Gas temperature adjusting system and adjusting method

Abstract

The embodiment of the invention provides a gas temperature adjusting system and method. The gas temperature adjusting system comprises a shell with a cavity; the heating device is located outside the shell and used for heating the gas flowing to the cavity to the first preset temperature range; the refrigerating device is located outside the shell and used for cooling the gas flowing to the cavity to a first preset temperature range; the temperature monitoring unit is located outside the shell and used for monitoring the temperature of gas flowing to the cavity; the control unit is connected with the temperature monitoring unit, the refrigerating device, the heating device and the cavity and used for controlling gas flowing out of the temperature monitoring unit to flow to the refrigerating device or the heating device or the cavity based on the monitoring result of the temperature monitoring unit. According to the embodiment of the invention, the risk of condensation of the gas transmission pipeline in the chamber can be reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a gas temperature regulating system and a regulating method. Background Art

[0002] In the manufacturing industry, constant temperature in a thermostatic chamber is essential to improve product quality and the stability of the production process. Constant temperature in a thermostatic chamber can reduce errors caused by thermal expansion and changes in material properties, especially in fields such as precision engineering, semiconductor manufacturing, and chemical processing. In the production process of semiconductor wafers, constant temperature helps maintain the consistency of photoresist and the uniformity of chemical reactions, thereby ensuring the precise transfer of circuit patterns. In plastic and metal processing, constant temperature can prevent uneven cooling of materials and reduce molding defects and internal stress. Therefore, the control technology of constant temperature in a thermostatic chamber plays an indispensable role in improving production efficiency, reducing costs, and ensuring that the final product meets strict quality standards.

[0003] However, in the actual production process, there is a problem of condensation in the gas transmission pipeline inside the constant temperature chamber. Therefore, how to provide a technical solution to reduce the risk of condensation in the gas transmission pipeline inside the chamber (constant temperature chamber is referred to as: chamber) has become a technical problem that technical personnel in this field urgently need to solve. Summary of the invention

[0004] The technical problem solved by the present invention is to provide a gas temperature regulating system for reducing the risk of condensation in a gas transmission pipeline in a chamber.

[0005] In order to solve the above problems, an embodiment of the present invention provides a gas temperature regulation system, comprising: a shell having a chamber; a heating device, located outside the shell, for heating the gas flowing to the chamber to a first preset temperature range; a refrigeration device, located outside the shell, for cooling the gas flowing to the chamber to the first preset temperature range; a temperature monitoring unit, located outside the shell, for monitoring the temperature of the gas flowing to the chamber; a control unit, respectively connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, for controlling the gas flowing out of the temperature monitoring unit to flow to the refrigeration device or the heating device or the chamber based on the monitoring result of the temperature monitoring unit.

[0006] Optionally, the gas temperature adjustment system further comprises:

[0007] A gas storage unit is located outside the shell and connected to the temperature monitoring unit, and is used to store gas to be cooled or gas to be heated.

[0008] Optionally, the control unit includes: a first four-way valve;

[0009] The first end of the first four-way valve is connected to the temperature monitoring unit, the second end of the first four-way valve is connected to the heating device, the third end of the first four-way valve is connected to the refrigeration device, and the fourth end of the first four-way valve is connected to the chamber, wherein, in response to the temperature of the gas flowing out of the temperature monitoring unit being less than or equal to the second preset temperature, the first four-way valve controls the gas to flow from the first end to the heating device via the second end, in response to the temperature of the gas flowing out of the temperature monitoring unit being greater than or equal to the third preset temperature, the first four-way valve controls the gas to flow from the first end to the refrigeration device via the third end, and in response to the temperature of the gas flowing out of the temperature monitoring unit being greater than the second preset temperature and less than the third preset temperature, the first four-way valve controls the gas to flow from the first end to the chamber via the fourth end;

[0010] The heating device comprises: a gas heating unit, one end of which is connected to the second end of the first four-way valve and is used to heat the gas flowing out of the first four-way valve, the gas heating unit comprising at least three gas heating sub-units, and the heating temperatures of the gas heating sub-units are the same or different;

[0011] The first gas temperature monitoring unit is connected to the other end of the gas heating unit and is used to monitor the temperature of the gas after being heated by the gas heating unit.

[0012] Optionally, the at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is further used to control the heated gas to flow to one of the at least three gas heating subunits based on the detected heated gas temperature;

[0013] wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to the first gas heating subunit among the at least three gas heating subunits;

[0014] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0015] Optionally, the refrigeration device comprises: a gas refrigeration unit, one end of the gas refrigeration unit is connected to the third end of the first four-way valve, and is used to cool the gas flowing out of the first four-way valve, the gas refrigeration unit comprises at least 3 gas refrigeration sub-units, and the refrigeration temperatures of the gas refrigeration sub-units are the same or different;

[0016] The second gas temperature monitoring unit is connected to the other end of the gas refrigeration unit and is used to monitor the temperature of the gas after being cooled by the gas refrigeration unit.

[0017] Optionally, the at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature;

[0018] Wherein, in response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units;

[0019] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to one of the at least three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0020] Optionally, the temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor;

[0021] The first gas temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor;

[0022] The second gas temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor.

[0023] Optionally, the gas temperature regulation system also includes: a second four-way valve, the fourth end of the first four-way valve is connected to the first end of the second four-way valve, the gas heating unit is connected to the second end of the second four-way valve via the first gas temperature monitoring unit, the gas refrigeration unit is connected to the third end of the second four-way valve via the second gas temperature monitoring unit, and the fourth end of the second four-way valve is connected to the chamber.

[0024] Optionally, the gas temperature adjustment system further comprises:

[0025] a first PLC programmable logic controller, used for controlling the gas after passing through the first gas temperature monitoring unit to flow to a single gas heating sub-unit in the gas heating unit;

[0026] The second PLC programmable logic controller is used to control the gas after passing through the second gas temperature monitoring unit to flow to a single gas refrigeration sub-unit in the gas refrigeration unit.

[0027] Optionally, the gas temperature regulating system comprises: a first heat preservation unit, located between the first gas temperature monitoring unit and the second four-way valve, for maintaining the temperature of the gas heated by the gas heating unit;

[0028] The second heat preservation unit is located between the second gas temperature monitoring unit and the second four-way valve, and is used to maintain the temperature of the gas after being refrigerated by the refrigeration device.

