Lens adjusting device
By adopting a leaf spring structure and a horizontal adjustment mechanism in the lens adjustment mechanism, the problems of complex structure and poor motion decoupling in the prior art are solved, and the precise displacement and fine adjustment of the lens in multiple directions are achieved, and the imaging quality is improved.
Patent Information
- Application Number
- CN202510002813.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2025-04-18
AI Technical Summary
The existing lens adjustment mechanism has a complex structure and requires four motors to drive it. Crosstalk is prone to occur during movement, and the motion decoupling is poor.
Using a leaf spring structure and a horizontal adjustment mechanism, the lens is accurately displaced and fine-tuned in multiple directions by setting a disjoint cutting groove and leaf spring structure on the mirror seat.
The precise displacement of the lens in the horizontal and vertical directions is achieved, the number of motors is reduced, crosstalk is avoided, and motion decoupling and imaging quality are improved.
Smart Images

Figure CN119846797A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a lens adjustment device. Background Art
[0002] In imaging lenses, due to the manufacturing and assembly errors of the lenses and the influence of changes in internal and external environments such as temperature, humidity, and pressure on the imaging quality, it is necessary to adjust the angle of the lenses to compensate for the image quality. Most of the current lens adjustment mechanisms can only achieve horizontal or vertical adjustment. In the prior art, the lenses are supported by three drive units, each of which includes a first motor and a second motor. The horizontal adjustment is achieved through the combined movement of the motors, but the structure is complex and requires four motors to drive. Crosstalk is prone to occur during the movement, and the motion decoupling is poor.
[0003] Based on this, a new technical solution is needed. Summary of the invention
[0004] In view of this, an embodiment of the present specification provides a lens adjustment device, in which the position of the lens is adjusted by a leaf spring structure and a horizontal adjustment mechanism arranged on the lens holder. The leaf spring structure used in the present application can withstand forces in multiple directions, so that the lens can be tilted at a certain angle to compensate for image quality, solving the problems of complex structure and poor motion decoupling in the prior art.
[0005] The embodiments of this specification provide the following technical solutions:
[0006] The embodiment of the present specification provides a lens adjustment device, comprising: a lens, a lens holder, a lens barrel, a horizontal adjustment mechanism and a vertical adjustment mechanism.
[0007] The lens is fixed in the center of the lens seat, and the lens seat is fixedly connected to the lens barrel.
[0008] The lens barrel is provided with the horizontal adjustment mechanism and the vertical adjustment mechanism respectively.
[0009] The mirror base is formed with a first cutting groove and a second cutting groove which do not intersect each other, and there is an overlapping portion between the first cutting groove and the second cutting groove, and the overlapping portion forms a leaf spring structure.
[0010] The mirror base is also formed with a third cutting groove and a fourth cutting groove which do not intersect each other, and there is an overlapping portion between the third cutting groove and the fourth cutting groove, and the overlapping portion forms a leaf spring structure.
[0011] The horizontal adjustment mechanism drives the leaf spring structure formed between the first cutting groove and the second cutting groove to drive the mirror base to move along the second direction, and the horizontal adjustment mechanism drives the leaf spring structure formed between the third cutting groove and the fourth cutting groove to drive the mirror base to move along the first direction.
[0012] The vertical adjustment mechanism is used to drive the mirror base to move along the third direction.
[0013] Preferably, a first leaf spring structure and a second leaf spring structure are formed between the first cutting groove and the second cutting groove, and the first leaf spring structure is symmetrical and parallel to the second leaf spring structure in a first direction.
[0014] A third leaf spring structure and a fourth leaf spring structure are formed between the third cutting groove and the fourth cutting groove, and the third leaf spring structure is symmetrical and parallel to the fourth leaf spring structure in the second direction.
[0015] Preferably, the first cutting groove, the second cutting groove, the third cutting groove and the fourth cutting groove are U-shaped grooves.
[0016] Preferably, the level adjustment mechanism comprises a first level adjustment mechanism and a second level adjustment mechanism.
