Gas flow control valve and gas flow control device
By using a displacement amplification mechanism in the gas flow control valve, the small displacement of the piezoelectric driver is amplified, and the problem of low flow control accuracy in the prior art is solved, and high-resolution flow control is achieved, which is suitable for application scenarios that require precise adjustment.
Patent Information
- Application Number
- CN202411932597.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-03-28
AI Technical Summary
In the prior art, the flow control accuracy of the gas flow control valve is low and cannot meet the application scenarios that require precise adjustment.
A gas flow control valve is designed, and amplifies the small displacement of the piezoelectric driver using a displacement amplification mechanism (including a lever seat and multiple levers) to achieve high-resolution flow control through the design of the lever.
It realizes more refined flow control, suitable for application scenarios that require precise adjustment, while reducing energy losses and improving system reliability and life.
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Figure CN119712924A_ABST
Abstract
Description
Technical Field
[0001] The present application belongs to the field of gas control technology, and in particular, relates to a gas flow control valve and a gas flow control device. Background Art
[0002] A gas flow meter is an instrument for measuring gas flow. In the prior art, piezoelectric valves are used for flow control. Piezoelectric valves are mainly composed of piezoelectric ceramics and metal materials. When voltage is applied, the piezoelectric ceramics will deform, causing the size of the fluid channel to change. By controlling the voltage, the degree of opening and closing of the channel can be adjusted, thereby controlling the flow of the fluid. Since the stroke of the piezoelectric valve is fixed, the flow control accuracy is low. Summary of the invention
[0003] In view of the above problems in the prior art, the purpose of this article is to provide a gas flow control valve and a gas flow control device to solve the problem of low flow control accuracy in the prior art.
[0004] In order to solve the above technical problems, the specific technical solutions of this article are as follows: In one aspect, the present invention provides a gas flow control valve, comprising: A piezoelectric driver, a displacement amplifying mechanism and a push rod are coaxially arranged in sequence; The displacement amplification mechanism comprises: A lever seat, movably connected to the output end of the piezoelectric driver, for receiving the displacement of the piezoelectric driver and transmitting it to a plurality of levers; The plurality of levers are arranged between the lever seat and the push rod around the central axis of the push rod, each of the levers is fixedly connected to the lever seat via a resilient member, a connection point between the resilient member and the lever is formed between the moving end of the lever and the rotating end of the lever, and the lever is used to amplify the displacement of the piezoelectric driver and transmit it to the push rod; The movable end is an end of the lever in contact with the push rod, and the distance between the movable end and the resilient member is greater than the distance between the rotating end and the resilient member.
[0005] Optionally, the connection point between the resilient member and the lever seat is located on the periphery of the lever seat.
[0006] Optionally, a central axis of the resilient member is substantially parallel to a central axis of the push rod.
[0007] Optionally, arc-shaped grooves are formed on both sides of the resilient member close to the lever end, and the openings of the arc-shaped grooves face the rotating end or the moving end.
[0008] Optionally, the distance between the movable end of the lever and the rebound member is more than twice the distance between the rotating end and the fixed column.
[0009] Optionally, the number of the levers is an even number greater than or equal to 4.
[0010] Optionally, the movable end is an end close to the central axis of the push rod.
[0011] Optionally, the top surface of the push rod close to the lever is not higher than the bottom surface of the rotating end close to the push rod.
[0012] On the other hand, the present application provides a gas flow control device, comprising: The gas flow control valve described above; A flow sensor, arranged on the upstream side or downstream side of the gas flow control valve; as well as The valve control unit controls the gas flow control valve based on the output of the flow sensor.
