Crack detection device, method, storage medium and system

Abstract

The invention discloses a crack detection device, method, storage medium and system, and relates to the technical field of diamond damage detection.The crack detection device comprises a machine table, and the upper end of the machine table is fixedly connected with an equipment mounting table; the main tower module is arranged at the upper end of the equipment mounting table; the diamond clamping modules are fixedly mounted at the lower end of the main tower module; the surface film pasting module is fixedly mounted on the left side of the upper end of the equipment mounting table; the surface crack detection module is fixedly mounted on the left side of the upper end of the equipment mounting table; the ultrasonic detection module is fixedly mounted on the right side of the upper end of the equipment mounting table. According to the scheme, based on image detection and ultrasonic vibration detection technologies, integrated automatic detection of surface crack detection and internal crack detection of the CVD diamond wafer is carried out by utilizing the main tower rotating mechanism, so that the detection process can be effectively shortened, and the crack detection efficiency of the CVD diamond wafer is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of diamond damage detection, and in particular to a crack detection device, method, storage medium and system. Background Art

[0002] CVD diamond is a mixture of carbon-containing gas and oxygen that is excited and decomposed at high temperature and pressure below standard atmospheric pressure to form active diamond carbon atoms, which are deposited and grown on the substrate to form polycrystalline diamond. CVD diamond components are substitutes for semiconductor components. Cracks are random, large-scale and deep-impact defects. Once cracks occur, the diamond substrate and even the subsequent manufactured chips will have the risk of fragmentation, which will cause huge waste. Therefore, it is necessary to detect cracks in diamond sheets before production.

[0003] The existing crack detection for CVD diamond sheets mainly includes surface crack detection and internal crack detection. The two existing detection processes are respectively set up at different detection stations. The detection process is long and relies on manual work, with a low degree of automation. In addition, manual defect detection has the problems of excessive labor intensity, low work efficiency and low detection accuracy. Based on this, this scheme proposes a crack detection device, method, storage medium and system. Summary of the invention

[0004] In order to solve the above technical problems, a crack detection device, method, storage medium and system are provided. The technical solution realizes integrated automated detection of surface crack detection and internal crack detection of CVD diamond sheets, greatly shortens the detection process of CVD diamond sheet cracks, effectively shortens the detection time of CVD diamond sheet cracks, and effectively improves the detection efficiency.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is:

[0006] A crack detection device, comprising:

[0007] A machine platform, wherein a plurality of foot cups are installed at the lower end of the machine platform, and an equipment mounting platform is fixedly connected to the upper end of the machine platform;

[0008] A main tower module, a support frame is symmetrically fixedly installed in the middle of the upper end of the equipment installation platform, the upper end of the support frame is fixedly connected to the main tower connecting seat, and the main tower module is fixedly installed on the inner side of the main tower connecting seat;

[0009] A plurality of diamond clamping modules, wherein a plurality of the diamond clamping modules are fixedly installed at the lower end of the main tower module in a circular array;

[0010] A surface film pasting module, the surface film pasting module is fixedly installed on the left side of the upper end of the equipment installation platform, the surface film pasting module includes a diamond transverse movement component and a film pressing and pasting component, the film pressing and pasting component is arranged in the middle of the diamond transverse movement component, the diamond transverse movement component is used to carry the movement of the diamond to be detected, the film pressing and pasting component includes a film pressing lifting frame symmetrically arranged on both sides of the middle of the diamond transverse movement component, the inner side of the film pressing lifting frame is slidably connected with a film pressing lifting seat, a film pressing roller is installed at the lower end of the inner middle part of the film pressing lifting seat, and a feeding roller and a take-up roller are symmetrically installed at the upper ends of the left and right sides of the inner side of the film pressing lifting seat, and a pressure-sensitive film strip is arranged around the peripheral surfaces of the feeding roller, the film pressing roller and the take-up roller, and a plurality of crack detection films are arranged on the inner side of the pressure-sensitive film strip;

[0011] A surface crack detection module, the surface crack detection module comprising a crack detection camera, the crack detection camera being fixedly mounted on the left side of the upper end of the equipment mounting platform through a camera mounting seat;

[0012] An ultrasonic detection module is fixedly mounted on the right side of the upper end of the equipment mounting platform. The ultrasonic detection module includes a vibration generating component and a vibration measuring component. The vibration measuring component is arranged on the front side of the vibration generating component. The vibration generating component is used to apply a vibration signal to the diamond to be detected. The vibration measuring component is used to detect the vibration response signal of the diamond to be detected.

[0013] Preferably, a film pressing lifting screw is rotatably connected inside the left film pressing lifting frame, a film pressing lifting motor is fixedly connected to the upper end of the film pressing lifting frame, the output end of the film pressing lifting motor is fixedly connected to the film pressing lifting screw, and the rear side of the film pressing lifting seat extends to the interior of the film pressing lifting frame and is threadedly connected to the film pressing lifting screw.

