chuck table

Abstract

The chuck carrier table provided by the embodiments of the present disclosure comprises a first base, a frame, a carrier disc and a driving module. The first base is provided with a first mounting groove configured to provide a support force in a vertical direction; the frame is provided at the bottom with a rotating bearing mounted in the first mounting groove and movably connected with the frame and the first base, configured to enable the frame to rotate circumferentially around the vertical direction; the carrier disc is arranged on the top of the frame and configured to carry a probe and other detection pieces; the driving module comprises a driving motor configured to provide power for the rotation of the frame; a conversion mechanism is configured to be powered by the driving motor; a part of the conversion mechanism moves linearly along the radial direction of the rotating bearing, and another part of the conversion mechanism moves circumferentially along the circumferential direction of the rotating bearing to drive the frame to rotate relative to the first base.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the field of semiconductor chip testing, and in particular, to a chuck carrier. BACKGROUND

[0002] With the continuous progress of electronic technology, the probe station has become one of the important detection equipment in the semiconductor industry, which is widely used in various tests of wafer in the test factory.

[0003] With the continuous progress and development of the semiconductor industry, the size of the wafer grain gradually becomes smaller, and the number of grains gradually increases, so there are higher and higher requirements for the needle precision of the probe station and the load capacity of the wafer carrier. At present, the motor-driven screw structure or the motor-driven single wedge block structure is widely used in the market to load the wafer carrier, which has certain limitations on the carrying capacity of the carrier or the positioning accuracy of the carrier itself. Therefore, a structure that combines the carrying capacity and walking accuracy is needed at present. SUMMARY

[0004] The purpose of the present disclosure is to provide a chuck carrier for the technical problems in the related art. The specific scheme is as follows:

[0005] The chuck carrier provided by the embodiment of the present application comprises: a first base, wherein a first mounting groove is arranged on the first base and configured to provide support in the vertical direction; a rack, wherein a rotary bearing is arranged at the bottom of the rack, the rotary bearing is installed in the first mounting groove and movably connected with the rack and the first base, and the rack is configured to rotate around the vertical direction; a carrier, which is arranged on the top of the rack and configured to carry a probe and a detection piece; and a driving module, which is connected with the first base and the rack respectively and configured to drive the rack to rotate relative to the first base, the driving module comprises: a driving motor, which is used to provide power for the rotation of the rack; and a conversion mechanism, which is powered by the driving motor, a part of the conversion mechanism moves linearly along the radial direction of the rotary bearing, and another part of the conversion mechanism moves circularly along the circumferential direction of the rotary bearing, so as to drive the rack to rotate relative to the first base.

[0006] In some embodiments, the conversion mechanism comprises: a rolling bearing seat, which is fixedly connected with the first base and configured to support the rotation of the rack relative to the first base; and a first sliding block assembly, which comprises a shaft core and a first connecting piece, the shaft core is arranged in the first connecting piece and at least partially extends into the rolling bearing seat, and a first sliding part is arranged on the surface of the first connecting piece.

[0007] In some embodiments, the conversion mechanism further comprises: a second base fixedly connected with the rack; a lead screw arranged on the second base and extending in a first direction, a second movable slider assembly being arranged on the lead screw, the drive motor being arranged at one end of the lead screw; in response to forward rotation or reverse rotation of the drive motor, the second slider assembly moves forward or backward in the first direction.

[0008] In some embodiments, the second slider assembly comprises: a profiled nut connected with the lead screw and configured to move in the first direction under the action of the drive motor; a second slider arranged on the profiled nut, a second sliding portion being arranged on a surface of the second slider in a second direction perpendicular to the first direction, the second sliding portion being in sliding connection with the first sliding portion.

[0009] In some embodiments, in response to movement of the second slider assembly in the first direction, the first connecting piece moves relative to the second slider in the second direction to drive the rack to rotate relative to the first base.

[0010] In some embodiments, the second slider assembly further comprises: a limiting block arranged on the profiled nut or the second slider and configured to limit the movement range of the first connecting piece in the second direction.