[0013] By adopting the above technical solution, the gas flow control valve and device of this article can significantly amplify the small displacement of the piezoelectric driver through the displacement amplification mechanism (including a lever seat and multiple levers), thereby achieving more precise control. At the same time, the design of the lever enables the push rod to achieve high-resolution flow control, which is suitable for application scenarios that require precise adjustment. In addition, the combined design of the lever seat and the lever makes full use of the lever principle to ensure that the tiny displacement of the piezoelectric driver can be efficiently transmitted to the push rod, reducing energy loss. In addition, the connection point position design of the rebound part and the lever (the distance from the moving end to the connection point is greater than twice the distance from the rotating end to the connection point) further enhances the force transmission efficiency. The multiple levers are arranged circumferentially at intervals, providing a more uniform force distribution, reducing the load on a single lever, and improving the reliability and life of the system.
[0014] In order to make the above and other purposes, features and advantages of this article more obvious and easy to understand, the following specifically cites preferred embodiments and describes them in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of this article or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of this article. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0016] Figure 1 A schematic diagram of the structure of a gas flow control valve according to an embodiment of the present invention is shown; Figure 2 A partial enlarged view of a gas flow control valve before movement in an embodiment of this invention is shown; Figure 3 A schematic diagram of a displacement amplification mechanism according to an embodiment of the present invention is shown; Figure 4 A partial enlarged view of a gas flow control valve after movement according to an embodiment of the present invention is shown; 1- piezoelectric driver, 11- housing, 12- piezoelectric stack; 21-lever seat, 22-lever, 23-rebound member; 3-Putter; 4-Fixed support seat; 5-valve body; 6-base, 61-gas flow channel; 7- elastic member; 8- diaphragm; DETAILED DESCRIPTION
[0017] The following will be combined with the drawings in the embodiments of this article to clearly and completely describe the technical solutions in the embodiments of this article. Obviously, the described embodiments are only part of the embodiments of this article, not all of the embodiments. Based on the embodiments of this article, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this article.
[0018] It should be noted that the terms "first", "second", etc. in the specification and claims of this article and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of this article described here can be implemented in an order other than those illustrated or described here. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, device, product or equipment that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or equipment. In order to solve the above problems, the embodiments of this article provide a gas flow control valve, which amplifies the stroke of the piezoelectric driver 1 through a displacement amplification mechanism, thereby improving the control accuracy and sensitivity of the push rod 3 and reducing the volume of the entire gas flow control valve. Figure 1 The schematic diagram of the structure of a gas flow control valve in the embodiment of this invention is shown, but based on conventional or uncreative work, more or fewer operating components may be included. Figures 1 to 4 As shown, the present application provides a gas flow control valve, comprising: A piezoelectric driver 1, a displacement amplification mechanism and a push rod 3 are coaxially arranged in sequence; The displacement amplification mechanism comprises: A lever seat 21 is movably connected to the output end of the piezoelectric driver 1 and is used to receive the displacement of the piezoelectric driver 1 and transmit it to the plurality of levers 22; The plurality of levers 22 are arranged between the lever seat 21 and the push rod 3 around the central axis of the push rod 3, each of the levers 22 is fixedly connected to the lever seat 21 via a resilient member 23, the connection point between the resilient member 23 and the lever 22 is formed between the moving end of the lever 22 and the rotating end of the lever 22, and the lever 22 is used to amplify the displacement of the piezoelectric driver 1 and transmit it to the push rod 3; The moving end is an end of the lever 22 that contacts the push rod 3 , and the distance between the moving end and the resilient member 23 is greater than the distance between the rotating end and the resilient member 23 .
[0019] Specifically, the piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 can all be cylindrical structures, and the central axes of the piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 can be the same axis. In addition, the piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 can be arranged in sequence from top to bottom. It can be understood that the arrangement direction of the piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 is not specifically limited in this specification and can be set as needed, such as arranging the piezoelectric driver 1, the displacement amplification mechanism and the push rod 3 in sequence from left to right. For better understanding, this application is described in terms of stacking arrangement from top to bottom, that is, the piezoelectric driver 1 is located above the displacement amplification mechanism, and the displacement amplification mechanism is located above the push rod 3.
