A multi-aperture spectral confocal measurement system

Abstract

The application discloses a kind of multiple aperture spectral confocal measurement systems, including light source, multiple probe components, switching device, dispersion lens and spectral analysis device;Multiple probe components one end is respectively towards dispersion lens arrangement;Probe component includes the light outlet hole for transmission detection light and the detection tube for transmission measurement light, light outlet hole is communicated with light source, and detection tube is connected with spectral analysis device;And the diameter of the light outlet hole of each group probe component is arranged according to first preset rule, and each group probe component is connected with switching device;According to the need of measurement, the corresponding light source is controlled to emit detection light, and the detection light is transmitted through the light outlet hole of different diameter connected with light source, forms detection light spot of different size, dynamically drives the movement of probe component relative to dispersion lens, to switch different light outlet hole, can automatically switch probe component according to preset rule, to realize the switching of different diameter measurement light spot, improve measurement efficiency.

Description

Technical Field

[0001] This invention relates to the field of spectral measurement technology, and in particular to a multi-aperture spectral confocal measurement system. Background Technology

[0002] A spectral focal displacement measuring device is a device that uses spectral technology for optical non-contact displacement measurement. It determines the distance between the object and the measuring device by utilizing the different wavelengths of light reflected or emitted by the object. This device typically combines the principles of spectral analysis and laser ranging; by analyzing the spectrum of the reflected light, it can accurately measure the distance.

[0003] In existing spectral measurement devices, the spot size is fixed after the output aperture and dispersive lens are selected, and different spot diameters exhibit different measurement performance. In many measurement scenarios, it is sometimes necessary to switch between different spot diameters to meet various requirements. The conventional switching method is to manually change the lens or the light source with the output diameter to control the diameter of the detection spot. However, this manual switching method is extremely inefficient and prone to installation errors.

[0004] Therefore, it is necessary to improve the existing spectral measurement devices to solve the technical problem of low measurement efficiency caused by the switching process. Summary of the Invention

[0005] The purpose of this invention is to provide a multi-aperture spectral confocal measurement system to solve the above-mentioned technical problems.

[0006] To achieve this objective, the present invention adopts the following technical solution: A multi-aperture spectral confocal measurement system includes a light source, multiple probe assemblies, a switching device, a dispersive lens, and a spectral analysis device; one end of each of the multiple probe assemblies is respectively positioned facing the dispersive lens; The probe assembly includes a light-emitting aperture for transmitting detection light and a detection tube for transmitting measurement light. The light-emitting aperture is connected to the light source, and the detection tube is connected to the spectral analysis device. Furthermore, the diameter of the light-emitting aperture of each group of probe assemblies is arranged according to a first preset rule; each group of probe assemblies is connected to the switching device, which is used to drive the corresponding group of probe assemblies to move relative to the dispersive lens.

[0007] Optionally, the first preset rule is to increase linearly from small to large.

[0008] Optionally, the number of probe assemblies is three sets, and the light emission holes of the three sets of probe assemblies are respectively a first light emission hole, a second light emission hole, and a third light emission hole.

[0009] Optionally, each of the probe assemblies is connected to a set of optical fiber assemblies, and the optical fiber assemblies are in communication with the light source; The diameters of the three sets of optical fiber assemblies are 35μm, 50μm and 65μm, respectively.

[0010] Optionally, the spectral analysis device includes: A receiving module having multiple input interfaces for receiving measurement light transmitted through different detection tubes; The beam splitter module is used to separate the received measurement light into multi-channel optical signals according to wavelength; The optical analysis module is used to perform spectral analysis on the optical signals of each channel separated by the beam splitter. The processing module is used to calibrate, enhance, and suppress noise in the optical signal, and to process the data transmitted from the optical analysis module. The output module is used to output the processed spectral analysis results to an external system or display.

[0011] Optionally, the switching device includes: A drive mechanism is used to drive the probe assembly to move; A connecting mechanism for connecting the drive mechanism and the probe assembly; The control module is used to regulate the motion state of the drive mechanism.

[0012] Optionally, the multi-aperture spectral confocal measurement system further includes a position feedback unit, which is used to detect the actual position of the probe assembly in real time and feed the position information back to the control module to adjust the motion state of the drive mechanism.