[0011] In some embodiments, the first slider assembly further comprises: a rolling bearing arranged on a surface of the first connecting piece and surrounding the shaft core, the rolling bearing being in movable connection with the rolling bearing seat and bearing the radial and axial loads of the first connecting piece.

[0012] In some embodiments, the conversion mechanism further comprises: a wedge block structure arranged between the first connecting piece and the rolling bearing seat and / or between the second slider and the profiled nut, the wedge block structure being configured to adjust the gap between adjacent structural components.

[0013] In some embodiments, the rotation speed of the rack is 0-20 mm / s.

[0014] In some embodiments, the deflection angle of the rack relative to the first base is ±5 degrees.

[0015] Compared with the related art, the above scheme of the embodiments of the present disclosure has at least the following beneficial effects:

[0016] The chuck carrier table provided by the present disclosure is provided with a drive motor and a high-precision conversion mechanism. Under the action of the drive motor, linear motion can be converted into circular motion by the conversion mechanism to realize rotation of the carrier table relative to the first base, so as to ensure small error in the movement process. The chuck carrier table provided by the present disclosure can make the fine adjustment precision of the carrier table better than 1 μm through the setting of the drive module.

[0017] It should be understood that the general description above and the detailed description below are only exemplary and explanatory, and are not restrictive of the present disclosure. BRIEF DESCRIPTION OF DRAWINGS

[0018] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and serve to explain the principles of the present disclosure. It is readily apparent to one skilled in the art that the following figures are merely some embodiments of the present disclosure, and other figures can be obtained from these figures without creative labor. In the drawings:

[0019] Figure 1 is a structural schematic view of a chuck carrier according to an exemplary embodiment.

[0020] Figure 2 is a structural schematic view of a first base according to an exemplary embodiment.

[0021] Figure 3 is a partial exploded view of a chuck carrier according to an exemplary embodiment.

[0022] Figure 4 is a partial exploded view of a chuck carrier according to an exemplary embodiment.

[0023] Figure 5 is a partial enlarged view of a conversion mechanism according to an exemplary embodiment.

[0024] Figure 6 is a structural schematic view of a first slider and a second slider according to an exemplary embodiment.

[0025] Figure 7 is a partial enlarged view of a conversion mechanism according to another exemplary embodiment.

[0026] REFERENCE NUMERALS:

[0027] First base 1000, first mounting slot 1001, second mounting slot 1002, through hole 1003, rotary bearing 1100;

[0028] Frame 2000, object carrier 3000, drive module 4000;

[0029] Conversion mechanism 4100, drive motor 4200;

[0030] Rolling bearing seat 4101;

[0031] The first slider assembly 4110, the first connecting piece 4111, the shaft core 4112, the rolling bearing 4413, the first slider 4114, the first sliding part 4415, the wedge block structure 4116;

[0032] The second slider assembly 4120, the special-shaped nut 4121, the second slider 4122, the second sliding part 4123, the limiting block 4124;

[0033] The second base 4300, the connecting part 4310, the lead screw support 4411, the lead screw 4412;

[0034] The front-rear axis Y, the lateral axis X, and the vertical axis Z. DETAILED DESCRIPTION

[0035] In order to make the objectives, technical solutions and advantages of the present disclosure clearer, the following further describes the present disclosure with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, and not all the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the scope of protection of the present disclosure.

[0036] The terms used in the embodiments of the present disclosure are only for the purpose of describing particular embodiments and are not intended to limit the present disclosure. The singular forms "a", "an" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include the plural forms, unless the context clearly indicates otherwise. "Multiple" generally includes at least two, and other quantifiers are similar.

[0037] It should be understood that although the terms first, second, third, etc. may be used in the embodiments of the present disclosure, these descriptions should not be limited to these terms. These terms are only used to distinguish the described objects. For example, without departing from the scope of the embodiments of the present disclosure, the first can also be referred to as the second, and similarly, the second can also be referred to as the first. In addition, the terms "first", "second", "third" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present disclosure, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium. For a person of ordinary skill in the art, the specific meaning of the above terms in the present disclosure can be understood according to the specific circumstances.

