Wirelessly driven addressable cold cathode flat panel x-ray source

Abstract

The application discloses a wireless drive addressing cold cathode flat-plate X-ray source, comprising: an anode substrate, the anode substrate comprising an anode target and an anode electrode connected with the anode target; a cathode substrate, the cathode substrate comprising a plurality of electron source units, wherein each electron source unit comprises a wireless drive receiver and a cold cathode electron source, the wireless drive receiver being connected with the cold cathode electron source; a separator, the separator being arranged between the anode substrate and the cathode substrate to keep the anode substrate and the cathode substrate at a preset distance; a plurality of wireless drive transmitters, each wireless drive transmitter corresponding to one wireless drive receiver; and a drive circuit, the drive circuit being connected with the plurality of wireless drive transmitters. The application avoids the defects of traditional flat-plate X-ray source, such as too many leads and difficult packaging, reduces wiring complexity and maintenance cost, is beneficial to the intelligentization and portability of the cold cathode flat-plate X-ray source, and has important application prospect.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray sources, and more particularly to a wirelessly driven and addressed cold cathode flat-panel X-ray source. Background Art

[0002] Cold cathode flat-panel X-ray sources are a new type of X-ray source that has been studied in recent years. Due to their small size, low power consumption, fast response speed, and electrically addressed luminescence, they enable compact static CT systems and have broad application prospects in medical imaging, industrial inspection, and other fields. In traditional cold cathode flat-panel X-ray source structures, the complex gate structure and its leads can easily cause device discharge problems, affecting the reliability and service life of the flat-panel X-ray source. Furthermore, the large number of electrode leads on the cathode substrate of the device poses challenges such as difficult vacuum packaging, complex wiring, lead delays that affect the device's response speed, and complex scanning drive circuits. These factors complicate the system integration and application of flat-panel X-ray sources. Summary of the Invention

[0003] The present invention provides a wirelessly driven and addressed cold cathode flat-panel X-ray source, which solves the technical problems in the prior art of complex wiring caused by the large number of electrode leads on the cathode substrate, the influence of lead delay on the response speed of the device, and the complexity of the scanning drive circuit.

[0004] In order to solve the above technical problems, the technical solutions of the present invention are as follows:

[0005] The present invention provides a wirelessly driven and addressed cold cathode flat-panel X-ray source, comprising:

[0006] an anode substrate, the anode substrate comprising an anode target and an anode electrode connected to the anode target;

[0007] a cathode substrate, the cathode substrate comprising a plurality of electron source units, wherein each electron source unit comprises a wireless driving receiver and a cold cathode electron source, the wireless driving receiver being connected to the cold cathode electron source;

[0008] an isolator, the isolator being disposed between the anode substrate and the cathode substrate to maintain a preset distance between the anode substrate and the cathode substrate;

[0009] A plurality of wireless drive transmitters, each of which corresponds to one wireless drive receiver;

[0010] A driving circuit is connected to the plurality of wireless driving transmitters.

[0011] In the above-mentioned technical means, wireless energy transmission is performed by utilizing a driving circuit and a wireless driving transmitter arranged outside the X-ray source, and a wireless driving receiver arranged inside the X-ray source, and applying a driving voltage to the electron source array gate, thereby realizing driving and addressing luminescence. Wireless energy transmission can avoid omitting a large number of leads on the cathode substrate of the device, and can realize more flexible and convenient addressing driving, solving the technical problems in the prior art of complex wiring caused by the large number of electrode leads on the cathode substrate, the lead delay affecting the response speed of the device, and the complexity of the scanning driving circuit.

[0012] Furthermore, the anode substrate further comprises an anode substrate and an anode protective layer, wherein:

[0013] The anode target and the anode electrode are arranged on the anode substrate, and the anode protection layer is arranged on the anode target.

[0014] Furthermore, the anode target is made of one or more metal films selected from tungsten, molybdenum, chromium, and aluminum.

[0015] Furthermore, the cathode substrate further comprises a cathode substrate, a gate electrode, a cathode electrode and a growth source film, wherein:

[0016] The gate electrode and the cathode electrode are both provided on the cathode substrate, and the wireless driving receiver is connected to the gate electrode and the cathode electrode respectively;

[0017] The growth source film is arranged on the cathode electrode;

[0018] The cold cathode electron source is arranged on the growth source film.

[0019] Furthermore, the wireless driving receiver is an inductor coil, a capacitor plate or a wireless driving circuit manufactured by a micromachining process.