[0029] Accordingly, the present invention also provides a gas temperature adjustment method, which is applied to a gas temperature adjustment system, wherein the gas temperature adjustment system comprises:

[0030] a housing having a chamber;

[0031] A refrigeration device, a heating device, a temperature monitoring unit and a control unit located outside the housing;

[0032] The control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber respectively;

[0033] The method comprises: the temperature monitoring unit monitors the temperature of the gas flowing to the chamber; and the control unit controls the gas flowing out of the temperature monitoring unit to flow to the refrigeration device, the heating device or the chamber according to the gas temperature monitored by the temperature monitoring unit.

[0034] Optionally, the gas temperature regulation system further comprises a first PLC programmable logic controller, and the heating device comprises: a gas heating unit, the gas heating unit comprising at least 3 gas heating sub-units, and a first gas temperature monitoring unit;

[0035] The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is further used for controlling the heated gas to flow to one of the at least three gas heating subunits by the first PLC programmable logic controller based on the detected heated gas temperature;

[0036] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to the first gas heating subunit among the at least three gas heating subunits;

[0037] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0038] Optionally, the gas temperature adjustment system further comprises a second PLC programmable logic controller, the refrigeration device comprises: a gas refrigeration unit, the gas refrigeration unit comprises at least 3 gas refrigeration sub-units, and a second gas temperature monitoring unit;

[0039] The at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature;

[0040] Wherein, in response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the second PLC programmable logic controller controls the refrigerated gas to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units;

[0041] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the second PLC programmable logic controller controls the refrigerated gas to flow to one of the at least three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0042] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0043] A gas temperature regulating system provided by an embodiment of the present invention comprises: a housing having a chamber; a heating device for heating the gas flowing to the chamber to a first preset temperature range; a refrigeration device for cooling the gas flowing to the chamber to a first preset temperature range; and a control unit connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, respectively. When the temperature monitoring unit detects that the temperature of the gas flowing to the chamber is less than the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow to the heating device; when the temperature monitoring unit detects that the temperature of the gas flowing to the chamber is within the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow to the chamber; when the temperature monitoring unit detects that the temperature of the gas flowing to the chamber is greater than the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow to the refrigeration device. Thus, the temperature of the gas flowing to the chamber is within the first preset temperature range, reducing the risk of condensation in the gas transmission pipeline in the chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0045] Figure 1 It is a partial structural schematic diagram of a gas supply device;

[0046] Figure 2 is a schematic diagram of a gas temperature adjustment system according to an embodiment of the present invention;

[0047] Figure 3 It is a flow chart of a gas temperature adjustment method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0049] According to the background technology, in the actual process of production, there is a problem of condensation in the gas transmission pipeline in the constant temperature chamber; Figure 1 Analyze the reasons for condensation in the gas transmission pipeline in the constant temperature chamber.

[0050] refer to Figure 1 , which is a partial structural diagram of a gas supply device. The gas supply device includes: a bulk gas station 100, which is used to store gas during process production; a constant temperature chamber 101, which is used to provide constant temperature and constant humidity for process production; a transmission pipeline 102, which is used to transmit the gas from the bulk gas station 100 to the constant temperature chamber 101, and the gas transmission pipeline 102 connects the bulk gas station 100 and the constant temperature chamber 101, and the transmission pipeline 102 includes a first pipeline area 103 located outside the constant temperature chamber and a second pipeline area 104 located inside the constant temperature chamber.

[0051] However, when the gas is transmitted from the bulk gas station 100 to the constant temperature chamber 101, the following problems occur:

[0052] First, condensation occurs in the gas transmission pipeline in the constant temperature chamber 101 .

[0053] In winter, the temperature outside the constant temperature chamber 101 is relatively low, causing the temperature of the first pipe area 103 to drop. When the gas passes through the first pipe area 103, the gas temperature will also drop, resulting in a large temperature difference between the first pipe area 103 and the second pipe area 104. When the gas with a lowered temperature enters the second pipe area 104, the water vapor in the constant temperature chamber 101 will form water droplets on the second pipe area 104, resulting in condensation. There are also the following problems: (1) The formed water droplets affect the humidity in the constant temperature chamber; (2) The formed water droplets fall onto the equipment below the second pipe area 104, affecting the operation of the equipment; (3) The gas with a lowered temperature in the second pipe area 104 increases the probability of a temperature drop in the constant temperature chamber 101.

[0054] Second, the temperature in the constant temperature chamber 101 increases.

[0055] In summer, the temperature outside the constant temperature chamber 101 is high, causing the temperature of the first pipe area 103 to rise. When the gas passes through the first pipe area 103, the gas temperature will also rise; when the gas with increased temperature enters the second pipe area 104, the temperature inside the constant temperature chamber 101 rises.

[0056] It should be noted that, when the length of the first pipe area 103 is longer, the problem of condensation in the second pipe area 104 during gas transmission in the constant temperature chamber 101 and the temperature rise in the constant temperature chamber 101 will be more serious.

[0057] In view of the above technical problems, an embodiment of the present invention provides a gas temperature regulation system, which can reduce the risk of condensation in the gas transmission pipeline in the constant temperature chamber.

[0058] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the following will be combined with the embodiments of the present invention. Figure 2 , the technical solutions in the embodiments of the present invention are described clearly and completely. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0059] refer to Figure 2 An embodiment of the present invention provides a gas temperature regulation system, comprising: a shell having a chamber 200; a heating device 300, located outside the shell, and used to heat the gas flowing to the chamber 200 to the first preset temperature range; a refrigeration device 400, located outside the shell, and used to cool the gas flowing to the chamber 200 to the first preset temperature range; a temperature monitoring unit 600, located outside the shell, and used to monitor the temperature of the gas flowing to the chamber 200; a control unit 500, respectively connected to the temperature monitoring unit 600, the refrigeration device 400, the heating device 300, and the chamber 200, for controlling the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400 or the heating device 300 or the chamber 200 based on the monitoring result of the temperature monitoring unit 600.

