Current output circuit and method for an automated test equipment

Abstract

The application is suitable for the technical field of semiconductor testing, and provides a current output circuit and method of an automatic test equipment, which comprises a controller, a power supply integrated chip and a peripheral circuit; the power supply integrated chip is connected with the peripheral circuit and is used for outputting current; the peripheral circuit is electrically connected with a component under test and is used for loading the output current to the component under test when being turned on; the controller is in communication connection with the peripheral circuit and is used for controlling a sampling chip branch to load the output current of the power supply integrated chip to the component under test when a target current value is greater than a preset current value, the target current value representing a current value input by the automatic test equipment to the component under test during testing; and the controller is further used for controlling a sampling resistor branch to load the output current of the power supply integrated chip to the component under test when the target current value is less than or equal to the preset current. Through the application, the problem that the current output by the automatic test equipment in the prior art cannot meet the high-precision requirement of semiconductor testing can be solved.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of semiconductor testing, and particularly relates to a current output circuit and method of an automatic test equipment. BACKGROUND

[0002] In the process of semiconductor testing, there is a case that the ATE (Automatic Test Equipment) needs to continuously output a relatively large current (a few hundred milliamperes to a few amperes). In order to ensure that the actual output current of the ATE is the target current value required in the process of semiconductor testing when the ATE tests the semiconductor, the commonly used control method of the output current of the ATE is a hardware circuit negative feedback method, which indirectly realizes the output current value by adjusting the voltage across the sampling resistor to a certain specific value, so that the actual output current of the ATE is the target current value required in the process of semiconductor testing.

[0003] However, the resistance value of the sampling resistor is not constant, and even if the sampling resistor is calibrated before the ATE is used, the actual resistance value of the sampling resistor may still change slightly in the case that the ATE continuously outputs a large current for a long time. The actual large current output by the ATE also unidirectionally and continuously drifts with the change of the actual resistance value of the sampling resistor, so that the actual output current of the ATE is not the target current value required in the process of semiconductor testing, and the high-precision requirement in the process of semiconductor testing cannot be met. SUMMARY

[0004] The current output circuit and method of the automatic test equipment provided by the embodiments of the present application can solve the problem that the actual large current output by the ATE unidirectionally and continuously drifts due to the change of the actual resistance value of the sampling resistor when the automatic test equipment continuously outputs a large current for a long time in the process of testing the semiconductor, and the high-precision requirement in the process of semiconductor testing cannot be met.

[0005] In a first aspect, the embodiments of the present application provide a current output circuit of an automatic test equipment, comprising: a controller, a power supply integrated chip and a peripheral circuit; wherein:

[0006] The power supply integrated chip is connected with the peripheral circuit and is configured to output a current.

[0007] The peripheral circuit is electrically connected with a measured component and comprises a sampling resistor branch and a sampling chip branch, and is configured to load the output current of the power supply integrated chip to the measured component when turned on.

[0008] The controller is in communication connection with the peripheral circuit, and is configured to control the sampling chip branch to be turned on and the sampling resistor branch to be turned off when the target current value is greater than the preset current value, wherein the output current of the power supply integrated chip is loaded to the measured component when the sampling chip branch is turned on, and the target current value represents the current value input to the measured component during testing of the automated test equipment;

[0009] The controller is further configured to control the sampling resistor branch to be turned on and the sampling chip branch to be turned off when the target current value is less than or equal to the preset current, wherein the output current of the power supply integrated chip is loaded to the measured component when the sampling resistor branch is turned on.

[0010] In a possible implementation manner of the first aspect, the peripheral circuit further includes a first control switch, and the first control switch is in communication connection with the controller; an input end of the first control switch is connected with a channel output end of the power supply integrated chip;

[0011] The sampling resistor branch includes a sampling resistor, and a first output end of the sampling resistor is connected with an input end of the measured component; the sampling chip branch includes a sampling chip, and a first output end of the sampling chip is connected with the input end of the measured component;

[0012] The controller is further configured to control the output end of the first control switch to be electrically connected with the first input end of the sampling resistor when the target current value is less than or equal to the preset current value, so as to make the sampling resistor branch to be turned on; and control the output end of the first control switch to be electrically connected with the first input end of the sampling chip when the target current value is greater than the preset current value, so as to make the sampling chip branch to be turned on.

[0013] In a possible implementation manner of the first aspect, the controller is in communication connection with the power supply integrated chip, and is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, a pre-stored circuit parameter and a calibration parameter, and configure a theoretical output current of the power supply integrated chip as the target calibration current value corresponding to the target current value;

[0014] The power supply integrated chip is further configured to perform current output according to the configured theoretical output current, so that the input current of the measured component is the target current value when the peripheral circuit inputs current to the measured component; wherein the circuit parameter is determined according to the self parameter of the power supply integrated chip and the self parameter of the peripheral circuit; and the calibration parameter is obtained after multiple fittings of the theoretical output current of the power supply integrated chip and the input current of the measured component.

[0015] In a possible implementation manner of the first aspect, the circuit parameters include a power supply chip parameter of the power supply integrated chip, a sampling resistor parameter of the sampling resistor branch, and a sampling chip parameter of the sampling chip branch.

[0016] The calibration parameters include a resistor calibration parameter of the sampling resistor branch and a chip calibration parameter of the sampling chip branch.

[0017] The controller is further configured to, when the sampling resistor branch is turned on, calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameter, the sampling resistor parameter, and the resistor calibration parameter.

[0018] The controller is further configured to, when the sampling chip branch is turned on, calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameter, the sampling chip parameter, and the chip calibration parameter.

[0019] In a possible implementation manner of the first aspect, the current output circuit further includes a tester connected in parallel with the measured component, configured to measure an input current of the measured component; and the tester is further connected in communication with the controller, configured to send the measured input current of the measured component to the controller.

[0020] The controller is further configured to, when the sampling chip branch is turned on, calculate a chip calibration parameter of the sampling chip branch according to a theoretical output current of the power supply integrated chip and an input current of the measured component corresponding to the theoretical output current.

[0021] The controller is further configured to, when the sampling resistor branch is turned on, calculate a resistor calibration parameter of the sampling resistor branch according to a theoretical output current of the power supply integrated chip and an input current of the measured component corresponding to the theoretical output current.

[0022] In a possible implementation manner of the first aspect, the current output circuit further includes a collection chip, an input end of the collection chip being electrically connected with a current detection output end of the power supply integrated chip.

[0023] A high side of the current detection input end of the power supply integrated chip is electrically connected with an input end of the peripheral circuit.

[0024] A low side of the current detection input end of the power supply integrated chip is electrically connected with an output end of the peripheral circuit.

[0025] The controller is further connected with the collection chip, and is configured to send a current collection instruction to the collection chip to instruct the collection chip to collect the actual current output by the power supply integrated chip.

[0026] The collection chip is configured to receive the current collection instruction sent by the controller, and collect the actual output current of the power supply integrated chip in response to the current collection instruction, and send the actual output current of the power supply integrated chip to the controller.

[0027] In a possible implementation of the first aspect, the peripheral circuit further includes a second control switch and a third control switch; wherein:

[0028] The second control switch and the third control switch are respectively connected with the controller;

[0029] An output end of the second control switch is connected with a high-side current detection input end of the power supply integrated chip;

[0030] An output end of the third control switch is connected with a low-side current detection input end of the power supply integrated chip;

[0031] When the target current value is less than or equal to the preset current value, the controller is further configured to control the input end of the second control switch and the input end of the third control switch to be respectively connected with the second input end and the second output end of the sampling resistor, so that the voltage input by the current detection input end of the power supply integrated chip is the voltage across the sampling resistor.

