Nozzle mechanism, evaporation crucible and evaporation device
By designing a nozzle mechanism with switching components, the problem of nozzle blockage during vacuum evaporation is solved, and production continuity is achieved without shutdown and replacement in the case of blockage, and the stability and production efficiency of coating speed are improved.
Patent Information
- Application Number
- CN202510025223.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-07
- Publication Date
- 2025-03-28
AI Technical Summary
During the vacuum deposition process, existing nozzle mechanisms are easily blocked due to the vapor cooling and condensation of the deposition material, resulting in unstable coating speed. In the case of hole blocking, it needs to be shut down and replaced and cleaned, which affects production efficiency.
A nozzle mechanism including a connecting assembly, a plurality of nozzles and a switching assembly is designed, the passageway is arranged in a space for the vapor deposition material to enter, each nozzle is provided with a vent hole, and the switching assembly can selectively communicate the passageway with the plurality of vent holes. When the nozzle is blocked, the switch assembly disconnects the blocked air jet holes and communicates other air jet holes with the passage to ensure that the evaporated material continues to be sprayed.
It realizes no need to shut down the machine when the nozzle is blocked, so as to ensure the continuous progress of the vacuum evaporation process and the stability of the coating speed, improves production efficiency, and effectively extends the evaporation time after a single feeding, reducing the occurrence of abnormal evaporation.
Smart Images
Figure CN119710566A_ABST
Abstract
Description
Technical Field
[0001] The embodiments of the present disclosure relate to, but are not limited to, the field of display technology, and specifically relate to a nozzle mechanism, an evaporation crucible, and an evaporation device. Background Art
[0002] Organic Light-Emitting Diode (OLED) is a display lighting technology that has gradually developed in recent years. Especially in the display industry, OLED display is considered to have broad application prospects due to its advantages such as high response, high contrast, and flexibility.
[0003] OLED devices can be formed on substrates by using an evaporation process. Evaporation refers to heating a crucible under certain vacuum conditions to melt (or sublimate) the evaporation material in the crucible into a vapor composed of atoms, molecules or atomic groups, which is finally deposited on the surface of the substrate through a nozzle to form a film, thereby forming the functional layer of the OLED device. Summary of the invention
[0004] The following is a summary of the subject matter of the detailed description of the present disclosure. This summary is not intended to limit the scope of the claims.
[0005] The present disclosure provides a nozzle mechanism, comprising: A connecting component is provided with a channel, wherein the channel is configured to have a space for the vapor of the evaporation material to enter; A plurality of nozzles are disposed on the connection assembly, each of the nozzles is provided with an air injection hole; and The switching assembly is connected to at least one of the connecting assembly and the nozzle, and is configured to selectively connect the channel to at least one of the plurality of injection holes.
[0006] In some embodiments of the nozzle mechanism, the connection assembly includes a base and a connection member, and the base and the connection member are fixedly connected or rotatably connected; The channel extends from the base to the connecting member; The plurality of nozzles are disposed on the connecting member.
[0007] In some embodiments of the nozzle mechanism, axial directions of at least two of the plurality of air jet holes intersect; The connecting member rotates relative to the base around a first direction, and the plurality of air injection holes are symmetrically arranged around the first direction; or The connecting member can rotate relative to the base in any direction.
[0008] In some embodiments of the nozzle mechanism, the connecting member includes an outer wall, and the outer wall is located on the first spherical surface; The base has a fitting surface fitted with the outer wall, and the fitting surface is arranged around the outer wall; The fitting surface is located on the second spherical surface, and the centers of the first spherical surface and the second spherical surface coincide with each other.
[0009] In some embodiments of the nozzle mechanism, the channel includes a plurality of first openings, and the plurality of first openings are coaxially arranged in a one-to-one correspondence with the plurality of air injection holes; The switching component is configured to selectively open at least one of the plurality of first openings.
[0010] In some embodiments of the nozzle mechanism, the connecting member further comprises an inner wall, the inner wall is located on a third spherical surface, and the centers of the first spherical surface and the third spherical surface coincide with each other; The vertical distances from the center of the circle to the planes where the multiple first openings are located are all equal.
[0011] In some embodiments of the nozzle mechanism, the first mouth is circular or elliptical; and / or A plane where one of the plurality of first openings is located is spaced apart from the other first openings.
