Auxiliary graph adding method, system and terminal

Abstract

The invention belongs to the technical field of semiconductors, and provides an auxiliary graph adding method and system and a terminal, and the auxiliary graph adding method comprises the following steps: obtaining a target graph; an auxiliary graph is obtained, the auxiliary graph at least comprises a first auxiliary graph group and a second auxiliary graph group, the first auxiliary graph group comprises a plurality of first auxiliary sub-graphs, and the second auxiliary graph group comprises second auxiliary sub-graphs; acquiring adding priorities of the first auxiliary sub-graph and the second auxiliary sub-graph to update a preset adding rule; and adding the auxiliary graph into the target graph based on the updated adding rule. According to the technical scheme, the adding priority of the auxiliary graphs is set in the adding rule, and the auxiliary graphs are sequentially added according to the adding priority, so that the adding result of the auxiliary graphs can be accurately controlled in complex areas such as a corner, the uncontrollable condition caused by wrong adding of the auxiliary graphs is effectively prevented, and the improvement effect on the process window is ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an auxiliary graphic adding method, system and terminal. Background Art

[0002] Photolithography is one of the most important manufacturing processes in modern large-scale integrated circuit manufacturing. It can transfer the design pattern of integrated circuit on the mask pattern to the silicon wafer through the photolithography machine. With the development of semiconductor technology and the continuous improvement of market requirements for electronic equipment, the requirements for the resolution and imaging quality of photolithography are also increasing. In order to improve the imaging resolution and imaging quality and solve the bottleneck caused by the optical proximity effect, the correction of the optical proximity effect (OPC) has become indispensable.

[0003] In mask design, adding sub-resolution auxiliary graphics (SRAF) to the main graphics can solve technical problems such as too small graphics process window. Auxiliary graphics are generally small graphics. The auxiliary graphics are placed near relatively sparse graphics, so that the sparse graphics look like dense graphics from an optical perspective. The size of the auxiliary graphics must be smaller than the resolution of the lithography machine. During exposure, it only scatters the light and does not form an image on the photoresist. The auxiliary graphics cannot be too small, otherwise it will increase the difficulty of mask manufacturing and significantly increase the cost of the mask.

[0004] In actual mask design and optimization, the geometric features and relative positions of auxiliary graphics need to follow certain placement rules. Currently, SRAF placement mainly includes rule-based SRAF and model-based SRAF. For a chip design, since the data of the target graphics is too large, it is too time-consuming to add sub-resolution auxiliary graphics using a model-based method. Therefore, currently, the method based on SRAF rules is mainly used to add sub-resolution auxiliary graphics.

[0005] At present, when performing mask design and auxiliary pattern placement, it is necessary to process the two-dimensional graphics. Due to the complexity of the mask graphics, there are inevitably multiple corner areas in the two-dimensional graphics. When adding auxiliary graphics in the corner areas, the adding results are often uncontrollable, resulting in poor uniformity of the added auxiliary graphics within the corner areas and between the corner areas. Although the addition of auxiliary graphics complies with the current adding rules, the above problems will reduce the improvement effect on the process window and have an adverse effect on the lithography resolution, making the mask after adding the auxiliary graphics unable to meet the design requirements. Summary of the invention

[0006] In view of the shortcomings of the prior art described above, the purpose of the present application is to provide a method, system and terminal for adding auxiliary graphics, so as to solve the problems existing in the prior art such as uncontrollable results of adding auxiliary graphics in corner areas, and to make the adding of auxiliary graphics accurate and controllable.

[0007] To achieve the above objectives and other related objectives, in a first aspect, the present application provides a method for adding an auxiliary graphic, comprising the following steps:

[0008] Get the target graphics;

[0009] Acquire auxiliary graphics, the auxiliary graphics at least comprising a first auxiliary graphics group and a second auxiliary graphics group, the first auxiliary graphics group comprising a plurality of first auxiliary sub-graphics, and the second auxiliary graphics group comprising a plurality of second auxiliary sub-graphics;

[0010] Obtaining the adding priorities of the first auxiliary sub-graph and the second auxiliary sub-graph to update a preset adding rule;

[0011] Based on the updated adding rule, the auxiliary graphic is added to the target graphic.

[0012] Optionally, the target graph has a key graph, and the key graph includes a first key sub-graph and a second key sub-graph;

[0013] The first auxiliary sub-graphic is added to at least one side perpendicular to the extending direction of the first key sub-graphic, and the second auxiliary sub-graphic is added to at least one side perpendicular to the extending direction of the second key sub-graphic, so as to add the auxiliary graphics to the target graphics.

