Detection device and detection system

Abstract

The application discloses a detection device and a detection system. The detection device comprises a base, a driving mechanism, a transmission mechanism and a probe. The driving mechanism is installed on the base. The transmission mechanism is installed on the base and connected with the driving mechanism. The transmission mechanism comprises a connecting rod assembly and a sleeve assembly. The connecting rod assembly is connected with the driving mechanism. The sleeve assembly is sleeved on at least part of the connecting rod assembly and movably connected with the connecting rod assembly. The probe is connected with the connecting rod assembly. After the driving mechanism is started, the driving mechanism comprises a first stage and a second stage. In the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously. In the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of integrated circuit manufacturing, and particularly relates to a detection device and a detection system. BACKGROUND

[0002] In the manufacturing process of integrated circuits, different patterns in different processes and different steps need to be positioned and aligned, so that overlay and critical dimension uniformity need to be measured and controlled.

[0003] In the measurement process, a scanning electron microscope is generally used to measure the critical dimension of the surface or shallow layer, and a backscattered electron detector is inserted to collect backscattered electrons. When the backscattered electron detector is inserted, it needs to move to the specified position as much as possible and cannot interfere with other components in the cavity. SUMMARY

[0004] Embodiments of the present application provide a detection device and a detection system, aiming to improve the movement dimension of the detection device.

[0005] Embodiments of the first aspect of the present application provide a detection device, which comprises a base, a driving mechanism, a transmission mechanism and a probe. The driving mechanism is installed on the base. The transmission mechanism is installed on the base and connected with the driving mechanism. The transmission mechanism comprises a connecting rod assembly and a sleeve assembly. The connecting rod assembly is connected with the driving mechanism, and the sleeve assembly is sleeved at least partially outside the connecting rod assembly and movably connected with the connecting rod assembly. The probe is connected with the connecting rod assembly. After the driving mechanism is started, it comprises a first stage and a second stage. In the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously. In the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

[0006] According to the embodiments of the first aspect of the present application, in the first stage, the probe, the connecting rod assembly and the sleeve assembly move synchronously along a first direction; in the second stage, the probe and the connecting rod assembly move synchronously along a second direction, and the first direction is different from the second direction.

[0007] According to the embodiments of the first aspect of the present application, the base is provided with a positioning member. The sleeve assembly comprises an abutting plate. The positioning member and the abutting plate are spaced apart along the first direction. In the first stage, the abutting plate moves along the first direction to approach the positioning member. In the second stage, the positioning member and the abutting plate abut and prevent the abutting plate from continuing to move along the first direction.

[0008] According to the embodiments of the first aspect of the present application, the transmission mechanism further comprises an elastic member connected between the driving mechanism and the sleeve assembly. In the first stage, the driving mechanism drives the sleeve assembly to move synchronously along the first direction through the elastic member. In the second stage, the sleeve assembly stops moving relative to the base, and the elastic member is compressed by the action force of the driving mechanism.

[0009] According to the embodiment of the first aspect of the present application, the sleeve assembly further comprises: a first sleeve extending in the first direction, and the abutting plate is mounted on the outer circumferential surface of the first sleeve; and a second sleeve directly or indirectly connected with the first sleeve, the second sleeve extending in the second direction.

[0010] According to the embodiment of the first aspect of the present application, the positioning member is provided with a through hole, the first sleeve passes through the through hole, and the abutting plate is located on the side of the positioning member away from the second sleeve.

[0011] According to the embodiment of the first aspect of the present application, the connecting rod assembly comprises: a first connecting rod connected with the driving mechanism, the first connecting rod extending in the first direction, and at least part of the first connecting rod being located in the first sleeve; and a second connecting rod directly or indirectly rotationally connected with the first connecting rod at one end and connected with the probe at the other end, the second connecting rod extending in the second direction, and at least part of the second connecting rod being located in the second sleeve.

[0012] According to the embodiment of the first aspect of the present application, further comprising: an elastic sealing tube mounted on the base, the two ends of the elastic sealing tube being sealingly connected with the driving mechanism and the base respectively, and the elastic sealing tube being sleeved on the transmission mechanism to seal the transmission mechanism.