[0012] In some embodiments of the nozzle mechanism, the connecting member further comprises a first shell and a second shell which are symmetrically arranged, and the first shell and the second shell are connected to form the inner wall and the outer wall; The channel further includes a second opening communicating with the plurality of first openings, the second opening being located on a symmetric plane between the first shell and the second shell, and the first opening being circular; The diameter of the second opening is less than or equal to d, and the diameter of the first opening is less than or equal to 1 / √2 d, wherein d is any value greater than zero.
[0013] In some embodiments of the nozzle mechanism, the outer diameter of a cross section of the nozzle perpendicular to its axial direction is less than or equal to √2 r, where r is the radius of the outer wall.
[0014] The present disclosure also provides an evaporation crucible, comprising: The dry pot body is provided with at least one accommodating cavity, wherein the accommodating cavity is configured to have a space for accommodating the evaporation material; and At least one nozzle mechanism as described above, the at least one connecting assembly is arranged on the dry pot body and is connected with the at least one accommodating cavity through the channel in a one-to-one correspondence.
[0015] The embodiment of the present disclosure further provides an evaporation device, comprising the evaporation crucible as described above.
[0016] The nozzle mechanism of the above scheme is applied to the evaporation crucible and the evaporation device. In addition to enabling the evaporation crucible and the evaporation device to have excellent evaporation material vapor injection efficiency, it can also switch to a new nozzle in time after the nozzle is blocked, so as to avoid the impact of replacement and cleaning after abnormal blockage on production. Specifically, the nozzle mechanism includes a connecting component provided with a channel, a plurality of nozzles provided on the connecting component, and a switching component connected to the connecting component and at least one of the nozzles. The channel is configured to have a space for the vapor of the evaporation material to enter. Each of the nozzles is provided with an air jet hole. The switching component is configured to selectively connect the channel to at least one of the plurality of air jet holes. During the vacuum evaporation process, one or several of the air jet holes can be connected to the channel to eject the vapor of the evaporation material, and the remaining air jet holes can be disconnected from the channel. After the nozzle is blocked, the jet hole corresponding to the nozzle can be disconnected from the channel, and one of the remaining jet holes can be connected to the channel to eject the vapor of the evaporation material. This can avoid stopping the machine to open the chamber for nozzle replacement and cleaning before the single evaporation is completed, which affects the production effect and efficiency, and ensures the continuity of the vacuum evaporation process and the stability of the coating speed. In addition, the connection and disconnection status between the multiple jet holes and the channel can also be switched regularly, effectively extending the evaporation time after a single feeding and reducing the occurrence of abnormal blockage.
[0017] Other features and advantages of the present disclosure will be described in the following description, and partly become apparent from the description, or be understood by implementing the present disclosure. Other advantages of the present disclosure can be realized and obtained by the schemes described in the description and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] The accompanying drawings are used to provide an understanding of the technical solution of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the technical solution of the present disclosure and do not constitute a limitation on the technical solution of the present disclosure.
[0019] Figure 1 It is a structural schematic diagram of an evaporation crucible in the related art; Figure 2 A schematic diagram of a vacuum evaporation process in an embodiment of the present disclosure; Figure 3 It is a structural schematic diagram of a nozzle mechanism in an embodiment of the present disclosure; Figure 4 It is a structural schematic diagram of a nozzle mechanism in another embodiment of the present disclosure; Figure 5 for Figure 4 A schematic diagram of the nozzle mechanism after the base and the connecting member are separated; Figure 6 for Figure 4A cross-sectional view of the nozzle and the connecting assembly of the nozzle mechanism shown after assembly, wherein the cross section passes through the first direction and the axis of each jet hole; Figure 7 This is a structural schematic diagram of a nozzle mechanism in yet another embodiment of the present disclosure; Figure 8 This is a structural schematic diagram of a nozzle mechanism in yet another embodiment of the present disclosure; Fig. 9 This is a structural schematic diagram of a nozzle mechanism in yet another embodiment of the present disclosure; Fig.10 Schematic diagram of the vacuum evaporation process in another embodiment of the present disclosure.
