Infinity-corrected microscope objective and microscope

Abstract

The application provides an infinity-corrected microscope objective and a microscope. The infinity-corrected microscope objective comprises a first lens, a first lens group, a second lens group and a sixth lens arranged in sequence from an object side to an image side along an optical axis. According to the scheme, the specific parameters and structures of the lenses are set, so that the magnification of the infinity-corrected microscope objective is 5 times, the object field of view is 8 mm, the tube lens with a focal length of 200 mm can be used, the working distance is 30.12 mm, the corresponding numerical aperture is 0.12, the object field of view and the working distance of the infinity-corrected microscope objective can be improved, and the overall performance of the microscope is improved; while the field of view is improved, the infinity-corrected effective aperture is optimized, the vignetting can be greatly reduced, and the imaging effect is improved; the resolution at the large field of view is high; and the independent design is completely realized, and the problem that the existing 5 times objective lens cannot meet many use requirements in optical detection is solved.

Description

Technical Field

[0001] The present invention relates to the field of microscopes, and in particular to an infinity correction microscope objective lens and a microscope. Background Art

[0002] With the development of the semiconductor industry, the requirements for inspection systems are becoming increasingly stringent, and optical inspection systems are becoming indispensable in semiconductor inspection. Visual inspection is a common method in optical inspection systems, and key optical parameters include resolution, depth of field, field of view, numerical aperture, frame rate, and working distance. During the inspection process, different optical parameters often constrain each other. For example, increasing resolution often requires reducing depth of field and frame rate.

[0003] To maintain a certain level of image clarity while increasing resolution, an autofocus module is often added to the optical system, making infinity correction a very good option. However, infinity correction also has distance limitations, and the larger the field of view, the more likely vignetting will occur. Summary of the Invention

[0004] An object of the present invention is to effectively reduce the vignetting of an infinity-corrected microscope objective lens and improve imaging effects.

[0005] A further object of the present invention is to increase the object field of view and working distance of the infinity-corrected microscope objective, thereby improving the overall performance of the microscope.

[0006] In particular, the present invention provides an infinity-corrected microscope objective lens, comprising: a first lens, a first lens group, a second lens group, and a sixth lens, which are arranged on the same optical axis in sequence from the object side to the image side; the first lens has a concave surface facing the object side and a concave surface facing the image side; the sixth lens has a convex surface facing the object side and a concave surface facing the image side; the first lens group and the second lens group each include at least two lenses, and the refractive index of at least two lenses in each lens group is different; the first lens group has a convex surface facing the object side and a convex surface facing the image side; the second lens group has a convex surface facing the object side and a flat surface facing the image side.

[0007] Optionally, the first lens is a double concave negative lens; the sixth lens is a negative meniscus lens; the first lens group is a double cemented lens, including the second lens and the third lens starting from the object side; the second lens is a negative meniscus lens, whose surface facing the object side is convex and whose surface facing the image side is concave; the third lens is a double convex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; the second lens group is a double cemented lens, including the fourth lens and the fifth lens starting from the object side; the fourth lens is a double convex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; the fifth lens is a plano-concave negative lens, whose surface facing the object side is concave and whose surface facing the image side is flat.

[0008] Optionally, the first lens is made of H-TF5 material; the second lens is made of D-ZK3 material; the third lens is made of H-ZPK7 material; the fourth lens is made of H-ZPK7 material; the fifth lens is made of H-LAK7A material; and the sixth lens is made of H-ZF13 material.

[0009] Optionally, the surface of the first lens facing the object side is the first mirror surface, and the surface of the first lens facing the image side is the second mirror surface; the surface of the second lens facing the object side is the third mirror surface, the cemented surface of the second lens and the third lens is the fourth mirror surface, and the surface of the third lens facing the image side is the fifth mirror surface; the surface of the fourth lens facing the object side is the sixth mirror surface, the cemented surface of the fourth lens and the fifth lens is the seventh mirror surface, and the surface of the fifth lens facing the image side is the eighth mirror surface; the surface of the sixth lens facing the object side is the ninth mirror surface, and the surface of the sixth lens facing the image side is the tenth mirror surface. The curvature radii of the first mirror surface, the fifth mirror surface, and the seventh mirror surface are negative numbers; the curvature radii of the second mirror surface, the third mirror surface, the fourth mirror surface, the sixth mirror surface, the ninth mirror surface, and the tenth mirror surface are positive numbers; and the curvature radius of the eighth mirror surface is infinite.