[0017] The first horizontal adjustment mechanism comprises a first motor and a first push rod, wherein one end of the first push rod is connected to the first motor, and the other end of the first push rod is driven by the first motor to contact the leaf spring structure formed between the third cutting groove and the fourth cutting groove, so that the mirror seat moves along the first direction;
[0018] The second horizontal adjustment mechanism includes a second motor and a second push rod. In the second horizontal adjustment mechanism, one end of the second push rod is connected to the second motor, and the other end is driven by the second motor to contact the leaf spring structure formed between the first cutting groove and the second cutting groove, so that the mirror seat moves along the second direction.
[0019] Preferably, the lens adjustment device further comprises two layers of centering springs, which are respectively arranged on the first side and the second side of the lens base.
[0020] The first end of the centering spring is fixed to the lens seat via an inner pressure ring, and the second end of the centering spring is fixed to the lens barrel via an outer pressure ring.
[0021] Preferably, the vertical adjustment mechanism includes a third motor, a third push rod, a rotating member, a flexible bearing, a support frame, a first fixed seat and a second fixed seat.
[0022] The rotating member is provided with a first through hole, the flexible bearing passes through the first through hole and both ends of the flexible bearing are respectively fixed on the supporting frame.
[0023] One end of the third push rod is connected to the third motor, and the other end is in contact with the rotating member. The rotating member can rotate around the flexible bearing. Under the drive of the third motor, the movement of the third push rod in the first direction is converted into the movement in the third direction.
[0024] The first fixing seat is fixed to the first side of the mirror seat,
[0025] The second fixing seat is fixed on the second side of the mirror seat.
[0026] Preferably, the flexible bearing comprises a first part, a second part and a third part.
[0027] The first part and the third part are fixed to the support frame by gluing.
[0028] The second portion is fixed to the rotating member by gluing.
[0029] Preferably, the rotating member is provided with a groove, a steel ball is provided inside the groove, and the rotating member is connected to the first fixing seat via the steel ball.
[0030] The rotating member is in an inverted L shape.
[0031] Preferably, the horizontal adjustment mechanism and the vertical adjustment mechanism further include an elastic component.
[0032] Preferably, a sealing ring is sleeved on the push rod to achieve sealing inside the lens barrel.
[0033] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above technical solutions adopted in the embodiments of this specification include at least:
[0034] 1. The adjustment mechanism used in this application can achieve the displacement of the lens in the horizontal and vertical directions;
[0035] 2. The leaf spring structure used in this application has a certain toughness and can withstand forces in multiple directions;
[0036] 3. The adjustment mechanism used in this application is highly accurate and can move the lens accurately in the X, Y, and Z directions to achieve a fine-tuning effect, resulting in better imaging quality;
[0037] 4. The structure of this application is simple, and movement in one direction can be achieved with only one motor;
[0038] 5. The adjustment mechanism of the present application is not prone to crosstalk during movement and has good motion decoupling. BRIEF DESCRIPTION OF THE DRAWINGS
[0039] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0040] Figure 1 It is a schematic diagram of the overall structure of the lens adjustment device in the present application;
[0041] Figure 2 is a schematic diagram of the lens seat structure of the lens adjustment device in the present application;
[0042] Figure 3 It is a schematic diagram of the centering spring structure of the lens adjustment device in the present application;
[0043] Figure 4 It is a schematic diagram of the installation structure of the centering spring and the lens seat of the lens adjustment device in the present application;
[0044] Figure 5 is a cross-sectional view of the installation of the centering spring of the lens adjustment device in the present application;
[0045] Figure 6a is a cross-sectional view of the lens adjustment device in the present application moving in the X direction;
[0046] Figure 6b It is an enlarged view of the X-direction movement cross section of the lens adjustment device in the present application;
[0047] Figure 6c It is an enlarged view of the X-direction movement cross section of the lens adjustment device in the present application;
[0048] Figure 7a is a cross-sectional view of the Y-direction movement of the lens adjustment device in the present application;
