Silicon rod electrical property detection equipment and silicon rod electrical property detection method

Abstract

The invention discloses a silicon rod electrical performance detection device and method, and the device comprises a visual collection module which determines the diameter and the central point position of the end face of a silicon rod; the end face detection module performs multi-point detection according to the end face point position information to obtain the end face state of the silicon rod; and the electrical performance detection module adjusts the detection posture according to the end face state of the silicon rod so as to fit the end face of the silicon rod and complete detection. The application main body of the detection method is the detection equipment, and the method comprises the following steps: A, the visual acquisition module acquires a silicon rod image to determine the position of an end surface point of a silicon rod; b, an end face detection module performs multi-point detection on the end face of the silicon rod according to the end face point positions to obtain end face inclination; c, the detection end of the electrical performance detection module can be attached to the end face of the silicon rod, and the resistivity of the silicon single crystal rod is determined by obtaining the service life information of minority carriers of the silicon single crystal in the silicon rod. The equipment provided by the invention is suitable for detecting various silicon rods, and is high in universality and high in resistivity detection precision of the silicon single crystal rod.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon rod production, and in particular to a silicon rod electrical performance detection device and a silicon rod electrical performance detection method. Background Art

[0002] At present, with the rapid development of the solar photovoltaic industry, the demand for monocrystalline silicon rods, which are the main raw materials, has increased significantly.

[0003] In the process of making silicon rods, it is particularly important to conduct quality inspection on silicon rods. One of the important inspections is to conduct electrical inspection on silicon rods to obtain the presence of heavy metal impurities and defects in the single crystal. However, the methods currently used are generally manual inspection or inspection using traditional automated equipment. Manual inspection is to place the silicon rod on a simple platform and then conduct manual inspection. However, due to certain errors in manual measurement, the measurement data is inaccurate. In addition, manual inspection is inefficient, resulting in low production capacity. In traditional automated equipment inspection, when the conveying device is transporting the silicon rod, the silicon rod will rotate during the transportation process. At the same time, due to the various end face cutting conditions of each silicon rod, the electrical inspection device cannot obtain accurate end face information before inspection, resulting in large inspection errors.

[0004] Therefore, the present application proposes a technical solution to solve the problem in the prior art that the electrical property detection of silicon rods is inefficient and the accuracy is difficult to ensure. Summary of the invention

[0005] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a silicon rod electrical performance detection device, which can realize the full automation of silicon rod electrical performance detection, not only improve the detection efficiency of silicon rods, but also effectively improve the detection accuracy. Among them, the application also provides a silicon rod electrical performance detection method, which is applied to the above-mentioned silicon rod electrical performance detection device, and can effectively improve the electrical performance detection efficiency and detection accuracy of single crystal silicon rods.

[0006] In a first aspect, a silicon rod electrical property detection device according to an embodiment of the present invention includes: The visual acquisition module determines the diameter and center point of the silicon rod end face by acquiring the image of the silicon rod; The end face detection module detects the positions of multiple points on the end face of the silicon rod according to the diameter and center point position information of the end face of the silicon rod, and obtains the state of the end face of the silicon rod from the position information of the multiple points; The electrical performance detection module adjusts the detection posture according to the state of the silicon rod end face to fit the silicon rod end face and complete the detection.

[0007] A silicon rod electrical performance testing device according to an embodiment of the present invention has at least the following beneficial effects: The specific working principle of the silicon rod electrical performance testing device provided in this application is: when the silicon rod is transported to the testing station, the visual acquisition module and the end face detection module cooperate to obtain the inclination information of the end face of the silicon rod to be tested, and after the electrical performance detection module obtains the inclination information of the end face of the silicon rod to be tested, the electrical performance detection module adjusts its posture. That is, the electrical performance detection module adjusts the position of the detection end relative to the end face of the silicon rod according to the angle between the end face of the silicon rod and the central axis of the silicon rod, so that the detection end is parallel to the end face of the silicon rod, so that the detection end can better fit the end face of the silicon rod, reduce the gap error between the detection end and the end face of the silicon rod, and ensure the detection accuracy of the silicon rod.