[0032] When the target current value is less than or equal to the preset current value, the controller is further configured to control the input end of the second control switch to be connected with the second input end of the sampling chip, and control the input end of the third control switch to be grounded, so that the voltage input by the current detection input end of the power supply integrated chip is the output voltage of the sampling chip, wherein the output voltage of the sampling chip is related to the current flowing through the sampling chip.

[0033] In a possible implementation of the first aspect, the current output circuit further includes an adjustment circuit, an input end of the adjustment circuit being connected with the second input end of the sampling chip, and the adjustment circuit being configured to perform adjustment processing on the output voltage of the sampling chip.

[0034] When the target current value is greater than the preset current value, the controller is further configured to control the input end of the second control switch to be connected with an output end of the adjustment circuit, so that the voltage input by the current detection input end of the power supply integrated chip is an adjusted voltage; wherein the adjusted voltage represents the voltage after the adjustment processing on the output voltage of the sampling chip.

[0035] In a possible implementation manner of the first aspect, the adjustment circuit includes two operational amplifiers, at least one resistor, and at least one capacitor.

[0036] In a second aspect, an embodiment of the present application provides a current output method of an automated test equipment, including:

[0037] obtaining a target current value, wherein the target current value represents a current value input by the automated test equipment to a component under test during testing;

[0038] determining a conducting branch in a peripheral circuit according to a size of the target current value, so that the peripheral circuit loads a current output by a power supply integrated chip to the component under test, wherein the peripheral circuit includes a sampling resistor branch and a sampling chip branch;

[0039] when the target current value is greater than a preset current value, controlling the sampling chip branch to be conducted and the sampling resistor branch to be disconnected;

[0040] when the target current value is less than or equal to the preset current value, controlling the sampling resistor branch to be conducted and the sampling chip branch to be disconnected.

[0041] In a third aspect, an embodiment of the present application provides an automated test equipment, including a memory, a processor, and a computer program stored in the memory and executable on the processor, and the processor implements the method in any of the above aspects when executing the computer program.

[0042] In a fourth aspect, an embodiment of the present application provides a computer readable storage medium, and the computer readable storage medium stores a computer program, and the computer program is executable on a processor to implement the method in any of the above aspects.

[0043] In a fifth aspect, an embodiment of the present application provides a computer program product, and when the computer program product is executed on a terminal device, the terminal device executes the method in any of the above aspects.

[0044] Compared with the prior art, the application has the beneficial effects that: the current output circuit of the automatic test equipment comprises a controller, a power supply integrated chip and a peripheral circuit; the power supply integrated chip is connected with the peripheral circuit and is used for outputting current; the peripheral circuit is electrically connected with the measured component and comprises a sampling resistor branch and a sampling chip branch, and is used for loading the output current of the power supply integrated chip to the measured component when turned on; the controller is in communication connection with the peripheral circuit, and is used for controlling the sampling chip branch to be turned on and the sampling resistor branch to be turned off when the target current value is greater than the preset current value, wherein the target current value represents the current value input by the automatic test equipment to the measured component during testing, and the output current of the power supply integrated chip is loaded to the measured component when the sampling chip branch is turned on, so that when a large current is output, the phenomenon of one-way drift of the current caused by the change of the resistor can be effectively avoided, thereby meeting the high-precision requirement of the semiconductor; the controller is further used for controlling the sampling resistor branch to be turned on and the sampling chip branch to be turned off when the target current value is less than or equal to the preset current, wherein the output current of the power supply integrated chip is loaded to the measured component when the sampling resistor branch is turned on, so that when a small current is output, the phenomenon of poor accuracy of the small current output caused by the sampling chip can be avoided, thereby solving the problem that in the prior art, the actual resistance value of the sampling resistor changes with temperature when the sampling resistor continuously outputs a large current for a long time during the testing of the semiconductor by the automatic test equipment, the large current actually output by the ATE equipment appears one-way continuous drift, and the high-precision requirement during the testing of the semiconductor cannot be met. BRIEF DESCRIPTION OF DRAWINGS

[0045] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0046] Figure 1 is a structural schematic diagram of a current output circuit of an automatic test equipment provided by the prior art;

[0047] Figure 2 is a structural schematic diagram of another current output circuit of an automatic test equipment provided by the prior art;

[0048] Figure 3 is a flowchart of a current output method of an automatic test equipment provided by the prior art;

[0049] Figure 4 is a structural schematic diagram of a current output circuit of an automatic test equipment provided by an embodiment of the present application;

[0050] Figure 5 is a structural schematic diagram of another current output circuit of an automatic test equipment provided by another embodiment of the present application;

[0051] Figure 6 is a structural schematic diagram of another current output circuit of an automatic test equipment provided by another embodiment of the present application;

[0052] Figure 7 is a structural schematic diagram of an adjustment circuit provided by an embodiment of the present application;

[0053] Figure 8 is a flowchart of a current output method of an automatic test equipment provided by another embodiment of the present application;

[0054] Figure 9 is a flowchart of a calculation method of a calibration parameter of a current output circuit provided by an embodiment of the present application. DETAILED DESCRIPTION

[0055] In the following description, for purposes of explanation and not limitation, specific details are set forth, such as particular sequences of steps, techniques, etc., in order to provide a thorough understanding of the embodiments of the present application. However, it will be apparent to those skilled in the art that the present application can be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known methods, devices, circuits, and

[0056] It should be understood that the term "comprises" when used in this specification and the appended claims indicates the presence of the described features, integers, steps, operations, elements, and / or components, but does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0057] It should also be understood that the term "and / or" when used in this specification and the appended claims, such as in the phrases "A and / or B" and "A and / or B and / or C", means any combination of one or more of the associated listed items, and includes one or more of the associated listed items alone, two or more of the associated listed items, and / or all of the associated listed items.

[0058] As used in this specification and the appended claims, the term "if' can be construed to mean "when" or "upon" or "in response to determining" or "in response to detecting", depending on the context. Similarly, the phrase "if it is determined" or "if [a described condition or event] is detected" can be construed to mean "upon determining" or "in response to determining" or "upon detecting [the described condition or event]" or "in response to detecting [the described condition or event]", depending on the context.

[0059] In addition, in the description of the present application and the appended claims, the terms "first", "second", "third", etc. are used only to distinguish descriptions and cannot be understood as indicating or implying relative importance.

[0060] In the present application, the reference to "one embodiment" or "some embodiments" means that the particular feature, structure or characteristic described in connection with the embodiment is included in one or more embodiments of the present application. Thus, the occurrence of the phrase "in one embodiment", "in some embodiments", "in other embodiments", "in additional embodiments" and the like in various places throughout the specification is not necessarily all referring to the same embodiment, unless otherwise specifically noted. The terms "comprising", "including", "having" and their variants mean "including but not limited to", unless otherwise specifically noted.

[0061] In the prior art, see Figure 1 , Figure 1 is a schematic diagram of a current output circuit of an automatic test equipment provided by the prior art. In the process of semiconductor testing, there are cases where the ATE needs to continuously output relatively large current (a few hundred milliamperes to a few amperes). Currently, the commonly used method for controlling the output current of the ATE is that the controller communicates with the PMU / DPS chip (channel module in the figure) through a communication bus (SPI or IIC, etc.), and the output current of the ATE is fed back through a sampling resistor (Rsamp in the figure) to the PMU / DPS chip (Precision Measurement Unit / Device Power Supplies), the theoretical output current of the PMU / DPS chip is adjusted through the feedback of the output current, the configuration is performed, and the current output by the PMU / DPS chip is loaded to the semiconductor (for example Figure 1 DUT, Device Under Test, measured component) through the sampling resistor, and the semiconductor is tested.

