Optical alignment system and device including the same

Abstract

The invention provides an optical alignment system. The optical alignment system comprises an optical imaging module and an optical illumination module, wherein the optical imaging module is used for aligning two alignment surfaces; the optical illumination module is used for providing illumination for the two alignment surfaces and the optical imaging module; the optical imaging module aligns the two alignment surfaces facing the same direction, the optical imaging module comprises a first light path module, a second light path module and a receiving lens, and the first light path module transmits light reflected after the optical illumination module irradiates the first alignment surface to the receiving lens along a first light path; the second light path module transmits light rays reflected after the optical illumination module irradiates a second alignment surface to the receiving lens along a second light path; the receiving lens is used for receiving light transmitted along the first light path and the second light path; the optical path difference between the first optical path and the second optical path is smaller than the depth of field of the receiving lens; the optical alignment system provided by the invention realizes alignment of two alignment surfaces facing the same direction.

Description

Technical Field

[0001] The present invention relates to the field of optical machinery technology, and in particular to an alignment optical system and equipment. Background Art

[0002] In the chip packaging process, how to align the carriers and material positions on both sides during flip bonding is a common technical problem faced by the industry. Currently, the solutions provided by various manufacturers on the market include the following:

[0003] The first method is to image the two objects to be aligned in the same field of view after flipping when their spatial positions are close enough. The problem with this method is that when the equipment stacks different materials, the required field of view is different. When the field of view becomes larger, the accuracy of alignment cannot be guaranteed.

[0004] The second alignment method is to use multiple cameras and lens groups to align the substrate and materials according to different conditions during the alignment process. For example, the visual alignment system on the FC-250 placement machine of Karl Suss Company in Germany uses two cameras and lenses to achieve chip and base alignment; the FC2000 placement machine alignment system of Toray Company in Japan uses three CCD (charge coupled device) cameras to achieve alignment. The above two technical solutions using multiple cameras and lens groups use multiple imaging systems, which have high equipment costs. One calibration requires calibration and adjustment of multiple imaging systems, and the overall steps are cumbersome.

[0005] The third alignment method is to install the pile head on the rotating swing arm, and before alignment, the front axis arm is perpendicular to the surface where the base seat is located. However, this alignment method requires that during the alignment process, the rotating arm needs to hover at a 90° position for alignment, adding a step of movement and dwell for the rotating swing arm.

[0006] It can be seen that the current vision alignment solutions of major manufacturers cannot take into account cost, accuracy and good coordination with the process. Summary of the invention

[0007] The present invention provides an alignment optical system, which can take into account cost, accuracy and good coordination with the process, and solve the defects of the alignment systems on the market.

[0008] To achieve the above-mentioned purpose, specifically, an optical alignment system is provided, comprising an optical imaging module for aligning two alignment surfaces and an optical lighting module for providing illumination to the two alignment surfaces and the optical imaging module; the optical imaging module aligns the two alignment surfaces facing the same direction, the optical imaging module comprises a first optical path module, a second optical path module and a receiving lens, the first optical path module transmits the light reflected after the optical lighting module irradiates the first alignment surface along the first optical path to the receiving lens; the second optical path module transmits the light reflected after the optical lighting module irradiates the second alignment surface along the second optical path to the receiving lens; the receiving lens is used to receive the light transmitted along the first optical path and the second optical path; the optical path difference between the first optical path and the second optical path is less than the depth of field of the receiving lens.

[0009] Preferably, the first optical path module comprises a first prism unit, and the first prism unit reflects the light reflected by the optical illumination module after irradiating the first alignment surface, and transmits the light to the receiving lens.

[0010] Preferably, the second optical path module comprises a second prism unit and a third prism unit, and the second prism unit transmits the light reflected by the optical illumination module after irradiating the second alignment surface to the receiving lens after reflecting it twice.

[0011] Preferably, the receiving lens comprises a beam splitter prism unit and a telecentric lens, and the beam splitter prism unit is used to converge the light along the first light path and the second light path into the telecentric lens.

