Friction stir welding test method for semiconductor aluminum alloy

Abstract

The semiconductor aluminum alloy friction stir welding test method comprises the following steps that a cover plate is arranged on a supporting step on a bottom plate, and the bottom plate is provided with at least one supporting step; welding parameters are set for the stirring needle, and then the cover plate is subjected to stirring welding; and inspecting the weld appearance and the part metallographic phase. According to the welding test method, the appropriate supporting step size and the welding parameters of the stirring needle can be summarized, so that the welding seam stability is improved, and the fluidity of materials and the reasonable distribution of welding pressure in the welding process are guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor welding, and in particular to a semiconductor aluminum alloy friction stir welding test method. Background Art

[0002] With the rapid development of the domestic semiconductor industry, semiconductor equipment is also constantly being updated. Stir friction welding has significant advantages such as fewer joint defects, high quality, small deformation, and green and pollution-free welding process. In the welding of semiconductor aluminum alloy heaters, cooling plates, and cooling water channels of cavities, there are no corresponding specifications and standards to support the design of this process joint and the selection of stirring needles in the welding of semiconductor parts. Especially for complex cooling water channels and parts with high space requirements, the role of the support step is to provide necessary mechanical support for welding, prevent weld collapse, and ensure the geometry and size of the welded joint. This design can improve the cooling efficiency of the cold plate, but special attention should be paid to the stability of the weld during the welding process. In order to achieve the stability of the weld, it is necessary to design appropriate support steps and stirring needles to ensure the fluidity of the material and the reasonable distribution of welding pressure during the welding process. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the invention

[0003] The purpose of the present invention is to provide a semiconductor aluminum alloy stir friction welding test method, which can summarize the appropriate support step size and welding parameters of the stirring needle, thereby improving the weld stability and ensuring the fluidity of the material and the reasonable distribution of the welding pressure during the welding process.

[0004] In order to achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the present invention is: a semiconductor aluminum alloy friction stir welding test method, characterized in that it includes the following steps: Placing the cover plate on a supporting step on the base plate, wherein the base plate has at least one supporting step; Setting welding parameters for the stirring needle, and then performing stirring welding on the cover plate; Check the weld appearance and part metallography.

[0005] As a preferred technical solution, the flatness of the base plate is 0.05 mm.

[0006] As a preferred technical solution, five supporting steps are arranged on the upper side of the base plate, namely the first supporting step, the second supporting step, the third supporting step, the fourth supporting step and the fifth supporting step, and the maximum widths of the first supporting step, the second supporting step, the third supporting step, the fourth supporting step and the fifth supporting step are different.

[0007] As a preferred technical solution, the relationship between the welding depth H of the stirring needle and the shoulder diameter D is D=2.5H.

[0008] As a preferred technical solution, the width of the supporting step is W, the welding depth of the stirring needle is H, W=2.5H÷4 (rounded off).

[0009] As a preferred technical solution, when the cover plate height is ≤10 mm, if the cover plate height minus the welding depth is ≥2 mm, the support step width W is ≥3 mm.

[0010] As an optimal technical solution, two welding parameters are set. The first welding parameter is: the spindle speed of the stirring shaft is 1800R / min, the welding speed is 600mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 7mm, and the welding method is constant displacement. The second welding parameter is: the spindle speed of the stirring shaft is 1400R / min, the welding speed is 500mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 5mm, and the welding method is constant displacement.

[0011] As a preferred technical solution, the fitting tolerance of the base plate and the cover plate is that the processing tolerance of the base plate is +0.05~+0.1, and the fitting tolerance of the cover plate and the base plate is 0~-0.05.

[0012] As a preferred technical solution, the structure of the stirring needle is a triangular and threaded structure.

[0013] The beneficial effects of the present invention are: 1) Support steps to ensure welding stability, and use welding parameters to ensure the fluidity of materials and reasonable distribution of welding pressure during welding; 2) Multiple support steps are used to verify the influence of different welding parameters and support step width on welding deformation, so as to determine the appropriate welding parameters; 3) The width of the support step is W, the welding depth of the stirring needle is H, W=2.5H÷4 (take the remainder upward, take 0.5 when the decimal is less than 0.5, and take 1 when the decimal is greater than 0.5), and the welding deformation is minimal or even no deformation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a working three-dimensional diagram of a base plate and a cover plate provided by an embodiment of the present invention; Figure 2 It is a structural diagram of a base plate provided by an embodiment of the present invention.