[0020] Description of reference numerals: 10`, nozzle mechanism; 10. Dry pot body; 11. Shell; 12. Cover; 20. Nozzle mechanism; 21. Connecting assembly; 211. Base; 2111. Fitting surface; 212. Connector; 2121. Outer wall; 2122. Inner wall; 2123. First shell; 2124. Second shell; 213. Threaded surface; 22. Nozzle; 30. Mask plate; 40. Base plate; 50. Insulating layer; 100. Accommodating cavity; 200. Channel; 201. First mouth; 202. Second mouth; 300. Jet hole; 400. First air inlet; 500. Second air inlet. DETAILED DESCRIPTION
[0021] The present disclosure describes multiple embodiments, but the description is exemplary rather than restrictive, and it is obvious to those skilled in the art that there may be more embodiments and implementations within the scope of the embodiments described in the present disclosure. Although many possible feature combinations are shown in the drawings and discussed in the specific embodiments, many other combinations of the disclosed features are also possible. Unless specifically limited, any feature or element of any embodiment may be used in combination with any other feature or element in any other embodiment, or may replace any other feature or element in any other embodiment.
[0022] The present disclosure includes and contemplates combinations of features and elements known to those of ordinary skill in the art. The disclosed embodiments, features, and elements of the present disclosure may also be combined with any conventional features or elements to form a unique invention scheme. Any features or elements of any embodiment may also be combined with features or elements from other invention schemes to form another unique invention scheme. Therefore, it should be understood that any feature shown and / or discussed in the present disclosure may be implemented individually or in any appropriate combination. Therefore, except for the limitations made according to the attached claims and their equivalents, the embodiments are not subject to other restrictions. In addition, various modifications and changes may be made within the scope of protection of the attached claims.
[0023] In addition, when describing representative embodiments, the specification may have presented the method and / or process as a specific sequence of steps. However, to the extent that the method or process does not rely on the specific order of the steps described in the present disclosure, the method or process should not be limited to the steps in the specific order described. As will be understood by those of ordinary skill in the art, other orders of steps are also possible. Therefore, the specific order of the steps set forth in the specification should not be interpreted as a limitation on the claims. In addition, the claims for the method and / or process should not be limited to the steps performed in the order written, and those skilled in the art can easily understand that these orders can be changed and still remain within the spirit and scope of the embodiments of the present disclosure.
[0024] The main function of the nozzle mechanism is to eject the vapor of the evaporation material from the evaporation crucible, so as to achieve uniformity of the doping ratio during the vacuum evaporation process, thereby improving the performance of the device structure. In the vacuum evaporation process, the design of the nozzle mechanism is crucial to ensure the stability and efficiency of the coating process, and is an indispensable and important part of it. A good nozzle mechanism design is conducive to ensuring the uniformity of the doping ratio, thereby improving the performance of the device structure.
[0025] However, the nozzle mechanism in the related art has the problem of nozzle blockage: during the vacuum evaporation process, the evaporation material evaporates at high temperature, but if the nozzle mechanism is not designed properly, the vapor of the evaporation material is easy to cool down and condense at the nozzle mechanism, which will not only block the nozzle mechanism and affect the normal supply of the material, but also cause the coating speed to be unstable. This situation is particularly obvious during the vacuum evaporation process of high-melting-point materials, because high-melting-point materials evaporate more slowly and are more likely to accumulate and condense at the nozzle mechanism. If the hole is blocked before the end of a single evaporation, the cavity needs to be opened and replaced, which affects the production effect and efficiency.
[0026] Please combine Figure 2 and Fig.10The embodiment of the present disclosure discloses an evaporation crucible, which includes a dry pot body 10 and at least one nozzle mechanism 20. The dry pot body 10 is provided with at least one accommodating cavity 100. The accommodating cavity 100 is configured to have a space for accommodating evaporation materials. The dry pot body 10 includes an outer shell 11 and a cover 12. An opening is provided at the upper end of the outer shell 11. The cover 12 can cover the opening and enclose the outer shell 11 to form at least one accommodating cavity 100.
[0027] Please combine Figures 3 to 9 The nozzle mechanism 20 includes a connecting component 21, a plurality of nozzles 22 and a switching component. The connecting component 21 is provided with a channel 200, and the channel 200 is provided with a space for the vapor of the evaporation material to enter. The plurality of nozzles 22 are provided in the connecting component 21. Each nozzle 22 is provided with an air jet hole 300. The switching component is connected to at least one of the connecting component 21 and the nozzle 22, and is configured to selectively connect the channel 200 with at least one of the plurality of air jet holes 300.
