Gas temperature regulation system and regulation method

Abstract

The embodiment of the present application provides a kind of gas temperature regulating system and adjusting method, comprising: the shell with chamber;Heating device, located in the shell, for heating the gas flowing to the chamber to the first preset temperature range;Refrigeration device, located in the shell, for cooling the gas flowing to the chamber to the first preset temperature range;Temperature monitoring unit, located in the shell, for monitoring the gas temperature flowing to the chamber;Control unit is connected with the temperature monitoring unit, the refrigeration device, the heating device, the chamber respectively, for based on the monitoring result of the temperature monitoring unit, control from the temperature monitoring unit outflow gas flows to the refrigeration device or the heating device or the chamber.The embodiment of the present application can reduce the risk of condensation in the chamber gas transmission pipeline.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more particularly to a gas temperature regulation system and regulation method. Background Technology

[0002] In the manufacturing industry, maintaining a constant temperature within a thermostatic chamber is crucial for improving product quality and the stability of the production process. A constant temperature within the chamber reduces errors caused by thermal expansion and changes in material properties, particularly in fields such as precision engineering, semiconductor manufacturing, and chemical processing. In semiconductor wafer fabrication, a constant temperature helps maintain the consistency of photoresist and the uniformity of chemical reactions, ensuring accurate transfer of circuit patterns. In plastics and metal processing, a constant temperature prevents uneven cooling of materials, reducing molding defects and internal stress. Therefore, temperature control technology within thermostatic chambers plays an indispensable role in improving production efficiency, reducing costs, and ensuring that final products meet stringent quality standards.

[0003] However, in actual production processes, condensation occurs in the gas transmission pipelines within the constant temperature chamber. Therefore, how to provide technical solutions to reduce the risk of condensation in the gas transmission pipelines within the constant temperature chamber has become a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] The technical problem solved by the present invention is to provide a gas temperature regulation system to reduce the risk of condensation in gas transmission pipes within a chamber.

[0005] To address the aforementioned problems, embodiments of the present invention provide a gas temperature regulation system, comprising: a housing having a chamber; a heating device located outside the housing for heating gas flowing into the chamber to a first preset temperature range; a cooling device located outside the housing for cooling gas flowing into the chamber to the first preset temperature range; a temperature monitoring unit located outside the housing for monitoring the temperature of gas flowing into the chamber; and a control unit connected to the temperature monitoring unit, the cooling device, the heating device, and the chamber, respectively, for controlling the flow of gas exiting the temperature monitoring unit to the cooling device, the heating device, or the chamber based on the monitoring results of the temperature monitoring unit.

[0006] Optionally, the gas temperature control system further includes:

[0007] A gas storage unit, located outside the housing and connected to the temperature monitoring unit, is used to store gas to be cooled or gas to be heated.

[0008] Optionally, the control unit includes: a first four-way valve;

[0009] The first end of the first four-way valve is connected to the temperature monitoring unit, the second end of the first four-way valve is connected to the heating device, the third end of the first four-way valve is connected to the refrigeration device, and the fourth end of the first four-way valve is connected to the chamber. The first four-way valve controls the gas to flow from the first end to the heating device via the second end in response to a temperature less than or equal to a second preset temperature. The first four-way valve also controls the gas to flow from the first end to the refrigeration device via the third end in response to a temperature greater than or equal to a third preset temperature. Finally, the first four-way valve controls the gas to flow from the first end to the chamber via the fourth end in response to a temperature greater than the second preset temperature and less than the third preset temperature.

[0010] The heating device includes: a gas heating unit, one end of which is connected to the second end of the first four-way valve for heating the gas flowing out of the first four-way valve; the gas heating unit includes at least three gas heating sub-units, and the heating temperatures of the gas heating sub-units may be the same or different.

[0011] The first gas temperature monitoring unit is connected to the other end of the gas heating unit and is used to monitor the temperature of the gas after it has been heated by the gas heating unit.

[0012] Optionally, the at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is further configured to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas.

[0013] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to the first gas heating sub-unit among the at least three gas heating sub-units;

[0014] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0015] Optionally, the refrigeration device includes: a gas refrigeration unit, one end of which is connected to the third end of the first four-way valve for cooling the gas flowing out through the first four-way valve; the gas refrigeration unit includes at least three gas refrigeration sub-units, and the gas refrigeration sub-units may have the same or different refrigeration temperatures.

[0016] The second gas temperature monitoring unit is connected to the other end of the gas refrigeration unit and is used to monitor the gas temperature after it has been cooled by the gas refrigeration unit.

[0017] Optionally, the at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit is further used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas.

[0018] Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to the first gas cooling sub-unit among the at least three gas cooling sub-units;

[0019] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0020] Optionally, the temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD).

[0021] The first gas temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD).

[0022] The second gas temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD).

[0023] Optionally, the gas temperature regulation system further includes: a second four-way valve, wherein the fourth end of the first four-way valve is connected to the first end of the second four-way valve, the gas heating unit is connected to the second end of the second four-way valve via the first gas temperature monitoring unit, the gas cooling unit is connected to the third end of the second four-way valve via the second gas temperature monitoring unit, and the fourth end of the second four-way valve is connected to the chamber.

[0024] Optionally, the gas temperature control system further includes:

[0025] The first PLC programmable logic controller is used to control the flow of gas after passing through the first gas temperature monitoring unit to a single gas heating subunit in the gas heating unit;

[0026] The second PLC programmable logic controller is used to control the flow of gas after passing through the second gas temperature monitoring unit to a single gas refrigeration subunit in the gas refrigeration unit.

[0027] Optionally, the gas temperature regulation system includes: a first heat preservation unit located between the first gas temperature monitoring unit and the second four-way valve, used to maintain the gas temperature after being heated by the gas heating unit;

[0028] The second insulation unit, located between the second gas temperature monitoring unit and the second four-way valve, is used to maintain the temperature of the gas after it has been cooled by the refrigeration device.

[0029] Accordingly, the present invention also provides a gas temperature regulation method, applied to a gas temperature regulation system, the gas temperature regulation system comprising:

[0030] A shell with chambers;

[0031] The refrigeration device, heating device, temperature monitoring unit, and control unit are located outside the housing;

[0032] The control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, respectively.

[0033] The method includes: the temperature monitoring unit monitoring the temperature of the gas flowing into the chamber; and the control unit controlling the flow of gas from the temperature monitoring unit to the refrigeration device, the heating device, or the chamber based on the gas temperature monitored by the temperature monitoring unit.