[0013] According to the embodiment of the first aspect of the present application, the driving mechanism comprises: a driving member mounted on the base; and a driving rod connected with the driving member and the transmission mechanism, the driving mechanism driving the transmission mechanism to move after being started.

[0014] The detection device of the embodiment of the present application connects the driving mechanism with the probe through the transmission mechanism, the transmission mechanism comprises a connecting rod assembly and a sleeve assembly, and the driving mechanism comprises a first stage and a second stage after being started, in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, and in the second stage, the driving mechanism only drives the probe and the connecting rod assembly to move, which significantly improves the movement dimension of the detection device and further improves the collection ability of the detection device for backscattered electrons. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments of the present application will be briefly introduced below, and other drawings can also be obtained by those of ordinary skill in the art without creative labor on the basis of these drawings.

[0016] Figure 1 It is a front view and a sectional view schematic diagram of a detection system of some embodiments of the present application;

[0017] Figure 2 It is a structural schematic diagram of an example of a detection device;

[0018] Figure 3 It is a front view and a sectional view schematic diagram of an example of a detection device;

[0019] Figure 4 A cross-sectional view of an example drive mechanism and probe from another perspective is shown.

[0020] Figure 5 A cross-sectional view of an example sleeve assembly from another perspective is shown.

[0021] Reference signs:

[0022] 10, detection system; 11, probe device; 12, scanning electron microscope; 13, cover; 14, vacuum cavity;

[0023] 100, base; 110, positioning member;

[0024] 200, drive mechanism; 210, driving member; 220, driving rod;

[0025] 300, drive mechanism; 310, linkage assembly; 311, first linkage; 312, second linkage; 313, third linkage; 320, sleeve assembly; 321, abutting plate; 322, first sleeve; 323, second sleeve; 324, third sleeve; 330, elastic member;

[0026] 400, probe;

[0027] 500, elastic sealing tube; 510, upper flange; 520, lower flange;

[0028] x, first direction; y, second direction. DETAILED DESCRIPTION

[0029] The features and exemplary embodiments of the various aspects of the present application will be described in detail below with reference to the drawings. The following detailed description is merely intended to explain the present application, and is not intended to limit the present application. The present application can be implemented without some of the specific details, which are well known to those skilled in the art. The following description of the embodiments is merely intended to provide a better understanding of the present application by showing examples of the present application.

[0030] It is to be understood that the terminology used herein such as first and second, and the like, is only used to distinguish one from another entity or action, and does not necessarily require or imply any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0031] To solve the defects mentioned in the background, the application provides a detection device, the detection device comprises a base, a driving mechanism, a transmission mechanism and a probe, the driving mechanism is installed on the base; the transmission mechanism is installed on the base, the transmission mechanism is connected with the driving mechanism, the transmission mechanism comprises a connecting rod assembly and a sleeve assembly, the connecting rod assembly is connected with the driving mechanism, and the sleeve assembly is sleeved at least part of the connecting rod assembly and is movably connected with the connecting rod assembly; the probe is connected with the connecting rod assembly; wherein the driving mechanism comprises a first stage and a second stage after starting, in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, in the second stage, the sleeve assembly stops moving relative to the base, and the driving mechanism drives the probe and the connecting rod assembly to move.

[0032] The detection device provided by the application connects the driving mechanism and the probe through the transmission mechanism, the transmission mechanism comprises a connecting rod assembly and a sleeve assembly, and the driving mechanism comprises a first stage and a second stage after starting, in the first stage, the driving mechanism drives the probe, the connecting rod assembly and the sleeve assembly to move synchronously, in the second stage, the driving mechanism only drives the probe and the connecting rod assembly to move, which significantly improves the movement dimension of the detection device, and further improves the collection capacity of the detection device for backscattered electrons.

[0033] To better understand the application, first, the detection system comprising the detection device provided by the application is simply described in combination with the drawings. In this description, the x direction in the drawings is the first direction, and the y direction is the second direction. In the drawings, the size in the drawings is not necessarily proportional to the actual size for the convenience of drawing.