[0010] Optionally, the radius of curvature of the first mirror surface is -161.28 to -161.26 mm; the radius of curvature of the second mirror surface is 17.68 to 17.7 mm; the radius of curvature of the third mirror surface is 23.21 to 23.23 mm; the radius of curvature of the fourth mirror surface is 19.96 to 19.98 mm; the radius of curvature of the fifth mirror surface is -21.77 to -21.75 mm; the radius of curvature of the sixth mirror surface is 70.36 to 70.38 mm; the radius of curvature of the seventh mirror surface is -12.51 to -12.49 mm; the radius of curvature of the ninth mirror surface is 25.22 to 25.24 mm; and the radius of curvature of the tenth mirror surface is 18.51 to 18.53 mm.

[0011] Optionally, the clear aperture of the first mirror is 4.2 mm; the clear aperture of the second mirror is 4.34 mm; the clear aperture of the third mirror is 6.37 mm; the clear aperture of the fourth mirror is 7.2 mm; the clear aperture of the fifth mirror is 7.56 mm; the clear aperture of the sixth mirror is 7.34 mm; the clear aperture of the seventh mirror is 7.06 mm; the clear aperture of the eighth mirror is 6.82 mm; the clear aperture of the ninth mirror is 6.34 mm; and the clear aperture of the tenth mirror is 4.85 mm.

[0012] Optionally, the mirror distance between the first mirror and the second mirror is 1.19 to 1.23 mm; the mirror distance between the second mirror and the third mirror is 5.78 to 5.82 mm; the mirror distance between the third mirror and the fourth mirror is 9.86 to 9.9 mm; the mirror distance between the fourth mirror and the fifth mirror is 6.8 to 6.84 mm; the mirror distance between the fifth mirror and the sixth mirror is 1.03 to 1.07 mm; the mirror distance between the sixth mirror and the seventh mirror is 5.84 to 5.88 mm; the mirror distance between the seventh mirror and the eighth mirror is 11.95 to 11.99 mm; the mirror distance between the eighth mirror and the ninth mirror is 15.07 to 15.11 mm; and the mirror distance between the ninth mirror and the tenth mirror is 11.29 to 11.33 mm.

[0013] Optionally, the infinity-corrected microscope objective can be used with a tube lens having a focal length of 200 mm.

[0014] Optionally, the edge or outer frame of the tenth mirror serves as an aperture stop.

[0015] According to another aspect of the present invention, there is also provided a microscope comprising any one of the above-mentioned infinity-corrected microscope objective lenses.

[0016] The infinity-corrected microscope objective lens of the present invention optimizes the effective aperture at infinity while improving the field of view, which can greatly reduce vignetting and improve imaging effects. It has high resolution at large fields of view and is a completely independent design, solving the problem that existing 5x objective lenses cannot meet many usage requirements in optical detection.

[0017] Furthermore, the infinity-corrected microscope objective lens of the present invention, by setting the specific parameters and structures of each lens, makes the magnification of the infinity-corrected microscope objective lens be 5 times, the object field of view be 8 mm, and have a field of view higher than that of a conventional 5x microscope objective lens. It can be used with a tube lens with a focal length of 200 mm, and the working distance is 30.12 mm, which is larger than that of a conventional objective lens. The corresponding numerical aperture is 0.12, which can improve the object field of view and working distance of the infinity-corrected microscope objective lens, thereby improving the overall performance of the microscope.

[0018] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0020] Figure 1 is a schematic structural diagram of an infinity-corrected microscope objective according to one embodiment of the present invention;

[0021] Figure 2 is a spot diagram of different fields of view of an infinity-corrected microscope objective according to one embodiment of the present invention; and

[0022] Figure 3 FIG. 4 is a graph showing a modulation transfer function of an infinity-corrected microscope objective according to an embodiment of the present invention. DETAILED DESCRIPTION

[0023] This embodiment provides an infinity-corrected microscope objective lens, which can effectively reduce the vignetting of the infinity-corrected microscope objective lens and improve the imaging effect. Figure 1 FIG. 1 is a schematic diagram of the structure of an infinity-corrected microscope objective lens according to an embodiment of the present invention. Figure 1 As shown, the microscope objective lens of this embodiment includes: a first lens L1, a first lens group G1, a second lens group G2 and a sixth lens L6, which are arranged on the same optical axis from the object side to the image side.

