Detection system and detection method

Abstract

The embodiment of the invention relates to the technical field of semiconductors, and provides a detection system and a detection method. The detection system comprises a carrying table, a first detection module, a second detection module and a controller. The controller is used for controlling relative movement or stopping relative movement between the carrying table and the first detection module based on the detection state of the first detection module, and when the detection state of the first detection module meets a preset condition, the controller controls the carrying table and the first detection module to stop relative movement and the carrying table and the second detection module to be relatively static; and shooting the surface of the to-be-detected object through a second detection module to obtain a second image. The preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, and / or the preset condition is that the information carried by the first image has the to-be-rechecked information of the to-be-detected target. According to the embodiment of the invention, both the detection speed and the detection precision are considered, so that the productivity is improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor technology, and in particular to a detection system and a detection method. Background Art

[0002] Wafers are core components in semiconductor technology. Even tiny impurities on the surface of the wafer can damage it and may affect the performance of subsequent wafers. Therefore, wafer inspection can not only improve the yield of the wafer process, but also improve the production efficiency of wafers. Wafer defect inspection mainly includes three categories: appearance inspection, electron beam inspection and optical inspection. In particular, optical inspection has received widespread attention due to its advantages such as high resolution and wide application range.

[0003] However, the optical detection method used in the detection equipment in the prior art is difficult to balance the detection accuracy and detection speed, and the detection speed is slow, which affects the production capacity. Summary of the invention

[0004] The embodiments of the present application provide a detection system and a detection method, which can take into account both detection accuracy and detection speed.

[0005] According to some embodiments of the present application, on the one hand, an embodiment of the present application provides a detection system, including: a carrier, the carrier is used to carry an object to be tested; a first detection module, the first detection module is used to scan the surface of the object to be tested and obtain a first image of the surface of the object to be tested during the relative movement between the object to be tested and the first detection module; a second detection module, the second detection module is used to photograph the surface of the object to be tested during the relative stillness of the object to be tested and the second detection module to obtain a second image of the surface of the object to be tested; a controller, the controller is used to control the relative movement between the carrier and the first detection module or stop the relative movement based on the detection state of the first detection module , when the detection state of the first detection module meets the preset conditions, the controller controls the relative movement between the carrier and the first detection module to stop and the carrier and the second detection module to be relatively still, and the surface of the object to be detected is photographed by the second detection module to obtain the second image, and the surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image; wherein, the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, and the preset length is less than or equal to the field of view width of the second detection module, and / or, the preset condition is that the information carried by the first image contains information to be re-inspected of the target to be detected.

[0006] In some embodiments, the processor is also used to obtain the target position of the target to be measured according to the first image; the controller is also used to: confirm whether the target to be measured is in the field of view of the second detection module according to the target position; if so, control the carrier and the second detection module to be relatively still, and photograph the surface of the object to be measured through the second detection module; if not, adjust the relative position between the carrier and the second detection module so that the target to be measured is in the field of view of the second detection module, and photograph the surface of the object to be measured through the second detection module.

[0007] In some embodiments, the preset condition is that the information carried by the first image contains information to be reviewed of the target to be measured; the first image includes: multiple sub-images acquired by the first detection module within the preset time during the movement of the carrier relative to the first detection module; the processor is used for: each time the first detection module acquires the sub-image, the processor receives and analyzes whether the information carried by the sub-image contains information to be reviewed of the target to be measured, so as to obtain whether the information carried by the first image contains information to be reviewed.

[0008] In some embodiments, the scanning length of the first detection module within the preset time is less than or equal to the field of view width of the second detection module; the size of the field of view area of ​​the first detection module along the scanning direction is smaller than the size of the field of view area of ​​the second detection module along the scanning direction.

[0009] In some embodiments, the field of view area of ​​the second detection module and the field of view area of ​​the first detection module are arranged along the scanning direction, and the field of view area of ​​the second detection module contacts but does not overlap with the field of view area of ​​the first detection module.

[0010] In some embodiments, the preset condition also includes that the scanning length of the first detection module within the preset time is equal to the preset length; the processor is used to: obtain whether the scanning length of the first detection module reaches the preset length; if so, analyze whether the information carried by the first image obtained within the preset time contains information to be re-inspected of the target to be measured.

[0011] In some embodiments, the preset condition is that the scanning length of the first detection module within the preset time is equal to the preset length; the controller is also used to: obtain whether the scanning length of the first detection module reaches the preset length; if so, control the carrier and the second detection module to be relatively still, and the second detection module takes a picture of the surface of the object to be detected during the period when the carrier and the second detection module are relatively still; if not, control the carrier and the first detection module to continue to move relative to each other.

[0012] In some embodiments, the first detection module includes a linear array detector, and the second detection module includes a planar array detector.

[0013] In some embodiments, the first detection module and the second detection module share at least part of the optical path structure; the optical path structure includes: a light source assembly, which is used to provide incident light; an optical lens group, which is used to transmit the incident light to the surface of the object to be detected to form signal light, and allow the signal light to enter the first detection module and the second detection module respectively.

[0014] In some embodiments, the optical lens group includes: a collecting lens group and a first spectroscopic component, the collecting lens group is used to collect signal light from the surface of the object to be measured and transmit the signal light to the first spectroscopic component; the first spectroscopic component is used to split the signal light transmitted to the first spectroscopic component, and transmit part of the light to the first detection module, and transmit part of the light to the second detection module.

[0015] In some embodiments, the center of one of the first detection module and the second detection module is located on the central axis of the signal light, and the center of the other one is offset from the central axis of the signal light.

[0016] The embodiments of the present application also provide a detection method, which can be applied to the detection system provided in the above embodiments. The detection method comprises: executing a first detection step, in which the stage and the first detection module move relative to each other so that the object to be detected moves relative to the first detection module; during the movement of the object to be detected relative to the first detection module, the first detection module scans the surface of the object to be detected and obtains a first image of the surface of the object to be detected; executing a second detection step, in which, based on the detection state of the first detection module, the stage and the first detection module are controlled to move relative to each other or stop moving relative to each other, when the detection state of the first detection module meets a preset condition, the stage and the first detection module stop moving relative to each other and the stage and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module to obtain a second image of the surface of the object to be detected, and the surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image; wherein the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, and the preset length is less than or equal to the field of view width of the second detection module, and / or the preset condition is that the information carried by the first image contains information to be re-inspected of the object to be detected.

[0017] In some embodiments, the preset conditions include that the information carried by the first image contains information to be re-inspected of the target to be measured; and based on the detection state of the first detection module, controlling the relative movement or stopping the relative movement between the carrier and the first detection module includes: analyzing whether the information carried by the first image contains information to be re-inspected of the target to be measured; if the information carried by the first image contains information to be re-inspected of the target to be measured, after the target to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0018] In some embodiments, if the information carried by the first image contains information to be re-inspected of the target to be measured, when the target to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the target to be measured on the surface of the object to be measured is photographed by the second detection module, including: obtaining the target position of the target to be measured according to the first image; and confirming whether the target to be measured is in the field of view of the second detection module according to the target position; after the target to be measured enters the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0019] In some embodiments, the preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured; the analysis of whether the information carried by the first image contains information to be re-inspected of the target to be measured includes: during the movement of the stage relative to the first detection module, the first detection module scans the surface of the object to be measured to obtain multiple sub-images within the preset time; each time one of the sub-images is obtained and the information carried by the sub-image contains information to be re-inspected of the target to be measured is analyzed to obtain whether the information carried by the first image contains information to be re-inspected of the target to be measured; if any of the sub-images contains information to be re-inspected of the target to be measured, then after the target to be measured is in the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0020] In some embodiments, the preset condition also includes that the scanning length of the first detection module within the preset time is equal to the preset length; based on the detection state of the first detection module, controlling the relative movement or stopping the relative movement between the carrier and the first detection module includes: obtaining whether the scanning length of the first detection module reaches the preset length; if so, analyzing whether the information carried by the first image obtained within the preset time contains the information to be re-inspected of the target to be measured; if the information carried by the first image contains the information to be re-inspected of the target to be measured, then after the target to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0021] In some embodiments, the analysis of whether the information carried by the first image acquired within the preset time contains information to be re-inspected of the target to be measured includes: the first detection module acquires multiple sub-images within the preset time; if the scanning length of the first detection module is equal to the preset length, analyzing whether the information carried by each of all the sub-images contains information to be re-inspected of the target to be measured, so as to obtain whether the information carried by the first image contains information to be re-inspected of the target to be measured.