[0049] Figure 7b It is an enlarged cross-sectional view of the Y-direction movement of the lens adjustment device in the present application;
[0050] Figure 7c It is an enlarged cross-sectional view of the Y-direction movement of the lens adjustment device in the present application;
[0051] Figure 8a is a cross-sectional view of the Z-direction movement of the lens adjustment device in the present application;
[0052] Figure 8b It is an enlarged cross-sectional view of the Z-direction movement of the lens adjustment device in the present application;
[0053] Fig. 9is a structural diagram of a rotating part of a lens adjustment device in the present application;
[0054] Fig.10 is a structural diagram of a support frame of a lens adjustment device in the present application;
[0055] Fig.11 is a structural diagram of a flexible bearing of a lens adjustment device in the present application;
[0056] Fig.12 It is a schematic diagram of the installation structure of the Z-direction motion mechanism of the lens adjustment device in the present application;
[0057] Reference numerals: 100-1-outer ring, 100-2-first motor, 100-3-second motor, 200-lens barrel, 300-centering spring, 310-inner pressure ring, 320-outer pressure ring, 400-lens seat, 400a-outer ring, 400b-middle ring, 400c-inner ring, 441-first cutting groove, 442-second cutting groove, 443-third cutting groove, 444-fourth cutting groove, 450A-first leaf spring structure, 450B-second leaf spring structure, 460A-third leaf spring structure, 460B-fourth leaf spring structure, 50 0-lens, 611-second pressure rod, 612-spring, 613-second push rod, 614-sealing ring, 621-first pressure rod, 622-spring, 623-first push rod, 631-first fixed seat, 632-steel ball, 633-support frame, 634-flexible bearing, 634a-first part of flexible bearing, 634b-second part of flexible bearing, 634c-third part of flexible bearing, 635-rotating part, 636-third push rod, 637-spring, 638-second fixed seat, 639-first through hole, 640-groove. DETAILED DESCRIPTION
[0058] The embodiments of the present application are described in detail below with reference to the accompanying drawings.
[0059] The following describes the implementation methods of the present application through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation methods, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, in the absence of conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work belong to the scope of protection of the present application.
[0060] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present application, it should be understood by those skilled in the art that an aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspect described herein can be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein can be used to implement this device and / or practice this method.
[0061] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present application. The drawings only show components related to the present application rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.
[0062] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the examples can be practiced without these specific details.
[0063] Based on this, the embodiment of this specification proposes a lens adjustment device, including:
[0064] like Figure 1 As shown, the lens adjustment device includes a lens 500, a lens seat 400, a lens barrel 200, a horizontal adjustment mechanism and a vertical adjustment mechanism. The center of the lens seat 400 is hollowed out, and the lens 500 is fixed in the center of the lens seat 400. The movement of the lens seat 400 drives the movement of the lens 500. The lens seat 400 is fixedly connected to the lens barrel 200, and the lens barrel 200 is respectively provided with a horizontal adjustment mechanism and a vertical adjustment mechanism.
[0065] like Figure 2 As shown, a first cutting groove 441 and a second cutting groove 442 that do not intersect are formed on the mirror base 400, and there is an overlapping portion between the first cutting groove 441 and the second cutting groove 442, and a leaf spring structure is formed in the overlapping portion. A third cutting groove 443 and a fourth cutting groove 444 that do not intersect are also formed on the mirror base 400, and there is an overlapping portion between the third cutting groove 443 and the fourth cutting groove 444, and a leaf spring structure is formed in the overlapping portion.
[0066] Preferably, the horizontal adjustment mechanism drives the leaf spring structure formed between the first cutting groove 441 and the second cutting groove 442 to drive the mirror base 400 to move along the second direction, and the horizontal adjustment mechanism drives the leaf spring structure formed between the third cutting groove 443 and the fourth cutting groove 444 to drive the mirror base 400 to move along the first direction, and the vertical adjustment mechanism is used to drive the mirror base 400 to move along the third direction.
