Rotary type combined scanning probe microscope and measuring method

Abstract

The invention discloses a rotary combined scanning probe microscope and a measuring method. The rotary combined scanning probe microscope comprises a microscope body outer frame, a first scanning unit, a rotary probe switching unit and a second scanning unit, the upper end of the first scanning unit is fixed at the upper end of the mirror body outer frame, and the lower end of the first scanning unit is a free end, so that three-dimensional scanning can be realized; the rotary probe switching unit is arranged at the lower end of the mirror body outer frame and comprises a rotary circular truncated cone, an inverted mounting sleeve and a first probe oscillation starting frame, the inverted mounting sleeve is fixed on the rotary circular truncated cone and is coaxial with the rotary circular truncated cone, and the first probe oscillation starting frame is located at the upper end of the inverted mounting sleeve; the second scanning unit is fixed on the rotary circular table. According to the invention, the probe can be flexibly switched in the test process, multi-mode measurement is completed in one-time sample loading, the method is especially suitable for extreme environments with long test preparation period and high cost, such as low temperature, strong magnetic field and the like, the measurement efficiency can be improved, and the test cost can be obviously reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning probe microscopes, in particular to a rotary combined scanning probe microscope and a measuring method suitable for extreme environments such as low temperature, vacuum and strong magnetic field. Background Art

[0002] In situ measurements of nanostructures or microscopic objects under extreme experimental conditions such as low temperatures, strong magnetic fields, and ultra-high vacuum are crucial research tools in fields such as physics, materials science, and superconductivity. To achieve these conditions, experimental systems typically consist of cryogenic refrigeration equipment, magnet systems, and vacuum chambers, equipped with multiple layers of thermal insulation, magnetic shielding, and precise sample positioning mechanisms. These systems operate in very limited space, with the small available volume within the chamber significantly restricting the installation and replacement of probes, sensors, and actuators.

[0003] In addition, because the refrigeration and vacuuming processes are time-consuming, the experimental preparation cycle is often measured in days, and the operating costs required for equipment such as liquid helium and superconducting magnets are high. Under such conditions, if probes need to be frequently replaced or measuring instruments need to be switched, not only will multiple heating, vacuuming, and cooling processes be required, extending the experimental time, but it will also easily introduce systematic errors or damage the sample state, increasing the risk of experimental interruption. Therefore, when conducting multimodal, high-resolution measurements in extreme environments, how experimental equipment integrates multiple functions within a limited space and achieves efficient switching of probes or functional units is a key issue in current system design.

[0004] Scanning probe microscopes (SPMs) are essential tools for cutting-edge scientific research and ultra-precision industrial manufacturing. Their multimodal imaging capabilities, such as atomic force microscopy, scanning tunneling microscopy, and magnetic force microscopy, are widely used at room temperature. However, integrating these multimodal capabilities becomes significantly more challenging under cryogenic vacuum conditions. This is due to the large size of conventional multimodal microscopes, while space is very limited in extreme environments. Furthermore, compatibility with strong magnetic fields and low vacuum temperatures places stringent demands on the design of the SPM structure, material selection, and overall rigidity. Therefore, while SPMs for multimodal imaging at room temperature are relatively common, SPM systems for extreme environments are mostly single-mode. Currently, there is a lack of practical SPM systems that integrate multiple SPM imaging modes for cryogenic vacuum or strong magnetic environments, particularly in areas such as imaging resolution and compatibility with low-temperature, strong magnetic fields.

[0005] In summary, there is an urgent need for a scanning probe combination microscopy imaging tool with a compact structure that can complete multimodal measurements in one sample loading and is suitable for low-temperature vacuum or strong magnetic conditions to meet the urgent needs of advanced material characterization and basic scientific research. Summary of the Invention

[0006] The purpose of the present invention is precisely to overcome the above-mentioned technical deficiencies and to provide a rotary combined scanning probe microscope and measurement method suitable for extreme environments such as cryogenic temperatures, vacuums, or strong magnetic fields. The present invention has a compact structure, integrating a dual scanning unit with a rotary probe switching mechanism, enabling multimodal measurements during a single sample loading. Taking into account both the volume limitations and functional integration requirements of extreme environments, the present invention overcomes the difficulties of conventional systems in balancing multiple modalities and the susceptibility of imaging performance to interference. The microscope is suitable for high-resolution measurements of material surface structure and electronic properties under extremely low temperatures, strong magnetic fields, and ultra-high vacuum conditions.