[0020] The piezoelectric driver 1 has one or more piezoelectric stacks 12 in which piezoelectric ceramic layers and electrode layers are alternately stacked. In addition, the piezoelectric driver 1 also includes a housing 11, in which the upper end of the piezoelectric driver 1 (the end on the opposite side of the push rod 3) is fixed to the housing 11. That is, the lower end of the piezoelectric driver 1 (the end on the push rod 3 side) is displaced by the expansion and contraction of the piezoelectric driver 1. By the displacement of the lower end of the piezoelectric driver 1, the push rod 3 moves with the help of the displacement amplification mechanism.
[0021] It is understandable that the piezoelectric driver 1 , the displacement amplification mechanism and the push rod 3 can be radially limited by the external fixed support seat 4 to enable the piezoelectric driver 1 , the displacement amplification mechanism and the push rod 3 to move within the fixed support seat 4 .
[0022] Specifically, the displacement amplification mechanism may include a lever seat 21 and a plurality of levers 22 fixedly connected to a bottom surface (an end surface away from the piezoelectric driver 1 ) of the lever seat 21 .
[0023] Among them, Figure 3 As shown, the lever seat 21 can be a cylindrical structure to ensure its stability and uniformity when transmitting axial displacement. The top surface of the lever seat 21 (the end surface close to the piezoelectric driver 1) is in contact with the lower end of the piezoelectric driver 1 to ensure that the tiny displacement of the piezoelectric driver 1 can still be efficiently transmitted to the lever seat 21. The outer periphery of the lever seat 21 can be in contact with the fixed support seat 4 to limit the radial movement of the lever seat 21 and ensure that it only moves in the axial direction, which helps to improve the stability and accuracy of the entire system.
[0024] The lever seat 21 and the lever 22 can be fixedly connected by a resilient member 23, wherein the central axis of the resilient member 23 is substantially parallel to the central axis of the push rod 3, ensuring that the displacement transmitted by the lever seat 21 will not be lost. This alignment design ensures efficient force transmission, reduces energy loss, and improves the response speed and control accuracy of the system.
[0025] In an optional embodiment, a certain gap may be provided between the outer periphery of the lever seat 21 and the fixed support seat 4. This gap not only facilitates viewing of the installation position of the lever 22 and the fixed support seat 4, but also allows necessary assembly and adjustment space, thereby simplifying maintenance and inspection work. In this case, the connection point between the resilient member 23 and the lever seat 21 may be formed at the outer periphery or extension of the lever seat 21.
[0026] In order to ensure that the force transmitted from the lever seat 21 to the lever 22 is substantially parallel to the central axis of the push rod 3, arc grooves may be formed on both sides of the resilient member 23 near the end of the lever 22, with the opening of the arc groove facing the rotating end or the moving end.
[0027] Specifically, the opening size of the arc groove can be set as needed. One end of the arc groove close to the lever seat 21 can be directly connected to the lever seat 21 to reduce the volume of the displacement amplification mechanism. In addition, in order to ensure the strength of the resilient member 23, one end of the arc groove close to the lever seat 21 can be connected to the lever seat 21 through a straight line segment.
[0028] It should be noted that when the resilient member 23 is displaced by the lever seat 21, the opening of the arc groove toward the rotating end can limit the axial movement of the resilient member 23, forcing the deformation to occur mainly in the radial direction, that is, in the direction toward the central axis of the push rod 3. This ensures that the deformation direction of the resilient member 23 is more concentrated toward the push rod 3, thereby improving the control accuracy. At the same time, it reduces unnecessary axial movement of the resilient member 23 and avoids the influence of lateral force on the lever 22. In addition, when the resilient member 23 is displaced by the lever seat 21, the opening of the arc groove toward the moving end can guide the deformation of the resilient member 23 to be concentrated in the radial direction, while allowing a certain amount of axial adjustment. The resilient member 23 is allowed to be fine-tuned axially within a certain range to adapt to different assembly errors or working conditions. At the same time, it ensures that the resilient member 23 is subjected to more uniform force during the deformation process, reduces stress concentration points, and prolongs its service life.