[0014] Preferably, the diamond transverse movement assembly comprises a mounting base, the upper end of the mounting base is fixedly connected to a transverse movement base plate, the upper ends of the transverse movement base plate are fixedly installed with slide rails, both ends of the slide rails are provided with limit stops, the upper ends of the slide rails are slidably connected to a slider, the upper end of the slider is fixedly installed with a sliding mounting plate, the middle part of the upper end of the sliding mounting plate is fixedly connected to a diamond positioning fixture, and the diamond positioning fixture is used to position and carry the diamond to be tested;

[0015] The upper inner end of the mounting base is rotatably connected to a transverse screw rod, the lower end of the sliding mounting plate is threadedly connected to the transverse screw rod, and a transverse drive motor is fixedly installed at the lower inner end of the mounting base on the left side, and the transverse drive motor is transmission-connected to the transverse screw rod through a transmission pulley.

[0016] Preferably, the diamond clamping module comprises a telescopic cylinder, which is fixedly mounted on the lower end of the main tower module, the output end of the telescopic cylinder is fixedly connected to a clamping plate base, the upper end of the clamping plate base is fixedly connected to a sliding block, a sliding groove is provided at a position corresponding to the lower end of the main tower module and the diamond clamping module, and the sliding block is slidably connected inside the sliding groove;

[0017] A splint mounting groove is provided on the front side of the splint base, and splints are symmetrically slidably connected on both sides of the splint mounting groove, and a double-headed screw is rotatably connected to the inner side of the splint mounting groove. The threads at both ends of the double-headed screw rotate in opposite directions, and the rear ends of the splints on both sides are respectively threadedly connected to the two ends of the double-headed screw. A clamping motor is fixedly installed on the left side of the splint base, and the output end of the clamping motor is fixedly connected to the double-headed screw;

[0018] A diamond chuck is rotatably installed on the inner side of the front end of the splint, a diamond flip motor is fixedly installed on the outer side of the front end of the right splint, the output end of the diamond flip motor is fixedly connected to the diamond chuck on the right side, a splint guide rod is fixedly installed on the middle part of the right splint by bolts, the splint guide rod extends to the left side of the left splint and is slidably connected to the left splint.

[0019] Preferably, the vibration generating assembly comprises a mounting seat, a vibration isolation base is fixedly mounted on the rear side of the upper end of the mounting seat, and a plurality of piezoelectric vibration rods are fixedly mounted on the front end of the vibration isolation base;

[0020] The front end of the mounting seat is fixedly connected to a clamping guide rod, the upper end of the clamping guide rod is fixedly connected to a limit baffle, the middle of the clamping guide rod is slidably connected to a clamping block, and the middle of the lower end of the clamping block is provided with a clamping groove;

[0021] A clamping screw is rotatably connected to the right side of the lower end of the limit baffle, the right side of the pressure block is threadedly connected to the clamping screw, a clamping motor is fixedly installed on the right side of the upper end of the limit baffle, and the output end of the clamping motor is fixedly connected to the clamping screw.

[0022] Preferably, the vibration measuring assembly comprises a detection lifting frame, a detection lifting slide is slidably connected to the middle of the detection lifting frame, a vibration meter is fixedly installed at the front end of the detection lifting slide through a connecting piece, and a vibration measuring probe is arranged at the lower end of the vibration meter;

[0023] The detection lifting frame is rotatably connected with a detection lifting screw rod inside, the rear end of the detection lifting slide extends into the detection lifting frame and is threadedly connected with the detection lifting screw rod, the upper end of the detection lifting frame is fixedly installed with a detection lifting motor, and the output end of the detection lifting motor is fixedly connected with the detection lifting screw rod.

[0024] Furthermore, a crack detection method is proposed, which is applicable to the above-mentioned diamond sheet crack detection device, and is characterized in that it comprises the following steps:

[0025] Crack detection film lamination, the diamond to be detected is set on the upper end of the diamond positioning fixture, then the film pressing lifting seat is lifted to the film lamination height, the sliding mounting plate is driven by the lateral driving motor to move to the film lamination position, then the lateral driving motor drives the sliding mounting plate to move forward, the belt-taking roller drives the pressure-sensitive film material belt to move, the crack detection film is lamination to the surface of the diamond to be detected by the film pressing roller, then it moves to the front side of the mounting base, the diamond to be detected is clamped by the diamond clamping module and turned over, and then the diamond to be detected is reset on the upper end of the diamond positioning fixture, and the above film lamination process is repeated to perform crack detection film lamination on both sides of the diamond to be detected;

[0026] Surface crack detection: the diamond to be detected that has been laminated with crack detection film is clamped by the diamond clamping module, and moved to the upper end of the surface crack detection module through the main tower module. The crack detection camera collects images of the upper and lower ends of the diamond to be detected, and the surface crack data of the diamond to be detected is obtained based on the color difference in the image. If there is no crack on the surface of the diamond to be detected, the next detection process is carried out. If there is a crack on the surface of the diamond to be detected, it is output to the NG area;

[0027] Ultrasonic testing, the diamond to be tested for surface crack detection is clamped by the diamond clamping module, and moved to the vibration generating component area through the main tower module. The diamond clamping module extends out, and the rear side of the diamond to be tested is abutted against the front side of the piezoelectric vibration rod. Then the clamping motor drives the pressure block to move downward, so that the pressure groove presses the rear end of the diamond to be tested, and the front end of the diamond to be tested is suspended. At the same time, the diamond clamping module releases the diamond to be tested and retracts. Then the detection lifting motor drives the vibration meter to move downward, so that the vibration measuring probe abuts against the suspended area of ​​the front end of the diamond to be tested. Then, a white noise vibration signal is output to the diamond to be tested through the piezoelectric vibration rod, and the vibration response signal of the diamond to be tested is collected by the vibration meter. Then, the diamond clamping module clamps the diamond to be tested and flips it, and then the above steps are repeated to obtain the internal crack data of the diamond to be tested. If there is a crack inside the diamond to be tested, it is output to the NG area. If there is no crack inside the diamond to be tested, it is output to the OK area.

