UV glue curing rate detection method, equipment and medium for mask

Abstract

The invention discloses a UV glue curing rate detection method, device and medium for a mask plate. The UV glue curing rate detection device is used to acquire data, gray value processing is performed on the acquired data, and the gray value is converted into a curing rate through a gray value-curing rate conversion formula; and a curing area is photographed multiple times during the curing process, and the curing rate is calculated at the same time, and finally a time-curing rate curve diagram of the UV glue in the current ROI area is output, thereby realizing pollution-free detection of the UV glue curing rate during the curing process, and solving the problem that there is currently a lack of a UV glue curing rate detection method with stable curing quality and pollution-free in the production process for the UV glue curing rate detection of the mask plate.

Description

Technical Field

[0001] The invention relates to the technical field of UV glue curing rate detection, and in particular to a UV glue curing rate detection method for a mask plate. Background Art

[0002] UV glue (ultraviolet light curing glue) is an adhesive that cures quickly through ultraviolet light and is widely used in electronics, optics, medical and manufacturing industries. In order to ensure the quality and performance of UV glue, systematic testing is required. Because the glass surface of some mask plates needs to be glued with stainless steel sheets or glass sheets, the bonding material is UV glue, which is cured by ultraviolet light.

[0003] There are currently two methods for testing the UV glue curing rate of the mask:

[0004] The first method uses hand-breaking of stainless steel sheets or glass sheets to check the adhesion firmness. The disadvantage is that it will contaminate the high-cleanliness mask, and the curing effect cannot be quantified, the curing quality is unknown, and the curing process is difficult to control.

[0005] Another method is to use Fourier transform infrared spectroscopy (FTIR), but FTIR has certain limitations. It is only suitable for laboratory research on UV glue curing rate. It has requirements for the volume and weight of the sample, and the UV glue needs to be coated on a FTIR dedicated sample table for measurement. It can be seen that FTIR cannot perform online measurement of the UV curing rate of mask products during the production process.

[0006] Currently, there is a lack of a UV glue curing rate detection method for mask plates that has stable curing quality and is pollution-free during the production process. Summary of the invention

[0007] Based on the problems raised by the above background technology, the purpose of the present invention is to provide a method, equipment and medium for detecting the UV glue curing rate of the mask plate, which solves the problem that there is currently a lack of a UV glue curing rate detection method for the mask plate with stable curing quality and pollution-free during the production process.

[0008] The present invention is achieved through the following technical solutions:

[0009] The first aspect of the present invention provides a method for detecting the curing rate of UV glue for a mask, comprising the following steps:

[0010] The curing area is photographed with a long-wave infrared camera to obtain a 16-bit grayscale image;

[0011] Truncating the 16-bit grayscale image to obtain remaining pixels;

[0012] Remapping the remaining pixels within a 16-bit grayscale range to generate a mapped 16-bit grayscale image;

[0013] The average grayscale value of the mapped 16-bit grayscale image is calculated, and the grayscale value-curing rate conversion formula is used to calculate the average grayscale value to obtain the curing rate.

[0014] In the above technical solution, after obtaining the 16-bit grayscale image, the 16-bit grayscale image is truncated, the purpose of which is to eliminate the interference of abnormal pixels on the image, and thus cause a large error in the grayscale value-curing rate conversion. Then the remaining pixels are remapped within the 16-bit grayscale range, the purpose of remapping is to increase the difference in the calculated average grayscale value, and then obtain the curing rate of UV glue with different curing degrees.

[0015] After remapping, the average grayscale value of the mapped 16-bit grayscale image is calculated to facilitate the subsequent establishment of the relationship between grayscale value and curing rate. The grayscale value-curing rate conversion formula is used to convert the grayscale value and the curing rate to obtain the curing rate. During the curing process, the curing area is photographed multiple times, and the curing rate is calculated at the same time, and finally the time-curing rate curve of the UV glue in the current ROI area is output.

[0016] In an optional embodiment, truncating the 16-bit grayscale image includes:

[0017] Counting the grayscale image pixel values ​​of the 16-bit grayscale image to generate a grayscale image pixel value distribution histogram; wherein the ordinate of the grayscale image pixel value distribution histogram is the number of pixels, and the abscissa is the grayscale value;

[0018] The vertical coordinate of the grayscale image pixel value distribution histogram is traversed, and the grayscale image pixel value distribution histogram is truncated from the pixel number 0 upward to obtain remaining pixels; wherein, only the pixels with the largest proportion are retained during the truncation process.