[0028] At least one connecting component 21 is arranged on the dry pot body 10, and is connected to at least one accommodating cavity 100 through a channel 200 in a one-to-one correspondence. The vapor of the evaporation material is generated in the accommodating cavity 100 and enters the corresponding connecting component 21 through the channel 200. The switching component selectively connects at least one of the multiple jet holes 300 with the channel 200, so that the vapor of the evaporation material can be ejected from the nozzle 22 and deposited on the substrate 40 through the mask plate 30 to form a film layer. The switching component can select the number of jet holes 300 connected to the channel 200 according to the evaporation requirements. In the embodiment of the present disclosure, the number of accommodating cavities 100 is multiple. The evaporation materials contained in the multiple accommodating cavities 100 can be the same, partially the same, or completely different. The number of nozzles 22 can be more than two.
[0029] The nozzle mechanism 20 of the above scheme is applied to the evaporation crucible. In addition to making the evaporation crucible have excellent evaporation material vapor injection efficiency, it can also switch to a new nozzle 22 in time after the nozzle 22 is blocked, so as to avoid the influence of replacement and cleaning after abnormal blockage on production. Specifically, the nozzle mechanism 20 includes a connecting component 21 provided with a channel 200, a plurality of nozzles 22 provided on the connecting component 21, and a switching component connected to at least one of the connecting component 21 and the nozzle 22. Among them, the channel 200 is configured to have a space for the vapor of the evaporation material to enter. Each nozzle 22 is provided with an air jet 300. The switching component is configured to selectively connect the channel 200 to at least one of the plurality of air jets 300. During the vacuum evaporation process, one or several of the air jets 300 can be connected to the channel 200 to eject the vapor of the evaporation material, and the remaining air jets 300 are disconnected from the channel 200. After the nozzle 22 is blocked, the jet hole 300 corresponding to the nozzle 22 can be disconnected from the channel 200, and one of the remaining jet holes 300 can be connected to the channel 200 to eject the vapor of the evaporation material. This can avoid stopping the machine to open the chamber for replacement and cleaning of the nozzle 22 before a single evaporation is completed, which affects the production effect and efficiency, and ensures the continuity of the vacuum evaporation process and the stability of the coating speed. In addition, the connection and disconnection states between multiple jet holes 300 and the channel 200 can also be switched regularly, effectively extending the evaporation time after a single feeding and reducing the occurrence of abnormal blockage.
[0030] In the exemplary embodiment, please combine Figures 2 to 10 The connecting component 21 includes a base 211 and a connecting piece 212, and the base 211 and the connecting piece 212 are fixedly connected. Among them, the fixed connection method includes but is not limited to welding or one-piece molding. The base 211 is arranged on the dry pot body 10, and can be fixed to the cover body 12 or detachably connected to the cover body 12. Among them, the fixing method includes but is not limited to welding or one-piece molding. The detachable connection method includes but is not limited to threaded connection, plug-in, snap-on or magnetic connection. The base 211 is arranged on the dry pot body 10, and the sealing between the base 211 and the dry pot body 10 needs to be ensured to prevent the vapor of the evaporation material from leaking from between the base 211 and the dry pot body 10. Figure 7 , Figure 8 and Fig. 9 As shown, the circumferential outer wall of the base 211 is provided with a threaded surface 213 , and is detachably connected to the cover body 12 via the threaded surface 213 .
[0031] The base 211 and the connecting member 212 are rotatably connected. The base 211 and the connecting member 212 can be rotatably connected in a variety of ways. For example, the base 211 and the connecting member 212 can be provided with a slideway and a slider respectively, and the rotatable connection is achieved by the cooperation of the slideway and the slider. The base 211 and the connecting member 212 can also be rotatably connected through a bearing. The connecting member 212 can be provided with a driving mechanism to drive the connecting member 212 to rotate relative to the base 211. The driving mechanism can be, but is not limited to, a gear driving mechanism or a chain transmission mechanism. Among them, the gear driving mechanism may include a driving unit and a gear assembly. The gear assembly includes a first gear and a second gear that mesh with each other. The first gear is provided at the output end of the driving unit. The second gear is arranged around the circumferential outer wall of the connecting member 212. The driving unit drives the first gear to rotate, and then drives the connecting member 212 to rotate relative to the base 211 through the second gear. The chain transmission mechanism may include a driving unit, a chain and a gear. The gear is arranged around the circumferential outer wall of the connecting member 212. The chain is sequentially sleeved on the output end and gear of the driving unit, and is tightened under the action of the output end and gear of the driving unit. The chain is meshed with the output end and gear of the driving unit respectively. When the driving unit is turned on, the driving chain moves around the output end and gear of the driving unit, and drives the connecting member 212 to rotate relative to the base 211 through the gear. In addition, in some embodiments, the base 211 and the connecting member 212 are fixedly connected, and the base 211 can be rotatably connected to the cover body 12. Similarly, the base 211 can also be provided with the above-mentioned driving mechanism to drive the base 211 to rotate relative to the cover body 12.