[0029] like Figure 3 As shown, the lever 22 can be a rectangular parallelepiped structure, the rotating end of the lever 22 (the end away from the central axis of the push rod 3) can abut against the fixed support seat 4, and the moving end of the lever 22 (the end close to the central axis of the push rod 3) abuts against the top surface of the push rod 3 (the end surface of the push rod 3 close to the piezoelectric driver 1). Multiple levers 22 can be fixed on the bottom surface of the lever seat 21 at circumferential intervals. The number of levers 22 is not specifically limited in the embodiments of this specification and can be set as needed. Preferably, the number of levers 22 is preferably an even number greater than or equal to 4. Compared with an odd number of levers 22, an even number of levers 22 is less difficult to process and can provide a more uniform force distribution, thereby improving the stability and response consistency of the system.
[0030] The lever 22 and the lever seat 21 are connected by a resilient member 23. The resilient member 23 can produce a slight offset deformation toward the central axis of the push rod 3 after being displaced by the lever seat 21, thereby pushing the lever 22 to move the moving end toward the push rod 3 with the rotating end as the axis. The connection point between the resilient member 23 and the lever 22 is located between the moving end and the rotating end of the lever 22, and the distance from the moving end to the connection point is greater than or equal to twice the distance from the rotating end to the connection point. This design effectively amplifies the slight displacement of the lever seat 21, achieving a wider control range and higher precision for the opening of the push rod 3.
[0031] After receiving the displacement of the lever seat 21, the moving end of the lever 22 can rotate axially toward the push rod 3 with the inner side surface of the fixed support seat 4, and at the same time drive the moving end of the lever 22 to amplify the displacement of the lever seat 21 and transmit it to the push rod 3, thereby realizing the displacement of the push rod 3. By moving the push rod 3 to different positions, the adjustment of the airway opening in the gas flow control device is realized.
[0032] In some possible embodiments, the plurality of levers 22 are symmetrically arranged in pairs. In addition, the length of the lever 22 may be smaller than the radius of the lever seat 21, so that a gap is formed between the rotating ends of the relative levers 22, thereby ensuring that the moving ends of the relative levers 22 do not contact each other during the movement of the levers 22.
[0033] Specifically, the area where the rotating end of the lever 22 contacts the inner bottom surface of the fixed support seat 4 may be formed with an arc-shaped rotating portion. When the lever 22 rotates, the arc-shaped surface of the arc-shaped rotating portion close to the push rod 3 may contact the inner bottom surface of the fixed support seat 4 in sequence. The arc-shaped rotating portion may be semi-cylindrical. The area where the rotating end of the lever 22 contacts the inner side surface of the fixed support seat 4 may be a shape that matches the inner side surface of the fixed support seat 4, such as a cylindrical shape.
[0034] The area where the movable end of the lever 22 contacts the push rod 3 may be formed with an arc-shaped movable portion. When the lever 22 rotates, the arc-shaped surface of the arc-shaped movable portion close to the central axis of the push rod 3 may contact the inner bottom surface of the fixed support seat 4 in sequence. The arc-shaped movable portion may be semi-cylindrical. The length of the arc-shaped movable portion is smaller than the arc-shaped rotating portion, and the radius of the arc-shaped rotating portion and the arc-shaped movable portion may be equal to ensure that the lever 22 will not deviate from the push rod 3 when moving.
[0035] After the lever 22 moves, in order to avoid interference between different levers 22, the moving end of the lever 22 can be set to a trapezoidal structure, so that the projection of the moving end of the lever 22 on the top surface of the push rod 3 is a trapezoid, that is, the cross-section from the end surface of the moving end of the lever 22 close to the central axis of the push rod 3 to the connecting section of the resilient member 23 and the lever 22 tends to gradually increase. It can be understood that after each lever 22 moves, each lever 22 does not touch.