[0012] Preferably, the first optical path module also includes a first lens unit and / or a first filter, the first lens unit is arranged between the first alignment surface and the optical illumination module, and the first lens unit is used to adjust the field of view size of the first optical path; at least one first filter is provided.

[0013] Preferably, the second optical path module also includes a second lens unit and / or a second filter. The second lens unit is arranged between the second alignment surface and the optical illumination module, and the second lens unit is used to adjust the field of view size of the second optical path; at least one second filter is arranged.

[0014] Preferably, the optical alignment system also includes a first optical path mounting assembly for carrying the first optical path module, a second optical path mounting assembly for carrying the second optical path module, and a receiving lens mounting assembly, wherein the receiving lens mounting assembly is arranged between the first optical path mounting assembly and the second optical path mounting assembly, and the receiving lens mounting assembly is used to carry the receiving lens.

[0015] Preferably, the first optical path mounting assembly includes a first mounting substrate, a first slide, a first mounting plate, a first mounting member and a first mounting block, the first slide includes a fixed component and a sliding component, the fixed component of the first slide is fixedly connected to the first mounting substrate; the first mounting plate is fixedly connected to the sliding member of the first slide; the first mounting member is fixedly connected to a side of the first mounting plate away from the first slide, and the first mounting member is used to carry the first prism unit; the first mounting block is fixedly connected to the first mounting plate, the first mounting block and the first slide are mounted on the same side of the first mounting plate, and the first mounting block is used to fix the optical illumination module.

[0016] Preferably, the second optical path mounting assembly includes a second mounting substrate, a second slide, a second mounting plate, a second mounting member and a second mounting block; the second slide includes a fixed component and a sliding component, the fixed component of the second slide is fixedly connected to the second mounting substrate; the second mounting plate is fixedly connected to the sliding member of the second slide; the second mounting member is fixedly connected to a side of the second mounting plate away from the second slide, and the second mounting member is used to carry the second prism unit; the second mounting block is fixedly connected to the second mounting plate, the second mounting block and the second slide are mounted on the same side of the second mounting plate, and the second mounting block is used to fix the optical illumination module.

[0017] Preferably, the first optical path installation assembly further includes a first prism adjustment hole 56, and the first prism adjustment hole 56 is opened on the first installation member;

[0018] Preferably, the second optical path installation assembly further includes a second prism adjustment hole 66, and the second prism adjustment hole 66 is provided on the second installation member.

[0019] Preferably, the receiving lens mounting assembly includes a fixed base plate, a first fixing member, a second fixing member and a lens adjustment hole, the first fixing member is used to fix the telecentric lens, the first fixing member is fixedly connected to the fixed base plate; the second fixing member is fixedly connected to the fixed base plate, the third prism unit and the beam splitter prism unit are fixedly connected to the side of the second fixing member away from the fixed base plate; the lens adjustment hole is opened on the fixed base plate, and the lens adjustment hole is a strip hole.

[0020] The present invention also provides a device comprising the above optical alignment system.

[0021] In summary, the present invention can achieve the following technical effects:

[0022] 1. The alignment of two alignment surfaces in the same direction is realized. Through the first optical path and the second optical path, the alignment of two alignment surfaces in the same direction before the alignment action is realized, filling the gap in the industry for the alignment of two alignment surfaces in the same direction before flipping.

[0023] 2. By setting the first slide and the second slide, the first optical path and the second optical path can be adjusted in the horizontal direction, so that the optical alignment system can be easily aligned with the two alignment surfaces while calibrating the optical path difference between the first optical path and the second optical path.

[0024] 3. By providing the first prism adjustment hole 56 and the second prism adjustment hole 66, the angles of the first prism unit and the second prism unit are fine-tuned, thereby fine-tuning the light angle and the field of view of the optical alignment system.

