.

[0085] The dust removal heads 21 are respectively mounted on the pair of first long side portions 12 so that the air ejected from the slits of the ejection plates 70 of the two dust removal heads 21 is directed toward the lower inner side of the cover 11. That is, the pair of first long side portions 12 and the pair of second long side portions 13 (a pair of side portions) are fixed so that the two dust removal heads 21 are mutually opposed with their longitudinal directions aligned. Moreover, the cover 11 has a space S between the main bodies of the two dust removal heads 21 and a connection portion 16 (see Figure 1 ) to form a suction flow path for sucking air.

[0086] Fig.13 : is a side view showing the angle of the ejection plate 70 relative to the photomask M. The bottom surface 29a of the supply block 22 is at a first angle θ1 relative to the bottom surface 29b (horizontal plane) of the supply block 22. Moreover, the ejection plate 70 is mounted on the bottom surface 29a in such a manner that the first plate 71, the second plate 72, and the third plate 80 are parallel to the bottom surface 29a. Therefore, the air is ejected from the slit of the ejection plate 70 in parallel with the bottom surface 29a, and the angle formed by the traveling direction (arrow D1) of the air ejected from the slit of the ejection plate 70 (dust removal head 21) and the upper surface of the photomask M becomes the first angle θ1. The first angle θ1 is preferably 15° to 45°, more preferably 25° to 35°, and is 30° in the present embodiment. That is, the ejection plate 70 ejects air obliquely downward toward the photomask M.

[0087] The distance h1 between the opening end of the slit of the ejection plate 70 of the dust removal head 21 and the upper surface of the photomask M is preferably 5 mm to 20 mm, and is 7.0 mm in the present embodiment.

[0088] However, in order to supply the necessary amount of air from the supply chamber 23 to the plurality of ejection plates 70, the flow path area of ​​the supply chamber 23 needs to be increased, which easily leads to a higher height of the supply block 22 (main body) of the dust removal head 21. Therefore, in the space S between the mutually opposing main bodies, the air at both ends in the longitudinal direction does not flow in the direction of the duct (connecting portion 16) and is easily retained. In order to solve such a problem, the dust removal device 10 is configured to have a partitioning portion 60 as described below.

[0089] Fig.14 The figure is a perspective view showing the dust removing device 10 in a state where one of the first long side portions 12 and the second long side portions 13 are removed. The port 51 is connected to a joint 54 for connecting a pipe for supplying high-pressure clean air.

[0090] The cover 11 includes a partitioning portion 60, which divides the two ends of the length direction from the height of the lower part 22a of the main body toward the connecting part 16 in the space S between the main bodies (six supply blocks 22) of the dust removal heads 21 facing each other. The partitioning portion 60 (partitioning member) has a wide portion 60a, a narrow portion 60b and a fixed portion 60c. The wide portion 60a is formed in the shape of a rectangular flat plate. The horizontal width of the wide portion 60a is equal to (approximately equal to) the distance between a pair of second long side portions 13. The narrow portion 60b is connected to the lower part of the wide portion 60a and is formed in the shape of a rectangular flat plate. The horizontal width of the narrow portion 60b is equal to the distance between the main bodies of a pair of dust removal heads 21, that is, the horizontal width of the narrow portion 60b is equal to (approximately equal to) the width of the space S between the main bodies facing each other. The narrow portion 60b is inserted between the supply blocks 22 facing each other at the two ends of the length direction of the main body. The narrow width portion 60b is sandwiched by the supply blocks 22 facing each other at both ends in the longitudinal direction of the main body, and contacts the supply blocks 22. The narrow width portion 60b and the supply block 22 may be sealed by a sealing member or the like.

[0091] As reference Fig.15 As shown, flat-plate-shaped fixed portions 60c (only one is shown) are provided at both ends of the wide portion 60a in the horizontal direction. The wide portion 60a and two fixed portions 60c are formed by bending the two ends of the flat-plate-shaped component. The fixed portion 60c is arranged in parallel with the above-mentioned second long side portion 13. A plurality of threaded holes are formed in the fixed portion 60c. A flat-plate-shaped fixed portion 60e is provided at the upper end of the wide portion 60a. The wide portion 60a and the fixed portion 60e are formed by bending the end of the flat-plate-shaped component. The fixed portion 60e is arranged in parallel with the above-mentioned upper base 15. A plurality of threaded holes are formed in the fixed portion 60e. In the upper base 15, threaded holes are formed at positions corresponding to the threaded holes of the fixed portion 60e.