[0034] Optionally, the gas temperature regulation system further includes a first PLC programmable logic controller, and the heating device includes: a gas heating unit, the gas heating unit including at least three gas heating sub-units, and a first gas temperature monitoring unit;

[0035] The at least three gas heating subunits are connected in series. The first gas temperature monitoring unit is also used to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas.

[0036] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to the first gas heating sub-unit among the at least three gas heating sub-units;

[0037] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0038] Optionally, the gas temperature regulation system further includes a second PLC programmable logic controller, and the refrigeration device includes: a gas refrigeration unit, the gas refrigeration unit including at least 3 gas refrigeration sub-units, and a second gas temperature monitoring unit;

[0039] The at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit is also used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas.

[0040] Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the second PLC programmable logic controller controls the flow of the cooled gas to the first gas cooling sub-unit among the at least three gas cooling sub-units;

[0041] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas cooling sub-units, the second PLC programmable logic controller controls the flow of the cooled gas to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0042] Compared with the prior art, the technical solution of the embodiments of the present invention has the following advantages:

[0043] This invention provides a gas temperature regulation system, comprising: a housing having a chamber; a heating device for heating gas flowing into the chamber to a first preset temperature range; a cooling device for cooling gas flowing into the chamber to the first preset temperature range; and a control unit connected to the temperature monitoring unit, the cooling device, the heating device, and the chamber. When the temperature monitoring unit detects that the gas temperature flowing into the chamber is less than the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow into the heating device; when the temperature monitoring unit detects that the gas temperature flowing into the chamber is within the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow into the chamber; and when the temperature monitoring unit detects that the gas temperature flowing into the chamber is greater than the first preset temperature range, the control unit controls the gas flowing out of the temperature monitoring unit to flow into the cooling device. This ensures that the gas temperature flowing into the chamber is always within the first preset temperature range, reducing the risk of condensation in the gas transmission pipes within the chamber. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0045] Figure 1 This is a partial structural diagram of a gas supply device;

[0046] Figure 2 This is a schematic diagram of a gas temperature regulation system according to an embodiment of the present invention;

[0047] Figure 3 This is a schematic flowchart of a gas temperature regulation method according to an embodiment of the present invention. Detailed Implementation

[0048] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0049] As can be seen from the background technology, condensation occurs in the gas transmission pipelines within the constant temperature chamber during actual production processes; the following section combines... Figure 1 The reasons for condensation in the gas transmission pipes within the constant temperature chamber were analyzed.

[0050] refer to Figure 1 This is a partial structural schematic diagram of a gas supply device. The gas supply device includes: a bulk gas station 100 for storing gases used in the manufacturing process; a constant temperature chamber 101 for providing constant temperature and humidity for the manufacturing process; and a transmission pipeline 102 for transmitting gases from the bulk gas station 100 to the constant temperature chamber 101. The gas transmission pipeline 102 connects the bulk gas station 100 and the constant temperature chamber 101. The transmission pipeline 102 includes a first pipeline region 103 located outside the constant temperature chamber and a second pipeline region 104 located inside the constant temperature chamber.

[0051] However, the following problems exist in the process of transferring gas from the bulk gas station 100 to the constant temperature chamber 101:

[0052] First, condensation occurred in the gas transmission pipe inside the constant temperature chamber 101.

[0053] In winter, the temperature outside the constant temperature chamber 101 is low, causing the temperature of the first pipe area 103 to drop. When the gas passes through the first pipe area 103, the gas temperature also drops, resulting in a large temperature difference between the first pipe area 103 and the second pipe area 104. When the gas with a lower temperature enters the second pipe area 104, the water vapor in the constant temperature chamber 101 will form water droplets on the second pipe area 104, resulting in condensation. In addition, there are the following problems: (1) The water droplets formed affect the humidity inside the constant temperature chamber; (2) The water droplets formed fall onto the equipment below the second pipe area 104, affecting the operation of the equipment; (3) The gas with a lower temperature in the second pipe area 104 increases the probability of the temperature inside the constant temperature chamber 101 dropping.

[0054] Second, the temperature inside the constant temperature chamber 101 increases.

[0055] In summer, the temperature outside the constant temperature chamber 101 is high, which causes the temperature of the first pipe area 103 to rise. When the gas passes through the first pipe area 103, the gas temperature also rises. When the gas with the increased temperature enters the second pipe area 104, it causes the temperature inside the constant temperature chamber 101 to rise.

[0056] It should be noted that the longer the first pipe region 103 is, the more serious the problems of condensation in the second pipe region 104 for gas transmission in the constant temperature chamber 101 and the temperature rise in the constant temperature chamber 101 become.

[0057] To address the aforementioned technical problems, embodiments of the present invention provide a gas temperature regulation system that can reduce the risk of condensation in gas transmission pipes within a constant temperature chamber.

[0058] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the following will be described in conjunction with the embodiments of the present invention. Figure 2 The technical solutions in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0059] refer to Figure 2 This invention provides a gas temperature regulation system, comprising: a housing having a chamber 200; a heating device 300 located outside the housing for heating gas flowing into the chamber 200 to a first preset temperature range; a cooling device 400 located outside the housing for cooling gas flowing into the chamber 200 to the first preset temperature range; a temperature monitoring unit 600 located outside the housing for monitoring the temperature of gas flowing into the chamber 200; and a control unit 500 connected to the temperature monitoring unit 600, the cooling device 400, the heating device 300, and the chamber 200, for controlling the flow of gas from the temperature monitoring unit 600 to the cooling device 400, the heating device 300, or the chamber 200 based on the monitoring result of the temperature monitoring unit 600.

[0060] The gas temperature regulation system provided in this embodiment of the invention has the following beneficial effects: when the temperature monitoring unit 600 detects that the gas temperature flowing into the chamber 200 is less than the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow into the heating device 300; when the temperature monitoring unit 600 detects that the gas temperature flowing into the chamber 200 is within the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow into the chamber 200; when the temperature monitoring unit 600 detects that the gas temperature flowing into the chamber 200 is greater than the first preset temperature range, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow into the cooling device 400; thereby ensuring that the gas temperature flowing into the chamber 200 is within the first preset temperature range, reducing the risk of condensation in the gas transmission pipe 900 inside the chamber 200.

[0061] Continue to refer to Figure 2 The shell is cylindrical in shape; the shell material includes metal (such as stainless steel, aluminum, etc.) or antistatic plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.); the cylindrical structure includes any of the following: cylindrical structure, elliptical cylindrical structure, square cylindrical structure, etc. This application does not limit the shell material or specific cylindrical structure; those skilled in the art can adjust the settings according to actual conditions.