[0032] The channel 200 extends from the base 211 to the connecting member 212 , and a first air inlet hole 400 and a second air inlet hole 500 may be formed on the base 211 and the connecting member 212 .
[0033] Multiple nozzles 22 are disposed on the connector 212. In the disclosed embodiment, the base 211 and the connector 212 are sequentially disposed in a direction perpendicular to the cover 12, so that the nozzles 22 can be exposed from the cover 12 and can be close to the substrate 40, which is conducive to more evaporation material being deposited on the substrate 40.
[0034] The design of the nozzle mechanism 10' in the related art still has many shortcomings, such as Figure 1 As shown. In the related art, the nozzle mechanism 10' has only one fixed direction, and the evaporation angle is adjusted by installing an angle plate above the evaporation crucible. If the process parameters such as the evaporation angle need to be adjusted, the angle plate needs to be readjusted, which has a certain impact on production efficiency. In the embodiment of the present disclosure, the evaporation angle of the nozzle 22 can be adjusted by rotating the connecting member 212 relative to the base 211 and / or the base 211 relative to the cover 12, avoiding the need to readjust the angle plate, thereby improving production efficiency.
[0035] In the exemplary embodiment, please combine Figures 2 to 10 , the axial directions of at least two of the plurality of jet holes 300 intersect, so that when the positions of the plurality of jet holes 300 do not rotate, the nozzle mechanism 20 can have a variety of evaporation angles to meet different evaporation requirements. In the embodiment of the present disclosure, the axial directions of the plurality of jet holes 300 all intersect.
[0036] The connecting member 212 rotates relative to the base 211 around the first direction, and the multiple jet holes 300 are symmetrically arranged around the first direction, that is, the multiple jet holes 300 can rotate 360 degrees around the first direction. In this way, the nozzle mechanism 20 can have a variety of evaporation angles, and the nozzles 22 can replace each other. After the original nozzle 22 is blocked, the new nozzle 22 can rotate to the position of the original nozzle 22 and have the same evaporation angle as the original nozzle 22, ensuring the consistency of the evaporation effect before and after the nozzle 22 is switched. Among them, the first direction is perpendicular to the direction of the cover body 12 and parallel to Figure 2 and Fig.10 The arrow X in the middle points to the direction.
[0037] In the exemplary embodiment, please combine Figures 2 to 10 , the connecting member 212 rotates relative to the base 211 in any direction, so that the connecting member 212 can rotate in any direction intersecting with the first direction in addition to rotating in the first direction, so that the connecting member 212 and the base 211 form a universal connection, which can flexibly rotate relative to each other in three-dimensional space. In this way, the evaporation angle range of the nozzle mechanism 20 can be further increased, and the continuous adjustment of the evaporation angle can be achieved. The connecting member 212 can be provided with a driving mechanism to drive the connecting member 212 to rotate relative to the base 211 in any direction. The driving mechanism can be but not limited to a push rod hinge mechanism. The push rod hinge mechanism includes a plurality of push rods. One end of the push rod can be hinged to the cover body 12, and the other end can be hinged to the connecting member 212. A plurality of push rods are arranged around the connecting member 212, and the connecting member 212 is driven to rotate relative to the base 211 in any direction by changing the telescopic amount of the push rod. The push rod can be but not limited to an electric push rod, a hydraulic push rod or a pneumatic push rod.