[0092] An inclined surface 42b is formed at the lower part of the space S side of the intermediate block 42, which is inclined relative to the bottom surface 42a (horizontal surface) of the intermediate block 42. In the width direction of the dust removal device 10 (a direction perpendicular to the length direction and horizontal), the inclined surface 42b is formed over the entire length of the intermediate block 42. That is, in the intermediate block 42, the inclined surface 42b is formed over the entire length between the supply blocks 22 (main body) facing each other. The inclined surface 42b is a surface that defines the angle of the partition portion 60, and is inclined relative to the bottom surface 42a, for example, by 25° to 55°, preferably by 30° to 50°, more preferably by 35° to 45°, and by 40° in the present embodiment. A plurality of threaded holes are formed on the inclined surface 42b.

[0093] In the narrow portion 60b of the dividing portion 60, a threaded hole is formed at a position corresponding to the threaded hole of the inclined surface 42b of the intermediate block 42. Moreover, the lower portion of the narrow portion 60b of the dividing portion 60 is fixed to the inclined surface 42b of the intermediate block 42 with screws. The fixed portion 60e of the dividing portion 60 is fixed to the upper base 15 with screws. In addition, a threaded hole is formed in the lower portion of the wide portion 60a. The connecting member 61 (supporting member) is formed in a triangular prism shape, and its inclined surface is arranged parallel to the wide portion 60a. In the inclined surface of the connecting member 61, a threaded hole is formed at a position corresponding to the threaded hole in the lower portion of the wide portion 60a. The connecting member 61 is fixed to the connecting member 63 described later by screws (refer to Fig.14 ). In addition, the lower portion of the wide portion 60a of the partition portion 60 is fixed to the inclined surface of the connecting member 61 with screws. Thus, the lower portion of the wide portion 60a of the partition portion 60 (the middle portion of the partition portion 60) is fixed to the connecting member 63 (and further to the connecting plate 20a). That is, the connecting member 61 supports the lower portion of the wide portion 60a.

[0094] like Fig.16 As shown, the lower end 60g of the partitioning portion 60 (narrow width portion 60b) is arranged at a position of a predetermined height h3 upward from the lower end 22b of the supply block 22 (main body). The predetermined height h3 is, for example, 5mm to 30mm, preferably 15mm to 20mm, and more preferably 20mm. Through such a configuration, at both ends of the length direction of the dust removal device 10, the distance until the air flowing upward hits the narrow width portion 60b (partitioning portion 60) is extended only by the predetermined height h3 compared to the case where the lower end 60g of the partitioning portion 60 is arranged at a height equal to the lower end 22b of the supply block 22. As a result, at both ends of the length direction of the dust removal device 10, the flow rate of the air is increased until the air flowing upward hits the narrow width portion 60b.

[0095] In addition, when the lower end 60g of the partitioning portion 60 is arranged at the same height as the lower end 22b of the main body, the distance from the lower end 22b of the main body to the narrow width portion 60b (partitioning portion 60) becomes too short at both ends in the length direction of the dust removal device 10, and it is difficult for air to flow upward. As a result, at both ends in the length direction of the dust removal device 10, the upward attraction is reduced, and the air ejected from the ejection plate 70 may leak from the bottom of the main body to the outside.

[0096] At both ends of the dust removal device 10 in the longitudinal direction, a connecting member 62 in the shape of a quadrangular prism (rectangular parallelepiped) is fixed to the connecting plate 20a by screws. The connecting member 63 is formed in the shape of a flat plate (groove) with both ends bent. Both ends of the connecting member 63 are fixed to the connecting member 62 by screws respectively. A plurality of threaded holes are formed on the connecting member 63 along the longitudinal direction.