[0020] Furthermore, the driving circuit provides a voltage to drive the wireless driving transmitter, and utilizes electromagnetic induction, electromagnetic waves or electrostatic effects to generate an induced voltage on the wireless driving receiver, and then applies the voltage to the gate electrode and cathode electrode.

[0021] Furthermore, the working interval between the wireless drive receiver and the wireless drive transmitter is 1-25 mm.

[0022] Furthermore, the intensity of the light emission is adjusted by controlling the voltage or duty cycle of the driving circuit.

[0023] Furthermore, the voltage is applied by the wireless driving receiver to perform light-emitting addressing. The addressing modes include point addressing, row and column addressing, and coded addressing:

[0024] The point addressing mode is to light up each cold cathode electron source individually, and to control the voltage applied to the wireless driving receiver of a single cold cathode electron source through programming of an external circuit, so as to realize lighting up a single unit or any multiple units simultaneously;

[0025] The row-column addressing mode means that each row or column of cold cathode electron sources is lit, and a voltage is applied to the wireless driving receiver of a single row or column of cold cathode electron sources by programming an external circuit to control the cold cathode electron sources at the same time.

[0026] The coded addressing mode means that the cold cathode electron sources are lit according to a specific coded arrangement. The voltage is applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so that the cold cathode electron sources of any coded arrangement can be lit simultaneously.

[0027] Furthermore, the wireless driver receiver has any of the following settings:

[0028] 1) Parallel type: The wireless drive receiver is arranged on the cathode substrate and adjacent to the corresponding cold cathode electron source. In this case, an insulating layer is provided between the substrate and the gate electrode and cathode electrode. One end of the wireless drive receiver is connected to the gate electrode via a conductive electrode, and the other end is connected to the cathode electrode via a conductive electrode on the insulating layer.

[0029] 2) Top-bottom type: The wireless drive receiver is disposed on the other side of the cathode substrate opposite the gate electrode and cathode electrode, and opposite the corresponding cold cathode electron source. In this case, an insulating layer is disposed between the substrate and the gate electrode and cathode electrode, and the two ends of the wireless drive receiver are connected to the gate electrode and cathode electrode respectively through conductive electrodes on the insulating layer;

[0030] 3) Overlap type: the central port of the wireless driving receiver is arranged to overlap with the cathode electrode, and the other end of the wireless driving receiver is directly connected to the gate electrode.

[0031] The operation steps of the wirelessly driven addressed cold cathode flat panel X-ray source include the following steps:

[0032] 1) Use a high voltage power supply to apply voltage to the anode electrode, with a voltage range of 10 to 200 kV;

[0033] 2) Connecting the wireless driver transmitter to the driver circuit so that the wireless receiver generates a high-voltage, high-frequency AC signal, generating a voltage difference between the gate electrode and the cathode electrode. The high-voltage, high-frequency AC signal has a peak-to-peak voltage range of 20 to 200 V and a frequency of 100 kHz.

[0034] 3) The cold cathode electron source emits electrons driven by a high-voltage, high-frequency AC signal. The electrons bombard the anode target and radiate X-rays, achieving driven luminescence.

[0035] 4) The driving circuit can control the electron source units at different positions on the array to emit light through the addressing programming program, thereby realizing addressing work.

[0036] Compared with the prior art, the beneficial effects of the technical solution of the present invention are:

[0037] The wirelessly driven and addressed cold cathode flat-panel X-ray source provided by the present invention overcomes the shortcomings of traditional flat-panel X-ray sources, such as the numerous leads and difficult packaging. By providing a wireless drive coupler for wireless energy transmission, the drive voltage is applied to the cold cathode electron source gate, thereby achieving drive and addressed luminescence. This invention overcomes the limitation of traditional flat-panel X-ray sources, which require a wired connection for addressing and driving, significantly improving the device's flexibility and portability. Furthermore, it addresses the issue of the large number of electrode leads on the gate and cathode substrates, thereby improving the service life, stability, and reliability of the flat-panel X-ray source. This contributes to the intelligent and portable development of cold cathode flat-panel X-ray sources and holds significant application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A schematic structural diagram of a wirelessly driven and addressed cold cathode flat-panel X-ray source provided by an embodiment of the present invention;

[0039] Figure 2 A schematic diagram of the structure of a wireless driver receiver provided in parallel according to an embodiment of the present invention;

[0040] Figure 3 A schematic top view of a parallel arrangement of wireless driver receivers according to an embodiment of the present invention;