[0028] Optionally, the ultrasonic detection further comprises the following steps:

[0029] Standard response signal acquisition: multiple crack-free diamond sheets are tested according to ultrasonic testing steps to obtain standard response signals;

[0030] Signal comparison: compare the vibration response signal of the diamond to be tested with the standard response signal to obtain the internal crack information of the diamond to be tested.

[0031] Furthermore, a storage medium is proposed, characterized in that the above-mentioned CVD diamond slice crack detection method is stored therein.

[0032] Furthermore, a crack detection system is proposed, characterized in that it includes the diamond sheet crack detection device as described above and the storage medium as described above.

[0033] Compared with the prior art, the present invention has the following beneficial effects:

[0034] The present invention is based on image detection and ultrasonic vibration detection technology, and utilizes a main tower rotating mechanism to perform integrated automated detection of surface crack detection and internal crack detection of CVD diamond sheets. The main tower rotating mechanism can effectively shorten the transportation time of CVD diamond sheets between various detection stations. When in use, the main tower rotating mechanism drives the CVD diamond sheets to perform surface crack image detection and internal crack ultrasonic vibration detection in sequence, which can effectively shorten the detection process, improve the crack detection efficiency of the CVD diamond sheets, and reduce the probability of false detection in manual detection, thereby greatly improving the crack detection accuracy of the CVD diamond sheets. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0036] Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention from another viewing angle;

[0037] Figure 3 for Figure 2 A local enlarged schematic diagram of the middle A;

[0038] Figure 4 It is a schematic diagram of the three-dimensional structure of the diamond clamping module in the present invention;

[0039] Figure 5 It is a schematic diagram of the three-dimensional structure of the diamond clamping module in the present invention from another perspective;

[0040] Figure 6 It is a schematic diagram of the three-dimensional structure of the surface film module of the present invention;

[0041] Figure 7 It is a schematic diagram of the three-dimensional structure of the diamond traverse assembly in the present invention;

[0042] Figure 8 It is a schematic diagram of the three-dimensional structure of the press film laminating assembly in the present invention;

[0043] Fig. 9 It is a cross-sectional view of the surface film module of the present invention;

[0044] Fig.10It is a schematic diagram of the three-dimensional structure of the ultrasonic detection module in the present invention;

[0045] Fig.11 It is a schematic diagram of the three-dimensional structure of the vibration generating component in the present invention;

[0046] Fig.12 It is a schematic diagram of the three-dimensional structure of the vibration measuring component in the present invention;

[0047] Fig.13 This is a flow chart of the crack detection method proposed in the present invention.

[0048] The numbers in the figure are:

[0049] 1. Machine; 101. Foot cup;

[0050] 2. Equipment installation platform;

[0051] 3. Support frame;

[0052] 4. Main tower connection seat;

[0053] 5. Main tower module; 501. Slide;

[0054] 6. Diamond clamping module; 601. Telescopic cylinder; 602. Clamping plate base; 6021. Sliding block; 6022. Clamping plate mounting slot; 603. Clamping plate; 604. Diamond chuck; 605. Diamond turning motor; 606. Clamping plate guide rod; 607. Double-headed screw; 608. Clamping motor;

[0055] 7. Diamond traverse assembly; 701. Mounting base; 702. Traverse substrate; 703. Slide rail; 704. Sliding block; 705. Sliding mounting plate; 706. Diamond positioning fixture; 707. Limit stopper; 708. Traverse screw rod; 709. Traverse drive motor; 710. Transmission pulley;

[0056] 8. Film lamination assembly; 801. Film lamination lifting frame; 802. Film lamination lifting seat; 803. Film lamination lifting screw rod; 804. Film lamination lifting motor; 805. Film lamination roller; 806. Take-up roller; 807. Feeding roller;

[0057] 9. Surface crack detection module;

[0058] 10. Vibration generating assembly; 1001. Mounting seat; 1002. Vibration isolation base; 1003. Piezoelectric vibration rod; 1004. Pressing guide rod; 1005. Limit baffle; 1006. Pressing block; 1007. Pressing groove; 1008. Pressing screw rod; 1009. Pressing motor;

[0059] 11. Vibration measuring assembly; 1101. Testing lifting frame; 1102. Testing lifting slide; 1103. Connecting piece; 1104. Vibrometer; 1105. Vibration measuring probe; 1106. Testing lifting screw rod; 1107. Testing lifting motor;

[0060] 12. Operation indicator light;

[0061] 13. Diamond to be tested;

[0062] 14. Pressure sensitive film strip; 1401. Crack detection film;

[0063] 15. Display. DETAILED DESCRIPTION

[0064] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0065] See also Figure 1-2 As shown, a crack detection device comprises:

[0066] Machine 1, a plurality of foot cups 101 are installed at the lower end of the machine 1, and an equipment mounting table 2 is fixedly connected to the upper end of the machine 1;

[0067] The main tower module 5 is symmetrically fixedly installed with a support frame 3 in the middle of the upper end of the equipment installation platform 2, and the upper end of the support frame 3 is fixedly connected with a main tower connecting seat 4. The main tower module 5 is fixedly installed on the inner side of the main tower connecting seat 4. An operation indicator light 12 is installed on one side of the upper end of the main tower connecting seat 4. The operation indicator light 12 is used to prompt the equipment operation status, and a display 15 is installed on the other side. The display 15 is used to display the diamond crack detection result. The main tower module 5 is a DD motor. The main tower module 5 drives the diamond clamping module 6 to rotate, so as to realize the driving of the diamond 13 to be detected between each station for transportation detection;

[0068] A plurality of diamond clamping modules 6, wherein the plurality of diamond clamping modules 6 are fixedly installed at the lower end of the main tower module 5 in a circular array;

[0069] Surface film module, the surface film module is fixedly installed on the left side of the upper end of the equipment installation platform 2, please refer to Figure 6 As shown, the surface film module includes a diamond traverse assembly 7 and a film pressing assembly 8. The film pressing assembly 8 is arranged in the middle of the diamond traverse assembly 7. The diamond traverse assembly 7 is used to carry the movement of the diamond 13 to be detected;

[0070] A surface crack detection module 9, which includes a crack detection camera, which is fixedly mounted on the left side of the upper end of the equipment mounting platform 2 through a camera mounting seat;

[0071] Ultrasonic detection module, the ultrasonic detection module is fixedly installed on the upper right side of the equipment installation platform 2, please refer to Fig.10 As shown, the ultrasonic detection module includes a vibration generating component 10 and a vibration measuring component 11. The vibration measuring component 11 is arranged on the front side of the vibration generating component 10. The vibration generating component 10 is used to apply a vibration signal to the diamond 13 to be detected, and the vibration measuring component 11 is used to detect the vibration response signal of the diamond 13 to be detected.

[0072] See also Figure 8 As shown, the film laminating assembly 8 includes a film laminating lifting frame 801 symmetrically arranged on both sides of the middle of the diamond traverse assembly 7, and a film laminating lifting seat 802 is slidably connected to the inner side of the film laminating lifting frame 801. A film laminating roller 805 is installed at the lower end of the inner middle part of the film laminating lifting seat 802, and a feed roller 807 and a take-up roller 806 are symmetrically installed at the upper ends of the left and right sides of the inner side of the film laminating lifting seat 802. The drive device of the take-up roller 806 is not shown in the figure. The feed roller 807, the film laminating roller 805 and the take-up roller 806 are symmetrically installed. The surface is surrounded by a pressure-sensitive film strip 14, and a plurality of crack detection films 1401 are arranged inside the pressure-sensitive film strip 14. When laminating, one end of the crack detection film 1401 is laminated with one end of the diamond 13 to be detected, and then the take-up roller 806 rotates to reel the pressure-sensitive film strip 14. At the same time, the diamond 13 to be detected moves forward to drive the crack detection film 1401 to move. Under the pressing of the film pressing roller 805, the crack detection film 1401 is separated from the pressure-sensitive film strip 14 and laminated to the surface of the diamond 13 to be detected.

[0073] The left film pressing lifting frame 801 is internally rotatably connected with a film pressing lifting screw 803, and the upper end of the film pressing lifting frame 801 is fixedly connected with a film pressing lifting motor 804, and the output end of the film pressing lifting motor 804 is fixedly connected to the film pressing lifting screw 803, and the rear side of the film pressing lifting seat 802 extends to the inside of the film pressing lifting frame 801 and is threadedly connected to the film pressing lifting screw 803. The film pressing lifting motor 804 drives the film pressing lifting screw 803 to rotate, and the film pressing lifting seat 802 can be driven to rise and fall, thereby realizing the height adjustment of the feeding roller 807, the film pressing roller 805 and the belt taking-up roller 806, so as to achieve the bonding requirement of the crack detection film 1401 to the diamond 13 to be detected.

[0074] See also Figure 7As shown, the diamond transverse movement assembly 7 includes a mounting base 701, a transverse movement substrate 702 is fixedly connected to the upper end of the mounting base 701, slide rails 703 are fixedly installed on both sides of the upper end of the transverse movement substrate 702, and limited stoppers 707 are arranged at both ends of the slide rails 703, a slider 704 is slidably connected to the upper end of the slide rail 703, a sliding mounting plate 705 is fixedly installed on the upper end of the slider 704, a diamond positioning fixture 706 is fixedly connected to the middle part of the upper end of the sliding mounting plate 705, and the diamond positioning fixture 706 is used for positioning and carrying the diamond 13 to be detected, and a U-shaped positioning groove adapted to the diamond 13 to be detected is opened on the upper end of the diamond positioning fixture 706, and the diamond 13 to be detected is arranged inside the U-shaped positioning groove;

[0075] The upper inner end of the mounting base 701 is rotatably connected with a transverse screw rod 708, and the lower end of the sliding mounting plate 705 is threadedly connected to the transverse screw rod 708. A transverse driving motor 709 is fixedly installed at the lower inner end of the left mounting base 701. The transverse driving motor 709 is connected to the transverse screw rod 708 through a transmission pulley 710. The transverse driving motor 709 drives the transverse screw rod 708 to rotate, thereby realizing the transverse drive of the sliding mounting plate 705, and further driving the diamond 13 to be detected to fit the crack detection film 1401.