[0062] At the same time, the controller also measures the current or voltage flowing through the sampling resistor through the ADC (Analog-to-digital converter) chip, and the calculation method is: the voltage sampled by the ADC chip is divided by the theoretical resistance value of the sampling resistor to obtain the current flowing through the sampling resistor.

[0063] Although the actual resistance value of the sampling resistor is calibrated before the output current of the ATE using the sampling resistor feedback is used, the deviation between the actual resistance value and the theoretical resistance value of the sampling resistor is corrected to reduce the error of the actual output current of the ATE using the sampling resistor feedback, the sampling resistor has a temperature coefficient, and the actual resistance value of the sampling resistor is not constant. In the case that the ATE continuously outputs a large current for a long time, the increase of the power consumption of the sampling resistor causes the sampling resistor to continuously heat up, resulting in a change in the actual resistance value of the sampling resistor. The ATE still relies on the theoretical resistance value of the sampling resistor after the initial calibration when outputting and measuring the current, and when continuously outputting and measuring a large current for a long time, the actual resistance value of the sampling resistor changes slightly, the output current of the ATE also unidirectionally and continuously drifts with the change of the actual resistance value, and finally the output current accuracy is deteriorated, and the actual output current of the ATE obtained through the sampling resistor feedback is also inaccurate. At the same time, the current flowing through the sampling resistor measured through the ADC (Analog-to-digital converter, analog-to-digital converter) chip is also inaccurate.

[0064] In order to overcome the error of the actual output current of the ATE caused by the temperature change of the sampling resistor, the first method currently used is to set a heat sink on the sampling resistor. When a large current pulse is output, the heat sink has enough time to dissipate heat and control the resistance temperature of the sampling resistor within a certain range, but when a current is output for a long time, it is difficult for the heat sink to control the resistance temperature of the sampling resistor within a certain range due to the continuous heating of the sampling resistor.

[0065] The second method is to use an ultra-low temperature drift resistor as the sampling resistor, but the ultra-low temperature drift resistor is special and not commonly used on the market, and is generally a plug-in type with large volume and high cost, which makes it impossible to be integrated on the ATE board card on a large scale.

[0066] The third method is to use a temperature compensation method. As shown in Figure 2 , a temperature sensor is provided near the sampling resistor, and the controller communicates with the temperature sensor through a communication bus to monitor the temperature of the sampling resistor Rsamp in real time, so as to dynamically compensate the output current value. Figure 2 As shown in

[0067] , a temperature sensor is provided near the sampling resistor, and the controller communicates with the temperature sensor through a communication bus to monitor the temperature of the sampling resistor Rsamp in real time, so as to dynamically compensate the output current value. Figure 2 By setting the temperature sensor, the control process of the output current is realized, as shown in

[0068] Figure 3 Figure 3 ​​is a flowchart of a current output method of an automatic test equipment provided by the prior art, after a user issues a current output control instruction, a controller obtains a current value to be output by analyzing circuit parameters, then obtains the temperature of a sampling resistor at the current time, calculates a target value of the current according to the temperature of the sampling resistor, and configures a chip to output the current according to the target value of the current. After the configuration is completed, it is necessary to monitor whether the user issues a current output stop command in real time to end the current output. If it is monitored that the user issues the current output stop command, the current output is ended. If it is not monitored that the user issues the current output stop command, the temperature of the sampling resistor is continuously obtained, and it is judged whether the obtained temperature of the sampling resistor reaches an adjustment node. If the adjustment node is not reached, the temperature of the sampling resistor is continuously obtained. If the adjustment node is reached, the target value of the current is continuously recalculated according to the current temperature of the sampling resistor, and the output current is configured, and the above process is repeatedly continued until the user ends the current output.

[0069] However, since the monitored temperature of the sampling resistor already has an error, and the distance between the sampling resistor and the temperature sensor needs to be close enough, and the number of the temperature sensors needs to be enough, the third method of calculating the target value of the current according to the monitored temperature of the sampling resistor is not accurate.

[0070] The embodiment of the present application provides a current output circuit of an automatic test equipment, referring to Figure 4 , Figure 4 is a structural schematic diagram of a current output circuit of an automatic test equipment provided by an embodiment of the present application, the current output circuit comprises a controller, a power supply integrated chip and a peripheral circuit; wherein:

[0071] The power supply integrated chip is connected with the peripheral circuit, and is used for outputting a current;

[0072] The peripheral circuit is electrically connected with a measured component, comprises a sampling resistor branch and a sampling chip branch, and is used for loading the output current of the power supply integrated chip to the measured component when being turned on;

[0073] The controller is in communication connection with the peripheral circuit, and is used for controlling the sampling chip branch to be turned on and the sampling resistor branch to be turned off when a target current value is greater than a preset current value, wherein the sampling chip branch loads the output current of the power supply integrated chip to the measured component when being turned on, and the target current value represents a current value input by the automatic test equipment to the measured component during testing;

[0074] The controller is further used for controlling the sampling resistor branch to be turned on and the sampling chip branch to be turned off when the target current value is less than or equal to the preset current, wherein the sampling resistor branch loads the output current of the power supply integrated chip to the measured component when being turned on.

[0075] It should be noted that the current output circuit in the embodiment can be applied to a board of an automatic test equipment, and can also be applied to the automatic test equipment.

[0076] Specifically, when a semiconductor or the like is tested, the automatic test equipment needs to provide a test current to the semiconductor or the like. The current output circuit of the automatic test equipment includes a controller, a power supply integrated chip, and a peripheral circuit, wherein the power supply integrated chip and the peripheral circuit are a channel system, and are used to input a current to a device under test.

[0077] The power supply integrated chip (DPS\PMU chip) is connected with the peripheral circuit, and is used to output a current. The output current is transmitted to the device under test through the peripheral circuit, and provides a current required by the device under test during testing. The device under test is a DUT in the figure, and can be a semiconductor.

[0078] The power supply integrated chip is also in communication connection with the controller. The communication connection mode can be a communication bus (SPI / IIC, Serial Peripheral Interface / Inter-Integrated Circuit, serial peripheral interface / inter-integrated circuit). The controller sends a current output control instruction to the power supply integrated chip through the communication bus, and controls the power supply integrated chip to output a current.

[0079] The peripheral circuit is electrically connected with a channel output end of the power supply integrated chip, and is also electrically connected with the device under test. When the peripheral circuit itself is turned on, the output current of the power supply integrated chip is loaded to the device under test, so that the device under test directly inputs a current to the device under test during testing.

[0080] The peripheral circuit includes a sampling resistor branch and a sampling chip branch. When any one of the sampling resistor branch and the sampling chip branch is turned on, the peripheral circuit is turned on. The sampling resistor branch includes a sampling resistor Rsamp, and the sampling chip branch includes a sampling chip. The sampling chip is a current sampling chip.

[0081] The controller is a control system of the entire automatic test equipment, and is in communication connection with the peripheral circuit, and can control a turn-on branch of the peripheral circuit. When the device under test needs to be tested, the controller controls the turn-on branch of the peripheral circuit, and the automatic test equipment inputs a current to the device under test during testing.

[0082] Since the sampling resistor branch composed of a sampling resistor is prone to unidirectional current drift when the automatic test equipment outputs a large current for a long time, whether to use the sampling resistor branch can be determined according to the size of a target current value, so that the error of current output can be effectively reduced.