[0025] 4. By setting the lens adjustment hole, the receiving lens can be adjusted horizontally to adapt to different working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A first schematic diagram of the optical alignment system described in the present invention;

[0027] Figure 2 is a second schematic diagram of the optical alignment system described in the present invention;

[0028] Figure 3 is a third schematic diagram of the optical alignment system described in the present invention;

[0029] Figure 4 A fourth schematic diagram of the optical alignment system according to the present invention;

[0030] Figure 5 is a fifth schematic diagram of the optical alignment system described in the present invention;

[0031] Figure 6 A sixth schematic diagram of the optical alignment system according to the present invention;

[0032] Figure 7 is a seventh schematic diagram of the optical alignment system described in the present invention;

[0033] Figure 8 is an eighth schematic diagram of the optical alignment system described in the present invention;

[0034] In the figure: 1, optical imaging module; 11, first optical path module; 111, first prism unit; 112, first lens unit; 12, second optical path module; 121, second prism unit; 122, third prism unit; 123, second lens unit; 13, receiving lens; 131, splitter prism unit; 132, telecentric lens; 2, optical illumination module; 3, first alignment surface; 4, second alignment surface; 5, first optical path mounting assembly; 51, first mounting substrate ; 52. First slide; 53. First mounting plate; 54. First mounting member; 55. First mounting block; 56. First prism adjustment hole; 6. Second optical path mounting assembly; 61. Second mounting substrate; 62. Second slide; 63. Second mounting plate; 64. Second mounting member; 65. Second mounting block; 66. Second prism adjustment hole; 7. Receiving lens mounting assembly; 71. Fixed substrate; 72. First fixing member; 73. Second fixing member; 74. Lens adjustment hole. DETAILED DESCRIPTION

[0035] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. The described embodiments are only part of the embodiments of the present invention, but not all of the embodiments.

[0036] The components of the embodiments of the present invention generally described and shown in the drawings herein may be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention.

[0037] Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0038] In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the numbering terms such as "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0039] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0040] According to the following Figures 1 to 8 The optical alignment system described in the present invention will be described.

[0041] The present invention discloses an optical alignment system, comprising an optical imaging module 1 and an optical lighting module 2. The optical imaging module 1 is used to align two alignment surfaces that need to be aligned, and the optical lighting module 2 provides light sources to the optical imaging module 1 and the two alignment surfaces.

[0042] The optical alignment system disclosed in the present invention is used to align two alignment surfaces facing the same direction. Specifically, the optical imaging module 1 includes a first optical path module 11, a second optical path module 12 and a receiving lens 13. The first optical path module 11 is used to transmit the light of the first alignment surface 3 to the receiving lens 13 along the first optical path, and the second optical path module 12 is used to transmit the light of the second alignment surface 4 to the receiving lens 13 along the second optical path, wherein the optical path difference between the first optical path and the second optical path is less than the depth of field of the receiving lens 13. When using the optical alignment system disclosed in the present invention, it is ensured that the optical paths of the first optical path and the second optical path are the same. Of course, under some working conditions, the optical paths of the first optical path and the second optical path cannot be consistent. At this time, it is ensured that the optical path difference between the first optical path and the second optical path is less than the depth of field of the receiving lens 13, and the accuracy of the alignment result can also be ensured from the hardware level.

[0043] Next, the first optical path module 11 and the second optical path module 12 are described in detail. The first optical path module 11 includes a first prism unit 111. The first prism unit 111 reflects the light reflected by the optical illumination module 2 on the first alignment surface 3 and enters the receiving lens 13. The second optical path module 12 includes a second prism unit 121 and a third prism unit 122. The second right-angle prism unit and the third right-angle prism unit transmit the light reflected twice by the optical illumination module 2 on the second alignment surface 4 and enter the receiving lens 13. The specific prism types of the first prism unit 111, the second prism unit 121, and the third prism unit 122 are not limited here. According to the specific working conditions, for example, a right-angle prism, an isosceles prism, a pentagonal prism, or a dove prism can be selected according to the reflection angle. In the working conditions of the embodiment of the present invention, a 90-degree reflection is required. Therefore, the first prism unit 111, the second prism unit 121, and the third prism unit 122 in the present invention all select right-angle prisms to achieve 90-degree light reflection.