[0014] Optionally, the first key sub-graphic and the second key sub-graphic form a corner area at one end close to each other, the first auxiliary graphic group includes a first auxiliary sub-graphic of a first priority and a first auxiliary sub-graphic of a second priority, and the second auxiliary graphic group includes a second auxiliary sub-graphic of a first priority and a second auxiliary sub-graphic of a second priority;

[0015] Adding the auxiliary graphic to the target graphic comprises the following steps:

[0016] adding a first auxiliary sub-graphic of a first priority level to a corner area of ​​the target graphic;

[0017] adding a second auxiliary sub-graphic of the first priority to a corner area of ​​the target graphic;

[0018] adding a first auxiliary sub-graphic of a second priority level to a corner area of ​​the target graphic;

[0019] A second auxiliary sub-pattern with a second priority level is added to a corner area of ​​the target pattern.

[0020] Optionally, adding the auxiliary graphic to the target graphic further comprises the following steps:

[0021] The target graphic is identified to respectively identify the first key sub-graphic and the second key sub-graphic from the key graphic.

[0022] Optionally, according to the structure of the target graphic, the adding priorities of the first auxiliary graphic group and the second auxiliary graphic group are designed respectively, so as to divide the adding priorities of several first auxiliary sub-graphics into 1st to Mth priorities, and divide the adding priorities of several second auxiliary sub-graphics into 1st to Nth priorities, wherein M and N are both positive integers greater than 1.

[0023] Optionally, adding the auxiliary graphic to the target graphic comprises the following steps:

[0024] Taking the 2i-2 output graph as the input graph, according to the adding rule, adding the first auxiliary sub-graph of the i-th priority to the 2i-2 output graph to form the 2i-1 output graph;

[0025] Taking the 2i-1th output graph as an input graph, according to the adding rule, adding the second auxiliary sub-graph of the i-th priority to the 2i-1th output graph to form a 2i-th output graph;

[0026] i is sequentially set to a positive integer from 1 to max(M, N), and the target graphic is used as the 0th output graphic, and the above steps are repeated to add the auxiliary graphic to the target graphic;

[0027] The value of max(M, N) is the maximum value of M and N.

[0028] Optionally, the auxiliary graphics further include a third auxiliary graphics group, and the third auxiliary graphics group includes a plurality of third auxiliary sub-graphics;

[0029] According to the structure of the target graphic, the priority of adding the third auxiliary graphic group is designed to divide the priority of adding a plurality of the third auxiliary sub-graphics into the first to the Pth priority, wherein P is a positive integer greater than 1.

[0030] Optionally, adding the auxiliary graphic to the target graphic comprises the following steps:

[0031] Taking the 3i-3 output graph as the input graph, according to the adding rule, adding the first auxiliary sub-graph of the i-th priority to the 3i-3 output graph to form the 3i-2 output graph;

[0032] Taking the 3i-2 output graph as the input graph, according to the adding rule, adding the second auxiliary sub-graph of the i-th priority to the 3i-2 output graph to form a 3i-1 output graph;

[0033] Taking the 3i-1th output graph as an input graph, according to the adding rule, adding the third auxiliary sub-graph of the i-th priority to the 3i-1th output graph to form a 3ith output graph;

[0034] i is sequentially set to a positive integer from 1 to max(M, N, P), and the target graphic is used as the 0th output graphic, and the above steps are repeated to add the auxiliary graphic to the target graphic;

[0035] Among them, the value of max(M, N, P) is the maximum value among M, N and P.

[0036] In a second aspect, the present application further provides an auxiliary graphic adding system, which applies any of the auxiliary graphic adding methods in the aforementioned embodiments to add the auxiliary graphic to the target graphic, including:

[0037] A first input module, used for acquiring an input graphic, wherein the input graphic at least includes a target graphic;

[0038] A second input module, used for inputting auxiliary graphics;

[0039] A rule control module, used for storing and adjusting the adding rule of the auxiliary graphics, wherein the adding rule includes adding priority;

[0040] A graphics adding module, used for adding the auxiliary graphics to the target graphics according to the adding rule;

[0041] The graphics output module is used to add the auxiliary graphics from the graphics adding module to the target graphics, and output the target graphics with the auxiliary graphics added.

[0042] In a third aspect, the present application further provides a terminal, comprising a processor and a memory communicatively connected to the processor;

[0043] The memory is used to store computer programs;

[0044] The processor is used to execute the computer program stored in the memory, so that the terminal can implement any one of the auxiliary graphics adding methods in the aforementioned implementation manners.

