A component configuration detection device and a detection system for accessories inside a gallium nitride production furnace

Abstract

The present invention relates to the field of component configuration detection, and particularly to a component configuration detection device and a detection system for accessories inside a gallium nitride production furnace. The component configuration detection device includes: a detection column, a detection needle, a support mechanism, a pressure detection mechanism, a displacement detection mechanism, and a controller. The detection column has a guiding inner cavity. A sliding member is slidably engaged in the guiding inner cavity, and an elastic member is abutted between the inner end wall of the guiding inner cavity and the sliding member. The detection needle is fixedly connected to the sliding member. The support mechanism is provided on the first end wall. The pressure detection mechanism detects the load of the support mechanism. The displacement detection mechanism is used to detect the extended length of the detection needle. The controller determines the rotation angle of the component to be detected according to the extended length of the detection needle. It can effectively detect the structural regularity of a component with a rotation angle and an inner side surface at the rotation angle, with higher detection efficiency, and is also applicable to the case where the included angle between the inner side surfaces on both sides of the rotation angle is small.

Description

Technical Field

[0001] The present invention relates to the field of component configuration detection, and in particular to a component configuration detection device and an accessories detection system in a gallium nitride production furnace. Background Art

[0002] In industrial production activities, it is necessary to regularly inspect the accessories and components of the equipment to ensure that the corresponding accessories and components meet the corresponding usage requirements.

[0003] Generally, for flat, columnar, and block-shaped accessories and components, the difficulty of inspection is relatively low and the inspection is easy to carry out. However, for accessories and components with corner structures (including but not limited to: V-shaped parts), if the corner has an inner side surface (for V-shaped parts, it refers to the inner side surface of its V-shaped corner), the inspection difficulty of the inner side surface (especially the part of the inner side surface near the corner) and the corner will increase significantly. If the angle between the inner side surfaces on both sides of the corner is smaller, the space between the inner side surfaces on both sides will be smaller, and the inspection difficulty will be further increased.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide a component configuration detection device, which can effectively detect the structural regularity of a component having a corner and an inner side surface of the corner, with higher detection efficiency, and is also applicable to the situation where the angle between the inner side surfaces on both sides of the corner is small.

[0006] The second object of the present invention is to provide a gallium nitride production furnace accessories detection system, which can effectively detect the structural regularity of components with corners and inner side surfaces, with higher detection efficiency, and is also applicable to situations where the angle between the inner side surfaces on both sides of the corner is small.

[0007] The embodiment of the present invention is achieved as follows:

[0008] A component configuration detection device comprises: a detection column, a detection needle, a supporting mechanism, a pressure detection mechanism, a displacement detection mechanism and a controller.

[0009] The two end walls of the detection column are respectively recorded as the first end wall and the second end wall. The detection column has a guide inner cavity arranged along its axial direction, and the inner end wall of the guide inner cavity close to the first end wall is provided with a matching through hole penetrating to the first end wall, and the matching through hole is arranged along the axial direction of the detection column.

[0010] A sliding piece is slidably matched in the guide inner cavity, and an elastic piece is abutted between the inner end wall of the guide inner cavity away from the first end wall and the sliding piece. The detection needle is slidably matched in the matching through hole, and the detection needle is arranged along the axial direction of the detection column and fixedly connected to the sliding piece.

[0011] The supporting mechanism is arranged on the first end wall, and the supporting mechanisms are arranged on both opposite sides of the detection needle. The detection needle is located at the middle position of the gap between the supporting mechanisms on both sides.

[0012] The pressure detection mechanism is installed between the supporting mechanism and the detection column for detecting the load borne by the supporting mechanism. The displacement detection mechanism is used for detecting the extension length of the detection needle. Both the pressure detection mechanism and the displacement detection mechanism are electrically connected to the controller.

[0013] During detection, the tip of the detection needle is used to abut against the corner of the component to be detected, and the supporting mechanisms on both sides are used to respectively abut against the two side surfaces of the corner. When the pressure detection mechanism detects that the loads of the supporting mechanisms on both sides are the same, the controller determines that it is in the detection in-place state, and the controller determines the corner angle of the component to be detected according to the extension length of the detection needle.

[0014] Further, the supporting mechanism is a rolling mechanism. The component configuration detection device further includes: a moving mechanism.

[0015] When the controller determines that it is in the detection in-place state, the moving mechanism is used to move the detection column along the length direction of the corner of the component to be detected. When the pressure detection mechanism detects that the load borne by the supporting mechanism changes, the controller marks the position where the supporting mechanism is located when the load changes as a defective position, and / or when the displacement detection mechanism detects that the extension length of the detection needle changes, the controller marks the position where the tip of the detection needle is located when the extension length changes as a defective position.

[0016] Further, the supporting mechanism includes: a rolling ball and a protective cover. A receiving groove is formed at the edge of the first end wall, and an installation groove is formed on the groove wall of the receiving groove close to the second end wall. The pressure detection mechanism is installed in the installation groove.