[0034] Please refer to Figure 1 , Figure 1 It is a front view and a schematic view of the detection system of some embodiments of the application.

[0035] As Figure 1As shown, the detection system 10 comprises a probe device 11, a housing and a scanning electron microscope 12. The housing comprises a cover 13, and encloses a vacuum cavity 14 in which a material to be detected, such as a wafer (not shown), is placed. The probe device 11 and the scanning electron microscope 12 are mounted on the housing. In this embodiment, the probe device 11 and the scanning electron microscope 12 are both mounted on the cover 13.

[0036] Having described the overall configuration of the detection system, the probe device will be described in detail below with reference to the accompanying drawings.

[0037] Please refer to Figure 1 and Figure 2 , Figure 1 which are front sectional views of the detection system according to some embodiments of the present application. Figure 2 which is a structural schematic view of an example probe device.

[0038] As shown in Figure 1 and Figure 2 , the present embodiment provides a probe device 11, which comprises a base 100, a driving mechanism 200, a transmission mechanism 300 and a probe head 400. The driving mechanism 200 is mounted on the base 100. The transmission mechanism 300 is mounted on the base 100 and connected to the driving mechanism 200. The transmission mechanism 300 comprises a linkage assembly 310 and a sleeve assembly 320. The linkage assembly 310 is connected to the driving mechanism 200, and the sleeve assembly 320 is sleeved at least partially outside the linkage assembly 310 and movably connected to the linkage assembly 310. The probe head 400 is connected to the linkage assembly 310. The driving mechanism 200 comprises a first stage and a second stage after being started. In the first stage, the driving mechanism 200 drives the probe head 400, the linkage assembly 310 and the sleeve assembly 320 to move synchronously. In the second stage, the sleeve assembly 320 stops moving relative to the base, and the driving mechanism 200 drives the probe head 400 and the linkage assembly 310 to move.

[0039] The base 100 can also be understood as a mounting surface of the probe device 11 on the cover 13. The probe head 400 is located in the vacuum cavity 14 and used for collecting backscattered electrons.

[0040] Optionally, the base 100 is not necessarily a single component, but can also be multiple independent and position-fixed components. For example, the base 100 that carries the driving mechanism 200 and the transmission mechanism 300 can be two independent bases, but the two bases are position-fixed relative to each other, so that the two bases can be regarded as a whole.

[0041] Optionally, in order to realize the detection function, the probe head 400 is located in the vacuum cavity 14. In order to facilitate adjustment and maintenance, the driving mechanism 200 is located outside the vacuum cavity 14.

[0042] The probe device 11 of the embodiment of the present application connects the driving mechanism 200 and the probe 400 through the transmission mechanism 300, and makes the driving mechanism 200 include a first stage and a second stage after being started. In the first stage, the driving mechanism 200 drives the probe 400, the connecting rod assembly 310 and the sleeve assembly 320 to move synchronously, and in the second stage, the driving mechanism 200 drives only the probe 400 and the connecting rod assembly 310 to move, which significantly improves the movement dimension of the probe device 11, and further improves the collection capacity of the probe device 11 for backscattered electrons.

[0043] Please refer to Figures 1 to 3 , Figure 3 A front view cross-sectional schematic diagram of an example probe device is shown.

[0044] As shown in Figures 1 to 3 , in some optional embodiments, in the first stage, the probe 400, the connecting rod assembly 310 and the sleeve assembly 320 move synchronously along a first direction (x direction in the figure). In the second stage, the probe 400 and the connecting rod assembly 310 move synchronously along a second direction (y direction in the figure). The first direction x and the second direction y are different.

[0045] Optionally, the included angle between the first direction x and the second direction y is an acute angle.

[0046] The probe device 11 of the embodiment of the present application further improves the movement dimension of the probe device 11, and further improves the collection capacity of the probe device 11 for backscattered electrons, by making the driving mechanism 200 drive the probe 400 to move along the first direction x and the second direction y respectively through the transmission mechanism 300 in the first stage and the second stage.