[0007] The present invention adopts the following technical solutions: A rotary combined scanning probe microscope comprises an outer frame of the mirror body, a first scanning unit, a rotary probe switching unit and a second scanning unit; the upper end of the first scanning unit is fixed to the upper end of the outer frame of the mirror body and the lower end of the first scanning unit is a free end, which can realize three-dimensional scanning; the rotary probe switching unit is placed at the lower end of the outer frame of the mirror body, and comprises a rotating table, an inverted mounting sleeve and a first probe vibration frame, the inverted mounting sleeve is fixed on the rotating table and is coaxial with the rotating table, and the first probe vibration frame is located at the upper end of the inverted mounting sleeve; the second scanning unit is fixed on the rotating table and surrounded by the inverted mounting sleeve, and a second probe frame is provided at the upper end of the second scanning unit; the first probe vibration frame and the second probe frame can rotate synchronously around the axis of the rotating table.

[0008] Preferably, the outer frame of the mirror body is a vertically arranged hollow frame structure, and through holes are provided at the upper and lower ends thereof.

[0009] Preferably, the first scanning unit includes a first piezoelectric tube, a motor ring, a sliding rod, a sample stage, a sleeve and a first spring sheet. The motor ring is installed at the upper through hole of the outer frame of the mirror body. The upper end of the first piezoelectric tube is fixed on the motor ring, and the lower end of the first piezoelectric tube points to the rotary probe switching unit. The sleeve is nested in the inner wall of the lower end of the first piezoelectric tube. The sliding rod is located inside the sleeve and is pressed against the inner wall of the sleeve by the first spring sheet provided between it and the sleeve. The bottom end of the sliding rod is provided with a sample stage for mounting the sample to be tested.

[0010] Preferably, the rotary probe switching unit also includes a rotating sleeve, an end rotating shaft, a shear piezoelectric stack, a friction block and a second spring sheet; the rotating sleeve is placed in the through hole at the lower end of the mirror body frame and forms a rotating matching structure with the end rotating shaft, the second spring sheet is placed between the rotating sleeve and the end rotating shaft, the rotating table is located at the upper end of the end rotating shaft, the shear piezoelectric stack is fixed to the bottom of the mirror body frame, and the friction block is fixed to the top of the shear piezoelectric stack and fits with the side of the rotating table.

[0011] Preferably, the shear piezoelectric stack, friction block, rotating circular table, terminal rotating shaft, rotating sleeve and second spring sheet constitute a stick-slip inertial rotation displacement table.

[0012] Preferably, the second scanning unit includes a second piezoelectric tube and a needle holder, the lower end of the second piezoelectric tube is placed on a rotating circular table, the needle holder is placed on the upper end of the second piezoelectric tube and a second probe holder is provided in the middle of the needle holder, the second probe holder passes through the through hole of the inverted mounting sleeve and does not contact the inverted mounting sleeve.

[0013] The present invention also provides an operating method, which is applied to the rotary combined scanning probe microscope, comprising the following steps: 1) After the first probe, second probe, and sample to be tested are mounted on the first probe vibration frame, second probe frame, and sample stage, respectively, the rotary probe switching unit is driven to rotate until the first probe or the second probe is vertically facing the sample to be tested; and the second probe or the first probe and the sample to be tested are vertically staggered; 2) Driving the first scanning unit to move the sample to be tested downward, and stopping the approach when the sample to be tested reaches a set distance from the first probe or the second probe; 3) Start the first modal test or the second modal test until the first modal test or the second modal test is completed; 4) Driving the first scanning unit to move the sample to be tested upward until the first probe and the second probe reach a safe distance from the sample to be tested; 5) driving the rotary probe switching unit to rotate until the second probe or the first probe is facing the sample to be tested, and the first probe or the second probe and the sample to be tested are staggered in the vertical direction; 6) Driving the first scanning unit to move the sample to be tested downward, and stopping the approach when the sample to be tested reaches a set distance from the second probe or the first probe; 7) Start the second modal test or the first modal test until the second modal test or the first modal test is completed; 8) Drive the first scanning unit to move the sample to be tested upward until the first probe and the second probe reach a safe distance from the sample to be tested, and the test is completed.