[0045] As described above, the auxiliary graphics adding method, system and terminal provided by the present application have at least the following beneficial effects:

[0046] In the auxiliary graphics adding method of the present application, by setting the adding priority of the auxiliary graphics in the adding rules, when adding auxiliary graphics, the result outputted in the previous step is used as the input of the next step, and the auxiliary graphics are added in sequence according to the set adding priority to complete the adding of all auxiliary graphics. When adding auxiliary graphics in complex structural areas such as the corner areas of two-dimensional graphics, the adding result of the auxiliary graphics can be accurately controlled within the target graphics, and the occurrence of uncontrollable situations caused by errors in the addition of auxiliary graphics can be effectively prevented, thereby ensuring the improvement effect on the process window. The auxiliary graphics adding system and terminal provided by the present application adopt the above-mentioned auxiliary graphics adding method to add auxiliary graphics, and therefore also have the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0048] Figure 1 Shown is a flowchart of the auxiliary graphics adding method provided in Example 1 of the present application.

[0049] Figures 2 to 7 Shown is a structural schematic diagram of adding a first auxiliary sub-graphic, a second auxiliary sub-graphic and a third auxiliary sub-graphic respectively in the auxiliary graphic adding method provided in the first embodiment of the present application.

[0050] Figure 8 Shown is a schematic diagram of the structure of the corner area in the target graphic provided by the optional embodiment of the first embodiment of the present application.

[0051] Figures 9 to 11 Shown are three structural schematic diagrams of corner areas in the prior art.

[0052] Reference numerals:

[0053] 111, first key sub-graphic; 121, second key sub-graphic; 131, third key sub-graphic; 211, first auxiliary sub-graphic; 221, second auxiliary sub-graphic; 231, third auxiliary sub-graphic. DETAILED DESCRIPTION

[0054] In order to make the technical purpose, technical solution and technical effect of the present application clearer, the technical solution in the present application will be clearly and completely described in conjunction with the embodiments below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0055] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the present application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0056] In the description of the present application, it should be noted that the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the implementation or example are included in at least one implementation or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more implementations or examples in a suitable manner.

[0057] Embodiment 1

[0058] This embodiment provides a method for adding an auxiliary pattern, which is used to add an auxiliary pattern to a target pattern in a photolithography process. Optionally, the target pattern may be, for example, a mask pattern or other suitable layout structures.

[0059] Reference Figure 1 The auxiliary graphics adding method provided in this embodiment includes steps S1 to S4, specifically including:

[0060] Step S1: Obtain target graphics;

[0061] Step S2: Acquire auxiliary graphics, the auxiliary graphics including a first auxiliary graphics group and a second auxiliary graphics group, the first auxiliary graphics group including a plurality of first auxiliary sub-graphics 211, and the second auxiliary graphics group including a plurality of second auxiliary sub-graphics 221;

[0062] Step S3: obtaining the adding priorities of the first auxiliary sub-graph 211 and the second auxiliary sub-graph 221 to update the preset adding rule;

[0063] Step S4: adding the auxiliary graphic to the target graphic based on the updated adding rule.

[0064] The auxiliary graphic adding method of this embodiment will be described in detail below with reference to the accompanying drawings. It should be noted that the above sequence does not strictly represent the process sequence of the auxiliary graphic adding method protected by this application, and those skilled in the art may change it according to the actual processing steps.

[0065] First, execute step S1 to obtain the target graphic.

[0066] In this embodiment, the target pattern may be a mask pattern or other suitable pattern structure, and the target pattern has a key pattern, which is a pattern structure designed in the target pattern and needs to be transferred to the silicon wafer. Figures 2 to 7 The key graphic includes a first key sub-graphic 111 and a second key sub-graphic 121. The key graphic may include multiple first key sub-graphics 111 and multiple second key sub-graphics 121. The first key sub-graphic 111 and the second key sub-graphic 121 may have the same or different structural dimensions. The extension direction of the first key sub-graphic 111 may be the same as or different from the extension direction of the second key sub-graphic 121. For example, part of the first key sub-graphic 111 is connected to the second key sub-graphic 121, for example, the two intersect vertically.

[0067] In an alternative embodiment, reference Figure 8 For example, the key graphic may also include a third key sub-graphic 131. The first key sub-graphic 111, the second key sub-graphic 121 and the third key sub-graphic 131 have different structural sizes respectively. The key graphic may include multiple third key sub-graphics 131. The extension directions of the first key sub-graphic 111, the second key sub-graphic 121 and the third key sub-graphic 131 may be the same or different. For example, part of the third key sub-graphic 131 is connected to the second key sub-graphic 121 and / or the first key sub-graphic 111.