[0008] Through the coordinated work of the visual acquisition module, the end face detection module and the electrical performance detection module, the automatic detection of the electrical performance of the silicon rod is realized, which greatly improves the detection efficiency. At the same time, the use of high-resolution cameras and image processing technology can accurately measure the position of the silicon rod end face; through multi-point detection, the state information of the silicon rod end face can be accurately obtained; by obtaining the lifetime information of the minority carriers of the silicon single crystal, the resistivity of the single crystal silicon rod can be accurately determined. The equipment provided by the present invention is suitable for the detection of silicon rods of different specifications and models, and has strong versatility and adaptability.

[0009] According to a silicon rod electrical property detection device of an embodiment of the present invention, the end face detection module includes a first detector, and the detection end of the first detector can abut against multiple point positions of the silicon rod end face.

[0010] According to a silicon rod electrical property detection device of an embodiment of the present invention, the end face detection module includes at least three first detectors, one of the three first detectors is correspondingly abutted against the center point of the silicon rod end face, and two of the three first detectors are circumferentially arranged around the center point.

[0011] According to an electrical property detection device for a silicon rod according to an embodiment of the present invention, the electrical property detection module includes a second detector. According to the state of the end face of the silicon rod, the detection posture of the second detector is adjusted. According to the diameter of the silicon rod and the position of the center point of the end face, the position to be detected of the end face of the silicon rod is determined. The second detector contacts the position to be detected and completes the detection.

[0012] According to a silicon rod electrical property testing device of an embodiment of the present invention, a plurality of positions to be tested are arranged on the end surface of the silicon rod, and the plurality of positions to be tested are circumferentially distributed around a center point.

[0013] A silicon rod electrical property detection device according to an embodiment of the present invention further includes a switching module, which switches the use status of the silicon rod by the visual acquisition module, the end face detection module, and the electrical property detection module in sequence according to the process flow.

[0014] A silicon rod electrical property detection device according to an embodiment of the present invention further includes an identification module, the identification module is used to obtain product model information of the silicon rod to be detected, and the identification module is arranged upstream of the visual acquisition module; and / or, The recognition module is arranged between the visual acquisition module and the end face detection module.

[0015] In a second aspect, a method for detecting electrical properties of a silicon rod according to an embodiment of the present invention, the application subject is the above-mentioned silicon rod electrical properties detection device, and includes the following steps: Step A: The image of the silicon rod is acquired by the visual acquisition module, and the control module analyzes the image information to determine the diameter and center point position of the end face of the silicon rod; Step B: the end face detection module performs multi-point detection on the silicon rod end face according to the diameter and center point position information of the silicon rod end face, and the control module analyzes the point position data to obtain the slope information of the silicon rod end face; Step C: The electrical performance detection module adjusts the detection posture according to the inclination information of the silicon rod end face so that the detection end of the electrical performance detection module can fit the silicon rod end face. The electrical performance detection module obtains the lifetime information of the minority carriers of the silicon single crystal in the silicon rod to determine the resistivity of the single crystal silicon rod.

[0016] A method for detecting electrical properties of a silicon rod according to an embodiment of the present invention has at least the following beneficial effects: the inclination information of the end face of the silicon rod to be detected is obtained through the cooperation of the visual acquisition module and the end face detection module, and after the electrical property detection module obtains the inclination information of the end face of the silicon rod to be detected, the electrical property detection module adjusts its posture. That is, the electrical property detection module adjusts the position of the detection end relative to the end face of the silicon rod according to the angle between the end face of the silicon rod and the central axis of the silicon rod, so that the detection end is parallel to the end face of the silicon rod, so that the detection end can better fit the end face of the silicon rod, reduce the gap error between the detection end and the end face of the silicon rod, and ensure the detection accuracy of the silicon rod.

[0017] Through the coordinated work of the visual acquisition module, the end face detection module and the electrical performance detection module, the automatic detection of the electrical performance of the silicon rod is realized, which greatly improves the detection efficiency. At the same time, the use of high-resolution cameras and image processing technology can accurately measure the position of the silicon rod end face; through multi-point detection, the state information of the silicon rod end face can be accurately obtained; by obtaining the lifetime information of the minority carriers of the silicon single crystal, the resistivity of the single crystal silicon rod can be accurately determined. The equipment and method provided by the present invention are suitable for the detection of silicon rods of different specifications and models, and have strong versatility and adaptability.

