Control method and device of circulating liquid supply device, temperature control system and semiconductor processing system

Abstract

The invention provides a control method and device of a circulating liquid supply device, a temperature control system and a semiconductor processing system. The circulating liquid supply device comprises a liquid tank, a liquid level sensor, a liquid supplementing adjusting valve, a main path electromagnetic valve and a control module. The liquid box is provided with a first liquid inlet and a liquid outlet. The liquid box is used for containing circulating liquid. And circulating liquid is output from the liquid outlet. The liquid level sensor detects the liquid level of circulating liquid in the liquid tank and outputs liquid level information. And one end of the liquid supplementing regulating valve is communicated with the first liquid inlet. One end of the main path electromagnetic valve is communicated with the other end of the liquid supplementing adjusting valve, and the other end of the main path electromagnetic valve is communicated with an external liquid supply system so as to receive circulating liquid conveyed by the external liquid supply system. The control module is electrically connected with the liquid level sensor, the liquid supplementing adjusting valve and the main path electromagnetic valve to execute the control method. The control method comprises the step that the control module controls the opening and closing states of the liquid supplementing adjusting valve and the main path electromagnetic valve according to the liquid level information so as to adjust the liquid level of the liquid tank.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a control method and device for a circulating liquid supply device, a temperature control system, and a semiconductor process system. Background Art

[0002] The temperature control system dedicated to the semiconductor process is a system used to provide a circulating liquid with a constant temperature and constant flow rate. This temperature control system can be applied to the integrated circuit manufacturing process to use the circulating liquid to take away the heat generated in the process, thereby meeting the temperature control requirements of the semiconductor main process equipment.

[0003] A circulating liquid supply device is usually provided in an open temperature control system. The circulating liquid supply device includes a liquid tank, in which the circulating liquid is contained, and the circulating liquid provided by the external liquid supply system is received and stored in the liquid tank. In addition, the circulating liquid in the liquid tank is continuously output to be provided to the external liquid-using device.

[0004] In an open temperature control system, the circulating fluid used by the external liquid device will not flow into the liquid tank again. Therefore, the circulating fluid in the liquid tank needs to be continuously replenished to prevent the circulating fluid in the liquid tank from being too little to meet the demand, and at the same time, to prevent the circulating fluid in the liquid tank from overflowing too much.

[0005] In the prior art, a float valve is provided in the liquid tank. The float valve includes a float and a connecting rod, and the float is connected to one end of the connecting rod. When the liquid level of the circulating liquid in the liquid tank rises, the float will also rise, thereby driving the connecting rod to rise. When the connecting rod rises to a certain position, the connecting rod will support the rubber piston pad to close the valve to seal the liquid source. When the liquid level drops, the float will also drop, and the connecting rod will drive the piston pad to open. The liquid tank is automatically replenished by setting a float valve.

[0006] However, the inventors have discovered that in the prior art method of automatically replenishing the liquid tank with a float valve, since the force acting to close the float valve comes from buoyancy, which is relatively small, the float valve may not seal tightly when the liquid level is high, causing the circulating liquid to overflow. Summary of the invention

[0007] The present application aims to provide a control method and device for a circulating liquid supply device, a temperature control system and a semiconductor process system.

[0008] According to one aspect of the present application, a control method for a circulating liquid supply device is provided. The circulating liquid supply device includes a liquid tank, a liquid level sensor, a liquid replenishment regulating valve, a main solenoid valve and a control module. The liquid tank is provided with a first liquid inlet and a liquid outlet. The liquid tank is used to contain circulating liquid. The liquid outlet outputs circulating liquid. The liquid level sensor is arranged in the liquid tank, detects the liquid level of the circulating liquid in the liquid tank, and outputs liquid level information. The liquid replenishment regulating valve is arranged outside the liquid tank, and one end of the liquid replenishment regulating valve is connected to the first liquid inlet. The main solenoid valve is arranged outside the liquid tank, one end of the main solenoid valve is connected to the other end of the liquid replenishment regulating valve, and the other end of the main solenoid valve is connected to an external liquid supply system to receive the circulating liquid transported by the external liquid supply system. The control module is electrically connected to the liquid level sensor, the liquid replenishment regulating valve and the main solenoid valve to execute the control method. The control method includes the control module controlling the opening and closing states of the liquid replenishment regulating valve and the main solenoid valve according to the liquid level information to adjust the liquid level of the liquid tank.

[0009] According to another aspect of the present application, a circulating liquid supply device is proposed. The circulating liquid supply device includes a liquid tank, a liquid level sensor, a liquid replenishment regulating valve, a main solenoid valve and a control module. The liquid tank is provided with a first liquid inlet and a liquid outlet. The liquid tank is used to contain circulating liquid. The liquid outlet outputs circulating liquid. The liquid level sensor is arranged in the liquid tank, detects the liquid level of the circulating liquid in the liquid tank, and outputs liquid level information. The liquid replenishment regulating valve is arranged outside the liquid tank, and one end of the liquid replenishment regulating valve is connected to the first liquid inlet. The main solenoid valve is arranged outside the liquid tank, and one end of the main solenoid valve is connected to the other end of the liquid replenishment regulating valve, and the other end of the main solenoid valve is connected to an external liquid supply system to receive the circulating liquid transported by the external liquid supply system. The control module is electrically connected to the liquid level sensor, the liquid replenishment regulating valve and the main solenoid valve to execute the above-mentioned control method.

[0010] According to another aspect of the present application, a temperature control system is provided. The temperature control system includes the circulating liquid supply device described above. The temperature control system also includes a temperature regulating device, which is connected to the liquid outlet of the circulating liquid supply device, receives the circulating liquid output by the circulating liquid supply device and regulates the temperature of the circulating liquid.

[0011] According to another aspect of the present application, a semiconductor process system is provided. The semiconductor process system includes the circulating liquid supply device, the temperature regulating device and the semiconductor process equipment described above. The temperature regulating device is connected to the liquid outlet of the circulating liquid supply device, receives the circulating liquid output by the circulating liquid supply device and adjusts the temperature of the circulating liquid. The semiconductor process equipment is connected to the temperature regulating device of the temperature control system, receives the circulating liquid after temperature adjustment, and performs semiconductor process manufacturing.