[0036] It should be noted that when the piezoelectric driver 1 does not move, the central axis of the lever 22 is substantially perpendicular to the central axis of the push rod 3, that is, the lever 22 is in a horizontal state, thereby avoiding reducing the amplification ratio of the displacement amplification mechanism.
[0037] It should be noted that in the present application, the top surface of the push rod 3 is lower than the bottom surface of the fixed support seat 4, thereby ensuring that the distance from the moving end of the lever 22 to the connection point between the resilient member 23 and the lever 22 is large, thereby ensuring a sufficient amplification ratio of the displacement amplification mechanism. In addition, in the present application, since the lever seat 21 and the lever 22 are fixedly connected, the contact point between the lever seat 21 and the lever 22 is prevented from moving toward the central axis of the push rod 3 during the movement of the lever seat 21, thereby ensuring that the amplification ratio of the displacement amplification mechanism is constant, which is more conducive to the control of the displacement of the push rod 3.
[0038] In addition, the top surface of the push rod close to the lever is not higher than the bottom surface of the rotating end close to the push rod, which can effectively extend the stroke magnification length of the lever and reduce the overall space of the control valve.
[0039] In order to better understand this application, the implementation process of this application is now described: Figure 2 As shown, when no voltage is applied to the piezoelectric driver 1, the lower end of the piezoelectric driver 1 contacts the top surface of the lever seat 21, the lever seat 21 is fixedly connected to the lever 22 via the resilient member 23, the rotating end of the lever 22 abuts against the inner side of the fixed support seat 4, and the moving end of the lever 22 contacts the top surface of the push rod 3. Figure 4 As shown, when voltage is applied to the piezoelectric driver 1, the piezoelectric driver 1 moves a distance toward the push rod 3. Since the piezoelectric driver 1 is in direct contact with the lever seat 21, the lever seat 21 drives the resilient member 23 to move toward the push rod 3. The resilient member 23 pushes the lever 22, so that the lever 22 moves toward the push rod 3 with the rotating end as the axis, thereby pushing the push rod 3 to move away from the piezoelectric driver 1. Then, the push rod 3 pushes the valve body 5, so that a gap (such as a gas gap) through which gas can pass is formed between the valve body 5 and the upper sealing structure. Figure 4 The displacement amplification mechanism in the present application has a displacement amplification ratio greater than or equal to 2, thereby achieving a large-scale amplification of the moving distance of the piezoelectric driver 1. When the piezoelectric driver 1 loses power, the push rod 3 can be rebounded to a position where no displacement occurs because an elastic component 7 is provided at one end of the push rod 3 away from the piezoelectric driver 1.
[0040] The gas flow control valve provided in the embodiment of this specification can significantly amplify the small displacement of the piezoelectric driver 1 through a displacement amplification mechanism (including a lever seat 21 and multiple levers 22), thereby achieving more precise control. At the same time, the design of the lever 22 enables the push rod 3 to achieve high-resolution flow control, which is suitable for application scenarios that require precise adjustment. In addition, the combined design of the lever seat 21 and the lever 22 makes full use of the principle of the lever 22 to ensure that the tiny displacement of the piezoelectric driver 1 can be efficiently transmitted to the push rod 3, reducing energy loss. In addition, the connection point position design of the rebound member 23 and the lever 22 (the distance from the moving end to the connection point is greater than twice the distance from the rotating end to the connection point) further enhances the force transmission efficiency. The multiple levers 22 are arranged at intervals in the circumference, providing a more uniform force distribution, reducing the load of a single lever 22, and improving the reliability and life of the system.
[0041] On the other hand, the embodiments of this specification also provide a gas flow control device, including: The gas flow control valve described above; A flow sensor, arranged on the upstream side or downstream side of the gas flow control valve; as well as The valve control unit controls the gas flow control valve based on the output of the flow sensor.