[0022] In some embodiments, the detection method also includes: if among the multiple sub-images acquired within the preset time, the information carried by each sub-image does not contain the information to be re-inspected of the target to be measured, then controlling the relative movement between the carrier and the first detection module to continue; or, if among the multiple sub-images acquired within the preset time, the information carried by each sub-image does not contain the information to be re-inspected of the target to be measured, then stopping the relative movement between the carrier and the first detection module, and photographing the surface of the object to be measured by the second detection module.

[0023] In some embodiments, the preset condition is that the scanning length of the first detection module within the preset time is equal to the preset length; based on the detection state of the first detection module, controlling the relative movement or stopping the relative movement between the carrier and the first detection module includes: obtaining whether the single scanning length of the first detection module reaches the preset length; if so, the carrier and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module; if not, the carrier and the first detection module continue to move relative to each other.

[0024] In some embodiments, the detection method further includes: repeatedly performing the first detection step and the second detection step until the detection of the surface to be detected of the object to be detected is completed.

[0025] Compared with the related art, the technical solution provided by the embodiment of the present application has at least the following technical effects:

[0026] In the technical solution of the detection system provided in the embodiment of the present application, the detection system includes a carrier, a controller, a first detection module and a second detection module. During the period when the controller controls the relative movement between the carrier and the first detection module, the first detection module scans the surface of the object to be detected on the carrier and captures a first image; the controller is also used to control the relative movement between the carrier and the first detection module or stop the relative movement based on the detection state of the first detection module. Wherein, when the detection state of the first detection module meets the preset condition, the controller controls the carrier and the first detection module to stop relative movement and the carrier and the second detection module to be relatively still, and the second detection module is used to capture the second image of the surface of the object to be detected, and the preset condition is that the scanning length of the first detection module within the preset time is equal to the preset length, the preset length is less than or equal to the field of view width of the second detection module, and / or, the preset condition is that the information carried by the first image contains information to be re-inspected of the object to be detected. Compared with the scheme in the related art of first using the full inspection module to scan the entire surface of the object to be tested and then using the re-inspection module to move in the area corresponding to different information to be re-inspected (the area is the area where the target to be tested exists on the surface of the object to be tested), the embodiment of the present application can avoid the problem of the second inspection module moving back and forth in the area corresponding to different information to be re-inspected, and the first inspection module has the advantages of fast scanning speed and the second inspection module has high detection accuracy. Therefore, the embodiment of the present application is beneficial for taking into account both detection speed and detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] One or more embodiments are exemplarily described by the pictures in the corresponding drawings. These exemplified descriptions do not constitute limitations on the embodiments. Unless otherwise stated, the pictures in the drawings do not constitute proportional limitations. In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 A schematic diagram of the structure of a detection system provided in the first embodiment of the present application;

[0029] Figure 2 for Figure 1 A positional relationship diagram of the field of view area of ​​the first detection module and the field of view area of ​​the second detection module;

[0030] Figure 3 for Figure 1 A schematic diagram of a structure including an optical path structure in a detection system;

[0031] Figure 4 A schematic diagram of the structure of a detection system provided in the second embodiment of the present application;

[0032] Figure 5 A schematic diagram of the structure of a detection system provided in the third embodiment of the present application;

[0033] Figure 6 A schematic flow chart of the detection method provided in the fourth embodiment of the present application. DETAILED DESCRIPTION

[0034] As can be seen from the background technology, the optical detection method used in the detection equipment in the related art is difficult to take into account both the detection accuracy and the detection speed. The detection speed is slow, which affects the production capacity.

[0035] Analysis found that in the relevant technology, in order to balance the inspection speed and inspection accuracy during wafer inspection, it is often necessary to first use the full inspection module to quickly and comprehensively scan the wafer surface; then use the re-inspection module to re-inspect the defects detected by the full inspection module. This inspection method requires the wafer to be inspected twice, resulting in a decrease in throughput. The re-inspection module needs to move between different positions to be re-inspected and complete the shooting of each position to be re-inspected, resulting in a slow inspection speed.

[0036] At least to solve the above problems, the embodiment of the present application provides a detection system, the detection system includes a stage, a controller, a first detection module and a second detection module, the first detection module is used to scan the surface of the object to be detected during the relative movement between the object to be detected and the first detection module, and obtain a first image of the surface of the object to be detected; the controller is used to control the relative movement between the stage and the first detection module or stop the relative movement based on the detection state of the first detection module, when the detection state of the first detection module meets the preset condition, the controller controls the relative movement between the stage and the first detection module to stop and the stage and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module to obtain a second image, the surface area of ​​the object to be detected represented by the first image is located in the surface area of ​​the object to be detected represented by the second image; the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module, and / or the preset condition is that the information carried by the first image contains the information to be re-inspected of the object to be detected. The detection system provided by the embodiment of the present application can take into account the requirements of both the detection speed and detection accuracy of the object to be detected.

[0037] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in combination with the specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present application.

[0038] In the description of the embodiments of the present application, "at least one" means one or more, and "plurality" means two or more, unless otherwise clearly and specifically defined.

[0039] In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features.

[0040] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0041] In the description of the embodiments of the present application, when a component "includes" another component, unless otherwise specified, other components are not excluded, and other components may be further included. The above-mentioned "component" may refer to: layer, film, region, part, structure, etc.

[0042] Figure 1 A schematic diagram of the structure of the detection system provided in the first embodiment of the present application.

[0043] refer to Figure 1The detection system includes: a carrier 101, the carrier 101 is used to carry the object to be detected 10; a first detection module 102, the first detection module 102 is used to scan the surface of the object to be detected 10 during the relative movement between the object to be detected 10 and the first detection module 102, and obtain a first image of the surface of the object to be detected 10; a second detection module 103, the second detection module 103 is used to photograph the surface of the object to be detected 10 during the relative stillness between the object to be detected 10 and the second detection module 103, so as to obtain a second image of the surface of the object to be detected 10; a controller 104, the controller 104 is used to control the relative movement or stop of the carrier 101 and the first detection module 102 based on the detection state of the first detection module 102. For movement, when the detection state of the first detection module 102 meets the preset conditions, the controller 104 controls the relative movement between the stage 101 and the first detection module 102 to stop and the stage 101 and the second detection module 103 to be relatively still, and the surface of the object to be tested 10 is photographed by the second detection module 103 to obtain a second image, and the surface area of ​​the object to be tested 10 represented by the first image is located within the surface area of ​​the object to be tested 10 represented by the second image; wherein the preset condition is that the scanning length of the first detection module 102 is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module 103, and / or the preset condition is that the information carried by the first image contains information to be re-inspected of the object to be tested.

[0044] The detection system provided in this embodiment will be described in detail below with reference to the accompanying drawings.

[0045] In this embodiment, the stage 101 is a movable stage. Specifically, during the detection of the detection system, the stage 101 moves and the first detection module 102 is stationary, so that the stage 101 drives the object to be detected 10 and the first detection module 102 to move relative to each other, so that the first detection module 102 can scan the object to be detected 10 and capture the first image of the surface of the object to be detected 10. In addition, the movement of the stage 101 can also drive the target to be detected on the object to be detected 10 to enter the field of view of the second detection module 103, so that the second detection module 103 can capture the surface of the object to be detected 10 to obtain a second image.

[0046] Accordingly, the first detection module 102 and the second detection module 103 can be fixed. It can be understood that in other embodiments, the carrier is a movable carrier, the first detection module can also be a movable detection module, and the second detection module can also be a movable detection module.

[0047] It is understandable that in other embodiments, the carrier is a fixed carrier, the first detection module is a movable detection module, and the second detection module is a movable detection module. Specifically, during the detection of the detection system, the carrier is fixed and the first detection module moves, so that the object to be detected and the first detection module move relative to each other, so that the first detection module can scan the object to be detected and capture the first image of the surface of the object to be detected. In addition, when the second detection module is required to capture the object to be detected, the second detection module moves so that the target to be detected on the object to be detected enters the field of view of the second detection module, and then the second detection module is stationary, so that the second detection module can capture the surface of the object to be detected to obtain the second image.

[0048] That is to say, in the embodiment of the present application, it is not limited whether the carrier 101, the first detection module 102 and the second detection module 103 are fixed structures or movable structures, as long as it is ensured that the carrier 101 and the first detection module 102 can move relative to each other or stop moving relative to each other, and the second detection module 103 can photograph the surface of the object 10 to be tested.