[0097] like Fig.17 As shown, a flat fixed portion 14a is provided at the lower end of the short side portion 14. The fixed portion 14a is arranged in parallel with the connecting member 62. A plurality of threaded holes are formed on the fixed portion 14a. Furthermore, the fixed portion 14a of the short side portion 14 is fixed to the connecting member 62 by screws. In addition, the lower portion of the second long side portion 13 is fixed to the connecting member 63 by screws. Thus, a covering portion (cover 11) consisting of a pair of second long side portions 13, a pair of short side portions 14 and an upper bottom 15 is installed on the dust removal head assembly 20. Furthermore, it is configured so that no gap is formed between the dust removal head assembly 20 and the cover 11, or a gap is suppressed from being formed between the dust removal head assembly 20 and the cover 11. The covering portion covers the upper part of the main body of the two dust removal heads 21 and the upper part of the partition portion 60. At a position above the space S, the wide portion 60 a of the partition portion 60 is fixed to the second long side surface portion 13 (cover portion) by screws via the fixed portion 60 c.

[0098] The upper surface of the photomask M is made to face the lower surface of the dust removal device 10 having the above structure, and the photomask M is relatively moved in the width direction of the dust removal device 10. Thus, the dust attached to the upper surface of the photomask M is removed by the air ejected from the slit of the ejection plate 70, and the dust is sucked by the duct connected to the connection portion 16 of the cover 11.

[0099] At this time, the two ejection plates 70 are used to eject air from two directions toward the upper surface of the photomask M. In particular, the experiments and simulations by the present inventors have confirmed that since the first angle θ1 is set to 15° to 45°, the air between the bottom of the dust removal head 21 and the photomask M is guided in the direction of the horizontal component of the velocity of the air ejected from the slit due to the negative pressure and the viscosity of the air. That is, it is possible to suppress the dust removed from the upper surface of the photomask M from leaking outward from the bottom of the dust removal device 10. In addition, the experiments and simulations by the present inventors have confirmed that in the existing dust removal device, a considerable amount of dust removed from the upper surface of the photomask M leaks outward from the bottom of the dust removal device.

[0100] Furthermore, the air flow of the comparative example without the partitioning portion 60 and the present embodiment was simulated under the conditions that the distance between the opening end of the slit of the ejection plate 70 of the dust removal head 21 and the upper surface of the photomask M was h1=7.0 mm, the air supply volume of the air supplied from one port 51 was 2000 L / min, and the exhaust volume of the air discharged from the duct was 9657 L / min. As a result, at both ends in the length direction of the dust removal device 10 and the center in the width direction and the lower end of the dust removal device 10, the air flow velocity of the comparative example to the upper side was 32.96 m / s and 35.44 m / s, while the air flow velocity of the present embodiment to the upper side was 40.10 m / s and 38.05 m / s. That is, the dust removal device 10 of the present embodiment has an improved suction force at both ends in the length direction relative to the dust removal device of the comparative example. As a result, in the experiment conducted using an actual machine, the particle removal rate at both ends of the photomask M facing both ends in the longitudinal direction of the dust removing device 10 was 80% in the comparative example, whereas it was 99% in the present embodiment.

[0101] The present embodiment described in detail above has the following advantages.

[0102] ● The two dust removal heads 21 have a main body (composed of six supply blocks 22) formed in a rectangular parallelepiped shape and a plurality of ejection plates 70 that eject air obliquely downward toward the photomask M. Furthermore, a supply chamber 23 extending in the longitudinal direction of the main body is formed inside the main body, and a plurality of ejection plates 70 are arranged in the longitudinal direction and are respectively connected to the supply chamber 23. Therefore, by introducing air into the supply chamber 23, air can be supplied to the plurality of ejection plates 70 through the supply chamber 23. Furthermore, air can be ejected obliquely downward toward the photomask M from the plurality of ejection plates 70 arranged in the longitudinal direction, and dust attached to the photomask M can be blown away.

[0103] The pair of first long side portions 12 (side portions) of the cover 11 are fixed so that the two dust removal heads 21 face each other with the same longitudinal direction. Moreover, the cover 11 forms a suction flow path for sucking air between the space S between the main bodies of the two dust removal heads 21 and the connection portion 16 connected to the duct for sucking air. Therefore, the dust blown off from the photomask M can be sucked into the duct from the space S between the main bodies of the two dust removal heads 21 through the cover 11 together with the air ejected from the ejection plates 70 of each other of the two dust removal heads 21.