[0017] The protective cover is arranged in the receiving groove and fixedly connected to the pressure detection surface of the pressure detection mechanism. There is a gap between the protective cover and the groove wall of the receiving groove.

[0018] The inner side wall of the protective cover is spherical, the diameter of the spherical surface corresponding to the inner side wall of the protective cover is adapted to the diameter of the rolling ball, and the rolling ball can be rotatably matched in all directions in the protective cover.

[0019] Further, the sliding member is slidably sealed with the inner wall of the guiding inner cavity.

[0020] The detection column further has a conduction inner cavity arranged along its axial direction. The conduction inner cavity is arranged at an interval from the guiding inner cavity, and at least one receiving groove is communicated with the conduction inner cavity.

[0021] The component configuration detection device further includes: a mating seat, an adjustment column, a first pipe body, a second pipe body, and a third pipe body.

[0022] The rolling ball has a first magnetic module, and the first magnetic module is fixedly fitted with the rolling ball. The fitting seat is attached to the outer side wall of the protective cover, and the fitting seat has a second magnetic module, and the second magnetic module is rotatably fitted in the fitting seat.

[0023] The adjusting column is fixedly connected to the fitting seat, and the adjusting column has a conveying inner cavity. The second magnetic module is fixedly connected with a transmission shaft, the transmission shaft extends into the conveying inner cavity, and the transmission shaft is fixedly connected with a booster fan blade, and the booster fan blade is located in the conveying inner cavity.

[0024] Both the first pipe body and the second pipe body are fixedly connected to the adjusting column and communicate with the conveying inner cavity. The third pipe body is located at one end of the guiding inner cavity far from the first end wall and communicates the guiding inner cavity and the conduction inner cavity. One end of the first pipe body far from the adjusting column communicates with the external atmosphere, and the second pipe body and the third pipe body are communicated by a connecting pipe.

[0025] Wherein, the first magnetic module and the second magnetic module are magnetically coupled, so that when the moving mechanism moves the detection column along the corner length direction of the component to be detected, the first magnetic module can drive the second magnetic module to rotate, so that the booster fan blade can convey the gas in the first pipe body to the second pipe body.

[0026] Further, the outer side wall of the protective cover is also spherical, and the fitting seat has a fitting surface for fitting with the outer side wall of the protective cover, and the fitting surface is adapted to the outer side wall of the protective cover, so that the fitting seat can move along the outer side wall of the protective cover in a fitting manner.

[0027] The component configuration detection device further includes: a position adjustment mechanism. The position adjustment mechanism cooperates with the fitting seat to drive the fitting seat to move along the outer side wall of the protective cover in a fitting manner to adjust the position of the fitting seat at the protective cover.

[0028] The controller is further configured to determine the contact point of the rolling ball according to the corner angle and the extended length of the detection needle. The contact point is the point on the rolling ball for contacting the corresponding side surface when the rolling ball abuts against the side surface of the component to be detected.

[0029] The controller is further configured to execute a calibration process, and the calibration process includes: taking the connection line between the contact point and the center of the rolling ball as the first reference line, establishing a second reference line extending along the corner length direction of the component to be detected, and taking the plane where the first reference line and the second reference line are located as the reference plane. Keeping the angle of the reference plane unchanged, the position of the fitting seat relative to the protective cover is adjusted by using the position adjustment mechanism, so that the rotation axis line of the second magnetic module is perpendicular to the reference plane.

[0030] Further, the first end wall has a protruding portion, and the conduction inner cavity extends to the protruding portion to provide a space for the fitting seat to move along the protective cover.

[0031] Further, the moving mechanism is also used to control the detection column to approach and move away from the component to be detected, so as to adjust the detection column to the detection in-place state.

[0032] A detection system for internal fittings in a gallium nitride production furnace, which includes: the above-mentioned component configuration detection device.

[0033] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0034] During the use of the component configuration detection device provided by the embodiment of the present invention, when the support mechanisms on both sides respectively abut against the two side surfaces of the corner, a stable structure is formed. At this time, a corresponding geometric relationship is formed between the position point where the tip of the detection needle is located and the position points of the fitting parts between the support mechanisms on both sides and the side surface of the component to be detected. In this state, since the distance between the support mechanisms on both sides is fixed, the protruding length of the detection needle is only related to the angle of the corner of the component to be detected. Therefore, the angle of the corner of the component to be detected can be determined by using the protruding length of the detection needle in the above state. If the corner angle of the component to be detected determined by the protruding length of the detection needle is different from the designed corner angle of the component to be detected, it means that the component to be detected has deformed.

[0035] Through this design, the component to be detected can be detected efficiently and intuitively, helping to judge whether there is deformation at the corner position of the component to be detected.