[0047] In some optional embodiments, the driving mechanism 200 includes a driving member 210 and a driving rod 220, the driving member 210 is installed on the base 100, and the driving rod 220 connects the driving member 210 and the transmission mechanism 300. After being started, the driving mechanism 200 drives the driving rod 220 to move the transmission mechanism 300.

[0048] Optionally, the driving rod 220 moves along the first direction x.

[0049] Optionally, the driving member 210 is a rodless cylinder. The rodless cylinder is a mechanism that connects the outside world directly or indirectly through a piston, which can effectively save space.

[0050] In some optional embodiments, the probe device 11 further includes an elastic sealing tube 500, the elastic sealing tube 500 is installed on the base 100, and the two ends of the elastic sealing tube 500 are sealingly connected with the driving mechanism 200 and the base 100 respectively. The elastic sealing tube 500 is sleeved outside the transmission mechanism 300 for sealing the transmission mechanism 300.

[0051] Optionally, the elastic sealing tube 500 is a bellows, and the elastic sealing tube 500 is in a vacuum environment. The elastic sealing tube 500 extends along the first direction x, and the two ends of the elastic sealing tube 500 in the first direction x are respectively provided with an upper flange 510 and a lower flange 520. The upper end surface of the upper flange 510 is in sealing connection with the driving rod 220, and the lower end surface of the lower flange 520 is in sealing connection with the base 100. The elastic sealing tube 500 is located outside the vacuum cavity 14, but the cavity in the elastic sealing tube 500 is in communication with the vacuum cavity 14, so that the transmission mechanism 300 is in a vacuum environment. When the driving member 210 is started, the driving rod 220 moves into the vacuum cavity 14 along the first direction x, the upper flange 510 moves synchronously with the driving rod 220, and the upper flange 510 moves towards the lower flange 520, so that the elastic sealing tube 500 is compressed.

[0052] The detection device 11 of the embodiment of the application is provided with the elastic sealing tube 500 outside the transmission mechanism 300, so that the elastic sealing tube 500 can move with the driving rod 220 and ensure that the transmission mechanism 300 is in a vacuum environment, thereby realizing transmission of the driving force into the vacuum cavity 14 without damaging the sealing property of the vacuum cavity 14.

[0053] In some optional embodiments, the base 100 is provided with a positioning member 110. The sleeve assembly 320 includes an abutting plate 321, and the positioning member 110 and the abutting plate are arranged at intervals along the first direction x. In the first stage, the abutting plate 321 moves towards the positioning member 110 along the first direction x. In the second stage, the positioning member 110 and the abutting plate 321 abut and prevent the abutting plate 321 from continuing to move along the first direction x. The positioning member 110 can be in any form such as a positioning block, a positioning plate, a positioning ring, etc., as long as it can realize the function of preventing the abutting plate 321 from continuing to move along the first direction x when the positioning member 110 abuts the abutting plate 321.

[0054] Optionally, the positioning member 110 is connected with the lower end surface of the lower flange 520, and the positioning member 110 is located outside the elastic sealing tube 500. At the same time, the positioning member 110 is located in the vacuum cavity 14, and the lower flange 520 is fixedly connected with the positioning member 110, so that the positions of the lower flange 520 and the positioning member 110 are fixed after the driving mechanism 200 is started. The lower flange 520 is provided with a through hole (not marked) for the sleeve assembly 320 to pass through.

[0055] Optionally, the transmission mechanism 300 further includes an elastic member 330, and the elastic member 330 is connected with the driving mechanism 200 and the sleeve assembly 320.

