Optical coupling scanning probe microscope based on qPlus

Abstract

The invention discloses an optical coupling scanning probe microscope based on qPlus, and relates to the field of probe microscopes. The sample containing mechanism is assembled in the scanning box and is used for containing a sample; the detection table is connected in the scanning box in a sliding manner and is used for placing a detection probe; the scanning table is rotationally connected into the scanning box, and scanning probe containing grooves used for containing scanning probes are evenly formed in the upper surface of the scanning table; the acquisition module is used for acquiring feedback data of the detection probe; the probe identification module is used for inputting the feedback data into the trained probe identification model and outputting the probe category; the analysis module is used for generating an adjustment instruction based on the probe category; the control module adjusts the angle of the scanning table based on the adjusting instruction; by analyzing the detection result of the detection probe and switching the most suitable scanning probe for scanning through the scanning table, the scanning effect is improved.

Description

Technical Field

[0001] The invention relates to the field of probe microscopes, and in particular to a qPlus-based optical coupling scanning probe microscope. Background Art

[0002] The basic principle of scanning probe microscopy is to scan the sample through the probe and combine it with optical coupling to convert the optical signal into electrical signal for imaging.

[0003] For example, a patent application with publication number CN1490606A discloses a scanning probe microscope, which can not only effectively prevent scratches on samples but also reduce image distortion, thereby obtaining high-resolution images that accurately characterize the surface morphology of the samples. The microscope includes a micro-cantilever with a needle tip, and the micro-cantilever is fixedly connected to an oscillation device; the needle tip is located at one end of the micro-cantilever, and the oscillation device is located at the other end of the micro-cantilever; the oscillation device includes a piezoelectric ceramic crystal, and an oscillation frequency controller for controlling the oscillation frequency and amplitude of the piezoelectric ceramic crystal, and the micro-cantilever is fixed on the piezoelectric ceramic crystal.

[0004] This technical solution scans the sample through a scanning probe. The imaging effect of the scanning probe microscope mainly depends on the needle tip of the probe. If the needle tip is worn, it will affect the imaging. When scanning with the current probe microscope, if the sample is not flat enough or the hardness of the sample is different, if an inappropriate scanning mode is selected, it will cause side peak wear of the needle tip and affect the service life of the probe. Summary of the invention

[0005] In view of this, the purpose of the present invention is to propose a qPlus-based optically coupled scanning probe microscope to achieve automatic detection of samples, identify the best probe type for sample scanning, and improve the service life of the probe.

[0006] In order to achieve the above technical objectives, the present invention provides a qPlus-based optically coupled scanning probe microscope:

[0007] The invention comprises: a scanning box; a sample holding mechanism, which is assembled in the scanning box and used for holding samples; a detection table, which is slidably connected in the scanning box and used for placing detection probes; a scanning table, which is rotatably connected in the scanning box, and the upper surface of the scanning table is evenly provided with scanning probe holding grooves for placing scanning probes; a collection module, which is used for collecting feedback data of the detection probes; a probe recognition module, which is used for inputting the feedback data into a trained probe recognition model and outputting the probe category; an analysis module, which generates an adjustment instruction based on the probe category; and a control module, which adjusts the angle of the scanning table based on the adjustment instruction.

[0008] Preferably, the sample holding mechanism includes: a sample box, which is slidably and sealingly connected to the scanning box, and a handle is fixed to the outer surface of the sample box; a sample table, which is used to hold the sample; a longitudinal translation assembly, and the sample table is slidably connected to the sample box through the longitudinal translation assembly; and a transverse translation assembly, which is used to drive the sample table to translate.

[0009] Preferably, the longitudinal translation assembly includes: a connecting block fixed to the lower surface of the sample stage; a slider slidably connected to the connecting block; a guide rod, the end of which is fixedly connected to the sample box, and the slider is slidably connected to the guide rod; a screw rod, the end of which is rotatably connected to the sample box, and the screw rod is threadedly connected to the slider.

[0010] Preferably, the lateral translation assembly comprises: an adjusting gear rod, an end of which is rotatably connected to the sample box; a tooth plate, which is fixedly connected to the sample stage, and the adjusting gear rod is meshed with the tooth plate.

[0011] Preferably, a qPlus sensor is fixed on the upper surface of the scanning box.