[0042] Specifically, Figure 1 As shown, the gas flow control device may include the above-mentioned gas flow control valve, a valve body 5 controlled by the gas flow control valve, a base 6, a gas flow channel 61 formed inside the base 6, a push rod 3 in the gas flow control valve arranged inside the gas flow channel 61, and a flow sensor to control the gas flow through the opening of the push rod 3.
[0043] In practical applications, the gas flow control valve can control the opening of the valve body 5 by moving the push rod 3 up and down, thereby achieving flow control of the gas in the gas flow channel 61 in the gas flow control device.
[0044] It is understandable that an elastic component 7 may be provided on the side of the valve body 5 away from the push rod 3 , and when the piezoelectric driver 1 is not powered, the elastic component 7 may release the compression force to restore the axis of the lever 22 to a position substantially perpendicular to the central axis of the push rod 3 .
[0045] A diaphragm 8 may be formed on one side of the push rod 3 and the principle lever 22 , and the diaphragm 8 is used to improve air tightness.
[0046] Specifically, the flow sensor may be disposed on the upstream side of the push rod 3 to detect the gas flow on the upstream side.
[0047] The gas flow control device provided in the embodiments of this specification includes a gas flow control valve. Therefore, all the technical effects of the gas flow control valve are not described here.
[0048] It should also be understood that in the embodiments of this article, the term "and / or" is only a description of the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.
[0049] Those of ordinary skill in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described in terms of function in the above description. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this article.
[0050] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.
[0051] In the several embodiments provided herein, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, or can be electrical, mechanical or other forms of connection.
[0052] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the embodiments of this article.
[0053] This article uses specific examples to illustrate the principles and implementation methods of this article. The description of the above examples is only used to help understand the method and core ideas of this article. At the same time, for those skilled in the art, according to the ideas of this article, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting this article.
Claims
1. A gas flow control valve, characterized in that: include: A piezoelectric driver, a displacement amplifying mechanism and a push rod are coaxially arranged in sequence; The displacement amplification mechanism comprises: A lever seat, movably connected to the output end of the piezoelectric driver, for receiving the displacement of the piezoelectric driver and transmitting it to a plurality of levers; The plurality of levers are arranged between the lever seat and the push rod around the central axis of the push rod, each of the levers is fixedly connected to the lever seat via a resilient member, a connection point between the resilient member and the lever is formed between the moving end of the lever and the rotating end of the lever, and the lever is used to amplify the displacement of the piezoelectric driver and transmit it to the push rod; The movable end is an end of the lever in contact with the push rod, and the distance between the movable end and the resilient member is greater than the distance between the rotating end and the resilient member.
2. The gas flow control valve according to claim 1, characterized in that: The connection point between the resilient member and the lever seat is located at the outer periphery of the lever seat.
3. The gas flow control valve according to claim 1, characterized in that: The central axis of the resilient member is substantially parallel to the central axis of the push rod.
4. The gas flow control valve according to claim 1, characterized in that: Arc grooves are formed on both sides of the resilient member close to the lever end, and the openings of the arc grooves face the rotating end or the moving end.
5. The gas flow control valve according to claim 1, characterized in that: The distance between the moving end of the lever and the resilient member is more than twice the distance between the rotating end and the fixed column.
6. The gas flow control valve according to claim 1, characterized in that: The number of the levers is an even number greater than or equal to 4.
7. The gas flow control valve according to claim 1, characterized in that: The moving end is an end close to the central axis of the push rod.
8. The gas flow control valve according to claim 1, characterized in that: The top surface of the push rod close to the lever is not higher than the bottom surface of the rotating end close to the push rod.
9. A gas flow control device, characterized in that: include: The gas flow control valve according to any one of claims 1 to 8; A flow sensor, arranged on the upstream side or downstream side of the gas flow control valve; as well as The valve control unit controls the gas flow control valve based on the output of the flow sensor.
Citation Information
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