[0015] exist Figure 1-Figure 21. bottom plate; 101. first supporting step; 1011. first weld; 1012. second weld; 102. second supporting step; 1021. third weld; 1022. fourth weld; 103. third supporting step; 1031. fifth weld; 1032. sixth weld; 104. fourth supporting step; 1041. seventh weld; 1042. eighth weld; 105. fifth supporting step; 1051. ninth weld; 1052. tenth weld; 106. flow channel; 2. first cover plate; 3. second cover plate; 4. third cover plate; 5. fourth cover plate; 6. fifth cover plate. DETAILED DESCRIPTION

[0016] The present invention is further described below in conjunction with the accompanying drawings.

[0017] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0018] See also Figure 1-Figure 2 The present invention provides a semiconductor aluminum alloy friction stir welding test method, comprising the following steps: Placing the cover plate on a supporting step on the base plate 1, wherein the base plate 1 has at least one supporting step; Setting welding parameters for the stirring needle, and then performing stirring welding on the cover plate; Check the weld appearance and part metallography to summarize the appropriate support step size and welding parameters for the stirring pin.

[0019] The appropriate supporting step size and welding parameters of the stirring needle can be summarized to improve the weld stability and ensure the fluidity of the material and the reasonable distribution of welding pressure during welding.

[0020] After the cover plate is placed on the supporting step, the whole needs to be clamped on the machine tool so as to ensure that the bottom plate 1 with the cover plate installed will not move during welding.

[0021] The supporting step is in the shape of a groove, and a flow channel 106 is provided at the bottom of the supporting step.

[0022] Specifically, a plurality of supporting steps are provided on the upper side of the base plate 1. Specifically, the number of supporting steps is 5, namely the first supporting step 101, the second supporting step 102, the third supporting step 103, the fourth supporting step 104 and the fifth supporting step 105. The maximum widths of the first supporting step 101, the second supporting step 102, the third supporting step 103, the fourth supporting step 104 and the fifth supporting step 105 are different. Multiple supporting steps are used to verify the influence of different welding parameters and the width of the supporting steps on the welding deformation, so as to determine the appropriate welding parameters.

[0023] like Figure 1 and Figure 2 As shown, the relationship between the welding depth H of the stirring needle and the shoulder diameter D is D=2.5H. The relationship between the welding depth of the stirring needle and the shoulder has a great influence on the welding deformation. Through repeated experiments by the inventor, when the relationship between the welding depth H and the shoulder diameter D is D=2.5H, the welding deformation is the smallest.

[0024] like Figure 1 and Figure 2 As shown, the width of the support step is W, and the width of the support step refers to the width of the support step on the upper side of the flow channel 106. The welding depth of the stirring needle is H, W=2.5 H÷4 (Rounded off), when the number of supporting steps is 5, each supporting step corresponds to a cover plate, namely the first cover plate 2, the second cover plate 3, the third cover plate 4, the fourth cover plate 5 and the fifth cover plate 6, the welds on both sides of the first supporting step 101 and the first cover plate 2 are the first weld 1011 and the second weld 1012 respectively, the welds on both sides of the second supporting step 102 and the second cover plate 3 are the third weld 1021 and the fourth weld 1022 respectively, the welds on both sides of the third supporting step 103 and the third cover plate 4 are the fifth weld 1031 and the sixth weld 1032 respectively, the welds on both sides of the fourth supporting step 104 and the fourth cover plate 5 are the seventh weld 1041 and the eighth weld 1042 respectively, and the welds on both sides of the fifth supporting step 105 and the fifth cover plate 6 are the ninth weld 1051 and the tenth weld 1052 respectively.

[0025] like Figure 1 and Figure 2 As shown, when the cover plate height is ≤10mm, if the cover plate height minus the welding depth is ≥2mm, the support step width W is ≥3mm.

[0026] like Figure 1 and Figure 2As shown, two welding parameters are set. The first welding parameter is: the spindle speed of the stirring shaft is 1800R / min, the welding speed is 600mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 7m, and the welding method is constant displacement. The second welding parameter is: the spindle speed of the stirring shaft is 1400R / min, the welding speed is 500mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 5mm, and the welding method is constant displacement.

[0027] like Figure 1 and Figure 2 As shown, the fitting tolerance between the base plate 1 and the cover plate, the processing tolerance of the base plate 1 is +0.05~+0.1, and the fitting tolerance between the cover plate and the base plate 1 is 0~-0.05.

[0028] like Figure 1 and Figure 2 As shown, the structure of the stirring needle is a triangular and threaded structure.