[0012] Beneficial Effects

[0013] The control method of the circulating liquid supply device provided in the present application adjusts the opening and closing states of the liquid replenishment regulating valve and the main electromagnetic valve according to the liquid level information output by the liquid level sensor through the control module. In this way, the replenishment can be accelerated when the liquid level of the circulating liquid in the liquid tank is low, and the replenishment can be stopped in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0015] Figure 1 This is a schematic diagram of the structure of the circulating liquid supply device of an embodiment of the present application;

[0016] Figure 2 This is a flow chart of the control method of the embodiment of the present application;

[0017] Figure 3 This is a flow chart of step S210 of the embodiment of the present application;

[0018] Figure 4 This is a flow chart of step S211 of the embodiment of the present application;

[0019] Figure 5 This is a flow chart of step S450 of the embodiment of the present application;

[0020] Figure 6 This is a flow chart of step S440 of the embodiment of the present application;

[0021] Figure 7 This is a schematic diagram of a flow chart for controlling the closing of a standby solenoid valve according to an embodiment of the present application;

[0022] Figure 8 This is a flow chart of step S410 of the embodiment of the present application;

[0023] Fig. 9 This is a flow chart of step S411 of the embodiment of the present application;

[0024] Fig.10 This is a schematic diagram of the structure of the temperature control system of the embodiment of the present application;

[0025] Description of reference numerals:

[0026] 1. Circulating liquid supply device; 11. Liquid tank; 12. Liquid level sensor; 13. Liquid replenishment regulating valve; 14. Main line solenoid valve; 15. Backup solenoid valve; 16. Redundant liquid level sensor; 2. External system; 21. Temperature control device; 211. Refrigerator; 212. Heater; 22. Liquid pump; 23. Pressure regulating device; 24. Pressure detection device. DETAILED DESCRIPTION

[0027] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be comprehensive and complete and will fully convey the concepts of the example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar parts, and thus their repeated description will be omitted.

[0028] The described features, structures or characteristics may be combined in one or more embodiments in any suitable manner. In the following description, many specific details are provided to provide a full understanding of the embodiments of the present disclosure. However, those skilled in the art will appreciate that the technical solutions of the present disclosure may be practiced without one or more of these specific details, or other modes, components, materials, devices, etc. may be adopted. In these cases, known structures, methods, devices, implementations, materials or operations will not be shown or described in detail.

[0029] In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units that are not listed, or may optionally include other steps or units that are inherent to these processes, methods, products or devices.

[0030] The terms "first", "second" and the like in the specification and claims of this application and the above drawings are used to distinguish different objects rather than to describe a specific order.

[0031] The following is a clear and complete description of the technical solution of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0032] According to one aspect of the present application, an embodiment of the present application provides a control method for a circulating liquid supply device 1. The circulating liquid supply device 1 is used to provide circulating liquid for subsequent use after the circulating liquid is temperature-adjusted.

[0033] Figure 1 Schematic diagram of the structure of the circulating liquid supply device 1. Figure 1 The circulating liquid supply device 1 may specifically include a liquid tank 11, a liquid level sensor 12, a liquid replenishment regulating valve 13, a main circuit solenoid valve 14 and a control module.

[0034] According to an exemplary embodiment, the liquid tank 11 is used to hold the circulating liquid. The liquid tank 11 is provided with a first liquid inlet and a liquid outlet, and the liquid outlet is used to output the circulating liquid. According to an exemplary embodiment, the liquid outlet can be specifically connected to the temperature regulating device 21 of the external system 2 to discharge the circulating liquid from the liquid tank 11 to the temperature regulating device 21 of the external system 2 for temperature regulation for subsequent use by the device.

[0035] The liquid level sensor 12 is arranged in the liquid tank 11. The liquid level sensor 12 can be arranged on the inner wall of the liquid tank 11, or can be arranged in the liquid tank 11 by hanging with a rope.

[0036] According to the exemplary embodiment, the liquid replenishment regulating valve 13 and the main electromagnetic valve 14 are arranged outside the liquid tank 11. One end of the liquid replenishment regulating valve 13 is communicated with the first liquid inlet. The other end of the liquid replenishment regulating valve 13 is communicated with one end of the main electromagnetic valve 14. The other end of the main electromagnetic valve 14 is used to connect to an external liquid supply system to receive the circulating liquid delivered from the external liquid supply system.

[0037] According to the exemplary embodiment, the liquid replenishment regulating valve 13 may be an electric regulating valve, and its opening degree is adjustable. When the opening degree of the liquid replenishment regulating valve 13 is larger, the liquid flow rate of the circulating liquid flowing through the liquid replenishment regulating valve 13 is larger in the same time, and more circulating liquid flows into the liquid tank 11.

[0038] The main electromagnetic valve 14 is an electromagnetic valve, which is in a first state when powered, and in a second state when not powered. For example, when the main electromagnetic valve 14 is powered, the main electromagnetic valve 14 is open, and the circulating fluid delivered by the external fluid supply system can flow through the main electromagnetic valve 14. When the main electromagnetic valve 14 is not powered, the main electromagnetic valve 14 is closed, and the circulating fluid delivered by the external fluid supply system cannot pass through the main electromagnetic valve 14.

[0039] The liquid level sensor 12 is used to detect the liquid level of the circulating liquid in the liquid tank 11 and output liquid level information. It is worth noting that the liquid level sensor 12 outputs data describing the liquid level of the circulating liquid in the liquid tank 11.

[0040] The control module is electrically connected to the liquid level sensor 12 , the main electromagnetic valve 14 and the liquid replenishment regulating valve 13 respectively, so as to execute the control method of the circulating liquid supply device 1 of the embodiment of the present application.

[0041] Figure 2FIG. 1 is a flow chart of a control method according to an embodiment of the present application. Figure 2 , the control method may specifically include step S210.

[0042] In step S210, the control module controls the opening and closing states of the liquid replenishment regulating valve and the main circuit solenoid valve according to the liquid level information output by the liquid level sensor to adjust the liquid level of the circulating liquid in the liquid tank.

[0043] According to the example embodiment, the opening and closing state of the liquid replenishment regulating valve is specifically used to describe the opening of the liquid replenishment regulating valve. For example, the opening and closing state of the liquid replenishment regulating valve is an opening state of 0%, indicating that the liquid replenishment regulating valve is closed and the circulating fluid cannot flow through the liquid replenishment regulating valve. When the opening and closing state of the liquid replenishment regulating valve is an opening state of 100%, it indicates that the liquid replenishment regulating valve is in a state of full opening. When the opening and closing state of the liquid replenishment regulating valve is an opening state of 50%, the liquid replenishment regulating valve is open and the opening is 50%.

[0044] The opening and closing states of the main solenoid valve may specifically include a main solenoid valve open state and a main solenoid valve closed state.

[0045] According to the example embodiment, in the above step S210, the control module can specifically determine the liquid level of the circulating fluid in the liquid tank based on the liquid level information measured by the liquid level sensor, and adjust the opening of the liquid replenishment regulating valve according to the liquid level of the circulating fluid in the liquid tank, and adjust the switching state of the main solenoid valve to adjust the liquid level of the circulating fluid in the liquid tank.