[0012] Preferably, a connection seat is rotatably connected to the bottom of the scanning platform, and the scanning platform is rotatably connected to the scanning box through the connection seat, the connection seat is slidably connected to the scanning box, a first motor is fixed to the bottom of the connection seat, and an output end of the first motor is fixedly connected to the middle of the scanning platform;

[0013] A second rack is fixed on the outer surface of the connecting seat, a second transmission shaft is rotatably sealed at the bottom of the scanning box, a second transmission gear is fixed at one end of the second transmission shaft, and the second transmission gear is meshed with the second rack.

[0014] Preferably, a detection probe holding groove for accommodating the detection probe is provided on the upper surface of the detection table, a first rack is fixed on the lower surface of the detection table, and the first rack is slidably connected to the scanning box; a first transmission shaft is rotatably sealed and connected to the lower surface of the scanning box, a first transmission gear is fixed at the end of the first transmission shaft, and the first transmission gear is meshed with the first rack.

[0015] Preferably, a transmission member is provided between the first transmission shaft and the second transmission shaft, and the first transmission shaft is linked with the second transmission shaft through the transmission member, a second motor is fixed to the outer surface of the scanning box, and an output end of the second motor is fixedly connected to the first transmission shaft.

[0016] Preferably, the probe recognition module trains the probe recognition model in the following manner:

[0017] Pre-collect g groups of historical scanning data, where g is an integer greater than , and the scanning data includes feedback data and the probe category corresponding to the feedback data;

[0018] A set of feedback data and the probe categories corresponding to the feedback data are converted into a set of feature vectors, and the feature vectors are used as inputs of a machine learning model. The machine learning model takes the predicted probe category for each set of feedback data as output, and takes minimizing the sum of the prediction accuracies of all probe categories as a training goal; the machine learning model is trained until the sum of the prediction accuracies converges, and the training is stopped, and the machine learning model obtained by training is used as a probe recognition model, and the machine learning model is a naive Bayes model or a support vector machine model.

[0019] Preferably, the method for the analysis module to generate adjustment instructions based on the probe category includes:

[0020] The initial angle is preset, and based on the initial angle, the scanning platform is divided into i workstations according to the number of scanning probes that can be installed, and a unique angle value is matched to each workstation;

[0021] Bind i stations according to the type of installed scanning probes and unique angle values ​​to generate a matching table;

[0022] Enter the probe category into the matching table to match the unique angle value as the adjustment instruction.

[0023] It can be seen from the above technical solutions that the present application has the following beneficial effects:

[0024] 1: Assemble the detection table and the scanning table in the scanning box, detect the sample by assembling the detection probe on the detection table, install different types of scanning probes on the scanning table, analyze the detection results of the detection probes, select the best scanning probe type, and improve the scanning effect.

[0025] 2: Obtain feedback data through sample testing, and select the best scanning probe type based on the feedback data to avoid scanning samples with inappropriate scanning probes, which will increase the wear of the scanning probes and thus improve the service life of the scanning probes. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the overall structure of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0028] Figure 2A schematic diagram of a partial cross-sectional structure of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0029] Figure 3 A schematic diagram of a cross-sectional structure of a scanning box of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0030] Figure 4 A schematic cross-sectional view of a sample holding mechanism of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0031] Figure 5 A schematic diagram of a partial front view cross-sectional structure of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0032] Figure 6 A schematic diagram of the exploded structure of a sample holding mechanism of a qPlus-based optically coupled scanning probe microscope provided by the present invention;

[0033] Figure 7 A schematic diagram of the structure of a probe recognition module of a qPlus-based optically coupled scanning probe microscope provided by the present invention.

[0034] Figure numerals: 1. scanning box; 2. sample holding mechanism; 21. sample box; 211. handle; 22. sample table; 23. longitudinal translation assembly; 231. connecting block; 232. slider; 233. guide rod; 234. screw rod; 24. transverse translation assembly; 241. adjustment gear rod; 242. gear plate; 3. detection table; 31. detection probe holding slot; 32. first rack; 33. first transmission shaft; 331. first transmission gear; 4. scanning table; 41. scanning probe holding slot; 42. connecting seat; 421. second rack; 43. second transmission shaft; 431. second transmission gear; 44. first motor; 5. qPlus sensor; 6. transmission member; 7. second motor. DETAILED DESCRIPTION

[0035] The following description is merely exemplary in nature and is not intended to limit the present disclosure, application, and use. It should be understood that in all of these figures, the same or similar reference numerals indicate the same or similar parts and features. The various drawings only schematically represent the concepts and principles of the embodiments of the present disclosure, and do not necessarily show the specific dimensions and proportions of the various embodiments of the present disclosure. Specific parts in specific drawings may be exaggerated to illustrate the relevant details or structures of the embodiments of the present disclosure.