[0039] It is also to be noted that the terms "comprising", "including", and any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element preceded by "comprises... a" does not exclude the existence of additional identical elements in the process, method, article, or apparatus including the recited element.

[0040] Currently, before the chip is packaged, a wafer testing process is carried out. The purpose of the test is to identify invalid wafers, provide valuable feedback, and thus control the wafer manufacturing, quality control and production process. The wafer probe station is to electrically test the integrated circuits of each wafer chip. It plays a key role in testing and ensuring the function before the integrated circuits (ICs) on the wafer are cut into individual chips, to achieve precise, automated and repeatable electrical testing. The base of the wafer probe system is usually a highly stable chassis, in which a wafer table is placed to test the wafer. The test wafer table moves in X, Y and Z directions to accurately position the wafer under the probe. Ensuring high-precision alignment is a challenge, especially as the wafer size increases and the wafer die size gradually becomes smaller, even a slight misalignment can cause inaccurate testing and damage to the wafer. Therefore, the Z-direction carrying capacity and walking accuracy of the wafer carrying table are required to be very high.

[0041] To solve the above technical problems, the chuck carrying table comprises a first base, a first mounting groove is arranged on the first base, configured to provide a support force in the vertical direction; a rack, a rotary bearing is arranged at the bottom of the rack, the rotary bearing is mounted in the first mounting groove and movably connected with the rack and the first base, configured to enable the rack to rotate circumferentially around the vertical direction; a carrier disk, arranged on the top of the rack, configured to carry a probe and a detection piece; a driving module, connected with the first base and the rack respectively, configured to drive the rack to rotate relative to the first base, the driving module comprises a driving motor, used to provide power for the rotation of the rack; a conversion mechanism, in response to the driving motor providing power for the conversion mechanism, a part of the conversion mechanism moves linearly along the radial direction of the rotary bearing, and another part of the conversion mechanism moves circumferentially along the circumferential direction of the rotary bearing, to drive the rack to rotate relative to the first base.

[0042] The chuck carrier table provided by the present disclosure is provided with a driving motor and a high-precision conversion mechanism. Under the action of the driving motor, linear motion can be converted into circumferential motion by the conversion mechanism to realize the rotation of the carrier table relative to the first base, and ensure that the error is small during the movement. The probe table provided by the present disclosure can make the fine adjustment precision of the carrier table better than 1 μm through the setting of the driving module.

[0043] The optional embodiments of the present disclosure will be described in detail below with reference to the drawings.

[0044] In order to more clearly describe the behavior of the chuck carrier table, as shown in Figure 1 , the following direction definitions are made: the chuck carrier table can travel along the following three mutually perpendicular axes defined as follows: the lateral axis X, the front-back axis Y and the central vertical axis Z. Among them, the extension direction of the lateral axis X is the first direction, the direction along the arrow of the lateral axis X is the "left side" of the chuck carrier table, and the opposite direction along the arrow of the lateral axis X is the "right side" of the probe table. The extension direction of the front-back axis Y is the second direction, the direction along the arrow of the front-back axis Y is marked as "forward", and the opposite direction along the arrow of the front-back axis Y is marked as "backward". The extension direction of the vertical axis Z is the third direction, the vertical axis Z is the direction extending upward along the bottom surface of the probe table, the direction along the arrow of the vertical axis Z is the "upper side" of the chuck carrier table, and the opposite direction along the arrow of the vertical axis Z is the "lower side" of the chuck carrier table.

[0045] As shown in Figure 1 , the present application provides a chuck carrier table, which comprises a first base 1000, a rack 2000, a carrier table 3000, and a driving module 4000, wherein the driving module 4000 comprises a driving motor 4200 and a conversion mechanism 4100. The driving motor 4200 is configured to provide power to make the conversion mechanism 4100 convert its linear motion into rotational motion of the rack 2000. Further, the carrier table 3000 can be rotated relative to the first base 1000 under the driving of the rack 2000, for adjusting the angle of the probe on the surface of the carrier table 3000, so that the fine adjustment precision of the carrier table 3000 is better than 1 μm.