[0060] A gas temperature regulation system provided by an embodiment of the present invention has the following beneficial effects: when the temperature monitoring unit 600 detects that the temperature of the gas flowing to the chamber 200 is lower than the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the heating device 300; when the temperature monitoring unit 600 detects that the temperature of the gas flowing to the chamber 200 is within the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the chamber 200; when the temperature monitoring unit 600 detects that the temperature of the gas flowing to the chamber 200 is higher than the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400; thereby, the temperature of the gas flowing to the chamber 200 is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0061] Continue to refer Figure 2 , the shell is in the shape of a column structure; the shell material includes metal material (such as stainless steel material, aluminum material, etc.) or antistatic plastic material (such as polycarbonate, electro-polypropylene, acrylic, etc.); the column structure includes any of the following: cylindrical structure, elliptical cylindrical structure, square cylindrical structure, etc. The embodiment of the present application does not limit the material and specific column structure of the shell, and those skilled in the art can adjust the settings according to actual conditions.

[0062] Continue to refer Figure 2 The gas temperature regulating system comprises: a first four-way valve 501 and a second four-way valve 700 .

[0063] The first four-way valve 501 is used to control the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400 or the heating device 300 or the chamber 200 based on the monitoring result of the temperature monitoring unit 600 .

[0064] The second four-way valve 700 is used to control the gas flowing out of the first four-way valve 501 or the first gas temperature monitoring unit 301 or the second gas temperature monitoring unit 401 to flow to the chamber 200 .

[0065] Continue to refer Figure 2 The gas temperature regulating system comprises: a heating device 300, located outside the shell, for heating the gas flowing to the chamber 200 to the first preset temperature range.

[0066] The first preset temperature range is a temperature range that meets the process requirements in the chamber 200. For example, the temperature range required for a constant temperature chamber for semiconductor device manufacturing is 22±1°C, and the first preset temperature range is set to 22±1°C. The first preset temperature range is set according to actual needs.

[0067] The heating device 300 includes: a gas heating unit 302, one end of the gas heating unit 302 is connected to the second end 5012 of the first four-way valve 501, and is used to heat the gas flowing out of the first four-way valve 501. The gas heating unit 302 includes at least 3 gas heating sub-units, and the heating temperatures of the gas heating sub-units are the same or different.

[0068] In this embodiment, the gas heating unit 302 includes three gas heating sub-units, namely a gas heating sub-unit 3021 , a gas heating sub-unit 3022 , and a gas heating sub-unit 3023 .

[0069] The heating temperature of the gas heating subunit refers to the temperature that the heated gas can be heated to each time after passing through each gas heating subunit. For example, each gas heating subunit can raise the temperature by 1°C. The temperature of the heated gas before heating is 15°C. After the heated gas passes through the gas heating subunit 3021 for the first time, the temperature of the heated gas rises by 1°C to 16°C. When the 16°C gas passes through the gas heating subunit 3021 for the second time, the gas temperature rises by 1°C to 17°C, and so on.

[0070] The heating temperatures of the gas heating subunits are the same or different, that is, the heating temperatures of the gas heating subunit 3021, the gas heating subunit 3022, and the gas heating subunit 3023 are the same; or at least two of the heating temperatures of the gas heating subunit 3021, the gas heating subunit 3022, and the gas heating subunit 3023 are different.

[0071] In this embodiment, the heating temperatures of the gas heating subunits are all the same.

[0072] For example, each gas heating subunit can increase the temperature by 1°C. If the temperature of the gas to be heated is 15°C before heating, then after the gas to be heated passes through the gas heating subunit 3021 for the first time, the temperature of the gas to be heated increases by 1°C to 16°C. When the gas at 16°C passes through the gas heating subunit 3022 for the first time, the temperature of the gas increases by 1°C to 17°C. When the gas at 17°C passes through the gas heating subunit 3023 for the first time, the temperature of the gas increases by 1°C to 18°C.

[0073] It should be noted that the temperature increase of each gas heating subunit can be adjusted as needed. For example, if the temperature of the heated gas increases by 0.3°C each time it passes through the gas heating unit 302, the temperature that can be increased by the three gas heating subunits is set to 0.1°C.

[0074] The heating device 300 includes: a first gas temperature monitoring unit 301 connected to the other end of the gas heating unit 302 and used for monitoring the temperature of the gas after being heated by the gas heating unit 302 .

[0075] The first gas temperature monitoring unit 301 includes: one or more of a thermometer, a thermocouple, and a thermal resistor. In this embodiment, the first gas temperature monitoring unit 301 uses the thermocouple (not shown) to monitor the temperature of the gas heated by the gas heating unit 302 .

[0076] The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit 301 is further used to control the heated gas to flow to one of the at least three gas heating subunits based on the detected heated gas temperature;

[0077] wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to the first gas heating subunit among the at least three gas heating subunits;

[0078] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0079] It should be noted that the use of at least three refrigeration sub-units to gradually heat the gas to a first preset temperature range can not only make the temperature of the heated gas more uniform, but also can accurately control the gas to be heated to a required temperature.

[0080] Continue to refer Figure 2 In this embodiment, the number of gas heating subunits connected in series is 3. According to the direction of gas flow, gas heating subunit 3021 is connected in series with gas heating subunit 3022, and gas heating subunit 3022 is connected in series with gas heating subunit 3023.

[0081] In this embodiment, the required temperature range in the chamber 200 is a first preset temperature range of 22±1°C; the second preset temperature is 21°C, which is the lower limit of the first preset temperature range; the third preset temperature is 23°C, which is the upper limit of the first preset temperature range. The gas heating subunit 3021 heats up by 1°C each time, the gas heating subunit 3022 heats up by 1°C each time, and the gas heating subunit 3023 heats up by 1°C each time, and the total heating temperature of the three gas heating subunits is 3°C.

[0082] The first gas temperature monitoring unit 301 is also used to control the heated gas to flow to one of the three gas heating sub-units based on the detected heated gas temperature; wherein, in response to the difference between the second preset temperature and the heated gas temperature being greater than or equal to the sum of the total heating temperatures of the three gas heating sub-units, the heated gas is controlled to flow to the first gas heating sub-unit among the three gas heating sub-units.