[0049] The object to be tested 10 can be any object that needs to be subjected to surface inspection. In this embodiment, the object to be tested 10 is a wafer. In other embodiments, the object to be tested can also be a chip.

[0050] In this embodiment, the target to be measured is a defect on the surface of the object to be measured 10. The defect may be a scratch, a crack, a pit, a particle or surface contamination.

[0051] In this embodiment, the first detection module 102 is a linear array detector, and the corresponding first detection module 102 is also called a line scanning module. Using a linear array detector as the first detection module 102 is conducive to improving the scanning speed of the first detection module 102, thereby improving the detection speed of the detection system.

[0052] In this embodiment, the second detection module 103 is an array detector, and the corresponding second detection module 103 is also called an area scanning module or a re-inspection module. Using an array detector as the second detection module 103 is conducive to improving the detection accuracy of the second detection module 103, thereby improving the detection accuracy of the detection system.

[0053] That is, the first detection module 102 is used to quickly scan the surface of the object to be detected, and the second detection module 103 is used to re-check the surface of the object to be detected, and the detection accuracy of the second detection module 103 is greater than that of the first detection module 102.

[0054] In this embodiment, the preset condition is that the information carried by the first image contains the information to be rechecked of the target to be measured. Specifically, if the information carried by the first image captured by the first detection module 102 contains the information to be rechecked of the target to be measured, the second detection module 103 is required to perform a recheck to further confirm whether the target to be measured exists and the specific information of the target to be measured.

[0055] In this embodiment, the detection system also includes: a processor 105, which is used to receive the first image and analyze whether the information carried by the first image contains information to be re-inspected of the target to be measured; if the information carried by the first image contains information to be re-inspected of the target to be measured, the processor 105 sends a control signal to the controller 104, and the controller 104 controls the target to be measured to be in the field of view of the second detection module 103 in response to the control signal. The stage 101 and the second detection module 103 are relatively stationary, and the surface of the object to be measured 10 is photographed by the second detection module 103.

[0056] In this embodiment, the processor 105 and the controller 104 are independent devices. In other embodiments, the processor and the controller may also be integrated into the same device.

[0057] In this embodiment, the processor 105 is also used to obtain the target position of the target to be measured according to the first image; the controller 104 is also used to: confirm whether the target to be measured is in the field of view of the second detection module 103 according to the target position; if so, control the carrier 101 and the second detection module 103 to be relatively still, and use the second detection module 103 to photograph the surface of the object to be measured 10; if not, adjust the relative position between the carrier 101 and the second detection module 103 so that the target to be measured is in the field of view of the second detection module 103, and use the second detection module 103 to photograph the surface of the object to be measured 10.

[0058] Specifically, the information carried by the first image also includes position information. If the processor 105 analyzes the information carried by the first image to include information to be re-inspected of the target to be measured, the processor 105 also analyzes the position information of the target to be measured, thereby obtaining the target position of the target to be measured, that is, obtaining the position of the target to be measured in the scanning area where the first detection module 102 scans the surface of the object to be measured 10. The controller 104 is used to confirm whether the target to be measured is in the field of view of the second detection module 103 based on the positional relationship between the target position and the field of view of the second detection module 103.

[0059] If the target to be measured is not in the field of view of the second detection module 103, the controller 104 adjusts the position of the stage 101, that is, adjusts the position of the target to be measured 10, so as to adjust the relative position between the stage 101 and the second detection module 103, so that the target to be measured is in the field of view of the second detection module 103. If the target to be measured is in the field of view of the second detection module 103, the controller 104 controls the stage 101 to stop moving, so that the stage 101 and the second detection module 103 are relatively stationary.

[0060] It can be understood that the above is explained by taking the carrier 101 as a movable carrier as an example. As can be seen from the above description, in other embodiments, the controller can also control the first detection module to move or remain stationary, and control the second detection module to move or remain stationary. To avoid redundancy, it will not be described in detail here.

[0061] In this embodiment, the processor 105 is further configured to receive the second image captured by the second detection module 102 and analyze the second image to obtain information of the target to be detected.

[0062] In this embodiment, the preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured. The first image includes: multiple sub-images acquired by the first detection module 102 within a preset time during the movement of the carrier 101 relative to the first detection module 102. The processor 105 is specifically used for receiving and analyzing whether the information carried by the sub-image contains information to be re-inspected of the target to be measured each time the first detection module 102 acquires a sub-image, so as to obtain whether the information carried by the first image contains information to be re-inspected of the target to be measured. If the processor 105 analyzes that the information carried by the sub-image contains information to be re-inspected of the target to be measured, it means that the information carried by the first image contains information to be re-inspected of the target to be measured.

[0063] That is to say, every time the first detection module 102 acquires a sub-image, the processor 105 receives the sub-image and analyzes whether the information carried by the sub-image contains information to be re-inspected of the target to be measured. It can be considered that the processor 105 performs real-time analysis on the first image acquired by the first detection module 102. If the information carried by the sub-image contains information to be re-inspected, the controller controls the relative movement between the carrier 101 and the first detection module 102 to stop, that is, the first detection module 102 stops scanning the surface of the object to be measured 10.

[0064] Figure 2 for Figure 1 Schematic diagram of the positional relationship between the field of view areas of the first detection module and the second detection module.

[0065] refer to Figure 2In this embodiment, the size of the field of view area S1 of the first detection module 102 along the scanning direction X is smaller than the size of the field of view area S2 of the second detection module 103 along the scanning direction X. Thus, along the scanning direction X, the field of view area S2 of the second detection module 103 is larger than the field of view area S2 of the first detection module 102. When the second detection module 103 is used to photograph the target to be detected, even if the stage 101 is not moved (refer to Figure 1 ) and the second detection module 103, or only needs to move the relative position slightly, to ensure that the target to be measured is in the field of view of the second detection module 103, so that the second detection module 103 can capture the target to be measured, which is beneficial to further improve the detection efficiency.

[0066] The scanning direction X refers to the direction in which the first detection module 102 moves relative to the stage 101 .

[0067] In other embodiments, the size of the field of view area of ​​the first detection module along the scanning direction may also be greater than or equal to the size of the field of view area of ​​the second detection module along the scanning direction. When the second detection module is needed to photograph the surface of the object to be measured, the stage or the second detection module is moved so that the object to be measured is in the field of view of the second detection module.

[0068] In addition, continue to refer to Figure 2 In this embodiment, the field of view area S2 of the second detection module 103 and the field of view area S1 of the first detection module 102 are arranged along the scanning direction X, and the field of view area S2 of the second detection module 103 and the field of view area S1 of the first detection module 101 are in contact but not overlapped.

[0069] In this embodiment, the scanning length of the first detection module 102 within the preset time is less than or equal to the field of view width of the second detection module 103, wherein the field of view width refers to the width of the field of view area S2 of the second detection module 103 along the scanning direction X. In other words, the scanning length of the first detection module 102 within the preset time is not greater than the field of view width of the second detection module 103. In this way, when the second detection module 103 is required to photograph the target to be measured, even if the relative position between the stage 101 and the second detection module 103 is not moved, or only a small relative position is moved, it can be ensured that the target to be measured is in the field of view of the second detection module 103, so that the second detection module 103 can photograph the target to be measured, which is conducive to further improving the detection efficiency.

[0070] Figure 3 The detection system provided for the first embodiment of the present application includes a first detection module, a second detection module and an optical path diagram of a carrier.

[0071] refer to Figure 3In this embodiment, the first detection module 102 and the second detection module 103 share at least a portion of the optical path structure 106. Since the first detection module 102 and the second detection module 103 share at least a portion of the optical path, it is beneficial to reduce the hardware cost of the detection system.

[0072] It should be noted that, in other embodiments, the first detection module and the second detection module may also have optical path structures independent of each other, that is, the first detection module and the second detection module do not share the same optical path structure.

[0073] Continue to refer Figure 3 In this embodiment, the optical path structure 106 includes: a light source component 116, the light source component 116 is used to provide incident light; an optical lens group 126, the optical lens group 126 is used to transmit the incident light to the surface of the object to be tested 10 to form a signal light, and make the signal light enter the first detection module 102 and the second detection module 103 respectively.

[0074] The incident light provided by the light source assembly 116 is parallel light, and the signal light entering the first detection module 102 and the second detection module 103 is convergent light.