[0038] In the exemplary embodiment, please combine Figure 5 and Figure 6, the connecting member 212 includes an outer wall 2121. The outer wall 2121 is located on the first spherical surface. The base 211 has a fitting surface 2111 that fits with the outer wall 2121, and the fitting surface 2111 is arranged around the outer wall 2121. The fitting surface 2111 is located on the second spherical surface, and the centers of the first spherical surface and the second spherical surface coincide. In this way, the connection surface area between the connecting member 212 and the base 211 can be increased by setting the fitting surface 2111, so that the connecting member 212 can rotate relative to the base 211 under the restriction of the fitting surface 2111, thereby improving the stability of the rotation of the connecting member 212 relative to the base 211. In the embodiment of the present disclosure, the fitting surface 2111 is bowl-shaped, and the diameter of the opening at the end away from the cover body 12 is equal to or smaller than the diameter of the outer wall 2121, so as to facilitate the separation of the connecting member 212 from the base 211 and to facilitate the replacement of the type of the nozzle 22. The type of the nozzle 22 can be changed by, but not limited to, changing the inner edge shape and outer edge shape of the cross section of the nozzle 22 perpendicular to its axial direction, changing the size of the jet hole 300 along its axial direction, or changing the flow area of the jet hole 300. In addition, in some embodiments, the fitting surface 2111 is annular, and the diameter of the opening at the end away from the cover body 12 and the diameter of the opening at the end close to the cover body 12 are both smaller than the diameter of the outer wall 2121, so that the fitting surface 2111 can limit the connector 212 to prevent the connector 212 from separating from the base 211.
[0039] In an exemplary embodiment, Figure 6 As shown, the channel 200 includes a plurality of first openings 201 , which are coaxially arranged one by one with a plurality of gas injection holes 300 , so that the vapor of the evaporation material can enter the gas injection holes 300 more evenly, thereby ensuring the uniformity of the vapor ejected from the gas injection holes 300 .
[0040] The switching assembly is configured to selectively open at least one of the plurality of first openings 201. By controlling the opening and closing of the first opening 201, the connection and disconnection of the jet hole 300 and the channel 200 can be controlled, thereby ensuring the reliability of controlling the connection and disconnection of the jet hole 300 and the channel 200.
[0041] In an exemplary embodiment, if Figure 6 As shown, the connector 212 also includes an inner wall 2122, and the inner wall 2122 is located on the third spherical surface, and the centers of the first spherical surface and the third spherical surface coincide. The vertical distances from the center of the circle to the planes where the multiple first openings 201 are located are all equal. In this way, the shapes of the first openings 201 are all the same, and the distances from the center of the circle to each first opening 201 are all the same, so that the distances of the vapor of the evaporation material flowing to each first opening 201 are all equal, ensuring that the flow rates of the vapor of the evaporation material entering each jet hole 300 and ejected from each jet hole 300 are the same, reducing the differences when switching the nozzle 22, and further ensuring the consistency of the evaporation effect before and after the nozzle 22 is switched.
[0042] In the disclosed embodiment, the first opening 201 is circular, that is, each first opening 201 is located on a plane perpendicular to the radial direction of the connecting member 212. The first opening 201 may also be elliptical, that is, the plane where each first opening 201 is located is not perpendicular to the radial direction of the connecting member 212.
[0043] The plane where one of the plurality of first openings 201 is located is spaced apart from the other first openings 201. In this way, each first opening 201 is relatively independent and isolated from each other on the connecting member 212, so that the switching component cooperates with the connecting member 212 to control the opening and closing of the first opening 201.
[0044] The switching assembly includes a plurality of movable parts, which are movably arranged on a plurality of first openings 201 in a one-to-one correspondence, and the corresponding first openings 201 are opened or closed. The movable part can be slidably connected to the connecting member 212, and the corresponding first opening 201 is opened and closed by sliding relative to the connecting member 212. For example, the connecting member 212 is provided with a slide groove, which runs through the connecting member 212 and communicates with the corresponding first opening 201, and the movable part is slidably connected to the slide groove, and partially exposed to the connecting member 212, and connected to the driving unit (for example, a push rod). Under the drive of the driving unit, the movable part can slide relative to the slide groove to open and close the corresponding first opening 201. In addition, the movable part can also be hinged with the connecting member 212, and the corresponding first opening 201 is opened and closed by rotating relative to the connecting member 212. In addition, in some embodiments, the movable part can also be a paddle switch, and the corresponding first opening 201 is opened and closed by toggling the paddle switch.
[0045] The movable member is planar and parallel to the plane where the corresponding first opening 201 is located. Correspondingly, the slide groove arranged on the connecting member 212 is linear.
[0046] The movable member is in the shape of an arc surface, and the spherical surface where the movable member is located coincides with the center of the first spherical surface. Correspondingly, the sliding groove arranged on the connecting member 212 is in the shape of an arc.