[0041] Figure 4 A schematic diagram of the structure of a wireless driver receiver provided by an embodiment of the present invention arranged in an upper and lower manner;

[0042] Figure 5 A schematic top view of a wireless driver receiver arranged in an up-and-down manner according to an embodiment of the present invention;

[0043] Figure 6 A schematic diagram of the structure of a wireless driver receiver overlapped with each other provided in an embodiment of the present invention;

[0044] Figure 7 A schematic top view of a stacked arrangement of wireless driver receivers according to an embodiment of the present invention;

[0045] In the figure, 1 is a wireless driving receiver, 2 is an insulating layer, 3 is a cathode substrate, 4 is a wireless driving transmitter, 5 is a conductive electrode, 6 is a gate electrode, 7 is a cathode electrode, 8 is a growth source film, 9 is a cold cathode electron source, 10 is an anode substrate, 11 is an insulator, 12 is an anode target, and 13 is an anode protective layer. DETAILED DESCRIPTION

[0046] The accompanying drawings are for illustrative purposes only and are not to be construed as limiting this patent;

[0047] In order to better illustrate this embodiment, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual product size;

[0048] It is understandable to those skilled in the art that some well-known structures and descriptions thereof may be omitted in the drawings.

[0049] The technical solution of the present invention is further described below with reference to the accompanying drawings and embodiments.

[0050] Example 1

[0051] This embodiment provides a wirelessly driven and addressed cold cathode flat panel X-ray source, such as Figure 1 Shown, including:

[0052] an anode substrate, the anode substrate comprising an anode target 12 and an anode electrode connected to the anode target 12;

[0053] A cathode substrate, wherein the cathode substrate includes a plurality of electron source units, wherein each electron source unit includes a wireless driving receiver 1 and a cold cathode electron source 9, and the wireless driving receiver 1 is connected to the cold cathode electron source 9;

[0054] an isolator 11, the isolator 11 being disposed between the anode substrate and the cathode substrate to maintain a preset distance between the anode substrate and the cathode substrate;

[0055] A plurality of wireless driving transmitters 4 , each of the wireless driving transmitters 4 corresponds to one wireless driving receiver 1 ;

[0056] A driving circuit, wherein the driving circuit is connected to the plurality of wireless driving transmitters 4 .

[0057] In this embodiment, a separator 11 is used between the anode target 12 and the cold cathode electron source 9 to maintain a certain distance between the cathode and anode. The cold cathode electron source 9 is connected to the wireless drive receiver 1. The cold cathode electron source 9 is pressurized and controlled by the wireless drive receiver 1 to emit electrons that bombard the anode target 12, thereby generating addressable X-rays.

[0058] In a further embodiment, the anode substrate further comprises an anode substrate 10 and an anode protection layer 13, wherein:

[0059] The anode target 12 and the anode electrode are disposed on the anode substrate 10 , and the anode protection layer 13 is disposed on the anode target 12 .

[0060] In a further embodiment, the anode target 12 is made of one or more metal films selected from tungsten, molybdenum, chromium, and aluminum.

[0061] In a further embodiment, the cathode substrate further comprises a cathode substrate 3, a gate electrode 6, a cathode electrode 7 and a growth source film 8, wherein:

[0062] The gate electrode 6 and the cathode electrode 7 are both provided on the cathode substrate 3 , and the wireless driving receiver 1 is connected to the gate electrode 6 and the cathode electrode 7 respectively;

[0063] The growth source film 8 is disposed on the cathode electrode 7;

[0064] The cold cathode electron source 9 is disposed on the growth source film 8 .

[0065] In a specific embodiment, the operation steps of the wirelessly driven addressed cold cathode flat panel X-ray source include the following steps:

[0066] 1) Use a high voltage power supply to apply voltage to the anode electrode, with a voltage range of 10 to 200 kV;

[0067] 2) Connecting the wireless drive transmitter 4 to the drive circuit causes the wireless receiver to generate a high-voltage, high-frequency AC signal, generating a voltage difference between the gate electrode 6 and the cathode electrode 7. The peak-to-peak voltage of the high-voltage, high-frequency AC signal is in the range of 20 to 200 V and the frequency is 100 kHz.

[0068] 3) The cold cathode electron source 9 emits electrons driven by a high-voltage, high-frequency AC signal. The electrons bombard the anode target 12 and radiate X-rays, thereby driving the luminescence;

[0069] 4) The driving circuit can control the electron source units at different positions on the array to emit light through the addressing programming program, thereby realizing addressing work.