[0067] Preferably, the first cutting groove 441 , the second cutting groove 442 , the third cutting groove 443 , and the fourth cutting groove 444 are U-shaped grooves and through grooves to form a leaf spring structure.
[0068] Preferably, a first leaf spring structure 450A and a second leaf spring structure 450B are formed between the first cutting groove 441 and the second cutting groove 442, and the first leaf spring structure 450A is symmetrical and parallel to the second leaf spring structure 450B in the first direction. A third leaf spring structure 460A and a fourth leaf spring structure 460B are formed between the third cutting groove 443 and the fourth cutting groove 444, and the third leaf spring structure 460A is symmetrical and parallel to the fourth leaf spring structure 460B in the second direction. The leaf spring structure has a certain toughness and can withstand driving forces in multiple directions to achieve fine-tuning of the tilt angle of the lens 500.
[0069] Preferably, the first cutting groove 441, the second cutting groove 442, the third cutting groove 443 and the fourth cutting groove 444 divide the lens holder 400 into three parts, namely the outer ring 400a, the middle ring 400b and the inner ring 400c. The inner ring 400c and the middle ring 400b are connected by the first leaf spring structure 450A and the second leaf spring structure 450B, the outer ring 400a and the middle ring 400b are connected by the third leaf spring structure 460A and the fourth leaf spring structure 460B, the outer ring 400a is connected to the centering spring leaf 300, and the inner ring 400c, the middle ring 400b and the outer ring 400a are connected by leaf springs to drive the lens 500 to move in different directions.
[0070] Preferably, the horizontal adjustment mechanism includes a first horizontal adjustment mechanism and a second horizontal adjustment mechanism. The first horizontal adjustment mechanism includes a first motor 100-2 and a first push rod 623. In the first horizontal adjustment mechanism, one end of the first push rod 623 is connected to the first motor 100-2, and the other end contacts the leaf spring structure formed between the third cutting groove 443 and the fourth cutting groove 444 under the drive of the first motor 100-2, so that the mirror seat 400 moves along the first direction.
[0071] Preferably, a pressure hole is provided on the side wall of the lens holder 400, and the first push rod 623 passes through the pressure hole and is set on one side of the middle part of the first leaf spring structure 450A. The first motor 100-2 drives the first push rod 62 to press the first leaf spring structure 450A, driving the lens to deform and move in the direction of the second leaf spring structure 450B.
[0072] Specifically, Figure 6a , 6b As shown in Figures 6c, a through hole is provided in the middle of the first leaf spring structure 450A and the second leaf spring structure 450B. The driving motor 100-2 drives the second push rod 613 to pass through the through hole and press against the inner wall of the U-shaped cutting groove at the first leaf spring structure 450A. At this time, the second leaf spring structure 450B on the opposite side will be subjected to pressure. The leaf spring structure can withstand a certain pressure deformation, so that the middle circle 400b can be pushed a certain distance by the second push rod 613 to realize the movement of the middle circle 400b in the -X direction.
[0073] Preferably, the horizontal adjustment mechanism and the vertical adjustment mechanism also include an elastic component, which may be a spring. Taking the first horizontal adjustment mechanism as an example, a spring 622 is sleeved on each first pressure rod 621 to ensure that the spring will not shift when subjected to force. The spring 622 and the first pressure rod 621 are arranged between the lens barrel 200 and the fourth leaf spring structure 460B, and are arranged on the same straight line as the first push rod 623, that is, the spring 622 is arranged on the opposite side of the first push rod 623, and the preload force provided by the spring 622 is used to realize the movement of the middle circle 400b along the +X direction. The preload force of the spring 622 is adjusted by the first pressure rod 621.
[0074] like Figure 7c As shown, the second horizontal adjustment mechanism includes a second motor 100-3 and a second push rod 613. In the second horizontal adjustment mechanism, one end of the second push rod 613 is connected to the second motor 100-3, and the other end contacts the leaf spring structure formed between the first cutting groove 441 and the second cutting groove 442 under the drive of the second motor 100-3, so that the mirror seat 400 moves along the second direction.