[0056] Optionally, the elastic member 330 is a spring, one end of which is connected to the lower end surface of the upper flange 510, and the other end of which is connected to the sleeve assembly 320. Since the upper flange 510 is fixedly connected to the driving rod 220, the elastic member 330 is connected to the driving mechanism 200 through the upper flange 510. The elastic member 330 is used as a transmission member between the driving mechanism 200 and the sleeve assembly 320 in the first stage, and the driving mechanism 200 drives the sleeve assembly 320 to move synchronously along the first direction x. In the second stage, the elastic member 330 is compressed and accumulates elastic potential energy under the action of the driving mechanism 200. Until the driving mechanism 200 stops, the elastic member 330 releases the elastic potential energy when the driving rod 220 is withdrawn, and the sleeve assembly 320 and the linkage assembly 310 are reset along the opposite path. When the elastic member 330 releases the elastic potential energy, the sleeve assembly 320 is fixed in position, and the first linkage 311 moves relative to the sleeve assembly 320. After the elastic member 330 is reset, the sleeve assembly 320 and the linkage assembly 310 move synchronously.

[0057] In the embodiment, the elastic member 330 is partially sleeved outside the sleeve assembly 320, and one end of the elastic member 330 is connected to the abutting plate 321. Of course, the elastic member 330 can also be connected to other positions of the sleeve assembly 320.

[0058] Optionally, the elastic member 330 can also be an elastic rubber block or an elastic sponge block.

[0059] The probe device 11 of the embodiment of the application is provided with the positioning member 110 and the abutting plate 321 which are spaced apart along the first direction x, and the elastic member 330 which connects the driving mechanism 200 and the sleeve assembly 320. Since the positioning member 110 is fixed in position, the abutting plate 321 is driven by the driving mechanism 200, so that the sleeve assembly 320 and the linkage assembly 310 can be driven by the driving mechanism 200 to move synchronously before the abutting plate 321 abuts against the positioning member 110. When the abutting plate 321 abuts against the positioning member 110, the positioning member 110 limits the abutting plate 321 from moving further into the vacuum cavity 14 along the first direction x. When the driving mechanism 200 continues to operate, the linkage assembly 310 continues to move, while the sleeve assembly 320 is fixed in position and the elastic member 330 is compressed, thereby realizing different states between the linkage assembly 310 and the sleeve assembly 320 in the two operating stages.

[0060] Please refer to Figures 1 to 5 , Figure 4 a cross-sectional view of the transmission mechanism and the probe in another perspective view of an example is shown; Figure 5 a cross-sectional view of the sleeve assembly in another perspective view of an example is shown. In the view, Figure 5 the abutting plate in

[0061] As Figures 1 to 5In some optional embodiments, the sleeve assembly 320 further comprises a first sleeve 322 and a second sleeve 323. The first sleeve 322 extends along the first direction x, and the abutting plate 321 is mounted on the outer circumferential surface of the first sleeve 322. The second sleeve 323 is directly or indirectly connected with the first sleeve 322, and the second sleeve 323 extends along the second direction y. The connecting rod assembly 310 comprises a first connecting rod 311 and a second connecting rod 312. The first connecting rod 311 is connected with the driving mechanism 200, and the first connecting rod 311 extends along the first direction x and is at least partially located in the first sleeve 322. The second connecting rod 312 is directly or indirectly rotationally connected with the first connecting rod 311 at one end, and is connected with the probe 400 at the other end. The second connecting rod 312 extends along the second direction x and is at least partially located in the second sleeve 323.

[0062] Optionally, the end of the first connecting rod 311 away from the second connecting rod 312 is connected with the lower end surface of the upper flange 510, and is connected with the driving mechanism 200 through the upper flange 510. The end of the second connecting rod 312 away from the first connecting rod 311 is connected with the probe 400.

[0063] Optionally, the positioning member 110 is provided with a through hole (not labeled), and the first sleeve 322 passes through the through hole, and the abutting plate 321 is located on the side of the positioning member 110 away from the second sleeve 323.

[0064] In the second stage, since the sleeve assembly 320 is fixed in position, the connecting rod assembly 310 is still driven by the driving mechanism 200. The first connecting rod 311 is connected with the driving mechanism 200 and is partially located in the first sleeve 322, and is thus still moved along the first direction x under the limiting action of the first sleeve 322. The second connecting rod 312 is rotationally connected with the first connecting rod 311 and is partially located in the second sleeve 323, and the second sleeve 323 extends along the second direction y. The second connecting rod 312 is pushed by the first connecting rod 311, but is simultaneously limited by the second sleeve 323, and thus rotates relative to the first connecting rod 311 and moves along the extension direction of the second sleeve 323, i.e., the second connecting rod 312 moves along the second direction y.