[0014] Compared with the existing technology, the present invention provides a rotary combined scanning probe microscope, which adopts an overall architecture combining dual scanning units with a rotary probe switching module. It has significant advantages such as compact structure and adaptability to extreme environments. It can realize multimodal in-situ measurement under various harsh experimental conditions and has the following beneficial effects: First of all, the microscope of the present invention is small in size and has high overall rigidity. Its structural design fully considers its adaptability to space-constrained environments such as low temperature, strong magnetism, and ultra-high vacuum, making it suitable for experimental scenarios under extreme physical conditions. In complex experimental processes such as liquid helium cooling, high magnetic field scanning, or ultra-high vacuum imaging, traditional equipment is often difficult to meet the requirements of continuity and environmental adaptability due to its large size and inconvenient switching. By integrating a dual scanning unit with a rotary switching module, the present invention realizes the integration of multifunctional units within a limited cavity space, providing a solution for multimodal in-situ research under extreme conditions.

[0015] Secondly, compared with the traditional method that requires repeated sampling, vacuuming and cryogenic cooling, this system can complete multiple modal tests in a single refrigeration or vacuuming process, effectively shortening the experimental preparation cycle, reducing the consumption of liquid helium and other experimental resources, and significantly saving experimental costs.

[0016] Third, the dual scanning units are spatially isolated in their structure, avoiding mechanical coupling between them during imaging and improving the image quality of the system, especially in atomic-resolution imaging modes such as scanning tunneling microscopy.

[0017] Fourth, the system design of this invention fully considers the integration requirements of high-field experimental platforms, achieving excellent platform compatibility and operational stability. Its compact overall structure and small radial dimensions allow for direct installation and operation within a high-magnetic-field, low-temperature integrated testing platform. This eliminates the need for frequent probe removal and replacement, avoiding sample contamination and positioning errors that can arise from repeated operation, significantly improving experimental efficiency and sample data consistency.

[0018] In summary, through structural innovation and system integration, the present invention effectively solves the core bottleneck problems of existing multimodal scanning probe microscopy technology in extreme experimental environments, such as difficulty in functional integration, difficulty in probe switching, and poor spatial adaptability. It has good practical value and promotion prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure is a schematic diagram of the overall structure of a rotary combined scanning probe microscope of the present invention.

[0020] Figure 2 This is a schematic structural diagram of the first scanning unit of a rotary combined scanning probe microscope of the present invention.

[0021] Figure 3 This is a structural cross-sectional view of the first scanning unit of a rotary combined scanning probe microscope of the present invention.

[0022] Figure 4 It is a structural schematic diagram of a rotary probe switching unit of a rotary combined scanning probe microscope of the present invention.

[0023] Figure 5 This is a schematic structural diagram of the second scanning unit of a rotary combined scanning probe microscope of the present invention.

[0024] Figure 6 This is a top view of a rotary probe switching unit of a rotary combined scanning probe microscope of the present invention.

[0025] Figure 7 This is a driving waveform diagram of a rotary probe switching unit of a rotary combined scanning probe microscope of the present invention.

[0026] In the figure, 100: mirror frame; 200: first scanning unit; 300: rotary probe switching unit; 400: second scanning unit; 201: motor ring; 202: sleeve; 203: first piezoelectric tube; 204: slide bar; 205: first spring plate; 206: sample stage; 301: first probe; 302: first probe oscillator frame; 303: inverted mounting sleeve; 304: rotating circular table; 305: end rotating shaft; 306: friction block; 307: shear piezoelectric stack; 308: second spring plate; 309: rotating sleeve; 401: second probe; 402: second probe holder; 403: needle holder; 404: second piezoelectric tube. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative work shall fall within the scope of protection of the present invention.

[0028] The two test modes in the specific embodiment of the rotary combined scanning probe microscope of the present invention are scanning tunneling microscope and atomic force microscope test modes, and the probe used by the atomic force microscope is a piezoresistive probe.

[0029] A rotary combined scanning probe microscope includes an outer frame 100, a first scanning unit 200, a rotary probe switching unit 300, and a second scanning unit 400; the outer frame 100 is a vertically arranged hollow frame structure, and its upper and lower ends are both provided with through holes; the first scanning unit 200 is fixed to the upper end of the inner frame 100, and the rotary probe switching unit 300 is placed at the lower end of the outer frame 100. Figure 1 shown.

[0030] The first scanning unit includes a motor ring 201, a sleeve 202, a first piezoelectric tube 203, a slide bar 204, a first spring sheet 205, and a sample stage 206. The motor ring 201 is fixedly mounted at the upper through hole of the mirror outer frame 100. The upper end of the first piezoelectric tube 203 is fixed on the motor ring 201. The lower end of the first piezoelectric tube 203 is a free end and points to the rotary probe switching unit 300. The sleeve 202 is fixed to the lower end of the first piezoelectric tube 203 and is embedded in the first piezoelectric tube 203. The slide bar 204 is arranged inside the sleeve 202 and is pressed against the inner wall of the sleeve 202 by the first spring sheet 205 arranged between it and the sleeve 202. The lower end of the slide bar 204 is provided with a sample stage 206 for mounting the sample to be tested, such as Figure 2 , Figure 3 shown.