[0029] Example The cover plate is placed on the support step on the bottom plate 1, and the bottom plate 1 has at least one support step. Specifically, the width of the flow channel 106 is 10 mm, and the height is 7 mm. The widths of the first to fifth support steps 105 are 2 mm, 3 mm, 4 mm, 5 mm, and 6 mm, respectively. The length, width, and height of the first to fifth cover plates 2 to 6 are 400×14×7 mm, 400×16×7 mm, 400×18×7 mm, 400×20×7 mm, and 400×22×7 mm, respectively. The matching tolerance of the bottom plate 1 and the cover plate is +0.05, and the matching tolerance of the cover plate is -0.05. The flatness of the bottom plate 1 is 0.05 mm. Set the welding parameters for the stirring needle, and then stir weld the cover plate. Specifically, there are two welding parameters for the stirring needle. The first welding parameter is: the main shaft speed of the stirring shaft is 1800R / min, the welding speed is 600mm / min, the inclination angle is 2.5°, the welding depth of the stirring needle is 7mm, and the welding method is constant displacement. The second welding parameter is: the main shaft speed of the stirring shaft is 1400R / min, the welding speed is 500mm / min, the inclination angle is 2.5°, and the welding depth of the stirring needle is 7mm. The degree is 5mm, the welding method is constant displacement, the first welding parameters are used to weld the first weld 1011, the third weld 1021, the fifth weld 1031, the seventh weld 1041 and the ninth weld 1051, and the second welding parameters are used to weld the second weld 1012, the fourth weld 1022, the sixth weld 1032, the eighth weld 1042 and the tenth weld 1052. The structure of the stirring needle is triangular and threaded, and the relationship between the welding depth H and the shoulder diameter D is: D=2.5H.

[0030] The weld appearance and the metallographic structure of the parts were checked, and samples were taken according to the aluminum alloy friction stir welding standard. The test data obtained are shown in Table 1. The width of the support step is W, and the width of the support step refers to the width of the support step on the upper side of the flow channel 106. The welding depth of the stirring needle is H, W=2.5H÷4 (rounded off). It can be concluded from Table 1 that when the cover plate height is ≤10mm and the cover plate height minus the welding depth is ≥2mm, the support step width W is ≥3mm, the width of the support step is W, the width of the support step refers to the width of the support step on the upper side of the flow channel, the welding depth of the stirring needle is H, W=2.5H÷4 (rounded off), when W meets the above conditions, the deformation is very small or even no deformation.

[0031] The above embodiments are merely descriptions for the purpose of clearly illustrating the present invention, and are not limitations on the implementation methods. For those skilled in the art, other different forms of changes or modifications may be made based on the above descriptions. It is not necessary and impossible to enumerate all the implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A semiconductor aluminum alloy friction stir welding test method, characterized in that , including the following steps: Placing the cover plate on a supporting step on the base plate, wherein the base plate has at least one supporting step; Setting welding parameters for the stirring needle, and then performing stirring welding on the cover plate; Check the weld appearance and part metallography.

2. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: The flatness of the bottom plate is 0.02-0.1 mm.

3. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: Five supporting steps are arranged on the upper side of the bottom plate, namely the first supporting step, the second supporting step, the third supporting step, the fourth supporting step and the fifth supporting step, and the maximum widths of the first supporting step, the second supporting step, the third supporting step, the fourth supporting step and the fifth supporting step are different.

4. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: The relationship between the welding depth H of the stirring needle and the shoulder diameter D is D=2.5H.

5. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: The width of the supporting step is W, the welding depth of the stirring needle is H, W=2.5H÷4 (rounded off).

6. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: When the cover plate height is ≤10mm, if the cover plate height minus the welding depth is ≥2mm, the support step width W is ≥3mm.

7. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: Two welding parameters are set. The first welding parameter is: the spindle speed of the stirring shaft is 1800R / min, the welding speed is 600mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 7mm, and the welding method is constant displacement. The second welding parameter is: the spindle speed of the stirring shaft is 1400R / min, the welding speed is 500mm / min, the inclination angle is 2.5°, the stirring needle welding depth is 5mm, and the welding method is constant displacement.

8. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: The fitting tolerance between the base plate and the cover plate, the processing tolerance of the base plate is +0.05~+0.1, and the fitting tolerance between the cover plate and the base plate is 0~-0.

05.

9. The semiconductor aluminum alloy friction stir welding test method according to claim 1, characterized in that: The stirring needle has a triangular and threaded structure.

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