[0104] The cover 11 has a partitioning portion 60 that partitions both ends in the length direction in a space S between the mutually opposed main bodies from a height of the lower portion 22a of the main body toward the connecting portion 16 at an angle. Therefore, even when the height of the main body of the dust removal head 21 is increased, it is easy to make the air at both ends in the length direction of the space S between the mutually opposed main bodies flow toward the connecting portion 16, i.e., the duct along the partitioning portion 60. Therefore, the suction force of both ends in the length direction of the dust removal device 10 can be increased, and dust can be suppressed from remaining on the photomask M.

[0105] The cover 11 includes a covering portion (composed of a pair of second long side portions 13, a pair of short side portions 14, and an upper bottom 15) covering the upper part of the main body of the two dust removal heads 21 and the upper part of the partition portion 60. According to such a configuration, it is easy to use the covering portion to centrally cover the space S between the main bodies of the two dust removal heads 21 and the connection portion 16, which can inhibit air leakage from the cover 11.

[0106] The partitioning portion 60 is fixed to the above-mentioned covering portion. According to such an arrangement, the partitioning portion 60 can be easily attached using the covering portion.

[0107] ●At both ends of the mutually opposed main bodies in the longitudinal direction, there are provided rectangular parallelepiped intermediate blocks 42 which are clamped by the mutually opposed main bodies and respectively abut against the main bodies. Therefore, the distance between the mutually opposed main bodies, that is, the width of the space S between the mutually opposed main bodies can be limited by the intermediate blocks 42. Moreover, an inclined surface 42b inclined relative to the bottom surface of the intermediate block 42 is formed at the lower part of the intermediate block 42 on the space S side, and the lower part of the partitioning part 60 is fixed to the inclined surface 42b. Therefore, the partitioning part 60 can be easily installed by using the intermediate block 42 for limiting the width of the space S between the mutually opposed main bodies.

[0108] The lower end 60g of the partitioning portion 60 is arranged at a predetermined height h3 upward from the lower end 22b of the main body. Therefore, at both ends in the length direction of the dust removal device 10, the distance from the lower end 22b of the main body to the partitioning portion 60 can be prevented from becoming too short, and the upward suction force can be prevented from decreasing. Therefore, the air ejected from the ejection plate 70 can be prevented from leaking from the lower part of the main body to the outside. In particular, by setting the predetermined height h3 to 5 mm to 30 mm, the upward suction force can be increased at both ends in the length direction of the dust removal device 10.

[0109] The dust removal device 10 includes a connecting member 61 (supporting member) for supporting the lower portion of the wide portion 60a. With this arrangement, the connecting member 61 can support the center of the partition 60, and air leakage from the gap between the dust removal head 21 and the partition 60 can be suppressed.

[0110] The wider the width of the photomask M, that is, the longer the length of the dust removal device 10 in the longitudinal direction, the easier it is for dust to remain in the portion of the photomask M that is opposite to the two ends in the longitudinal direction of the dust removal device 10. In view of this, the present application can improve the attraction of the two ends in the longitudinal direction of the dust removal device 10, so that even when the width of the photomask M is wide, it is possible to suppress the dust from remaining on the photomask M.

[0111] ● When a frame is installed on the outer edge of the photomask M and the frame portion is higher than other portions, dust is likely to remain near the inner side of the frame. In view of this, the present application can increase the upward suction force at both ends of the dust removal device 10 in the longitudinal direction, thereby preventing dust from remaining near the inner side of the frame.

[0112] (Second Embodiment)

[0113] Hereinafter, the second embodiment in which the cover 11 is modified will be described with focus on the differences from the first embodiment. In addition, the same reference numerals are given to the same parts as those of the first embodiment, and the description thereof will be cited.

[0114] like Fig.18 As shown, the dust removing device 10 of the present embodiment includes a cover 111 instead of the cover 11 of the first embodiment.

[0115] A cover 111 is installed on the upper part of the dust removal head assembly 20. The cover 111 includes a pair of first long side portions 12, a pair of second long side portions 113, a pair of partition portions 160, an upper bottom 15 and a connecting portion 16, etc., and is formed into a cylindrical shape as a whole. The first long side portion 12 and the connecting portion 16 are the same as those in the first embodiment. The duct is connected to a suction device (not shown) to suck the air in the cover 111, and then suck the air from the lower opening of the cover 111. That is, the cover 111 forms a suction flow path for sucking air between the dust removal head assembly 20 and the connecting portion 16.