[0083] When the target current value is greater than the preset current value, the sampling resistor is not used to input current to the measured component, at this time, the controller controls the sampling chip branch in the peripheral circuit to be turned on and the sampling resistor branch to be turned off through the communication bus. As shown in Figure 5 Figure 5 is a structural diagram of a current output circuit of another automated test equipment provided by another embodiment of the present application, switch A is closed downward, the sampling chip branch is turned on, and the sampling chip branch loads the output current of the power supply integrated chip to the measured component. When the current is large, the hardware circuit can be switched in advance, the sampling chip branch is used to output feedback and measure the current, and the output current is loaded to the measured component, so as to avoid using the sampling resistor when the current is large, which causes the resistance to heat and the resistance value to drift. The target current value represents the current value input by the automated test equipment to the measured component during testing, and is a fixed value when the target current value is the current value required by the measured component during testing.

[0084] When the target current value is less than or equal to the preset current, the sampling resistor is used to input current to the measured component, at this time, the controller controls the sampling resistor branch in the peripheral circuit to be turned on and the sampling chip branch to be turned off through the communication bus, as shown in Figure 4 , switch A is closed upward, the sampling resistor branch is turned on, and the sampling resistor branch loads the output current of the power supply integrated chip to the measured component. When the small current is loaded through the sampling resistor, the sampling resistor branch can be switched in advance to output feedback and measure the current, and the output current is loaded to the measured component, so as to avoid the problem of poor small current output and measurement accuracy caused by only using the sampling chip to output current.

[0085] It should be noted that the preset current value can be set according to specific scenarios, and the present embodiment does not make specific limitation thereto.

[0086] ​It can be understood that the technical scheme provided by the embodiment can output current through the current output circuit of the automatic test equipment, including a controller, a power supply integrated chip and a peripheral circuit; the power supply integrated chip is connected with the peripheral circuit and is used for outputting current; the peripheral circuit is electrically connected with the measured component and includes a sampling resistor branch and a sampling chip branch, and is used for loading the output current of the power supply integrated chip to the measured component when conducting; the controller is in communication connection with the peripheral circuit, and is used for controlling the sampling chip branch to conduct and the sampling resistor branch to disconnect when the target current value is greater than the preset current value, wherein the target current value represents the current value input by the automatic test equipment to the measured component during testing, and the output current of the power supply integrated chip is loaded to the measured component when the sampling chip branch conducts, so that when a large current is output, the phenomenon of one-way drift of the current caused by the change of the resistor can be effectively avoided, thereby meeting the high-precision requirement of the semiconductor; the controller is further used for controlling the sampling resistor branch to conduct and the sampling chip branch to disconnect when the target current value is less than or equal to the preset current, wherein the output current of the power supply integrated chip is loaded to the measured component when the sampling resistor branch conducts, so as to avoid the phenomenon of poor accuracy of the small current output caused by the sampling chip when a small current is output, thereby solving the problem that in the prior art, the actual resistance value of the sampling resistor changes with temperature when the sampling resistor continuously outputs a large current for a long time during the testing of the semiconductor by the automatic test equipment, the actual output large current of the ATE device appears one-way continuous drift, and the high-precision requirement during the testing of the semiconductor cannot be met.

[0087] In a possible implementation, the peripheral circuit further includes a first control switch, and the first control switch is in communication connection with the controller; an input end of the first control switch is connected with a channel output end of the power supply integrated chip;

[0088] The sampling resistor branch includes a sampling resistor, and a first output end of the sampling resistor is connected with an input end of the measured component; the sampling chip branch includes a sampling chip, and a first output end of the sampling chip is connected with the input end of the measured component;

[0089] The controller is further used for controlling the first control switch to be electrically connected with the first input end of the sampling resistor to make the sampling resistor branch conduct when the target current value is less than or equal to the preset current value, and controlling the first control switch to be electrically connected with the first input end of the sampling chip to make the sampling chip branch conduct when the target current value is greater than the preset current value.

[0090] Specifically, as shown in Figure 4 and Figure 5 , the peripheral circuit further includes a first control switch, an input end of the first control switch is connected with a channel output end of the power supply integrated chip, and the power supply integrated chip inputs current to the input end of the first control switch through the channel output end. The first control switch isFigure 4 and Figure 5 switch A in

[0091] The first control switch (switch A) is in communication connection with the controller, and the controller can control the closing direction of the first switch through the communication connection. When the target current value is less than or equal to the preset current value, as shown in Figure 4 , the controller controls the first control switch to close upward, at this time, the output end of the first control switch is electrically connected with the first input end of the sampling resistance. The first output end of the sampling resistance is connected with the input end of the measured component, the sampling resistance branch is turned on, and the sampling chip branch is turned off. The current output by the power supply integrated chip is loaded to the measured component through the sampling resistance.

[0092] The sampling resistance branch in the peripheral circuit includes a sampling resistance. When the target current value is greater than the preset current value, as shown in Figure 5 , the controller controls the first control switch to close downward, at this time, the output end of the first control switch is electrically connected with the first input end of the sampling chip. The first output end of the sampling chip is connected with the input end of the measured component, the sampling chip branch is turned on, and the sampling resistance branch is turned off. The current output by the power supply integrated chip is loaded to the measured component through the sampling chip.

[0093] In a possible implementation, the controller is in communication connection with the power supply integrated chip, and is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, pre-stored circuit parameters and calibration parameters, and configure the theoretical output current of the power supply integrated chip as the target calibration current value corresponding to the target current value.

[0094] The power supply integrated chip is further configured to perform current output according to the configured theoretical output current, so that the input current of the measured component is the target current value when the current is input to the measured component through the peripheral circuit; wherein the circuit parameters are determined according to the self parameters of the power supply integrated chip and the self parameters of the peripheral circuit; and the calibration parameters are obtained by fitting the theoretical output current of the power supply integrated chip and the input current of the measured component multiple times.

[0095] Specifically, the circuit parameters are determined according to the self parameters of the power supply integrated chip and the self parameters of the peripheral circuit, and the calibration parameters are obtained by fitting the theoretical output current of the power supply integrated chip and the input current of the measured component multiple times.

[0096] The controller is in communication connection with the power supply integrated chip. The controller calculates a target calibration current value corresponding to the target current value according to the target current value, pre-stored circuit parameters and calibration parameters, and configures the theoretical output current of the power supply integrated chip as the target calibration current value corresponding to the target current value.

[0097] The controller can also send a current output control instruction to the power supply integrated chip, and the current output control instruction carries a target calibration current value corresponding to the target current value, so that the theoretical output current value of the power supply integrated chip is configured as the target calibration current value, and the current output is performed according to the theoretical output current value.

[0098] The power supply integrated chip can output current according to the theoretical output current configured by the controller, so that when the external circuit inputs current to the measured component, the input current of the measured component is the target current value.

[0099] The power supply integrated chip can also receive the current output control instruction sent by the controller, and in response to the current output control instruction, configure the theoretical output current value according to the target calibration current value corresponding to the target current value carried in the current output control instruction, and output current according to the target calibration current value corresponding to the target current value.

[0100] In a possible implementation, the circuit parameters include power supply chip parameters of the power supply integrated chip, sampling resistance parameters of the sampling resistance branch, and sampling chip parameters of the sampling chip branch.

[0101] The calibration parameters include resistance calibration parameters of the sampling resistance branch and chip calibration parameters of the sampling chip branch.

[0102] The controller is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameters, the sampling resistance parameters, and the resistance calibration parameters when the sampling resistance branch is turned on.

[0103] The controller is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameters, the sampling chip parameters, and the chip calibration parameters when the sampling chip branch is turned on.

[0104] Specifically, the internal parameters of the power supply integrated chip and the internal parameters of the external circuit both affect the actual output current of the test equipment. When calculating the target calibration current value corresponding to the target current value according to the pre-stored circuit parameters and calibration parameters, the circuit parameters include the power supply chip parameters of the power supply integrated chip, the sampling resistance parameters of the sampling resistance branch, and the sampling chip parameters of the sampling chip branch.