[0019] In an optional embodiment, truncating the grayscale image pixel value distribution histogram includes:

[0020] IMG g2 =IMG g1 -NUM(d,u)

[0021] In the above formula, IMG g2 For the truncated pixel data, IMG g1 is the original pixel data, NUM(d,u) is the truncated pixel, d is the lower cutoff value, and u is the upper cutoff value.

[0022] In an optional embodiment, remapping the remaining pixels within a 16-bit grayscale range includes:

[0023] Counting the grayscale range of the remaining pixels to obtain a maximum grayscale value and a minimum grayscale value;

[0024] The pixels concentrated in the small interval among the remaining pixels are remapped to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value.

[0025] In an optional embodiment, counting the grayscale range of the remaining pixels includes:

[0026] G L =MAX(IMG g2 )

[0027] G R =MIN(IMG g2 )

[0028] In the above formula, G L is the maximum gray value, G R is the minimum gray value.

[0029] In an optional embodiment, remapping the pixels concentrated in the small interval of the remaining pixels to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value includes:

[0030]

[0031] In the above formula, IMG g3 is the gray value of the pixel after mapping, and G is the gray level.

[0032] In an optional embodiment, calculating the average grayscale value of the mapped 16-bit grayscale image includes:

[0033]

[0034] In the above formula, SUM(IMG g3 ) is the sum of gray values, NUM(IMG g3 ) is the number of pixels, IMG avg is the average gray value.

[0035] In an optional embodiment, the average gray value is calculated using a gray value-curing rate conversion formula, including:

[0036] UV Cr-rate =-276.927+0.143838x-2.68486e -5 x 2 +2.31832e9 x 3 -9.0206e -14 x 4 +1.29017e -18 x 5

[0037] x=IMG avg

[0038] In the above formula, UV Cr-rate is the curing rate.

[0039] A second aspect of the present invention provides an electronic device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements a method for detecting a UV glue curing rate of a mask when executing the computer program.

[0040] A third aspect of the present invention provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements a method for detecting a UV glue curing rate of a mask.

[0041] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0042] During the curing process, the curing area is photographed multiple times, and the curing rate is calculated at the same time. Finally, the time-curing rate curve of the UV glue in the current ROI area is output, which realizes the pollution-free detection of the UV glue curing rate during the curing process, and solves the problem that there is currently a lack of a UV glue curing rate detection method with stable curing quality and pollution-free in the production process for the UV glue curing rate detection of the mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and should not be regarded as limiting the scope. For those of ordinary skill in the art, other relevant drawings can be obtained based on these drawings without creative work. In the drawings:

[0044] Figure 1 A schematic diagram of the structure of a UV glue curing rate detection device provided in Example 1 of the present invention;

[0045] Figure 2 Gray value-curing rate data provided in Example 1 of the present invention;

[0046] Figure 3 A time-curing rate curve diagram of the UV glue in the current ROI area provided in Example 1 of the present invention;

[0047] Figure 4 A schematic diagram of the structure of an electronic device provided in Example 2 of the present invention. DETAILED DESCRIPTION

[0048] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with embodiments and drawings. The exemplary embodiments of the present invention and their description are only used to explain the present invention and are not intended to limit the present invention.

[0049] Example 1

[0050] This embodiment 1 provides a method for detecting the curing rate of UV glue for a mask, comprising the following steps:

[0051] The curing area is photographed with a long-wave infrared camera to obtain a 16-bit grayscale image;

[0052] Truncating the 16-bit grayscale image to obtain remaining pixels;

[0053] Remapping the remaining pixels within a 16-bit grayscale range to generate a mapped 16-bit grayscale image;

[0054] The average grayscale value of the mapped 16-bit grayscale image is calculated, and the grayscale value-curing rate conversion formula is used to calculate the average grayscale value to obtain the curing rate.

[0055] It should be noted that this method uses Figure 1 The UV glue curing rate detection equipment shown in the figure acquires data. First, the MEMS infrared narrow-band light source at the transmitting end is powered on to emit long-wave infrared rays with a central wavelength of 12.34um to the curing area of ​​the stainless steel sheet or glass sheet of the mask. The long-wave infrared camera with a filter at the receiving end takes a picture of the set ROI area, i.e., the curing area, and transmits the 16-bit grayscale image to the image processing module.

[0056] After acquiring the 16-bit grayscale image, the 16-bit grayscale image is truncated to eliminate the interference of abnormal pixels on the image, which in turn causes a large error in the grayscale value-curing rate conversion. Then the remaining pixels are remapped within the 16-bit grayscale range. The purpose of remapping is to increase the difference in the calculated average grayscale value, and then obtain the curing rate of UV glue with different curing degrees.