[0044] The receiving lens 13 includes a beam splitter prism unit 131 and a telecentric lens 132. The beam splitter prism unit 131 converges the light transmitted along the first optical path and the second optical path into the telecentric lens 132. In the present invention, the beam splitter prism unit 131 is a beam splitter prism unit 131 that can achieve semi-transmission and semi-reflection, and reflects the light reflected by the first prism unit 111 into the telecentric lens 132. At the same time, the light reflected by the third prism unit 122 passes through the beam splitter prism unit 131 and enters the telecentric lens 132. Of course, the camera selection may vary according to the accuracy requirements of different working conditions. The telecentric lens 132 is used in the embodiment of the present invention, which can overcome the defect of the traditional lens that the image is larger near and smaller far. When the optical path difference between the first optical path and the second optical path is kept within the depth of field of the telecentric lens 132, the first alignment surface 3 and the second alignment surface 4 can be aligned more accurately. The embodiment of the present invention does not limit the specific type of the telecentric lens 132. The telecentric lens 132 can adopt an object-side telecentric lens 132, an image-side telecentric lens 132, or a bilateral telecentric lens 132. In addition, the embodiment of the present invention is used in the chip process flow, and the alignment accuracy requirements are very high, basically all in the micron level or less. Therefore, the telecentric lens 132 in this embodiment can also adopt an AFT telecentric lens 132 to improve the adaptability, that is, it can produce high-resolution images with a small pixel image sensor to improve the recognition accuracy.

[0045] In the embodiment of the present invention, the first prism unit 111, the second prism unit 121 and the third prism unit 122 are rectangular prisms. Depending on the installation environment, the first prism unit 111, the second prism unit 121 and the third prism unit 122 may be placed at different angles. Figure 1 and Figure 2, schematic diagrams showing different placement angles of the first prism unit 111, the second prism unit 121 and the third prism unit 122 are shown respectively. Figure 1 In the process of reflection, the light enters the prism from the air, is reflected by the prism, and then enters the air from the prism; Figure 2 In the figure, the surface where the light is reflected is the surface where the inclined surface of the right-angle prism is located. The light is propagated in the same medium before entering the receiving lens 13. The image presented by the receiving lens 13 has higher accuracy and clearer picture.

[0046] See Figure 3 In order to adapt to more working conditions and adjust the alignment field size of the optical alignment system, the first optical path module 11 also includes a first lens unit 112, which is arranged between the first alignment surface 3 and the optical illumination module 2, and is used to adjust the field size of the first optical path; the second optical path module 12 also includes a second lens unit 123, which is arranged between the second alignment surface 4 and the optical illumination module 2, and is used to adjust the field size of the second optical path. Of course, the lens types / parameters set by the first lens unit 112 and the second lens unit 123 do not need to be completely consistent. Specifically, in some working conditions, the first alignment surface 3 and the second alignment surface 4 are not in the same horizontal plane. At this time, the lens types / parameters selected by the first lens unit 112 and the second lens unit 123 do not need to be completely consistent, but by selecting lenses of different types / parameters to achieve the same field range of the two alignment surfaces to improve the accuracy and precision of alignment.

[0047] In some working conditions, when the working environment of the optical alignment system is filled with other interfering light or other interfering factors, the first optical path module 11 of the present invention can be increased with a first filter (not shown in the figure), and the second optical module can be increased with a second filter (not shown in the figure). The first filter and the second filter can improve the signal-to-noise ratio and solve the interfering light or other interfering factors in the working environment.

[0048] See Figure 4 In order to install the optical imaging module 1 and the optical illumination module 2 at corresponding positions, the optical alignment system of the present invention also includes a first optical path mounting component 5, a second optical path mounting component 6 and a receiving lens mounting component 7, wherein the first optical path mounting component 5 is used to carry the first optical path module 11, the second optical path mounting component 6 is used to carry the second optical path module 12, the receiving lens mounting component 7 is used to carry the receiving lens 13, and the receiving lens mounting component 7 is arranged between the first optical path mounting component 5 and the second optical path mounting component 6.

