Drip-proof valve suitable for conveying semiconductor chemical liquid medicine

Abstract

The invention relates to a drip-proof valve suitable for semiconductor chemical liquid delivery, which comprises a valve body, a conduction control cavity is distributed in the valve body, an inflow mechanism and an outflow mechanism are distributed on two sides of the conduction control cavity on the valve body, an actuator main body is mounted at the upper end of the valve body, and an automatic back-suction lower actuator is mounted at the lower end of the valve body. Air source connectors are distributed on the side face of the actuator body. An upper execution body is installed at the upper end of the actuator body, a control shaft is installed in the actuator body, an upper diaphragm is installed on the combined end face of the actuator body and the valve body, and the upper end of the upper diaphragm makes contact with the control shaft. A lower diaphragm is installed in the automatic back-suction lower execution body, a sealing cone is connected to the lower diaphragm, the upper end of the sealing cone makes contact with the upper diaphragm, and the upper end of the sealing cone is located in the conduction control cavity. And the lower diaphragm and the upper diaphragm are matched with each other, so that the pressure difference in the cavity can be controlled through the inflow of an air source so as to carry out conduction control, and the response is quick.

Description

Technical Field

[0001] The invention relates to an anti-drip valve, in particular to an anti-drip valve suitable for conveying semiconductor chemical liquid. Background Art

[0002] The pneumatic three-way diaphragm valve, as a switching control valve, has three valve ports, usually one valve inlet and two valve outlets (usually called one inlet and two outlets), to switch the fluid to different pipelines. In the application of semiconductor production equipment, due to the limited space of precision equipment, the number of pipelines in the equipment, the number of fluid controllers, etc. are also limited. Therefore, the pneumatic three-way diaphragm valve can be used in the form of one valve inlet and two valve outlets to reduce the number of pipeline connection ends of the equipment, thereby saving equipment space.

[0003] After a massive search, it was found that the Chinese patent announcement number is CN2236058Y, which discloses a new three-way diverter regulating valve, including a valve body, a diverter, an adjusting rod and a handwheel. The diverter regulator is a water outlet hole connected to the front and rear sides of a cylindrical body. The fluid is reversed by rotating the diverter regulator. This structure is the reversing principle of most three-way valves. This structure requires the internal regulator to rotate, and the internal regulator and the valve body generate friction, which has the risk of generating particulate matter. This structure is not suitable for use in the field of semiconductor equipment production.

[0004] After massive searches, it was found that the Chinese patent announcement number is CN217784275U, which discloses a manual and automatic dual-purpose pneumatically controlled two-position three-way valve for a wellhead control system, including a valve body, an end cover is installed on the top of the valve body, a pressure rod is installed at the center of the top of the end cover, the bottom of the pressure rod slides through the end cover and is installed with a piston rod, the surface of the bottom of the piston rod is sleeved with a first spring, and the bottom of the piston rod is installed with a first steel ball; a striker is installed at the bottom of the first steel ball, a second steel ball is installed at the bottom of the striker, a valve core sleeve is installed below the striker and above the second steel ball, a plug is inserted at the bottom of the valve body, and the top of the plug fits with the bottom of the second steel ball. The middle of the valve body is the outlet, the bottom is the inlet, and the top is the discharge port. The three-way valve structure of this patent is only suitable for gaseous media, because the three interfaces of the three-way valve mentioned in this patent are spatially arranged in an upper, middle and lower structure, with the upper end being the exhaust port, the middle being the outlet, and the lower end being the inlet. For fluid media, this structure will affect the flow capacity of the valve due to the viscosity coefficient of the fluid and factors of fluid mechanics; at the same time, the structure of this three-way valve, elastic components such as springs, are exposed to the medium, which will cause corrosion to chemical liquid media, and produce particulate matter and metal ions, etc., and is also not suitable for the semiconductor field.

[0005] After massive searches, it was found that the Chinese patent announcement number is CN114949579B, which discloses a three-way valve, including a three-way valve body, a plug and a spring. The three-way valve structure mentioned in this patent cannot be used in the semiconductor field because its material is metal material. Secondly, the reversal of the fluid is achieved by rotating the plug, which has the risk of generating particulate matter and is not suitable for the semiconductor field.