[0057] After remapping, the average grayscale value of the mapped 16-bit grayscale image is calculated to facilitate the subsequent establishment of the relationship between grayscale value and curing rate. The grayscale value-curing rate conversion formula is used to convert the grayscale value and the curing rate to obtain the curing rate. During the curing process, the curing area is photographed multiple times, and the curing rate is calculated at the same time, and finally the time-curing rate curve of the UV glue in the current ROI area is output.

[0058] The principle of the present invention is as follows: Fourier transform infrared spectrometer (FTIR) detection shows that after UV glue is cured, the area of ​​the characteristic peak (i.e., the characteristic peak of the unsaturated functional group -C=CH) at a wave number of 810±5-1cm is significantly reduced compared to before curing, and the wavelength range of the characteristic peak is 12.27-12.42um, that is, after UV glue is cured, the infrared absorption rate in this wavelength range is reduced compared to before curing, and the transmittance is increased; the detection device proposed by the present invention is developed using this principle, and a MEMS long-wave infrared narrow-band thermal light source is used to irradiate the curing area during the UV glue curing process, and a long-wave infrared camera takes pictures of the curing area at the same time, and the average grayscale value of the 16-bit grayscale image outputted by the LWIR camera changes from small to large, and finally the grayscale value remains at a constant value, the stronger the infrared radiation received by the LWIR camera in the 12.34um band, the higher the grayscale value of the image, and the device is typically configured as one transmitting end and two receiving ends, one for reflection detection and one for transmission detection; in multi-point detection, it can also be composed of multiple transmitting ends and multiple receiving ends; the device can work in reflection mode or transmission mode to cope with different usage scenarios.

[0059] Furthermore, the transmitting end of the device used in this embodiment is a MEMS long-wave infrared narrow-band thermal light source with a central wavelength of 12.34um and a FWHM of 0.1um, and its wavelength range is 11.94-12.74um. The receiving end is composed of a filter and a LWIR camera. The filter adopts a narrow-band filter with a central wavelength of 12.34um, a central wavelength of 12.34um, a wavelength range of 12.24-12.44um, a half-peak bandwidth of 160±20nm, and a peak transmittance of ≥75%. The LWIR camera adopts a long-wave infrared camera working in the 8-14um band. This camera has good sensitivity in the 8-14um response range, and its NETD<30mK.

[0060] Furthermore, the image processing module is a microcomputer of X86 architecture, equipped with image processing software, which controls the power on and off of the MEMS infrared narrow-band light source at the transmitting end, and controls the LWIR camera to capture images of the set ROI area. The ROI area can be set to one or more. The 16-bit grayscale image output by the LWIR camera is preprocessed to eliminate abnormal pixels that interfere with the calculation results and remap the remaining pixels within the 16-bit grayscale range. After preprocessing, the grayscale value of each pixel of the entire 16-bit grayscale image is calculated, and then the grayscale values ​​are summed and divided by the total pixels to obtain the average grayscale value. The grayscale value-curing rate conversion formula is used to obtain the UV glue curing rate of the current ROI area. During the curing process, multiple shots and calculations are performed to finally output the UV glue curing rate curve of the current ROI area, the final curing rate after curing, and the curing evaluation result.

[0061] In an optional embodiment, truncating the 16-bit grayscale image includes:

[0062] Counting the grayscale image pixel values ​​of the 16-bit grayscale image to generate a grayscale image pixel value distribution histogram; wherein the ordinate of the grayscale image pixel value distribution histogram is the number of pixels, and the abscissa is the grayscale value;

[0063] The vertical coordinate of the grayscale image pixel value distribution histogram is traversed, and the grayscale image pixel value distribution histogram is truncated from the pixel number 0 upward to obtain remaining pixels; wherein, only the pixels with the largest proportion are retained during the truncation process.

[0064] It should be noted that the ordinate of the grayscale image pixel value distribution histogram is the number of pixels, and the abscissa is the grayscale value (0-65536). The pixels are cut off from 0 upward until the remaining number of pixels is 99% of the original number of pixels. The purpose is to eliminate all small abnormal values ​​that interfere with the subsequent calculation results, and avoid other foreign matter such as dust and dirt in the shooting area, which causes the grayscale values ​​of a small number of pixels to be abnormally high or abnormally low. For example, dust will reflect infrared rays, causing the grayscale values ​​of some pixels in the shooting area to be abnormally high, while organic dirt will absorb infrared rays, causing the grayscale values ​​of some pixels in the shooting area to be abnormally low. If a small number of abnormal pixels are not truncated, the grayscale value calculation result will be biased, and it will not match the grayscale value-curing rate conversion formula.