[0046] For example, the control module can control the main circuit solenoid valve to close and the liquid replenishment regulating valve to close when the liquid level is higher than the preset liquid level upper limit value. In this way, the circulating liquid delivered by the external liquid supply system will temporarily be unable to be delivered to the liquid tank, so that the liquid level of the circulating liquid in the liquid tank will not be too high, thereby reducing the risk of the circulating liquid in the liquid tank overflowing.

[0047] Exemplarily, the control module can control the main circuit solenoid valve to open and control the opening of the liquid replenishment regulating valve to a preset small opening value when the liquid level is between the preset lower limit value and the preset upper limit value. In this way, the circulating liquid delivered by the external liquid supply system can be delivered to the liquid tank to continuously replenish the circulating liquid. In this way, while the circulating liquid in the liquid tank is continuously output to the external liquid-using device, the circulating liquid in the liquid tank can also be replenished, so that the liquid level of the circulating liquid in the liquid tank is maintained within an appropriate range.

[0048] For example, the control module can also control the main circuit solenoid valve to open when the liquid level is lower than the preset lower limit of the liquid level, and control the opening of the liquid replenishment regulating valve to be a preset large opening value (for example, the opening is full opening, that is, the liquid replenishment regulating valve is fully open). In this way, the circulating liquid delivered by the external liquid supply system can be replenished into the liquid tank faster to speed up the replenishment of the circulating liquid, so that the liquid level of the circulating liquid in the liquid tank can be raised to above the preset lower limit of the liquid level, reducing the risk of the circulating liquid level in the liquid tank being continuously too low.

[0049] Through the above embodiments, the control method of the circulating liquid supply device of the present application is to adjust the opening and closing states of the liquid replenishment regulating valve and the main electromagnetic valve according to the liquid level information output by the liquid level sensor by the control module. In this way, the replenishment can be accelerated when the liquid level of the circulating liquid in the liquid tank is low, and the replenishment can be stopped in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the appropriate liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0050] According to some embodiments, reference Figure 1 The liquid box 11 is also provided with a second liquid inlet. The circulating liquid supply device 1 also includes a standby solenoid valve 15 .

[0051] The backup solenoid valve 15 is arranged outside the liquid tank 11, and one end of the backup solenoid valve 15 is connected to the second liquid inlet of the liquid tank 11, and the other end of the backup solenoid valve 15 is connected to one end of the main solenoid valve 14, that is, the other end of the backup solenoid valve 15 is connected to one end of the main solenoid valve 14 connected to the liquid replenishment regulating valve 13.

[0052] According to the exemplary embodiment, the circulating liquid delivered by the external liquid supply system first flows through the main solenoid valve 14. After the circulating liquid flows through the main solenoid valve 14, it is divided into two paths, one of which flows into the liquid tank 11 through the liquid replenishment regulating valve 13 and the first liquid inlet, and the other flows into the liquid tank 11 through the standby solenoid valve 15 and the second liquid inlet.

[0053] According to the exemplary embodiment, the standby solenoid valve 15 is also a solenoid valve, and its opening is not adjustable. The switching state of the standby solenoid valve 15 includes a standby solenoid valve open state and a standby solenoid valve 15 closed state. When the standby solenoid valve 15 is powered on, the switching state of the standby solenoid valve 15 is switched to the standby solenoid valve open state, and the circulating fluid can flow through the standby solenoid valve 15. When the standby solenoid valve 15 is not powered on, the switching state of the standby solenoid valve 15 is switched to the standby solenoid valve closed state, that is, the circulating fluid cannot flow through the standby solenoid valve 15.

[0054] According to an exemplary embodiment, the control module is also electrically connected to the backup solenoid valve 15 .

[0055] According to some embodiments, reference Figure 3 In the above step S210, the control module adjusts the liquid level of the circulating fluid, which can be specifically achieved through step S211.

[0056] In step S211, the control module controls the opening and closing states of the liquid replenishment regulating valve, the main solenoid valve and the standby solenoid valve according to the liquid level information to adjust the liquid level of the circulating fluid in the liquid tank.

[0057] According to the exemplary embodiment, in step S211, the control module can control the opening and closing state of the standby solenoid valve while controlling the opening and closing state of the liquid replenishment regulating valve and the main solenoid valve according to the liquid level information output by the liquid level sensor. In this way, by controlling the opening and closing of the liquid replenishment regulating valve, the main solenoid valve and the standby solenoid valve, the flow rate of the circulating liquid flowing into the liquid tank can be adjusted, and then the liquid level of the circulating liquid in the liquid tank can be adjusted.

[0058] Exemplarily, when the liquid level is lower than the above-mentioned preset minimum liquid level limit, the control module can control the full opening of the liquid replenishment regulating valve and the opening of the main solenoid valve, while also controlling the standby solenoid valve to open, so as to further speed up the flow of the circulating fluid flowing into the liquid tank, thereby making it easier to adjust the liquid level of the circulating fluid in the liquid tank.

[0059] According to some embodiments, reference Figure 4 In the above step S211, the control module controls the opening and closing states of the liquid replenishment regulating valve, the main solenoid valve and the standby solenoid valve according to the liquid level information to adjust the liquid level of the circulating fluid in the liquid tank, which may specifically include steps S410, S420, S430, S440, S450 and S460.

[0060] In step S410, the control module determines whether the liquid level in the liquid tank is within a preset liquid level range according to the liquid level information.

[0061] According to an example embodiment, the tank liquid level is the liquid level of the circulating liquid in the tank.

[0062] In step S420, the control module controls the main circuit solenoid valve to close when the liquid level in the liquid tank is higher than the upper limit of the preset liquid level range.

[0063] According to some embodiments, when the liquid level in the liquid tank is higher than the upper limit of the liquid level in the preset liquid level range, the control module can also control the standby solenoid valve and the liquid replenishing regulating valve to close, which will not be elaborated here.

[0064] According to the example embodiment, when the liquid level in the liquid tank is higher than the upper limit of the preset liquid level range, the control module controls the main circuit solenoid valve to close, so that the circulating liquid delivered by the external liquid supply system cannot flow into the liquid tank, thereby preventing the circulating liquid level in the liquid tank from being too high and overflowing.

[0065] In step S430, when the liquid level in the liquid tank is lower than the lower limit of the preset liquid level range, the control module controls the main solenoid valve and the standby solenoid valve to open, and controls the liquid replenishment regulating valve to open at a full opening degree.