[0006] In summary, the existing structural design, sealing structure design, and material problems of the existing three-way valve are not suitable for the semiconductor field. At the same time, some of the components of the existing three-way valve are difficult to process and it is difficult to achieve the ideal processing level. In addition, the cleanliness of the inside of the valve body is not up to standard, and it is easy to contaminate the liquid. In addition, during the use of the existing valve, it is easy for the liquid to flow out during the stop period, resulting in residual liquid on the surface of the wafer, affecting the final cleaning effect.

[0007] In view of the above-mentioned defects, the designer actively conducts research and innovation in order to create an anti-drip valve suitable for the delivery of semiconductor chemical liquid, so as to make it more valuable for industrial use. Summary of the invention

[0008] In order to solve the above technical problems, the purpose of the present invention is to provide an anti-drip valve suitable for conveying semiconductor chemical liquid.

[0009] The present invention discloses an anti-drip valve suitable for conveying semiconductor chemical liquid, comprising a valve body, a conduction control cavity distributed in the valve body, and an inflow mechanism and an outflow mechanism distributed on both sides of the conduction control cavity, wherein: an actuator body is installed at the upper end of the valve body, an automatic back-suction lower actuator is installed at the lower end of the valve body, and an air source interface is distributed on the side of the actuator body; an upper actuator is installed at the upper end of the actuator body, a control shaft is installed in the actuator body, an upper diaphragm is installed at the joint end surface of the actuator body and the valve body, and the upper end of the upper diaphragm is in contact with the control shaft; a lower diaphragm is installed in the automatic back-suction lower actuator, a sealing cone is connected to the lower diaphragm, the upper end of the sealing cone is in contact with the upper diaphragm, and the upper end of the sealing cone is located in the conduction control cavity.

[0010] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical solutions, wherein the inflow mechanism and the outflow mechanism both include an extension joint, the extension joint is externally threadedly connected to a connecting nut, an impact ring in contact with the extension joint is distributed on the inner side of the connecting nut, and the extension joint is provided with a locking ring at the rear end of the connecting nut.

[0011] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical solutions, wherein the actuator body includes an execution chamber located inside the actuator body, a guide seat is provided at the lower end of the execution chamber, an upper spring is sleeved on the guide seat, a control shaft is connected to the upper spring, and the bottom of the control shaft is in contact with the upper diaphragm.

[0012] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical liquid, wherein the middle section of the control shaft extends outward with a contact protrusion, the contact protrusion contacts the inner wall of the execution chamber, the contact protrusion is provided with a contact groove, and a contact sealing ring is sleeved in the contact groove.

[0013] Furthermore, in the above-mentioned anti-drip valve suitable for conveying semiconductor chemical liquid, an upper sealing ring is distributed on the contact end surface between the actuator body and the upper actuator.

[0014] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical solutions, wherein a receiving groove is provided in the automatic back-suction lower actuator, the lower diaphragm is located above the receiving groove, limiting plugs are distributed in the receiving groove, a lower spring is connected to the limiting plug, a contact guide pin is sleeved on the lower spring, and the contact guide pin is in contact with the lower diaphragm.

[0015] Furthermore, in the above-mentioned anti-drip valve suitable for conveying semiconductor chemical liquid, a bottom plate is installed on the outer side of the automatic back-sucking lower actuator.

[0016] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical liquid, wherein the upper actuator includes a contact shaft extending into the actuator body, a guide channel is distributed at the upper end of the actuator body, an auxiliary sealing ring is sleeved on the contact shaft, the auxiliary sealing ring is in contact with the guide channel, and the contact shaft is located on the outside of the upper actuator and is connected to a knob through a connecting mechanism.

[0017] Furthermore, the above-mentioned anti-drip valve is suitable for conveying semiconductor chemical liquid, wherein a stop ring is sleeved on the contact shaft, and the stop ring is located between the knob and the actuator body, and the connecting mechanism includes a connecting bolt, and the connecting bolt is connected to the contact shaft after being connected to the knob, and a spring gasket and a flat gasket are respectively passed through the connecting bolt.