[0070] Example 2

[0071] This embodiment, based on the first embodiment, further discloses the following technical contents:

[0072] The wireless driving receiver 1 is an inductor coil, a capacitor plate or a wireless driving circuit manufactured by micromachining technology.

[0073] In a further embodiment, the driving circuit provides voltage to drive the wireless driving transmitter 4 , and utilizes electromagnetic induction, electromagnetic waves or electrostatic effects to generate an induced voltage on the wireless driving receiver 1 , and then applies the voltage to the gate electrode 6 and the cathode electrode 7 .

[0074] In a further embodiment, the working distance between the wireless driving receiver 1 and the wireless driving transmitter 4 is 1-25 mm.

[0075] In a further embodiment, the intensity of the light emission is adjusted by controlling the voltage or duty cycle of the driving circuit.

[0076] In a further embodiment, the cold cathode electron source 9 is a quasi-one-dimensional nano cold cathode such as a Spindt-type cone, a carbon nanotube, a zinc oxide nanowire, or a copper oxide nanowire.

[0077] In a further embodiment, the light emitting addressing is performed by applying voltage through the wireless driving receiver 1, and the addressing modes include point addressing, row and column addressing, and coded addressing:

[0078] The point addressing mode is to light up each cold cathode electron source 9 individually, and control the voltage applied to the wireless driving receiver 1 of a single cold cathode electron source 9 by programming an external circuit, so as to realize lighting up a single unit or any multiple units simultaneously;

[0079] The row and column addressing mode means that each row or column of cold cathode electron sources 9 is lit, and the wireless driving receiver 1 of a single row or column of cold cathode electron sources 9 is controlled by external circuit programming to apply voltage, so that a single row or column of cold cathode electron sources 9 is lit at the same time;

[0080] The coded addressing mode means that the cold cathode electron source 9 is lit according to a specific coded arrangement. The voltage is applied to the wireless driving receiver 1 of a single cold cathode electron source 9 by programming an external circuit, so that the cold cathode electron sources 9 of any coded arrangement can be lit at the same time.

[0081] Example 3

[0082] This embodiment, based on Embodiment 1 and Embodiment 2, further discloses the following technical contents:

[0083] The wireless driver receiver 1 can be configured in any of the following ways:

[0084] 1) Parallel type: The wireless drive receiver 1 is arranged on the cathode substrate 3 and adjacent to the corresponding cold cathode electron source 9. In this case, an insulating layer 2 is provided between the substrate and the gate electrode 6 and cathode electrode 7. One end of the wireless drive receiver 1 is connected to the gate electrode 6 via a conductive electrode 5, and the other end is connected to the cathode electrode 7 via the conductive electrode 5 on the insulating layer 2.

[0085] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 2 and Figure 3 As shown, the wireless drive receiver 1 is fabricated next to the cold cathode electron source 9, forming a parallel structure. On the cathode substrate, one end of the wireless drive receiver 1 is directly connected to the gate electrode 6 via the conductive electrode 5, while the other end is connected to the cathode electrode 7 on the conductive electrode 5 of the insulating layer 2. By turning on the external circuit voltage output, electromagnetic induction is used to reach the electron source turn-on voltage, achieving addressable light emission.

[0086] 2) Top-bottom type: The wireless drive receiver 1 is arranged on the other side of the cathode substrate 3 opposite to the gate electrode 6 and the cathode electrode 7, and opposite to the corresponding cold cathode electron source 9. In this case, an insulating layer 2 is provided between the substrate and the gate electrode 6 and the cathode electrode 7. The two ends of the wireless drive receiver 1 are connected to the gate electrode 6 and the cathode electrode 7 respectively through the conductive electrodes 5 on the insulating layer 2;

[0087] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 4 and Figure 5 As shown, the wireless drive receiver is fabricated on the underside of the electron source, forming a top-and-bottom structure. Within the insulating layer 2, the two ends of the wireless drive receiver are connected to the cold cathode electrode 7 via the conductive electrode 5. By turning on the external circuit voltage output, electromagnetic induction is used to reach the electron source turn-on voltage, achieving addressable luminescence.

[0088] 3) Overlap type: the central port of the wireless driving receiver 1 is arranged to overlap with the cathode electrode 7, and the other end of the wireless driving receiver 1 is directly connected to the gate electrode 6;

[0089] In a specific embodiment, the inductor coil is used as the wireless driving receiver 1 as an example. Figure 6 and Figure 7 As shown, a cathode electrode 7 is fabricated directly on the cathode substrate 3 at the center port of the wireless driver receiver 1. The other end of the wireless driver receiver 1 is connected to the cold cathode gate electrode 6. By activating the external circuit voltage output, electromagnetic induction is used to reach the electron source turn-on voltage, achieving addressable luminescence. The overlapping structural unit is simple, eliminating the insulating layer 2 and conductive electrode 5 structures.