[0036] Generally speaking, the component configuration detection device provided by the embodiment of the present invention can effectively detect the structural regularity of components with corners and inner side surfaces at the corners, with higher detection efficiency, and is also applicable to the case where the included angle between the inner side surfaces on both sides of the corner is small.

[0037] The detection system for internal fittings in a gallium nitride production furnace provided by the embodiment of the present invention can effectively detect the structural regularity of components with corners and inner side surfaces at the corners, with higher detection efficiency, and is also applicable to the case where the included angle between the inner side surfaces on both sides of the corner is small. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the embodiments. It should be understood that the following drawings only show some embodiments of the present invention, so they should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can also be obtained based on these drawings.

[0039] Figure 1 Schematic diagram of the internal structure of the detection column of the component configuration detection device provided by the embodiment of the present invention (corresponding Figure 4Cross-sectional view of plane A1 - B1);

[0040] Figure 2 is Figure 1 Schematic structural diagram of the support mechanism in;

[0041] Figure 3 Internal structural diagram of the detection column of the component configuration detection device provided by the embodiment of the present invention (corresponding to Figure 4 Cross-sectional view of plane A2 - B2);

[0042] Figure 4 Schematic diagram of the end face structure of the end where the second end wall of the detection column is located;

[0043] Figure 5 Schematic diagram of the cooperation state between the detection column and the component to be detected during the detection process;

[0044] Figure 6 Schematic diagram when confirming the rotation angle of the component to be detected;

[0045] Figure 7 Schematic diagram of the length direction of the rotation angle of the component to be detected;

[0046] Figure 8 Schematic diagram of the state when confirming the contact point;

[0047] Figure 9 Schematic diagram when adjusting the cooperation seat.

[0048] Explanation of reference numerals:

[0049] Detection column 100; First end wall 110; Second end wall 120; Guiding inner cavity 130; Ventilation hole 131; Sliding member 150; Elastic member 160; Accommodation groove 170; Conduction inner cavity 180; Protrusion 190; Detection needle 200; Support mechanism 300; Rolling ball 310; First magnetic module 311; Protective cover 320; Pressure detection mechanism 400; Reference point D; Cooperation seat 500; Second magnetic module 510; Transmission shaft 520; Boosting fan blade 530; Adjusting column 600; First pipe body 710; Second pipe body 720; Third pipe body 730; Component to be detected 2000. Detailed implementation manners

[0050] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations.

[0051] Accordingly, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts fall within the scope of protection of the present invention.

[0052] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0053] The terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0054] In addition, terms such as "parallel" and "perpendicular" do not mean that the components are required to be absolutely parallel or perpendicular, but can be slightly inclined. For example, "parallel" only means that its direction is more parallel relative to "perpendicular", and does not mean that the structure must be completely parallel, but can be slightly inclined.

[0055] In the description of the present invention, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0056] To overcome the deficiencies in the prior art, please refer to Figures 1 - 4 , this embodiment provides a component configuration detection device, which includes: a detection column 100, a detection needle 200, a support mechanism 300, a pressure detection mechanism 400, a displacement detection mechanism (not shown in the figure) and a controller (not shown in the figure).

[0057] For the convenience of description, the two end walls of the detection column 100 are respectively denoted as the first end wall 110 and the second end wall 120. The detection column 100 has a guiding inner cavity 130 arranged along its axial direction. The inner end wall of one end of the guiding inner cavity 130 close to the first end wall 110 is provided with a mating through hole penetrating through to the first end wall 110, and the mating through hole is arranged along the axial direction of the detection column 100. In this embodiment, the detection column 100 is a regular quadrangular prism, and the guiding inner cavity 130 and the mating through hole are both coaxially arranged with the detection column 100.

[0058] It should be noted that the shape of the detection column 100 is not fixed and can be flexibly selected according to actual needs. The present application does not make specific restrictions on the specific shape of the detection column 100.

[0059] A sliding member 150 is slidably fitted in the guiding inner cavity 130, and an elastic member 160 is abutted between the inner end wall at the end of the guiding inner cavity 130 away from the first end wall 110 and the sliding member 150.

[0060] The detection needle 200 is slidably fitted in the fitting through hole. The detection needle 200 is arranged along the axial direction of the detection column 100 and is fixedly connected to the sliding member 150. In this embodiment, the detection needle 200 is coaxially arranged with the detection column 100. In the natural state, under the elastic force of the elastic member 160, the detection needle 200 will be fully pushed out from the detection column 100.

[0061] The support mechanism 300 is arranged on the first end wall 110. Support mechanisms 300 are arranged on both opposite sides of the detection needle 200. The detection needle 200 is located at the middle position of the gap between the support mechanisms 300 on both sides. In other words, the distances from the detection needle 200 to the support mechanisms 300 on both sides are the same.

[0062] Optionally, the support mechanism 300 can be set to 4, that is, 2 support mechanisms 300 are arranged on each side. Further optionally, the 4 support mechanisms 300 are respectively arranged at the four corners of the first end wall 110 of the detection column 100.