[0036] Example 1

[0037] See also Figure 1 , Figure 2 and Figure 3 As shown, a qPlus-based optically coupled scanning probe microscope comprises a scanning box 1, a sample holding mechanism 2, a detection platform 3, a scanning platform 4, a qPlus sensor 5 and a laser source, wherein the sample holding mechanism 2 is assembled in the scanning box 1, the sample holding mechanism 2 is used to hold the sample, the detection platform 3 and the scanning platform 4 are distributed on both sides of the sample holding mechanism 2, and the detection platform 3 and the scanning platform 4 are used to place the detection probe and the scanning probe respectively;

[0038] Specifically, the upper surface of the scanning platform 4 is evenly provided with scanning probe holding grooves 41 for accommodating different types of scanning probes. The laser source is mounted on the scanning box 1 for emitting laser to illuminate the detection probe or the scanning probe. The qPlus sensor 5 is fixed on the scanning box 1 and is located above the detection probe and the scanning probe. Figure 2 and Figure 5 As shown, the qPlus sensor 5 is used to receive the light beam reflected by the detection probe or the scanning probe, and convert the light beam into an electrical signal to form an image. The slight interaction between the detection probe or the scanning probe and the sample will cause the detection probe or the scanning probe to vibrate or displace slightly. This vibration can be detected by measuring the change in the reflected light beam, that is, the qPlus sensor 5 receives the light source reflected from different positions of the detection probe or the scanning probe, which is converted into electrical signals of different sizes. The electronic image of the sample can be generated by decoding these electrical signals. The specific imaging method will not be elaborated on here. By way of example, the sample is placed on the sample holding mechanism 2. The sample is first detected by the detection probe to obtain the basic parameters of the sample. Based on the basic parameters, a technician in this field can select the best scanning mode and scanning probe. By rotating the scanning table 4, different types of scanning probes can be switched to scan the sample, avoiding the use of non-matching scanning modes and types of scanning probes, thereby reducing the wear on the scanning probe.

[0039] It is worth mentioning that the detection probe and the scanning probe have the same structure. Taking the scanning probe as an example, the scanning probe is composed of a cantilever with a needle tip and piezoelectric ceramics. The cantilever is fixed at the output part of the piezoelectric ceramics. The piezoelectric ceramics are used to control the nanometer-level movement of the cantilever, thereby meeting the position adjustment requirements of the cantilever and scanning the sample surface. The interaction between the needle tip and the sample surface is achieved through electrostatic interaction in the scanning probe microscope. The detection probe and the scanning probe of this embodiment are installed in the detection table 3 and the scanning table 4, and are energized by means of contacts. The energization method, such as sliding contacts, can realize the transmission of electricity or signals during movement, or transmit energy or signals through the principle of electromagnetic induction, etc., which does not affect the rotation of the scanning table 4 and can also ensure that the detection probe and the scanning probe are energized and working. This is a known public technology and will not be elaborated on here.

[0040] For details, see Figure 2 , Figure 3 and Figure 5 As shown, the detection table 3 is slidably connected in the scanning box 1, the scanning table 4 is rotatably connected in the scanning box 1, the bottom of the scanning table 4 is rotatably connected with a connecting seat 42, the scanning table 4 is rotatably connected to the scanning box 1 through the connecting seat 42, and the connecting seat 42 is slidably connected to the scanning box 1, a first motor 44 is fixed at the bottom of the connecting seat 42, the output end of the first motor 44 is fixedly connected to the middle of the scanning table 4, and the first motor 44 is used to drive the scanning table 4 to rotate, so as to switch different types of scanning probes to scan the sample;