[0116] As reference Fig.19 As shown, the second long side portion 113 is formed into a trapezoidal plate shape. The length of the second long side portion 113 in the longitudinal direction is shorter than the length of the second long side portion 13 in the longitudinal direction of the first embodiment. The length direction of the second long side portion 113 (the length direction of the long side), the length direction of the first long side portion 12, the length direction of the dust removal head assembly 20, and the length direction of the dust removal device 10 are consistent. The length direction of the second long side portion 113 is consistent with the horizontal direction, and the width direction of the second long side portion 113 (the height direction of the trapezoid) is consistent with the vertical direction. In addition, the side portion is composed of the first long side portion 12 and the second long side portion 113, and a pair of side portions is composed of a pair of first long side portions 12 and a pair of second long side portions 113.

[0117] The partitioning part 160 realizes the same function as the partitioning part 60 of the first embodiment, and has a configuration based on the partitioning part 60. That is, the partitioning part 160 (partitioning member) divides the two ends in the length direction from the height of the lower part 22a of the main body toward the connecting part 16 in the space S between the main bodies (six supply blocks 22) of the dust removal head 21 facing each other. The length direction of the partitioning part 160 is consistent with the length direction of the hypotenuse of the second long side surface 113. The width direction of the partitioning part 160 is consistent with the horizontal direction.

[0118] The partitioning portion 160 has a wide portion 160a and a narrow portion 160b. The wide portion 160a is formed into a rectangular flat plate. The horizontal width of the wide portion 160a is equal to (approximately equal to) the distance between a pair of second long side portions 113. A pair of long sides of the wide portion 160a are respectively connected to the oblique sides of the second long side portions 113. Thus, the wide portion 160a is inclined obliquely upward from the upper end of the dust removal head assembly 20 toward the connecting portion 16. The narrow portion 160b is connected to the lower portion of the wide portion 160a and is formed into a rectangular flat plate. The horizontal width of the narrow portion 160b is equal to the distance between the main bodies of a pair of dust removal heads 21, that is, the horizontal width of the narrow portion 160b is equal to (approximately equal to) the width of the space S between the mutually opposing main bodies. The narrow portion 160b is inserted between the mutually opposing supply blocks 22 (space S) at both ends in the longitudinal direction of the main body. The narrow width portion 160b is sandwiched by the supply blocks 22 facing each other at both ends in the longitudinal direction of the main body, and contacts the supply blocks 22. The narrow width portion 160b and the supply block 22 may be sealed by a sealing member or the like.

[0119] The upper base 15 is formed in a plate shape, and its plate surface (main surface) is arranged horizontally. The upper base 15 is connected to the upper ends of a pair of second long side portions 113 and the upper ends of a pair of partition portions 160. An opening 15a is formed on the upper base 15. The lower end of the connecting portion 16 is connected to the upper surface of the upper base 15. The connecting portion 16 is arranged at the upper center of the length direction of the cover 111. The suction flow path formed inside the pair of second long side portions 113 and the pair of partition portions 160 is connected to the suction flow path formed inside the connecting portion 16 via the opening 15a of the upper base 15.

[0120] The partition portion 160 is inclined at, for example, 25° to 55°, preferably 30° to 50°, more preferably 35° to 45°, and in this embodiment, 40° relative to the upper base 15 (horizontal).