[0083] In response to the difference between the second preset temperature and the gas temperature after heating being greater than the sum of the total heating temperatures of the three gas heating sub-units, an example is given as follows: the gas temperature after heating is 16°C, in response to the difference between the second preset temperature of 21°C and the gas temperature of 16°C after heating being 5°C greater than the sum of the total heating temperatures of the three gas heating sub-units of 3°C, the heated gas is controlled to flow to the first gas heating sub-unit 3021 of the three gas heating sub-units, and the gas is heated to a temperature of 19°C after passing through the gas heating sub-unit 3021, the gas heating sub-unit 3022 and the gas heating sub-unit 3023, and then the gas with a temperature of 19°C is controlled to flow to the gas heating sub-unit 3022 and the gas heating sub-unit 3023, and the gas with a temperature of 19°C is heated to the second preset temperature of 21°C, so that the gas temperature after heating is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0084] In response to the difference between the second preset temperature and the gas temperature after heating being equal to the sum of the total heating temperatures of the three gas heating sub-units, an example is given as follows: the gas temperature after heating is 18°C, in response to the difference between the second preset temperature 21°C and the gas temperature 18°C ​​after heating being 3°C, which is equal to the sum of the total heating temperatures of the three gas heating sub-units 3°C, the heated gas is controlled to flow to the first gas heating sub-unit 3021 among the three gas heating sub-units, and the gas is heated to the second preset temperature 21°C after passing through the gas heating sub-unit 3021, the gas heating sub-unit 3022 and the gas heating sub-unit 3023, so that the gas temperature after heating is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0085] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the three gas heating sub-units, the heated gas is controlled to flow to one of the three gas heating sub-units so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0086] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the three gas heating sub-units, an example is given as follows: the gas temperature after heating is 19°C, in response to the difference between the second preset temperature 21°C and the gas temperature 19°C after heating being 2°C less than the sum of the total heating temperatures of the three gas heating sub-units 3°C, the heated gas is controlled to flow to the gas heating sub-unit 3022 and the gas heating sub-unit 3023 among the three gas heating sub-units, so that the gas temperature after reheating is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, that is, the gas temperature after heating is within the first preset temperature range shown, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0087] Those skilled in the art can easily deduce a specific implementation method for heating the gas from other temperatures to within the first preset temperature range through the heating device 300 according to the technical solution disclosed in the embodiment of the present invention.

[0088] Continue to refer Figure 2 The gas temperature regulation system includes: a refrigeration device 400, located outside the shell, for cooling the gas flowing to the chamber 200 to a first preset temperature range.

[0089] It should be noted that, with respect to the first preset temperature range involved in the refrigeration device 400 , reference is made to the description of the first preset temperature range in the heating device 300 , which will not be repeated here.

[0090] The refrigeration device 400 includes: a gas refrigeration unit 402, one end of the gas refrigeration unit 402 is connected to the third end 5013 of the first four-way valve 501, and is used to cool the gas flowing out through the first four-way valve 501. The gas refrigeration unit 402 includes at least 3 gas refrigeration sub-units, and the refrigeration temperatures of the gas refrigeration sub-units are the same or different.

[0091] In this embodiment, the gas refrigeration unit 402 includes three gas refrigeration sub-units, namely a gas refrigeration sub-unit 4021, a gas refrigeration sub-unit 4022, and a gas refrigeration sub-unit 4023.

[0092] The refrigeration temperature of the gas refrigeration sub-unit refers to the temperature that can be reduced after the gas to be refrigerated passes through each gas refrigeration sub-unit each time. For example, each gas refrigeration sub-unit can reduce the temperature by 1°C. The temperature of the gas to be refrigerated before refrigeration is 23°C. After the gas to be refrigerated passes through the gas refrigeration sub-unit 4021 for the first time, the temperature of the gas to be refrigerated is reduced by 1°C to 22°C. When the 22°C gas passes through the gas refrigeration sub-unit 4021 for the second time, the gas temperature is reduced by 1°C to 21°C, and so on.

[0093] The refrigeration temperatures of the gas refrigeration subunits are the same or different, that is, the refrigeration temperatures of the gas refrigeration subunit 4021, the gas refrigeration subunit 4022, and the gas refrigeration subunit 4023 are the same; or at least two of the refrigeration temperatures of the gas refrigeration subunit 4021, the gas refrigeration subunit 4022, and the gas refrigeration subunit 4023 are different.

[0094] In this embodiment, the refrigeration temperatures of the gas refrigeration sub-units are all the same.

[0095] For example, each gas refrigeration subunit can cool the temperature of 1°C, and the temperature of the gas to be refrigerated before refrigeration is 25°C. After the gas to be refrigerated passes through the gas refrigeration subunit 4021 for the first time, the temperature of the gas to be refrigerated is cooled by 1°C to 24°C. When the 24°C gas passes through the gas refrigeration subunit 4022 for the first time, the gas temperature is cooled by 1°C to 23°C. When the 23°C gas passes through the gas refrigeration subunit 4023 for the first time, the gas temperature is cooled by 1°C to 22°C.

[0096] It should be noted that the refrigeration temperature of each gas refrigeration subunit can be adjusted as needed. For example, if the refrigeration temperature of the refrigerated gas is 0.3°C each time it passes through the gas refrigeration unit 402, the refrigeration temperature of the three gas refrigeration subunits can be set to 0.1°C.

[0097] The refrigeration device 400 includes: a second gas temperature monitoring unit 401 connected to the other end of the gas refrigeration unit 402 and used for monitoring the temperature of the gas after being refrigerated by the gas refrigeration unit 402 .

[0098] The second gas temperature monitoring unit 401 includes: one or more of a thermometer, a thermocouple, and a thermal resistor. In this embodiment, the second gas temperature monitoring unit 401 uses the thermocouple to monitor the temperature of the gas after being cooled by the gas cooling unit 402 .

[0099] The at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit 401 is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature;

[0100] Wherein, in response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units;

[0101] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to one of the at least three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0102] It should be noted that the use of at least three refrigeration sub-units to gradually cool the gas to a first preset temperature range can not only make the temperature of the refrigerated gas more uniform, but also can accurately control the refrigeration of the gas to a required temperature.

[0103] Continue to refer Figure 2 In this embodiment, the number of gas refrigeration sub-units connected in series is 3. According to the direction of gas flow, gas refrigeration sub-unit 4021 is connected in series with gas refrigeration sub-unit 4022, and gas refrigeration sub-unit 4022 is connected in series with gas refrigeration sub-unit 4023.