[0041] A second rack 421 is fixed to the outer surface of the connecting seat 42, and a second transmission shaft 43 is rotatably sealed and connected to the bottom of the scanning box 1, and a second transmission gear 431 is fixed to one end of the second transmission shaft 43, and the second transmission gear 431 is meshed with the second rack 421; a detection probe holding groove 31 for accommodating the detection probe is provided on the upper surface of the detection platform 3, and a first rack 32 is fixed to the lower surface of the detection platform 3, and the first rack 32 is slidably connected to the scanning box 1; a first transmission shaft 33 is rotatably sealed and connected to the lower surface of the scanning box 1, and a first transmission gear 331 is fixed to the end of the first transmission shaft 33, and the first transmission gear 331 is meshed with the first rack 32; a transmission member 6 is provided between the first transmission shaft 33 and the second transmission shaft 43, and the first transmission shaft 33 is connected to the second transmission shaft 43 through the transmission member 6. The transmission shaft 43 is linked, and a second motor 7 is fixed on the outer surface of the scanning box 1, and the output end of the second motor 7 is fixedly connected to the first transmission shaft 33; the second motor 7 drives the first transmission shaft 33 to rotate, and the first transmission shaft 33 can push the first rack 32 to slide through the first transmission gear 331, so that the detection platform 3 is translated, and the first transmission shaft 33 can drive the second transmission shaft 43 to rotate synchronously through the transmission member 6, and the second transmission shaft 43 can drive the second rack 421 to translate through the second transmission gear 431, so that the second rack 421 drives the scanning platform 4 to translate synchronously through the connecting seat 42, that is, when the detection platform 3 is close to the sample holding mechanism 2, the scanning platform 4 is away from the sample holding mechanism 2, and similarly, when the detection platform 3 is away from the sample holding mechanism 2, the scanning platform 4 is close to the sample holding mechanism 2;

[0042] The purpose is to synchronously switch the positions of the detection table 3 and the scanning table 4 to avoid mutual interference between the detection probe on the detection table 3 or the scanning probe on the scanning table 4 during operation; and, in this embodiment, the driving part that drives the detection table 3 and the scanning table 4 to translate synchronously is installed outside the scanning box 1 through the transmission of the first transmission shaft 33 and the second transmission shaft 43, thereby reducing electromagnetic interference to the components in the scanning box 1.

[0043] See also Figure 2 , Figure 4 , Figure 5 and Figure 6As shown, the sample holding mechanism 2 includes a sample box 21, a sample table 22, a longitudinal translation assembly 23 and a transverse translation assembly 24. The sample box 21 is slidably and sealedly connected to the scanning box 1 to ensure the airtightness during sample scanning. A handle 211 is fixed to the outer surface of the sample box 21 to facilitate the user to pull the sample box 21 out of the scanning box 1. The sample table 22 is used to hold the sample, and the sample table 22 is slidably connected to the sample box 21 through the longitudinal translation assembly 23; the transverse translation assembly 24 is used to drive the sample table 22 to translate; the purpose is to adjust the position of the sample table 22 through the cooperation of the longitudinal translation assembly 23 and the transverse translation assembly 24.

[0044] For details, see Figure 4 and Figure 6 As shown, the longitudinal translation assembly 23 includes a connecting block 231, a slider 232, a guide rod 233 and a screw rod 234. The connecting block 231 is fixed to the lower surface of the sample stage 22, the slider 232 is slidably connected to the connecting block 231, the end of the guide rod 233 is fixedly connected to the sample box 21, and the slider 232 is slidably connected to the guide rod 233; the end of the screw rod 234 is rotatably connected to the sample box 21, and the screw rod 234 is threadedly connected to the slider 232; by rotating the screw rod 234, the surface thread of the screw rod 234 acts on the internal thread of the slider 232, and the slider 232 is limited by the guide rod 233, so that it can only slide along the axis of the guide rod 233, which can drive the sample stage 22 to translate longitudinally.

[0045] For more details, see Figure 4 As shown, the lateral translation assembly 24 includes an adjusting gear rod 241 and a tooth plate 242. The end of the adjusting gear rod 241 is rotatably connected to the sample box 21; the tooth plate 242 is fixedly connected to the sample stage 22, and the adjusting gear rod 241 is meshed with the tooth plate 242. By rotating the adjusting gear rod 241, the tooth plate 242 can be driven to slide along the direction of the axis of the vertical guide rod 233, thereby causing the sample stage 22 to translate.