[0031] In addition, the electrode structure of the first piezoelectric tube 203 is an integrated inner electrode and an outer electrode divided into four equal parts. The inner electrode is set as the Z-direction electrode, and the two opposite electrodes in the outer electrode are set as the +X-direction electrode and the -X-direction electrode respectively. The other two opposite electrodes are set as the +Y-direction electrode and the -Y-direction electrode respectively.

[0032] The first piezoelectric tube 203, the slide rod 204, the sleeve 202 and the first spring sheet 205 constitute a stick-slip inertial drive mechanism. By applying a sawtooth wave drive signal of a specific frequency to the inner electrode of the first piezoelectric tube 203, such as Figure 7 As shown, during the sudden change in the sawtooth drive signal voltage, the first piezoelectric tube 203 rapidly expands and contracts, driving the sleeve 202 to move rapidly, while the slide bar 204 remains relatively stationary due to inertia, resulting in relative slip. During the slow change in the sawtooth drive signal voltage, the first piezoelectric tube 203 slowly deforms, and the slide bar 204 and sleeve 202 move synchronously due to friction. This "stick-slip" cycle allows for gradual vertical displacement of the slide bar 204, thereby enabling controllable coarse approach between the sample and probe in the combined microscope.

[0033] By applying different control signals to the five electrodes of the first piezoelectric tube 203, scanning motion in the X, Y, and Z axes can be achieved. Specifically, the inner electrode drives displacement in the Z direction; a pair of outer electrodes located in the +X and -X directions controls displacement in the X axis; and a pair of outer electrodes located in the +Y and -Y directions controls displacement in the Y axis. Through this control method, the first scanning unit can perform precise scanning motion in the X, Y, and Z directions, realizing the high-resolution imaging capabilities of the atomic force microscope in the combined microscope.

[0034] The rotary probe switching unit 300 includes a rotating table 304, an end rotating shaft 305, an inverted mounting sleeve 303, a bottom of the rotating table 304, an end rotating shaft 305, a rotating sleeve 309, a shear piezoelectric stack 307, a friction block 306, and a second spring piece 308; the end rotating shaft 305 is provided below the rotating table 304, and the rotating sleeve 309 is fixed in the through hole at the lower end of the mirror outer frame 100 and forms a rotating matching structure with the end rotating shaft 305; the second spring piece 308 is located at the rotating table 304. The sleeve 309 and the end rotating shaft 305 are used to pre-tighten the rotating sleeve 309 and the end rotating shaft 305; the end rotating shaft 305 is limited to only rotating motion; the inverted mounting sleeve 303 is fixed on the rotating table 304 and is coaxial with the rotating table 304; the shear piezoelectric stack 307 is fixed to the bottom of the mirror outer frame 100, and the friction block 306 is fixed to the top of the shear piezoelectric stack 307 and fits with the outer surface of the rotating table 304. There is a hole on the top of the inverted mounting sleeve 303, such as Figure 4 shown.

[0035] The second scanning unit 400 includes a second probe 401, a second probe holder 402, a needle holder 403, and a second piezoelectric tube 404, wherein the bottom of the second piezoelectric tube 404 is fixed on the rotating round table 304, the needle holder 403 is set on the top of the second piezoelectric tube 404, the second probe holder 402 is fixed on the needle holder 403, and the second probe holder 402 passes through the through hole at the top of the inverted mounting sleeve 303, and the second probe holder 402 does not contact the inverted mounting sleeve 303. The second probe is a Pt / Ir wire needle tip, such as Figure 5 As shown; the second scanning unit 400 is surrounded by the inverted mounting sleeve 303 and does not contact the inverted mounting sleeve 303.

