Cold cathode flat plate X-ray source for wireless driving addressing

Abstract

The invention discloses a cold cathode flat plate X-ray source for wireless driving addressing, and the source comprises an anode substrate which comprises an anode target and an anode electrode connected with the anode target; the cathode substrate comprises a plurality of electron source units, each electron source unit comprises a wireless driving receiver and a cold cathode electron source, and the wireless driving receiver is connected with the cold cathode electron source; the isolator is arranged between the anode substrate and the cathode substrate, so that a preset distance is kept between the anode substrate and the cathode substrate; a plurality of wireless driving transmitters, wherein each wireless driving transmitter corresponds to one wireless driving receiver; and the driving circuit is connected with the plurality of wireless driving transmitters. The defects that a traditional flat plate X-ray source is large in lead number and difficult to package are overcome, wiring complexity and maintenance cost are reduced, intelligence and portability of the cold cathode flat plate X-ray source are facilitated, and the cold cathode flat plate X-ray source has important application prospects.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray sources, and more particularly to a wirelessly driven and addressed cold cathode flat panel X-ray source. Background Art

[0002] The cold cathode flat-panel X-ray source is a new type of X-ray source that has been studied in recent years. Due to its small size, low power consumption, fast response speed, and electrically addressed luminescence, it can realize a compact static CT system and has broad application prospects in the fields of medical imaging and industrial detection. In the traditional cold cathode flat-panel X-ray source structure, the complex gate structure and its leads are prone to cause device discharge problems, affecting the reliability and service life of the flat-panel X-ray source. At the same time, the number of electrode leads on the cathode substrate of the device is huge, and there are problems such as difficulty in vacuum packaging, complex wiring, lead delay affecting the response speed of the device, and complex scanning drive circuits, which bring difficulties to the system integration application of flat-panel X-ray sources. Summary of the invention

[0003] The present invention provides a wirelessly driven and addressed cold cathode flat panel X-ray source, which solves the technical problems in the prior art of complex wiring caused by a large number of electrode leads on a cathode substrate, the influence of lead delay on the response speed of the device, and the complexity of the scanning drive circuit.

[0004] In order to solve the above technical problems, the technical solution of the present invention is as follows:

[0005] The present invention provides a wirelessly driven and addressed cold cathode flat panel X-ray source, comprising:

[0006] an anode substrate, the anode substrate comprising an anode target and an anode electrode connected to the anode target;

[0007] A cathode substrate, wherein the cathode substrate comprises a plurality of electron source units, wherein each electron source unit comprises a wireless driving receiver and a cold cathode electron source, and the wireless driving receiver is connected to the cold cathode electron source;

[0008] An isolator, the isolator is disposed between the anode substrate and the cathode substrate to keep the anode substrate and the cathode substrate at a preset distance;

[0009] A plurality of wireless drive transmitters, each of which corresponds to one wireless drive receiver;

[0010] A driving circuit is connected to the plurality of wireless driving transmitters.

[0011] In the above-mentioned technical means, wireless energy transmission is performed by utilizing a driving circuit and a wireless driving transmitter arranged outside the X-ray source, and a wireless driving receiver arranged inside the X-ray source, and applying a driving voltage to the gate of the electron source array, thereby realizing driving and addressing luminescence. Wireless energy transmission can avoid omitting a large number of leads on the cathode substrate of the device, and can realize more flexible and convenient addressing driving, thus solving the technical problems in the prior art of complex wiring caused by a large number of electrode leads on the cathode substrate, lead delay affecting the response speed of the device, and complex scanning driving circuits.

[0012] Furthermore, the anode substrate further comprises an anode substrate and an anode protection layer, wherein:

[0013] The anode target and the anode electrode are arranged on the anode substrate, and the anode protection layer is arranged on the anode target.

[0014] Furthermore, the anode target is made of one or more metal films including tungsten, molybdenum, chromium, and aluminum.

[0015] Furthermore, the cathode substrate further comprises a cathode substrate, a gate electrode, a cathode electrode and a growth source film, wherein:

[0016] The gate electrode and the cathode electrode are both disposed on the cathode substrate, and the wireless driving receiver is connected to the gate electrode and the cathode electrode respectively;

[0017] The growth source film is arranged on the cathode electrode;

[0018] The cold cathode electron source is arranged on the growth source film.

[0019] Furthermore, the wireless driving receiver is one of an inductor coil, a capacitor plate or a wireless driving circuit manufactured by a micromachining process.