[0065] In other embodiments, the abutting plate 321 can also be directly connected with the driving mechanism 200 and is driven by the driving mechanism 200 to move along the first direction x to approach the positioning member 110 in the first stage. The first sleeve 322 and the second sleeve 323 are both connected with the abutting plate 321 and move synchronously with the abutting plate 321.

[0066] The detection device 11 of the embodiment of the application, by setting the first sleeve 322 and the second sleeve 323 extending along the first direction x and the second direction y respectively, and the first connecting rod 311 and the second connecting rod 312 directly or indirectly connected and rotated, so that in the second stage, the second connecting rod 312 is simultaneously driven by the first connecting rod 311 and limited by the second sleeve 323, and moves along the extension direction of the second sleeve 323, and further drives the probe 400 to move along the second direction y.

[0067] In some optional embodiments, the connecting rod assembly 310 further comprises a third connecting rod 313, one end of the third connecting rod 313 is rotationally connected with the first connecting rod 311, and the other end is rotationally connected with the second connecting rod 312, so that the first connecting rod 311 and the second connecting rod 312 are rotationally connected through the third connecting rod 313. The sleeve assembly 320 further comprises a third sleeve 324, the third sleeve 324 is located between the first sleeve 322 and the second sleeve 323 and connects the first sleeve 322 and the second sleeve 323, and the third sleeve 324 extends in an arc shape.

[0068] Optionally, the third connecting rod 313 extends in a straight line or an arc shape, and at least part of the third connecting rod 313 is located in the third sleeve 324.

[0069] In the second stage, the first connecting rod 311 still moves along the first direction x, the third connecting rod 313 is pushed by the first connecting rod 311 to move along the first direction x first, until the connecting position of the third connecting rod 313 and the second connecting rod 312 abuts against the side wall of the third sleeve 324, and rotates relative to the first connecting rod 311 and the second connecting rod 312 respectively under the traction of the third sleeve 324 extending in an arc shape, and then the third connecting rod 313 converts the driving force of the first connecting rod 311 along the first direction x into the driving force of the second connecting rod 312 moving along the second direction y.

[0070] The detection device 11 of the embodiment of the application, by setting the third sleeve 324 to connect the first sleeve 322 and the second sleeve 323, and setting the third connecting rod 313 to rotationally connect the first connecting rod 311 and the second connecting rod 312, so that the third connecting rod 313 can serve as a transition connecting rod to improve the smoothness of the movement of the first connecting rod 311 and the second connecting rod 312 in the sleeve assembly 320, and at the same time, by means of the limiting action of the third sleeve 324, the third connecting rod 313 converts the driving force of the first connecting rod 311 moving along the first direction x into the driving force of the second connecting rod 312 moving along the second direction y.

[0071] In addition, the application further provides a detection system 10, comprising a shell, a scanning electron microscope 12 and the detection device 11 of any of the above embodiments. The shell comprises a cover 13, and the shell encloses a vacuum cavity 14. The vacuum cavity 14 is used to place materials to be detected, such as a wafer. The probe 400 is located in the shell and faces the materials to be detected. The driving mechanism 200 is located outside the shell. The elastic sealing tube 500 connects the driving mechanism 200 and the transmission mechanism 300. The elastic sealing tube 500 is in a vacuum environment, which is used to isolate the external atmospheric environment from the vacuum cavity 14 while transmitting power.

[0072] Since the detection system 10 provided by the second aspect of the application comprises the detection device 11 of any of the above embodiments, the detection device 11 provided by the second aspect of the application has the beneficial effects of the detection device 11 of any of the above embodiments, which will not be described here.

[0073] The above is only a specific implementation of the application. Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the system, module and unit described above can refer to the corresponding process in the foregoing method embodiments, which will not be described here. It should be understood that the protection scope of the application is not limited to this. Any person skilled in the art can easily think of various equivalent modifications or replacements within the technical range disclosed by the application, and these modifications or replacements should be covered within the protection scope of the application.