[0075] like Figure 7b As shown, similar to the first horizontal driving mechanism in the X direction, the second motor 100-3 of the second horizontal driving mechanism drives the second push rod 613 to pass through the through hole and press against the inner wall of the U-shaped cutting groove at the second leaf spring structure 450B. The motor 100-3 drives the inner ring 400c of the mirror seat 400 to move in the +Y direction. The preload force provided by the spring 612 causes the inner ring 400c to move in the -Y direction. The preload force of the spring 622 is adjusted by the second pressure rod 611.
[0076] Since the middle circle 400b is connected to the inner circle 400c, the middle circle 400b can drive the inner circle 400c to move in the X direction, and thus the lens can move in the X direction.
[0077] The horizontal adjustment mechanism in the X and Y directions can realize the movement of the lens 500 in the X and Y directions, and the movement decoupling is good, and the movement of the X and Y axes will not cause crosstalk.
[0078] Preferably, the driving motors are fixedly mounted on the outer wall of the lens barrel 200 .
[0079] like Figure 3 and Figure 4 As shown, the lens adjustment device also includes two layers of centering springs 300, which are respectively arranged on the first side and the second side of the lens base 400. The centering springs 300 form a parallelogram structure, so that the lens base 400 can only move in the Z direction.
[0080] Preferably, the first end of the centering spring 300 is fixed to the lens holder 400 via an inner pressure ring 310 , and the second end of the centering spring 300 is fixed to the lens barrel 200 via an outer pressure ring 320 .
[0081] like Figure 5 As shown, a centering spring 300 is installed on each of the upper and lower end surfaces of the lens holder 400, the centering spring 300 is fixed to the lens holder 400 by an inner pressure ring 310, and the centering spring 300 is fixed to the lens barrel 200 by an outer pressure ring 320. The centering springs 300 of the upper and lower layers form a parallelogram structure, ensuring that the lens holder 400 can only move in the Z direction, and the degrees of freedom of movement in the other five directions are all restricted. The lens holder 400 is driven by the vertical adjustment mechanism to realize the movement of the lens 500 in the Z direction.
[0082] like Figure 8a , 8b As shown, the vertical adjustment mechanism includes a third motor 100-1, a third top rod 636, a rotating member 635, a flexible bearing 634, a support frame 633, a first fixed seat 631 and a second fixed seat 638, the first fixed seat 631 is fixed on the first side of the mirror base 400, and the second fixed seat 638 is fixed on the second side of the mirror base 400.
[0083] like Fig. 9 As shown, a first through hole 639 and a groove 640 are provided on the rotating member 635, the flexible bearing 634 passes through the first through hole 639 and the two ends of the flexible bearing 634 are respectively fixed on the support frame 633, one end of the third push rod 636 is connected to the third motor 100-1, and the other end is in contact with the rotating member 635, the rotating member 635 can rotate around the flexible bearing 634, a steel ball is provided inside the groove 640, the rotating member 635 is connected to the first fixed seat 631 via the steel ball, and the rotating member 635 is an inverted L-shape.
[0084] Driven by the third motor 100 - 1 , the third push rod 636 pushes the lower end of the rotating rod, converting the movement of the third push rod 636 along the first direction into the movement along the third direction, so that the lens can move in the Z direction.
[0085] like Fig.11As shown, the flexible bearing 634 includes a first part 634a, a second part 634b and a third part 634c. The first part 634a and the third part 634c are fixed to the support frame 633 by gluing, and the second part 634b is fixed to the rotating member 635 by gluing.
[0086] Preferably, each push rod is sleeved with a sealing ring to achieve sealing inside the lens barrel 200 to prevent affecting the imaging quality.
[0087] In this specification, the same or similar parts between the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.
[0088] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed in the present application should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.