[0104] In this embodiment, the required temperature range in the chamber 200 is the first preset temperature range of 22±1°C; the second preset temperature is 21°C, which is the lower limit of the first preset temperature range; the third preset temperature is 23°C, which is the upper limit of the first preset temperature range. The gas refrigeration subunit 4021 has a refrigeration temperature of 1°C each time, the gas refrigeration subunit 4022 has a refrigeration temperature of 1°C each time, and the gas refrigeration subunit 4023 has a refrigeration temperature of 1°C each time, then the total refrigeration temperature of the three gas refrigeration subunits is 3°C.

[0105] The second gas temperature monitoring unit 401 is also used to control the refrigerated gas to flow to one of the three gas refrigeration sub-units based on the detected refrigerated gas temperature; wherein, in response to the difference between the third preset temperature and the refrigerated gas temperature being greater than or equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit among the three gas refrigeration sub-units.

[0106] In response to the difference between the third preset temperature and the gas temperature after refrigeration being greater than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 28°C, in response to the difference between the third preset temperature of 23°C and the gas temperature of 28°C after refrigeration being 5°C, which is greater than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units of 3°C, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit 4021 among the three gas refrigeration sub-units, and the gas is refrigerated to a temperature of 25°C after passing through the gas refrigeration sub-unit 4021, the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, and then the gas with a temperature of 25°C is controlled to flow to the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, and the gas with a temperature of 25°C is refrigerated to the third preset temperature of 23°C, so that the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200, and maintaining the temperature inside the chamber 200 stable.

[0107] In response to the difference between the third preset temperature and the gas temperature after refrigeration being equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 26°C, in response to the difference between the third preset temperature 23°C and the gas temperature 26°C after refrigeration being 3°C, which is equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units 3°C, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit 4021 among the three gas refrigeration sub-units, and the gas is refrigerated to the second preset temperature of 21°C after passing through the gas refrigeration sub-unit 4021, the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, so that the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200, and maintaining the temperature inside the chamber 200 stable.

[0108] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, the refrigerated gas is controlled to flow to one of the three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200 and maintaining the temperature inside the chamber 200 stable.

[0109] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 25°C, in response to the difference of 2°C between the third preset temperature 23°C and the gas temperature 25°C after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, which is 3°C, the refrigerated gas is controlled to flow to the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023 among the three gas refrigeration sub-units, so that the gas temperature after further refrigeration is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, that is, the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200, thereby maintaining the temperature inside the chamber 200 stable.

[0110] Those skilled in the art can easily deduce a specific implementation method of cooling the gas from other temperatures to within the first preset temperature range through the refrigeration device 400 according to the technical solution disclosed in the embodiment of the present invention.

[0111] Continue to refer Figure 2 The gas temperature regulation system includes: a temperature monitoring unit 600, located outside the shell, for monitoring the temperature of the gas flowing to the chamber 200.

[0112] The temperature monitoring unit 600 includes: one or more of a thermometer, a thermocouple, and a thermal resistor. In this embodiment, the temperature monitoring unit 600 uses the thermocouple to monitor the temperature of the gas flowing to the chamber 200 .

[0113] Continue to refer Figure 2 The gas temperature regulation system includes: a control unit 500, which is respectively connected to the temperature monitoring unit 600, the refrigeration device 400, the heating device 300, and the chamber 200, and is used to control the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400 or the heating device 300 or the chamber 200 based on the monitoring result of the temperature monitoring unit 600.

[0114] The control unit 500 includes: a first four-way valve 501 and a motor (not shown), wherein the motor is used to control the opening and closing of the first four-way valve 501 .

[0115] The first end 5011 of the first four-way valve 501 is connected to the temperature monitoring unit 600, the second end 5012 of the first four-way valve 501 is connected to the heating device 300, the third end 5013 of the first four-way valve 501 is connected to the refrigeration device 400, and the fourth end 5014 of the first four-way valve 501 is connected to the chamber 200, wherein the first four-way valve 501 controls the gas to flow from the first end 5011 to the heating device 300 via the second end 5012 in response to the temperature of the gas flowing out of the temperature monitoring unit 600 being less than or equal to the second preset temperature, and the second preset temperature is heated to within the first preset temperature range through the heating device 300, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200. An example is given as follows: the temperature of the gas flowing out of the temperature monitoring unit 600 is 16°C less than or equal to the second preset temperature 21°C, and the control unit 500 controls the gas to flow to the heating device 300 to heat the gas to the first preset temperature range.

[0116] In response to the temperature of the gas flowing out of the temperature monitoring unit 600 being greater than or equal to the third preset temperature, the first four-way valve 501 controls the gas to flow from the first end 5011 to the refrigeration device 400 via the third end 5013, and the third preset temperature is cooled to the first preset temperature range through the refrigeration device 400, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200 and maintaining the stability of the temperature inside the chamber 200. An example is given below: the temperature of the gas flowing out of the temperature monitoring unit 600 is 25°C, which is greater than the third preset temperature of 23°C, and the control unit 500 controls the gas to flow to the heating device 300 to heat the gas to the first preset temperature range.

[0117] In response to the temperature of the gas flowing out of the temperature monitoring unit 600 being greater than the second preset temperature and less than the third preset temperature, the first four-way valve 501 controls the gas to flow from the first end 5011 to the chamber 200 via the fourth end 5014. An example is given below: the temperature of the gas flowing out of the temperature monitoring unit 600 is 22°C, which is greater than the second preset temperature of 21°C and less than the third preset temperature of 23°C, and the control unit 500 controls the gas to flow to the chamber 200.

[0118] Continue to refer Figure 2 The gas temperature regulating system comprises: a gas storage unit 800, which is located outside the shell and connected to the temperature monitoring unit 600, and is used to store gas to be cooled or to store gas to be heated.

[0119] The gas storage unit 800 includes: a gas storage tank (not shown), a gas pressure valve (not shown), a connection port, etc.

[0120] The shape of the gas tank is a column structure; the material of the gas tank includes metal material (such as stainless steel material, aluminum material, etc.) or anti-static plastic material (such as polycarbonate, electro-polypropylene, acrylic, etc.); the column structure includes any of the following: cylindrical structure, elliptical cylindrical structure, square cylindrical structure, etc. The embodiment of the present application does not limit the material and specific column structure of the gas tank, and those skilled in the art can adjust the settings according to actual conditions.