[0046] In some embodiments, as shown in Figure 2 , the surface of the first base 1000 is provided with a first mounting groove 1001, which is used to accommodate a rotary bearing 1100 and provide vertical support force, so that the rotary bearing 1100 is connected with the rack 2000, and the rack 2000 can rotate relative to the first base 1000.

[0047] The first mounting groove 1001 can be circular, configured to accommodate a rotating bearing 1100, so that the gantry 2000 drives the wafer chuck 3000 to rotate. To reduce the stress between the rotating bearing 1100 and the first base 1000 in the vertical direction, at least part of the bottom surface of the first mounting groove 1001 can be provided with a through hole 1003, which penetrates the first base 1000, has the functions of facilitating installation, realizing mechanical part positioning, and avoiding surface stress concentration of the first base 1000.

[0048] In some embodiments, at least part of the bottom surface of the first mounting groove 1001 is sunken in the vertical direction, forming a groove on the surface of the first mounting groove 1001, which is used to support and limit the rotating bearing 1100, and provides a stable mounting platform. In the condition that no fixing member is installed, the gantry 2000 can rotate freely relative to the first base 1000 in response to the installation of the gantry 2000 on the first base 1000.

[0049] In some embodiments, as shown in Figure 3 The bottom of the gantry 2000 is provided with a rotating bearing 1100, which is selectively assembled in the first mounting groove 1001 and movably connected with the gantry 2000 and the first base 1000, so that the gantry 2000 can rotate circumferentially around the vertical direction. The top of the gantry 2000 is provided with a wafer chuck 3000, which is one of the key components of a probe station and is usually used to fix a wafer to ensure that the wafer remains stable during testing. The wafer chuck 3000 is arranged on the top of the gantry 2000 and is configured to carry a probe under test.

[0050] In the process of semiconductor manufacturing, a probe station is used to test the electrical performance of chips on a wafer before the wafer is cut into individual chips. This helps to find and eliminate defective chips early, improving production efficiency and product quality. Specifically, during testing, the wafer needs to be loaded first, i.e., placed on the wafer chuck 3000 and fixed. The wafer chuck 3000 adjusts the temperature according to the testing requirements. Then, through a microscope and a vision system, the operator precisely aligns the probes on a probe card with the pads on the wafer. This step requires extremely high precision, usually in the micron level. The chuck carrier table provided in the present embodiment is used to control the rotation of the wafer chuck 3000 to precisely align the probes on the probe card with the pads on the wafer.

[0051] In some embodiments, as shown in Figure 3 The chuck carrier table further includes a drive module 4000, part of which is connected with the first base 1000 and the gantry 2000 respectively, and is configured to drive the gantry 2000 to rotate relative to the first base 1000.

[0052] Specifically, the drive module 4000 comprises a drive motor 4200 and a conversion mechanism 4100. The drive motor 4200 is arranged on one side of the conversion mechanism 4100, and is configured to provide basic power for the rotation of the rack 2000. The conversion mechanism 4100 is arranged on the rack 2000, and is configured to provide power for the conversion mechanism 4100 in response to the drive motor 4200. A part of the conversion mechanism 4100 moves linearly along the radial direction of the rotating bearing 1100, and another part of the conversion mechanism 4100 moves circularly along the circumferential direction of the rotating bearing 1100, so as to drive the rack 2000 to rotate relative to the first base 1000.

[0053] In some embodiments, as shown in Figure 1 , Figure 3 The conversion mechanism 4100 comprises a rolling bearing seat 4101 and a first slider assembly 4110. The rolling bearing seat 4101 is mounted in the second mounting groove 1002 of the first base 1000, and is configured to provide a fulcrum for the rotation of the conversion mechanism 4100 relative to the first base 1000, so as to support the rack 2000 to drive the turntable 3000 to rotate relative to the first base 1000.