[0062] Continue to refer to Figure 2 The gas temperature regulation system includes: a first four-way valve 501 and a second four-way valve 700.

[0063] The first four-way valve 501 is used to control the flow of gas from the temperature monitoring unit 600 to the refrigeration device 400, the heating device 300, or the chamber 200 based on the monitoring results of the temperature monitoring unit 600.

[0064] The second four-way valve 700 is used to control the flow of gas from the first four-way valve 501, the first gas temperature monitoring unit 301, or the second gas temperature monitoring unit 401 to the chamber 200.

[0065] Continue to refer to Figure 2 The gas temperature regulation system includes a heating device 300 located outside the housing, used to heat the gas flowing into the chamber 200 to the first preset temperature range.

[0066] The first preset temperature range is the temperature range within the chamber 200 that meets the requirements of the manufacturing process. For example, if the temperature range required for the constant temperature chamber in semiconductor device manufacturing is 22±1℃, then the first preset temperature range is set to 22±1℃. The first preset temperature range is set according to actual needs.

[0067] The heating device 300 includes a gas heating unit 302, one end of which is connected to the second end 5012 of the first four-way valve 501, for heating the gas flowing out of the first four-way valve 501. The gas heating unit 302 includes at least three gas heating sub-units, and the heating temperatures of the gas heating sub-units may be the same or different.

[0068] In this embodiment, the gas heating unit 302 includes three gas heating sub-units, namely gas heating sub-unit 3021, gas heating sub-unit 3022, and gas heating sub-unit 3023.

[0069] The heating temperature of the gas heating subunit refers to the temperature that the gas to be heated can rise after passing through each gas heating subunit. For example, if the temperature that each gas heating subunit can rise is 1°C, and the temperature of the gas to be heated before heating is 15°C, then after the gas to be heated passes through the gas heating subunit 3021 for the first time, the temperature of the gas to be heated will rise by 1°C to 16°C. When the gas at 16°C passes through the gas heating subunit 3021 for the second time, the gas temperature will rise by 1°C to 17°C, and so on.

[0070] The heating temperatures of the gas heating subunits may be the same or different, that is, the heating temperatures of gas heating subunits 3021, 3022, and 3023 are the same; or at least two of the gas heating subunits 3021, 3022, and 3023 have different heating temperatures.

[0071] In this embodiment, the heating temperatures of all the gas heating subunits are the same.

[0072] For example, each gas heating subunit can raise the temperature by 1°C. If the temperature of the gas to be heated before heating is 15°C, then after the gas to be heated passes through gas heating subunit 3021 for the first time, the temperature of the gas to be heated will rise by 1°C to 16°C. When the gas at 16°C passes through gas heating subunit 3022 for the first time, the gas temperature will rise by 1°C to 17°C. When the gas at 17°C passes through gas heating subunit 3023 for the first time, the gas temperature will rise by 1°C to 18°C.

[0073] It should be noted that the temperature rise of each gas heating subunit can be adjusted as needed. For example, if the temperature of the gas to be heated rises by 0.3℃ each time it passes through the gas heating unit 302, then the temperature rise of the three gas heating subunits can be set to 0.1℃.

[0074] The heating device 300 includes a first gas temperature monitoring unit 301, which is connected to the other end of the gas heating unit 302 and is used to monitor the gas temperature after being heated by the gas heating unit 302.

[0075] The first gas temperature monitoring unit 301 includes one or more of a thermometer, a thermocouple, and a resistance temperature detector (RTD). In this embodiment, the first gas temperature monitoring unit 301 uses the thermocouple (not shown) to monitor the temperature of the gas after it has been heated by the gas heating unit 302.

[0076] The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit 301 is also used to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas.

[0077] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to the first gas heating sub-unit among the at least three gas heating sub-units;

[0078] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0079] It should be noted that using at least three refrigeration sub-units to gradually heat the gas to the first preset temperature range not only makes the temperature of the heated gas more uniform, but also allows for precise control of the gas heating to the required temperature.

[0080] Continue to refer to Figure 2 In this embodiment, there are three gas heating sub-units connected in series. According to the direction of gas flow, gas heating sub-unit 3021 is connected in series with gas heating sub-unit 3022, and gas heating sub-unit 3022 is connected in series with gas heating sub-unit 3023.

[0081] In this embodiment, the required temperature range within the chamber 200 is a first preset temperature range of 22±1℃; a second preset temperature of 21℃, which is the lower limit of the first preset temperature range; and a third preset temperature of 23℃, which is the upper limit of the first preset temperature range. Gas heating subunit 3021 raises its temperature by 1℃ each time, gas heating subunit 3022 raises its temperature by 1℃ each time, and gas heating subunit 3023 raises its temperature by 1℃ each time, so the sum of the total heating temperatures of the three gas heating subunits is 3℃.

[0082] The first gas temperature monitoring unit 301 is further configured to control the flow of heated gas to one of the three gas heating sub-units based on the detected heated gas temperature; wherein, in response to the difference between the second preset temperature and the heated gas temperature being greater than or equal to the sum of the total heating temperatures of the three gas heating sub-units, the heated gas is controlled to flow to the first gas heating sub-unit among the three gas heating sub-units.

[0083] In response to the second preset temperature and the temperature of the heated gas being greater than the sum of the total heating temperatures of the three gas heating subunits, for example: the temperature of the heated gas is 16°C, and in response to the second preset temperature 21°C and the temperature of the heated gas being 16°C being 5°C greater than the sum of the total heating temperatures of the three gas heating subunits being 3°C, the heated gas is controlled to flow to the first gas heating subunit 3021 among the three gas heating subunits. After passing through gas heating subunits 3021, 3022, and 3023, the gas is heated to a temperature of 19°C. Then, the gas at 19°C is controlled to flow to gas heating subunits 3022 and 3023, and the gas at 19°C is heated to the second preset temperature of 21°C. This ensures that the temperature of the heated gas is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipe 900 within the chamber 200.

[0084] In response to the fact that the difference between the second preset temperature and the heated gas temperature is equal to the sum of the heating temperatures of the three gas heating subunits, for example: the heated gas temperature is 18°C, and in response to the fact that the difference between the second preset temperature 21°C and the heated gas temperature 18°C ​​is 3°C, which is equal to the sum of the heating temperatures of the three gas heating subunits, the heated gas is controlled to flow to the first gas heating subunit 3021 among the three gas heating subunits. After passing through gas heating subunits 3021, 3022, and 3023, the gas is heated to the second preset temperature 21°C, so that the heated gas temperature is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipe 900 in the chamber 200.