[0068] Furthermore, the width of the first key sub-graph 111 is less than or equal to the first key width, the width of the second key sub-graph 121 is greater than the first key width and less than the second key width, and the width of the third key sub-graph 131 is greater than or equal to the second key width. The values ​​of the first key width and the second key width can be set accordingly according to actual needs. For example, the first key width can be set to 50nm or other suitable values, and the second key width can be set to 70nm or other suitable values.

[0069] Next, step S2 is executed to obtain an auxiliary graphic.

[0070] Reference Figures 2 to 7In this embodiment, corresponding to the key graphics, the auxiliary graphics include a first auxiliary graphics group and a second auxiliary graphics group, the first auxiliary graphics group includes a plurality of first auxiliary sub-graphics 211, and the second auxiliary graphics include a plurality of second auxiliary sub-graphics 221.

[0071] In an optional embodiment, the first auxiliary pattern group includes a plurality of first auxiliary sub-patterns 211. The structural dimensions of the plurality of first auxiliary sub-patterns 211 may be the same or may have different structural dimensions. The structural dimensions of the first auxiliary sub-patterns 211 may be set accordingly according to actual needs to match the first key sub-pattern 111. Further, the width of the first auxiliary sub-pattern 211 is greater than or equal to the width of the first auxiliary pattern and less than or equal to the width of the second auxiliary pattern. The width of the first auxiliary pattern is, for example, 20 nm or other suitable values, and the width of the second auxiliary pattern is, for example, 30 nm or other suitable values.

[0072] In an optional embodiment, the second auxiliary graphic group includes a plurality of second auxiliary sub-graphics 221. The structural dimensions of the plurality of second auxiliary sub-graphics 221 may be the same, or each may have a different structural dimension. The structural dimensions of the second auxiliary sub-graphics 221 may be set accordingly according to actual needs to match the second key sub-graphic 121. Furthermore, the width of the second auxiliary sub-graphic 221 is greater than or equal to the width of the first auxiliary graphic, and less than or equal to the width of the second auxiliary graphic.

[0073] In an optional embodiment, the auxiliary graphics further include a third auxiliary graphics group, and the third auxiliary graphics group includes a plurality of third auxiliary sub-graphics 231. Optionally, the third auxiliary graphics group includes a plurality of third auxiliary sub-graphics 231, and the structural dimensions of the plurality of third auxiliary sub-graphics 231 may be the same, or each may have a different structural dimension, and the structural dimension of the third auxiliary sub-graphics 231 may be set accordingly according to actual needs to match the third key sub-graphic 131. Further, the width of the third auxiliary sub-graphic 231 is greater than or equal to the width of the first auxiliary graphics, and less than or equal to the width of the second auxiliary graphics.

[0074] Next, step S3 is executed to obtain the adding priorities of the first auxiliary sub-graphic 211 and the second auxiliary sub-graphic 221 to update the preset adding rule.

[0075] In this embodiment, executing step S3 may include the following steps: designing the adding priority of the first auxiliary graphic group according to the structure of the target graphic, so as to divide the adding priority of the first auxiliary sub-graphics 211 into the 1st to the Mth priority; designing the adding priority of the second auxiliary graphic group according to the structure of the target graphic, so as to divide the adding priority of the second auxiliary sub-graphics 221 into the 1st to the Nth priority; wherein M and N are both positive integers greater than 1. The adding priority can be understood as the adding order of the first auxiliary sub-graphics 211 and the second auxiliary sub-graphics 221, and the first auxiliary sub-graphics 211 and the second auxiliary sub-graphics 221 are added to the target graphic in sequence according to the priority.

[0076] In an optional embodiment, the adding rule also includes at least a position placement rule, which is used to specify the distance between the first auxiliary sub-graphic 211 and the key graphic, the distance between multiple first auxiliary sub-graphics 211, the distance between the second auxiliary sub-graphic 221 and the key graphic, and the distance between multiple second auxiliary sub-graphics 221. For example, the distance between the first auxiliary sub-graphic 211 of the first priority and the key graphic is 100nm or other suitable values, the distance between the second auxiliary sub-graphic 221 of the first priority and the key graphic is 80nm or other suitable values, and the distance between the first auxiliary sub-graphic 211 of the first priority and the adjacent first auxiliary sub-graphic 211 of the second priority is 50nm or other suitable values.

[0077] In an optional embodiment, the auxiliary graphics also include a third auxiliary graphics group, and the third auxiliary graphics group includes a number of third auxiliary sub-graphics 231. Execution of step S3 may include the following steps: according to the structure of the target graphics, designing the adding priority of the first auxiliary graphics group to divide the adding priority of the number of first auxiliary sub-graphics 211 into the 1st to Mth priorities; according to the structure of the target graphics, designing the adding priority of the second auxiliary graphics group to divide the adding priority of the number of second auxiliary sub-graphics 221 into the 1st to Nth priorities; according to the structure of the target graphics, designing the adding priority of the third auxiliary graphics group to divide the adding priority of the number of third auxiliary sub-graphics 231 into the 1st to Pth priorities; wherein M, N, and P are all positive integers greater than 1.