[0121] The air pressure valve is used to monitor the gas pressure in the gas storage tank.

[0122] It should be noted that in the implementation of the present invention, the gas to be heated or the gas to be cooled is the gas in the gas transmission pipeline outside the shell. The gas in the gas transmission pipeline outside the shell is transmitted to the chamber 200 through the transmission pipeline.

[0123] Continue to refer Figure 2 The gas temperature regulation system includes: a first PLC programmable logic controller 1011 and a second PLC programmable logic controller 1012.

[0124] The first PLC programmable logic controller 1011 is used to control the gas after passing through the first gas temperature monitoring unit 301 to flow to a single gas heating subunit in the gas heating unit 302. In this embodiment, the first PLC programmable logic controller 1011 controls the gas after passing through the first gas temperature monitoring unit 301 to flow to the gas heating subunit 3021, the gas heating subunit 3022, or the gas heating subunit 3023 in the gas heating unit 302.

[0125] The second PLC programmable logic controller 1012 is used to control the gas after passing through the second gas temperature monitoring unit 401 to flow to a single gas refrigeration subunit in the gas refrigeration unit 402. In this embodiment, the second PLC programmable logic controller 1012 controls the gas after passing through the second gas temperature monitoring unit 401 to flow to the gas refrigeration subunit 4021, the gas refrigeration subunit 4022, or the gas refrigeration subunit 4023 in the gas refrigeration unit 402.

[0126] Continue to refer Figure 2 The fourth end 5014 of the first four-way valve 501 is connected to the first end 701 of the second four-way valve 700, the gas heating unit 302 is connected to the second end 702 of the second four-way valve 700 via the first gas temperature monitoring unit 301, the gas refrigeration unit 402 is connected to the third end 703 of the second four-way valve 700 via the second gas temperature monitoring unit 401, and the fourth end 704 of the second four-way valve 700 is connected to the chamber 200.

[0127] Continue to refer Figure 2 The gas temperature regulating system includes: a first insulation unit 1111, located between the first gas temperature monitoring unit 301 and the second four-way valve 700, for maintaining the temperature of the gas heated by the gas heating unit 302, so that the temperature of the gas entering the chamber 200 is within a first preset temperature range in the chamber 200, reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0128] The first heat-insulating unit 1111 includes: a packaging film packaged on the pipeline, a heat-insulating material located on the packaging film, a waterproof and antifreeze material located on the surface of the heat-insulating material, and a fixer to fix the heat-insulating material.

[0129] The second insulation unit is located between the second gas temperature monitoring unit 401 and the second four-way valve 700, and is used to maintain the temperature of the gas after refrigeration by the refrigeration device 400, so that the temperature of the gas entering the chamber 200 is within the first preset temperature range in the chamber 200, thereby reducing the risk of the gas temperature outside the chamber 200 affecting the temperature inside the chamber 200 and maintaining the stability of the temperature inside the chamber 200.

[0130] The second heat-insulating unit comprises: a packaging film packaged on the pipeline, a heat-insulating material located on the packaging film, a waterproof and antifreeze material located on the surface of the heat-insulating material, and a fixer for fixing the heat-insulating material.

[0131] In order to solve the technical problem, accordingly, an embodiment of the present invention further provides a gas temperature adjustment method, which is applied to a gas temperature adjustment system; Figure 3 It is a flow chart of a gas temperature adjustment method according to an embodiment of the present invention.

[0132] Continue to refer Figure 2 The gas temperature regulation method is applied to a gas temperature regulation system. The gas temperature regulation system comprises: a shell having a chamber 200; a refrigeration device 400, a heating device 300, a temperature monitoring unit and a control unit 500 located outside the shell; the control unit 500 is connected to the temperature monitoring unit 600, the refrigeration device 400, the heating device 300 and the chamber 200, respectively.

[0133] The gas temperature regulation system further includes: a gas storage unit 800 .

[0134] The gas temperature regulating system further comprises a first PLC programmable logic controller 1011, the heating device 300 comprises: a gas heating unit 302, the gas heating unit 302 comprises at least three gas heating sub-units, and a first gas temperature monitoring unit 301;

[0135] The at least three gas heating sub-units are connected in series, and the first gas temperature monitoring unit 301 is also used for controlling the heated gas to flow to one of the at least three gas heating sub-units based on the detected heated gas temperature by the first PLC programmable logic controller 1011.

[0136] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to the first gas heating subunit among the at least three gas heating subunits;

[0137] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0138] The gas temperature adjustment system further includes a second PLC programmable logic controller 1012, and the refrigeration device 400 includes: a gas refrigeration unit 402, and the gas refrigeration unit 402 includes at least three gas refrigeration sub-units;

[0139] The at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit 401 is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature;

[0140] In response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units;

[0141] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas heating subunits, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to one of the at least three gas refrigeration subunits so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0142] For the specific description of the shell with chamber 200, refrigeration device 400, heating device 300, temperature monitoring unit, control unit 500, gas storage unit 800, first PLC programmable logic controller 1011, and second PLC programmable logic controller 1012, please refer to the description of the aforementioned gas temperature control system and will not be repeated here.

[0143] Continue to refer Figure 2 In this embodiment, the number of the gas heating sub-units is 3; the number of the gas cooling sub-units is 3; the required temperature range in the chamber 200 is a first preset temperature range of 22±1°C; the second preset temperature is 21°C, which is the lower limit of the first preset temperature range; the third preset temperature is 23°C, which is the upper limit of the first preset temperature range.

[0144] In this embodiment, the cooling temperature of the gas refrigeration subunit 4021 is 1°C each time, the cooling temperature of the gas refrigeration subunit 4022 is 1°C each time, and the cooling temperature of the gas refrigeration subunit 4023 is 1°C each time, so the total cooling temperature of the three gas refrigeration subunits is 3°C. The heating temperature of the gas heating subunit 3021 is 1°C each time, the heating temperature of the gas heating subunit 3022 is 1°C each time, and the heating temperature of the gas heating subunit 3023 is 1°C each time, so the total cooling temperature of the three gas heating subunits is 3°C.

[0145] The gas temperature adjustment method comprises the following steps:

[0146] Step S11 : the temperature monitoring unit 600 monitors the temperature of the gas flowing to the chamber 200 .