[0024] The first lens L1 has a concave surface facing both the object and image sides; the sixth lens L6 has a convex surface facing both the object and image sides. The first lens group G1 and the second lens group G2 each include at least two lenses, with at least two lenses in each lens group having different refractive indices. The first lens group G1 has a convex surface facing both the object and image sides; the second lens group G2 has a convex surface facing both the object and image sides, and a flat surface facing the image side.

[0025] In a specific embodiment, the first lens L1 is a biconcave negative lens; the sixth lens L6 is a negative meniscus lens. A negative meniscus lens is a lens composed of two surfaces with similar radii of curvature and has a negative focal length. Negative meniscus lenses are typically used for applications such as beam expansion, increasing focal length, and reducing numerical aperture. When expanding or diverging collimated light, the light beam can be incident on the convex surface of the negative meniscus lens, thereby reducing spherical aberration. When used for converging light, the light beam can be incident on the concave surface.

[0026] The first lens group G1 is a cemented doublet, consisting of the second lens L2 and the third lens L3, starting from the object side. The second lens L2 is a negative meniscus lens with a convex surface facing the object and a concave surface facing the image side. The third lens L3 is a biconvex positive lens with a convex surface facing the object and a convex surface facing the image side. The second lens group G2 is a cemented doublet, consisting of the fourth lens L4 and the fifth lens L5, starting from the object side. The fourth lens L4 is a biconvex positive lens with a convex surface facing the object and a convex surface facing the image side. The fifth lens L5 is a plano-concave negative lens with a concave surface facing the object and a planar surface facing the image side.

[0027] In a preferred embodiment, the specific materials of the first lens L1 through the sixth lens L6 can be found in Table 1. As shown in Table 1, the first lens L1 is made of H-TF5. The second lens L2 is made of D-ZK3. The third lens L3 is made of H-ZPK7. The fourth lens L4 is made of H-ZPK7. The fifth lens L5 is made of H-LAK7A. The sixth lens L6 is made of H-ZF13.

[0028] In summary, all lenses used in the infinity-corrected microscope objective of this embodiment are made of optical glass, with only variations in composition. The curvature radius of any lens surface is not hyperhemispherical, and no aspheric surfaces are used, making it extremely easy to manufacture, effectively reducing manufacturing difficulty and improving both efficiency and quality.

[0029] Table 1

[0030] Lens name Material First lens L1 H-TF5 Second lens L2 D-ZK3 The third lens L3 H-ZPK7 Fourth lens L4 H-ZPK7 Fifth lens L5 H-LAK7A Sixth lens L6 H-ZF13

[0031] In a specific embodiment, the object-facing surface of the first lens L1 is a first surface S1, and the image-facing surface of the first lens L1 is a second surface S2. The object-facing surface of the second lens L2 is a third surface S3, the cemented surface of the second lens L2 and the third lens L3 is a fourth surface S4, and the image-facing surface of the third lens L3 is a fifth surface S5. The object-facing surface of the fourth lens L4 is a sixth surface S6, the cemented surface of the fourth lens L4 and the fifth lens L5 is a seventh surface S7, and the image-facing surface of the fifth lens L5 is an eighth surface S8. The object-facing surface of the sixth lens L6 is a ninth surface S9, and the image-facing surface of the sixth lens L6 is a tenth surface S10.

[0032] Furthermore, the curvature radii of the first, fifth, and seventh mirror surfaces S1, S5, and S7 are negative numbers, while the curvature radii of the second, third, fourth, sixth, ninth, and tenth mirror surfaces S10 are positive numbers. Since the eighth mirror surface S8 is a plane, its curvature radius is infinite.

[0033] In a preferred embodiment, the specific values ​​of the curvature radius, clear aperture, and mirror distance between two adjacent mirrors of the first to tenth mirrors S1 to S10 can be referred to in Table 2. As shown in Table 2, the curvature radius of the first mirror S1 is -161.28 to -161.26 mm, the clear aperture is 4.2 mm, and the mirror distance between the first mirror S1 and the second mirror S2 is 1.19 to 1.23 mm. The curvature radius of the second mirror S2 is 17.68 to 17.7 mm, the clear aperture is 4.34 mm, and the mirror distance between the second mirror S2 and the third mirror S3 is 5.78 to 5.82 mm. The curvature radius of the third mirror S3 is 23.21 to 23.23 mm, the clear aperture is 6.37 mm, and the mirror distance between the third mirror S3 and the fourth mirror S4 is 9.86 to 9.9 mm.