[0078] Finally, step S4 is executed to add the auxiliary graphic to the target graphic based on the updated adding rule.

[0079] In an optional embodiment, the key graphic includes a first key sub-graphic 111 and a second key sub-graphic 121, a first auxiliary sub-graphic 211 is added to at least one side perpendicular to the extension direction of the first key sub-graphic 111, and a second auxiliary sub-graphic 221 is added to at least one side perpendicular to the extension direction of the second key sub-graphic 121, so as to add the auxiliary graphics to the target graphic.

[0080] In an alternative embodiment, reference Figures 2 to 5 , a corner area is formed at one end of the first key sub-graphic 111 and the second key sub-graphic 121 close to each other, and the corner area is the area in the target graphic where the auxiliary graphics are to be placed, the first auxiliary graphic group includes a first auxiliary sub-graphic 211 of the first priority and a first auxiliary sub-graphic 211 of the second priority, the second auxiliary graphic group includes a second auxiliary sub-graphic 221 of the first priority and a second auxiliary sub-graphic 221 of the second priority, and adding the auxiliary graphics to the target graphic includes the following steps: adding the first auxiliary sub-graphic 211 of the first priority to the corner area of ​​the target graphic; adding the second auxiliary sub-graphic 221 of the first priority to the corner area of ​​the target graphic; adding the first auxiliary sub-graphic 211 of the second priority to the corner area of ​​the target graphic; adding the second auxiliary sub-graphic 221 of the second priority to the corner area of ​​the target graphic.

[0081] In an alternative embodiment, reference Figures 2 to 7 , graphics processing programs, software or other suitable tools can be used to add auxiliary graphics. Adding auxiliary graphics to the target graphics includes the following steps: using the 2i-2 output graphics as the input graphics, according to the adding rule, adding the first auxiliary sub-graphic 211 of the i-th priority to the 2i-2 output graphics to form the 2i-1 output graphics; using the 2i-1 output graphics as the input graphics, according to the adding rule, adding the second auxiliary sub-graphic 221 of the i-th priority to the 2i-1 output graphics to form the 2i output graphics; i is sequentially taken as a positive integer from 1 to max(M, N), and the target graphics is taken as the 0th output graphics, repeating the above steps to add the auxiliary graphics to the target graphics; wherein the value of max(M, N) is the maximum value of M and N.

[0082] Further, for example, if M and N are set to 2, refer to Figures 2 to 5 , executing step S4 includes the following steps: taking the target graphic as the input graphic, adding the first auxiliary sub-graphic 211 of the first priority to the target graphic according to the adding rule to form the first output graphic; taking the first output graphic as the input graphic, adding the second auxiliary sub-graphic 221 of the first priority to the first output graphic according to the adding rule to form the second output graphic; taking the second output graphic as the input graphic, adding the first auxiliary sub-graphic 211 of the second priority to the second output graphic according to the adding rule to form the third output graphic; taking the third output graphic as the input graphic, adding the second auxiliary sub-graphic 221 of the second priority to the third output graphic according to the adding rule to form the fourth output graphic, and the fourth output graphic can be used as the final output graphic.

[0083] When M and N are not equal, after the first auxiliary sub-graphic 211 or the second auxiliary sub-graphic 221 is added, the auxiliary graphics that have been added are left blank, and only the remaining second auxiliary sub-graphic 221 or the first auxiliary sub-graphic 211 is added, or other methods in the prior art can be used to add the remaining auxiliary graphics.

[0084] In an alternative embodiment, reference Figure 6 and Figure 7 The key graphics may further include a third key sub-graphic 131, the auxiliary graphics may further include a third auxiliary graphics group, the third auxiliary graphics group may include a plurality of third auxiliary sub-graphics 231, and the reference Figures 2 to 8 , execute step S4 to add the auxiliary graphics to the target graphics, including the following steps: taking the 3i-3th output graphics as the input graphics, according to the adding rule, adding the first auxiliary sub-graphic 211 of the i-th priority to the 3i-3th output graphics to form the 3i-2th output graphics; taking the 3i-2th output graphics as the input graphics, according to the adding rule, adding the second auxiliary sub-graphic 221 of the i-th priority to the 3i-2th output graphics to form the 3i-1th output graphics; taking the 3i-1th output graphics as the input graphics, according to the adding rule, adding the third auxiliary sub-graphic 231 of the i-th priority to the 3i-1th output graphics to form the 3i-1th output graphics; taking i as a positive integer from 1 to max(M, N, P) in turn, and taking the target graphics as the 0th output graphics, repeating the above steps to add the auxiliary graphics to the target graphics; wherein the value of max(M, N, P) is the maximum value among M, N and P.