[0121] like Fig. 20As shown, the lower part of the narrow width portion 160b of the partitioning portion 160 is fixed to the supply block 22 by screws through the connecting member 64. The connecting member 64 has a portion along the narrow width portion 160b and a portion along the side surface of the inner side of the supply block 22. The lower part of the wide width portion 160a of the partitioning portion 160 is fixed to the supply block 22 by screws through the connecting member 162. That is, the connecting member 162 (supporting member) supports the lower part of the wide width portion 160a. The connecting member 162 has a portion along the wide width portion 160a and a portion along the side surface of the inner side of the supply block 22. In addition, the lower part of the wide width portion 160a of the partitioning portion 160 and the lower part of the second long side portion 113 are fixed to the connecting member 162 by screws through the connecting member 163. That is, the connecting member 163 (supporting member) supports the lower part of the wide width portion 160a. The connecting member 163 has a portion along the wide portion 160a and a portion along the second long side portion 113. That is, the portion of the partition portion 160 that is higher than the space S is connected to the upper portion of the main body (supply block 22) and the pair of second long side portions 113. Through these configurations, it is configured so that no gap is formed between the dust removal head assembly 20 and the cover 111, or the formation of a gap between the dust removal head assembly 20 and the cover 111 is suppressed. Moreover, the upper portion of the partition portion 160 is not covered, and the covering portion (composed of a pair of second long side portions 13, a pair of short side portions 14 and an upper bottom 15) of the first embodiment does not exist.

[0122] The present embodiment described in detail above has the following advantages.

[0123] The cover 111 has a partitioning portion 160 that partitions both ends in the longitudinal direction in a space S between the mutually opposed main bodies from the height of the lower portion 22a of the main body toward the connecting portion 16. Therefore, similarly to the first embodiment, the suction force of both ends in the longitudinal direction of the dust removal device 10 can be increased, and dust can be suppressed from remaining on the photomask M.

[0124] An air suction flow path can be formed by the partition 160 and the pair of second long side surfaces 113 at a position above the space S between the opposing main bodies. Therefore, even if the cover covering the partition 160 is omitted, the air suction flow path can be formed by the cover 111.

[0125] ● The connecting parts 64 and 162 are provided to connect the main bodies of the two dust removal heads 21 and the partitioning part 160. According to such a configuration, even if the covering part for covering the upper parts of the main bodies of the two dust removal heads 21 and the upper parts of the partitioning part 160 is omitted, the partitioning part 160 can be easily installed by the connecting parts 64 and 162.

[0126] The dust removal device 10 includes connecting members 162 and 163 (supporting members) that support the lower portion of the wide portion 160a. With this arrangement, the connecting members 162 and 163 can support the center of the partitioning portion 160, and air leakage from the gap between the dust removal head 21 and the partitioning portion 160 can be suppressed.

[0127] In addition, the above-mentioned embodiment may be modified and implemented as follows. The same reference numerals are given to the same parts as those in the above-mentioned embodiment, and the description thereof is cited.

[0128] ●The distance h1 can also be set to 2 mm to 30 mm.

[0129] ●The first angle θ1 may also be set to 10° to 50°.

[0130] The first engagement portion 35 and the second engagement portion 36 may be formed to engage directly. For example, the first engagement portion 35 may be formed as an annular convex portion, and the second engagement portion 36 may be formed as an annular concave portion, and the first engagement portion 35 and the second engagement portion 36 may be fitted together.

[0131] ●The bottom surface 29 a (predetermined plane) may be formed entirely on the bottom of the supply block 22 .

[0132] The bottom surface 29 a may be configured not to be parallel to the direction in which air is ejected from the slits of the ejection plate 70 .

[0133] The first plate 71 , the second plate 72 , and the third plate 80 may also be formed of an aluminum alloy or a copper alloy.

[0134] The first plate 71 , the second plate 72 , and the third plate 80 may also be joined by welding or by an adhesive.

[0135] In the second plate 72, the portions between the cutouts 73, that is, the respective boundary portions 74, may be omitted, and the plurality of slits may be connected to one another. In this case, the plurality of grooves 82 and 83 may be connected to one another.

[0136] The partitioning parts 60 and 160 may also be formed in a curved plate shape. Even in this case, the partitioning parts 60 and 160 may be configured to divide the two ends in the longitudinal direction from the height of the lower part 22a of the main body toward the connecting part 16 in an inclined manner in the space S between the main bodies facing each other. For example, the partitioning parts 60 and 160 may be configured so that the angle with respect to the horizontal gradually increases from the height of the lower part 22a of the main body to the connecting part 16.