[0105] The calibration parameters include resistance calibration parameters of the sampling resistance branch and chip calibration parameters of the sampling chip branch. The resistance calibration parameters of the sampling resistance branch are obtained by fitting the theoretical output current of the power supply integrated chip and the input current of the measured component multiple times when the sampling resistance branch is used to load current to the measured component.

[0106] The resistance calibration parameter of the sampling chip branch is obtained by fitting the theoretical output current of the power supply integrated chip and the input current of the measured component multiple times when the sampling chip branch is used to load current to the measured component.

[0107] When the current required by the measured component, i.e., the target current value, is I target , and the target current value is less than or equal to the preset current value, the sampling resistance branch is turned on, and the sampling resistance branch is used to load current to the measured component. At this time, according to the following formula, the controller calculates the target calibration current value corresponding to the target current value, i.e., the theoretical output current Code required to be configured to the power supply integrated chip, according to the target current value, the power supply chip parameter, the sampling resistance parameter and the resistance calibration parameter.

[0108] Code=(R samp ×I target ×IGain PMU 、 DPS )×Gain R cali +offset R cali ;

[0109] Wherein Code represents the theoretical output current of the DPS / PMU chip; R samp represents the sampling resistance parameter; I target represents the target current value; IGain PMU、DPS represents the power supply chip parameter; Gain R cali represents the resistance gain parameter in the resistance calibration parameter; offset R cali represents the resistance offset parameter in the resistance calibration parameter.

[0110] In an optional example, R samp represents the resistance value of the sampling resistance, and IGain PMU、DPS represents the internal current gain of the power supply chip, which is a fixed value.

[0111] The controller is also used to calculate the target calibration current corresponding to the target current according to the target current value, the power supply chip parameter, the sampling chip parameter and the chip calibration parameter when the sampling chip branch is turned on.

[0112] When the current required by the measured component, i.e., the target current value, is I target, and the target current value is greater than the preset current value, the sampling chip branch is turned on, and the sampling chip branch is used to load current to the measured component. At this time, according to the following formula, the target calibration current value corresponding to the target current value is calculated according to the target current value, the power supply chip parameter, the sampling chip parameter and the chip calibration parameter, that is, the theoretical output current Code required to be configured to the power supply integrated chip:

[0113] Code=(G samp ×I target ×IGain PMU、DPS )×Gain G cali +offset G cali ;

[0114] Wherein, Code represents the theoretical output current of the DPS / PMU chip; G samp represents the sampling chip parameter; I target represents the target current value; IGain PMU、DPS represents the power supply chip parameter; Gain G cali represents the chip gain parameter in the chip calibration parameter; offset G cali represents the chip offset parameter in the chip calibration parameter.

[0115] In a specific example, G samp represents the current conversion ratio (or sensitivity) of the sampling chip, which is related to the sampling chip itself. For example, every 1000mA of current passing through the sampling chip increases / decreases, the voltage output by the sampling chip increases / decreases 400mV, and the current conversion ratio (sensitivity) G samp = 400mV / A.

[0116] In a possible implementation, the current output circuit further comprises a tester connected in parallel with the measured component, for measuring the input current of the measured component; the tester is also in communication connection with the controller, for sending the measured input current of the measured component to the controller;

[0117] The controller is also used to calculate the chip calibration parameter of the sampling chip branch according to the theoretical output current of the power supply integrated chip and the input current of the measured component corresponding to the theoretical output current when the sampling chip branch is turned on;

[0118] The controller is also used to calculate the resistance calibration parameter of the sampling resistance branch according to the theoretical output current of the power supply integrated chip and the input current of the measured component corresponding to the theoretical output current when the sampling resistance branch is turned on.

[0119] Specifically, the current output circuit further comprises a tester, such as Figure 6 as shown in Figure 6 is a structural schematic diagram of another current output circuit of an automated test equipment provided by another embodiment of the present application. The tester is connected in parallel with the component under test, and is used to measure the input current of the component under test. The input end of the tester is connected with the output end of the channel system, and the channel system comprises the power supply integrated chip and the peripheral circuit. The input current of the component under test measured by the tester is regarded as the actual output current output by the channel system.

[0120] In an optional example, the tester can be a high-precision multimeter, which is used to directly measure the input current of the component under test.

[0121] Specifically, the tester is further in communication connection with the controller, and is used to send the measured input current of the component under test to the controller. When the sampling chip branch is turned on, the controller further calculates the chip calibration parameter of the sampling chip branch according to the theoretical output current of the power supply integrated chip and the input current of the component under test corresponding to the theoretical output current. Wherein, when the sampling chip branch is turned on, the theoretical output current of the power supply integrated chip is configured for the power supply integrated chip by the controller, so as to control the power supply integrated chip to input the input current corresponding to the theoretical output current to the component under test through the sampling chip.

[0122] When the sampling resistance branch is turned on, the controller further calculates the resistance calibration parameter of the sampling resistance branch according to the theoretical output current of the power supply integrated chip and the input current of the component under test corresponding to the theoretical output current. Wherein, when the sampling resistance branch is turned on, the theoretical output current of the power supply integrated chip is configured for the power supply integrated chip by the controller, so as to control the power supply integrated chip to input the input current corresponding to the theoretical output current to the component under test through the sampling resistance.

[0123] In an optional example, when the sampling chip branch is turned on, the chip calibration parameter of the sampling chip branch is calculated according to the theoretical output current of the power supply integrated chip and the input current of the component under test corresponding to the theoretical output current, as shown in Figure 9 as shown in Figure 9 is a flowchart of a method for calculating the calibration parameter of a current output circuit provided by an embodiment of the present application, and specifically comprises:

[0124] Start calculating the chip calibration parameter, turn on the sampling chip branch based on the high-precision multimeter, construct a calibration model, and load the calibration point by the host computer. The calibration point is used to fit the input current of the component under test and the theoretical output current. The calibration model can be a mapping function, that is, the mapping function between the theoretical output current and the input current of the component under test when the sampling chip branch is turned on. Since the chip calibration parameter comprises Gain Gcali Chip gain parameters and offset G cali The chip bias parameters require fitting at least two calibration points.

[0125] When selecting calibration points, take n points at equal intervals.

[0126] For any calibration point, the controller configures the theoretical output current of the power supply integrated chip to a specific output current value. The current passing through the component under test is measured using a high-precision multimeter, yielding the actual input current value of the component under test. Each point has a theoretical output current and an input current of the component under test; n points yield n sets of data (x... i y i ), where i = 1, 2, 3, ..., n represents the point position, x i Indicates with y i The input current of the component under test at the corresponding i-th point, y i This represents the theoretical output current at the i-th point. After a calibration point is loaded, the calibration model determines whether all channels and calibration points have been traversed. When the calibration model has traversed all points and loaded each point, multiple theoretical output currents and the corresponding input current of the component under test are obtained.

[0127] Based on the above n sets of data (x) at n points i y i By using univariate or multivariate linear fitting, a functional mapping relationship between the theoretical output current and the input current of the component under test is obtained. This functional mapping relationship includes Gain. G cali Chip gain parameters and offset G cali Chip bias parameters. These two parameters are stored in the controller to complete the calculation of the calibration parameters for the theoretical output current of the sampling chip branch.

[0128] When the sampling chip branch is turned on, following the same fitting method described above, the chip calibration parameters of the sampling chip branch are calculated based on the theoretical output current of the power supply integrated chips at multiple points and the input current of the component under test corresponding to the theoretical output current. This yields the Gain parameter in the resistance calibration parameters. R cali Resistance gain parameters and offset R cali The resistor bias parameters will not be elaborated here. These two parameters are stored in the controller to complete the calculation of the calibration parameters for the theoretical output current of the sampling resistor branch.