[0034] The fourth mirror surface S4 has a radius of curvature of 19.96 to 19.98 mm, a clear aperture of 7.2 mm, and a mirror distance between the fourth mirror surface S4 and the fifth mirror surface S5 of 6.8 to 6.84 mm. The fifth mirror surface S5 has a radius of curvature of -21.77 to -21.75 mm, a clear aperture of 7.56 mm, and a mirror distance between the fifth mirror surface S5 and the sixth mirror surface S6 of 1.03 to 1.07 mm. The sixth mirror surface S6 has a radius of curvature of 70.36 to 70.38 mm, a clear aperture of 7.34 mm, and a mirror distance between the sixth mirror surface S6 and the seventh mirror surface S7 of 5.84 to 5.88 mm.

[0035] The seventh mirror S7 has a radius of curvature of -12.51 to -12.49 mm, a clear aperture of 7.06 mm, and a mirror distance between the seventh mirror S7 and the eighth mirror S8 of 11.95 to 11.99 mm. The eighth mirror S8 has an infinite radius of curvature, a clear aperture of 6.82 mm, and a mirror distance between the eighth mirror S8 and the ninth mirror S9 of 15.07 to 15.11 mm. The ninth mirror S9 has a radius of curvature of 25.22 to 25.24 mm, a clear aperture of 6.34 mm, and a mirror distance between the ninth mirror S9 and the tenth mirror S10 of 11.29 to 11.33 mm. The tenth mirror S10 has a radius of curvature of 18.51 to 18.53 mm, and a clear aperture of 4.85 mm.

[0036] Table 2

[0037]

[0038]

[0039] By setting the specific parameters and structures of each lens in Tables 1 and 2 above, the magnification of the infinity-corrected microscope objective can be set to 5 times, and the object field of view can be set to 8 mm, which has a higher field of view than a conventional 5x microscope objective. It can be used with a tube lens with a focal length of 200 mm, and the working distance is 30.12 mm, which is larger than that of a conventional objective. The corresponding numerical aperture is 0.12, which can increase the object field of view and working distance of the infinity-corrected microscope objective, thereby improving the overall performance of the microscope.

[0040] In addition, while improving the field of view of the infinity-corrected microscope objective, the effective aperture at infinity has been optimized, which can greatly reduce vignetting and improve imaging effects; the resolution is high at a large field of view, and at an 8mm field of view, the MTF value is still close to that of an ideal lens; and it is fully independently designed, solving the problem that the existing 5x objective cannot meet many usage requirements in optical detection.

[0041] In a preferred embodiment, the edge or outer frame of the tenth mirror surface S10 can serve as an aperture stop. The aperture stop serves to limit the aperture through which the light beam passes. Furthermore, it should be noted that the mirror distance from the object plane to the first mirror surface S1 can be 30.12 mm. The mirror distance between the tenth mirror surface S10 and the image plane is infinite.

[0042] Figure 2 1 is a point diagram of different fields of view of an infinity-corrected microscope objective according to one embodiment of the present invention. Figure 2 The focusing conditions of light with wavelengths of 0.486133, 0.587562, 0.656273, and 0.42 at different object plane fields of view are shown. The object plane field of view of field (1) is 8mm, the object plane field of view of field (2) is 4mm, and the object plane half field of view of field (3) is 0mm. The test data are as follows: the RMS radius (root mean square) when the field of view is (1) is 1.773μm, and the GEO radius (maximum) is 11.796μm; the RMS radius when the field of view is (2) is 0.722μm, and the GEO radius is 2.674μm; the RMS radius when the field of view is (3) is 0.180μm, and the GEO radius is 0.421μm.

[0043] Among them, RMS radius is also called root mean square spot radius, which is an indicator used to describe the size of the beam. It is the spot radius obtained by taking the square root of the quadratic average of the light intensity distribution. GEO radius (Geometric Optical Radius) represents the radius of the smallest center circle that contains all light rays. Specifically, GEO radius is the radius of the smallest center circle that can satisfy all light rays falling within its range. Figure 2It can be seen that the focused spots of light of different wavelengths in different fields of view are all within a small range, indicating that the infinity-corrected microscope objective lens of this embodiment has an excellent focusing effect. It can be seen that the aberration of the infinity-corrected microscope objective lens of this embodiment is well controlled.