[0047] In the exemplary embodiment, please combine Figure 5 and Figure 6 The connecting member 212 further includes a first shell 2123 and a second shell 2124 which are symmetrically arranged. The first shell 2123 and the second shell 2124 are connected to form an inner wall 2122 and an outer wall 2121. The first shell 2123 and the second shell 2124 can be integrally formed or connected by welding.
[0048] The channel 200 further includes a second opening 202 connected to the plurality of first openings 201, and the second opening 202 is located on a symmetric plane between the first shell 2123 and the second shell 2124, so that the second opening 202 is the maximum size position of the space surrounded by the inner wall 2122. The first opening 201 is circular, that is, each first opening 201 is located on a plane perpendicular to the radial direction of the connecting member 212.
[0049] The diameter of the second opening 202 is less than or equal to d, and the diameter of the first opening 201 is less than or equal to 1 / √2 d, where d is any value greater than zero.
[0050] The cross section of the first opening 201 perpendicular to its axial direction is the same as the cross section of the jet hole 300 perpendicular to its axial direction, so that after the evaporation material vapor enters the jet hole 300 from the first opening 201, its flow area does not change and can be smoothly and evenly ejected from the jet hole 300.
[0051] The cross section of the nozzle 22 perpendicular to its axial direction is annular, and multiple nozzles 22 are arranged at intervals in the connecting component 21. In this way, the multiple nozzles 22 are independent of each other, and the vapor of the evaporation material has the same cooling environment at the position of the nozzle 22 without being affected by other nozzles 22. In the embodiment of the present disclosure, the nozzle 22 at least partially protrudes from the connecting member 212. At this time, the distribution of the multiple nozzles 22 in the connecting member 212 needs to consider that within the preset range of rotation of the connecting member 212 relative to the base 211, the multiple nozzles 22 do not interfere with the base 211. In addition, in some embodiments, the nozzle 22 can also be embedded in the first mouth 201. The distribution of the multiple nozzles 22 in the connecting member 212 needs to consider that within the preset range of rotation of the connecting member 212 relative to the base 211, the first mouth 201 that needs to be opened at the same time is not blocked by the base 211.
[0052] In an exemplary embodiment, if Figure 6 As shown, the outer diameter of the cross section of the nozzle 22 perpendicular to its axial direction is less than or equal to √2 r, where r is the radius of the outer wall 2121.
[0053] like Figure 2 As shown, the base 211 can be a hemispherical structure, and can be integrally formed with the connector 212 to form a spherical structure. The base 211 can be fixedly connected to the cover 12 or can rotate relative to the cover 12 in any direction.
[0054] like Figures 3 to 9 As shown, the base 211 may be a cylindrical structure. The base 211 may be fixedly connected to the cover 12 or may rotate relative to the cover 12 around a first direction.
[0055] In addition, in some embodiments, the base 211 may also be in other regular shaped structures or irregular shaped structures. Or the base 211 may also be in the shape of a combination of two regular shaped structures, for example, the base 211 may also be in the shape of a combination of a hemispherical structure and a cylindrical structure, the cylindrical structure is arranged on the cover 12, and the hemispherical structure is arranged at one end of the cylindrical structure away from the cover 12 and connected to the connector 212. The base 211 may be arranged on the surface of the cover 12 away from the housing 11. The base 211 may also be embedded in the cover 12. Fig.10 As shown, the outer wall 2121 of the dry pot body 10 is also wrapped with a heat preservation layer 50, which is configured to keep the dry pot body 10 warm. The connecting component 21 is penetrated through the heat preservation layer 50 and connected to the cover 12.
[0056] The present disclosure also provides an evaporation device, including the evaporation crucible of the above embodiment. The evaporation device may also include a heating mechanism, etc. The heating mechanism is configured to heat the evaporation crucible to melt (or sublimate) the evaporation material into vapor composed of atoms, molecules or atomic groups.
[0057] In the description of the present disclosure, it needs to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present disclosure.
[0058] In addition, the terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include at least one of the features.
[0059] In the description of the present disclosure, “plurality” means at least two, for example, two, three, etc., unless otherwise clearly and specifically defined.
[0060] In the present disclosure, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.