[0046] Example 2

[0047] Based on the above embodiments, see Figure 7 As shown, a qPlus-based optically coupled scanning probe microscope also includes a collection module, a probe recognition module and a control module, wherein each module is connected by wire and / or wirelessly;

[0048] The acquisition module is used to collect feedback data of the detection probe, and the feedback data includes displacement, vibration amplitude and force. The acquisition module includes a displacement sensor, a vibration sensor and a force sensor. In this embodiment, the displacement sensor, the vibration sensor and the force sensor are installed on the cantilever of the detection probe. The displacement sensor in this embodiment can use a capacitive, inductive or optical sensor to measure the cantilever, that is, detect the displacement of the probe in the vertical direction, for example, determine the displacement in the vertical direction by optical changes or capacitance changes in the vertical direction; the vibration sensor can use an acceleration sensor or a piezoelectric sensor to measure the cantilever, that is, detect the vibration of the probe; the force sensor can use a piezoresistive, capacitive or optical force sensor to measure the cantilever, that is, detect the interaction force between the probe and the sample;

[0049] The probe identification module is used to input feedback data into the trained probe identification model and output the probe category; the probe identification model training method is: under the experimental environment, g groups of historical scanning data are collected, g is an integer greater than 1, and the scanning data includes feedback data and the probe category corresponding to the feedback data. The method for obtaining the probe category corresponding to the feedback data is: simulating multiple groups of feedback data under the experimental environment, selecting scanning probes of different categories to scan samples under the same historical feedback data, and the technicians in this field select the scanning probe category corresponding to the best imaging to correspond to the group of historical feedback data, so that g groups of different historical feedback data are tested, and g groups of different historical feedback data are matched to obtain g groups of historical scanning data;

[0050] The probe category is represented by a digital label. For example, there are n probe categories in total, n is an integer greater than 1, category one is marked as 1, category two is marked as 2, and so on. Category n is marked as n. A set of feedback data and the probe categories corresponding to the feedback data are converted into a set of feature vectors;

[0051] The feature vector is used as the input of the machine learning model, and the machine learning model outputs the predicted probe category for each set of feedback data, and minimizes the sum of the prediction accuracy of all probe categories as the training goal; wherein the calculation formula for the prediction accuracy is: Z k = ( A k -W k) 2 , where k is the number of the feature vector, Z k is the prediction accuracy, A k is the predicted probe category corresponding to the kth group of feature vectors, W kis the actual probe category corresponding to the kth group of feature vectors; the machine learning model is trained until the sum of the prediction accuracies reaches convergence and the training is stopped. It should be noted that the convergence standard is determined by those skilled in the art according to the actual situation and is not specifically limited here. The machine learning model obtained by training is used as the probe recognition model, and the machine learning model is a naive Bayes model or a support vector machine model;

[0052] The analysis module generates an adjustment instruction based on the probe category. The method for generating the adjustment instruction based on the probe category includes:

[0053] Preset an initial angle, divide the scanning platform 4 into i workstations according to the number of scanning probes that can be installed on it based on the initial angle, and match a unique angle value to each workstation;

[0054] Bind i stations according to the type of installed scanning probes and unique angle values ​​to generate a matching table;

[0055] Enter the probe category into the matching table to match the unique angle value as the adjustment instruction.

[0056] The control module adjusts the angle of the scanning platform 4 based on the adjustment instruction. In this embodiment, the angle of the scanning platform 4 is adjusted by controlling the scanning platform 4 with the first motor 44. The rotation of the first motor 44 is controlled based on the unique angle value of the adjustment instruction. The specific relationship between the rotation stroke of the first motor 44 and the unique angle value is calculated by technicians in this field according to actual conditions and is not specifically limited here.

[0057] The exemplary implementation scheme of the present disclosure is described in detail above with reference to the preferred embodiments. However, it can be understood by those skilled in the art that, without departing from the concept of the present disclosure, various modifications and variations can be made to the above-mentioned specific embodiments, and various technical features and structures proposed in the present disclosure can be combined in various ways without exceeding the protection scope of the present disclosure, which is determined by the attached claims.

Claims

1. A qPlus-based optically coupled scanning probe microscope, characterized in that: include: Scanning box (1); A sample holding mechanism (2) is installed in the scanning box (1) and is used to hold the sample; A detection table (3) is slidably connected to the scanning box (1) and is used to place a detection probe; A scanning platform (4) is rotatably connected to the scanning box (1), and scanning probe receiving grooves (41) for accommodating scanning probes are evenly arranged on the upper surface of the scanning platform (4); A collection module, used for collecting feedback data from the detection probe; The probe recognition module is used to input the feedback data into the trained probe recognition model and output the probe category; An analysis module generates adjustment instructions based on the probe categories; The control module adjusts the angle of the scanning platform (4) based on the adjustment instruction.