[0044] Figure 3 FIG. 4 is a graph showing a modulation transfer function of an infinity-corrected microscope objective according to an embodiment of the present invention. Figure 3 The vertical axis is the modulus of the normalized transfer function, and the horizontal axis is the spatial frequency, in units of lp / mm. The outermost line is the transfer function curve of the system under the diffraction limit. Figure 3 As shown, for the infinity-corrected microscope objective of this embodiment, when the object plane field of view is 8 mm, 6 mm, and 0 mm, the transfer function curves of light of different wavelengths in the meridian plane and the sagittal plane show that the on-axis field of view transfer function curve and the off-axis field of view transfer function curve are both close to the diffraction limit, indicating that the imaging contrast of the optical system across the entire field of view is very high and the image layering is clear.

[0045] This embodiment also provides a microscope comprising the infinity-corrected microscope objective lens of any of the above-described embodiments. In a specific embodiment, by configuring the specific parameters and structures of each lens, the infinity-corrected microscope objective lens can have a magnification of 5x and an object field of view of 8 mm, which is greater than that of a conventional 5x microscope objective lens. It can be used with a 200mm focal length tube lens, with a working distance of 30.12 mm, which is greater than that of a conventional objective lens. The corresponding numerical aperture is 0.12, which can increase the object field of view and working distance of the infinity-corrected microscope objective lens, thereby improving the overall performance of the microscope.

[0046] In addition, while improving the field of view of the infinity-corrected microscope objective, the effective aperture at infinity has been optimized, which can greatly reduce vignetting and improve imaging effects; the resolution is high at a large field of view, and at an 8mm field of view, the MTF value is still close to that of an ideal lens; and it is fully independently designed, solving the problem that the existing 5x objective cannot meet many usage requirements in optical detection.

[0047] Those skilled in the art should understand that, unless otherwise specified, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential", "clockwise", "counterclockwise", etc. in the embodiments of the present invention used to indicate orientation or positional relationships are merely for the convenience of describing and understanding the technical solutions of the present invention, and do not indicate or imply that the device or component referred to must have a specific orientation, and therefore should not be understood as limiting the present invention.

[0048] The terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the definition of "first", "second", etc. can explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or more of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0049] Unless otherwise expressly specified or limited, the terms "mounted," "connected," "connect," "fixed," and the like should be interpreted broadly. For example, they may refer to fixed or detachable connections, or integration; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components, unless otherwise expressly limited. A person of ordinary skill in the art should be able to understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0050] In addition, in the description of this embodiment, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact via another feature between them. That is, in the description of this embodiment, the first feature being "above," "above," and "above" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "below," "below," or "below" the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0051] In the description of the present embodiment, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "example," "specific example," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in any one or more embodiments or examples.

[0052] At this point, those skilled in the art will recognize that, although a number of exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications consistent with the principles of the present invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims

1. An infinity-corrected microscope objective lens, characterized in that: include: A first lens, a first lens group, a second lens group, and a sixth lens are sequentially arranged on the same optical axis from the object side to the image side; The first lens has a concave surface facing the object side and a concave surface facing the image side; The sixth lens has a convex surface facing the object side and a concave surface facing the image side; The first lens group and the second lens group each include at least two lenses, and the refractive index of at least two lenses in each lens group is different; The first lens group has a convex surface facing the object side and a convex surface facing the image side; The second lens group has a convex surface facing the object side and a flat surface facing the image side; Furthermore, there are 6 lenses with optical power; The first lens group is a doublet lens, including a second lens and a third lens starting from the object side; The second lens group is a doublet lens, including a fourth lens and a fifth lens starting from the object side; The first lens, the second lens, the fifth lens, and the sixth lens are negative lenses; The third lens and the fourth lens are positive lenses; The infinity-corrected microscope objective lens has a magnification of 5 times, an object field of view of 8 mm, and a numerical aperture of 0.

12.

2. The infinity-corrected microscope objective lens according to claim 1, wherein: The first lens is a double concave negative lens; the sixth lens is a negative meniscus lens; The second lens is a negative meniscus lens, whose surface facing the object side is convex and whose surface facing the image side is concave; the third lens is a biconvex positive lens, whose surface facing the object side is convex and whose surface facing the image side is convex; The fourth lens is a biconvex positive lens, with a convex surface facing the object side and a convex surface facing the image side; the fifth lens is a plano-concave negative lens, with a concave surface facing the object side and a flat surface facing the image side.