[0054] As shown in Figure 4 The first slider assembly 4110 comprises a shaft core 4112 and a first connecting piece 4111. The shaft core 4112 is arranged in the first connecting piece 4111, and at least partially extends into the rolling bearing seat 4101. The first connecting piece 4111 is configured to rotate relative to the rolling bearing seat 4101 with the shaft core 4112 as the axis. In this process, the rolling bearing seat 4101 plays a crucial role in stably supporting the shaft core 4112, ensuring that the shaft core 4112 can accurately rotate during rotation, reducing vibration and deviation, and ensuring the accuracy and smoothness of the entire movement.

[0055] In some embodiments, as shown in Figure 5 The first slider assembly 4110 further comprises a rolling bearing 4413 arranged on the surface of the first connecting piece 4111 and surrounding the shaft core 4112. The rolling bearing 4413 is configured to be movably connected with the rolling bearing seat 4101, and to bear the radial and axial loads of the first connecting piece 4111.

[0056] In some embodiments, the conversion mechanism 4100 further comprises a wedge structure 4116, which can be arranged between the first connecting piece 4111 and the rolling bearing seat 4101, or between the second sliding block 4122 and the special-shaped nut 4121, configured to adjust the gap between adjacent structural components. In the mechanical structure of the same probe station, the wedge structure 4116 can be arranged between the first connecting piece 4111 and the rolling bearing seat 4101 and between the second sliding block 4122 and the special-shaped nut 4121 at the same time.

[0057] In some embodiments, as shown in Figure 5 , Figure 6 The first sliding block assembly 4110 further comprises a first sliding block 4114 arranged on the side of the first connecting piece 4111 away from the shaft core, and fixedly connected with the first connecting piece 4111. Part of the first sliding block 4114 is sunken, and the side wall surfaces of the sunken part are provided with guide protrusions, forming a first sliding part 4415 extending along the front-back axis Y, i.e., along the second direction. The arrangement of the first sliding part 4415 limits the sliding guide of the first sliding assembly, and the first sliding block 4114 will move along the second direction under the action of external force, so that the shaft core 4112 rotates relative to the rolling bearing seat 4101 inside the rolling bearing seat 4101, achieving relative rotation between the object carrier 3000 and the first base 1000.

[0058] In some embodiments, the conversion mechanism 4100 further comprises a second base 4300, a lead screw 4412, and a connecting part 4310. As shown in Figure 7 The second base 4300 has the same surface extension direction as the first base 1000, for providing a stable working plane for the lead screw 4412. The connecting part 4310 can be a "C" shaped structural component, and the upper and lower end faces of the connecting part 4310 are fixedly connected with the second base 4300 and the rack 2000 respectively, thereby achieving synchronous rotation of the second base 4300 and the rack 2000.

[0059] The lower surface of the second base 4300 is provided with a lead screw support 4411, and the lead screw 4412 is arranged in the second base 4300 with the assistance of the lead screw support 4411, and extends along the transverse axis X, i.e., the lead screw 4412 extends along the first direction. A movable second sliding block assembly 4120 is arranged on the lead screw 4412, and the drive motor 4200 is arranged at one end of the lead screw 4412. In response to forward rotation or reverse rotation of the drive motor 4200, the second sliding block assembly 4120 moves left or right in the first direction.

[0060] It should be noted that the present embodiment does not make specific limitation on the relationship between the rotation of the driving motor 4200 and the movement of the second slider assembly 4120. When the driving motor 4200 rotates forward, the second slider assembly 4120 can move leftward or rightward. When the driving motor 4200 rotates reversely, the second slider assembly 4120 can move rightward or leftward. The present embodiment does not make any limitation on this.

[0061] In some embodiments, the second slider assembly 4120 comprises a profiled nut 4121 and a second slider 4122. As shown in the figure, the profiled nut 4121 is movably arranged on the lead screw 4412 and is adapted to move leftward or rightward along the lead screw 4412 under the driving action of the driving motor 4200. The second slider 4122 is arranged on the side of the profiled nut 4121 close to the first slider assembly 4110 and is configured to move synchronously with the profiled nut 4121. Figure 7

[0062] In some embodiments, as shown in the figure, Figure 6 Figure 7 The width of the second slider 4122 matches the sinking width of the surface of the first slider 4114. The surface of the second slider 4122 is provided with a second sliding part 4123 extending in a second direction. The second sliding part 4123 is used to connect with the first sliding part 4415 and can slide relatively to the first sliding part 4415. When the second slider assembly 4120 moves in the first direction, the first slider 4114 moves in the second direction relative to the second slider 4122 to avoid the occurrence of part position difference between the first slider 4114 and the second slider 4122. Further, since the first slider assembly 4110 is connected with the rolling bearing seat 4101, the rolling bearing seat 4101 will rotate relative to the first sliding assembly in response to the movement of the first sliding assembly, thereby realizing the rotation of the rack 2000 relative to the first base 1000.