[0063] The pressure detection mechanism 400 is installed between the support mechanism 300 and the detection column 100 to detect the load borne by the support mechanism 300, that is, by detecting the pressure between the support mechanism 300 and the detection column 100, to judge the magnitude of the load borne by the support mechanism 300.

[0064] The displacement detection mechanism is used to detect the extension length of the detection needle 200, that is, to detect the length of the detection needle 200 extending out of the fitting through hole.

[0065] Both the pressure detection mechanism 400 and the displacement detection mechanism are electrically connected to the controller.

[0066] When detecting the component to be detected 2000 (taking the V-shaped component as an example), the tip of the detection needle 200 can be first abutted against the corner of the component to be detected 2000. More specifically, the tip of the detection needle 200 is abutted against the inner side of the corner of the component to be detected 2000, as Figure 5 shown. Subsequently, the detection column 100 can be gradually moved closer to the corner of the component to be detected 2000. During this process, the detection needle 200 gradually moves into the detection column 100. The detection needle 200 pushes the sliding member 150 to squeeze the elastic member 160 until the support mechanisms 300 of the detection column 100 are respectively abutted against the two side surfaces of the corner.

[0067] When the support mechanisms 300 on both sides respectively abut against the two side surfaces of the corner, a stable structure is formed. At this time, a corresponding geometric relationship is formed between the position point where the tip of the detection needle 200 is located and the position points of the fitting parts between the support mechanisms 300 on both sides and the side surface of the component 2000 to be detected. In this state, since the distance between the support mechanisms 300 on both sides is fixed, the extension length of the detection needle 200 is only related to the angle of the corner of the component 2000 to be detected. Therefore, the angle of the corner of the component 2000 to be detected can be determined by using the extension length of the detection needle 200 in the above state. If the corner angle of the component 2000 to be detected determined by the extension length of the detection needle 200 is different from the designed corner angle of the component 2000 to be detected, it indicates that the component 2000 to be detected has deformed.

[0068] When the pressure detection mechanism 400 detects that the loads of the support mechanisms 300 on both sides are the same, that is, when the pressure detection mechanism 400 detects that the pressures at the support mechanisms 300 on both sides are the same, the controller determines that the detection column 100 is in the detection in-place state, and the controller determines the corner angle of the component 2000 to be detected according to the extension length of the detection needle 200 in this state.

[0069] Specifically, the point corresponding to the tip of the detection needle 200 can be used as the reference point D, as Figure 6 shown. Based on the reference point D and the extension length of the detection needle 200, the position of the first end wall 110 of the detection column 100 can be determined. According to the position of the first end wall 110, the position of the support mechanism 300 can be determined, so as to determine the relative position relationship between the reference point D and each support mechanism 300. Taking the reference point D as an end point, the tangents to the support parts of each support mechanism 300 can be determined, such as Figure 6 the tangents p1 and p2 shown in Figure 6 (due to the perspective relationship, Figure 6 only shows two tangents), and the angle of the corner of the component 2000 to be detected can be determined according to these tangents.

[0070] Through this design, the component 2000 to be detected can be detected efficiently and intuitively, helping to judge whether there is deformation at the corner position of the component 2000 to be detected.

[0071] Generally speaking, the component configuration detection device provided in this embodiment can effectively detect the structural regularity of a component with a corner and an inner side surface at the corner, with higher detection efficiency, and is also applicable to the case where the included angle between the inner side surfaces on both sides of the corner is small.

[0072] It should be noted that the specific model and specification of the displacement detection mechanism can be flexibly selected according to actual needs, and the present application does not make specific limitations.

[0073] In this embodiment, the support mechanism 300 is a rolling mechanism. That is, on the basis of having the support function, the support mechanism 300 can also enable the detection column 100 to move relative to the mechanism to be detected.

[0074] The component configuration detection device further includes: a moving mechanism (not shown in the figure). The moving mechanism is used to move the detection column 100. The moving mechanism can adopt a robotic arm, and is not limited thereto. The moving mechanism can be flexibly selected according to actual needs, and the present application does not make specific limitations. The moving mechanism is electrically connected to the controller.

[0075] When the controller determines that the detection column 100 is in the detection in-place state, the controller can control the moving mechanism to move the detection column 100 along the length direction of the angle of the component 2000 to be detected.

[0076] It should be noted that in the present application, the length direction of the angle of the component 2000 to be detected refers to Figure 7 the K1 direction or the K2 direction in

[0077] which is the direction parallel to the intersection line of the two side surfaces of the angle.

[0078] If the structure of the component 2000 to be detected is a standard V-shaped part, then the two side surfaces of the angle should both be standard planes. During the process of moving the detection column 100 along the length direction of the angle of the component 2000 to be detected, the load borne by the support mechanism 300 detected by the pressure detection mechanism 400 and the extended length of the detection needle 200 detected by the displacement detection mechanism should both remain unchanged.