[0085] Further, refer to Figure 8 , for example, taking M, N, and P as 2, executing step S4, including the following steps: taking the target graph as the input graph, adding the first auxiliary sub-graph 211 of the first priority to the target graph to form the first output graph; taking the first output graph as the input graph, adding the second auxiliary sub-graph 221 of the first priority to the first output graph to form the second output graph; taking the second output graph as the input graph, adding the third auxiliary sub-graph 231 of the first priority to the second output graph to form the third output graph; taking the third output graph as the input graph, adding the first auxiliary sub-graph 211 of the second priority to the third output graph to form the fourth output graph; taking the fourth output graph as the input graph, adding the second auxiliary sub-graph 221 of the second priority to the fourth output graph to form the fifth output graph; taking the fifth output graph as the input graph, adding the third auxiliary sub-graph 231 of the second priority to the fifth output graph to form the sixth output graph; wherein the sixth output graph can be used as the final output graph.

[0086] In an optional embodiment, adding the auxiliary graphics to the target graphics further includes the following steps: identifying the target graphics to identify the first key sub-graphic 111 and the second key sub-graphic 121 from the key graphics, which are used to subsequently add the first auxiliary graphics group and the second auxiliary graphics group. Optionally, the first key sub-graphic 111 and the second key sub-graphic 121 can be identified from the key graphics according to the structural size of the key graphics. For example, the key graphics with a width less than or equal to the first key width can be used as the first key sub-graphic 111, and the key graphics with a width greater than the first key width can be used as the second key sub-graphic 121.

[0087] In an optional embodiment, the key graphic also includes a third key sub-graphic 131, and adding the auxiliary graphic to the target graphic also includes the following steps: identifying the target graphic to identify the first key sub-graphic 111, the second key sub-graphic, and the third key sub-graphic 131 from the key graphic, which are used to subsequently add the first auxiliary graphic group, the second auxiliary graphic group, and the third auxiliary graphic group. Optionally, the first key sub-graphic 111, the second key sub-graphic 121, and the third key sub-graphic 131 can be identified according to the structural size of the key graphic. For example, a key graphic with a width less than or equal to the first key width can be used as the first key sub-graphic 111, a key graphic with a width greater than the first key width and less than the second key width can be used as the second key graphic, and a key graphic with a width greater than or equal to the second key width can be used as the third key graphic.

[0088] In an optional embodiment, the key graphic has a transverse extension part and a longitudinal extension part, the transverse extension part extends in the transverse direction, and the longitudinal extension part extends in the longitudinal direction, and step S4 is performed, and the following steps may also be included: adding an auxiliary graphic of the ith priority extending in one of the transverse and longitudinal directions to the target graphic; adding an auxiliary graphic of the ith priority extending in the other of the transverse and longitudinal directions to the target graphic; increasing the value of i from 1, and repeating the above steps until the auxiliary graphic is completely added to the target graphic, for example, i is sequentially set to a positive integer from 1 to max(M, N) or max(M, N, P). In actual production, affected by the specific structure of the key graphic, when the auxiliary graphic extending in the transverse direction or the longitudinal direction is added first, and the auxiliary graphic extending in the other direction is added later, compared with another priority setting method, the improvement effect on the process window can be further improved, so that the photolithography process has a higher resolution, and the effect of transferring the mask graphic to the silicon wafer is improved.

[0089] It should be noted that the key graphics of this embodiment may also include more types of key sub-graphics, and the corresponding auxiliary graphics may also include more types of auxiliary graphic groups, and the above concept of this embodiment may be used to add auxiliary graphics, but this embodiment is not limited to this.

[0090] When the order of adding auxiliary graphics is not controlled, refer to Figures 9 to 11 In the corner area of ​​the two-dimensional graphics, the addition results are often uncontrollable. In the recognition of the target graphics, the target graphics need to be divided into multiple layout areas. When the dividing line between two adjacent layout areas passes through the key graphics, the auxiliary graphics that need to be added are divided into two layout areas. Due to the uncontrollable addition of the auxiliary graphics at the corner area, the auxiliary graphics are inverted, which reduces the uniformity of the auxiliary graphics distribution and reduces the improvement effect on the process window.