[0075] Continue to refer Figure 2 The light source assembly 116 includes: a light source 11, which is used to provide initial light; and a first beam shaper 12, which is used to shape the initial light to form a parallel light beam, and the parallel light beam is used as incident light.

[0076] In this embodiment, the initial light provided by the light source 11 is divergent light, and the first beam shaper 12 is a convex lens.

[0077] In this embodiment, the first detection module 101 and the second detection module 102 can share the same light source 11, which is beneficial to further reduce costs.

[0078] In other embodiments, the first detection module and the second detection module may also use different light sources. Specifically, the light source includes a first light source and a second light source. During the shooting of the first detection module, the first light source provides initial light, and during the shooting of the second detection module, the second light source provides initial light. In addition, the positions of the first light source and the second light source are adjustable, and the detection system includes a switching component. The switching component is used to switch the first light source to a preset position when the first detection module is required to shoot, so that the initial light emitted by the first light source enters the first beam shaper, and when the first detection module does not shoot and the second detection module is required to shoot, the first light source is switched away from the preset position, and the second light source is switched to the preset position, so that the initial light emitted by the second light source enters the first beam shaper, and after the second detection module finishes shooting, the second light source is switched away from the preset position.

[0079] Continue to refer Figure 2 The optical lens group 126 includes: a collecting lens group 14 and a first spectroscopic component 15. The collecting lens group 14 is used to collect signal light from the surface of the object to be measured 10 and transmit the signal light to the first spectroscopic component 15; the first spectroscopic component 15 is used to split the signal light transmitted to the first spectroscopic component 15, and transmit part of the light to the first detection module 102, and transmit part of the light to the second detection module 103.

[0080] In this embodiment, the optical lens group 126 further includes a second beam splitter component 13, which is used to reflect the incident light provided by the light source component 116 to the surface of the object to be tested 10, so that signal light is formed on the surface of the object to be tested 10. The second beam splitter component 13 is also used for, after the collecting lens group 14 transmits the signal light to the second beam splitter component 13, the signal light is transmitted from the second beam splitter component 13 and then transmitted to the first beam splitter component 15.

[0081] It should be noted that, in other embodiments, the optical lens group may not be provided with the second spectroscopic component, and the incident light provided by the light source component is transmitted to the surface of the object to be measured so that the surface of the object to be measured forms signal light, and the signal light is collected by the collecting lens group and then transmitted to the first spectroscopic component.

[0082] In this embodiment, the second light splitting component 13 is a semi-transparent and semi-reflective mirror. In other embodiments, the second light splitting component can be a dichroic mirror.

[0083] In this embodiment, the collecting lens group 14 is also used to collect the incident light reflected by the second beam splitter 13, so that the parallel beams of the incident light are collected and transmitted to the surface of the object to be tested 10, forming signal light on the surface of the object to be tested 10.

[0084] In this embodiment, the first light splitting component 15 is a semi-transparent and semi-reflective mirror. In other embodiments, the first light splitting component can be a dichroic mirror.

[0085] The signal light is split by the first light splitting component 15 , a part of the signal light is transmitted through the first light splitting component 15 , and a part of the signal light is reflected through the first light splitting component 15 .

[0086] In this embodiment, the signal light transmitted by the first light splitting component 15 is transmitted to the first detection module 102 , and the signal light reflected by the first light splitting component 15 is transmitted to the second detection module 103 .

[0087] In other embodiments, the signal light transmitted through the first light splitting component can also be transmitted to the second detection module, and correspondingly, the signal light reflected through the first light splitting component is transmitted to the first detection module. In other words, the optical path of the signal light transmitted through the first light splitting component and the optical path reflected through the first light splitting component can be swapped, as long as it is ensured that the transmitted signal light enters one of the first detection module or the second detection module, and the reflected signal light enters the other of the first detection module or the second detection module.

[0088] In this embodiment, the signal light emitted by the collecting lens group 14 is parallel light, and the optical lens group 126 further includes a second beam shaper 16, which is used to shape the parallel light to form convergent light and then transmit it to the first beam splitter component 15. The second beam shaper 16 can be a concave-convex mirror.

[0089] It can be understood that in other embodiments, the signal light emitted through the collecting lens group can be convergent light, and accordingly, there is no need to provide a second beam shaper.

[0090] The center of one of the first detection module 102 and the second detection module 103 is located on the central axis of the signal light, and the center of the other is offset from the central axis of the signal light. The signal light refers to the signal light emitted through the collection component 14, which is a parallel light beam and thus has a central axis. The center of the first detection module 102 refers to the light receiving area of ​​the first detection module 102 that receives part of the signal light split by the first light splitting component 15; the center of the second detection module 103 refers to the light receiving area of ​​the second detection module 103 that receives part of the signal light split by the first light splitting component 15.

[0091] In this embodiment, the center of the first detection module 102 is located on the central axis of the signal light, and the center of the second detection module 103 is offset from the central axis of the signal light. In other embodiments, the center of the first detection module is offset from the central axis of the signal light, and correspondingly, the center of the second detection module is located on the central axis of the signal light.

[0092] The following combination Figure 1 and Figure 3 , the working principle of the detection system provided in this embodiment is described, and the following description is made by taking the stage 101 as a movable stage 101 as an example:

[0093] The controller 104 controls the movement of the stage 101. During the movement of the stage 101, the first detection module 102 scans the object to be measured 10 and obtains a first image of the surface of the object to be measured 10. Specifically, during the scanning of the object to be measured 10 by the first detection module 102, the light source 11 emits initial light; the first beam shaper 12 shapes the initial light to form a parallel light beam; the parallel light beam is reflected by the second beam splitter component 13 and transmitted to the surface of the object to be measured 10 after passing through the collecting lens group 14, and forms a signal light on the surface of the object to be measured 10; the collecting component 14 collects the signal light from the surface of the object to be measured 10, and transmits the signal light to the second beam splitter component 13, and transmits it from the second beam splitter component 13; after the signal light transmitted from the second beam splitter component 13 reaches the first beam splitter component 15, the first beam splitter component 15 splits the signal light, and transmits a part of the light to the first detection module 102, and a part of the light to the second detection module 103. Among them, the first detection module 102 generates a corresponding sub-image based on the received signal light. At this time, since the second detection module 103 does not need to perform detection, the second detection module 103 does not need to process after receiving the signal light.

[0094] Each time the first detection module 102 acquires a sub-image, the processor 105 receives and analyzes whether the sub-image carries information to be re-inspected. If the sub-image acquired by the first detection module 102 does not carry information to be re-inspected, the first detection module 102 continues scanning and shooting.

[0095] If the sub-image acquired by the first detection module 102 carries information to be re-inspected, the stage 101 stops moving and obtains whether the target to be measured is in the field of view of the second detection module 103. If the target to be measured is not in the field of view of the second detection module 103, the position of the stage 101 is moved so that the target to be measured is in the field of view of the second detection module 103.

[0096] After the object to be measured is in the field of view of the second detection module 103, the second detection module 103 and the carrier 101 are relatively stationary, and the second detection module 103 shoots the surface of the object to be measured 10 to obtain a second image. Specifically, the optical path transmission process of the optical path structure can refer to the description corresponding to the shooting by the first detection module 102, and the second detection module 103 generates a second image based on the received signal light. At this time, since the first detection module 102 does not need to perform detection, the first detection module 102 does not need to process the received signal light.

[0097] After the second detection module 103 takes a picture of the surface of the object 10 to be tested, the first detection module 102 is repeated to scan and take a picture of the surface of the object 10 to obtain a first image, and whether the second detection module 103 takes a picture of the surface of the object 10 to be tested is determined based on whether the first image carries the information to be re-tested of the object to be tested, until the detection of the surface to be tested of the object 10 to be tested is completed. The surface to be tested may be the entire surface of the object 10 to be tested, or may be a partial area of ​​the surface of the object 10 to be tested.

[0098] In the above embodiment, the first detection module 102 and the second detection module 103 are used to scan the surface of the object to be tested 10 in turn. When the first image captured by the first detection module 102 indicates the existence of the target to be tested, the second detection module 103 is used for re-inspection, which replaces the solution in the related art that the first detection module scans the entire surface of the object to be tested to obtain all the targets to be tested, and then the second detection module is used to re-inspect each target to be tested in turn. Obviously, in this embodiment, the problem of slow detection speed caused by the second detection module 103 moving back and forth between different targets to be tested can be avoided, which is conducive to improving the detection speed of the surface of the object to be tested 10 while ensuring the detection accuracy, thereby improving production capacity.