[0079] In addition to the above, when the displacement detection mechanism detects that the extended length of the detection needle 200 changes, that is, during the movement process, the extended length of the detection needle 200 does not remain unchanged, it indicates that there is a structural defect at the angle (specifically, at the intersection line of the two side surfaces of the angle). The controller then marks the position where the tip of the detection needle 200 is located when the extended length changes as the defect position. More specifically, during the movement process, if the extended length of the detection needle 200 is detected to become longer, it indicates that there may be a depression at the position where the tip of the detection needle 200 is located. If the extended length of the detection needle 200 is detected to become shorter, it indicates that there may be a protrusion at the position where the tip of the detection needle 200 is located.

[0080] Only one of the above two situations may occur at the same time, or both may occur simultaneously.

[0081] Optionally, when the controller marks the defective positions, it can determine the specific positions of each defective position on the component 2000 to be detected based on the starting position when the detection column 100 starts to move, the moving speed of the detection column 100, and the time when the defective position appears, and is not limited thereto.

[0082] Furthermore, the support mechanism 300 includes: a rolling ball 310 and a protective cover 320.

[0083] A receiving groove 170 is formed at the edge of the first end wall 110. An installation groove is formed on the groove wall of the receiving groove 170 close to the second end wall 120, and the pressure detection mechanism 400 is installed in the installation groove.

[0084] Specifically, in this embodiment, the receiving grooves 170 are formed at the four corners of the first end wall 110. Wherein, when the axis line of the detection column 100 is set in the vertical direction and the first end wall 110 is placed below the second end wall 120, the installation groove is located at the top of the receiving groove 170, that is, when the pressure detection mechanism 400 is installed in the installation groove, the pressure detection mechanism 400 is located directly above the receiving groove 170.

[0085] The protective cover 320 is arranged in the receiving groove 170 and fixedly connected to the pressure detection surface of the pressure detection mechanism 400. A gap is left between the protective cover 320 and the groove wall of the receiving groove 170, which is convenient for the pressure detection mechanism 400 to more accurately detect the load of the support mechanism 300.

[0086] The inner side wall of the protective cover 320 is spherical, the rolling ball 310 is spherical, the diameter of the spherical surface corresponding to the inner side wall of the protective cover 320 is adapted to the diameter of the rolling ball 310, and the rolling ball 310 can be rotatably matched in all directions in the protective cover 320. In this embodiment, the shape of the protective cover 320 can be regarded as a spherical shell with an opening as a whole.

[0087] Through this design, the support mechanism 300 is attached to the side surface of the corner of the component 2000 to be detected through the rolling ball 310. Since the rolling ball 310 is in a "point contact" form when it is attached to the side surface of the corner, it is beneficial to more accurately determine the tangent line, thereby further improving the detection accuracy of the corner angle.

[0088] Furthermore, the sliding member 150 is attached to the inner side wall of the guiding cavity 130, and the sliding member 150 is slidably sealed with the inner wall of the guiding cavity 130. In other words, the sliding member 150 is equivalent to a "piston".

[0089] The diameter of the detection needle 200 is adapted to the aperture of the mating through-hole. An air vent hole 131 that penetrates through to the first end wall 110 is further provided on the inner end wall of the guiding inner cavity 130 near one end of the first end wall 110, so as to achieve air pressure balance on the side of the sliding member 150 in the guiding inner cavity 130 close to the first end wall 110.

[0090] The detection column 100 further has a conduction inner cavity 180 arranged along its axial direction. The conduction inner cavity 180 is arranged at an interval from the guiding inner cavity 130, and at least one accommodation groove 170 communicates with the conduction inner cavity 180. In this embodiment, the number of conduction inner cavities 180 is 1, and only one accommodation groove 170 communicates with the conduction inner cavity 180.

[0091] The component configuration detection device further includes: a mating seat 500, an adjustment column 600, a first pipe body 710, a second pipe body 720, and a third pipe body 730.

[0092] The rolling ball 310 has a first magnetic module 311 inside, and the first magnetic module 311 is fixedly matched with the rolling ball 310.

[0093] The mating seat 500 is attached to the outer side wall of the protective cover 320. The mating seat 500 has a second magnetic module 510 inside, and the second magnetic module 510 is rotatably matched in the mating seat 500.

[0094] The adjustment column 600 is fixedly connected to the mating seat 500, and the adjustment column 600 has a conveying inner cavity. The second magnetic module 510 is fixedly connected with a transmission shaft 520. The transmission shaft 520 penetrates through the mating seat 500 and the adjustment column 600 and extends into the conveying inner cavity. The transmission shaft 520 is fixedly connected with a supercharging fan blade 530, and the supercharging fan blade 530 is located in the conveying inner cavity.