[0036] The electrode structure of the second piezoelectric tube 404 consists of a single inner electrode and four equally divided outer electrodes. The inner electrode is designated as the Z-axis electrode, two opposing outer electrodes are designated as the +X-axis electrode and the -X-axis electrode, and the other two opposing electrodes are designated as the +Y-axis electrode and the -Y-axis electrode. By applying different control signals to the five electrodes of the second piezoelectric tube 404, scanning motion in three axes (X, Y, and Z) can be achieved. Specifically, the inner electrode drives Z-axis displacement; a pair of outer electrodes located in the +X and -X directions controls X-axis displacement; and a pair of outer electrodes located in the +Y and -Y directions controls Y-axis displacement. Through this control method, the first scanning unit can perform precise scanning motion in the X, Y, and Z directions, realizing the high-resolution imaging function of the scanning tunneling microscope in the combined microscope.

[0037] This dual scanning unit ensures that the imaging signals of each modality do not interfere with each other during actual measurement.

[0038] The shear piezoelectric stack 307, the friction block 306, the rotating table 304, the second spring sheet 308, the end rotating shaft 305 and the rotating sleeve 309 constitute a stick-slip inertial rotating displacement table; by applying a sawtooth wave driving signal of a specific frequency to the shear piezoelectric stack 307, during the sudden change stage of the sawtooth wave driving signal voltage, the shear piezoelectric stack 307 deforms rapidly instantaneously, driving the friction block 306 to move rapidly, while the rotating table 304, the inverted mounting sleeve 303 and the second scanning unit 400 as a whole remain relatively stationary due to inertia, and the friction block 306 and the rotating table 304 produce relative slip; during the slow change stage of the sawtooth wave driving signal voltage, the shear piezoelectric stack 307 deforms slowly, and the rotating table 304, the inverted mounting sleeve 303 and the second scanning unit 400 as a whole rotate relative to the rotating axis under the action of friction, thereby driving the inverted mounting sleeve 303 and the second scanning unit 400 to rotate synchronously. Through this "stick-slip" cycle process, the rotary probe switching unit 300 can be rotated relative to the axis, such as Figure 6 As shown, the waveform of the sawtooth wave driving signal is as follows Figure 7 shown.

[0039] When the atomic force microscope probe, i.e., the first probe 301, and the scanning tunneling microscope probe, i.e., the second probe 401, are mounted on the first probe oscillating frame 302 and the second probe frame 402, respectively, the first probe 301 and the second probe 401 are adjusted so that they are arranged cocentrically relative to the terminal rotation axis 305 in space, as shown in FIG. Figure 6 As shown, during the rotation of the rotary probe switching unit 300, the two probes can be aligned with the positions of the sample to be tested in sequence, which facilitates the realization of multimodal imaging, such as Figure 6 shown.

[0040] The measurement method of the present invention is applicable to a multimodal scanning probe microscopy system integrating an atomic force microscope and a scanning tunneling microscope, and the steps are as follows: 1) After the first probe 301, the second probe 401, and the sample to be tested are installed, the rotary probe switching unit 300 is driven to rotate the first probe 301 to be directly above the sample to be tested, while the second probe 401 is vertically offset from the sample to be tested to prevent the first probe 301 and the second probe 401 from contacting the sample to be tested simultaneously after approaching again.

[0041] 2) Start the first scanning unit 200 and control the sample to move downward in the vertical direction, gradually approaching the first probe 301; stop approaching when the distance between the sample and the first probe 301 reaches a set threshold.

[0042] 3) When the first probe 301 is in stable contact or near-field coupling state with the sample, the atomic force microscope imaging mode is executed until the measurement task is completed.

[0043] 4) The first scanning unit 200 is driven to move the sample upward until the first probe 301 and the second probe 401 are both at a safe distance from the sample to ensure a non-contact state.

[0044] 5) The rotary probe switching unit 300 is driven again to rotate the second probe 401 to above the sample, while the first probe 301 is moved away in the vertical direction to ensure spatial dislocation.

[0045] 6) Start the first scanning unit 200 to slowly move the sample closer to the second probe 401 in the vertical direction; through tunnel current feedback control, when the tunnel current reaches a set value, stop the sample movement.

[0046] 7) Execute the scanning tunneling microscope imaging mode until the measurement process is completed.

[0047] 8) Drive the first scanning unit 200 to control the sample to move vertically upward until the sample is at a safe distance from the first probe 301 and the second probe 401, completing the entire multimodal measurement process.