[0020] Furthermore, the driving circuit provides a voltage to drive the wireless driving transmitter, and uses electromagnetic induction, electromagnetic waves or electrostatic effects to generate an induced voltage on the wireless driving receiver, and then applies the voltage to the gate electrode and the cathode electrode.

[0021] Furthermore, the working interval between the wireless drive receiver and the wireless drive transmitter is 1-25 mm.

[0022] Furthermore, the intensity of the light emission is adjusted by controlling the voltage or duty cycle of the driving circuit.

[0023] Furthermore, the voltage is applied by the wireless driving receiver to perform light-emitting addressing, and the addressing modes include point addressing, row and column addressing, and coded addressing:

[0024] The point addressing mode is to light up each cold cathode electron source individually, and control the voltage applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so as to realize lighting up a single unit or any multiple units at the same time;

[0025] The row-column addressing mode means that each row or column of cold cathode electron sources is lit, and a voltage is applied to a wireless driving receiver of a single row or column of cold cathode electron sources by programming an external circuit to control the cold cathode electron sources in a single row or column, so that a single row or column of cold cathode electron sources is lit at the same time;

[0026] The coded addressing method means that the cold cathode electron sources are lit according to a specific coded arrangement, and the voltage is applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so that the cold cathode electron sources of any coded arrangement can be lit simultaneously.

[0027] Furthermore, the wireless driver receiver has any of the following settings:

[0028] 1) Parallel type: the wireless driving receiver is arranged on the cathode substrate and is adjacent to the corresponding cold cathode electron source. In this case, an insulating layer is arranged between the substrate and the gate electrode and the cathode electrode. One end of the wireless driving receiver is connected to the gate electrode through a conductive electrode, and the other end is connected to the cathode electrode through a conductive electrode on the insulating layer.

[0029] 2) Up-down type: the wireless driving receiver is arranged on the other side of the cathode substrate opposite to the gate electrode and the cathode electrode, and opposite to the corresponding cold cathode electron source. In this case, an insulating layer is arranged between the substrate and the gate electrode and the cathode electrode, and the two ends of the wireless driving receiver are respectively connected to the gate electrode and the cathode electrode through the conductive electrodes on the insulating layer;

[0030] 3) Overlap type: the central port of the wireless driving receiver is arranged to overlap with the cathode electrode, and the other end of the wireless driving receiver is directly connected to the gate electrode.

[0031] The operation steps of the wirelessly driven addressed cold cathode flat panel X-ray source include the following steps:

[0032] 1) Use a high voltage power supply to apply voltage to the anode electrode, the voltage range is 10 to 200 kV;

[0033] 2) Connecting the wireless drive transmitter to the drive circuit, so that the wireless receiver generates a high-voltage and high-frequency AC signal, generating a voltage difference between the gate electrode and the cathode electrode, wherein the peak-to-peak value of the high-voltage and high-frequency AC signal is in the range of 20 to 200 V and the frequency is 100 kHz;

[0034] 3) The cold cathode electron source emits electrons driven by a high-voltage and high-frequency AC signal. The electrons bombard the anode target and radiate X-rays to achieve driven luminescence;

[0035] 4) The driving circuit can control the light emission of electron source units at different positions on the array through an addressing programming program to achieve addressing work.

[0036] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0037] The wirelessly driven and addressed cold cathode flat panel X-ray source provided by the present invention avoids the shortcomings of the traditional flat panel X-ray source having many leads and difficult packaging. By setting a wireless driving coupler for wireless energy transmission, the driving voltage is applied to the gate of the cold cathode electron source, thereby realizing driving and addressing luminescence. The present invention application gets rid of the limitation that the traditional flat panel X-ray source needs a wired connection to realize addressing drive, greatly improves the flexibility and portability of the device when used, and on the other hand solves the problem of the large number of electrode leads on the gate and cathode substrate, thereby improving the service life, stability and reliability of the flat panel X-ray source, which is conducive to the intelligent and portable development of the cold cathode flat panel X-ray source and has important application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A schematic structural diagram of a wirelessly driven and addressed cold cathode flat panel X-ray source provided by an embodiment of the present invention;

[0039] Figure 2 A schematic diagram of a structure in which wireless driver receivers provided in parallel are provided in an embodiment of the present invention;

[0040] Figure 3 A schematic top view of a wireless driver receiver provided in parallel according to an embodiment of the present invention;