[0147] In this embodiment, the temperature monitoring unit 600 monitors the temperature of the gas flowing to the chamber 200 , that is, before the gas in the gas storage unit 800 flows to the chamber 200 , the temperature monitoring unit 600 needs to monitor the temperature of the gas to determine whether the gas can flow to the chamber 200 .

[0148] Step S12 : the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400 or the heating device 300 or the chamber 200 according to the gas temperature monitored by the temperature monitoring unit 600 .

[0149] The first case: if the gas temperature monitored by the temperature monitoring unit 600 is within the first preset temperature range of 22±1° C., the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the chamber 200 .

[0150] Second situation: if the gas temperature monitored by the temperature monitoring unit 600 is lower than the second preset temperature of 21° C., the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the heating device 300 .

[0151] In response to the difference between the second preset temperature and the heated gas temperature being greater than or equal to the sum of the total heating temperatures of the three gas heating subunits, the first PLC programmable logic controller 1011 controls the heated gas to flow to the first gas heating subunit among the three gas heating subunits.

[0152] In response to the difference between the second preset temperature and the gas temperature after heating being greater than the sum of the total heating temperatures of the three gas heating subunits, an example is given as follows: the gas temperature after heating is 16°C, in response to the difference between the second preset temperature of 21°C and the gas temperature of 16°C after heating being 5°C greater than the sum of the total heating temperatures of the three gas heating subunits of 3°C, the first PLC programmable logic controller 1011 controls the heated gas to flow to the first gas heating subunit 3021 of the three gas heating subunits, and the gas is heated to a temperature of 19°C after passing through the gas heating subunit 3021, the gas heating subunit 3022 and the gas heating subunit 3023, and then the first PLC programmable logic controller 1011 controls the gas with a temperature of 19°C to flow to the gas heating subunit 3022 and the gas heating subunit 3023, and heats the gas with a temperature of 19°C to the second preset temperature of 21°C, that is, the gas temperature after heating is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0153] In response to the difference between the second preset temperature and the gas temperature after heating being equal to the sum of the total heating temperatures of the three gas heating sub-units, an example is given as follows: the gas temperature after heating is 18°C, in response to the difference between the second preset temperature 21°C and the gas temperature 18°C ​​after heating being 3°C, which is equal to the sum of the total heating temperatures of the three gas heating sub-units 3°C, the first PLC programmable logic controller 1011 controls the heated gas to flow to the first gas heating sub-unit 3021 among the three gas heating sub-units, and the gas is heated to the second preset temperature 21°C after passing through the gas heating sub-unit 3021, the gas heating sub-unit 3022 and the gas heating sub-unit 3023, that is, the gas temperature after heating is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0154] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the three gas heating sub-units, the first PLC programmable logic controller 1011 controls the heated gas to flow to one of the three gas heating sub-units, so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0155] In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the three gas heating sub-units, an example is given as follows: the gas temperature after heating is 19°C, in response to the difference between the second preset temperature of 21°C and the gas temperature of 19°C after heating being 2°C less than the sum of the total heating temperatures of the three gas heating sub-units of 3°C, the first PLC programmable logic controller 1011 controls the heated gas to flow to the gas heating sub-unit 3022 and the gas heating sub-unit 3023 among the three gas heating sub-units, so that the gas temperature after reheating is greater than or equal to the second preset temperature of 21°C and less than or equal to the third preset temperature of 23°C, that is, the gas temperature after heating is within the first preset temperature range shown, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0156] The third situation: if the gas temperature monitored by the temperature monitoring unit 600 is greater than the third preset temperature of 23° C., the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400 .

[0157] In response to the difference between the third preset temperature and the refrigerated gas temperature being greater than or equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to the first gas refrigeration sub-unit among the three gas refrigeration sub-units.

[0158] In response to the difference between the third preset temperature and the gas temperature after refrigeration being greater than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 28°C, in response to the difference between the third preset temperature of 23°C and the gas temperature of 28°C after refrigeration being 5°C, which is greater than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units of 3°C, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to the first gas refrigeration sub-unit 4021 of the three gas refrigeration sub-units, and the gas is refrigerated to a temperature of 25°C after passing through the gas refrigeration sub-unit 4021, the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, and then the second PLC programmable logic controller 1012 controls the gas with a temperature of 25°C to flow to the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, and the gas with a temperature of 25°C is refrigerated to the third preset temperature of 23°C, so that the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the temperature stability in the chamber 200.

[0159] In response to the difference between the third preset temperature and the gas temperature after refrigeration being equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 26°C, in response to the difference between the third preset temperature of 23°C and the gas temperature of 26°C after refrigeration being 3°C, which is equal to the sum of the total refrigeration temperatures of the three gas refrigeration sub-units of 3°C, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to the first gas refrigeration sub-unit 4021 among the three gas refrigeration sub-units, and after passing through the gas refrigeration sub-unit 4021, the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023, the gas is refrigerated to the second preset temperature of 21°C, that is, the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the temperature stability in the chamber 200.

[0160] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to one of the three gas refrigeration sub-units, so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the temperature inside the chamber 200 stable.

[0161] In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units, an example is given as follows: the gas temperature after refrigeration is 25°C, in response to the difference of 2°C between the third preset temperature of 23°C and the gas temperature of 25°C after refrigeration being less than the sum of the total refrigeration temperatures of the three gas refrigeration sub-units of 3°C, the second PLC programmable logic controller 1012 controls the refrigerated gas to flow to the gas refrigeration sub-unit 4022 and the gas refrigeration sub-unit 4023 among the three gas refrigeration sub-units, so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature of 21°C and less than or equal to the third preset temperature of 23°C, that is, the gas temperature after refrigeration is within the first preset temperature range, thereby reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the temperature stability in the chamber 200.

[0162] Although the present invention has been disclosed as above in the form of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art may make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the protection scope of the technical solution of the present invention.

Claims

1. A gas temperature control system, characterized in that: include: a housing having a chamber; a heating device, located outside the housing, for heating the gas flowing to the chamber to a first preset temperature range; a refrigeration device, located outside the housing, for cooling the gas flowing to the chamber to the first preset temperature range; a temperature monitoring unit, located outside the housing, for monitoring the temperature of the gas flowing to the chamber; A control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, respectively, and is used to control the gas flowing out of the temperature monitoring unit to flow to the refrigeration device or the heating device or the chamber based on the monitoring result of the temperature monitoring unit.