[0018] According to a method for detecting electrical properties of a silicon rod according to an embodiment of the present invention, step B: an end face detection module determines at least three detection point positions on the end face of the silicon rod according to position information of the end face of the silicon rod, wherein one detection point position is the center point of the end face of the silicon rod, and the remaining detection point positions are arranged circumferentially around the center line, and a control module analyzes the detection point position data to obtain the slope information of the end face of the silicon rod.

[0019] According to a method for detecting electrical properties of a silicon rod according to an embodiment of the present invention, step A: the recognition module identifies product specification information of the silicon rod to be detected, the visual acquisition module acquires an image of the silicon rod, and the control module analyzes the image information to determine the diameter and center point position of the end face of the silicon rod; and / or, Step A: The image of the silicon rod is acquired through the visual acquisition module. After the control module analyzes the image information to determine the position of the end face of the silicon rod, the recognition module recognizes the product specification information of the silicon rod to be detected.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 This is a schematic structural diagram of a silicon rod electrical property detection device according to an embodiment of the present invention; Figure 2 A first image schematic diagram of a first embodiment of obtaining a center point position according to an embodiment of the present invention; Figure 3 A second image schematic diagram of a second embodiment of obtaining a center point position according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the image when three detection points are obtained; Figure 5 This is a schematic diagram of the image when five detection points are obtained; Figure 6 It is a structural schematic diagram of a first embodiment of a conveying module according to an embodiment of the present invention; Figure 7 It is a structural schematic diagram of a second embodiment of a conveying module according to an embodiment of the present invention; Figure 8 The present invention is a flowchart of a method for detecting electrical properties of a silicon rod according to an embodiment of the present invention.

[0022] Description of reference numerals: Conveying module 1; Visual acquisition module 2; End face detection module 3; Electrical performance detection module 4; Identification module 5; Switching module 6; Lifting mechanism 7. DETAILED DESCRIPTION

[0023] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0025] In the description of the invention, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of the first or the second, it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0027] Reference Figure 1 , an embodiment of the present invention provides a silicon rod electrical performance detection device.

[0028] Specifically, Figure 1 As shown, the silicon rod electrical property detection equipment includes a conveying module 1 and a visual acquisition module 2, an end face detection module 3 and an electrical property detection module 4 arranged along the silicon rod conveying direction.

[0029] Among them, the conveying module 1 is provided with an inspection station, and the visual acquisition module 2, the end face inspection module 3 and the electrical performance inspection module 4 are all inspection stations for performing corresponding processes on the silicon rod. Specifically, the visual acquisition module 2 is used to obtain the image of the silicon rod and determine the position of the end face of the silicon rod to be inspected through the image of the silicon rod.

[0030] It can be understood that the visual acquisition module 2 uses a camera to take a bird's-eye view of the silicon rod to obtain an image of the silicon rod to be inspected at the inspection station of the conveying module 1, and obtains the specific position of the silicon rod to be inspected relative to the inspection station. After the image is transmitted to the control module, the control module obtains the diameter of the silicon rod to be inspected and the length of the silicon rod to be inspected after data analysis, and determines the area of ​​the end face of the silicon rod to be inspected by the diameter of the silicon rod. The end face detection module performs multi-point contact detection on the end face of the silicon rod based on the position information and area information of the end face of the silicon rod, and calculates the slope of the end face of the silicon rod to be inspected through the data fed back by each detection point during the detection.

[0031] Optionally, the present application provides a first embodiment for obtaining the center point position. Figure 2 As shown, the camera can directly photograph the end face of the silicon rod to be inspected to obtain a first image. When the first image obtained is a circular image, a rectangular frame tangent to the circumference of the circle can be set outside the first image, and the center point position can be determined by the intersection of the diagonal lines of the rectangle. When the first image obtained is a rectangular image, the center point position can be determined by the intersection of the diagonal lines of the rectangle. The control module determines the positions of the remaining inspection points on the end face of the silicon rod based on the center point position.

[0032] like Figure 4 As shown, the center point can be the first detection point position, and the two second detection point positions can be set on both sides of the center point position, and the two second detection point positions and the center point position are located on the same straight line. The first detector of the end face detection module 3 can be in point contact with the center point position and the second detection point position in turn, and the displacement generated when the first detector is at the initial position to the different detection point positions can be used to obtain the slope of the end face after data analysis by the control module.