[0137] ●At both ends of the dust removal device 10 in the longitudinal direction, two auxiliary dust removal heads that are parallel to each other may be arranged instead of the middle block 42. The length of the auxiliary dust removal head in the longitudinal direction may be shorter than the length of the dust removal head 21 in the longitudinal direction. For example, the auxiliary dust removal head may have a structure equivalent to a supply block 22 and a spray plate 70 of the dust removal head 21. In addition, the auxiliary dust removal head may be mounted on the joint block 50 so that the air sprayed from the slits of the spray plates of the two auxiliary dust removal heads is directed toward the lower inner side of the cover 11, 111. According to such a configuration, air can be sprayed toward the upper surface of the photomask M from four directions through the two dust removal heads 21 and the two auxiliary dust removal heads.

[0138] As the gas ejected from the ejection plate 70, nitrogen, oxygen, argon, etc. may be used.

[0139] ● As dust removal objects, liquid crystal substrates, chips, glass substrates, etc. can also be used.

[0140] Furthermore, the above-described embodiments and modifications may be implemented in combination within the range in which they can be combined.

[0141] Although the present disclosure is described according to the embodiments, it should be understood that the present disclosure is not limited to these embodiments and configurations. The present disclosure also includes various variations or variations within the equivalent range. In addition, various combinations and modes and other combinations and modes including only one element, more than one element or less than one element also fall within the scope of the present disclosure and the scope of thought.

[0142] Explanation of symbols

[0143] 10…Dust removal device;

[0144] 11…cover;

[0145] 12 ... a first long side face (side face);

[0146] 13 ... the second longest side face (side face);

[0147] 15…top bottom;

[0148] 16…connecting part;

[0149] 20…dust removal head assembly;

[0150] 21…Dust removal head;

[0151] 22…Supply block;

[0152] 22a...lower part;

[0153] 23…Supply room;

[0154] 60…Division Department;

[0155] 70 ... ejection plate (ejection portion);

[0156] 111…cover;

[0157] 113 ... the second longest side face (side face);

[0158] 160…District Division.

Claims

1. A dust removal device, wherein: include: Two dust removal heads, each having a main body formed in a rectangular parallelepiped shape and a plurality of ejection parts ejecting gas obliquely downward toward a dust removal object, a supply chamber extending along a length direction of the main body being formed inside the main body, the plurality of ejection parts being arranged along the length direction and respectively connected to the supply chamber; and The cover has a connecting portion and a pair of side portions, wherein the connecting portion is connected to a pipe for sucking gas, the pair of side portions are fixed so that the two dust removal heads face each other in the same direction in the longitudinal direction, and the cover forms a suction flow path for sucking gas between the space between the main bodies of the two dust removal heads and the connecting portion, wherein: The connecting portion is provided at an upper portion of the cover at the center in the longitudinal direction. The cover includes a partition portion that partitions both ends in the longitudinal direction in an inclined manner from a height of a lower portion of the main body toward the connection portion in the space between the main bodies facing each other.

2. The dust removal device according to claim 1, wherein: The cover has a covering portion that covers upper portions of the main bodies of the two dust removal heads and upper portions of the partitioning portions.

3. The dust removal device according to claim 2, wherein: The partition portion is fixed to the covering portion.

4. The dust removal device according to claim 3, wherein: At both ends of the main bodies facing each other in the longitudinal direction, rectangular parallelepiped intermediate blocks are provided. The intermediate blocks are sandwiched by the main bodies facing each other and abut against the main bodies respectively. An inclined surface inclined relative to a bottom surface of the intermediate block is formed at a lower portion of the intermediate block on the space side. The lower portion of the partition portion is fixed to the inclined surface.

5. The dust removal device according to claim 1, wherein: A portion of the partition portion that is above the space is connected to the upper portion of the main body and the pair of side portions. The upper side of the partition portion is not covered.

6. The dust removal device according to claim 5, wherein: include: A connecting component connects the main bodies and the partitioning parts of the two dust removal heads.

7. The dust removal device according to any one of claims 1 to 6, wherein: The lower end of the partition portion is disposed at a position at a predetermined height upward from the lower end of the main body.

8. The dust removal device according to claim 7, wherein: The predetermined height is 5 mm to 30 mm.

9. The dust removal device according to any one of claims 1 to 6, wherein: The division section has: a narrow width portion inserted into the space between the mutually opposing main bodies; and The wide portion is connected to the pair of side portions at a position above the space.

10. The dust removal device according to claim 9, wherein: include: The supporting member supports the lower portion of the wide portion.

Images