[0061] In the present disclosure, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0062] In this specification, "electrical connection" includes the case where components are connected together through an element having some electrical function. There is no particular limitation on the "element having some electrical function" as long as it can transmit and receive electrical signals between the connected components. Examples of "element having some electrical function" include not only electrodes and wiring, but also switching elements such as transistors, resistors, inductors, capacitors, and other elements having various functions.
[0063] In this specification, "parallel" means a state where the angle formed by two straight lines is greater than -10° and less than 10°, and therefore, also includes a state where the angle is greater than -5° and less than 5°. In addition, "perpendicular" means a state where the angle formed by two straight lines is greater than 80° and less than 100°, and therefore, also includes a state where the angle is greater than 85° and less than 95°.
[0064] In this specification, the shapes of circle, ellipse, rectangle, triangle, trapezoid, pentagon or hexagon are not in the strict sense, but may be approximate to circle, ellipse, rectangle, triangle, trapezoid, pentagon or hexagon, etc. There may be some small deformation due to tolerance, and there may be chamfers, arc edges and deformation.
[0065] The term "about" in the present disclosure refers to a numerical value that is not strictly limited to allow for process and measurement errors.
[0066] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.
[0067] Although the embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present disclosure. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present disclosure.
Claims
1. A nozzle mechanism, characterized in that: include: A connecting component is provided with a channel, wherein the channel is configured to have a space for the vapor of the evaporation material to enter; A plurality of nozzles are arranged on the connecting assembly, each of the nozzles is provided with an air injection hole; and The switching assembly is connected to at least one of the connecting assembly and the nozzle, and is configured to selectively connect the channel to at least one of the plurality of injection holes.
2. The nozzle mechanism according to claim 1, characterized in that: The connecting assembly comprises a base and a connecting piece, and the base and the connecting piece are fixedly connected or rotatably connected; The channel extends from the base to the connecting member; The plurality of nozzles are disposed on the connecting member.
3. The nozzle mechanism according to claim 2, characterized in that: The axial directions of at least two of the plurality of gas injection holes intersect; The connecting member rotates relative to the base around a first direction, and the plurality of air injection holes are symmetrically arranged around the first direction; or The connecting member can rotate relative to the base in any direction.
4. The nozzle mechanism according to claim 3, characterized in that: The connecting member comprises an outer wall, and the outer wall is located on the first spherical surface; The base has a fitting surface fitted with the outer wall, and the fitting surface is arranged around the outer wall; The fitting surface is located on the second spherical surface, and the centers of the first spherical surface and the second spherical surface coincide with each other.
5. The nozzle mechanism according to claim 4, characterized in that: The channel comprises a plurality of first openings, and the plurality of first openings are coaxially arranged in a one-to-one correspondence with the plurality of gas injection holes; The switching component is configured to selectively open at least one of the plurality of first openings.
6. The nozzle mechanism according to claim 5, characterized in that: The connecting member further comprises an inner wall, the inner wall is located on a third spherical surface, and the centers of the first spherical surface and the third spherical surface coincide with each other; The vertical distances from the center of the circle to the planes where the multiple first openings are located are all equal.
7. The nozzle mechanism according to claim 6, characterized in that: The first mouth is circular or oval; and / or A plane where one of the plurality of first openings is located is spaced apart from the other first openings.
8. The nozzle mechanism according to claim 7, characterized in that: The connecting member further comprises a first shell and a second shell which are symmetrically arranged, wherein the first shell and the second shell are connected to form the inner wall and the outer wall; The channel further includes a second opening communicating with the plurality of first openings, the second opening being located on a symmetric plane between the first shell and the second shell, and the first opening being circular; The diameter of the second opening is less than or equal to d, and the diameter of the first opening is less than or equal to 1 / √2 d, wherein d is any value greater than zero.
9. The nozzle mechanism according to claim 8, characterized in that: The outer diameter of the cross section of the nozzle perpendicular to its axial direction is less than or equal to √2 r, where r is the radius of the outer wall.
10. A evaporation crucible, characterized in that: include: The dry pot body is provided with at least one accommodating cavity, wherein the accommodating cavity is configured to have a space for accommodating the evaporation material; and At least one nozzle mechanism as described in any one of claims 1 to 9, wherein the at least one connecting assembly is arranged on the dry pot body and is connected to the at least one accommodating cavity through the channel in a one-to-one correspondence.
11. A vapor deposition device, characterized in that: The invention comprises the evaporation crucible as claimed in claim 10.