[0018] By means of the above scheme, the present invention has at least the following advantages:

[0019] 1. There is no need to use electronic components to control the opening and closing of the valve, which reduces the space occupied by the valve body and can adapt to more installation pipelines.

[0020] 2. By using the cooperation between the lower diaphragm and the upper diaphragm, the pressure difference in the cavity can be controlled by the inflow of the gas source to perform conduction control, and the response is rapid.

[0021] 3. Through the deformation and reset coordination of different springs, the corresponding diaphragm deformation can be assisted to achieve precise control of the pressure in the cavity. When the gas source stops, the liquid can be refluxed and the valve can be closed in time.

[0022] 4. This valve has better integrity and can ensure its own liquid-tight and air-tight effects during use.

[0023] 5. The overall structure is simple, easy to assemble and install.

[0024] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 The present invention is a structural schematic diagram of an anti-drip valve suitable for delivering semiconductor chemical liquid.

[0026] The meanings of the reference numerals in the drawings are as follows.

[0027] 1 Valve body 2 Conductive control chamber

[0028] 3 Actuator body 4 Automatic back suction lower actuator

[0029] 5 Air source interface 6 Upper actuator

[0030] 7 Control shaft 8 Upper diaphragm

[0031] 9 Lower diaphragm 10 Sealing cone

[0032] 11 Connecting nut 12 Impact ring

[0033] 13 Locking ring 14 Guide seat

[0034] 15 Upper spring 16 Contact seal ring

[0035] 17 Upper seal ring 18 Lower spring

[0036] 19 Contact guide 20 Base plate

[0037] 21 Contact shaft 22 Auxiliary sealing ring

[0038] 23 Knob 24 Stop ring

[0039] 25 Connecting bolts DETAILED DESCRIPTION

[0040] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0041] like Figure 1 A drip-proof valve suitable for semiconductor chemical liquid delivery includes a valve body 1, a conduction control chamber 2 is distributed in the valve body 1, and the conduction control chamber 2 is located on both sides of the valve body 1 and has an inflow mechanism and an outflow mechanism for guiding the chemical liquid. Its uniqueness lies in that an actuator body 3 is installed at the upper end of the valve body 1 to perform conduction control. At the same time, an automatic back-sucking lower actuator 4 is installed at the lower end of the valve body 1 to participate in the actual conduction release. Specifically, an air source interface 5 is distributed on the side of the actuator body 3, and an upper actuator 6 is installed at the upper end of the actuator body 3. In this way, conduction control can be carried out through the air source, and conduction flow control can be achieved by relying on the upper actuator 6. In addition, a control shaft 7 is installed in the actuator body 3, and an upper diaphragm 8 is installed on the joint end surface of the actuator body 3 and the valve body 1. The upper end of the upper diaphragm 8 is in contact with the control shaft 7 to meet the cavity pressure control at the upper end. During implementation, a lower diaphragm 9 is installed in the automatic back-suction lower actuator 4, and a sealing cone 10 is connected to the lower diaphragm 9. During assembly, the two can be tightly combined without destroying the air tightness by contacting the guide column 19 or connecting the screws. Furthermore, the upper end of the sealing cone 10 is in contact with the upper diaphragm 8, and the upper end of the sealing cone 10 is located in the conduction control chamber 2. Therefore, the actual conduction degree of the conduction control chamber 2 can be controlled by the position of the sealing cone 10. Considering the convenience of subsequent assembly, a base plate 20 can be installed on the outer side of the automatic back-suction lower actuator 4. During implementation, the number and position of the air source interface 5 can be customized according to the response rate of the valve body opening and closing control.