[0085] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the three gas heating sub-units, the heated gas is controlled to flow to one of the three gas heating sub-units so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of condensation in the gas transmission pipe 900 in the chamber 200.

[0086] In response to the fact that the difference between the second preset temperature and the heated gas temperature is less than the sum of the total heating temperatures of the three gas heating subunits, for example: the heated gas temperature is 19°C, and in response to the fact that the difference between the second preset temperature 21°C and the heated gas temperature 19°C is 2°C, which is less than the sum of the total heating temperatures of the three gas heating subunits (3°C), the heated gas is controlled to flow to gas heating subunits 3022 and 3023 among the three gas heating subunits, so that the heated gas temperature is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, thus ensuring that the heated gas temperature is within the first preset temperature range shown, thereby reducing the risk of condensation in the gas transmission pipe 900 within the chamber 200.

[0087] Those skilled in the art can easily deduce, based on the technical solutions disclosed in the embodiments of the present invention, the specific implementation method for heating gas from other temperatures to a first preset temperature range via the heating device 300.

[0088] Continue to refer to Figure 2 The gas temperature regulation system includes a refrigeration device 400 located outside the housing, used to cool the gas flowing into the chamber 200 to a first preset temperature range.

[0089] It should be noted that the first preset temperature range involved in the refrigeration device 400 is described in the description of the first preset temperature range in the heating device 300, and will not be repeated here.

[0090] The refrigeration device 400 includes a gas refrigeration unit 402, one end of which is connected to the third end 5013 of the first four-way valve 501 for cooling the gas flowing out of the first four-way valve 501. The gas refrigeration unit 402 includes at least three gas refrigeration sub-units, and the refrigeration temperatures of the gas refrigeration sub-units may be the same or different.

[0091] In this embodiment, the gas refrigeration unit 402 includes three gas refrigeration subunits, namely gas refrigeration subunit 4021, gas refrigeration subunit 4022, and gas refrigeration subunit 4023.

[0092] The cooling temperature of the gas cooling subunit refers to the temperature reduction that the gas to be cooled can achieve after passing through each gas cooling subunit. For example, if the temperature reduction of each gas cooling subunit is 1°C, and the temperature of the gas to be cooled before cooling is 23°C, then after the gas to be cooled passes through the gas cooling subunit 4021 for the first time, the temperature of the gas to be cooled will decrease by 1°C to 22°C. When the gas at 22°C passes through the gas cooling subunit 4021 for the second time, the gas temperature will decrease by 1°C to 21°C, and so on.

[0093] The cooling temperatures of the gas refrigeration subunits may be the same or different, that is, the cooling temperatures of gas refrigeration subunits 4021, 4022, and 4023 are the same; or at least two of the gas refrigeration subunits 4021, 4022, and 4023 have different cooling temperatures.

[0094] In this embodiment, the cooling temperature of all the gas refrigeration subunits is the same.

[0095] For example, each gas refrigeration subunit can refrigerate a temperature of 1℃. If the temperature of the gas to be refrigerated before refrigeration is 25℃, then after the gas to be refrigerated passes through gas refrigeration subunit 4021 for the first time, the temperature of the gas to be refrigerated will be reduced by 1℃ to 24℃. When the gas at 24℃ passes through gas refrigeration subunit 4022 for the first time, the gas temperature will be reduced by 1℃ to 23℃. When the gas at 23℃ passes through gas refrigeration subunit 4023 for the first time, the gas temperature will be reduced by 1℃ to 22℃.

[0096] It should be noted that the cooling temperature of each gas refrigeration subunit can be adjusted as needed. For example, if the cooling temperature of the gas to be cooled is 0.3℃ after each pass through the gas refrigeration unit 402, then the cooling temperature of each of the three gas refrigeration subunits can be set to 0.1℃.

[0097] The refrigeration device 400 includes a second gas temperature monitoring unit 401, which is connected to the other end of the gas refrigeration unit 402 and is used to monitor the temperature of the gas after it has been refrigerated by the gas refrigeration unit 402.

[0098] The second gas temperature monitoring unit 401 includes one or more of a thermometer, a thermocouple, and a resistance temperature detector (RTD). In this embodiment, the second gas temperature monitoring unit 401 uses the thermocouple to monitor the temperature of the gas after it has been cooled by the gas cooling unit 402.

[0099] The at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit 401 is also used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas.

[0100] Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to the first gas cooling sub-unit among the at least three gas cooling sub-units;

[0101] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0102] It should be noted that using at least three refrigeration sub-units to gradually cool the gas to the first preset temperature range not only makes the temperature of the cooled gas more uniform, but also allows for precise control of the gas cooling to the required temperature.

[0103] Continue to refer to Figure 2 In this embodiment, there are three gas refrigeration subunits connected in series. According to the direction of gas flow, gas refrigeration subunit 4021 is connected in series with gas refrigeration subunit 4022, and gas refrigeration subunit 4022 is connected in series with gas refrigeration subunit 4023.

[0104] In this embodiment, the required temperature range within the chamber 200 is a first preset temperature range of 22±1℃; a second preset temperature of 21℃, which is the lower limit of the first preset temperature range; and a third preset temperature of 23℃, which is the upper limit of the first preset temperature range. Gas refrigeration subunits 4021, 4022, and 4023 each refrigerate at a temperature of 1℃, resulting in a total refrigeration temperature of 3℃.

[0105] The second gas temperature monitoring unit 401 is further configured to control the flow of the cooled gas to one of the three gas refrigeration subunits based on the detected cooled gas temperature; wherein, in response to the difference between the third preset temperature and the cooled gas temperature being greater than or equal to the sum of the total cooling temperatures of the three gas refrigeration subunits, the cooled gas is controlled to flow to the first gas refrigeration subunit among the three gas refrigeration subunits.

[0106] In response to the third preset temperature and the temperature of the cooled gas being greater than the sum of the total cooling temperatures of the three gas refrigeration subunits, for example: the temperature of the cooled gas is 28°C, and in response to the third preset temperature of 23°C and the temperature of the cooled gas being 28°C being 5°C greater than the sum of the total cooling temperatures of the three gas refrigeration subunits being 3°C, the cooled gas is controlled to flow to the first gas refrigeration subunit 4021 among the three gas refrigeration subunits. After passing through gas refrigeration subunits 4021, 4022, and 4023, the gas is cooled to a temperature of 25°C. Then, the gas at 25°C is controlled to flow to gas refrigeration subunits 4022 and 4023, cooling the gas at 25°C to the third preset temperature of 23°C. This ensures that the temperature of the cooled gas is within the first preset temperature range, reducing the risk of the external gas temperature affecting the internal temperature of the chamber 200 and maintaining the stability of the internal temperature of the chamber 200.