[0090] The same or similar reference numerals correspond to the same or similar components;

[0091] The terms used in the drawings to describe positional relationships are for illustrative purposes only and should not be construed as limiting this patent;

[0092] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the claims of the present invention.

Claims

1. A wirelessly driven and addressed cold cathode flat panel X-ray source, characterized in that: include: an anode substrate, the anode substrate comprising an anode target and an anode electrode connected to the anode target; a cathode substrate, the cathode substrate comprising a plurality of electron source units, wherein each electron source unit comprises a wireless driving receiver and a cold cathode electron source, the wireless driving receiver being connected to the cold cathode electron source; an isolator, the isolator being disposed between the anode substrate and the cathode substrate to maintain a preset distance between the anode substrate and the cathode substrate; A plurality of wireless drive transmitters, each of which corresponds to one wireless drive receiver; a driving circuit connected to the plurality of wireless driving transmitters; The cathode substrate further comprises a cathode substrate, a gate electrode, a cathode electrode and a growth source film, wherein: The gate electrode and the cathode electrode are both provided on the cathode substrate, and the wireless driving receiver is connected to the gate electrode and the cathode electrode respectively; The growth source film is arranged on the cathode electrode; The cold cathode electron source is arranged on the growth source film.

2. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The anode substrate further comprises an anode substrate and an anode protection layer, wherein: The anode target and the anode electrode are arranged on the anode substrate, and the anode protection layer is arranged on the anode target.

3. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The anode target is made of one or more metal films selected from tungsten, molybdenum, chromium and aluminum.

4. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The wireless driving receiver is one of an inductor coil, a capacitor plate or a wireless driving circuit manufactured by a micromachining process.

5. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 4, characterized in that: The driving circuit provides a voltage to drive the wireless driving transmitter, and utilizes electromagnetic induction, electromagnetic waves or electrostatic effects to generate an induced voltage on the wireless driving receiver, and then applies the voltage to the gate electrode and the cathode electrode.

6. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 5, characterized in that: The working distance between the wireless driving receiver and the wireless driving transmitter is 1-25 mm.

7. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 6, characterized in that: The intensity of the light emission is adjusted by controlling the voltage or duty cycle of the driving circuit.

8. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 7, characterized in that: The voltage is applied by the wireless driving receiver to perform light-emitting addressing. The addressing methods include point addressing, row and column addressing, and coding addressing: The point addressing mode is to light up each cold cathode electron source individually, and to control the voltage applied to the wireless driving receiver of a single cold cathode electron source through programming of an external circuit, so as to realize lighting up a single unit or any multiple units simultaneously; The row-column addressing mode means that each row or column of cold cathode electron sources is lit, and a voltage is applied to the wireless driving receiver of a single row or column of cold cathode electron sources by programming an external circuit to control the cold cathode electron sources at the same time. The coded addressing mode means that the cold cathode electron sources are lit according to a specific coded arrangement. The voltage is applied to the wireless driving receiver of a single cold cathode electron source by programming an external circuit, so that the cold cathode electron sources of any coded arrangement can be lit simultaneously.

9. The wirelessly driven and addressed cold cathode flat panel X-ray source according to claim 1, characterized in that: The wireless driver receiver can be set up in any of the following ways: 1) Parallel type: The wireless drive receiver is arranged on the cathode substrate and adjacent to the corresponding cold cathode electron source. In this case, an insulating layer is provided between the substrate and the gate electrode and cathode electrode. One end of the wireless drive receiver is connected to the gate electrode via a conductive electrode, and the other end is connected to the cathode electrode via a conductive electrode on the insulating layer. 2) Top-bottom type: The wireless drive receiver is disposed on the other side of the cathode substrate opposite the gate electrode and cathode electrode, and opposite the corresponding cold cathode electron source. In this case, an insulating layer is disposed between the substrate and the gate electrode and cathode electrode, and the two ends of the wireless drive receiver are connected to the gate electrode and cathode electrode respectively through conductive electrodes on the insulating layer; 3) Overlap type: the central port of the wireless driving receiver is arranged to overlap with the cathode electrode, and the other end of the wireless driving receiver is directly connected to the gate electrode.

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