[0066] According to the example embodiment, when the liquid level in the liquid tank is lower than the lower limit of the liquid level in the preset liquid level range, the control module can control the main electromagnetic valve to open, and control the liquid replenishment regulating valve to open at a full opening, so that the circulating liquid in the liquid tank can flow into the liquid tank quickly. In addition, the control module can also control the standby electromagnetic valve to open, which is equivalent to passing the circulating liquid into the liquid tank through two channels, further speeding up the replenishment speed of the circulating liquid in the liquid tank.

[0067] In addition, the control module controlling the standby solenoid valve to open is also helpful in reducing the probability that the circulating fluid in the liquid tank cannot be replenished in time due to damage to the liquid replenishment regulating valve. Because in the case of a damaged liquid replenishment regulating valve, the circulating fluid in the liquid tank cannot be replenished through the liquid replenishment regulating valve, and as the circulating fluid flows out, the liquid level of the circulating fluid in the liquid tank continues to drop. In an embodiment of the present application, if the liquid replenishment regulating valve is damaged so that the liquid level of the circulating fluid in the liquid tank is lower than the lower limit of the preset liquid level interval, the control module can simultaneously control the standby solenoid valve, the liquid replenishment regulating valve, and the main solenoid valve to open, so that even if the liquid replenishment regulating valve is damaged, the circulating fluid in the liquid tank can still be replenished through the standby solenoid valve.

[0068] In step S440, the control module controls the main circuit solenoid valve to open when the liquid level in the liquid tank is within the preset liquid level range.

[0069] According to an exemplary embodiment, in step S440, when the liquid level in the liquid tank is in a preset liquid level range, the control module controls the main circuit solenoid valve to open so that the external liquid supply system replenishes circulating liquid into the liquid tank so that the liquid level of the circulating liquid in the liquid tank can be maintained in the preset liquid level range.

[0070] In step S450, the control module determines the valve opening value of the liquid replenishment regulating valve according to the liquid level in the liquid tank and the preset target liquid level.

[0071] In step S460, the control module determines the opening of the liquid replenishment regulating valve as the valve opening value to adjust the liquid level of the circulating liquid in the liquid tank.

[0072] According to an example embodiment, when the liquid level in the liquid tank is within a preset liquid level range, the control module may further control the liquid replenishment regulating valve to open, and adaptively adjust the opening of the liquid replenishment regulating valve so that the liquid level in the liquid tank can be maintained within the preset liquid level range.

[0073] Therefore, in steps S450-S460, the control module can determine the valve opening value of the liquid replenishment regulating valve according to the liquid level in the liquid tank and the preset target liquid level, and control the opening of the liquid replenishment regulating valve to the valve opening value to adjust the liquid level of the circulating fluid in the liquid tank.

[0074] According to some embodiments, reference Figure 5 In the above step S450, the control module determines the valve opening value of the liquid replenishment regulating valve according to the liquid level in the liquid tank and the preset target liquid level, which may specifically include step S451, step S452 and step S453.

[0075] In step S451, the control module calculates the valve opening value according to the liquid level in the liquid tank and the preset target liquid level.

[0076] According to an exemplary embodiment, the preset target liquid level is a pre-set liquid level, for example, the preset target liquid level is 2 / 3 of the height of the liquid tank.

[0077] According to an example embodiment, the control module may perform a PID (Proportional-Integral-Derivative Controller) calculation based on the liquid level in the liquid tank and a preset target liquid level to output a PID output value, which is the calculated value of the valve opening.

[0078] In step S452, the control module obtains the current outlet flow value, the lower limit value of the water supply pressure, and the upper limit value of the water supply pressure.

[0079] In step S453, the control module calculates the valve opening value according to the current outlet flow value, the lower limit value of the water supply pressure, the upper limit value of the water supply pressure and the valve opening change value.

[0080] According to some embodiments, the current outlet flow rate value may specifically be the flow rate of the circulating liquid outputted from the liquid outlet of the liquid tank, or the flow rate of the circulating liquid delivered to an external liquid-using device. For example, the liquid outlet of the liquid tank is connected to a water pump, the water pump is connected to a temperature regulating device, and the temperature regulating device is connected to the external liquid-using device via a flow sensor. The flow sensor is used to measure the flow rate of the circulating liquid delivered to the external liquid-using device to obtain the current outlet flow rate value.

[0081] The circulating liquid in the liquid tank is usually provided by the UPW (Ultra Purified Water) system. The UPW system has an upper and lower limit for the water supply pressure design. The upper limit determines the maximum flow rate of the circulating liquid delivered to the liquid tank by the UPW system, and the lower limit determines the minimum flow rate of the circulating liquid delivered to the liquid tank by the UPW system.

[0082] In step S452, the control module can obtain the upper limit value of the water supply pressure by obtaining the upper limit value, and can obtain the lower limit value of the water supply pressure by obtaining the lower limit value.

[0083] According to some embodiments, in step S453, the formula for calculating the valve opening value by the control module may specifically be the following formula.

[0084]

[0085] According to an exemplary embodiment, X is the valve opening value; LPID is the calculated value of the valve opening; Q is the current outlet flow value; P LO is the lower limit of water supply pressure; P HI It is the upper limit of water supply pressure.

[0086] According to an example embodiment, It is a functional relationship for calculating the valve opening when the valve pressure is P and the valve flow is Q. The functional relationship can be obtained from the valve manual of the liquid replenishment regulating valve.

[0087] According to the exemplary embodiment, in step S450, the control module substitutes the measured lower limit value of the water supply pressure, the upper limit value of the water supply pressure and the current outlet flow value into the formula according to the above formula to obtain the valve opening value. Then, in step S460, the control module can control the valve of the liquid replenishment regulating valve to its valve opening value.

[0088] According to some embodiments, reference Figure 6 In the above step S440, the control module controls the main solenoid valve to open when the liquid level in the liquid tank is in the preset liquid level range, which can be specifically achieved through steps S441 and S442.

[0089] In step S441 , the control module determines a first duration.

[0090] According to an example embodiment, the first duration is the duration of the state that the liquid level of the liquid tank is lower than the upper limit of the liquid level of the preset liquid level interval. For example, the upper limit of the liquid level of the preset liquid level interval is 2m, and the control module starts timing when the liquid level of the liquid tank is lower than 2m, and the timing duration is the first duration.

[0091] In step S442, when the first duration reaches the first preset duration and the liquid level in the liquid tank is within the preset liquid level range, the control module controls the main circuit solenoid valve to open.

[0092] For example, taking the first preset duration of 2s as an example, when the liquid level in the liquid tank is lower than 2m, the control module starts timing from 00:00, and within 2s after the start of timing, the liquid level in the liquid tank is lower than 2m. At this time, the first duration reaches 2s, reaches the first preset duration, and the liquid level in the liquid tank is in the preset liquid level range, and the control module controls the main circuit solenoid valve to open.