[0107] In response to the fact that the difference between the third preset temperature and the cooled gas temperature is equal to the sum of the total cooling temperatures of the three gas refrigeration subunits, for example: the cooled gas temperature is 26°C, and in response to the fact that the difference between the third preset temperature 23°C and the cooled gas temperature 26°C is 3°C, which is equal to the sum of the total cooling temperatures of the three gas refrigeration subunits of 3°C, the cooled gas is controlled to flow to the first gas refrigeration subunit 4021 among the three gas refrigeration subunits. After passing through gas refrigeration subunits 4021, 4022, and 4023, the gas is cooled to the second preset temperature 21°C, so that the cooled gas temperature is within the first preset temperature range, reducing the risk of the external gas temperature affecting the internal temperature of the chamber 200 and maintaining the stability of the internal temperature of the chamber 200.

[0108] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the three gas cooling sub-units, the cooled gas is controlled to flow to one of the three gas cooling sub-units so that the temperature of the gas after cooling is greater than or equal to the second preset temperature and less than or equal to the third preset temperature. This reduces the risk of the temperature of the gas outside the chamber 200 affecting the temperature inside the chamber 200 and maintains the stability of the temperature inside the chamber 200.

[0109] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the three gas refrigeration subunits, for example: the temperature of the cooled gas is 25°C, and in response to the fact that the difference of 2°C between the third preset temperature 23°C and the temperature of the cooled gas 25°C is less than the sum of the total cooling temperatures of the three gas refrigeration subunits 3°C, the cooled gas is controlled to flow to gas refrigeration subunits 4022 and 4023 among the three gas refrigeration subunits, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, that is, the temperature of the cooled gas is within the first preset temperature range, reducing the risk of the temperature of the gas outside the chamber 200 affecting the temperature inside the chamber 200, and maintaining the stability of the temperature inside the chamber 200.

[0110] Those skilled in the art can easily deduce, based on the technical solutions disclosed in the embodiments of the present invention, the specific implementation method of cooling gas from other temperatures to a first preset temperature range via the refrigeration device 400.

[0111] Continue to refer to Figure 2 The gas temperature regulation system includes a temperature monitoring unit 600 located outside the housing for monitoring the temperature of the gas flowing into the chamber 200.

[0112] The temperature monitoring unit 600 includes one or more of a thermometer, a thermocouple, and a resistance temperature detector (RTD). In this embodiment, the temperature monitoring unit 600 uses the thermocouple to monitor the temperature of the gas flowing into the chamber 200.

[0113] Continue to refer to Figure 2 The gas temperature regulation system includes a control unit 500, which is connected to the temperature monitoring unit 600, the refrigeration device 400, the heating device 300, and the chamber 200, respectively, and is used to control the flow of gas flowing out of the temperature monitoring unit 600 to the refrigeration device 400, the heating device 300, or the chamber 200 based on the monitoring results of the temperature monitoring unit 600.

[0114] The control unit 500 includes: a first four-way valve 501 and a motor (not shown), wherein the motor is used to control the opening and closing of the first four-way valve 501.

[0115] The first end 5011 of the first four-way valve 501 is connected to the temperature monitoring unit 600, the second end 5012 of the first four-way valve 501 is connected to the heating device 300, the third end 5013 of the first four-way valve 501 is connected to the cooling device 400, and the fourth end 5014 of the first four-way valve 501 is connected to the chamber 200. The first four-way valve 501 responds to a temperature of gas flowing from the temperature monitoring unit 600 being less than or equal to a second preset temperature by controlling the gas to flow from the first end 5011 through the second end 5012 to the heating device 300. The heating device 300 then heats the gas from the second preset temperature to within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipe 900 within the chamber 200. For example, if the temperature of the gas flowing from the temperature monitoring unit 600 is 16°C, which is less than or equal to the second preset temperature of 21°C, the control unit 500 controls the gas to flow to the heating device 300, heating the gas to the first preset temperature range.

[0116] The first four-way valve 501 responds to the temperature of the gas flowing out of the temperature monitoring unit 600 being greater than or equal to a third preset temperature, controlling the gas to flow from the first end 5011 through the third end 5013 to the refrigeration device 400. Through the refrigeration device 400, the third preset temperature is cooled to within the first preset temperature range, reducing the risk of the external gas temperature affecting the internal temperature of the chamber 200 and maintaining the stability of the internal temperature of the chamber 200. For example, if the temperature of the gas flowing out of the temperature monitoring unit 600 is 25°C, which is greater than the third preset temperature of 23°C, the control unit 500 controls the gas to flow to the heating device 300, heating the gas to the first preset temperature range.

[0117] The first four-way valve 501 responds to the temperature of the gas flowing out of the temperature monitoring unit 600 being greater than the second preset temperature and less than the third preset temperature, by controlling the gas to flow from the first end 5011 to the chamber 200 via the fourth end 5014. For example, if the temperature of the gas flowing out of the temperature monitoring unit 600 is 22°C, which is greater than the second preset temperature of 21°C and less than the third preset temperature of 23°C, the control unit 500 controls the gas to flow to the chamber 200.

[0118] Continue to refer to Figure 2 The gas temperature regulation system includes a gas storage unit 800, located outside the housing and connected to the temperature monitoring unit 600, for storing gas to be cooled or gas to be heated.

[0119] The gas storage unit 800 includes: a gas tank (not shown), a pressure valve (not shown), a connection port, etc.

[0120] The gas storage tank is cylindrical in shape; the material of the gas storage tank includes metal (such as stainless steel, aluminum, etc.) or antistatic plastic (such as polycarbonate, electro-polypropylene, acrylic, etc.); the cylindrical structure includes any of the following: cylindrical structure, elliptical cylindrical structure, square cylindrical structure, etc. This application does not limit the material of the gas storage tank or the specific cylindrical structure; those skilled in the art can adjust the settings according to actual conditions.

[0121] The pressure valve is used to monitor the gas pressure inside the gas storage tank.

[0122] It should be noted that, in this embodiment of the invention, the gas to be heated or cooled is the gas inside the gas transmission pipe outside the shell. The gas inside the gas transmission pipe outside the shell is transmitted to the chamber 200 via the transmission pipe.

[0123] Continue to refer to Figure 2 The gas temperature regulation system includes: a first PLC programmable logic controller 1011 and a second PLC programmable logic controller 1012.