[0129] In a possible implementation, the current output circuit further comprises a collection chip, an input end of the collection chip being electrically connected with the current detection output end of the power supply integrated chip.

[0130] The current detection input end high side of the power supply integrated chip is electrically connected with the input end of the peripheral circuit.

[0131] The current detection input end low side of the power supply integrated chip is electrically connected with the output end of the peripheral circuit.

[0132] The controller is further in communication connection with the collection chip, and is configured to send a current collection instruction to the collection chip to instruct the collection chip to collect the actual current output by the power supply integrated chip.

[0133] The collection chip is configured to receive the current collection instruction sent by the controller, and in response to the current collection instruction, collect the actual output current of the power supply integrated chip, and send the actual output current of the power supply integrated chip to the controller.

[0134] Specifically, the current output circuit further comprises a collection chip. The controller is in communication connection with the collection chip, and the controller can send a current collection instruction to the collection chip to instruct the collection chip to collect the actual current output by the power supply integrated chip.

[0135] The current detection input end high side of the power supply integrated chip is electrically connected with the input end of the peripheral circuit, and the current detection input end low side of the power supply integrated chip is electrically connected with the output end of the peripheral circuit. An input end of the collection chip is electrically connected with the current detection output end of the power supply integrated chip.

[0136] The collection chip is a voltage collection chip. When receiving the current collection instruction sent by the controller, the collection chip can, in response to the current collection instruction, collect the voltage across the sampling resistor or the output voltage of the sampling chip by subtracting the voltage of the current detection input end low side from the voltage of the current detection input end high side. Since the voltage is related to the current, the actual output current of the power supply integrated chip is calculated and sent to the controller. The actual output current of the power supply integrated chip collected by the collection chip can be compared with the input current of the measured component measured by the tester, so as to obtain more accurate current output by the channel system.

[0137] In a possible implementation, the peripheral circuit further comprises a second control switch and a third control switch; wherein:

[0138] The second control switch and the third control switch are respectively in communication connection with the controller.

[0139] An output end of the second control switch is electrically connected with the current detection input end high side of the power supply integrated chip.

[0140] The output terminal of the third control switch is electrically connected to the low side of the current detection input terminal of the power supply integrated chip;

[0141] When the target current value is less than or equal to the preset current value, the controller is also used to control the input terminals of the second control switch and the third control switch to be electrically connected to the second input terminal and the second output terminal of the sampling resistor, respectively, so that the voltage input to the current detection input terminal of the power supply integrated chip is the voltage across the sampling resistor.

[0142] When the target current value is less than or equal to the preset current value, the controller is also used to control the input terminal of the second control switch to be electrically connected to the second input terminal of the sampling chip, and control the input terminal of the third control switch to be grounded, so that the voltage input to the current detection input terminal of the power supply integrated chip is the output voltage of the sampling chip, wherein the output voltage of the sampling chip is related to the current flowing through the sampling chip.

[0143] Specifically, the peripheral circuit also includes a second control switch ( Figure 4 and Figure 5 Switch B) and the third control switch ( Figure 4 and Figure 5 The second control switch and the third control switch are all communicatively connected to the controller. The controller can control the closing direction of the second control switch and the third control switch.

[0144] The output of the second control switch is electrically connected to the high side of the current detection input of the power supply integrated chip, and the output of the third control switch is electrically connected to the low side of the current detection input of the power supply integrated chip.

[0145] When the target current value is less than or equal to the preset current value, the sampling resistor branch needs to be turned on. At this time, the controller controls switches B and C to close upwards. The input terminals of the second and third control switches are electrically connected to the second input and second output terminals of the sampling resistor, respectively. This makes the voltage input to the current detection input terminal of the power supply integrated chip the voltage across the sampling resistor. The current input to the current detection input terminal of the power supply integrated chip is the current flowing through the sampling resistor. The current flowing through the sampling resistor can be indirectly calculated and fed back to the power supply integrated chip to obtain the current flowing through the sampling resistor.

[0146] When the target current value is greater than the preset current value, the sampling chip branch needs to be turned on, at this time, the controller controls the switch B and the switch C to be closed downward, the input end of the second control switch is electrically connected with the second input end of the sampling chip, and the input end of the third control switch is grounded, so that the voltage input by the current detection input end of the power supply integrated chip is the output voltage of the sampling chip. Since the output voltage of the sampling chip is related to the current flowing through the sampling chip, the current flowing through the sampling chip can be calculated according to the output voltage of the sampling chip, so that the power supply integrated chip can obtain the current flowing through the sampling chip through indirect feedback.

[0147] In a possible implementation, the current output circuit further includes an adjusting circuit, an input end of the adjusting circuit being electrically connected with the second input end of the sampling chip, and the adjusting circuit being configured to perform an adjusting process on the output voltage of the sampling chip.

[0148] When the target current value is greater than the preset current value, the controller is further configured to control the input end of the second control switch to be electrically connected with an output end of the adjusting circuit, so that the voltage input by the current detection input end of the power supply integrated chip is an adjusted voltage. The adjusted voltage represents the voltage after the adjusting process on the output voltage of the sampling chip.

[0149] Specifically, the current output circuit further includes an adjusting circuit, an input end of the adjusting circuit being electrically connected with the second input end of the sampling chip, and the adjusting circuit being configured to perform an adjusting process on the output voltage of the sampling chip.

[0150] When the target current value is greater than the preset current value, the sampling chip branch is turned on, and the controller is further configured to control the input end of the second control switch to be electrically connected with an output end of the adjusting circuit, so that the voltage input by the current detection input end of the power supply integrated chip is an adjusted voltage. The adjusted voltage represents the voltage after the adjusting process on the output voltage of the sampling chip. Since the adjusting process is performed on the output voltage of the sampling chip, the output voltage of the sampling chip is related to the current flowing through the sampling chip, and after the adjusting process, the current flowing through the sampling chip is adjusted accordingly, and the current input to the current detection input end of the power supply integrated chip is also adjusted, which is the current flowing through the sampling chip after the adjusting process on the output voltage of the sampling chip.

[0151] In a possible implementation, the adjusting circuit includes two operational amplifiers, at least one resistor and at least one capacitor.

[0152] Specifically, the adjusting circuit includes two operational amplifiers, at least one resistor and at least one capacitor. As shown in FIG. 4, Figure 7 Figure 7 ​is a structural schematic diagram of an adjusting circuit provided by an embodiment of the present application. The adjusting circuit comprises R1, R2, R3, R4 and R5, operational amplifier 1 and operational amplifier 2, and capacitor C1, a total of 5 resistors, 2 operational amplifiers and one capacitor.

[0153] The input voltage V in is in series with R1, and R2 and operational amplifier 1 are in parallel, and then R2 and operational amplifier 1 are in series with R1 and R3 respectively, forming a first series branch.

[0154] The bias voltage input V offset is in series with R4, forming a second series branch, and the second series branch is in parallel with the first series branch.

[0155] Capacitor C1 is in parallel with R5 and operational amplifier 2 respectively, forming a first parallel branch, and the second series branch is in series with the first parallel branch after being in parallel with the first series branch, and then the adjusting circuit output V out .

[0156] In an optional example, the adjusting circuit is composed of an operational amplifier circuit, which can process the voltage output by the sampling chip. Common processing includes scaling, biasing and filtering.

[0157] Scaling means adjusting the voltage output by the sampling chip, so that the full-scale voltage (the maximum voltage corresponding to the maximum current) of the output matches the full-scale voltage of the power supply integrated chip.

[0158] Biasing means adjusting the voltage value corresponding to no current of the sampling chip. Generally, the output voltage is zero volts after adjustment.