[0076] See also Figure 3-5 As shown, the diamond clamping module 6 includes a telescopic cylinder 601, which is fixedly installed at the lower end of the main tower module 5, and the output end of the telescopic cylinder 601 is fixedly connected with a clamping plate base 602, and the upper end of the clamping plate base 602 is fixedly connected with a sliding block 6021. A slide groove 501 is provided at the corresponding position of the lower end of the main tower module 5 and the diamond clamping module 6, and the sliding block 6021 is slidably connected to the inside of the slide groove 501. The telescopic cylinder 601 drives the clamping plate base 602 to slide in the slide groove 501, so that the expansion and contraction of the diamond clamping module 6 can be realized. When the diamond 13 to be detected is transported, the diamond clamping module 6 is retracted to ensure the stability of the transportation. When the diamond 13 to be detected is detected, the diamond clamping module 6 is extended to set the diamond 13 to be detected on the detection equipment;

[0077] A splint mounting groove 6022 is provided on the front side of the splint mounting groove 6022, and splints 603 are symmetrically slidably connected on both sides inside the splint mounting groove 6022, and a double-headed screw 607 is rotatably connected to the inner side of the splint mounting groove 6022, and the threads at both ends of the double-headed screw 607 rotate in opposite directions, and the rear ends of the splints 603 on both sides are respectively threadedly connected to the two ends of the double-headed screw 607, and a clamping motor 608 is fixedly installed on the left side of the splint base 602, and the output end of the clamping motor 608 is fixedly connected to the double-headed screw 607, and the clamping motor 608 drives the double-headed screw 607 to rotate, thereby making the splints 603 at both ends of the double-headed screw 607 move inward or outward synchronously, thereby achieving the clamping or release of the diamond 13 to be detected;

[0078] A diamond chuck 604 is rotatably installed on the inner side of the front end of the clamp 603, and a diamond flip motor 605 is fixedly installed on the outer side of the front end of the right clamp 603. The output end of the diamond flip motor 605 is fixedly connected to the right diamond chuck 604. A clamp guide rod 606 is fixedly installed on the middle part of the right clamp 603 by bolts. The clamp guide rod 606 extends to the left side of the left clamp 603 and is slidably connected to the left clamp 603. The rotatable clamp 603 is used to clamp the diamond 13 to be detected. When performing detection, the clamp 603 can be driven to rotate by the diamond flip motor 605, thereby realizing the flipping of the diamond 13 to be detected, and the diamond 13 to be detected can be double-sided detected, thereby realizing efficient crack detection of the diamond 13 to be detected.

[0079] See also Fig.11 As shown, the vibration generating assembly 10 includes a mounting seat 1001, a vibration isolation base 1002 is fixedly mounted on the rear side of the upper end of the mounting seat 1001, and a plurality of piezoelectric vibration rods 1003 are fixedly mounted on the front end of the vibration isolation base 1002. The piezoelectric vibration rods 1003 output white noise vibration signals to the diamond 13 to be detected, driving the diamond 13 to be detected to vibrate;

[0080] A clamping guide rod 1004 is fixedly connected to the front end of the mounting seat 1001, and a limiting baffle 1005 is fixedly connected to the upper end of the clamping guide rod 1004. A pressing block 1006 is slidably connected to the middle of the clamping guide rod 1004. A pressing groove 1007 is provided in the middle of the lower end of the pressing block 1006. A clamping screw 1008 is rotatably connected to the right side of the lower end of the limiting baffle 1005. The right side of the clamping block 1006 is threadedly connected to the clamping screw 1008. A clamping motor 1009 is fixedly installed on the right side of the upper end of the limiting baffle 1005. The output end of the clamping motor 1009 is fixedly connected to the clamping screw 1008. The clamping motor 1009 drives the clamping block 1006 to rise and fall, so that the pressing groove 1007 can precisely clamp the diamond 13 to be detected, thereby realizing the detection and fixation of the diamond.

[0081] See also Fig.12 As shown, the vibration measuring assembly 11 includes a detection lifting frame 1101, a detection lifting slide 1102 is slidably connected to the middle of the detection lifting frame 1101, a vibration meter 1104 is fixedly installed at the front end of the detection lifting slide 1102 through a connecting piece 1103, and a vibration measuring probe 1105 is arranged at the lower end of the vibration meter 1104. When vibration detection is performed, the vibration measuring probe 1105 abuts against the diamond 13 to be detected, and the vibration meter 1104 collects vibration response data of the diamond 13 to be detected through the vibration measuring probe 1105, thereby realizing the detection of cracks inside the diamond;

[0082] The detection lifting frame 1101 is internally rotatably connected with a detection lifting screw 1106, the rear end of the detection lifting slide 1102 extends into the detection lifting frame 1101 and is threadedly connected to the detection lifting screw 1106, and a detection lifting motor 1107 is fixedly installed on the upper end of the detection lifting frame 1101, and the output end of the detection lifting motor 1107 is fixedly connected to the detection lifting screw 1106, and the detection lifting motor 1107 drives the detection lifting screw 1106 to rotate, thereby driving the detection lifting slide 1102 to move up and down, thereby realizing the lifting and lowering of the vibration meter 1104.