[0033] Specifically, one first detector may be provided, and the first detector sequentially contacts the center point and the second detection point to obtain the displacement data.

[0034] Alternatively, three first detectors may be provided. During detection, the three detectors may be in point contact with the center point and the second detection point at the same time to obtain displacement data, thereby improving detection efficiency.

[0035] The second detection point is located at the midpoint of a line connecting the center point and the edge of the silicon rod end surface.

[0036] like Figure 5As shown, the center point is used as the first detection point position. At the same time, with the center point as the reference, at least four second detection point positions arranged circumferentially around the center point are set on the silicon rod end face. Among them, the two second detection point positions set diagonally are located on the same line as the center point. The first detector of the end face detection module 3 can be in point contact with the center point position and the second detection point position in turn. The displacement generated when the first detector is from the initial position to the different detection point positions is used to obtain the slope of the end face after data analysis by the control module.

[0037] Specifically, one first detector may be provided, and the first detector sequentially contacts the center point and the second detection point to obtain the displacement data.

[0038] Alternatively, three first detectors may be provided. During detection, the three detectors may first contact a set of center points and second detection points to obtain a first set of displacement data, then rotate a preset angle, and then contact another set of center points and second detection points to obtain a second set of displacement data. The control module obtains the slope of the end face after analyzing the two sets of displacement data. Optionally, the end face detection module 3 is provided with a rotating device, and the three first detectors are installed on the rotating device, and the three first detectors are on the same straight line.

[0039] Alternatively, five first detectors may be provided, and during detection, the five first detectors may simultaneously contact the center point and the four second detection points to obtain displacement data. The control module obtains the slope of the end face after data analysis.

[0040] The second detection point is located 5-10 mm away from the edge of the silicon rod end surface.

[0041] It should be noted that the number of second detection points and the locations of the second detection points can be determined according to the actual specifications of the silicon rods to be detected.

[0042] The electrical performance detection module 4 adjusts the position of the detection end relative to the end face of the silicon rod according to the end face slope information, so that the detection end is parallel to the end face of the silicon rod, so that the detection end can better fit the end face of the silicon rod, reduce the gap error between the detection end and the end face of the silicon rod, and ensure the detection accuracy of the silicon rod.

[0043] After the position adjustment of the detection end of the electrical performance detection module 4 is completed, the detection end of the electrical performance detection module 4 performs multi-point detection on the silicon rod end face based on the center point position of the silicon rod end face and the diameter of the silicon rod end face. The detection end of the electrical performance detection module 4 can simultaneously abut against three or more points to be detected on the silicon rod end face to perform electrical performance detection, or the detection end of the electrical performance detection module 4 sequentially abuts against three or more points to be detected on the silicon rod end face to perform electrical performance detection.

[0044] Specifically, when the number of detection points is three, one of the detection points is the center point, the center point is the center of the end face of the silicon rod, and the other two detection points are located on the same straight line as the center point and at the midpoint of the radius; when the number of detection points is more than three, one of the detection points is the center point, the center point is the center of the end face of the silicon rod, and the remaining detection points are circumferentially arranged around the center point and are located 5-10 mm away from the edge of the end face of the silicon rod.

[0045] Optionally, the present application provides a second embodiment for obtaining the center point position. Figure 3 As shown, the camera can directly shoot the silicon rod in a direction perpendicular to the circumferential outer wall of the silicon rod to be detected, so as to obtain the second image of the silicon rod to be detected. The second image is a rectangle, and the center point position is determined by the width of the rectangle, that is, the center point position is on the straight line passing through the midpoint of the wide side of the rectangle. Taking the midpoint as the reference, two reference lines parallel to the straight line of the midpoint of the wide side are set in the vertical direction. The reference line is tangent to the edge of the silicon rod, and the detection path is generated by connecting the two tangent points, one of which is the initial point position, and the other is the terminal point position. Driven by the displacement device, the first detector sequentially obtains displacement data of at least three point positions along the detection path, and the control module analyzes and obtains the end face slope information after obtaining the displacement data.

[0046] The electrical performance detection module 4 adjusts the position of the detection end relative to the end face of the silicon rod according to the end face slope information, so that the detection end is parallel to the end face of the silicon rod, so that the detection end can better fit the end face of the silicon rod, reduce the gap error between the detection end and the end face of the silicon rod, and ensure the detection accuracy of the silicon rod.