[0159] Filtering means low-pass filtering the voltage output by the sampling chip to filter out high-frequency noise.

[0160] When the voltage does not meet the output requirements of the power supply integrated chip, the voltage of the sampling chip needs to be adjusted by the adjusting circuit, as follows:

[0161] For stable current, the output voltage of the sampling chip is stable, i.e. low-frequency signal. Therefore, the calculation formula of the output voltage after adjustment is:

[0162]

[0163] wherein, V in represents the input voltage, V out represents the output voltage after adjustment, V offset represents the bias voltage, which generally does not need to be biased, so V offset is set to 0V or disconnected.

[0164] When no biasing is needed, the output voltage V out after adjustment is equal to the input voltage Vin The calculation between them can be simplified as:

[0165]

[0166] By adjusting the resistance values of R5 and R3, the output voltage of the sampling chip can be changed to meet the requirements of the power supply integrated chip. The scaling ratio of the adjustment circuit is determined by the hardware (R5 and R3), and the scaling ratio is determined after the hardware is determined. Store the scaling ratio in the controller, which can be used for subsequent calculations.

[0167] According to the following formula, the scaling ratio G (gain) can be calculated:

[0168]

[0169] The function of filtering is to filter out the high-frequency disturbance caused by the sampling chip itself and the hardware circuit design itself. The cutoff frequency f c of the filter can be set according to the actual situation, for example, calculated according to the following formula:

[0170]

[0171] It can be seen that the function and characteristics of the cutoff frequency f c of the filter are completely determined by the hardware and have nothing to do with the board card drive software.

[0172] It can be understood that the technical scheme provided by the embodiment, through the current output circuit of the automatic test equipment, includes a controller, a power supply integrated chip and a peripheral circuit; the power supply integrated chip is connected with the peripheral circuit and is used for outputting current; the peripheral circuit is electrically connected with the measured component and includes a sampling resistor branch and a sampling chip branch, and is used for loading the output current of the power supply integrated chip to the measured component when conducting; the controller is in communication connection with the peripheral circuit, and is used for controlling the sampling chip branch to conduct and the sampling resistor branch to disconnect when the target current value is greater than the preset current value, wherein the target current value represents the current value input by the automatic test equipment to the measured component during testing, and the output current of the power supply integrated chip is loaded to the measured component when the sampling chip branch conducts, so that when a large current is output, the phenomenon of one-way drift of the current caused by the change of the resistor can be effectively avoided, thereby meeting the high-precision requirement of the semiconductor; the controller is further used for controlling the sampling resistor branch to conduct and the sampling chip branch to disconnect when the target current value is less than or equal to the preset current, wherein the output current of the power supply integrated chip is loaded to the measured component when the sampling resistor branch conducts, so as to avoid the phenomenon of poor accuracy of the small current output caused by the sampling chip when a small current is output, thereby solving the problem that in the prior art, the actual resistance value of the sampling resistor changes with temperature when the sampling resistor continuously outputs a large current for a long time during testing of the semiconductor by the automatic test equipment, the actual output large current of the ATE device appears one-way continuous drift, and the high-precision requirement during testing of the semiconductor cannot be met.

[0173] Corresponding to the current output circuit described in the above embodiment, with reference to Figure 8 , Figure 8 is a flowchart of a current output method of an automatic test equipment provided by another embodiment of the application. For ease of illustration, only parts related to the embodiments of the application are shown.

[0174] The current output method of the automatic test equipment in the embodiment includes:

[0175] obtaining a target current value; wherein the target current value represents a current value input by the automatic test equipment to a measured component during testing;

[0176] determining a conducting branch in the peripheral circuit according to the size of the target current value, so that the peripheral circuit loads the current output by the power supply integrated chip to the measured component; wherein the peripheral circuit includes a sampling resistor branch and a sampling chip branch;

[0177] controlling the sampling chip branch to conduct and the sampling resistor branch to disconnect when the target current value is greater than a preset current value;

[0178] When the target current value is less than or equal to the preset current value, the controller controls the hardware circuit to switch to the sampling resistor branch, obtains the pre-stored sampling resistor parameter and the resistor calibration parameter, calculates the target calibration current value, and configures the theoretical output current of the power supply integrated chip to the target calibration current value.

[0179] In an optional example, as shown in Figure 8 the user issues a current output control instruction, the target current value is parsed from the current output control instruction, and it is judged whether the target current value is greater than the preset current value.

[0180] When it is determined that the target current value is greater than the preset current value, the controller controls the hardware circuit to switch to the sampling chip branch, obtains the pre-stored sampling chip parameter and chip calibration parameter, calculates the target calibration current value, and configures the theoretical output current of the power supply integrated chip to the target calibration current value.

[0181] When it is determined that the target current value is less than or equal to the preset current value, the controller controls the hardware circuit to switch to the sampling resistor branch, obtains the pre-stored sampling resistor parameter and the resistor calibration parameter, calculates the target calibration current value, and configures the theoretical output current of the power supply integrated chip to the target calibration current value.

[0182] It should be understood that the size of the serial number of each step in the above embodiment does not mean the order of execution, and the execution order of each process should be determined according to its function and inherent logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0183] It should be noted that the above method and the circuit embodiment of the present application are based on the same concept, and the specific functions and the technical effects brought by them can be referred to the circuit embodiment part, which will not be repeated here.

[0184] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above functional units and modules is exemplified, and in actual application, the above functions can be completed by different functional units and modules according to needs, that is, the internal structure of the device is divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated in one processing unit, or each unit can be physically present, or two or more units can be integrated in one unit. The above integrated unit can be realized in the form of hardware or software. In addition, the specific names of each functional unit and module are only for easy distinction, and do not limit the protection scope of the present application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, which will not be repeated here.

[0185] The embodiment of the present application further provides a terminal device, comprising at least one processor, a memory, and a computer program stored in the memory and executable on the at least one processor, wherein the processor implements the steps in any of the above method embodiments when executing the computer program.

[0186] The embodiment of the present application further provides a computer readable storage medium, which stores a computer program, wherein the computer program is executed by a processor to implement the steps in any of the above method embodiments.

[0187] The embodiment of the present application provides a computer program product, which, when executed on a mobile terminal, enables the mobile terminal to implement the steps in any of the above method embodiments.

[0188] The integrated unit, if implemented in the form of a software function unit and sold or used as an independent product, can be stored in a computer readable storage medium. Based on such understanding, the embodiment of the present application can implement all or part of the above-mentioned method processes through a computer program to instruct related hardware to complete, and the computer program can be stored in a computer readable storage medium. The computer program is executed by a processor to implement the steps in any of the above method embodiments. The computer program includes computer program code, which can be in the form of source code, object code, executable files or some intermediate forms. The computer readable medium at least includes any entity or device capable of carrying the computer program code to the photographing device / terminal equipment, recording medium, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signal, telecommunication signal and software distribution medium. For example, U disk, mobile hard disk, magnetic disk or optical disk, etc. In some jurisdictions, according to legislation and patent practice, the computer readable medium cannot be an electrical carrier signal and a telecommunication signal.

[0189] In the above embodiments, the description of each embodiment has its own focus, and the parts not described or recorded in detail in a certain embodiment can be referred to the relevant description of other embodiments.

[0190] Those skilled in the art can understand that the units and algorithm steps of each example described in combination with the embodiments disclosed herein can be realized in electronic hardware or a combination of computer software and electronic hardware. Whether the functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present application.