[0093] According to some embodiments, when the first duration reaches the first preset duration, assuming that the liquid level in the liquid tank is higher than the upper limit of the preset liquid level range, the control module will not control the main circuit solenoid valve to open.

[0094] According to some embodiments, when the first duration reaches the second preset duration, assuming that the liquid level in the liquid tank is lower than the lower limit of the preset liquid level range, the control module will execute step S430 to control the main circuit solenoid valve to open.

[0095] Through the above embodiment, the control module will not immediately control the main solenoid valve to open when the liquid level in the liquid tank is lower than the upper limit of the preset liquid level interval, but will control the main solenoid valve to open when the duration of the liquid level in the liquid tank being lower than the upper limit of the preset liquid level interval reaches a first preset duration. This reduces the probability of malfunction of the main solenoid valve due to short-term fluctuations in the liquid level and can increase the service life of the main solenoid valve.

[0096] According to some embodiments, reference Figure 7 In step S211, the control module controls the opening and closing states of the liquid replenishment regulating valve, the main solenoid valve and the standby solenoid valve according to the liquid level information to adjust the liquid level of the circulating fluid in the liquid tank, which may include the above-mentioned steps S410 to S460, and may also include the following steps S710 and S720.

[0097] In step S710, the control module determines a second duration when the liquid level in the liquid tank is higher than a lower limit of a preset liquid level interval.

[0098] According to an example embodiment, the second duration is the duration of the state that the liquid level in the liquid tank is higher than the lower limit of the liquid level in the preset liquid level interval. For example, when the liquid level in the liquid tank gradually rises to the lower limit of the liquid level in the preset liquid level interval, the control module starts timing to obtain the second duration. Within 1 minute after the start of timing, if the liquid level in the liquid tank is higher than the lower limit of the liquid level, the second duration is 1 minute. If the liquid level in the liquid tank is lower than the lower limit of the liquid level 50 seconds after the start of timing, the second duration is reset to 0 50 seconds after the start of timing, and the timing will start again the next time the liquid level in the liquid tank is higher than the lower limit of the liquid level.

[0099] In step S720, the control module controls the standby solenoid valve to close when the second duration reaches a second preset duration.

[0100] According to the example embodiment, when the second duration reaches the second preset duration, it indicates that the liquid level in the liquid tank has stably exceeded the lower limit of the preset liquid level range. At this time, the standby solenoid valve is controlled to close, and the liquid tank is replenished only through the liquid replenishment regulating valve and the main solenoid valve.

[0101] In the embodiment of the present application, when the time duration of the liquid level in the liquid tank being higher than the lower limit of the liquid level reaches the second preset time duration, the standby solenoid valve is controlled to be closed. In this way, the standby solenoid valve can be controlled to be closed when the liquid level in the liquid tank is stable, and it is not necessary to control the standby solenoid valve to be closed when the liquid level in the liquid tank is not stable, and then open it again when the liquid level in the liquid tank is lower than the lower limit of the liquid level in a short time, thereby reducing the probability of frequent opening and closing of the standby solenoid valve.

[0102] According to some embodiments, the control module can also output a liquid level ultra-low fault shutdown signal when the liquid level is lower than the preset minimum alarm liquid level, so that the external liquid supply system and the external liquid device can be shut down in time, reducing the probability of failure to provide sufficient circulating liquid when the liquid level is ultra-low, causing damage to the external liquid device or damage to the products made by the external liquid device. In addition, the control module shuts down both the external liquid supply system and the external liquid device, which is also conducive to the staff to repair the circulating liquid supply device.

[0103] According to some embodiments, reference Figure 1 The circulating liquid supply device further includes a redundant liquid level sensor 16. The redundant liquid level sensor 16 is disposed in the liquid tank to detect the liquid level of the circulating liquid in the liquid tank to output redundant liquid level information.

[0104] Reference Figure 8 In the above step S410, the control module determines whether the liquid level in the liquid tank is within a preset liquid level range according to the liquid level information, which may specifically include step S411 and step S412.

[0105] In step S411, the control module determines the effective value of the liquid level in the liquid tank according to the liquid level information and the redundant liquid level information.

[0106] In step S412, the control module determines whether the effective value of the liquid level in the liquid tank is within a preset liquid level interval, so as to determine whether the liquid level in the liquid tank is within the preset liquid level interval.

[0107] According to the example embodiment, the liquid level sensor may be damaged during use, so a redundant liquid level sensor is also provided in the embodiment of the present application. In step S411, the control module can perform mutual calibration based on the redundant liquid level information collected by the redundant liquid level sensor and the liquid level information collected by the liquid level sensor to detect whether the liquid level sensor and the redundant liquid level sensor are normal, so as to determine the effective value of the liquid level of the liquid tank based on the liquid level information collected by the normal liquid level sensor.

[0108] Then, the control module can determine whether the liquid level of the liquid tank is in the preset liquid level interval according to whether the effective value of the liquid level of the liquid tank is in the preset liquid level interval in step S412. This can reduce the probability of abnormal liquid level of the liquid tank due to abnormal liquid level sensor and improve the reliability of liquid level control of the circulating liquid supply device.

[0109] According to some embodiments, reference Fig. 9 In the above step S411, the control module determines the effective value of the liquid level in the liquid tank according to the liquid level information and the redundant liquid level information, which can be specifically implemented through the following steps S910-S960.

[0110] In step S910 , the control module calculates the liquid level difference between the liquid level information and the redundant liquid level information.

[0111] In step S920, when the liquid level difference is not greater than a preset difference, the control module uses the average of the liquid level information and the redundant liquid level information as the effective value of the liquid tank liquid level.

[0112] In step S930, when the liquid level difference is greater than a preset difference, the control module detects the first liquid level change and the second liquid level change.

[0113] For example, when the difference between the liquid level information and the redundant liquid level information is not greater than the preset difference, it indicates that the detection results of the two sensors are not much different, and the two sensors are in normal working state. In this case, the control module can use the average of the liquid level information and the redundant liquid level information as the effective value of the liquid tank level.

[0114] When the liquid level difference between the liquid level information and the redundant liquid level information is greater than the preset difference, it indicates that the detection results of the liquid level sensor and the redundant liquid level sensor are greatly different, and there may be a sensor failure problem. Therefore, the control module can detect the first liquid level change amount and the second liquid level change amount in step S930 to determine the normally working liquid level sensor according to the first liquid level change amount and the second liquid level change amount, so as to determine the effective value of the liquid tank liquid level according to the liquid level information of the normally working liquid level sensor.