[0041] Figure 4 A schematic diagram of a structure of a wireless driver receiver provided by an embodiment of the present invention arranged in an up-and-down manner;

[0042] Figure 5 A schematic top view of a wireless driver receiver provided by an embodiment of the present invention arranged in an up-and-down manner;

[0043] Figure 6 A schematic diagram of a structure of a wireless driver receiver overlapped in an embodiment of the present invention;

[0044] Figure 7 A schematic top view of a wireless driver receiver provided in an embodiment of the present invention in an overlapping arrangement;

[0045] In the figure, 1 is a wireless driving receiver, 2 is an insulating layer, 3 is a cathode substrate, 4 is a wireless driving transmitter, 5 is a conductive electrode, 6 is a gate electrode, 7 is a cathode electrode, 8 is a growth source film, 9 is a cold cathode electron source, 10 is an anode substrate, 11 is an insulator, 12 is an anode target, and 13 is an anode protective layer. DETAILED DESCRIPTION

[0046] The drawings are for illustrative purposes only and should not be construed as limiting the present patent;

[0047] In order to better illustrate the present embodiment, some parts in the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product;

[0048] It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0049] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0050] Example 1

[0051] This embodiment provides a wirelessly driven and addressed cold cathode flat panel X-ray source, such as Figure 1 As shown, including:

[0052] an anode substrate, the anode substrate comprising an anode target 12 and an anode electrode connected to the anode target 12;

[0053] A cathode substrate, wherein the cathode substrate comprises a plurality of electron source units, wherein each electron source unit comprises a wireless driving receiver 1 and a cold cathode electron source 9, and the wireless driving receiver 1 is connected to the cold cathode electron source 9;

[0054] An isolator 11, wherein the isolator 11 is disposed between the anode substrate and the cathode substrate to keep a preset distance between the anode substrate and the cathode substrate;

[0055] A plurality of wireless driving transmitters 4, each of the wireless driving transmitters 4 corresponds to one of the wireless driving receivers 1;

[0056] A driving circuit, wherein the driving circuit is connected to the plurality of wireless driving transmitters 4 .

[0057] In this embodiment, a certain distance between the anode target 12 and the cold cathode electron source 9 is maintained by using an isolator 11. The cold cathode electron source 9 is connected to the wireless drive receiver 1, and the cold cathode electron source 9 is pressurized by the wireless drive receiver 1 to control the emitted electrons to bombard the anode target 12, thereby generating addressable X-rays.

[0058] In a further embodiment, the anode substrate further comprises an anode substrate 10 and an anode protection layer 13, wherein:

[0059] The anode target 12 and the anode electrode are disposed on the anode substrate 10 , and the anode protection layer 13 is disposed on the anode target 12 .

[0060] In a further embodiment, the anode target 12 is made of one or more metal films including tungsten, molybdenum, chromium, and aluminum.

[0061] In a further embodiment, the cathode substrate further comprises a cathode substrate 3, a gate electrode 6, a cathode electrode 7 and a growth source film 8, wherein:

[0062] The gate electrode 6 and the cathode electrode 7 are both disposed on the cathode substrate 3, and the wireless driving receiver 1 is connected to the gate electrode 6 and the cathode electrode 7 respectively;

[0063] The growth source film 8 is disposed on the cathode electrode 7;

[0064] The cold cathode electron source 9 is disposed on the growth source film 8 .

[0065] In a specific embodiment, the operation steps of the wirelessly driven addressed cold cathode flat panel X-ray source include the following steps:

[0066] 1) Use a high voltage power supply to apply voltage to the anode electrode, the voltage range is 10 to 200 kV;

[0067] 2) Connect the wireless drive transmitter 4 to the drive circuit, so that the wireless receiver generates a high-voltage and high-frequency AC signal, and generates a voltage difference between the gate electrode 6 and the cathode electrode 7. The peak-to-peak value of the high-voltage and high-frequency AC signal is in the range of 20 to 200 V and the frequency is 100 kHz;

[0068] 3) The cold cathode electron source 9 emits electrons driven by a high-voltage and high-frequency AC signal, and the electrons bombard the anode target 12 and radiate X-rays, thereby driving the light emission;

[0069] 4) The driving circuit can control the light emission of electron source units at different positions on the array through an addressing programming program to achieve addressing work.