2. The qPlus-based optically coupled scanning probe microscope according to claim 1, characterized in that: The sample holding mechanism (2) comprises: A sample box (21) is slidably and hermetically connected to the scanning box (1), and a handle (211) is fixed on the outer surface of the sample box (21); A sample table (22) for holding samples; A longitudinal translation assembly (23), wherein the sample stage (22) is slidably connected to the sample box (21) via the longitudinal translation assembly (23); The lateral translation component (24) is used to drive the sample stage (22) to translate.

3. The qPlus-based optically coupled scanning probe microscope according to claim 2, characterized in that: The longitudinal translation assembly (23) comprises: A connecting block (231) is fixed to the lower surface of the sample stage (22); A slider (232) is slidably connected to the connecting block (231); A guide rod (233), an end of which is fixedly connected to the sample box (21), and the slider (232) is slidably connected to the guide rod (233); The end of the screw rod (234) is rotatably connected to the sample box (21), and the screw rod (234) is threadedly connected to the slider (232).

4. The qPlus-based optically coupled scanning probe microscope according to claim 2, characterized in that: The lateral translation assembly (24) comprises: An adjusting gear rod (241) whose end is rotatably connected to the sample box (21); The toothed plate (242) is fixedly connected to the sample stage (22), and the adjusting toothed rod (241) is meshed with the toothed plate (242).

5. The qPlus-based optically coupled scanning probe microscope according to claim 1, characterized in that: A qPlus sensor (5) is fixed on the upper surface of the scanning box (1).

6. The qPlus-based optically coupled scanning probe microscope according to claim 1, characterized in that: The bottom of the scanning platform (4) is rotatably connected to a connecting seat (42), and the scanning platform (4) is rotatably connected to the scanning box (1) through the connecting seat (42), the connecting seat (42) is slidably connected to the scanning box (1), a first motor (44) is fixed to the bottom of the connecting seat (42), and an output end of the first motor (44) is fixedly connected to the middle of the scanning platform (4); A second rack (421) is fixed on the outer surface of the connecting seat (42); a second transmission shaft (43) is rotatably sealed at the bottom of the scanning box (1); a second transmission gear (431) is fixed to one end of the second transmission shaft (43), and the second transmission gear (431) is meshed with the second rack (421).

7. The qPlus-based optically coupled scanning probe microscope according to claim 6, characterized in that: The upper surface of the detection platform (3) is provided with a detection probe receiving groove (31) for accommodating the detection probe, and the lower surface of the detection platform (3) is fixed with a first rack (32), and the first rack (32) is slidably connected to the scanning box (1); the lower surface of the scanning box (1) is rotatably sealed and connected with a first transmission shaft (33), and the end of the first transmission shaft (33) is fixed with a first transmission gear (331), and the first transmission gear (331) is meshed with the first rack (32).

8. The qPlus-based optically coupled scanning probe microscope according to claim 7, characterized in that: A transmission member (6) is provided between the first transmission shaft (33) and the second transmission shaft (43), and the first transmission shaft (33) is linked with the second transmission shaft (43) via the transmission member (6); a second motor (7) is fixed to the outer surface of the scanning box (1), and an output end of the second motor (7) is fixedly connected to the first transmission shaft (33).

9. The qPlus-based optically coupled scanning probe microscope according to claim 1, characterized in that: The probe recognition module trains the probe recognition model in the following manner: Pre-collect g groups of historical scanning data, where g is an integer greater than 1, and the scanning data includes feedback data and the probe category corresponding to the feedback data; Converting a set of feedback data and the probe categories corresponding to the feedback data into a set of feature vectors, and using the feature vectors as inputs of a machine learning model, wherein the machine learning model outputs the predicted probe category for each set of feedback data and takes minimizing the sum of the prediction accuracies of all probe categories as a training objective; The machine learning model is trained until the sum of the prediction accuracies reaches convergence, and the training is stopped. The trained machine learning model is used as a probe recognition model. The machine learning model is a naive Bayes model or a support vector machine model.

10. The qPlus-based optically coupled scanning probe microscope according to claim 1, characterized in that: The method in which the analysis module generates adjustment instructions based on the probe category includes: Presetting an initial angle, dividing the scanning platform (4) into i workstations according to the number of scanning probes that can be installed on the scanning platform (4) based on the initial angle, and matching a unique angle value for each workstation; Bind i workstations according to the probe type of the installed scanning probe and the unique angle value to generate a matching table; Enter the probe category into the matching table to match the unique angle value as the adjustment instruction.

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