[0013] Optionally, the switching device further includes a protection module, the protection module comprising: A limit switch is set at a preset position on the periphery of the dispersive lens; A temperature sensor is used to detect the temperature of the probe assembly and the drive mechanism; The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply to the light source when the input light intensity exceeds the safety threshold.

[0014] Compared with the prior art, the present invention has the following advantages: After the system is started, the corresponding light source is controlled to emit detection light according to the measurement needs. The detection light is transmitted through light-emitting apertures of different diameters connected to the light source to form detection light spots of different sizes. The position of the selected probe assembly is adjusted by the switching device to correctly align it with the dispersive lens, thereby realizing the adjustment of different detection positions. The light spot is projected onto the sample through the dispersive lens for detection. The generated measurement light is transmitted to the spectral analysis device through the detection tube. The spectral analysis device analyzes the received measurement light to obtain spectral information. The switching device of this measurement system can dynamically drive the probe assembly to move relative to the dispersive lens as needed to switch different light-emitting apertures. It can automatically switch the probe assembly according to preset rules, thereby realizing the switching of measurement light spots of different diameters and improving measurement efficiency. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0017] Figure 1 This is a schematic diagram of the multi-aperture spectral confocal measurement system in this embodiment; Figure 2 This is a schematic diagram of the probe portion of the multi-aperture spectral confocal measurement system in this embodiment. Detailed Implementation

[0018] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0019] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0020] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0021] Combination Figure 1 and Figure 2 As shown, this embodiment of the invention provides a multi-aperture spectral confocal measurement system, including a light source, multiple probe assemblies 103, a switching device 106, a dispersive lens 104, and a spectral analysis device 102; one end of each of the multiple probe assemblies 103 is respectively positioned towards the dispersive lens 104.

[0022] The probe assembly 103 includes an output aperture for transmitting detection light and a detection tube 107 for transmitting measurement light. The output aperture is connected to the light source, and the detection tube 107 is connected to the spectral analysis device 102. The diameter of the output aperture of each probe assembly 103 is arranged according to a first preset rule. Each probe assembly 103 is connected to a switching device 106, which is used to drive the corresponding probe assembly 103 to move relative to the dispersive lens 104.

[0023] It should be noted that each probe assembly 103 is provided with a light outlet and a detection tube 107 to facilitate the adjustment of different measurement positions and the generation of detection light spots of different sizes; by using light outlets of different diameters, the detection light can generate light spots of different sizes as needed.

[0024] The working principle of this invention is as follows: After the system is started, the corresponding light source is controlled to emit detection light according to the measurement needs. The detection light is transmitted through light-emitting apertures of different diameters connected to the light source to form detection light spots of different sizes. The position of the selected probe assembly 103 is adjusted by the switching device 106 so that it is correctly aligned with the dispersive lens 104, thereby realizing the adjustment of different detection positions. The light spot is projected onto the sample through the dispersive lens 104 for detection. The generated measurement light is transmitted to the spectral analysis device 102 through the detection tube 107. The spectral analysis device 102 analyzes the received measurement light to obtain spectral information. Compared with the spectral measurement device in the prior art, the switching device 106 of this measurement system can dynamically drive the probe assembly 103 to move relative to the dispersive lens 104 as needed to switch different light-emitting apertures. It can automatically switch the probe assembly 103 according to preset rules, thereby realizing the switching of measurement light spots of different diameters and improving measurement efficiency.

[0025] As an optional solution in this embodiment, the first preset rule is to increase linearly from small to large; this design has the following advantages: First, arranging the light output apertures according to a linear increasing rule makes the system control more direct and simple; the switching device 106 only needs to move according to a preset fixed step size, and the control logic is clear and easy to understand.

[0026] Second, due to the linear increase in the size of the light-emitting aperture, the system achieves linear adjustment of the measurement range when switching between light-emitting apertures of different diameters, and can provide linear resolution.

[0027] Third, the linearly increasing aperture diameter allows for a smoother transition from one measurement scale to another, avoiding data abrupt changes caused by overly abrupt switching and improving measurement quality.