[0124] The first PLC programmable logic controller 1011 is used to control the gas flow after passing through the first gas temperature monitoring unit 301 to a single gas heating subunit in the gas heating unit 302. In this embodiment, the first PLC programmable logic controller 1011 controls the gas flow after passing through the first gas temperature monitoring unit 301 to gas heating subunit 3021, gas heating subunit 3022, or gas heating subunit 3023 in the gas heating unit 302.

[0125] The second PLC programmable logic controller 1012 is used to control the gas flow after passing through the second gas temperature monitoring unit 401 to a single gas refrigeration subunit in the gas refrigeration unit 402. In this embodiment, the second PLC programmable logic controller 1012 controls the gas flow after passing through the second gas temperature monitoring unit 401 to gas refrigeration subunit 4021, gas refrigeration subunit 4022, or gas refrigeration subunit 4023 in the gas refrigeration unit 402.

[0126] Continue to refer to Figure 2 The fourth end 5014 of the first four-way valve 501 is connected to the first end 701 of the second four-way valve 700. The gas heating unit 302 is connected to the second end 702 of the second four-way valve 700 via the first gas temperature monitoring unit 301. The gas cooling unit 402 is connected to the third end 703 of the second four-way valve 700 via the second gas temperature monitoring unit 401. The fourth end 704 of the second four-way valve 700 is connected to the chamber 200.

[0127] Continue to refer to Figure 2 The gas temperature regulation system includes a first heat preservation unit 1111, located between the first gas temperature monitoring unit 301 and the second four-way valve 700, for maintaining the gas temperature after being heated by the gas heating unit 302, so that the gas temperature entering the chamber 200 is within a first preset temperature range in the chamber 200, thereby reducing the risk of condensation in the gas transmission pipeline 900 in the chamber 200.

[0128] The first insulation unit 1111 includes: an encapsulation film encapsulated on the pipe, insulation material located on the encapsulation film, waterproof and antifreeze material located on the surface of the insulation material, and a fixture for fixing the insulation material.

[0129] The second insulation unit is located between the second gas temperature monitoring unit 401 and the second four-way valve 700. It is used to maintain the temperature of the gas after it has been cooled by the refrigeration device 400, so that the temperature of the gas entering the chamber 200 is within the first preset temperature range of the chamber 200. This reduces the risk of the temperature of the gas outside the chamber 200 affecting the temperature inside the chamber 200 and maintains the stability of the temperature inside the chamber 200.

[0130] The second insulation unit includes: an encapsulation film sealed on the pipe, insulation material located on the encapsulation film, waterproof and antifreeze material located on the surface of the insulation material, and a fixture for fixing the insulation material.

[0131] To address the aforementioned technical problems, this invention also provides a gas temperature regulation method, applied to a gas temperature regulation system. Figure 3 This is a schematic flowchart of a gas temperature regulation method according to an embodiment of the present invention.

[0132] Continue to refer to Figure 2 The gas temperature regulation method is applied to a gas temperature regulation system. The gas temperature regulation system includes: a housing having a chamber 200; a refrigeration device 400, a heating device 300, a temperature monitoring unit, and a control unit 500 located outside the housing; the control unit 500 is connected to the temperature monitoring unit 600, the refrigeration device 400, the heating device 300, and the chamber 200, respectively.

[0133] The gas temperature regulation system further includes a gas storage unit 800.

[0134] The gas temperature regulation system further includes a first PLC programmable logic controller 1011, and the heating device 300 includes: a gas heating unit 302, the gas heating unit 302 including at least 3 gas heating sub-units, and a first gas temperature monitoring unit 301.

[0135] The at least three gas heating subunits are connected in series. The first gas temperature monitoring unit 301 is also used to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas.

[0136] Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to the first gas heating sub-unit among the at least three gas heating sub-units;

[0137] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0138] The gas temperature regulation system also includes a second PLC programmable logic controller 1012, and the refrigeration device 400 includes: a gas refrigeration unit 402, which includes at least three gas refrigeration sub-units;

[0139] The at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit 401 is also used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas.

[0140] Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the second PLC programmable logic controller 1012 controls the flow of the cooled gas to the first gas cooling sub-unit among the at least three gas cooling sub-units.

[0141] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas heating sub-units, the second PLC programmable logic controller 1012 controls the flow of the cooled gas to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

[0142] For a detailed description of the housing with chamber 200, the refrigeration device 400, the heating device 300, the temperature monitoring unit, the control unit 500, the gas storage unit 800, the first PLC programmable logic controller 1011, and the second PLC programmable logic controller 1012, please refer to the description of the aforementioned gas temperature regulation system, and it will not be repeated here.

[0143] Continue to refer to Figure 2 In this embodiment, the number of gas heating subunits is 3; the number of gas cooling subunits is 3; the required temperature range within the chamber 200 is a first preset temperature range of 22±1℃; a second preset temperature of 21℃, which is the lower limit of the first preset temperature range; and a third preset temperature of 23℃, which is the upper limit of the first preset temperature range.

[0144] In this embodiment, the gas refrigeration subunit 4021, gas refrigeration subunit 4022, and gas refrigeration subunit 4023 each refrigeration temperature is 1℃, so the sum of the total refrigeration temperatures of the three gas refrigeration subunits is 3℃. Similarly, the gas heating subunit 3021, gas heating subunit 3022, and gas heating subunit 3023 each heating temperature is 1℃, so the sum of the total refrigeration temperatures of the three gas heating subunits is 3℃.

[0145] The gas temperature regulation method includes the following steps:

[0146] Step S11: The temperature monitoring unit 600 monitors the temperature of the gas flowing into the chamber 200.

[0147] In this embodiment, the temperature monitoring unit 600 monitors the temperature of the gas flowing into the chamber 200. That is, before the gas from the gas storage unit 800 flows into the chamber 200, the temperature monitoring unit 600 needs to monitor the temperature of the gas to determine whether the gas can flow into the chamber 200.

[0148] Step S12: The control unit 500 controls the flow of gas from the temperature monitoring unit 600 to the refrigeration device 400, the heating device 300, or the chamber 200 based on the gas temperature monitored by the temperature monitoring unit 600.

[0149] In the first scenario: if the gas temperature monitored by the temperature monitoring unit 600 is within the first preset temperature range of 22±1℃, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow into the chamber 200.

[0150] Second scenario: If the gas temperature monitored by the temperature monitoring unit 600 is less than the second preset temperature of 21°C, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the heating device 300.

[0151] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is greater than or equal to the sum of the total heating temperatures of the three gas heating sub-units, the first PLC programmable logic controller 1011 controls the flow of the heated gas to the first gas heating sub-unit among the three gas heating sub-units.