[0115] According to an example embodiment, the first liquid level change is a liquid level change detected by the liquid level sensor within a third preset time period, and the second liquid level change is a liquid level change detected by the redundant liquid level sensor within a third preset time period.

[0116] Exemplarily, the third preset time length is 10 seconds. The control module records the first initial liquid level detected by the liquid level sensor at the initial moment, and records the second initial liquid level detected by the redundant liquid level sensor.

[0117] After 10 seconds, the control module records the first end liquid level measured by the liquid level sensor and the second end liquid level detected by the redundant liquid level sensor. The control module then calculates the absolute value of the difference between the first end liquid level and the first initial liquid level to obtain the first liquid level change. The control module also calculates the absolute value of the difference between the second end liquid level and the second initial liquid level to obtain the second liquid level change.

[0118] In step S940, the control module determines whether the liquid level sensor and the redundant liquid level sensor are normal liquid level sensors according to the first liquid level change amount and the second liquid level change amount.

[0119] According to the exemplary embodiment, the circulating liquid in the liquid tank is constantly changing, and the liquid level measured by the normal liquid level sensor should change within 2 seconds. Therefore, the control module can determine whether the first liquid level change is 0 and whether the second liquid level change is 0 in step S940 to determine whether the liquid level sensor is a normal liquid level sensor and whether the redundant liquid level sensor is a normal liquid level sensor.

[0120] When the first liquid level change is 0 and the second liquid level change is not 0, it indicates that the redundant liquid level sensor is a normal liquid level sensor. When the first liquid level change is not 0 and the second liquid level change is 0, it indicates that the liquid level sensor is a normal liquid level sensor.

[0121] In step S950, when there is a normal liquid level sensor among the liquid level sensor and the redundant liquid level sensor, the control module determines the effective value of the liquid tank liquid level according to the liquid level information output by the normal liquid level sensor.

[0122] According to an example embodiment, in the case where there is a normal liquid level sensor, the control module may determine the liquid level information output by the normal liquid level sensor as the effective value of the liquid tank liquid level.

[0123] In step S960, the control module outputs a sensor fault signal when there is no normal liquid level sensor among the liquid level sensor and the redundant liquid level sensor.

[0124] According to the example embodiment, when the first liquid level change is 0 and the second liquid level change is also 0, or when the first liquid level change and the second liquid level change are both greater than 0, the control module determines that there is no normal sensor in the liquid level sensor and the redundant liquid level sensor, and the control module outputs a sensor fault signal, and the two liquid level sensors are manually tested.

[0125] It should be clearly understood that the present application describes how to form and use specific examples, but the present application is not limited to any details of these examples. On the contrary, based on the teaching of the content disclosed in the present application, these principles can be applied to many other embodiments.

[0126] According to another aspect of the present application, an embodiment of the present application provides a circulating liquid supply device. Figure 1 The circulating liquid supply device 1 includes a liquid tank 11, a liquid level sensor 12, a liquid replenishment regulating valve 13, a main circuit solenoid valve 14 and a control module.

[0127] The liquid tank 11 is provided with a first liquid inlet and a liquid outlet for containing circulating liquid, and the liquid outlet is connected to an external liquid system to discharge the circulating liquid from the liquid tank 11 to the external liquid system. The liquid level sensor 12 is provided in the liquid tank 11 to detect the liquid level of the circulating liquid in the liquid tank 11 and output the liquid level information. The liquid replenishment regulating valve 13 is provided outside the liquid tank 11, and one end of the liquid replenishment regulating valve 13 is connected to the first liquid inlet. The main solenoid valve 14 is provided outside the liquid tank 11, and one end of the main solenoid valve 14 is connected to the other end of the liquid replenishment regulating valve 13, and the other end of the main solenoid valve 14 is connected to the external liquid supply system to receive the circulating liquid transported by the external liquid supply system.

[0128] The control module is used to execute the control method of the above-mentioned circulating liquid supply device 1. The specific implementation details of the control method can be referred to the above-mentioned embodiment, and will not be repeated here.

[0129] According to another aspect of the present application, an embodiment of the present application provides a temperature control system. Figure 1 and Fig.10 The temperature control system may specifically include the circulating liquid supply device 1 and the external system 2 described in the above embodiment.

[0130] The external system 2 includes a temperature regulating device 21, which is connected to the liquid outlet of the temperature control system to receive and regulate the temperature of the circulating liquid.

[0131] In the embodiment of the present application, the circulating liquid supply device 1 of the temperature control system automatically controls the flow rate of the circulating liquid flowing into the liquid tank 11 to replenish the liquid tank 11. In addition, the temperature regulating device 21 regulates the temperature of the circulating liquid drawn from the liquid tank 11, and the temperature-regulated circulating liquid can be output to the external liquid-using device, so that the external liquid-using device can use the temperature-regulated circulating liquid for temperature regulation.

[0132] The temperature control system of the present application can speed up the replenishment of the circulating liquid in the liquid tank 11 when the liquid level is low, and stop replenishing the liquid in time when the liquid level of the circulating liquid in the liquid tank 11 is high, so that the liquid level of the circulating liquid in the liquid tank 11 can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0133] According to some embodiments, reference Fig.10 The external system 2 may further include a liquid pump 22 , a pressure regulating device 23 , and a pressure detecting device 24 .

[0134] The liquid pump 22 includes an input end and an output end. The temperature control device 21 includes a temperature control input end and a temperature control output end. The input end of the liquid pump 22 is connected to the liquid outlet of the liquid tank 11 of the circulating liquid supply device 1, and the output end of the liquid pump 22 is connected to the temperature control input end of the temperature control device 21. The temperature control output end of the temperature control device 21 is used to connect to an external liquid device.

[0135] The liquid pump 22 draws the circulating liquid from the liquid tank 11 and outputs it to the temperature control device 21. The temperature control device 21 adjusts the temperature of the circulating liquid, and the temperature-controlled circulating liquid can be output to the external liquid device. The external liquid device can use the temperature-controlled circulating liquid to adjust the temperature and perform corresponding work.

[0136] According to some embodiments, the temperature adjustment device 21 may include a refrigerator 211 and a heater 212. The refrigerator 211 is used to reduce the temperature of the circulating fluid, and the heater 212 is used to increase the temperature of the circulating fluid.

[0137] Exemplarily, the circulating liquid may be water, and the liquid pump 22 may be a water pump. The circulating liquid may also be other cooling liquids such as oil, which will not be described in detail here.

[0138] According to the exemplary embodiment, one end of the pressure regulating device 23 is also connected to the temperature regulating output end of the temperature regulating device 21 , and the other end of the pressure regulating device 23 is connected to the liquid tank 11 of the circulating liquid supply device 1 .