[0047] After the position adjustment of the detection end of the electrical performance detection module 4 is completed, the detection end of the electrical performance detection module 4 performs multi-point detection on the silicon rod end face based on the center point position of the silicon rod end face and the diameter of the silicon rod end face. The detection end of the electrical performance detection module 4 can simultaneously abut against three or more points to be detected on the silicon rod end face to perform electrical performance detection, or the detection end of the electrical performance detection module 4 sequentially abuts against three or more points to be detected on the silicon rod end face to perform electrical performance detection.

[0048] Specifically, when the number of detection points is three, one of the detection points is the center point, the center point is the center of the end face of the silicon rod, and the other two detection points are located on the same straight line as the center point and at the midpoint of the radius; when the number of detection points is more than three, one of the detection points is the center point, the center point is the center of the end face of the silicon rod, and the remaining detection points are circumferentially arranged around the center point and are located 5-10 mm away from the edge of the end face of the silicon rod.

[0049] According to some embodiments of the present application, an identification module 5 for obtaining specific product model information of the silicon rod to be inspected is also provided along the conveying direction of the silicon rod. The specific product model information is obtained to determine the number of detection point positions obtained by the end face inspection module 3. The identification module 5 can be provided upstream of the visual acquisition module 2, or the identification module 5 can be provided between the visual acquisition module 2 and the end face inspection module 3.

[0050] Specifically, the identification module 5 includes a code scanning device and a marking device. When the conveying module 1 conveys the silicon rod to be detected to the position corresponding to the identification module 5, the marking device can attach a label with corresponding specification information on the surface of the silicon rod to be detected after obtaining the length and weight of the silicon rod to be detected, or laser etch an identification code with corresponding specification information, and at the same time, the control system records the specification information. The code scanning device can read the label or identification code on the silicon rod to be detected to determine the specific information of the silicon rod currently being detected. In addition, after the end face slope detection and electrical performance detection are completed later, the acquired information can be integrated with the corresponding specification information, so that in the subsequent process, the technician can obtain the specific information of the silicon rod by scanning the code.

[0051] According to some embodiments of the present application, Figure 6 As shown, the conveying module 1 includes a conveying mechanism and a plurality of lifting mechanisms 7. The conveying mechanism is a V-shaped roller conveyor belt, which can fix the silicon rods during the conveying process through the V-shaped rollers to prevent the silicon rods from rolling randomly during the conveying process and affecting the detection efficiency and detection accuracy.

[0052] Furthermore, an identification station and a detection station are arranged along the conveying direction of the conveying module 1. Specifically, the identification module 5 is arranged at the identification station, and the switching module 6 is arranged at the detection module, wherein the switching module 6 is a six-degree-of-freedom robot, and the visual acquisition module 2, the end face detection module 3, and the electrical performance detection module 4 are arranged within the grasping range of the six-degree-of-freedom robot. By setting up the six-degree-of-freedom robot, the visual acquisition module 2, the end face detection module 3, and the electrical performance detection module 4 can be quickly and accurately switched according to the process instructions, and at the same time, the position and posture of the end effector can be accurately adjusted to ensure the detection accuracy.

[0053] Among them, the visual acquisition module 2 can use an industrial camera to obtain a high-precision image of the silicon rod, the first detector used by the end face detection module 3 is a contact position sensor to ensure the detection accuracy of the end face slope, and the second detector used by the electrical performance detection module 4 is a minority carrier lifetime measuring instrument, and specifically a BCT-400 detector can be selected, which is suitable for the measurement of minority carrier lifetime of P-type or N-type single crystal or polycrystalline silicon blocks, without the need for surface passivation treatment, and can accurately measure the minority carrier lifetime of the silicon rod, and can sensitively reflect the defects and contaminants inside the silicon block. Further, the identification station and the detection station are both provided with a lifting mechanism 7. When the silicon rod to be detected is transported to the identification station or the detection station, the lifting mechanism 7 is started, and can clamp or support the silicon rod to rise to the acquisition range of the identification module 5, or raise the silicon rod to the focal length of the industrial camera, and prevent the conveying device from interfering with the detection equipment when the silicon rod is detected.