[0063] The lead screw 4412 used in the present embodiment is a high-precision mechanical part. The rotation movement of the lead screw 4412 can be used to realize the accurate control of the moving position of the second slider 4122. The cooperation of the first slider assembly 4110 and the rolling bearing seat 4101 can be used to support and guide the rotation of the rack 2000 and the object table 3000, thereby ensuring the stability and accuracy of the movement of the object table 3000.

[0064] ​​In some embodiments, the conversion mechanism 4100 can be a slider-crank mechanism, and the part where the first slider 4114 and the second slider 4122 are connected can be regarded as a movable crank. Specifically, under the action of the driving motor 4200, the second slider 4122 can be controlled to move leftward or rightward along the lead screw 4412, and in this process, the linear motion of the second slider 4122 drives the shaft core 4112 of the first slider assembly 4110 to perform a circular motion relative to the rolling bearing seat 4101. The first slider 4114 is connected to the shaft core 4112 through the first connecting piece 4111, and the shaft core 4112 is rotatably installed in the rolling bearing seat 4101. When the first slider 4114 performs a circular motion relative to the rolling bearing seat 4101 with the shaft core 4112 as the axis, the rack 2000 as a whole rotates relative to the first base 1000, thereby successfully converting the linear displacement of the second slider 4122 into the rotational displacement of the shaft core 4112.

[0065] The chuck carrier table provided by the present disclosure is provided with a driving motor 4200 and a high-precision conversion mechanism 4100. Under the action of the driving motor 4200, linear motion can be converted into circular motion by the conversion mechanism 4100 to realize the rotation of the object carrier 3000 relative to the first base 1000, so as to ensure that the error is small during the motion process. The probe table provided by the present disclosure can make the fine adjustment precision of the object carrier 3000 better than 1 μm through the setting of the driving module 4000.

[0066] In some embodiments, the second slider assembly 4120 further comprises a limiting block 4124, which can be arranged on the side of the special-shaped nut 4121 away from the second base plate, and the thickness of the limiting block 4124 in the vertical direction is greater than the thickness of the second slider 4122. The limiting block 4124 is used to limit the movement of the first connecting piece 4111, so as to avoid that the relative displacement between the first connecting piece 4111 and the second slider 4122 is too large, causing the object carrier 3000 to rotate excessively.

[0067] In other embodiments, the limiting block 4124 can also be arranged on the second slider 4122, and is configured to limit the movement range of the first connecting piece 4111 in the second direction.

[0068] In some embodiments, the precision electronic component samples such as wafers, chips and the like to be tested are placed on the carrier disk 3000. If the carrier disk 3000 rotates at too high a speed, a large centrifugal force will be generated. For small and fragile sample structures, it can cause sample displacement, damage, or affect the contact between the probe and the sample, such as the probe scratching the sample surface or causing poor contact, affecting the test accuracy. To protect the sample and the probe, the rotation speed of the machine frame 2000 is limited to 0-20 mm / s. In addition, from the perspective of the equipment itself, high-speed rotation of the carrier disk 3000 will generate a large load on the driving module 4000. Long-term operation at high speed can cause the drive to overheat, the conversion mechanism 4100 to wear out, and other problems, reducing the service life of the equipment. Reasonable limitation of the rotation speed can make the equipment operate within a safe working range, reduce the probability of failure, and ensure measurement accuracy.