Claims

1. A detection device (11), characterized in that The utility model relates to a kind of detection device, including: Base (100); Driving mechanism (200), installed in the base (100); Transmission mechanism (300), installed in the base (100), the transmission mechanism (300) is connected with the driving mechanism (200), the transmission mechanism (300) includes connecting rod assembly (310) and sleeve assembly (320), the connecting rod assembly (310) is connected the driving mechanism (200), the sleeve assembly is at least partially outside the connecting rod assembly (310) and is movably connected with the connecting rod assembly (310); Probe (400), connected with the connecting rod assembly (310); Wherein, the driving mechanism (200) after starting includes first stage and second stage, in the first stage, the driving mechanism (200) drives the probe (400), the connecting rod assembly (310) and the sleeve assembly (320) synchronous motion, in the second stage, the sleeve assembly (320) relative to the base (100) stop motion, the driving mechanism (200) drives the probe (400) and the connecting rod assembly (310) motion; The detection device (11) further includes elastic sealing tube (500), the elastic sealing tube (500) is installed in the base (100), both ends of the elastic sealing tube (500) are sealedly connected with the driving mechanism (200) and the base (100) respectively, the elastic sealing tube (500) is set in the transmission mechanism (300) outside to seal the transmission mechanism (300).

2. The probe device (11) according to claim 1, characterized in that In the first stage, the probe (400), the connecting rod assembly (310) and the sleeve assembly (320) are synchronously moved along the first direction;In the second stage, the probe (400) and the connecting rod assembly (310) are synchronously moved along the second direction, and the first direction is different from the second direction.

3. The probe device (11) according to claim 2, characterized in that The base (100) is provided with a positioning member (110); The sleeve assembly (320) includes an abutting plate (321), and the positioning member (110) and the abutting plate (321) are spaced apart along the first direction, in the first stage, the abutting plate (321) is close to the positioning member (110) along the first direction;In the second stage, the positioning member (110) and the abutting plate (321) abut and prevent the abutting plate (321) from continuing to move along the first direction.

4. The probe device (11) according to claim 3, characterized in that The transmission mechanism (300) further includes: Elastic member (330), connecting the driving mechanism (200) and the sleeve assembly (320);In the first stage, the driving mechanism (200) drives the sleeve assembly (320) to move synchronously along the first direction through the elastic member (330), in the second stage, the sleeve assembly (320) relative to the base (100) stop motion, and the elastic member (330) is compressed by the action force of the driving mechanism (200).

5. The probe device (11) according to claim 3, characterized in that The sleeve assembly (320) further includes: A first sleeve (322) extends along the first direction, and the abutting plate (321) is mounted on the outer circumferential surface of the first sleeve (322); A second sleeve (323) is directly or indirectly connected with the first sleeve (322), and the second sleeve (323) extends along the second direction.

6. The probe device (11) according to claim 5, characterized in that The positioning member (110) is provided with a through hole; The first sleeve (322) passes through the through hole, and the abutting plate (321) is located on the side of the positioning member (110) away from the second sleeve (323).

7. The probe device (11) according to claim 5, characterized in that The linkage assembly (310) comprises: A first linkage (311) connected with the driving mechanism (200), the first linkage (311) extends along the first direction, and at least part of the first linkage (311) is located in the first sleeve (322); A second linkage (312) directly or indirectly connected with the first linkage (311) at one end, and connected with the probe (400) at the other end, the second linkage (312) extends along the second direction, and at least part of the second linkage (312) is located in the second sleeve (323).

8. The probe device (11) according to claim 1, characterized in that The driving mechanism (200) comprises: A driving member (210) mounted on the base (100); A driving rod (220) connected with the driving member (210) and the transmission mechanism (300), the driving rod (220) drives the transmission mechanism (300) to move after the driving mechanism (200) is started.

9. A detection system (10), characterized by The scanning electron microscope (12) and the probe device (11) as claimed in any one of claims 1 to 8 are comprised in a housing, the probe (400) is located in the housing, and the driving mechanism (200) is located outside the housing.

Images