[0083] See also Fig.13 As shown, further, the present invention also proposes a crack detection method, which is applicable to the above-mentioned diamond sheet crack detection device, and is characterized in that it comprises the following steps:

[0084] The crack detection film is laminated, the diamond 13 to be detected is set on the upper end of the diamond positioning fixture 706, and then the film pressing lifting seat 802 is lifted to the film sticking height, and the sliding mounting plate 705 is driven by the lateral driving motor 709 to move to the film sticking position, and then the lateral driving motor 709 drives the sliding mounting plate 705 to move forward, and the take-up roller 806 drives the pressure-sensitive film material strip 14 to move, and the crack detection film 1401 is laminated to the surface of the diamond 13 to be detected by the film pressing roller 805, and then moved to the mounting base 70 The diamond 13 to be detected is clamped by the diamond clamping module 6 on the front side and turned 180 degrees. The diamond 13 to be detected is reset on the upper end of the diamond positioning fixture 706, and the above film laminating process is repeated. The crack detection film 1401 is laminated on both sides of the diamond 13 to be detected. The crack detection film 1401 is a pressure-sensitive film. If the surface of the diamond 13 to be detected contains cracks, the crack detection film 1401 can display different colors through the laminating pressure difference at the crack on the surface of the diamond 13 to be detected during laminating;

[0085] Surface crack detection: the diamond 13 to be detected that has been bonded with the crack detection film 1401 is clamped by the diamond clamping module 6, and moved to the upper end of the surface crack detection module 9 through the main tower module 5. The images of the upper and lower ends of the diamond 13 to be detected are collected by the crack detection camera. The surface crack data of the diamond 13 to be detected can be obtained according to the color difference of the crack detection film 1401 in the image. If there is no crack on the surface of the diamond 13 to be detected, the next detection process is carried out. If there is a crack on the surface of the diamond 13 to be detected, it is output to the NG area;

[0086] Ultrasonic testing, the diamond 13 to be tested for surface crack detection is clamped by the diamond clamping module 6, and moved to the vibration generating component 10 area through the main tower module 5. The diamond clamping module 6 extends to abut the rear side of the diamond 13 to be tested against the front side of the piezoelectric vibration rod 1003, and then the clamping motor 1009 drives the pressing block 1006 to move downward, so that the pressing groove 1007 presses the rear end of the diamond 13 to be tested, and the front end of the diamond 13 to be tested is suspended in the air. At the same time, the diamond clamping module 6 releases the diamond 13 to be tested and retracts. Then the detection lifting motor 1107 drives the vibration meter 1104 to move downward, so that the vibration measuring probe 1105 is in contact with the suspended area of ​​the front end of the diamond 13 to be tested. The diamond 13 to be detected is abutted against the domain, and then a white noise vibration signal is output to the diamond 13 to be detected through the piezoelectric vibration rod 1003. The vibration response signal of the diamond 13 to be detected is collected by the vibration meter 1104. Then, the diamond clamping module 6 clamps the diamond 13 to be detected and flips it 180 degrees to repeat the above steps to obtain the internal crack data of the diamond 13 to be detected. If there is a crack inside the diamond 13 to be detected, it is output to the NG area. If there is no crack inside the diamond 13 to be detected, it is output to the OK area. The diamond 13 to be detected is flipped 180 degrees and then re-detected, which can effectively avoid the situation where cracks exist in the clamping part of the diamond 13 to be detected but are not detected.

[0087] Before the ultrasonic testing step, it is necessary to collect standard response signals, that is, to test multiple crack-free diamond sheets according to the ultrasonic testing step to obtain standard response signals;

[0088] Then, through signal comparison, if the diamond 13 to be detected contains cracks, its vibration response signal changes. By performing feature comparison between the vibration response signal of the diamond 13 to be detected and the standard response signal, the internal crack information of the diamond 13 to be detected can be obtained.

[0089] This solution is based on image detection and ultrasonic vibration detection technology, and uses the main tower rotation mechanism to perform integrated automated detection of surface crack detection and internal crack detection of CVD diamond sheets. It can effectively shorten the detection process, improve the efficiency of crack detection of CVD diamond sheets, and reduce the probability of false detection in manual detection, greatly improving the accuracy of crack detection of CVD diamond sheets.

[0090] Furthermore, the present solution proposes a storage medium which stores the above-mentioned CVD diamond slice crack detection method.

[0091] Furthermore, the present solution proposes a crack detection system, comprising the above-mentioned diamond sheet crack detection device and the above-mentioned storage medium.