[0152] In response to the second preset temperature and the temperature of the heated gas being greater than the sum of the total heating temperatures of the three gas heating subunits, for example: the temperature of the heated gas is 16°C, and in response to the second preset temperature 21°C and the temperature of the heated gas being 16°C being 5°C greater than the sum of the total heating temperatures of the three gas heating subunits being 3°C, the first PLC programmable logic controller 1011 controls the flow of the heated gas to the first gas heating subunit 3021 among the three gas heating subunits. After passing through gas heating subunits 3021, 3022, and 3023, the gas is heated to a temperature of 19°C. Then, the first PLC programmable logic controller 1011 controls the flow of the gas at 19°C to gas heating subunits 3022 and 3023, heating the gas at 19°C to the second preset temperature of 21°C. That is, the temperature of the heated gas is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipe 900 inside the chamber 200.

[0153] In response to the fact that the difference between the second preset temperature and the heated gas temperature is equal to the sum of the total heating temperatures of the three gas heating sub-units, for example: the heated gas temperature is 18°C, and in response to the fact that the difference between the second preset temperature 21°C and the heated gas temperature 18°C ​​is 3°C, which is equal to the sum of the total heating temperatures of the three gas heating sub-units, the first PLC programmable logic controller 1011 controls the heated gas to flow to the first gas heating sub-unit 3021 among the three gas heating sub-units. After passing through gas heating sub-units 3021, 3022, and 3023, the gas is heated to the second preset temperature 21°C, that is, so that the heated gas temperature is within the first preset temperature range, thereby reducing the risk of condensation in the gas transmission pipe 900 in the chamber 200.

[0154] In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the three gas heating sub-units, the first PLC programmable logic controller 1011 controls the flow of the heated gas to one of the three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, thereby reducing the risk of condensation in the gas transmission pipe 900 in the chamber 200.

[0155] In response to the fact that the difference between the second preset temperature and the heated gas temperature is less than the sum of the total heating temperatures of the three gas heating sub-units, for example: the heated gas temperature is 19°C, and in response to the fact that the difference between the second preset temperature 21°C and the heated gas temperature 19°C is 2°C, which is less than the sum of the total heating temperatures of the three gas heating sub-units (3°C), the first PLC programmable logic controller 1011 controls the flow of the heated gas to gas heating sub-units 3022 and 3023 among the three gas heating sub-units, so that the heated gas temperature is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, thus ensuring that the heated gas temperature is within the first preset temperature range shown, thereby reducing the risk of condensation in the gas transmission pipe 900 within the chamber 200.

[0156] In the third scenario: if the gas temperature monitored by the temperature monitoring unit 600 is greater than the third preset temperature of 23°C, the control unit 500 controls the gas flowing out of the temperature monitoring unit 600 to flow to the refrigeration device 400.

[0157] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is greater than or equal to the sum of the total cooling temperatures of the three gas cooling sub-units, the second PLC programmable logic controller 1012 controls the flow of the cooled gas to the first gas cooling sub-unit among the three gas cooling sub-units.

[0158] In response to the third preset temperature and the temperature of the cooled gas being greater than the sum of the total cooling temperatures of the three gas cooling sub-units, for example: the temperature of the cooled gas is 28°C, and in response to the third preset temperature of 23°C and the temperature of the cooled gas being 28°C being 5°C greater than the sum of the total cooling temperatures of the three gas cooling sub-units being 3°C, the second PLC programmable logic controller 1012 controls the flow of the cooled gas to the first gas cooling sub-unit 4021 among the three gas cooling sub-units. After passing through gas cooling sub-units 4021, 4022, and 4023, the gas is cooled to a temperature of 25°C. Then, the second PLC programmable logic controller 1012 controls the flow of the gas at 25°C to gas cooling sub-units 4022 and 4023, cooling the gas at 25°C to the third preset temperature of 23°C. This ensures that the temperature of the cooled gas is within the first preset temperature range, reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the stability of the temperature inside the chamber 200.

[0159] In response to the fact that the difference between the third preset temperature and the cooled gas temperature is equal to the sum of the total cooling temperatures of the three gas cooling sub-units, for example: the cooled gas temperature is 26℃, and in response to the fact that the difference between the third preset temperature 23℃ and the cooled gas temperature 26℃ is 3℃, which is equal to the sum of the total cooling temperatures of the three gas cooling sub-units 3℃, the second PLC programmable logic controller 1012 controls the cooled gas to flow to the first gas cooling sub-unit 4021 among the three gas cooling sub-units. After passing through gas cooling sub-units 4021, 4022, and 4023, the gas is cooled to the second preset temperature 21℃, so that the cooled gas temperature is within the first preset temperature range, reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the stability of the temperature inside the chamber 200.

[0160] In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the three gas cooling sub-units, the second PLC programmable logic controller 1012 controls the flow of the cooled gas to one of the three gas cooling sub-units, so that the temperature of the gas after re-cooling is greater than or equal to the second preset temperature and less than or equal to the third preset temperature, reducing the risk of the gas temperature affecting the temperature of the chamber 200 and maintaining the stability of the temperature inside the chamber 200.

[0161] In response to the fact that the difference between the third preset temperature and the cooled gas temperature is less than the sum of the total cooling temperatures of the three gas cooling sub-units, for example: the cooled gas temperature is 25°C, and in response to the fact that the difference between the third preset temperature 23°C and the cooled gas temperature 25°C is 2°C, which is less than the sum of the total cooling temperatures of the three gas cooling sub-units by 3°C, the second PLC programmable logic controller 1012 controls the cooled gas to flow to gas cooling sub-units 4022 and 4023 among the three gas cooling sub-units, so that the cooled gas temperature is greater than or equal to the second preset temperature 21°C and less than or equal to the third preset temperature 23°C, thus ensuring that the cooled gas temperature is within the first preset temperature range, reducing the risk of the gas temperature affecting the temperature of the chamber 200, and maintaining the stability of the temperature inside the chamber 200.

[0162] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make possible changes and modifications to the technical solutions of the present invention by utilizing the methods and techniques disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solutions of the present invention shall fall within the protection scope of the technical solutions of the present invention.

Claims

1. A gas temperature control system, characterized in that, include: A shell with chambers; A heating device, located outside the housing, is used to heat the gas flowing into the chamber to a first preset temperature range; A refrigeration device, located outside the housing, is used to cool the gas flowing into the chamber to the first preset temperature range; A temperature monitoring unit, located outside the housing, is used to monitor the temperature of the gas flowing into the chamber; The control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, respectively, and is used to control the flow of gas from the temperature monitoring unit to the refrigeration device, the heating device, or the chamber based on the monitoring results of the temperature monitoring unit.