[0139] Illustratively, a portion of the circulating liquid after temperature control by the temperature control device 21 flows into the external liquid device to be used by the external liquid device. The temperature-controlled circulating liquid that is not used by the external liquid device can be circulated through the pressure regulating device 23 and flow into the liquid tank 11 of the circulating liquid supply device 1, so that the circulating liquid that is not used by the external liquid system can continue to be used, thereby reducing waste.

[0140] For example, the pressure regulating device 23 may be a pressure regulating valve, and the flow rate of the circulating liquid flowing through the pressure regulating device 23 per unit time can be adjusted by adjusting the opening of the pressure regulating valve. The larger the opening, the greater the flow rate.

[0141] According to an exemplary embodiment, the pressure detection device 24 is disposed at the temperature control output end of the temperature control device 21 , and is used to detect the pressure of the circulating fluid at the temperature control output end to output system pressure data.

[0142] Exemplarily, the pressure detection device 24 may specifically include a pressure sensor.

[0143] According to some embodiments, the pressure detection device 24 may further include a temperature sensor to measure the temperature of the circulating fluid at the temperature adjustment output end to output circulating fluid temperature data, which is not limited here.

[0144] According to some embodiments, the pressure detection device 24 may further include a flow sensor to measure the flow rate of the circulating fluid output from the temperature adjustment output end to the external fluid-using device.

[0145] According to the exemplary embodiment, the control device is also electrically connected to the pressure detection device 24, the pressure regulating device 23 and the liquid pump 22, respectively, so as to regulate the opening of the pressure regulating device 23 and the operating frequency of the liquid pump 22 according to the system pressure data measured by the pressure detection device 24, thereby adjusting the pressure of the circulating fluid in the temperature control system.

[0146] Exemplarily, when the pressure of the circulating fluid in the current temperature control system is greater than a first preset pressure upper limit value and lower than a second preset pressure upper limit value (where the second preset pressure upper limit value is greater than the first preset pressure upper limit value), the control device may increase the opening of the pressure regulating valve to speed up the circulation of the circulating fluid, thereby alleviating the pressure of the circulating fluid in the temperature control system.

[0147] When the pressure of the circulating fluid in the current temperature control system is greater than the second preset pressure upper limit value, the control device controls the opening of the pressure regulating valve to become larger, and at the same time, controls the frequency of the liquid pump 22 to reduce the operating frequency of the liquid pump 22 by reducing the first preset frequency value per second, so as to increase the relief of the pressure of the circulating fluid in the temperature control system by controlling the opening of the pressure regulating valve and the frequency of the liquid pump 22 at the same time.

[0148] When the pressure of the circulating fluid in the current temperature control system is less than the first preset pressure lower limit value and greater than the second preset pressure lower limit value (the second preset pressure lower limit value is less than the first preset pressure lower limit value is less than the first preset pressure upper limit value is less than the second preset pressure upper limit value), the control device can reduce the opening of the pressure regulating valve to reduce the circulation speed of the circulating fluid, and then appropriately increase the pressure of the circulating fluid in the temperature control system.

[0149] When the pressure of the circulating fluid in the current temperature control system is less than the second preset pressure lower limit, the control device controls the opening of the pressure regulating valve to become smaller, and at the same time, controls the operating frequency of the liquid pump 22 to increase the operating frequency of the liquid pump 22 by increasing the second preset frequency value per second, so as to appropriately increase the pressure of the circulating fluid in the temperature control system by simultaneously controlling the opening of the pressure regulating valve and the frequency of the liquid pump 22.

[0150] When the pressure of the circulating fluid in the current temperature control system is between the second preset pressure upper limit and the second preset pressure lower limit, the control device controls the working frequency of the liquid pump 22 to adjust the working frequency of the liquid pump 22 by changing the third preset frequency value per second until the working frequency of the liquid pump 22 changes to the preset working frequency, so that the liquid pump 22 can work normally when the pressure of the circulating fluid is normal.

[0151] Furthermore, the first preset frequency value is greater than the third preset frequency value. The second preset frequency value is greater than the third preset frequency value. In the case of abnormal pressure, the frequency of the liquid pump 22 is adjusted quickly to quickly relieve the system pressure. In the case of normal pressure, the frequency of the liquid pump 22 is adjusted slowly to prevent the pressure of the circulating fluid of the system from becoming abnormal again due to a sudden change in the frequency of the liquid pump 22.

[0152] According to another aspect of the present application, an embodiment of the present application provides an integrated circuit process system. The integrated circuit process system may specifically include the temperature control system described in the above embodiment, and also include semiconductor process equipment.

[0153] The semiconductor process equipment is communicated with the temperature regulating device of the temperature control system to receive the temperature-regulated circulating fluid to carry out semiconductor process manufacturing.

[0154] The temperature control system of the semiconductor process equipment of the present application can speed up the replenishment of the circulating liquid in the liquid tank when the liquid level is low, and stop replenishing the liquid in time when the liquid level of the circulating liquid in the liquid tank is high, so that the liquid level of the circulating liquid in the liquid tank can always be within the normal liquid level range. This also reduces the probability of overflow of the circulating liquid due to reduced reliability of the float valve.

[0155] Finally, it should be noted that the above are only preferred embodiments of the present application and are not intended to limit the present application. Although the present application is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions of the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A method for controlling a circulating liquid supply device, characterized in that: The control method is applied to a circulating liquid supply device, and the circulating liquid supply device comprises: The liquid box is provided with a first liquid inlet and a liquid outlet for containing the circulating liquid, and the liquid outlet outputs the circulating liquid; A liquid level sensor is disposed in the liquid tank, detects the liquid level of the circulating liquid in the liquid tank, and outputs liquid level information; a liquid replenishment regulating valve, arranged outside the liquid tank, one end of which is in communication with the first liquid inlet; A main solenoid valve is arranged outside the liquid tank, one end of the main solenoid valve is communicated with the other end of the liquid replenishment regulating valve, and the other end of the main solenoid valve is communicated with an external liquid supply system to receive the circulating liquid transported by the external liquid supply system; A control module, electrically connected to the liquid level sensor, the liquid replenishment regulating valve, and the main circuit solenoid valve; Wherein, the control method comprises: The control module controls the opening and closing states of the liquid replenishment regulating valve and the main circuit solenoid valve according to the liquid level information to adjust the liquid level of the circulating liquid in the liquid tank.