[0092] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A crack detection device, characterized in that: include: A machine platform (1), wherein a plurality of foot cups (101) are installed at the lower end of the machine platform (1), and an equipment installation platform (2) is fixedly connected to the upper end of the machine platform (1); A main tower module (5), a support frame (3) is symmetrically fixedly installed in the middle of the upper end of the equipment installation platform (2), the upper end of the support frame (3) is fixedly connected to a main tower connecting seat (4), and the main tower module (5) is fixedly installed on the inner side of the main tower connecting seat (4); A plurality of diamond clamping modules (6), wherein the plurality of diamond clamping modules (6) are fixedly mounted at the lower end of the main tower module (5) in a ring array; A surface film module, the surface film module is fixedly installed on the left side of the upper end of the equipment installation platform (2), the surface film module includes a diamond transverse movement component (7) and a film pressing and bonding component (8), the film pressing and bonding component (8) is arranged in the middle of the diamond transverse movement component (7), the diamond transverse movement component (7) is used to carry the diamond (13) to be detected to move, the film pressing and bonding component (8) includes a film pressing lifting frame (801) symmetrically arranged on both sides of the middle of the diamond transverse movement component (7), and the film pressing lifting frame (801) is slidably connected to a film pressing lifting seat (802) on the inner side, a film pressing roller (805) is installed at the lower end of the inner middle part of the film pressing lifting seat (802), and a feeding roller (807) and a take-up roller (806) are symmetrically installed at the upper ends of the left and right sides of the inner side of the film pressing lifting seat (802), and a pressure-sensitive film strip (14) is arranged around the circumference of the feeding roller (807), the film pressing roller (805) and the take-up roller (806), and a plurality of crack detection films (1401) are arranged on the inner side of the pressure-sensitive film strip (14); A surface crack detection module (9), the surface crack detection module (9) comprising a crack detection camera, the crack detection camera being fixedly mounted on the left side of the upper end of the equipment mounting platform (2) via a camera mounting seat; An ultrasonic detection module is fixedly mounted on the upper right side of the equipment mounting platform (2), the ultrasonic detection module comprising a vibration generating component (10) and a vibration measuring component (11), the vibration measuring component (11) being arranged on the front side of the vibration generating component (10), the vibration generating component (10) being used to apply a vibration signal to the diamond (13) to be detected, and the vibration measuring component (11) being used to detect the vibration response signal of the diamond (13) to be detected.

2. A crack detection device according to claim 1, characterized in that: The film pressing lifting frame (801) on the left side is rotatably connected to a film pressing lifting screw (803) inside, and the upper end of the film pressing lifting frame (801) is fixedly connected to a film pressing lifting motor (804), and the output end of the film pressing lifting motor (804) is fixedly connected to the film pressing lifting screw (803), and the rear side of the film pressing lifting seat (802) extends to the inside of the film pressing lifting frame (801) and is threadedly connected to the film pressing lifting screw (803).

3. A crack detection device according to claim 1, characterized in that: The diamond transverse movement assembly (7) comprises a mounting base (701), the upper end of the mounting base (701) is fixedly connected to a transverse movement base plate (702), slide rails (703) are fixedly installed on both sides of the upper end of the transverse movement base plate (702), both ends of the slide rails (703) are provided with limit stops (707), the upper end of the slide rails (703) is slidably connected to a slider (704), the upper end of the slider (704) is fixedly installed with a sliding mounting plate (705), the middle part of the upper end of the sliding mounting plate (705) is fixedly connected to a diamond positioning fixture (706), and the diamond positioning fixture (706) is used for positioning and carrying the diamond (13) to be detected; The upper inner end of the mounting base (701) is rotatably connected to a transverse screw rod (708), the lower end of the sliding mounting plate (705) is threadedly connected to the transverse screw rod (708), and a transverse driving motor (709) is fixedly installed at the lower inner end of the mounting base (701) on the left side, and the transverse driving motor (709) is transmission-connected to the transverse screw rod (708) via a transmission pulley (710).

4. A crack detection device according to claim 1, characterized in that: The diamond clamping module (6) comprises a telescopic cylinder (601), the telescopic cylinder (601) is fixedly mounted on the lower end of the main tower module (5), the output end of the telescopic cylinder (601) is fixedly connected to a clamping plate base (602), the upper end of the clamping plate base (602) is fixedly connected to a sliding block (6021), a sliding groove (501) is provided at a position corresponding to the lower end of the main tower module (5) and the diamond clamping module (6), and the sliding block (6021) is slidably connected to the inside of the sliding groove (501); A splint mounting groove (6022) is provided on the front side of the splint base (602), and splints (603) are symmetrically slidably connected on both sides of the splint mounting groove (6022), and a double-headed screw (607) is rotatably connected to the inside of the splint mounting groove (6022), and the threads at both ends of the double-headed screw (607) are rotated in opposite directions, and the rear ends of the splints (603) on both sides are respectively threadedly connected to the two ends of the double-headed screw (607), and a clamping motor (608) is fixedly installed on the left side of the splint base (602), and the output end of the clamping motor (608) is fixedly connected to the double-headed screw (607); A diamond chuck (604) is rotatably mounted on the inner side of the front end of the splint (603); a diamond flip motor (605) is fixedly mounted on the outer side of the front end of the right splint (603); an output end of the diamond flip motor (605) is fixedly connected to the diamond chuck (604) on the right side; a splint guide rod (606) is fixedly mounted on the middle part of the right splint (603) by bolts; the splint guide rod (606) extends to the left side of the left splint (603) and is slidably connected to the left splint (603).