[0095] Both the first pipe body 710 and the second pipe body 720 are fixedly connected to the adjustment column 600 and communicate with the conveying inner cavity. The supercharging fan blade 530 is located between the first pipe body 710 and the second pipe body 720. The third pipe body 730 is located at one end of the guiding inner cavity 130 away from the first end wall 110 and communicates the guiding inner cavity 130 and the conduction inner cavity 180.

[0096] One end of the first pipe body 710 away from the adjustment column 600 communicates with the external atmosphere. Optionally, the first pipe body 710 can communicate with the external atmosphere through a flexible extension pipe (not shown in the figure). The extension pipe penetrates through the inner wall of the conduction inner cavity 180 and extends outside the detection column 100, and is not limited thereto.

[0097] The second pipe body 720 and the third pipe body 730 are connected by a flexible connecting pipe (not shown in the figure), and the connecting pipe is arranged in the conduction inner cavity 180.

[0098] Among them, the second magnetic module 510 is coaxially arranged with the transmission shaft 520, and the first magnetic module 311 and the second magnetic module 510 are magnetically coupled. When the moving mechanism moves the detection column 100 along the corner length direction of the component to be detected 2000, when the rolling ball 310 rotates, it can drive the second magnetic module 510 to rotate through the first magnetic module 311, so as to drive the booster fan blade 530 by using the transmission shaft 520, so that the booster fan blade 530 conveys the gas in the first pipe body 710 to the second pipe body 720, and further increases the air pressure in the space on the side of the sliding member 150 away from the first end wall 110 in the guiding inner cavity 130, forming an air pressure difference on both sides of the sliding member 150. Under the combined action of the air pressure difference and the elastic member 160, the force acting on the sliding member 150 towards the side where the mating through hole is located increases, so as to ensure that the tip of the detection needle 200 fully fits the corner.

[0099] Through this design, when the detection column 100 moves along the length direction of the corner, the greater the moving speed, the greater the pressure difference between the two sides of the sliding member 150, and the greater the force acting on the sliding member 150 towards the side where the mating through hole is located, which is more conducive to the tip of the detection needle 200 fully fitting the corner. In this way, even if the tip of the detection needle 200 encounters a protrusion, after the detection needle 200 "crosses" the protrusion, it can be ensured that the detection needle 200 quickly rebounds and quickly re-fits the corner, thereby ensuring the accuracy of the detection.

[0100] If the "boosting" method is not adopted, when the moving speed of the detection column 100 along the length direction of the corner is relatively large, if the tip of the detection needle 200 encounters a protrusion during the movement, after the detection needle 200 "crosses" the protrusion, if the resilience is small, the rebound of the detection needle 200 will be relatively slow. At this time, if the moving speed of the detection column 100 is too fast, it will cause the detection needle 200 to move a greater distance before re-fitting the corner, resulting in an overestimated length of the protrusion in the corner length direction in the detection result.

[0101] The above design method can realize the automatic adaptation between the boosting amplitude and the moving speed of the detection column 100 (the rotation speed of the rolling ball 310). When the moving speed is high, the boosting amplitude is large; when the moving speed is low, the boosting amplitude is small.

[0102] In this way, the elastic force of the elastic member 160 can be designed to be relatively small. On the one hand, it can reduce the wear of the detection needle 200 and the wear of the component to be detected 2000. On the other hand, when the moving speed of the detection column 100 is unexpectedly large, the credibility of the detection result can still be ensured, and the probability of repeated inspection can be reduced.

[0103] Specifically, in this embodiment, the first magnetic module 311 is coaxially arranged with the rolling ball 310, and the axis line of the second magnetic module 510 passes through the center of the rolling ball 310.

[0104] The outer side wall of the protective cover 320 is also spherical, and the mating seat 500 has a mating surface for fitting with the outer side wall of the protective cover 320. The mating surface is adapted to the outer side wall of the protective cover 320. The mating seat 500 is always in contact with the protective cover 320 through the mating surface. The mating seat 500 can move along the outer side wall of the protective cover 320 in a fitting manner. During the movement, the mating seat 500 is always in contact with the protective cover 320 through the mating surface, and the axis line of the transmission shaft 520 always passes through the center of the rolling ball 310.

[0105] The component configuration detection device further includes: a position adjustment mechanism.

[0106] The position adjustment mechanism cooperates with the mating seat 500 to drive the mating seat 500 to move along the outer side wall of the protective cover 320 in a fitting manner to adjust the position of the mating seat 500 at the protective cover 320.

[0107] In this embodiment, the centers of the rolling balls 310 of the 4 support mechanisms 300 are all located in the same plane, and this plane is perpendicular to the axis line of the detection column 100. When the position adjustment mechanism drives the mating seat 500 to move, the movement range of the mating seat 500 is within the same movement plane. This movement plane is perpendicular to the plane where the centers of the 4 rolling balls 310 are located, and this movement plane is also perpendicular to the length direction of the rotation angle of the component to be detected 2000.