[0069] In some embodiments, due to the small rotation angle of the carrier relative to the first base 1000, the deflection angle of the machine frame 2000 relative to the first base 1000 is ±5 degrees. When testing a sample, it is often necessary to accurately align a specific test point. If there is no angle limit, the carrier disk 3000 can rotate too much, causing the sample to collide with the surrounding equipment structure, causing damage to the sample or the equipment. By limiting the rotation angle of the carrier disk 3000, accurate positioning can be performed according to the pre-set angle value. For example, when testing the regularly arranged pins on a chip, each pin corresponds to a certain angle position, and limiting the rotation angle can ensure that the probe accurately contacts the target pin, improving the accuracy and efficiency of the test.

[0070] Finally, it should be noted that: each of the embodiments in the specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts of each embodiment can be referred to. For the system or device disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple, and the relevant parts are described in the method part.

[0071] The above embodiments are only used to illustrate the technical solutions of the present disclosure, but not limit them; although the foregoing disclosure has been described in detail, those skilled in the art should understand that they can modify the technical solutions described in the foregoing embodiments, or make equivalent replacements for some technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. A chuck table, characterized by The chuck carrier comprises: a first base provided with a first mounting groove configured to provide a vertical support force; a rack provided at the bottom with a rotating bearing mounted in the first mounting groove and movably connected with the rack and the first base, and configured to enable the rack to rotate circumferentially around the vertical direction; a carrier provided at the top of the rack and configured to carry a probe and a test piece; a driving module connected with the first base and the rack and configured to drive the rack to rotate relative to the first base, the driving module comprising: a driving motor configured to provide power for the rotation of the rack; a conversion mechanism configured to be powered by the driving motor, a part of the conversion mechanism moving linearly along the radial direction of the rotating bearing, and another part of the conversion mechanism moving circumferentially along the circumferential direction of the rotating bearing, so as to drive the rack to rotate relative to the first base, wherein the first mounting groove is provided with a through hole penetrating through the first base, configured to avoid surface stress concentration of the first base, and facilitate the installation and positioning of the rotating bearing; the conversion mechanism comprises a rolling bearing seat fixedly connected with the first base and configured to provide a fulcrum for the rotation of the conversion mechanism relative to the first base; the conversion mechanism further comprises a first sliding block assembly comprising a shaft core and a first connecting piece, the shaft core being provided in the first connecting piece and extending at least partially into the rolling bearing seat, and the surface of the first connecting piece being provided with a first sliding part; a second base fixedly connected with the rack; a lead screw provided in the second base and extending in a first direction, the lead screw being provided with a movable second sliding block assembly, and the driving motor being provided at one end of the lead screw; in response to the forward rotation or reverse rotation of the driving motor, the second sliding block assembly moves forward or backward in the first direction; the second sliding block assembly comprises: a special-shaped nut connected with the lead screw and configured to move in the first direction under the action of the driving motor; a second sliding block provided in the special-shaped nut, the surface of the second sliding block being provided with a second sliding part in a second direction perpendicular to the first direction, and the second sliding part being slidably connected with the first sliding part.

2. The chuck carrier according to claim 1, wherein in response to the movement of the second sliding block assembly in the first direction, the first connecting piece moves relative to the second sliding block in the second direction, so as to drive the rack to rotate relative to the first base.

3. The chuck table of claim 2, wherein, the second sliding block assembly further comprises: a limiting block provided in the special-shaped nut or the second sliding block and configured to limit the movement range of the first connecting piece in the second direction.

4. The chuck table of claim 1 wherein, the first sliding block assembly further comprises: a rolling bearing provided on the surface of the first connecting piece and surrounding the shaft core, and configured to be movably connected with the rolling bearing seat and bear the radial and axial loads of the first connecting piece.

5. The chuck table of claim 1 wherein, the conversion mechanism further comprises: A wedge structure is arranged between the first connecting member and the rolling bearing seat, and / or between the second sliding block and the special-shaped nut, and is configured to adjust the gap between adjacent structural members.

6. The chuck table according to claim 1, wherein, The rotation speed of the frame is 0-20 mm / s.

7. The chuck table according to claim 1, wherein, The deflection angle of the frame relative to the first base is ±5 degrees.

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