[0099] The second embodiment of the present application also provides a detection system, which is substantially the same as the detection system provided by the first embodiment, and the main difference is that, in addition to the information carried by the first image containing the information to be re-inspected of the target to be measured, the preset conditions in the detection system provided by the second embodiment also include that the scanning length of the first detection module is equal to the preset length within the preset time. In other words, in the technical solution of the detection system provided by the second embodiment, whether the second detection module takes pictures also depends on whether the scanning length of the first detection module reaches the preset length within the preset time. Under the condition that the scanning length of the first detection module reaches the preset length within the preset time and the information carried by the first image contains the information to be re-inspected of the target to be measured, the second detection module takes pictures of the surface of the object to be measured to obtain the second image.

[0100] The detection system provided in the second embodiment of the present application will be described in detail below in conjunction with the accompanying drawings. It should be noted that only the technical features that are different from the first embodiment are described in detail below. The technical features that are the same or corresponding to the first embodiment can refer to the description of the aforementioned embodiment and will not be repeated below.

[0101] Figure 4 A schematic diagram of the structure of the detection system provided in the second embodiment of the present application.

[0102] refer to Figure 4The detection system provided in this embodiment includes a stage 201, a first detection module 202, a second detection module 203 and a controller 204. The controller 204 is used to control the relative movement or stop the relative movement between the stage 201 and the first detection module 202 based on the detection state of the first detection module 202. When the detection state of the first detection module 202 meets the preset condition, the controller 204 controls the relative movement between the stage 201 and the first detection module 202 to stop and the stage 201 and the second detection module 203 to be relatively still, and the second detection module 203 is used to shoot the surface of the object to be detected 20 to obtain a second image, and the surface area of ​​the object to be detected 20 represented by the first image is located within the surface area of ​​the object to be detected 20 represented by the second image; wherein the preset condition is that the scanning length of the first detection module 202 is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module 203, and the information carried by the first image contains the information to be re-inspected of the object to be detected.

[0103] In this embodiment, the preset conditions include that the information carried by the first image contains information to be re-inspected of the target to be measured, and also include that the scanning length of the first detection module 202 is equal to the preset length within the preset time. The detection system also includes: a processor 205, the processor 205 is used to receive the first image, and obtain whether the scanning length of the first detection module 202 reaches the preset length; if so, analyze whether the information carried by the first image obtained within the preset time contains information to be re-inspected of the target to be measured; if the information carried by the first image contains information to be re-inspected of the target to be measured, the processor 205 sends a control signal to the controller 204, and the controller 204 controls the target to be measured to be in the field of view of the second detection module 203 in response to the control signal, and then the stage 201 and the second detection module 203 are relatively stationary, and the surface of the object to be measured 20 is photographed by the second detection module 203.

[0104] In this embodiment, the first detection module 202 acquires multiple sub-images within a preset time. If the scanning length of the first detection module 202 is equal to the preset length, the processor 205 analyzes whether the information carried by each sub-image in all the sub-images contains the information to be re-inspected of the target to be measured. If the information carried by at least one sub-image contains the information to be re-inspected of the target to be measured, it means that the information carried by the first image contains the information to be re-inspected of the target to be measured.

[0105] In other embodiments, the working principle of the processor may also be: the first detection module acquires multiple sub-images within a preset time, and the processor analyzes whether the information carried in each sub-image contains the information to be re-inspected of the target to be detected, and records the analysis results; the processor also acquires whether the scanning length of the first detection module reaches the preset length, and if the scanning length of the first detection module reaches the preset length, the processor determines whether to send a control signal to the controller based on the analysis results. If the analysis results show that the information carried by at least one sub-image contains the information to be re-inspected, the processor sends a control signal to the controller; if the information carried by any sub-image on the analyzed structure surface does not contain the information to be re-inspected, the processor does not send a control signal to the controller.

[0106] In this embodiment, the preset length is equal to the field of view width of the second detection module 203. The explanation of the field of view width can be referred to the above embodiment, which will not be repeated here. The scanning length of a single scan of the first detection module 202 is relatively large, and if the target to be measured is not in the field of view of the second detection module 203, in order to ensure that the target to be measured is in the field of view of the second detection module 203, the distance that the stage 201 needs to move is relatively short, which is conducive to further improving the detection speed. In other embodiments, the preset length can also be less than the field of view width of the second detection module.

[0107] Accordingly, in this embodiment, the scanning length of the first detection module 202 within the preset time is equal to the field width of the second detection module 203. In other embodiments, the scanning length of the first detection module 202 within the preset time may also be less than the field width of the second detection module 203.

[0108] In this embodiment, the processor 205 is also used for, if the information carried by each sub-image acquired by the first detection module 202 within the preset time does not contain the to-be-rechecked information of the to-be-detected object, the processor 205 does not send a control signal to the controller 204, and the stage 201 and the first detection module 202 continue to move relative to each other. In this way, the detection speed is further improved.

[0109] In other embodiments, the processor can also be used to, if the information carried by each sub-image acquired by the first detection module within a preset time does not contain the information to be re-inspected of the target to be measured, the processor still sends a control signal to the controller, and the controller responds to the control signal to make the carrier and the second detection module relatively still, so that the second detection module can shoot the surface of the target to be measured. In other words, even if the first image captured by the first detection module shows that there is no target to be measured, the second detection module can still be used to shoot the surface of the target to be measured, which helps to reduce the possibility of missing the target to be measured, thereby further improving the detection accuracy.

[0110] In this embodiment, the scanning length of the first detection module 202 within the preset time is less than or equal to the field of view width of the second detection module 203; the size of the field of view area of ​​the first detection module 202 along the scanning direction is smaller than the size of the field of view area of ​​the second detection module 203 along the scanning direction.

[0111] The field of view area of ​​the second detection module 203 and the field of view area of ​​the first detection module 202 are arranged along the scanning direction, and the field of view area of ​​the second detection module 203 and the field of view area of ​​the first detection module 202 are in contact but not overlapped.

[0112] In this embodiment, the first detection module 202 and the second detection module 203 may share at least a portion of the optical path structure. For a detailed description of the optical path structure, reference may be made to the description of the aforementioned embodiment, which will not be repeated here.

[0113] It can be understood that, in other embodiments, the optical path structures of the first detection module 202 and the second detection module 203 may also be independent of each other.

[0114] The following will be combined Figure 4 The working principle of the detection system provided in this embodiment is described below, and the stage 201 is taken as an example as a movable stage 201:

[0115] The controller 204 controls the movement of the stage 201. During the movement of the stage 201, the first detection module 202 scans the object 20 to be detected and obtains a first image of the surface of the object 20 to be detected.

[0116] The processor 205 obtains whether the scanning length of the first detection module 202 reaches a preset length, or in other words, obtains whether the scanning time of the first detection module 202 reaches a preset time, the preset time being the scanning time corresponding to the scanning length of the first detection module 302 reaching the preset length. If so, the processor 205 analyzes whether the information carried by any sub-image of all the sub-images obtained within the preset time contains information to be re-inspected. Alternatively, as described above, the processor 205 may also analyze each sub-image in real time first, and record the analysis results, and when the scanning length of the first detection module 202 reaches the preset length, determine whether to send a control signal to the controller 204 based on the analysis results.

[0117] If any sub-image acquired by the first detection module 202 does not carry the information to be re-inspected, the first detection module 202 continues scanning and photographing.

[0118] If at least one sub-image acquired by the first detection module 202 carries information to be re-inspected, the stage 201 stops moving and obtains whether the target to be measured is in the field of view of the second detection module 203. If the target to be measured is not in the field of view of the second detection module 203, the position of the stage 201 is moved so that the target to be measured is in the field of view of the second detection module 203.

[0119] After the object to be measured is in the field of view of the second detection module 203 , the second detection module 203 photographs the surface of the object to be measured 20 to obtain a second image.

[0120] After the second detection module 203 photographs the surface of the object to be tested 20, the first detection module 202 repeats the above-mentioned scanning and photographing of the surface of the object to be tested 20 to obtain a first image, and based on whether the scanning length of the first detection module 202 reaches a preset length and whether the first image carries the information to be re-inspected of the object to be tested, the second detection module 203 is controlled to photograph the surface of the object to be tested 20 until the detection of the surface to be tested of the object to be tested 20 is completed.