[0028] Fourth, because the rules are linearly increasing, the behavior and performance of the system are more predictable, making system optimization easier.

[0029] Furthermore, it should be noted that linearly increasing aperture designs have certain limitations; in some specific scenarios, applications requiring specific ratios or non-linear aperture increases or decreases are necessary. Adjustments need to be made to suit specific application scenarios, balancing the system's versatility and adaptability.

[0030] In this embodiment, there are three sets of probe assemblies 103, and the light emission holes of the three sets of probe assemblies 103 are the first light emission hole 201, the second light emission hole 202 and the third light emission hole 203, respectively.

[0031] Furthermore, each probe assembly 103 is connected to a set of optical fiber assemblies 105, and the optical fiber assemblies 105 are connected to the light source. The diameters of the three sets of optical fiber components 105 are 35μm, 50μm and 65μm, respectively.

[0032] Since the diameters of the three sets of fiber optic components 105 are 35μm, 50μm and 65μm respectively, they can generate three different sizes of detection spot and be switched between in various aperture spectral confocal measurement systems.

[0033] Large light spot (generated by 65μm fiber): Corresponding to the third exit aperture 203, the large light spot can acquire stronger reflected light, providing a more efficient way to collect more optical signals, especially in situations where the target object surface has low reflectivity or poor optical properties. Collecting more optical signals can improve signal quality, thereby improving the accuracy of spectral resolution. Under these conditions, although its lateral resolution is not as good as that of a small light spot, it ensures reliable measurement results even when the optical signal is weak.

[0034] Medium spot size (generated by 50μm fiber): Corresponding to the second exit aperture 202, a medium-sized spot size can be selected for situations where both lateral resolution and optical signal intensity need to be considered simultaneously. This spot size provides a balance, allowing the system to maintain a certain level of lateral resolution while ensuring a certain level of optical signal intensity.

[0035] Small light spot (generated by 35μm fiber): Corresponding to the first output aperture 201, the small light spot provides higher lateral resolution, enabling the system to perform more precise measurements and accurately identify target objects within small areas, resulting in higher clarity in information resolution. Although the returned signal may be relatively weak in this case, it often provides more refined results under bright or strongly reflective samples.

[0036] In this embodiment, the spectral analysis device 102 includes: The receiving module has multiple input interfaces for receiving measurement light transmitted through different detection tubes 107. The receiving module is the access port for spectral analysis. It has multiple input interfaces and can connect to multiple detection tubes 107 simultaneously to receive different measurement lights, which increases the adaptability and flexibility of the system. It can receive different detection lights according to requirements.

[0037] The beam splitter module is used to separate the measurement light received from the receiving module and obtain multi-channel optical signals according to different wavelengths.

[0038] The optical analysis module is used to perform spectral analysis on the optical signals of each channel separated by the beam splitter; the high precision and high sensitivity of the optical analysis can ensure the accuracy and reliability of the results, thus providing accurate measurement data.

[0039] The processing module 101 is used to calibrate, enhance, and suppress noise in the optical signal, and to process the data transmitted from the optical analysis module. Simultaneously, the processing module 101 controls the operation of the spectrometer, and the data processing includes signal conversion, data integration, and spectral decoding. Calibration ensures the accuracy of the measurement results, while signal enhancement and noise suppression ensure the clarity and reliability of the data. Furthermore, the processing module 101 is also responsible for switching, controlling, and optimizing the operation of the spectrometer to ensure optimal performance.

[0040] The output module is used to output the processed spectral analysis results to an external system or display. It outputs the processed spectral analysis results to a device for display to the user or connects to other systems or devices; the output module's design ensures versatility and user-friendliness by allowing users or other devices to access and use the results.

[0041] In this embodiment, the switching device 106 includes: The drive mechanism is used to drive the probe assembly 103 to move. The drive mechanism is the core part of the switching device 106 and is used to push the probe assembly 103 to move. It needs to have sufficient force and precision to change the position of the probe assembly 103 to adapt to various different configurations and setting requirements.