[0065] In an optional embodiment, truncating the grayscale image pixel value distribution histogram includes:

[0066] IMG g2 =IMG g1 -NUM(d,u)

[0067] In the above formula, IMG g2 For the truncated pixel data, IMG g1 is the original pixel data, NUM(d,u) is the truncated pixel, d is the lower cutoff value, and u is the upper cutoff value.

[0068] In an optional embodiment, remapping the remaining pixels within a 16-bit grayscale range includes:

[0069] Counting the grayscale range of the remaining pixels to obtain a maximum grayscale value and a minimum grayscale value;

[0070] The pixels concentrated in the small interval among the remaining pixels are remapped to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value.

[0071] It should be noted that since the degree of curing in each area during the entire curing process of UV glue is not consistent, it will be reflected as a large difference in the average grayscale value after taking pictures, remapping and calculation; if no remapping is performed, the maximum difference in the average grayscale value from 0% to 100% curing rate is only 2000, and the difference in the average grayscale value in the curing rate range of 60% to 90% is less than 1, resulting in the inability to calculate the corresponding relationship between the grayscale value and the curing rate in this range.

[0072] Therefore, in this embodiment, the pixels concentrated in the small interval of the remaining pixels are remapped to between 0 and 65535. After the remaining pixels are remapped within the 16-bit grayscale range, the pixels concentrated in the small interval in the grayscale image pixel value distribution histogram will be remapped to between 0 and 65535. Finally, the difference in the average grayscale value calculated after shooting UV glue with different curing degrees will have a relatively large difference.

[0073] In an optional embodiment, counting the grayscale range of the remaining pixels includes:

[0074] G L =MAX(IMG g2 )

[0075] G R =MIN(IMG g2 )

[0076] In the above formula, G L is the maximum gray value, G R is the minimum gray value.

[0077] In an optional embodiment, remapping the pixels concentrated in the small interval of the remaining pixels to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value includes:

[0078]

[0079] In the above formula, IMG g3 is the gray value of the pixel after mapping, and G is the gray level.

[0080] In this embodiment, the 16-bit grayscale value is 65535.

[0081] In an optional embodiment, calculating the average grayscale value of the mapped 16-bit grayscale image includes:

[0082]

[0083] In the above formula, SUM(IMG g3 ) is the sum of gray values, NUM(IMG g3) is the number of pixels, IMG avg is the average gray value.

[0084] In an optional embodiment, the average gray value is calculated using a gray value-curing rate conversion formula, including:

[0085] UV Cr-rαte =-276.927+0.143838x-2.68486e -5 x 2 +2.31832e 9 x 3 -9.0206e -14 x 4 +1.29017e -18 x 5

[0086] x=IMG avg

[0087] In the above formula, UV Cr-rate is the curing rate.

[0088] It should be noted that the gray value-curing rate conversion formula is used to calculate the average gray value to obtain the curing rate. The gray value-curing rate conversion formula is obtained by curve fitting of the historical gray value-curing rate data, wherein the historical gray value-curing rate data is as follows: Figure 1 As shown, the curing rate data in the historical grayscale value-curing rate data table are measured using an ultraviolet light calorimeter (UV-DSC), and the grayscale values ​​are measured using an LWIR camera.

[0089] During the curing process, the curing area is photographed multiple times, and the curing rate is calculated at the same time. Finally, the time-curing rate curve of the UV glue in the current ROI area is output (such as Figure 3 as shown), the curing rate after the curing time is over (such as 90%, 100%), and the curing evaluation results (such as qualified curing quality, unqualified curing quality).

[0090] The pollution-free detection of UV glue curing rate is realized during the curing process.

[0091] Example 2

[0092] Figure 4 A schematic diagram of the structure of an electronic device provided in Embodiment 2 of the present invention, such as Figure 4 As shown, the electronic device includes a processor 21, a memory 22, an input device 23 and an output device 24; the number of processors 21 in the computer device can be one or more. Figure 4A processor 21 is taken as an example; the processor 21, the memory 22, the input device 23 and the output device 24 in the electronic device can be connected by a bus or other means. Figure 4 The example of connecting through bus is taken in the following.

[0093] The memory 22 is a computer-readable storage medium that can be used to store software programs, computer executable programs, and modules. The processor 21 executes various functional applications and data processing of the electronic device by running the software programs, instructions, and modules stored in the memory 22, that is, the UV glue curing rate detection method for the mask of Example 1 is implemented.