[0049] Please refer to Figure 5 and Figure 6Specifically, the first optical path mounting assembly 5 includes a first mounting substrate 51, a first slide 52, a first mounting plate 53, a first mounting member 54 and a first mounting block 55. The first slide 52 includes a fixed component and a sliding component. The fixed component of the first slide 52 is fixedly connected to the first mounting substrate 51, the first mounting plate 53 is fixedly connected to the sliding component of the first slide 52, the first mounting member 54 is fixedly connected to the side of the first mounting plate 53 away from the first slide 52, the first mounting block 55 is fixedly connected to the first mounting plate 53, the first mounting block 55 and the first slide 52 are installed on the same side of the first mounting plate 53, and the first mounting block 55 is used to fix the optical lighting module 2.

[0050] The first slide 52 is mounted on the first mounting substrate 51. The first slide 52 can manually adjust the horizontal position of the sliding component, thereby driving the first mounting member 54 and the first mounting block 55 to move horizontally, that is, driving the first prism unit 111 and the optical illumination module 2 to move. The optical path of the first optical path is controlled by the first slide 52 to ensure that the optical path difference between the first optical path and the second optical path is within the depth of field of the receiving lens 13. The manual adjustment process of the first slide 52 in the embodiment of the present invention may include coarse adjustment and fine adjustment, wherein a large adjustment is performed through coarse adjustment, and a small and precise adjustment is performed through fine adjustment. The first slide 52 in this embodiment may also include a limiting component (not shown in the figure), which limits the first slide 52 after the first slide 52 is adjusted into place, and fixes the relative position between the sliding component and the fixed component.

[0051] In order to adjust the light path of the first optical path, fine-tune the light direction of the first optical path and reduce interference, the first optical path mounting assembly 5 in the embodiment of the present invention preferably includes a first prism adjustment hole 56. The first prism adjustment hole 56 is provided on the first mounting member 54. The staff can extend the top screw into the first prism adjustment hole 56 to fine-tune the angle of the first prism so as to realign the first optical path and the second optical path.

[0052] Please refer to Figure 6 and Figure 7 The second optical path mounting assembly 6 includes a second mounting substrate 61, a second slide 62, a second mounting plate 63, a second mounting member 64 and a second mounting block 65. The second slide 62 includes a fixed component and a sliding component. The fixed component of the second slide 62 is fixedly connected to the second mounting substrate 61, the second mounting plate 63 is fixedly connected to the sliding component of the second slide 62, the second mounting block 65 is fixedly connected to the side of the second mounting plate 63 away from the second slide 62, the second mounting block 65 is fixedly connected to the second mounting plate 63, the second mounting block 65 and the second slide 62 are mounted on the same side of the second mounting plate 63, and the second mounting block 65 is used to fix the optical lighting module 2.

[0053] The second slide 62 is mounted on the second mounting substrate 61. The second slide 62 can manually adjust the horizontal position of the sliding component, thereby driving the second mounting member 64 and the second mounting block 65 to move horizontally, that is, driving the second prism unit 121 and the optical illumination module 2 to move. The optical path of the second optical path is controlled by the second slide 62 to ensure that the optical path difference between the second optical path and the first optical path is within the depth of field of the receiving lens 13. The manual adjustment process of the second slide 62 in the embodiment of the present invention may include coarse adjustment and fine adjustment, wherein a large adjustment is performed through coarse adjustment, and a small and precise adjustment is performed through fine adjustment. The second slide 62 in this embodiment may also include a limiting component (not shown in the figure), which limits the second slide 62 after the second slide 62 is adjusted into place, and fixes the relative position between the sliding component and the fixed component.

[0054] In the embodiment of the present invention, there is no limitation on the specific light source type of the optical illumination module 2. The optical illumination module 2 in the embodiment of the present invention is an annular light source. The optical illumination module 2 has two annular light sources, which provide light sources for the first light path and the second light path respectively. An opening is provided in the middle of the annular light source. The light reflected to the first alignment surface 3 or the second alignment surface 4 enters the first prism unit 111 or the second prism unit 121 through the opening after reflection, when the first lens unit 112 and / or the second lens unit 123 are provided.