[0042] In combination with a preferred embodiment of the present invention, in order to achieve effective liquid-tight docking with the corresponding pipeline, the inflow mechanism and the outflow mechanism both include an extension joint. Specifically, the extension joint is externally threadedly connected to a connecting nut 11, and an impact ring 12 in contact with the extension joint is distributed on the inner side of the connecting nut 11, and a locking ring 13 is sleeved on the rear end of the extension joint located at the connecting nut 11. In this way, the impact ring 12 can fill the bonding gap on the inner side of the connecting nut 11 to avoid shaking in a high hydraulic environment. Relying on the presence of the locking ring 13, the connecting nut 11 can achieve a more stable threaded connection.

[0043] Further, in order to meet the requirements of effective pressure control in the cavity, the actuator body 3 includes an execution cavity located in the actuator body 3, and a guide seat 14 is provided at the lower end of the execution cavity, and an upper spring 15 is sleeved on the guide seat 14. At the same time, a control shaft 7 is connected to the upper spring 15, and the bottom of the control shaft 7 is in contact with the upper diaphragm 8. In this way, the position of the control shaft 7 is used to define the limit deformation position of the upper diaphragm 8, and the upper diaphragm 8 is used to control the actual conduction state of the conduction control cavity 2. In addition, in order to meet the requirements of effective air tightness, a contact protrusion extends outward from the middle section of the control shaft 7, and the contact protrusion contacts the inner wall of the execution cavity. A contact groove is provided on the contact protrusion, and a contact sealing ring 16 is sleeved in the contact groove. Furthermore, considering the air tightness of the installation joint, an upper sealing ring 17 is distributed on the contact end surface of the actuator body 3 and the upper actuator 6.

[0044] In view of the actual implementation, in order to meet the requirement of effective automatic back-suction and avoid dripping, the automatic back-suction lower actuator 4 adopted by the present invention is provided with a receiving groove, and the lower diaphragm 9 is located above the receiving groove. At the same time, a limit plug is distributed in the receiving groove, and a lower spring 18 is inserted on the limit plug. A contact guide post 19 is sleeved on the lower spring 18, and the contact guide post 19 is in contact with the lower diaphragm 9. In this way, through the deformation and reset of the lower spring 18, the deformation state of the lower diaphragm 9 can be effectively controlled to meet the back-suction effect after self-reset.

[0045] Further, the upper actuator 6 includes a contact shaft 21 extending into the actuator body 3. At the same time, a guide channel is distributed on the upper end of the actuator body 3. In order to meet the sealing effect of the contact surface, an auxiliary sealing ring 22 is sleeved on the contact shaft 21, and the auxiliary sealing ring 22 contacts the guide channel. In addition, in order to achieve the stroke adjustment of the contact shaft 21, the contact shaft 21 is located on the outer side of the upper actuator 6 and is connected to a knob 23 through a connecting mechanism. Specifically, a stop ring 24 is sleeved on the contact shaft 21, and the stop ring 24 is located between the knob 23 and the actuator body 3. The stop ring 24 can be used to achieve the maximum limit of the stroke adjusted by the knob 23. The connecting mechanism includes a connecting bolt 25, and the connecting bolt 25 is connected to the contact shaft 21 after being connected to the knob 23. Furthermore, a spring washer and a flat washer are respectively inserted on the connecting bolt 25. In this way, the spring washer can be pressed by deformation, and the flat washer can be cooperated with the connecting bolt 25 to drive the knob 23 to be effectively connected to the contact shaft 21.

[0046] The working principle of the present invention is as follows:

[0047] If there is no air supply, the sealing cone 10 places the lower diaphragm 9 in the original position, and the valve body 1 is in the sealing device.

[0048] If the air source flows in, the control shaft 7 applies pressure to the sealing cone 10 under the control of air pressure, so that the sealing cone 10 moves downward. At this time, the conduction control chamber 2 is in a conduction state, and the liquid medicine starts to flow.

[0049] During this period, if the air source stops supplying, the upper spring 15 pushes the control shaft 7 upward to reset it. At the same time, the upper diaphragm 8 is in an upward push state, so that the actuator body 3 presents a negative pressure.

[0050] At this time, the liquid medicine flows back. At the same time, the lower spring 18 will lift the sealing cone 10, so that the lower diaphragm 9 is synchronously lifted to form an effective bottom seal. Thus, the entire valve is completely closed.