[0094] The memory 22 may mainly include a program storage area and a data storage area, wherein the program storage area may store applications required to operate at least one function; the data storage area may store data created according to the use of the terminal, etc. In addition, the memory 22 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some instances, the memory 22 may further include a memory remotely arranged relative to the processor 21, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0095] The input device 23 can be used to receive the ID and password input by the user, etc. The output device 24 is used to output the network configuration page.

[0096] Example 3

[0097] Embodiment 3 of the present invention further provides a computer-readable storage medium, wherein the computer-executable instructions are used to implement the UV glue curing rate detection method for a mask provided in Embodiment 1 when executed by a computer processor.

[0098] An embodiment of the present invention provides a storage medium containing computer executable instructions, and its computer executable instructions are not limited to the method operations provided in Example 1, and can also execute related operations in the UV glue curing rate detection method for the mask provided in any embodiment of the present invention.

[0099] The specific implementation methods described above further illustrate the objectives, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above description is only a specific implementation method of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for detecting the curing rate of UV glue for a mask, characterized in that: The steps include: The curing area is photographed with a long-wave infrared camera to obtain a 16-bit grayscale image; Truncating the 16-bit grayscale image to obtain remaining pixels; Remapping the remaining pixels within a 16-bit grayscale range to generate a mapped 16-bit grayscale image; The average grayscale value of the mapped 16-bit grayscale image is calculated, and the grayscale value-curing rate conversion formula is used to calculate the average grayscale value to obtain the curing rate.

2. The method for detecting the curing rate of UV glue for a mask according to claim 1, characterized in that: The 16-bit grayscale image is truncated, including: Counting the grayscale image pixel values ​​of the 16-bit grayscale image to generate a grayscale image pixel value distribution histogram; wherein the ordinate of the grayscale image pixel value distribution histogram is the number of pixels, and the abscissa is the grayscale value; The vertical coordinate of the grayscale image pixel value distribution histogram is traversed, and the grayscale image pixel value distribution histogram is truncated from the pixel number 0 upward to obtain remaining pixels; wherein, only the pixels with the largest proportion are retained during the truncation process.

3. The method for detecting the curing rate of UV glue for a mask according to claim 2, characterized in that: Truncating the grayscale image pixel value distribution histogram includes: IMG g2 =IMG g1 -NUM(d,u) In the above formula, IMG g2 For the truncated pixel data, IMG g1 is the original pixel data, NUM(d,u) is the truncated pixel, d is the lower cutoff value, and u is the upper cutoff value.

4. The method for detecting the curing rate of UV glue for a mask according to claim 1, characterized in that: Remapping the remaining pixels in a 16-bit grayscale range includes: Counting the grayscale range of the remaining pixels to obtain a maximum grayscale value and a minimum grayscale value; The pixels concentrated in the small interval among the remaining pixels are remapped to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value.

5. The method for detecting the curing rate of UV glue for a mask according to claim 4, characterized in that: Counting the grayscale range of the remaining pixels includes: G L =MAX(IMG g2 ) G R =MIN(IMG g2 ) In the above formula, G L is the maximum gray value, G R is the minimum gray value, IMG g2 The pixel data is truncated.

6. The method for detecting the curing rate of UV glue for a mask according to claim 5, characterized in that: Remapping the pixels concentrated in the small interval of the remaining pixels to a value between 0 and 65535 based on the maximum grayscale value and the minimum grayscale value, including: In the above formula, IMG g3 is the gray value of the pixel after mapping, and G is the gray level.

7. The method for detecting the curing rate of UV glue for a mask according to claim 6, characterized in that: Calculating the average grayscale value of the mapped 16-bit grayscale image, including: In the above formula, SUM(IMG g3 ) is the sum of gray values, NUM(IMG g3 ) is the number of pixels, IMG avg is the average gray value.

8. The method for detecting the curing rate of UV glue for a mask according to claim 7, characterized in that: The average gray value is calculated using a gray value-curing rate conversion formula, including: UV Cr-rate =-276.927+0.143838x-2.68486e -5 x 2 +2.31832e 9 x 3 -9.0206e -14 x 4 +1.29017e - 18 x 5 x=IMG avg In the above formula, UV Cr-rate is the curing rate.

9. An electronic device, characterized in that: The invention comprises a memory, a processor and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, the method for detecting the curing rate of UV glue for a mask plate as claimed in any one of claims 1 to 8 is implemented.

10. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method for detecting the curing rate of UV glue for a mask plate as claimed in any one of claims 1 to 8 is implemented.

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