[0091] In the present embodiment, by setting the adding priority of the auxiliary graphics in the adding rules, when adding auxiliary graphics, the output result of the previous step is used as the input of the next step, and the auxiliary graphics are added in sequence according to the set adding priority to complete the adding of all auxiliary graphics. When adding auxiliary graphics in complex structure areas such as the corner areas of two-dimensional graphics, the adding results of the auxiliary graphics can be accurately controlled within the target graphics, effectively preventing the occurrence of uncontrollable situations caused by errors in the addition of auxiliary graphics, avoiding problems such as the auxiliary graphics being inverted, and ensuring the improvement of the process window.

[0092] Embodiment 2

[0093] This embodiment provides an auxiliary graphic adding system, which adds auxiliary graphics using any of the auxiliary graphic adding methods in Embodiment 1. The auxiliary graphic adding system in this embodiment includes a first input module, a second input module, a rule control module, a graphic adding module and a graphic output module.

[0094] The first input module is used to obtain an input graphic, the input graphic at least includes a target graphic, the target graphic includes a key graphic, the key graphic includes a first key sub-graphic 111 and a second key sub-graphic 121, optionally, the key graphic may also include a third key sub-graphic 131 or more other types of key sub-graphics, the input graphic may also include an output graphic output by a graphic output module, such as a first output graphic, a second output graphic, etc.

[0095] The second input module is used to input auxiliary graphics, the auxiliary graphics include a first auxiliary graphics group and a second auxiliary graphics group, the first auxiliary graphics group includes a number of first auxiliary sub-graphics 211, the second auxiliary graphics group includes a number of second auxiliary sub-graphics 221, optionally, the auxiliary graphics may also include a third auxiliary graphics group, the third auxiliary graphics group includes a number of third auxiliary sub-graphics 231, or the auxiliary graphics may also include more types of auxiliary graphics groups.

[0096] The rule control module is used to store and adjust the adding rules of the auxiliary graphics. Optionally, the rule control module stores preset adding rules, and the adding rules are adjusted by the rule control module so that the adding rules include adding priorities.

[0097] The graphic adding module is used to add the auxiliary graphic to the target graphic according to the adding rule; the graphic output module is used to add the auxiliary graphic to the target graphic from the graphic adding module and output the target graphic with the added auxiliary graphic.

[0098] To explain the workflow of the auxiliary graphics adding system in detail, take the case where both M and N are 2 as an example. Input the target graphics from the first input module; input the auxiliary graphics from the second input module; use the graphics adding module to add the first auxiliary sub-graphic 211 of the first priority to the target graphics according to the adding rule in the rule control module, output it through the graphics output module and serve as the first output graphics; input the first output graphics from the first input module; use the graphics adding module to add the second auxiliary sub-graphic 221 of the first priority to the first output graphics according to the adding rule, output it through the graphics output module and serve as the second output graphics; input the second output graphics from the first input module; use the graphics adding module to add the first auxiliary sub-graphic 211 of the second priority to the second output graphics according to the adding rule, output it through the graphics output module and serve as the third output graphics; input the third output graphics from the first input module; use the graphics adding module to add the second auxiliary sub-graphic 221 of the second priority to the third output graphics according to the adding rule, output it through the graphics output module and serve as the fourth output graphics; the fourth output graphics is the final output graphics.

[0099] As described above, since the auxiliary graphic adding system provided in this embodiment uses any of the auxiliary graphic adding methods in the first embodiment to add auxiliary graphics, the auxiliary graphic adding system in this embodiment also has the beneficial effects of the first embodiment.

[0100] Embodiment 3

[0101] This embodiment provides a terminal, including a processor and a memory connected to the processor, wherein the memory is used to store a computer program; the processor is used to execute the computer program stored in the memory, so that the terminal can implement any one of the auxiliary graphics adding methods described in the first embodiment.

[0102] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify, change or combine the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A method for adding auxiliary graphics, characterized in that: The following steps are involved: Get the target graphics; Acquire auxiliary graphics, the auxiliary graphics at least comprising a first auxiliary graphics group and a second auxiliary graphics group, the first auxiliary graphics group comprising a plurality of first auxiliary sub-graphics, and the second auxiliary graphics group comprising a plurality of second auxiliary sub-graphics; Obtaining the adding priorities of the first auxiliary sub-graph and the second auxiliary sub-graph to update a preset adding rule; Based on the updated adding rule, the auxiliary graphic is added to the target graphic.

2. The auxiliary graphics adding method according to claim 1, characterized in that: The target graph has a key graph, and the key graph includes a first key sub-graph and a second key sub-graph; The first auxiliary sub-graphic is added to at least one side perpendicular to the extending direction of the first key sub-graphic, and the second auxiliary sub-graphic is added to at least one side perpendicular to the extending direction of the second key sub-graphic, so as to add the auxiliary graphics to the target graphics.