[0054] or, as Figure 7 As shown, the conveying mechanism includes a conveyor belt, a lifting mechanism 7 arranged on the conveyor belt, and a tray installed on the lifting mechanism 7, wherein the tray is used to place the silicon rod. When the silicon rod to be detected is conveyed to the identification station or the detection station, the lifting mechanism 7 is activated, and can clamp or support the silicon rod to be raised to the acquisition range of the identification module 5, or raise the silicon rod to the focal length of the industrial camera, and prevent the conveying device from interfering with the detection equipment when the silicon rod is detected.

[0055] Alternatively, the recognition module, the visual acquisition module 2, the end face detection module 3, and the electrical performance detection module 4 are all integratedly installed on the six-degree-of-freedom robot, the recognition station and the detection station are located at the same position of the conveying module 1, and the six-degree-of-freedom robot is correspondingly arranged on the detection station.

[0056] Reference Figure 8 The present application also provides a detection method applicable to the above-mentioned silicon rod electrical performance detection device, which specifically comprises the following steps: Step A: When the recognition station and the inspection station are at the same position, the conveying module 1 conveys the silicon rod to be inspected to the station, and after the recognition module 5 identifies the product specification information of the silicon rod to be inspected, the switching module 6 switches the recognition module 5 to the visual acquisition module 2, and the image of the silicon rod is obtained by the visual acquisition module 2. The control module analyzes the image information to determine the position of the end face of the silicon rod, and the control module matches the image information of the current silicon rod detection with the product specification information and records them in the database; Or, when the recognition station and the detection station are at the same position, the conveying module 1 conveys the silicon rod to be detected to the station, the visual acquisition module 2 obtains the image of the silicon rod, and the control module analyzes the image information to determine the position of the end face of the silicon rod. Then, the switching module 6 switches the visual acquisition module 2 to the recognition module 5, and the recognition module 5 recognizes the product specification information of the silicon rod to be detected. The control module matches the image information of the current silicon rod detection with the product specification information and records them in the database; When the recognition station and the detection station are set at different positions of the conveying module 1 along the conveying direction, the conveying module 1 conveys the silicon rod to be detected to the recognition station or the detection station, and the silicon rod is respectively identified by the recognition module 5 and the visual acquisition module 2 to obtain the product specification information of the silicon rod to be detected and the image of the silicon rod is obtained to determine the position of the end face of the silicon rod. The control module matches the analysis data of the image information of the current silicon rod detection with the product specification information and records them in the database.

[0057] Step B: the switching module 6 switches the visual acquisition module 2 to the end face detection module 3. The end face detection module 3 determines three or more detection point positions on the silicon rod end face according to the position information of the silicon rod end face, wherein one detection point position is the center point of the silicon rod end face, and the other detection point positions are arranged circumferentially around the center line, and the silicon rod end face is subjected to multi-point detection. The control module analyzes the point position data to obtain the slope information of the silicon rod end face; When there are three detection points, one of the detection points is the center point, which is the center of the end face of the silicon rod, and the other two detection points are located on the same straight line as the center point and at the midpoint of the radius; When the number of detection points is more than three, one of the detection points is the center point, which is the center of the silicon rod end face, and the remaining detection points are arranged circumferentially around the center point and are located 5-10 mm away from the edge of the silicon rod end face; The control module records the end face slope information of the current silicon rod detection and the product specification information in a database.

[0058] Step C: The switching module 6 switches the end face detection module 3 to the electrical performance detection module 4. The electrical performance detection module 4 adjusts the detection posture according to the inclination information of the silicon rod end face so that the detection end of the electrical performance detection module 4 can fit the silicon rod end face. The electrical performance detection module 4 obtains the lifetime information of the minority carriers of the silicon single crystal in the silicon rod to determine the resistivity of the single crystal silicon rod. The control module matches the electrical performance detection result data of the current silicon rod with the product specification information and records them in the database so that the technician can obtain them by scanning the code.

[0059] The silicon rod electrical performance detection device provided by the present application realizes the automatic detection of the electrical performance of the silicon rod through the coordinated work of the visual acquisition module 2, the end face detection module 3 and the electrical performance detection module 4, which greatly improves the detection efficiency. At the same time, the use of high-resolution cameras and image processing technology can accurately measure the diameter and center point position of the silicon rod end face; through multi-point detection, the state information of the silicon rod end face can be accurately obtained; by obtaining the lifetime information of the minority carriers of the silicon single crystal, the resistivity of the single crystal silicon rod can be accurately determined. The equipment and method provided by the present invention are suitable for the detection of silicon rods of different specifications and models, and have strong versatility and adaptability.