[0108] The controller is further configured to determine the contact point of the rolling ball 310 according to the detected angle of the rotation angle of the component to be detected 2000 and the extended length of the detection needle 200. The contact point is the point on the rolling ball 310 used to contact the corresponding side surface when the rolling ball 310 abuts against the side surface of the component to be detected 2000.

[0109] The controller is further configured to execute a calibration process. The calibration process includes: when the controller just determines that the detection column 100 is in the detection in-place state, determining the contact point (as shown by point Q in Figure 8 ), and taking the connection line between the contact point and the center of the rolling ball 310 as the first reference line (as shown in Figure 8As shown by the line L1 in the figure, a second reference line extending along the length direction of the corner of the component 2000 to be detected (not shown in the figure) is established, and the plane where the first reference line and the second reference line are located is used as the reference plane. At this time, the detection column 100 can be driven a short distance along its axial direction away from the component 2000 to be detected, temporarily separating the detection column 100 from the component 2000 to be detected, that is, temporarily separating the rolling ball 310 from the side surface of the corner of the component 2000 to be detected, keeping the angle of the reference plane unchanged, and using the position adjustment mechanism to adjust the position of the mating seat 500 relative to the protective cover 320 so that the rotation axis line of the second magnetic module 510 is perpendicular to the above-determined reference plane, as Figure 9 shown. Since the first magnetic module 311 and the second magnetic module 510 are magnetically coupled, under the action of the second magnetic module 510, the rolling ball 310 will also rotate synchronously, keeping the first magnetic module 311 and the second magnetic module 510 in a coupled state all the time. Subsequently, the detection column 100 can be reset to the position corresponding to the detection in-place state. Next, the detection work can be carried out normally.

[0110] Through this design, during the process of the detection column 100 moving along the length direction of the corner of the component 2000 to be detected, it can be ensured that the first magnetic module 311 and the second magnetic module 510 can perform magnetic coupling transmission efficiently and accurately, ensuring smooth pressurization.

[0111] Furthermore, the first end wall 110 may not be a flat wall, but may be configured to protrude axially outward along the detection column 100, that is to say, a protrusion 190 is formed at one end of the detection column 100 away from the second end wall 120. The conduction inner cavity 180 also extends to the protrusion 190 to provide a larger space for the mating seat 500 to move along the protective cover 320.

[0112] In this way, the maximum rotation angle that the component configuration detection device can detect can also be changed, and the protruding distance of the protrusion 190 can be flexibly adjusted according to actual usage needs.

[0113] In this embodiment, the moving mechanism is also used to control the detection column 100 to approach and move away from the component 2000 to be detected to adjust the detection column 100 to the detection in-place state.

[0114] Optionally, in order to ensure that the moving mechanism can more accurately adjust the detection column 100 to the detection in-place state, a vision mechanism can also be set up to identify the configuration and the position of the corner of the component 2000 to be detected, so as to accurately match the detection column 100 with the corner.

[0115] This embodiment also provides a detection system for the internal fittings of a gallium nitride production furnace, which includes: the above-mentioned component configuration detection device and a fitting fixing mechanism (not shown in the figure).

[0116] The fitting fixing mechanism is used to fix the internal fittings in the gallium nitride production furnace, and the component configuration detection device is used to detect the rotation angle of the internal fittings fixed on the fitting fixing mechanism.

[0117] In summary, the component configuration detection device provided by the embodiment of the present invention can effectively detect the structural regularity of components with rotation angles and inner sides of the rotation angles, with higher detection efficiency, and is also applicable to the case where the included angle between the inner sides on both sides of the rotation angle is small.

[0118] The detection system for the internal fittings of a gallium nitride production furnace provided by the embodiment of the present invention can effectively detect the structural regularity of components with rotation angles and inner sides of the rotation angles, with higher detection efficiency, and is also applicable to the case where the included angle between the inner sides on both sides of the rotation angle is small.