2. The gas temperature control system as described in claim 1, characterized in that, Also includes: A gas storage unit, located outside the housing and connected to the temperature monitoring unit, is used to store gas to be cooled or gas to be heated.

3. The gas temperature control system as described in claim 1, characterized in that, The control unit includes: a first four-way valve; The first end of the first four-way valve is connected to the temperature monitoring unit, the second end of the first four-way valve is connected to the heating device, the third end of the first four-way valve is connected to the refrigeration device, and the fourth end of the first four-way valve is connected to the chamber. The first four-way valve controls the gas to flow from the first end to the heating device via the second end in response to a temperature less than or equal to a second preset temperature. The first four-way valve also controls the gas to flow from the first end to the refrigeration device via the third end in response to a temperature greater than or equal to a third preset temperature. Finally, the first four-way valve controls the gas to flow from the first end to the chamber via the fourth end in response to a temperature greater than the second preset temperature and less than the third preset temperature. The heating device includes: a gas heating unit, one end of which is connected to the second end of the first four-way valve for heating the gas flowing out of the first four-way valve; the gas heating unit includes at least three gas heating sub-units, and the heating temperatures of the gas heating sub-units may be the same or different. The first gas temperature monitoring unit is connected to the other end of the gas heating unit and is used to monitor the temperature of the gas after it has been heated by the gas heating unit.

4. The gas temperature control system as described in claim 3, characterized in that, The at least three gas heating subunits are connected in series, and the first gas temperature monitoring unit is also used to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas. Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to the first gas heating sub-unit among the at least three gas heating sub-units; In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the heated gas is controlled to flow to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

5. The gas temperature control system as described in claim 3, characterized in that, The refrigeration device includes: a gas refrigeration unit, one end of which is connected to the third end of the first four-way valve for cooling the gas flowing out of the first four-way valve; the gas refrigeration unit includes at least three gas refrigeration sub-units, and the gas refrigeration sub-units may have the same or different refrigeration temperatures. The second gas temperature monitoring unit is connected to the other end of the gas refrigeration unit and is used to monitor the gas temperature after it has been cooled by the gas refrigeration unit.

6. The gas temperature control system as described in claim 5, characterized in that, The at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit is also used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas. Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to the first gas cooling sub-unit among the at least three gas cooling sub-units; In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas cooling sub-units, the cooled gas is controlled to flow to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

7. The gas temperature control system as described in claim 5, characterized in that, The temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD). The first gas temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD). The second gas temperature monitoring unit includes one or more of the following: a thermometer, a thermocouple, and a resistance temperature detector (RTD).

8. The gas temperature control system as described in claim 7, characterized in that, Also includes: The second four-way valve has its fourth end connected to the first end of the first four-way valve, the gas heating unit connected to the second end of the second four-way valve via the first gas temperature monitoring unit, the gas cooling unit connected to the third end of the second four-way valve via the second gas temperature monitoring unit, and the fourth end of the second four-way valve connected to the chamber.

9. The gas temperature control system as described in claim 5, characterized in that, Also includes: The first PLC programmable logic controller is used to control the flow of gas after passing through the first gas temperature monitoring unit to a single gas heating subunit in the gas heating unit; The second PLC programmable logic controller is used to control the flow of gas after passing through the second gas temperature monitoring unit to a single gas refrigeration subunit in the gas refrigeration unit.

10. The gas temperature control system as described in claim 8, characterized in that, include: The first heat preservation unit is located between the first gas temperature monitoring unit and the second four-way valve, and is used to maintain the temperature of the gas after it has been heated by the gas heating unit. The second insulation unit, located between the second gas temperature monitoring unit and the second four-way valve, is used to maintain the temperature of the gas after it has been cooled by the refrigeration device.

11. A gas temperature regulation method, applied to a gas temperature regulation system, characterized in that, The gas temperature control system includes: A shell with chambers; The refrigeration device, heating device, temperature monitoring unit, and control unit are located outside the housing; The control unit is connected to the temperature monitoring unit, the refrigeration device, the heating device, and the chamber, respectively. The method includes: the temperature monitoring unit monitoring the temperature of the gas flowing into the chamber; and the control unit controlling the flow of gas from the temperature monitoring unit to the refrigeration device, the heating device, or the chamber based on the gas temperature monitored by the temperature monitoring unit.

12. The gas temperature regulation method as described in claim 11, characterized in that, The gas temperature regulation system further includes a first PLC programmable logic controller, and the heating device includes: a gas heating unit, the gas heating unit including at least 3 gas heating sub-units, and a first gas temperature monitoring unit; The at least three gas heating subunits are connected in series. The first gas temperature monitoring unit is also used to control the flow of the heated gas to one of the at least three gas heating subunits based on the detected temperature of the heated gas. Wherein, in response to the difference between the second preset temperature and the temperature of the heated gas being greater than or equal to the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to the first gas heating sub-unit among the at least three gas heating sub-units; In response to the fact that the difference between the second preset temperature and the temperature of the heated gas is less than the sum of the total heating temperatures of the at least three gas heating sub-units, the first PLC programmable logic controller controls the flow of the heated gas to one of the at least three gas heating sub-units, so that the temperature of the gas after reheating is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

13. The gas temperature regulation method as described in claim 11, characterized in that, The gas temperature regulation system further includes a second PLC programmable logic controller, and the refrigeration device includes: a gas refrigeration unit, which includes at least three gas refrigeration sub-units, and a second gas temperature monitoring unit; The at least three gas refrigeration subunits are connected in series, and the second gas temperature monitoring unit is also used to control the flow of the refrigerated gas to one of the at least three gas refrigeration subunits based on the detected temperature of the refrigerated gas. Wherein, in response to the difference between the third preset temperature and the temperature of the cooled gas being greater than or equal to the sum of the total cooling temperatures of the at least three gas cooling sub-units, the second PLC programmable logic controller controls the flow of the cooled gas to the first gas cooling sub-unit among the at least three gas cooling sub-units; In response to the fact that the difference between the third preset temperature and the temperature of the cooled gas is less than the sum of the total cooling temperatures of the at least three gas cooling sub-units, the second PLC programmable logic controller controls the flow of the cooled gas to one of the at least three gas cooling sub-units, so that the temperature of the gas after cooling again is greater than or equal to the second preset temperature and less than or equal to the third preset temperature.

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