3. The infinity-corrected microscope objective according to claim 2, wherein: The first lens is made of H-TF5 material; The second lens is made of D-ZK3 material; The third lens is made of H-ZPK7 material; The fourth lens is made of H-ZPK7 material; The fifth lens is made of H-LAK7A material; The sixth lens is made of H-ZF13 material.

4. The infinity-corrected microscope objective lens according to claim 3, wherein: The surface of the first lens facing the object side is a first mirror surface, and the surface of the first lens facing the image side is a second mirror surface; The surface of the second lens facing the object side is the third mirror surface, the cemented surface of the second lens and the third lens is the fourth mirror surface, and the surface of the third lens facing the image side is the fifth mirror surface; The surface of the fourth lens facing the object side is the sixth mirror surface, the cemented surface of the fourth lens and the fifth lens is the seventh mirror surface, and the surface of the fifth lens facing the image side is the eighth mirror surface; The surface of the sixth lens facing the object side is the ninth mirror surface, and the surface of the sixth lens facing the image side is the tenth mirror surface. The curvature radii of the first mirror surface, the fifth mirror surface, and the seventh mirror surface are negative numbers; the curvature radii of the second mirror surface, the third mirror surface, the fourth mirror surface, the sixth mirror surface, the ninth mirror surface, and the tenth mirror surface are positive numbers; and the curvature radius of the eighth mirror surface is infinite.

5. The infinity-corrected microscope objective according to claim 4, wherein: The curvature radius of the first mirror surface is -161.28 to -161.26 mm; The curvature radius of the second mirror surface is 17.68 to 17.7 mm; The curvature radius of the third mirror surface is 23.21 to 23.23 mm; The curvature radius of the fourth mirror surface is 19.96 to 19.98 mm; The curvature radius of the fifth mirror surface is -21.77 to -21.75 mm; The curvature radius of the sixth mirror surface is 70.36 to 70.38 mm; The curvature radius of the seventh mirror surface is -12.51 to -12.49 mm; The curvature radius of the ninth mirror surface is 25.22 to 25.24 mm; The curvature radius of the tenth mirror surface is 18.51 to 18.53 mm.

6. The infinity-corrected microscope objective according to claim 5, wherein: The clear aperture of the first mirror is 4.2 mm; The clear aperture of the second mirror is 4.34 mm; The clear aperture of the third mirror is 6.37 mm; The clear aperture of the fourth mirror is 7.2 mm; The clear aperture of the fifth mirror is 7.56 mm; The clear aperture of the sixth mirror is 7.34 mm; The clear aperture of the seventh mirror is 7.06 mm; The clear aperture of the eighth mirror is 6.82 mm; The clear aperture of the ninth mirror is 6.34 mm; The light aperture of the tenth mirror surface is 4.85 mm.

7. The infinity-corrected microscope objective according to claim 6, wherein: The mirror distance between the first mirror surface and the second mirror surface is 1.19 to 1.23 mm; The mirror distance between the second mirror surface and the third mirror surface is 5.78 to 5.82 mm; The mirror distance between the third mirror surface and the fourth mirror surface is 9.86 to 9.9 mm; The mirror distance between the fourth mirror surface and the fifth mirror surface is 6.8 to 6.84 mm; The mirror distance between the fifth mirror surface and the sixth mirror surface is 1.03 to 1.07 mm; The mirror distance between the sixth mirror surface and the seventh mirror surface is 5.84 to 5.88 mm; The mirror distance between the seventh mirror surface and the eighth mirror surface is 11.95 to 11.99 mm; The mirror distance between the eighth mirror surface and the ninth mirror surface is 15.07 to 15.11 mm; The mirror distance between the ninth mirror surface and the tenth mirror surface is 11.29 to 11.33 mm.

8. The infinity-corrected microscope objective according to claim 7, wherein: The focal length of the tube lens that can be used with the infinity-corrected microscope objective is 200 mm.

9. The infinity-corrected microscope objective according to claim 4, wherein: The edge or outer frame of the tenth mirror serves as an aperture stop.

10. A microscope comprising the infinity-corrected microscope objective according to any one of claims 1 to 9.

Images