2. The gas temperature control system according to claim 1, characterized in that: Also includes: A gas storage unit is located outside the shell and connected to the temperature monitoring unit, and is used to store gas to be cooled or gas to be heated.

3. The gas temperature control system according to claim 1, characterized in that: The control unit comprises: a first four-way valve; The first end of the first four-way valve is connected to the temperature monitoring unit, the second end of the first four-way valve is connected to the heating device, the third end of the first four-way valve is connected to the refrigeration device, and the fourth end of the first four-way valve is connected to the chamber, wherein, in response to the temperature of the gas flowing out of the temperature monitoring unit being less than or equal to the second preset temperature, the first four-way valve controls the gas to flow from the first end to the heating device via the second end, in response to the temperature of the gas flowing out of the temperature monitoring unit being greater than or equal to the third preset temperature, the first four-way valve controls the gas to flow from the first end to the refrigeration device via the third end, and in response to the temperature of the gas flowing out of the temperature monitoring unit being greater than the second preset temperature and less than the third preset temperature, the first four-way valve controls the gas to flow from the first end to the chamber via the fourth end; The heating device comprises: a gas heating unit, one end of which is connected to the second end of the first four-way valve and is used to heat the gas flowing out of the first four-way valve, the gas heating unit comprising at least three gas heating sub-units, and the heating temperatures of the gas heating sub-units are the same or different; The first gas temperature monitoring unit is connected to the other end of the gas heating unit and is used to monitor the temperature of the gas after being heated by the gas heating unit.

4. The gas temperature control system according to claim 3, characterized in that: The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is further used to control the heated gas to flow to one of the at least three gas heating subunits based on the detected heated gas temperature; wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to the first gas heating subunit among the at least three gas heating subunits; In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the heated gas is controlled to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

5. The gas temperature control system according to claim 3, characterized in that: The refrigeration device comprises: a gas refrigeration unit, one end of the gas refrigeration unit is connected to the third end of the first four-way valve, and is used to cool the gas flowing out of the first four-way valve, the gas refrigeration unit comprises at least three gas refrigeration sub-units, and the refrigeration temperatures of the gas refrigeration sub-units are the same or different; The second gas temperature monitoring unit is connected to the other end of the gas refrigeration unit and is used to monitor the temperature of the gas after being cooled by the gas refrigeration unit.

6. The gas temperature control system according to claim 5, characterized in that: The at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature; Wherein, in response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units; In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the refrigerated gas is controlled to flow to one of the at least three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

7. The gas temperature control system according to claim 5, characterized in that: The temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor; The first gas temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor; The second gas temperature monitoring unit includes: one or more of a thermometer, a thermocouple, and a thermal resistor.

8. The gas temperature control system according to claim 7, characterized in that: Also includes: a second four-way valve, the fourth end of the first four-way valve is connected to the first end of the second four-way valve, the gas heating unit is connected to the second end of the second four-way valve via the first gas temperature monitoring unit, the gas refrigeration unit is connected to the third end of the second four-way valve via the second gas temperature monitoring unit, and the fourth end of the second four-way valve is connected to the chamber.

9. The gas temperature control system according to claim 5, characterized in that: Also includes: a first PLC programmable logic controller, used for controlling the gas after passing through the first gas temperature monitoring unit to flow to a single gas heating sub-unit in the gas heating unit; The second PLC programmable logic controller is used to control the gas after passing through the second gas temperature monitoring unit to flow to a single gas refrigeration sub-unit in the gas refrigeration unit.

10. The gas temperature adjustment system according to claim 8, characterized in that: include: a first heat preservation unit, located between the first gas temperature monitoring unit and the second four-way valve, for maintaining the temperature of the gas heated by the gas heating unit; The second heat preservation unit is located between the second gas temperature monitoring unit and the second four-way valve, and is used to maintain the temperature of the gas after being refrigerated by the refrigeration device.

11. A gas temperature regulation method, applied to a gas temperature regulation system, characterized in that: The gas temperature regulating system comprises: a housing having a chamber; A refrigeration device, a heating device, a temperature monitoring unit and a control unit located outside the housing; The control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber respectively; The method comprises: the temperature monitoring unit monitors the temperature of the gas flowing to the chamber; and the control unit controls the gas flowing out of the temperature monitoring unit to flow to the refrigeration device, the heating device or the chamber according to the gas temperature monitored by the temperature monitoring unit.

12. The gas temperature adjustment method according to claim 11, characterized in that: The gas temperature regulation system further comprises a first PLC programmable logic controller, the heating device comprises: a gas heating unit, the gas heating unit comprises at least 3 gas heating sub-units, a first gas temperature monitoring unit; The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is further used for controlling the heated gas to flow to one of the at least three gas heating subunits by the first PLC programmable logic controller based on the detected heated gas temperature; Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to the first gas heating subunit among the at least three gas heating subunits; In response to the difference between the second preset temperature and the gas temperature after heating being less than the sum of the total heating temperatures of the at least three gas heating subunits, the first PLC programmable logic controller controls the heated gas to flow to one of the at least three gas heating subunits so that the gas temperature after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

13. The gas temperature adjustment method according to claim 11, characterized in that: The gas temperature adjustment system further comprises a second PLC programmable logic controller, the refrigeration device comprises: a gas refrigeration unit, the gas refrigeration unit comprises at least 3 gas refrigeration sub-units, and a second gas temperature monitoring unit; The at least three gas refrigeration sub-units are connected in series, and the second gas temperature monitoring unit is further used to control the refrigerated gas to flow to one of the at least three gas refrigeration sub-units based on the detected refrigerated gas temperature; Wherein, in response to the difference between the third preset temperature and the temperature of the refrigerated gas being greater than or equal to the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the second PLC programmable logic controller controls the refrigerated gas to flow to the first gas refrigeration sub-unit among the at least three gas refrigeration sub-units; In response to the difference between the third preset temperature and the gas temperature after refrigeration being less than the sum of the total refrigeration temperatures of the at least three gas refrigeration sub-units, the second PLC programmable logic controller controls the refrigerated gas to flow to one of the at least three gas refrigeration sub-units so that the gas temperature after re-refrigeration is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

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