2. The control method according to claim 1, characterized in that: The liquid tank is also provided with a second liquid inlet; The circulating liquid supply device also includes: A standby solenoid valve is arranged outside the liquid tank, one end of the standby solenoid valve is communicated with the second liquid inlet, and the other end of the standby solenoid valve is communicated with one end of the main solenoid valve; Wherein, controlling the opening and closing states of the liquid replenishment regulating valve and the main circuit solenoid valve according to the liquid level information to adjust the liquid level of the circulating liquid in the liquid tank includes: According to the liquid level information, the opening and closing states of the liquid replenishment regulating valve, the main electromagnetic valve and the backup electromagnetic valve are controlled to adjust the liquid level of the circulating fluid in the liquid tank.

3. The control method according to claim 2, characterized in that: According to the liquid level information, the opening and closing states of the liquid replenishment regulating valve, the main electromagnetic valve and the standby electromagnetic valve are controlled to adjust the liquid level of the circulating liquid in the liquid tank, including: According to the liquid level information, determining whether the liquid level of the liquid tank is within a preset liquid level range, wherein the liquid level of the liquid tank is the liquid level of the circulating liquid in the liquid tank; When the liquid level in the liquid tank is higher than the upper limit of the liquid level in the preset liquid level range, controlling the main circuit solenoid valve to close; When the liquid level in the liquid tank is lower than the lower limit of the preset liquid level interval, the main solenoid valve and the standby solenoid valve are controlled to open, and, Controlling the liquid replenishment regulating valve to open at full opening; When the liquid level in the liquid tank is within the preset liquid level range, controlling the main circuit solenoid valve to open; Determining the valve opening value of the liquid replenishment regulating valve according to the liquid level of the liquid tank and the preset target liquid level; The opening of the liquid replenishment regulating valve is determined as the valve opening value to adjust the liquid level of the circulating liquid in the liquid tank.

4. The control method according to claim 3, characterized in that: When the liquid level in the liquid tank is within the preset liquid level range, controlling the main circuit solenoid valve to open includes: Determine a first duration, wherein the first duration is the duration during which the liquid level in the liquid tank is lower than the upper limit of the liquid level in the preset liquid level interval; When the first duration reaches a first preset duration and the liquid level in the liquid tank is within the preset liquid level range, the main circuit solenoid valve is controlled to open.

5. The control method according to claim 3, characterized in that: The control method further comprises: In the case where the liquid level in the liquid tank is higher than the lower limit value of the liquid level in the preset liquid level interval, determining a second duration, wherein the second duration is the duration of the state in which the liquid level in the liquid tank is higher than the lower limit value of the liquid level in the preset liquid level interval; When the second duration reaches a second preset duration, the standby solenoid valve is controlled to be closed.

6. The control method according to claim 3, characterized in that: The circulating liquid supply device also includes: A redundant liquid level sensor, the redundant liquid level sensor is arranged in the liquid tank, and detects the liquid level of the circulating liquid in the liquid tank to output redundant liquid level information; Wherein, judging whether the liquid level of the liquid tank is within a preset liquid level range according to the liquid level information includes: Determine the effective value of the liquid level in the liquid tank according to the liquid level information and the redundant liquid level information; It is determined whether the effective value of the liquid level in the liquid tank is within a preset liquid level interval, so as to determine whether the liquid level in the liquid tank is within the preset liquid level interval.

7. The control method according to claim 6, characterized in that: The determining the effective value of the liquid level in the liquid tank according to the liquid level information and the redundant liquid level information includes: Calculating a liquid level difference between the liquid level information and the redundant liquid level information; When the liquid level difference is not greater than a preset difference, taking the average of the liquid level information and the redundant liquid level information as the effective value of the liquid tank liquid level; In the case where the liquid level difference is greater than the preset difference, a first liquid level change and a second liquid level change are detected, wherein the first liquid level change is the liquid level change detected by the liquid level sensor within a third preset time period, and the second liquid level change is the liquid level change detected by the redundant liquid level sensor within the third preset time period; According to the first liquid level change amount and the second liquid level change amount, determining whether the liquid level sensor and the redundant liquid level sensor are normal liquid level sensors; In the case where a normal liquid level sensor exists between the liquid level sensor and the redundant liquid level sensor, determining the effective value of the liquid level in the liquid tank according to the liquid level information output by the normal liquid level sensor; In the case that there is no normal liquid level sensor among the liquid level sensor and the redundant liquid level sensor, a sensor failure signal is outputted.

8. The control method according to claim 3, characterized in that: Determining the valve opening value of the liquid replenishment regulating valve according to the liquid level of the liquid tank and the preset target liquid level includes: Calculating a valve opening value according to the liquid level in the liquid tank and a preset target liquid level; Get the current outlet flow value, water supply pressure lower limit value and water supply pressure upper limit value; The valve opening value is calculated according to the current outlet flow value, the lower limit value of the water supply pressure, the upper limit value of the water supply pressure and the calculated value of the valve opening.

9. The control method according to claim 8, characterized in that: The calculation formula of the valve opening value is: Wherein, X is the valve opening value; LPID is the calculated value of the valve opening; Q is the current outlet flow value; P LO is the lower limit of the water supply pressure; P HI is the upper limit value of the water supply pressure; It is a functional relationship for calculating the valve opening when the valve pressure is P and the valve flow is Q.

10. A circulating liquid supply device, characterized in that: The circulating liquid supply device comprises: A liquid tank is provided with a first liquid inlet and a liquid outlet for containing circulating liquid, wherein the liquid outlet is connected to an external liquid system to discharge the circulating liquid from the liquid tank to the external liquid system; A liquid level sensor is disposed in the liquid tank, detects the liquid level of the circulating liquid in the liquid tank, and outputs liquid level information; a liquid replenishment regulating valve, arranged outside the liquid tank, one end of which is in communication with the first liquid inlet; A main solenoid valve is arranged outside the liquid tank, one end of the main solenoid valve is communicated with the other end of the liquid replenishment regulating valve, and the other end of the main solenoid valve is communicated with an external liquid supply system to receive the circulating liquid transported by the external liquid supply system; A control module, wherein the control module is used to execute the control method described in any one of claims 1 to 9.

11. A temperature control system, characterized in that: The temperature control system comprises: The circulating liquid supply device according to claim 10; The temperature regulating device is communicated with the liquid outlet of the circulating liquid supply device, receives the circulating liquid output by the circulating liquid supply device, and regulates the temperature of the circulating liquid.

12. A semiconductor process system, characterized in that: The semiconductor process system comprises: The circulating liquid supply device according to claim 10; a temperature regulating device, connected to the liquid outlet, receiving the circulating liquid output by the circulating liquid supply device, and regulating the temperature of the circulating liquid; The semiconductor process equipment is connected to the temperature control device and receives the temperature-controlled circulating liquid to perform semiconductor process manufacturing.

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