[0121] The detection system provided by the above embodiment is conducive to further improving the detection speed while ensuring the detection accuracy, and further improving the throughput of the detection system. Specifically, among the multiple sub-images acquired by the first detection module 202 within the preset time, there are two or more sub-images carrying information that contains the information to be re-inspected of the target to be detected. In this case, the second detection module 203 only needs to shoot once to acquire the second image to complete the re-inspection of the target to be detected corresponding to these sub-images, which is conducive to further improving the detection speed.

[0122] The third embodiment of the present application also provides a detection system, which is substantially the same as the detection systems provided by the first and second embodiments, with the main difference being that the preset condition in the detection system provided by the third embodiment is that the scanning length of the first detection module is equal to the preset length within the preset time, that is, the preset condition in the detection system provided by the third embodiment does not include information to be re-inspected containing the target to be detected in the information carried by the first image.

[0123] The detection system provided in the third embodiment of the present application will be described in detail below in conjunction with the accompanying drawings. It should be noted that only the technical features that are different from the first embodiment are described in detail below. The technical features that are the same as or corresponding to the first embodiment can refer to the description of the aforementioned embodiment and will not be repeated below.

[0124] Figure 5 A schematic diagram of the structure of the detection system provided in the third embodiment of the present application.

[0125] refer to Figure 5The detection system provided in this embodiment includes a stage 301, a first detection module 302, a second detection module 303 and a controller 304. The controller 304 is used to control the relative movement or stop the relative movement between the stage 301 and the first detection module 302 based on the detection state of the first detection module 302. When the detection state of the first detection module 302 meets the preset condition, the controller 304 controls the relative movement between the stage 301 and the first detection module 302 to stop and the stage 301 and the second detection module 303 to be relatively still, and the second detection module 303 is used to shoot the surface of the object to be detected 30 to obtain a second image, and the surface area of ​​the object to be detected 30 represented by the first image is located within the surface area of ​​the object to be detected 30 represented by the second image; wherein the preset condition is that the scanning length of the first detection module 302 is equal to the preset length within the preset time, and the preset length is less than or equal to the field of view width of the second detection module 303.

[0126] That is to say, in this embodiment, the first detection module 302 scans the surface of the object to be tested 30 and photographs it to obtain a first image. When the scanning length of the first detection module 302 is equal to the preset length, the relative movement between the stage 301 and the first detection module 302 stops, and the first detection module 302 stops scanning. There is no need to confirm whether the information carried by the first image acquired by the first detection module 302 within the preset time contains the information to be re-inspected of the object to be tested. The second detection module 303 and the stage 301 are relatively stationary, and the second detection module 303 photographs the surface of the object to be tested 30 and obtains a second image. The first detection module 302 photographs and the second detection module 303 photograph alternately until the detection of the surface to be tested of the object to be tested 30 is completed. All first images and all second images are analyzed to obtain whether there is a target to be tested on the surface of the object to be tested 30. If there is a target to be tested on the surface of the object to be tested 30, the position information of the target to be tested on the surface to be tested is also obtained based on the first image and / or the second image.

[0127] In this embodiment, the preset length is equal to the width of the field of view of the second detection module 303. In other embodiments, the preset length may also be smaller than the width of the field of view of the second detection module 303.

[0128] In this embodiment, the controller 304 is also used to: obtain whether the scanning length of the first detection module 302 reaches a preset length, or in other words, obtain whether the scanning time of the first detection module 302 reaches a preset time, the preset time being the scanning time corresponding to the scanning length of the first detection module 302 reaching the preset length; if so, control the carrier 301 and the second detection module 303 to be relatively still, and the second detection module 303 photographs the surface of the object 30 to be measured during the period when the carrier 301 and the second detection module 303 are relatively still; if not, control the carrier 301 and the first detection module 302 to continue to move relative to each other.

[0129] It can be understood that in other embodiments, the detection system may also include a processor, which is used to obtain whether the scanning length of the first detection module reaches a preset length. If so, a controller signal is sent to the controller; the controller responds to the control signal to stop the relative movement between the first detection module and the carrier, and controls the carrier and the second detection module to be relatively still.

[0130] The detection system also includes an optical path structure. For detailed descriptions of the first detection module 302, the second detection module 303 and the optical path structure, reference may be made to the corresponding descriptions of the aforementioned embodiments, which will not be repeated here.

[0131] The detection system provided by the above embodiment does not need to analyze whether the first image carries the information to be detected during scanning of the surface to be detected of the object to be detected, which is beneficial to reducing the image analysis amount of the detection system.

[0132] The fourth embodiment of the present application also provides a detection method, which can be applied to the detection system provided in the first embodiment. The corresponding description of the detection system in the first embodiment is also applicable to the following detection method embodiments.

[0133] Figure 6 A schematic diagram of the flow chart corresponding to the detection method provided in the fourth embodiment of the present application.

[0134] refer to Figure 6 , detection methods include:

[0135] Step S11, executing the first detection step. In the first detection step, the carrier and the first detection module move relative to each other so that the object to be detected moves relative to the first detection module. During the movement of the object to be detected relative to the first detection module, the first detection module scans the surface of the object to be detected and obtains a first image of the surface of the object to be detected.

[0136] In this embodiment, in the first detection step, the carrier moves and the first detection module is stationary, and the carrier drives the object to be detected to move relative to the first detection module.

[0137] In other embodiments, in the first detection step, the carrier may be stationary and the first detection module may move so that the object to be detected moves relative to the first detection module; or, both the carrier and the first detection module may move to ensure that the carrier moves relative to the first detection module.

[0138] Step S12, execute the second detection step. In the second detection step, based on the detection state of the first detection module, control the relative movement between the stage and the first detection module or stop the relative movement. When the detection state of the first detection module meets the preset conditions, the relative movement between the stage and the first detection module stops and the stage and the second detection module are relatively still. The surface of the object to be measured is photographed by the second detection module to obtain a second image of the surface of the object to be measured. The surface area of ​​the object to be measured represented by the first image is located within the surface area of ​​the object to be measured represented by the second image.

[0139] The preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured.

[0140] Specifically, based on the detection state of the first detection module, the relative movement between the carrier and the first detection module is controlled or the relative movement is stopped, including: analyzing whether the information carried by the first image contains the information to be re-inspected of the target to be measured; if the information carried by the first image contains the information to be re-inspected of the target to be measured, then after the target to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0141] In this embodiment, if the information carried by the first image contains information to be re-inspected of the object to be measured, the stage stops moving.

[0142] In addition, in the present embodiment, if the information carried by the first image contains information to be re-inspected of the target to be measured, when the target to be measured is in the field of view of the second detection module, the stage and the second detection module are relatively still, and the target to be measured on the surface of the object to be measured is photographed by the second detection module, including: obtaining the target position of the target to be measured according to the first image; and confirming whether the target to be measured is in the field of view of the second detection module according to the target position; after the target to be measured enters the field of view of the second detection module, the stage and the second detection module are relatively still, and the surface of the object to be measured is photographed by the second detection module.

[0143] That is, before the second detection module photographs the surface of the object to be detected, it is first confirmed whether the object to be detected can be photographed by the second detection module, thereby avoiding the problem of missed detection caused by the second detection module failing to photograph the object to be detected.

[0144] In this embodiment, if the target to be measured is not in the field of view of the second detection module, the stage is moved to adjust the position of the target to be measured so that the target to be measured enters the field of view of the second detection module. In other embodiments, if the target to be measured is not in the field of view of the second detection module, the second detection module may also be moved to adjust the position of the field of view of the second detection module so that the target to be measured is in the field of view of the second detection module.

[0145] In this embodiment, the preset condition is that the information carried by the first image contains information to be reviewed of the target to be measured, that is, real-time analysis is performed to determine whether the information carried by the first image contains information to be reviewed. If so, the first detection module stops scanning and the second detection module is enabled for shooting.

[0146] Specifically, analyzing whether the information carried by the first image contains information to be re-inspected of the target to be measured, including: during the movement of the stage relative to the first detection module, the first detection module scans the surface of the target to be measured to obtain multiple sub-images within a preset time; each sub-image is obtained and analyzed whether the information carried by the sub-image contains information to be re-inspected of the target to be measured, so as to obtain whether the information carried by the first image contains information to be re-inspected of the target to be measured; if the information carried by any sub-image contains information to be re-inspected of the target to be measured, then after the target to be measured is in the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the surface of the target to be measured is photographed by the second detection module.

[0147] In this embodiment, if it is analyzed that the information carried by the sub-image contains the information to be re-inspected of the target to be measured, it means that the information carried by the first image contains the information to be re-inspected.