5. A crack detection device according to claim 1, characterized in that: The vibration generating assembly (10) comprises a mounting seat (1001), a vibration isolation base (1002) is fixedly mounted on the rear side of the upper end of the mounting seat (1001), and a plurality of piezoelectric vibration rods (1003) are fixedly mounted on the front end of the vibration isolation base (1002); The front end of the mounting seat (1001) is fixedly connected to a clamping guide rod (1004), the upper end of the clamping guide rod (1004) is fixedly connected to a limit baffle (1005), the middle of the clamping guide rod (1004) is slidably connected to a clamping block (1006), and the middle of the lower end of the clamping block (1006) is provided with a clamping groove (1007); The right side of the lower end of the limit baffle (1005) is rotatably connected to a clamping screw (1008), the right side of the pressure block (1006) is threadedly connected to the clamping screw (1008), and the right side of the upper end of the limit baffle (1005) is fixedly installed with a clamping motor (1009), and the output end of the clamping motor (1009) is fixedly connected to the clamping screw (1008).

6. A crack detection device according to claim 1, characterized in that: The vibration measuring assembly (11) comprises a detection lifting frame (1101), the middle part of which is slidably connected to a detection lifting slide (1102), a vibration meter (1104) is fixedly mounted on the front end of the detection lifting slide (1102) via a connecting piece (1103), and a vibration measuring probe (1105) is arranged at the lower end of the vibration meter (1104); The detection lifting frame (1101) is rotatably connected to a detection lifting screw rod (1106) inside, the rear end of the detection lifting slide (1102) extends into the detection lifting frame (1101) and is threadedly connected to the detection lifting screw rod (1106), and a detection lifting motor (1107) is fixedly installed on the upper end of the detection lifting frame (1101), and the output end of the detection lifting motor (1107) is fixedly connected to the detection lifting screw rod (1106).

7. A crack detection method, applicable to the diamond sheet crack detection device according to any one of claims 1 to 6, characterized in that: The steps include: The crack detection film is bonded, the diamond to be detected (13) is set on the upper end of the diamond positioning fixture (706), and then the film pressing lifting seat (802) is lifted and lowered to the film bonding height, and the sliding mounting plate (705) is driven by the transverse driving motor (709) to move to the film bonding position, and then the transverse driving motor (709) drives the sliding mounting plate (705) to move forward, and the belt take-up roller (806) drives the pressure-sensitive film material belt (14) to move, and the crack detection film (1401) is bonded to the surface of the diamond to be detected (13) through the film pressing roller (805), and then it moves to the front side of the mounting base (701) and the diamond clamping module (6) clamps the diamond to be detected (13) and turns it 180 degrees. The diamond to be detected (13) is then reset on the upper end of the diamond positioning fixture (706), and the above film bonding process is repeated to bond the crack detection film (1401) to both sides of the diamond to be detected (13); Surface crack detection, the diamond (13) to be detected that has been bonded with a crack detection film (1401) is clamped by a diamond clamping module (6), and moved to the upper end of a surface crack detection module (9) through a main tower module (5), and images of the upper and lower ends of the diamond (13) to be detected are collected by a crack detection camera, and surface crack data of the diamond (13) to be detected is obtained based on the color difference in the image. If there is no crack on the surface of the diamond (13) to be detected, the next detection process is carried out; if there is a crack on the surface of the diamond (13) to be detected, the data is output to an NG area; Ultrasonic testing, the diamond (13) to be tested for surface crack detection is clamped by the diamond clamping module (6), and moved to the vibration generating component (10) area through the main tower module (5), and the diamond clamping module (6) is extended to make the rear side of the diamond (13) to be tested abut against the front side of the piezoelectric vibration rod (1003), and then the pressing motor (1009) drives the pressing block (1006) to move downward, so that the pressing groove (1007) presses the rear end of the diamond (13) to be tested and the front end of the diamond (13) to be tested is suspended in the air, and at the same time, the diamond clamping module (6) releases the diamond (13) to be tested and retracts, and then the detection lifting motor (1107) drives the vibration measuring instrument ( 1104) is moved downward to make the vibration probe (1105) contact the suspended area at the front end of the diamond (13) to be detected, and then a white noise vibration signal is output to the diamond (13) to be detected through the piezoelectric vibration rod (1003), and the vibration response signal of the diamond (13) to be detected is collected by the vibration meter (1104), and then the diamond clamping module (6) clamps the diamond (13) to be detected and turns it 180 degrees, and then the above steps are repeated to obtain the internal crack data of the diamond (13) to be detected. If there is a crack inside the diamond (13) to be detected, it is output to the NG area, and if there is no crack inside the diamond (13) to be detected, it is output to the OK area.

8. A crack detection method according to claim 7, characterized in that: The ultrasonic detection also includes the following steps: Standard response signal acquisition: multiple crack-free diamond sheets are tested according to ultrasonic testing steps to obtain standard response signals; Signal comparison: feature comparison is performed between the vibration response signal of the diamond to be detected (13) and the standard response signal to obtain internal crack information of the diamond to be detected (13).

9. A computer-readable storage medium, characterized in that: A computer program is stored thereon, and the computer program executes the CVD diamond slice crack detection method as described in any one of claims 7-8.

10. A crack detection system, characterized in that: It comprises the diamond sheet crack detection device as described in any one of claims 1 to 6 and the storage medium as described in claim 9.

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