[0051] It can be seen from the above textual description and the accompanying drawings that the present invention has the following advantages:

[0052] 1. There is no need to use electronic components to control the opening and closing of the valve, which reduces the space occupied by the valve body and can adapt to more installation pipelines.

[0053] 2. By using the cooperation between the lower diaphragm and the upper diaphragm, the pressure difference in the cavity can be controlled by the inflow of the gas source to perform conduction control, and the response is rapid.

[0054] 3. Through the deformation and reset coordination of different springs, the corresponding diaphragm deformation can be assisted to achieve precise control of the pressure in the cavity. When the gas source stops, the liquid can be refluxed and the valve can be closed in time.

[0055] 4. This valve has better integrity and can ensure its own liquid-tight and air-tight effects during use.

[0056] 5. The overall structure is simple, easy to assemble and install.

[0057] In addition, the indicated orientations or positional relationships described in the present invention are all based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as limitations on the present invention.

[0058] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principles of the present invention, and these improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A drip-proof valve suitable for conveying semiconductor chemical liquid, comprising a valve body, a conduction control cavity distributed in the valve body, an inflow mechanism and an outflow mechanism distributed on both sides of the conduction control cavity of the valve body, characterized in that: The upper end of the valve body is equipped with an actuator body, the lower end of the valve body is equipped with an automatic back-suction lower actuator, and the side of the actuator body is provided with an air source interface; An upper actuator is installed at the upper end of the actuator body, a control shaft is installed in the actuator body, an upper diaphragm is installed at the joint end surface of the actuator body and the valve body, and the upper end of the upper diaphragm is in contact with the control shaft; A lower diaphragm is installed in the automatic back-suction lower actuator, a sealing cone is connected to the lower diaphragm, an upper end of the sealing cone contacts the upper diaphragm, and the upper end of the sealing cone is located in the conduction control chamber.

2. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The inflow mechanism and the outflow mechanism both include an extension joint, the extension joint is externally threaded with a connecting nut, an impact ring in contact with the extension joint is distributed inside the connecting nut, and a locking ring is sleeved on the rear end of the extension joint.

3. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The actuator body includes an execution chamber located inside the actuator body, a guide seat is arranged at the lower end of the execution chamber, an upper spring is sleeved on the guide seat, a control shaft is connected to the upper spring, and the bottom of the control shaft contacts the upper diaphragm.

4. The anti-drip valve for semiconductor chemical liquid delivery according to claim 3, characterized in that: A contact protrusion is extended outward from the middle section of the control shaft, and the contact protrusion contacts the inner wall of the execution chamber. A contact groove is formed on the contact protrusion, and a contact sealing ring is sleeved in the contact groove.

5. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: An upper sealing ring is distributed on the contact end surface between the actuator body and the upper actuator.

6. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: A receiving groove is provided in the automatic retraction lower actuator, the lower diaphragm is located above the receiving groove, a limiting plug is distributed in the receiving groove, a lower spring is inserted on the limiting plug, a contact guide column is sleeved on the lower spring, and the contact guide column is in contact with the lower diaphragm.

7. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: A bottom plate is installed on the outer side of the automatic back-suction lower actuator.

8. The anti-drip valve for semiconductor chemical liquid delivery according to claim 1, characterized in that: The upper actuator includes a contact shaft extending into the actuator body, a guide channel is distributed on the upper end of the actuator body, an auxiliary sealing ring is sleeved on the contact shaft, the auxiliary sealing ring is in contact with the guide channel, and the contact shaft is located on the outside of the upper actuator and is connected to a knob through a connecting mechanism.

9. The anti-drip valve for semiconductor chemical liquid delivery according to claim 8, characterized in that: A cut-off ring is sleeved on the contact shaft, and the cut-off ring is located between the knob and the actuator body. The connecting mechanism includes a connecting bolt, and the connecting bolt is connected to the contact shaft after being connected to the knob. A spring washer and a flat washer are respectively inserted on the connecting bolt.

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