[0148] For the corresponding optical paths of the first detection module and the second detection module when shooting, reference may be made to the corresponding description of the aforementioned embodiment, which will not be repeated here.

[0149] In this embodiment, the scanning length of the first detection module within the preset time is less than or equal to the field of view width of the second detection module; the size of the field of view area of ​​the first detection module along the scanning direction is smaller than the size of the field of view area of ​​the second detection module along the scanning direction.

[0150] The detection method further includes: repeatedly executing the first detection step and the second detection step until the detection of the surface to be detected of the object to be detected is completed.

[0151] In this embodiment, the surface to be tested of the object to be tested is the entire surface of the object to be tested. In other embodiments, the surface to be tested of the object to be tested may also be a partial area of ​​the surface of the object to be tested.

[0152] In the above embodiment, the first detection module scans and photographs the surface of the object to be tested, and each sub-image obtained by the shooting is analyzed to see whether there is information to be re-tested. When the information carried by the sub-image contains information to be re-tested, the first detection module stops scanning and photographing the surface of the object to be tested, and the second detection module is enabled to photograph the surface of the object to be tested. The shooting quality of the second detection module is better than that of the first detection module. Therefore, based on the second image shot by the second detection module, more information about the target to be tested can be obtained, thereby improving the detection accuracy. In addition, compared with the solution in the related art in which the second detection module moves between multiple targets to be tested, this embodiment can also improve the detection speed.

[0153] The fifth embodiment of the present application also provides a detection method, which corresponds to the detection system provided in the second embodiment. The corresponding description of the detection system in the second embodiment is also applicable to the following detection method embodiment. In addition, the detection method provided in the fifth embodiment of the present application is also substantially the same as the detection method provided in the fourth embodiment. The main difference is that the preset condition in the detection method provided in the fifth embodiment also includes that the scanning length of the first detection module is equal to the preset length within the preset time. Therefore, the parts that are the same or corresponding to the above-mentioned embodiments can refer to the description of the above-mentioned embodiments, and will not be described in detail below.

[0154] In this embodiment, the detection method includes: executing a first detection step, in which the carrier and the first detection module move relative to each other so that the object to be detected moves relative to the first detection module; during the movement of the object to be detected relative to the first detection module, the first detection module scans the surface of the object to be detected and obtains a first image of the surface of the object to be detected; executing a second detection step, in which, based on the detection state of the first detection module, the relative movement between the carrier and the first detection module is controlled or stopped, and when the detection state of the first detection module meets a preset condition, the relative movement between the carrier and the first detection module stops and the carrier and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module to obtain a second image of the surface of the object to be detected, and the surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image; wherein the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module, and the information carried by the first image contains information to be re-inspected of the object to be detected.

[0155] Specifically, based on the detection status of the first detection module, the relative movement between the carrier and the first detection module is controlled or the relative movement is stopped, including: obtaining whether the scanning length of the first detection module reaches a preset length; if so, analyzing whether the information carried by the first image obtained within the preset time contains the information to be re-inspected of the target to be measured; if the information carried by the first image contains the information to be re-inspected of the target to be measured, then after the target to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

[0156] In this embodiment, whether the information carried by the first image acquired within the preset time contains the information to be re-inspected of the target to be measured is analyzed, including: the first detection module acquires multiple sub-images within the preset time; if the scanning length of the first detection module is equal to the preset length, then analyzing whether the information carried by each sub-image in all the sub-images contains the information to be re-inspected of the target to be measured, so as to obtain whether the information carried by the first image contains the information to be re-inspected of the target to be measured.

[0157] In other embodiments, analyzing whether the information carried by the first image acquired within a preset time contains the information to be rechecked of the target to be measured includes: the first detection module acquires multiple sub-images within a preset time, and analyzes whether the information carried by each sub-image in each sub-image contains the information to be rechecked of the target to be measured, and records the analysis result; if the scanning length of the first detection module is equal to the preset length, then obtaining whether the information carried by the first image contains the information to be rechecked based on the analysis result. If the analysis result shows that the information carried by at least one sub-image contains the information to be rechecked, it means that the information carried by the first image contains the information to be rechecked.

[0158] In this embodiment, the detection method further includes: if the information carried by each of the multiple sub-images acquired within the preset time does not contain the information to be re-inspected of the target to be detected, then the stage and the first detection module are controlled to continue to move relative to each other. In other words, if the information carried by the first image does not contain the information to be re-inspected, the second detection module does not need to take pictures.

[0159] In other embodiments, the detection method may also include: if the information carried by each of the multiple sub-images acquired within a preset time does not contain the information to be re-inspected of the target to be detected, the relative movement between the carrier and the first detection module is stopped, and the surface of the target to be detected is photographed by the second detection module. In other words, even if the information carried by the first image does not contain the information to be re-inspected, the second detection module can still be used for photographing to further improve the detection accuracy.

[0160] The detection method further includes: repeatedly executing the first detection step and the second detection step until the detection of the surface to be detected of the object to be detected is completed.

[0161] The above technical solution is conducive to further improving the detection speed. Specifically, the information carried by the first image contains information to be re-inspected of multiple targets to be detected, so that the second detection module can capture these multiple targets in one shot, and the carrier and the first detection module do not need to stop relative movement multiple times, which is conducive to improving the detection speed.

[0162] The sixth embodiment of the present application also provides a detection method, which corresponds to the detection system provided in the third embodiment. The corresponding description of the detection system in the third embodiment is also applicable to the following detection method embodiment. In addition, the detection method provided in the sixth embodiment of the present application is also substantially the same as the detection method provided in the third embodiment and the fourth embodiment, with the main difference being that the preset condition in the detection method provided in the sixth embodiment is that the scanning length of the first detection module is equal to the preset length within the preset time. Therefore, the parts that are the same or corresponding to the above-mentioned embodiments can refer to the description of the above-mentioned embodiments, and will not be described in detail below.

[0163] In this embodiment, the detection method includes: executing a first detection step, in which the carrier and the first detection module move relative to each other so that the object to be detected moves relative to the first detection module; during the movement of the object to be detected relative to the first detection module, the first detection module scans the surface of the object to be detected and obtains a first image of the surface of the object to be detected; executing a second detection step, in which, based on the detection state of the first detection module, the relative movement between the carrier and the first detection module is controlled or stopped, and when the detection state of the first detection module meets the preset condition, the relative movement between the carrier and the first detection module stops and the carrier and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module to obtain a second image of the surface of the object to be detected, and the surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image; wherein the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, and the preset length is less than or equal to the field of view width of the second detection module.

[0164] Specifically, based on the detection status of the first detection module, the relative movement between the carrier and the first detection module is controlled or the relative movement is stopped, including: obtaining whether the single scanning length of the first detection module reaches a preset length; if so, the carrier and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module; if not, the carrier and the first detection module continue to move relative to each other.

[0165] The detection method further includes: repeatedly executing the first detection step and the second detection step until the detection of the surface to be detected of the object to be detected is completed.

[0166] That is to say, in this embodiment, during a single scan of the first detection module, there is no need to analyze the first image, the first detection module completes one scan, and the second detection module takes one shot. In this way, after all the first images and all the second images are acquired, the first images and the second images are analyzed to obtain information about the target to be detected on the surface of the object to be detected.

[0167] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present application, and in practical applications, various changes may be made to the embodiments in form and detail without departing from the spirit and scope of the present application. Any person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present application, and therefore the scope of protection of the present application shall be subject to the scope defined in the claims.

Claims

1. A detection system, characterized in that: include: A carrier, the carrier being used to carry the object to be tested; A first detection module, wherein the first detection module is used to scan the surface of the object to be detected and obtain a first image of the surface of the object to be detected during the relative movement between the object to be detected and the first detection module; A second detection module, wherein the second detection module is used to photograph the surface of the object to be detected during a period when the object to be detected and the second detection module are relatively stationary, so as to obtain a second image of the surface of the object to be detected; A controller, the controller is used to control the relative movement or stop the relative movement between the stage and the first detection module based on the detection state of the first detection module, when the detection state of the first detection module meets a preset condition, the controller controls the relative movement between the stage and the first detection module to stop and the stage and the second detection module to be relatively still, and photographs the surface of the object to be detected through the second detection module to obtain the second image, the surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image; Among them, the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module, and / or the preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured.