[0191] In the embodiments provided in the present application, it should be understood that the disclosed apparatus / network device and method can be implemented by other ways. For example, the apparatus / network device embodiments described above are only schematic, for example, the division of the modules or units is only a logical function division, and there can be another division in actual implementation, for example, a plurality of units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the displayed or discussed mutual couplings or direct couplings or communication connections between different parts can be indirect couplings or communication connections through some interfaces, devices or units, and can be electrical, mechanical or other forms.

[0192] The units described as separate components can or can not be physically separate, and the components shown as units can or can not be physical units, that is, they can be located in one place, or can be distributed on a plurality of network units. Part or all of the units can be selected according to actual needs to achieve the purpose of the embodiments.

[0193] The above-described embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced by equivalent; and these modifications or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be included in the protection scope of the present application.

Claims

1. A current output circuit of an automated test equipment, characterized by, include: Controller, power supply integrated chip, and peripheral circuits; among which: The power supply integrated chip is connected to the peripheral circuit and is used to output current; The peripheral circuit is electrically connected to the component under test and includes a sampling resistor branch and a sampling chip branch, which are used to load the output current of the power supply integrated chip to the component under test when the circuit is turned on. The controller is communicatively connected to the peripheral circuit and is used to control the sampling chip branch to be turned on and the sampling resistor branch to be turned off when the target current value is greater than the preset current value. When the sampling chip branch is turned on, the output current of the power supply integrated chip is applied to the component under test to avoid resistor heating and resistance drift caused by the sampling resistor branch. The target current value represents the current value input by the automated test equipment to the component under test during the test. The controller is further configured to control the sampling resistor branch to be turned on and the sampling chip branch to be turned off when the target current value is less than or equal to the preset current, wherein when the sampling resistor branch is turned on, the output current of the power supply integrated chip is applied to the component under test.

2. The current output circuit of the automated test equipment of claim 1, wherein, The peripheral circuit also includes a first control switch, which is communicatively connected to the controller; the input terminal of the first control switch is connected to the channel output terminal of the power supply integrated chip. The sampling resistor branch includes a sampling resistor, the first output terminal of which is connected to the input terminal of the component under test; the sampling chip branch includes a sampling chip, the first output terminal of which is connected to the input terminal of the component under test. The controller is also configured to, when the target current value is less than or equal to the preset current value, control the output terminal of the first control switch to be electrically connected to the first input terminal of the sampling resistor, so as to make the sampling resistor branch conduct. When the target current value is greater than the preset current value, the output terminal of the first control switch is electrically connected to the first input terminal of the sampling chip to make the sampling chip branch conduct.

3. The current output circuit of the automated testing equipment as described in claim 2, characterized in that, The controller is communicatively connected to the power supply integrated chip and is also used to calculate a target calibration current value corresponding to the target current value based on the target current value, pre-stored circuit parameters and calibration parameters, and configure the theoretical output current of the power supply integrated chip to the target calibration current value corresponding to the target current value. The power supply integrated chip is also used to output current according to the configured theoretical output current, so that when current is input to the component under test through the peripheral circuit, the input current of the component under test is the target current value; wherein, the circuit parameters are determined based on the parameters of the power supply integrated chip and the parameters of the peripheral circuit; the calibration parameters are obtained by fitting the theoretical output current of the power supply integrated chip and the input current of the component under test multiple times.

4. The current output circuit of the automated test equipment of claim 3, wherein, The circuit parameters include power supply chip parameters of the power supply integrated chip, sampling resistor parameters of the sampling resistor branch, and sampling chip parameters of the sampling chip branch; The calibration parameters include resistance calibration parameters of the sampling resistor branch and chip calibration parameters of the sampling chip branch; The controller is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameters, the sampling resistor parameters, and the resistance calibration parameters when the sampling resistor branch is turned on. The controller is further configured to calculate a target calibration current value corresponding to the target current value according to the target current value, the power supply chip parameters, the sampling chip parameters, and the chip calibration parameters when the sampling chip branch is turned on.

5. The current output circuit of the automated test equipment according to claim 3, wherein the current output circuit further comprises a tester connected in parallel with the DUT, configured to measure the input current of the DUT; and the tester is further connected in communication with the controller, configured to send the measured input current of the DUT to the controller. The controller is further configured to calculate the chip calibration parameters of the sampling chip branch according to the theoretical output current of the power supply integrated chip and the input current of the DUT corresponding to the theoretical output current when the sampling chip branch is turned on. The controller is further configured to calculate the resistance calibration parameters of the sampling resistor branch according to the theoretical output current of the power supply integrated chip and the input current of the DUT corresponding to the theoretical output current when the sampling resistor branch is turned on.

6. The current output circuit of the automated test equipment according to claim 2, wherein the current output circuit further comprises an acquisition chip, an input end of the acquisition chip being electrically connected with a current detection output end of the power supply integrated chip; a high side of a current detection input end of the power supply integrated chip being electrically connected with an input end of the peripheral circuit; a low side of the current detection input end of the power supply integrated chip being electrically connected with an output end of the peripheral circuit; the controller is further connected in communication with the acquisition chip, configured to send a current acquisition instruction to the acquisition chip to instruct the acquisition chip to acquire the actual output current of the power supply integrated chip; the acquisition chip is configured to receive the current acquisition instruction sent by the controller, and in response to the current acquisition instruction, acquire the actual output current of the power supply integrated chip and send the actual output current of the power supply integrated chip to the controller. The peripheral circuit further comprises a second control switch and a third control switch; wherein: the second control switch and the third control switch are connected in communication with the controller; 7. The current output circuit of the automated test equipment of claim 6, wherein, an output end of the second control switch is electrically connected with the high side of the current detection input end of the power supply integrated chip; an output end of the third control switch is electrically connected with the low side of the current detection input end of the power supply integrated chip; ​ ​ In the case that the target current value is less than or equal to the preset current value, the controller is further configured to control the input end of the second control switch and the input end of the third control switch to be electrically connected to the second input end and the second output end of the sampling resistor respectively, so that the voltage input to the current detection input end of the power supply integrated chip is the voltage across the sampling resistor. In the case that the target current value is less than or equal to the preset current value, the controller is further configured to control the input end of the second control switch to be electrically connected to the second input end of the sampling chip and control the input end of the third control switch to be grounded, so that the voltage input to the current detection input end of the power supply integrated chip is the output voltage of the sampling chip, wherein the output voltage of the sampling chip is related to the current flowing through the sampling chip.

8. The current output circuit of the automated test equipment according to claim 7, wherein, the current output circuit further comprises an adjusting circuit, an input end of the adjusting circuit being electrically connected to the second input end of the sampling chip, for adjusting the output voltage of the sampling chip; in the case that the target current value is greater than the preset current value, the controller is further configured to control the input end of the second control switch to be electrically connected to the output end of the adjusting circuit, so that the voltage input to the current detection input end of the power supply integrated chip is the voltage after the adjusting process; wherein the voltage after the adjusting process represents the voltage of the output voltage of the sampling chip after the adjusting process.

9. The current output circuit of the automated test equipment of claim 8, wherein, the adjusting circuit comprises two operational amplifiers, at least one resistor and at least one capacitor.

10. A current output method of an automated test equipment, characterized by, comprising: obtaining a target current value; wherein the target current value represents the current value input to a component under test by the automated test equipment during testing; determining a conduction branch in a peripheral circuit according to the size of the target current value, so that the peripheral circuit loads the current output by a power supply integrated chip to the component under test; wherein the peripheral circuit comprises a sampling resistor branch and a sampling chip branch; in the case that the target current value is greater than a preset current value, controlling the sampling chip branch to be conduction and the sampling resistor branch to be disconnected, so as to avoid resistance heating and resistance drift caused by the sampling resistor branch; in the case that the target current value is less than or equal to the preset current value, controlling the sampling resistor branch to be conduction and the sampling chip branch to be disconnected.

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