[0060] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0061] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A silicon rod electrical performance testing device, characterized in that: include: A visual acquisition module (2) is used to determine the diameter and center position of the end face of the silicon rod by acquiring an image of the silicon rod; An end face detection module (3) detects the positions of multiple points on the end face of the silicon rod according to the diameter and center point position information of the end face of the silicon rod, and obtains the state of the end face of the silicon rod from the position information of the multiple points; The electrical performance detection module (4) adjusts the detection posture according to the state of the silicon rod end surface to fit the silicon rod end surface and complete the detection.

2. A silicon rod electrical performance testing device according to claim 1, characterized in that: The end face detection module (3) comprises a first detector, the detection end of which can abut against a plurality of point positions on the end face of the silicon rod.

3. A silicon rod electrical performance testing device according to claim 2, characterized in that: The end face detection module (3) comprises at least three first detectors, one of the three first detectors is in contact with the center point of the silicon rod end face, and two of the three first detectors are arranged circumferentially around the center point.

4. The silicon rod electrical performance testing device according to claim 1, characterized in that: The electrical property detection module (4) comprises a second detector, and the detection posture of the second detector is adjusted according to the state of the silicon rod end surface, and the position to be detected of the silicon rod end surface is determined according to the diameter of the silicon rod and the position of the end surface center point, and the second detector contacts the position to be detected and completes the detection.

5. The silicon rod electrical performance testing device according to claim 4, characterized in that: A plurality of positions to be detected are arranged on the end surface of the silicon rod, and the plurality of positions to be detected are circumferentially distributed around a central point.

6. The silicon rod electrical performance testing device according to claim 1, characterized in that: It also comprises a switching module (6), wherein the switching module (6) sequentially switches the use status of the silicon rod by the visual acquisition module (2), the end face detection module (3), and the electrical property detection module (4) according to the process flow.

7. The silicon rod electrical performance testing device according to claim 1, characterized in that: It also includes an identification module (5), which is used to obtain product model information of the silicon rod to be detected, and the identification module (5) is arranged upstream of the visual acquisition module (2); and / or, The recognition module (5) is arranged between the visual acquisition module (2) and the end face detection module (3).

8. A method for detecting electrical properties of a silicon rod, characterized in that: The application subject is the silicon rod electrical performance testing device according to any one of claims 1 to 7, comprising the following steps: Step A: The image of the silicon rod is acquired by the visual acquisition module (2), and the control module analyzes the image information to determine the position of the end face of the silicon rod; Step B: the end face detection module (3) performs multi-point detection on the silicon rod end face according to the position information of the silicon rod end face, and the control module analyzes the point position data to obtain the slope information of the silicon rod end face; Step C: the electrical performance detection module (4) adjusts the detection posture according to the inclination information of the silicon rod end face so that the detection end of the electrical performance detection module (4) can be in contact with the silicon rod end face. The electrical performance detection module (4) obtains the lifetime information of the minority carriers of the silicon single crystal in the silicon rod to determine the resistivity of the single crystal silicon rod.

9. A method for detecting electrical properties of silicon rods according to claim 8, characterized in that: Step B: The end face detection module (3) determines at least three detection point positions on the silicon rod end face according to the position information of the silicon rod end face, wherein one detection point position is the center point of the silicon rod end face, and the other detection point positions are arranged circumferentially around the center line. The control module analyzes the detection point position data to obtain the slope information of the silicon rod end face.

10. A method for detecting electrical properties of silicon rods according to claim 8, characterized in that: Step A: the recognition module (5) recognizes the product specification information of the silicon rod to be inspected, obtains the image of the silicon rod through the visual acquisition module (2), and the control module analyzes the image information to determine the position of the end face of the silicon rod; and / or, Step A: The image of the silicon rod is acquired through the visual acquisition module (2), and after the control module analyzes the image information to determine the position of the end face of the silicon rod, the recognition module (5) recognizes the product specification information of the silicon rod to be detected.

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