[0070] Example 2

[0071] Based on Example 1, this example continues to disclose the following technical contents:

[0072] The wireless driving receiver 1 is one of an inductor coil, a capacitor plate or a wireless driving circuit manufactured by micromachining technology.

[0073] In a further embodiment, the driving circuit provides voltage to drive the wireless driving transmitter 4 , and utilizes electromagnetic induction, electromagnetic waves or electrostatic effects to generate an induced voltage on the wireless driving receiver 1 , and then applies the voltage to the gate electrode 6 and the cathode electrode 7 .

[0074] In a further embodiment, the working interval between the wireless driving receiver 1 and the wireless driving transmitter 4 is 1-25 mm.

[0075] In a further embodiment, the intensity of the light emission is adjusted by controlling the voltage or the duty cycle of the driving circuit.

[0076] In a further embodiment, the cold cathode electron source 9 is a quasi-one-dimensional nano cold cathode such as a Spindt-type cone, a carbon nanotube, a zinc oxide nanowire, or a copper oxide nanowire.

[0077] In a further embodiment, the wireless driving receiver 1 applies voltage to perform light emitting addressing, and the addressing modes include point addressing, row and column addressing, and coded addressing:

[0078] The point addressing mode is to light up each cold cathode electron source 9 individually, and control the wireless driving receiver 1 of a single cold cathode electron source 9 to apply voltage through external circuit programming, so as to realize lighting up a single unit or any multiple units at the same time;

[0079] The row-column addressing mode means that each row or column of cold cathode electron sources 9 is lit, and a voltage is applied to the wireless driving receiver 1 of a single row or column of cold cathode electron sources 9 by programming an external circuit to control the cold cathode electron sources 9 in a single row or column, so that the cold cathode electron sources 9 in a single row or column are lit at the same time;

[0080] The coded addressing mode means that the cold cathode electron source 9 is lit according to a specific coded arrangement, and the wireless driving receiver 1 of a single cold cathode electron source 9 is controlled by external circuit programming to apply voltage, so that the cold cathode electron sources 9 of any coded arrangement can be lit simultaneously.

[0081] Example 3

[0082] Based on Example 1 and Example 2, this embodiment continues to disclose the following technical contents:

[0083] The wireless driver receiver 1 has any of the following configurations:

[0084] 1) Parallel type: the wireless driving receiver 1 is arranged on the cathode substrate 3 and is adjacent to the corresponding cold cathode electron source 9. In this case, an insulating layer 2 is arranged between the substrate and the gate electrode 6 and the cathode electrode 7. One end of the wireless driving receiver 1 is connected to the gate electrode 6 through a conductive electrode 5, and the other end is connected to the cathode electrode 7 through the conductive electrode 5 on the insulating layer 2;

[0085] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 2 and Figure 3 As shown, the wireless driving receiver 1 is made next to the cold cathode electron source 9, presenting a parallel structure. On the cathode substrate, one end of the wireless driving receiver 1 is directly connected to the gate electrode 6 through the conductive electrode 5, and the other end is connected to the cathode electrode 7 on the conductive electrode 5 of the insulating layer 2. Turn on the external circuit voltage output, use electromagnetic induction to reach the electron source turn-on voltage, and realize addressing light emission;

[0086] 2) Up and down type: the wireless driving receiver 1 is arranged on the other side of the cathode substrate 3 opposite to the gate electrode 6 and the cathode electrode 7, and opposite to the corresponding cold cathode electron source 9. At this time, an insulating layer 2 is arranged between the substrate and the gate electrode 6 and the cathode electrode 7. The two ends of the wireless driving receiver 1 are respectively connected to the gate electrode 6 and the cathode electrode 7 through the conductive electrodes 5 on the insulating layer 2;

[0087] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 4 and Figure 5 As shown, the wireless driving receiver is made on the lower side of the electron source, presenting a top-bottom structure. In the insulating layer 2, the two ends of the wireless driving receiver are connected to the cold cathode electrode 7 through the conductive electrode 5. Turn on the external circuit voltage output, use electromagnetic induction to reach the electron source turn-on voltage, and realize addressing luminescence;

[0088] 3) Overlap type: the central port of the wireless driving receiver 1 is overlapped with the cathode electrode 7, and the other end of the wireless driving receiver 1 is directly connected to the gate electrode 6;

[0089] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 6 and Figure 7 As shown, on the cathode substrate 3, the cathode electrode 7 is directly made at the central port of the wireless driving receiver 1, and the other end of the wireless driving receiver 1 is connected to the cold cathode gate electrode 6. The external circuit voltage output is turned on, and the electron source turn-on voltage is reached by electromagnetic induction to achieve addressing luminescence. The overlapped structural unit structure is simple, eliminating the insulating layer 2 and the conductive electrode 5 structure.