[0055] In order to adjust the light path of the second optical path, fine-tune the light direction of the second optical path and reduce interference, the second optical path mounting assembly 6 in the embodiment of the present invention preferably includes a second prism adjustment hole 66. The second prism adjustment hole 66 is provided on the second mounting member 64. The staff can extend the top screw into the second prism adjustment hole 66 to fine-tune the angle of the second prism so as to realign the first optical path and the second optical path.

[0056] Please refer to Figure 6 and Figure 8Next, the specific structure of the receiving lens mounting assembly 7 is described. The receiving lens mounting assembly 7 includes a fixed substrate 71, a first fixing member 72, a second fixing member 73, and a lens adjustment hole 74. The fixed substrate 71 is used to fix the receiving lens mounting assembly 7 with the equipment tooling. The first fixing member 72 is used to fix the high-beam camera. The first fixing member 72 is fixedly connected to the fixed substrate 71. The present invention does not limit the specific fixing method of the first fixing member 72. The high-beam camera can be fixed by structural clamping, limiting, etc. In the embodiment of the present invention, the first fixing member 72 is a semicircular ring type, and the high-beam camera is clamped by screws to achieve the fixation of the high-beam camera. The second fixing member 73 is fixedly connected to the fixed substrate 71, and the third right-angle prism and the beam splitter unit 131 are fixedly connected to the side of the second fixing member 73 away from the fixed substrate 71. The lens adjustment hole 74 is opened on the fixed substrate 71, and the lens adjustment hole 74 is a strip hole. In the embodiment of the present invention, the staff adjusts the horizontal relative position of the receiving lens 13 by screwing the screws into different positions of the lens adjustment hole 74.

[0057] The present invention achieves the following technical effects through the above technical solution:

[0058] 1. The alignment of two alignment surfaces in the same direction is realized. Through the first optical path and the second optical path, the alignment of two alignment surfaces in the same direction before the alignment action is realized, filling the gap in the industry for the alignment of two alignment surfaces in the same direction before flipping.

[0059] 2. By setting the first slide 52 and the second slide 62, the first optical path and the second optical path can be adjusted in the horizontal direction, so that the optical alignment system can be easily aligned with the two alignment surfaces and the optical path difference between the first optical path and the second optical path can be calibrated.

[0060] 3. By providing the first prism adjustment hole 56 and the second prism adjustment hole 66, the angle of the first prism unit 111 and the second prism unit 121 is fine-tuned, thereby fine-tuning the light angle and the field of view of the optical alignment system.

[0061] 4. By providing the lens adjustment hole 74, the receiving lens 13 can be adjusted in the horizontal direction to adapt to different working conditions.

Claims

1. Optical alignment system, including: An optical imaging module (1), wherein the optical imaging module (1) is used to align two alignment surfaces; as well as an optical lighting module (2), the optical lighting module (2) being used to provide lighting to the two alignment surfaces and the optical imaging module (1); Features: The optical imaging module (1) aligns the two alignment surfaces facing the same direction, and the optical imaging module (1) comprises: A first optical path module (11), the first optical path module (11) transmitting the light reflected by the optical illumination module (2) after being irradiated on the first alignment surface (3) to a receiving lens (13) along a first optical path; a second optical path module (12), the second optical path module (12) transmitting the light reflected by the optical illumination module (2) after being irradiated on the second alignment surface (4) to the receiving lens (13) along a second optical path; and The receiving lens (13), the receiving lens (13) is used to receive light transmitted along the first light path and the second light path; The optical path difference between the first optical path and the second optical path is smaller than the depth of field of the receiving lens (13).

2. The optical alignment system according to claim 1, characterized in that: The first optical path module (11) comprises a first prism unit (111), and the first prism unit (111) reflects the light reflected after the optical illumination module (2) irradiates the first alignment surface (3), and transmits the light to the receiving lens (13).

3. The optical alignment system according to claim 2, characterized in that: The second optical path module (12) comprises a second prism unit (121) and a third prism unit (122); the second prism unit (121) transmits the light reflected by the optical illumination module (2) after irradiating the second alignment surface (4) twice to the receiving lens (13).

4. The optical alignment system according to claim 3, characterized in that: The receiving lens (13) comprises a beam splitter prism unit (131) and a telecentric lens (132); the beam splitter prism unit (131) is used to converge light along the first light path and the second light path into the telecentric lens (132).