[0119] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A component configuration detection device, characterized in that: include: A detection column, a detection needle, a supporting mechanism, a pressure detection mechanism, a displacement detection mechanism and a controller; The end walls at both ends of the detection column are respectively recorded as the first end wall and the second end wall; the detection column has a guide inner cavity arranged along its axial direction, and the inner end wall of the guide inner cavity close to the first end wall is provided with a matching through hole penetrating to the first end wall, and the matching through hole is arranged along the axial direction of the detection column; A sliding member is slidably fitted in the guide inner cavity, and an elastic member is abutted between the inner end wall of the guide inner cavity away from the first end wall and the sliding member; the detection needle is slidably fitted in the matching through hole, and the detection needle is arranged along the axial direction of the detection column and fixedly connected to the sliding member; The supporting mechanism is arranged on the first end wall, and the supporting mechanism is arranged on opposite sides of the detection needle, and the detection needle is located in the middle position of the gap between the supporting mechanisms on the two sides; The pressure detection mechanism is installed between the support mechanism and the detection column to detect the load borne by the support mechanism; the displacement detection mechanism is used to detect the extension length of the detection needle; the pressure detection mechanism and the displacement detection mechanism are both electrically connected to the controller; During detection, the tip of the detection needle is used to abut against the corner of the component to be detected, and the support mechanisms on both sides are used to abut against the two side surfaces of the corner respectively; when the pressure detection mechanism detects that the loads of the support mechanisms on both sides are the same, the controller determines that it is in the detection position state, and the controller determines the corner angle of the component to be detected according to the extended length of the detection needle; The supporting mechanism is a rolling mechanism; The component configuration detection device further includes: a moving mechanism; When the controller determines that the detection position is in the detection position state, the moving mechanism is used to move the detection column along the length direction of the corner of the component to be detected. When the pressure detection mechanism detects that the load borne by the support mechanism changes, the controller marks the position of the support mechanism when the load changes as a defective position, and / or when the displacement detection mechanism detects that the extended length of the detection needle changes, the controller marks the position of the tip of the detection needle when the extended length changes as a defective position; The supporting mechanism includes: a rolling ball and a protective cover; a receiving groove is provided at the edge of the first end wall, a mounting groove is provided on a side of the receiving groove close to the second end wall, and the pressure detection mechanism is installed in the mounting groove; The protective cover is arranged in the receiving groove and is fixedly connected to the pressure detection surface of the pressure detection mechanism, and there is a gap between the protective cover and the groove wall of the receiving groove; The inner side wall of the protective cover is in the shape of a spherical surface, the diameter of the spherical surface corresponding to the inner side wall of the protective cover is adapted to the diameter of the rolling ball, and the rolling ball can be universally rotatably fitted in the protective cover; A sliding seal is formed between the sliding member and the inner wall of the guide cavity; The detection column also has a conductive inner cavity arranged along its axial direction, the conductive inner cavity is spaced apart from the guide inner cavity, and at least one of the accommodating grooves is connected to the conductive inner cavity; The component configuration detection device also includes: a matching seat, an adjustment column, a first tube body, a second tube body and a third tube body; The rolling ball has a first magnetic module in it, and the first magnetic module is fixedly matched with the rolling ball; the matching seat is in contact with the outer wall of the protective cover, and the matching seat has a second magnetic module in it, and the second magnetic module is rotatably matched with the matching seat; The adjusting column is fixedly connected to the matching seat, and the adjusting column has a conveying inner cavity; the second magnetic module is fixedly connected to a transmission shaft, and the transmission shaft extends into the conveying inner cavity, and the transmission shaft is fixedly connected to a booster blade, and the booster blade is located in the conveying inner cavity; The first tube body and the second tube body are both fixedly connected to the adjusting column and communicated with the conveying inner cavity; the third tube body is located at one end of the guiding inner cavity away from the first end wall and communicates the guiding inner cavity with the conducting inner cavity; one end of the first tube body away from the adjusting column is communicated with the external atmosphere, and the second tube body and the third tube body are communicated with each other by a connecting pipe; The first magnetic module and the second magnetic module are magnetically coupled so that when the moving mechanism moves the detection column along the angular length direction of the component to be detected, the first magnetic module can drive the second magnetic module to rotate, so that the booster fan blade can transport the gas in the first tube body to the second tube body.

2. The component configuration detection device according to claim 1, characterized in that: The outer wall of the protective cover is also spherical, and the matching seat has a matching surface for fitting with the outer wall of the protective cover, and the matching surface is adapted to the outer wall of the protective cover so that the matching seat can move along the outer wall of the protective cover in a fitting manner; The component configuration detection device further includes: a position adjustment mechanism; the position adjustment mechanism cooperates with the matching seat to drive the matching seat to move along the outer side wall of the protective cover to adjust the position of the matching seat on the protective cover; The controller is also used to determine the contact point of the rolling ball according to the rotation angle and the extension length of the detection needle; the contact point is the point on the rolling ball that is used to contact the corresponding side surface when the rolling ball abuts against the side surface of the component to be detected; The controller is also used to execute a calibration process, which includes: taking the line between the contact point and the center of the rolling ball as a first reference line, establishing a second reference line extending along the length direction of the corner of the component to be detected, and taking the plane where the first reference line and the second reference line are located as a reference plane; keeping the angle of the reference plane unchanged, and using the position adjustment mechanism to adjust the position of the mating seat relative to the protective cover so that the rotation axis of the second magnetic module is perpendicular to the reference plane.

3. The component configuration detection device according to claim 2, characterized in that: The first end wall has a protrusion, and the conductive inner cavity extends to the protrusion to provide a space for the matching seat to move along the protective cover.

4. The component configuration detection device according to claim 1, characterized in that: The moving mechanism is also used to control the detection column to approach and move away from the component to be detected, so as to adjust the detection column to the detection position state.

5. A gallium nitride production furnace accessories detection system, characterized in that: include: A component configuration detection device as described in any one of claims 1 to 4.

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