[0090] The same or similar reference numerals correspond to the same or similar components;

[0091] The terms used in the drawings to describe positional relationships are only used for illustrative purposes and should not be construed as limiting this patent;

[0092] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A wirelessly driven and addressed cold cathode flat panel X-ray source, characterized in that: include: an anode substrate, the anode substrate comprising an anode target and an anode electrode connected to the anode target; A cathode substrate, wherein the cathode substrate comprises a plurality of electron source units, wherein each electron source unit comprises a wireless driving receiver and a cold cathode electron source, and the wireless driving receiver is connected to the cold cathode electron source; An isolator, the isolator is disposed between the anode substrate and the cathode substrate to keep the anode substrate and the cathode substrate at a preset distance; A plurality of wireless drive transmitters, each of which corresponds to one wireless drive receiver; A driving circuit is connected to the plurality of wireless driving transmitters.

2. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The anode substrate further comprises an anode substrate and an anode protection layer, wherein: The anode target and the anode electrode are arranged on the anode substrate, and the anode protection layer is arranged on the anode target.

3. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The anode target is made of one or more metal films including tungsten, molybdenum, chromium and aluminum.

4. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The cathode substrate further comprises a cathode substrate, a gate electrode, a cathode electrode and a growth source film, wherein: The gate electrode and the cathode electrode are both disposed on the cathode substrate, and the wireless driving receiver is connected to the gate electrode and the cathode electrode respectively; The growth source film is arranged on the cathode electrode; The cold cathode electron source is arranged on the growth source film.

5. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 4, characterized in that: The wireless driving receiver is one of an inductor coil, a capacitor plate or a wireless driving circuit manufactured by a micro-machining process.

6. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 5, characterized in that: The driving circuit provides a voltage to drive the wireless driving transmitter, and utilizes electromagnetic induction, electromagnetic waves or electrostatic effect to generate an induced voltage on the wireless driving receiver, and then applies the voltage to the gate electrode and the cathode electrode.

7. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 6, characterized in that: The working interval between the wireless drive receiver and the wireless drive transmitter is 1-25 mm.

8. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 7, characterized in that: The intensity of the light emission is adjusted by controlling the voltage or duty cycle of the driving circuit.

9. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 8, characterized in that: The voltage is applied by the wireless driving receiver to perform light-emitting addressing. The addressing methods include point addressing, row and column addressing, and coding addressing: The point addressing mode is to light up each cold cathode electron source individually, and control the voltage applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so as to realize lighting up a single unit or any multiple units at the same time; The row-column addressing mode means that each row or column of cold cathode electron sources is lit, and a voltage is applied to a wireless driving receiver of a single row or column of cold cathode electron sources by programming an external circuit to control the cold cathode electron sources in a single row or column, so that a single row or column of cold cathode electron sources is lit at the same time; The coded addressing method means that the cold cathode electron sources are lit according to a specific coded arrangement, and the voltage is applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so that the cold cathode electron sources of any coded arrangement can be lit simultaneously.

10. The wirelessly driven addressed cold cathode flat panel X-ray source according to claim 4, characterized in that: The wireless driver receiver has any of the following settings: 1) Parallel type: the wireless driving receiver is arranged on the cathode substrate and is adjacent to the corresponding cold cathode electron source. In this case, an insulating layer is arranged between the substrate and the gate electrode and the cathode electrode. One end of the wireless driving receiver is connected to the gate electrode through a conductive electrode, and the other end is connected to the cathode electrode through a conductive electrode on the insulating layer. 2) Up-down type: the wireless driving receiver is arranged on the other side of the cathode substrate opposite to the gate electrode and the cathode electrode, and opposite to the corresponding cold cathode electron source. In this case, an insulating layer is arranged between the substrate and the gate electrode and the cathode electrode, and the two ends of the wireless driving receiver are respectively connected to the gate electrode and the cathode electrode through the conductive electrodes on the insulating layer; 3) Overlap type: the central port of the wireless driving receiver is arranged to overlap with the cathode electrode, and the other end of the wireless driving receiver is directly connected to the gate electrode.

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