[0048] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the scope of the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A rotary combined scanning probe microscope, characterized in that: The invention comprises a mirror outer frame (100), a first scanning unit (200), a rotary probe switching unit (300) and a second scanning unit (400); the upper end of the first scanning unit (200) is fixed to the upper end of the mirror outer frame (100) and the lower end of the first scanning unit (200) is a free end; the rotary probe switching unit (300) is placed at the lower end of the mirror outer frame (100), and the rotary probe switching unit (300) comprises a rotating truncated table (304), an inverted mounting sleeve (303) and a first probe oscillating frame (302). The inverted mounting sleeve (303) is fixed on the rotating table (304) and is coaxial with the rotating table (304); the first probe oscillating frame (302) is located at the upper end of the inverted mounting sleeve (303); the second scanning unit (400) is fixed on the rotating table (304) and is surrounded by the inverted mounting sleeve (303); a second probe frame (402) is provided at the upper end of the second scanning unit (400); the first probe oscillating frame (302) and the second probe frame (402) can rotate synchronously around the axis of the rotating table (304).

2. The rotary combined scanning probe microscope according to claim 1, characterized in that: The mirror body frame (100) is a vertically arranged hollow frame structure, and through holes are provided at both the upper and lower ends.

3. The rotary combined scanning probe microscope according to claim 2, characterized in that: The first scanning unit (200) includes a first piezoelectric tube (203), a motor ring (201), a slide rod (204), a sample stage (206), a sleeve (202) and a first spring sheet (205), wherein the motor ring (201) is mounted on the upper through hole of the lens outer frame (100), the upper end of the first piezoelectric tube (203) is fixed on the motor ring (201), the lower end of the first piezoelectric tube (203) points to the rotary probe switching unit (300), the sleeve (202) is nested in the lower end inner wall of the first piezoelectric tube (203), the slide rod (204) is located inside the sleeve (202), and is pressed against the inner wall of the sleeve (202) by the first spring sheet (205) arranged between the slide rod (204) and the sleeve (202), and the sample stage (206) is provided at the bottom end of the slide rod (204).

4. The rotary combined scanning probe microscope according to claim 3, characterized in that: The rotary probe switching unit (300) further comprises a rotating sleeve (309), an end rotating shaft (305), a shear piezoelectric stack (307), a friction block (306) and a second spring sheet (308); the rotating sleeve (309) is placed in a through hole at the lower end of the mirror outer frame (100) and forms a rotating matching structure with the end rotating shaft (305); the second spring sheet (308) is placed between the rotating sleeve (309) and the end rotating shaft (305); the rotating truncated plate (304) is located at the upper end of the end rotating shaft (305); the shear piezoelectric stack (307) is fixed to the bottom of the mirror outer frame (100); the friction block (306) is fixed to the top of the shear piezoelectric stack (307) and fits the side of the rotating truncated plate (304).

5. The rotary combined scanning probe microscope according to claim 4, characterized in that: The second scanning unit (400) includes a second piezoelectric tube (404) and a needle stand (403), wherein the lower end of the second piezoelectric tube (404) is placed on the rotating truncated table (304), the needle stand (403) is placed on the upper end of the second piezoelectric tube (404), and a second probe stand (402) is provided in the middle of the needle stand (403), and the second probe stand (402) passes through the through hole of the inverted mounting sleeve (303) and does not contact the inverted mounting sleeve (303).

6. An operating method, applied to a rotary combined scanning probe microscope according to any one of claims 1 to 5, characterized in that: The following steps are involved: 1) After the first probe (301), the second probe (401) and the sample to be tested are respectively mounted on the first probe oscillating frame (302), the second probe frame (402) and the sample stage (206), the rotary probe switching unit (300) is driven to rotate until the first probe (301) or the second probe (401) is facing the sample to be tested in a vertical direction; 2) driving the first scanning unit (200) to move the sample to be tested downward, and stopping the approach when the sample to be tested reaches a set distance from the first probe (301) or the second probe (401); 3) driving the first scanning unit (200) to start the first modal test or driving the second scanning unit (400) to start the second modal test until the first modal test or the second modal test is completed; 4) driving the first scanning unit (200) to move the sample to be tested upward until the first probe (301) and the second probe (401) reach a safe distance from the sample to be tested and then stop; 5) driving the rotary probe switching unit (300) to rotate until the second probe (401) or the first probe (301) is facing the sample to be tested in a vertical direction; 6) driving the first scanning unit (200) to move the sample to be tested downward, and stopping the approach when the sample to be tested reaches a set distance from the second probe (401) or the first probe (301); 7) driving the second scanning unit (400) to start the second modal test or driving the first scanning unit (200) to start the first modal test until the second modal test or the first modal test is completed; 8) Driving the first scanning unit (200) to move the sample to be tested upward until the first probe (301) and the second probe (401) are both at a safe distance from the sample to be tested, and the test is completed.

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