5. The optical alignment system according to claim 2, characterized in that: The first optical path module (11) further comprises: a first lens unit (112), the first lens unit (112) being arranged between the first alignment surface (3) and the optical illumination module (2), the first lens unit (112) being used to adjust the field of view size of the first light path; and / or, A first optical filter, at least one of the first optical filter is provided.

6. The optical alignment system according to claim 3, characterized in that: The second optical path module (12) further comprises: a second lens unit (123), the second lens unit (123) being arranged between the second alignment surface (4) and the optical illumination module (2), the second lens unit (123) being used to adjust the field of view size of the second light path; and / or, A second filter, at least one second filter is provided.

7. The optical alignment system according to claim 4, characterized in that: Also includes: A first optical path installation component (5), the first optical path installation component (5) being used to carry the first optical path module (11); A second optical path installation component (6), the second optical path installation component (6) being used to carry the second optical path module (12); as well as A receiving lens mounting assembly (7), wherein the receiving lens mounting assembly (7) is arranged between the first optical path mounting assembly (5) and the second optical path mounting assembly (6), and the receiving lens mounting assembly (7) is used to carry the receiving lens (13).

8. The optical alignment system according to claim 7, characterized in that: The first optical path installation component (5) comprises: A first mounting substrate (51); A first slide (52), the first slide (52) comprising a fixed component and a sliding component, the fixed component of the first slide (52) being fixedly connected to the first mounting substrate (51); a first mounting plate (53), the first mounting plate (53) being fixedly connected to the sliding component of the first slide platform (52); a first mounting member (54), the first mounting member (54) being fixedly connected to a side of the first mounting plate (53) facing away from the first slide platform (52), the first mounting member (54) being used to carry the first prism unit (111); and A first mounting block (55), the first mounting block (55) is fixedly connected to the first mounting plate (53), the first mounting block (55) and the first slide table (52) are mounted on the same side of the first mounting plate (53), and the first mounting block (55) is used to fix the optical lighting module (2).

9. The optical alignment system according to claim 7, characterized in that: The second optical path installation component (6) comprises: A second mounting substrate (61); A second slide (62), the second slide (62) comprising a fixed component and a sliding component, the fixed component of the second slide (62) being fixedly connected to the second mounting substrate (61); a second mounting plate (63), the second mounting plate (63) being fixedly connected to the sliding component of the second slide platform (62); a second mounting member (64), the second mounting member (64) being fixedly connected to a side of the second mounting plate (63) facing away from the second slide platform (62), the second mounting member (64) being used to carry the second prism unit (121); and A second mounting block (65), the second mounting block (65) is fixedly connected to the second mounting plate (63), the second mounting block (65) and the second slide table (62) are mounted on the same side of the second mounting plate (63), and the second mounting block (65) is used to fix the optical lighting module (2).

10. The optical alignment system according to claim 8, characterized in that: The first optical path installation component (5) further comprises a first prism adjustment hole (56), wherein the first prism adjustment hole (56) is provided on the first installation member (54).

11. The optical alignment system according to claim 9, characterized in that: The second optical path installation component (6) further comprises a second prism adjustment hole (66), and the second prism adjustment hole (66) is provided on the second installation member (64).

12. The optical alignment system according to claim 7, characterized in that: The receiving lens mounting assembly (7) comprises: Fixed base plate(71); A first fixing member (72), the first fixing member (72) being used to fix the telecentric lens (132), the first fixing member (72) being fixedly connected to the fixed base plate (71); a second fixing member (73), the second fixing member (73) being fixedly connected to the fixing substrate (71), the third prism unit (122) and the beam splitting prism unit (131) being fixedly connected to a side of the second fixing member (73) facing away from the fixing substrate (71); and A lens adjustment hole (74), wherein the lens adjustment hole (74) is provided on the fixed base plate (71), and the lens adjustment hole (74) is a strip-shaped hole.

13. A device comprising an optical alignment system, characterized in that An optical alignment system comprising any one of claims 1 to 12.

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