[0042] The connecting mechanism is used to connect the drive mechanism and the probe assembly 103. The connecting mechanism plays a connecting role between the drive mechanism and the probe assembly 103, ensuring that the driving force is transmitted from the drive mechanism to the probe assembly 103. It also supports and fixes the probe assembly 103, ensuring the stability and accuracy of the movement process.

[0043] The control module is used to regulate the motion state of the drive mechanism, and is responsible for controlling its speed, direction, and the start and end times of movement. The control module needs to be connected to the system's main control board to receive and process information from other components.

[0044] The position feedback unit is used to detect the actual position of the probe assembly 103 in real time and feed the position information back to the control module to adjust the motion state of the drive mechanism. Through the feedback information, the control module can know the actual position and movement state of the probe, and then adjust the motion of the drive mechanism as needed to ensure that the desired position is accurately reached.

[0045] Furthermore, the switching device 106 also includes a protection module, which includes: A limit switch is set at a preset position on the periphery of the dispersive lens 104. When the probe assembly 103 moves to the limit position, the limit switch is triggered and sends a signal to the control module. This signal informs the control module that the probe assembly 103 has reached or is about to exceed its movement limit, so as to prevent damage caused by excessive movement of the probe assembly 103.

[0046] A temperature sensor is used to detect the temperature of the probe assembly 103 and the drive mechanism. If the detected temperature exceeds the safety threshold, the sensor will send a warning signal to protect against overheating, as excessively high temperatures may damage the function of the probe assembly 103 and the drive mechanism.

[0047] The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply to the light source when the input light intensity exceeds the safety threshold; it can prevent the spectral analysis from receiving excessively strong light signals, thereby ensuring the safe operation of the equipment and the accuracy of the analysis data.

[0048] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-aperture spectral confocal measurement system, characterized in that, It includes a light source, multiple probe assemblies, a switching device, a dispersive lens, and a spectral analysis device; one end of each of the multiple probe assemblies is respectively positioned facing the dispersive lens; The probe assembly includes a light-emitting aperture for transmitting detection light and a detection tube for transmitting measurement light. The light-emitting aperture is connected to the light source, and the detection tube is connected to the spectral analysis device. Furthermore, the diameter of the light-emitting aperture of each group of probe assemblies is arranged according to a first preset rule; each group of probe assemblies is connected to the switching device, which is used to drive the corresponding group of probe assemblies to move relative to the dispersive lens; wherein, the first preset rule is to increase linearly from small to large; The switching device includes: a drive mechanism for driving the probe assembly to move, a connection mechanism for connecting the drive mechanism and the probe assembly, and a control module for regulating the motion state of the drive mechanism. It also includes a position feedback system unit, which is used to detect the actual position of the probe assembly in real time and feed the position information back to the control module to adjust the motion state of the drive mechanism; The number of probe assemblies is three sets, and the light emission holes of the three sets of probe assemblies are the first light emission hole, the second light emission hole, and the third light emission hole, respectively; Each probe assembly is connected to a set of optical fiber assemblies, and the optical fiber assemblies are connected to the light source. The diameters of the three sets of optical fiber assemblies are 35μm, 50μm and 65μm, respectively; Large light spot generated by 65μm optical fiber: corresponding to the third light exit aperture; Medium spot size, generated by 50μm fiber: corresponding to the second exit aperture; Small light spot, generated by 35μm optical fiber: corresponding to the first light output aperture.

2. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that, The spectral analysis device includes: A receiving module having multiple input interfaces for receiving measurement light transmitted through different detection tubes; The beam splitter module is used to separate the received measurement light into multi-channel optical signals according to wavelength; The optical analysis module is used to perform spectral analysis on the optical signals of each channel separated by the beam splitter. The processing module is used to calibrate, enhance, and suppress noise in the optical signal, and to process the data transmitted from the optical analysis module. The output module is used to output the processed spectral analysis results to an external system or display.

3. The multi-aperture spectral confocal measurement system according to claim 1, characterized in that, The switching device further includes a protection module, which includes: A limit switch is set at a preset position on the periphery of the dispersive lens; A temperature sensor is used to detect the temperature of the probe assembly and the drive mechanism; The input light source overload protection unit is used to reduce the light source intensity or interrupt the power supply to the light source when the input light intensity exceeds the safety threshold.

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