2. The detection system according to claim 1, characterized in that: The preset condition includes that the information carried by the first image contains information to be re-inspected of the target to be detected; the detection system also includes: A processor, the processor is used to receive the first image, and analyze whether the information carried by the first image contains information to be reviewed of the target to be measured; If the information carried by the first image contains information to be re-inspected of the object to be measured, the processor sends a control signal to the controller. After the controller controls the object to be measured to be in the field of view of the second detection module in response to the control signal, the stage and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

3. The detection system according to claim 2, characterized in that: The processor is further used to obtain a target position of the target to be measured according to the first image; and the controller is further used to: According to the target position, confirm whether the target to be detected is in the field of view of the second detection module; If yes, control the stage and the second detection module to be relatively still, and use the second detection module to photograph the surface of the object to be detected; If not, the relative position between the carrier and the second detection module is adjusted so that the object to be detected is in the field of view of the second detection module, and the surface of the object to be detected is photographed by the second detection module.

4. The detection system according to claim 2, characterized in that: The preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured; the first image includes: during the movement of the carrier relative to the first detection module, the first detection module acquires a plurality of sub-images within the preset time; the processor is used to: Each time the first detection module acquires one of the sub-images, the processor receives and analyzes whether the information carried by the sub-image contains the information to be re-inspected of the target to be detected, so as to acquire whether the information carried by the first image contains the information to be re-inspected.

5. The detection system according to claim 1, characterized in that: The scanning length of the first detection module within the preset time is less than or equal to the field of view width of the second detection module; the size of the field of view area of ​​the first detection module along the scanning direction is smaller than the size of the field of view area of ​​the second detection module along the scanning direction.

6. The detection system according to claim 1 or 5, characterized in that: The field of view area of ​​the second detection module is arranged along the scanning direction with the field of view area of ​​the first detection module, and the field of view area of ​​the second detection module is in contact with but not overlapped with the field of view area of ​​the first detection module.

7. The detection system according to claim 2, characterized in that: The preset condition also includes that the scanning length of the first detection module is equal to the preset length within the preset time; and the processor is used to: Obtaining whether the scanning length of the first detection module reaches the preset length; If so, it is analyzed whether the information carried by the first image acquired within the preset time contains the information to be re-inspected of the target to be measured.

8. The detection system according to claim 1, characterized in that: The preset condition is that the scanning length of the first detection module within the preset time is equal to the preset length; the controller is also used for: Obtaining whether the scanning length of the first detection module reaches the preset length; If so, controlling the stage and the second detection module to be relatively still, and the second detection module to photograph the surface of the object to be detected during the period when the stage and the second detection module are relatively still; If not, the carrier and the first detection module are controlled to continue to move relative to each other.

9. The detection system according to claim 1, characterized in that: The first detection module includes a linear array detector, and the second detection module includes a planar array detector.

10. The detection system according to any one of claims 1 to 5 and 7 to 9, characterized in that: The first detection module and the second detection module share at least part of the optical path structure; the optical path structure includes: A light source assembly, the light source assembly is used to provide incident light; An optical lens assembly, wherein the optical lens assembly is used to transmit the incident light to the surface of the object to be detected to form signal light, and to allow the signal light to enter the first detection module and the second detection module respectively.

11. The detection system according to claim 10, characterized in that: The optical lens assembly comprises: A collecting lens group and a first light splitting component, wherein the collecting lens group is used to collect the signal light from the surface of the object to be measured and transmit the signal light to the first light splitting component; The first light splitting component is used to split the signal light transmitted to the first light splitting component, and transmit a part of the light to the first detection module and a part of the light to the second detection module.

12. The detection system according to claim 10, characterized in that: The center of one of the first detection module and the second detection module is located on the central axis of the signal light, and the center of the other one is offset from the central axis of the signal light.

13. A detection method, applied to the detection system according to any one of claims 1 to 12, characterized in that: include: Performing a first detection step, in which the carrier and the first detection module move relative to each other so that the object to be detected moves relative to the first detection module; During the movement of the object to be detected relative to the first detection module, the first detection module scans the surface of the object to be detected and acquires a first image of the surface of the object to be detected; Execute a second detection step. In the second detection step, based on the detection state of the first detection module, control the relative movement between the stage and the first detection module or stop the relative movement. When the detection state of the first detection module meets a preset condition, the relative movement between the stage and the first detection module stops and the stage and the second detection module are relatively stationary. The surface of the object to be detected is photographed by the second detection module to obtain a second image of the surface of the object to be detected. The surface area of ​​the object to be detected represented by the first image is located within the surface area of ​​the object to be detected represented by the second image. Among them, the preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time, the preset length is less than or equal to the field of view width of the second detection module, and / or the preset condition is that the information carried by the first image contains information to be re-inspected of the target to be measured.

14. The detection method according to claim 13, characterized in that: The preset condition includes that the information carried by the first image contains information to be re-inspected of the target to be detected; and the control of relative movement or stopping of relative movement between the carrier and the first detection module based on the detection state of the first detection module includes: Analyzing whether the information carried by the first image contains information to be re-inspected of the target to be measured; If the information carried by the first image contains information to be re-inspected of the object to be measured, after the object to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

15. The detection method according to claim 14, characterized in that: If the information carried by the first image contains information to be re-inspected of the target to be measured, when the target to be measured is in the field of view of the second detection module, the stage and the second detection module are relatively stationary, and the target to be measured on the surface of the target to be measured is photographed by the second detection module, including: Acquire a target position of the target to be measured according to the first image; and confirming, according to the target position, whether the target to be detected is in the field of view of the second detection module; After the object to be measured enters the field of view of the second detection module, the carrier and the second detection module remain relatively still, and the surface of the object to be measured is photographed by the second detection module.

16. The detection method according to claim 14, characterized in that: The preset condition is that the information carried by the first image contains information to be rechecked of the target to be measured; and the analyzing whether the information carried by the first image contains information to be rechecked of the target to be measured includes: During the movement of the carrier relative to the first detection module, the first detection module scans the surface of the object to be detected to obtain a plurality of sub-images within the preset time; Each time a sub-image is acquired, the information carried by the sub-image is analyzed to determine whether the information carried by the first image contains the information to be re-inspected of the target to be measured, so as to determine whether the information carried by the first image contains the information to be re-inspected of the target to be measured; If the information carried by any of the sub-images contains information to be re-inspected of the object to be measured, then after the object to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

17. The detection method according to claim 14, characterized in that: The preset condition also includes that the scanning length of the first detection module is equal to the preset length within the preset time; and the controlling the relative movement between the carrier and the first detection module or stopping the relative movement based on the detection state of the first detection module includes: Obtaining whether the scanning length of the first detection module reaches the preset length; If so, analyzing whether the information carried by the first image acquired within the preset time contains information to be reviewed of the target to be measured; If the information carried by the first image contains information to be re-inspected of the object to be measured, after the object to be measured is in the field of view of the second detection module, the carrier and the second detection module are relatively stationary, and the surface of the object to be measured is photographed by the second detection module.

18. The detection method according to claim 17, characterized in that: The analyzing whether the information carried by the first image acquired within the preset time contains information to be re-inspected of the target to be measured includes: The first detection module acquires a plurality of sub-images within the preset time; If the scanning length of the first detection module is equal to the preset length, the information carried by each of the sub-images in all the sub-images is analyzed to determine whether the information carried by the first image contains the information to be re-inspected of the target to be measured.

19. The detection method according to claim 18, characterized in that: The detection method further comprises: If, among the multiple sub-images acquired within the preset time, the information carried by each of the sub-images does not contain the information to be re-inspected of the target to be detected, then controlling the carrier and the first detection module to continue to move relative to each other; or, If, among the multiple sub-images acquired within the preset time, the information carried by each sub-image does not contain the information to be re-inspected of the object to be measured, the relative movement between the carrier and the first detection module stops, and the surface of the object to be measured is photographed by the second detection module.

20. The detection method according to claim 13, characterized in that: The preset condition is that the scanning length of the first detection module is equal to the preset length within the preset time; and the controlling the relative movement between the carrier and the first detection module or stopping the relative movement based on the detection state of the first detection module includes: Obtaining whether a single scan length of the first detection module reaches the preset length; If yes, the carrier and the second detection module are relatively stationary, and the surface of the object to be detected is photographed by the second detection module; If not, the carrier and the first detection module continue to move relative to each other.

21. The detection method according to claim 13, characterized in that: The detection method further comprises: The first detection step and the second detection step are repeatedly performed until the detection of the surface to be detected of the object to be detected is completed.

Images