3. The auxiliary graphics adding method according to claim 2, characterized in that: The first key sub-graphic and the second key sub-graphic form a corner area at one end close to each other, the first auxiliary graphic group includes a first auxiliary sub-graphic of a first priority and a first auxiliary sub-graphic of a second priority, and the second auxiliary graphic group includes a second auxiliary sub-graphic of a first priority and a second auxiliary sub-graphic of a second priority; Adding the auxiliary graphic to the target graphic comprises the following steps: adding a first auxiliary sub-graphic of a first priority level to a corner area of ​​the target graphic; adding a second auxiliary sub-graphic of the first priority to a corner area of ​​the target graphic; adding a first auxiliary sub-graphic of a second priority level to a corner area of ​​the target graphic; A second auxiliary sub-pattern with a second priority level is added to a corner area of ​​the target pattern.

4. The auxiliary graphics adding method according to claim 2, characterized in that: Adding the auxiliary graphic to the target graphic also includes the following steps: The target graphic is identified to respectively identify the first key sub-graphic and the second key sub-graphic from the key graphic.

5. The auxiliary graphics adding method according to claim 1, characterized in that: According to the structure of the target graphic, the adding priorities of the first auxiliary graphic group and the second auxiliary graphic group are designed respectively, so as to divide the adding priorities of several first auxiliary sub-graphics into the 1st to Mth priorities, and divide the adding priorities of several second auxiliary sub-graphics into the 1st to Nth priorities, wherein M and N are both positive integers greater than 1.

6. The auxiliary graphics adding method according to claim 5, characterized in that: Adding the auxiliary graphic to the target graphic comprises the following steps: Taking the 2i-2 output graph as the input graph, according to the adding rule, adding the first auxiliary sub-graph of the i-th priority to the 2i-2 output graph to form the 2i-1 output graph; Taking the 2i-1th output graph as an input graph, according to the adding rule, adding the second auxiliary sub-graph of the i-th priority to the 2i-1th output graph to form a 2i-th output graph; i is sequentially set to a positive integer from 1 to max(M, N), and the target graphic is used as the 0th output graphic, and the above steps are repeated to add the auxiliary graphic to the target graphic; The value of max(M, N) is the maximum value of M and N.

7. The auxiliary graphics adding method according to claim 5, characterized in that: The auxiliary graphics further include a third auxiliary graphics group, and the third auxiliary graphics group includes a plurality of third auxiliary sub-graphics; According to the structure of the target graphic, the priority of adding the third auxiliary graphic group is designed to divide the priority of adding a plurality of the third auxiliary sub-graphics into the first to the Pth priority, wherein P is a positive integer greater than 1.

8. The auxiliary graphics adding method according to claim 7, characterized in that: Adding the auxiliary graphic to the target graphic comprises the following steps: Taking the 3i-3 output graph as the input graph, according to the adding rule, adding the first auxiliary sub-graph of the i-th priority to the 3i-3 output graph to form the 3i-2 output graph; Taking the 3i-2 output graph as the input graph, according to the adding rule, adding the second auxiliary sub-graph of the i-th priority to the 3i-2 output graph to form a 3i-1 output graph; Taking the 3i-1th output graph as an input graph, according to the adding rule, adding the third auxiliary sub-graph of the i-th priority to the 3i-1th output graph to form a 3ith output graph; i is sequentially set to a positive integer from 1 to max(M, N, P), and the target graphic is used as the 0th output graphic, and the above steps are repeated to add the auxiliary graphic to the target graphic; Among them, the value of max(M, N, P) is the maximum value among M, N and P.

9. An auxiliary graphic adding system, applying the auxiliary graphic adding method according to any one of claims 1 to 8 to add the auxiliary graphic to the target graphic, characterized in that: include: A first input module, used for acquiring an input graphic, wherein the input graphic at least includes a target graphic; A second input module, used for inputting auxiliary graphics; A rule control module, used for storing and adjusting the adding rule of the auxiliary graphics, wherein the adding rule includes adding priority; A graphics adding module, used for adding the auxiliary graphics to the target graphics according to the adding rule; The graphics output module is used to add the auxiliary graphics from the graphics adding module to the target graphics, and output the target graphics with the auxiliary graphics added.

10. A terminal, characterized in that: comprising a processor and a memory in communication with the processor; The memory is used to store computer programs; The processor is used to execute the computer program stored in the memory, so that the terminal can implement the auxiliary graphics adding method according to any one of claims 1 to 8.

Images