Claims
1. A lens adjustment device, characterized in that: include: Lenses, lens holders, lens barrels, horizontal adjustment mechanisms and vertical adjustment mechanisms, The lens is fixed in the center of the lens seat, and the lens seat is fixedly connected to the lens barrel. The lens barrel is provided with the horizontal adjustment mechanism and the vertical adjustment mechanism respectively. The mirror base is formed with a first cutting groove and a second cutting groove which do not intersect each other, and there is an overlapping portion between the first cutting groove and the second cutting groove, and the overlapping portion forms a leaf spring structure. The mirror base is also formed with a third cutting groove and a fourth cutting groove which do not intersect each other, and there is an overlapping portion between the third cutting groove and the fourth cutting groove, and the overlapping portion forms a leaf spring structure. The horizontal adjustment mechanism drives the leaf spring structure formed between the first cutting groove and the second cutting groove to drive the mirror base to move along the second direction, and the horizontal adjustment mechanism drives the leaf spring structure formed between the third cutting groove and the fourth cutting groove to drive the mirror base to move along the first direction. The vertical adjustment mechanism is used to drive the mirror base to move along the third direction.
2. The lens adjustment device according to claim 1, characterized in that: A first leaf spring structure and a second leaf spring structure are formed between the first cutting groove and the second cutting groove, and the first leaf spring structure is symmetrical and parallel to the second leaf spring structure in a first direction. A third leaf spring structure and a fourth leaf spring structure are formed between the third cutting groove and the fourth cutting groove, and the third leaf spring structure is symmetrical and parallel to the fourth leaf spring structure in the second direction.
3. The lens adjustment device according to claim 2, characterized in that: The first cutting groove, the second cutting groove, the third cutting groove, and the fourth cutting groove are U-shaped grooves.
4. The lens adjustment device according to claim 1, characterized in that: The level adjustment mechanism includes a first level adjustment mechanism and a second level adjustment mechanism. The first horizontal adjustment mechanism comprises a first motor and a first push rod, wherein one end of the first push rod is connected to the first motor, and the other end of the first push rod is driven by the first motor to contact the leaf spring structure formed between the third cutting groove and the fourth cutting groove, so that the mirror seat moves along the first direction; The second horizontal adjustment mechanism includes a second motor and a second push rod. In the second horizontal adjustment mechanism, one end of the second push rod is connected to the second motor, and the other end is driven by the second motor to contact the leaf spring structure formed between the first cutting groove and the second cutting groove, so that the mirror seat moves along the second direction.
5. The lens adjustment device according to claim 1, characterized in that: The lens adjustment device further comprises two layers of centering springs, which are respectively arranged on the first side and the second side of the lens base. The first end of the centering spring is fixed to the lens seat via an inner pressure ring, and the second end of the centering spring is fixed to the lens barrel via an outer pressure ring.
6. The lens adjustment device according to claim 1, characterized in that: The vertical adjustment mechanism includes a third motor, a third push rod, a rotating member, a flexible bearing, a support frame, a first fixed seat and a second fixed seat. The rotating member is provided with a first through hole, the flexible bearing passes through the first through hole and both ends of the flexible bearing are respectively fixed on the supporting frame. One end of the third push rod is connected to the third motor, and the other end is in contact with the rotating member. The rotating member can rotate around the flexible bearing. Under the drive of the third motor, the movement of the third push rod in the first direction is converted into the movement in the third direction. The first fixing seat is fixed to the first side of the mirror seat, The second fixing seat is fixed on the second side of the mirror seat.
7. The lens adjustment device according to claim 6, characterized in that: The flexible bearing comprises a first part, a second part and a third part, The first part and the third part are fixed to the support frame by gluing. The second portion is fixed to the rotating member by gluing.
8. The lens adjustment device according to claim 6, characterized in that: The rotating member is provided with a groove, a steel ball is arranged inside the groove, and the rotating member is connected to the first fixing seat via the steel ball. The rotating member is in an inverted L shape.
9. The lens adjustment device according to claim 1, characterized in that: The horizontal adjustment mechanism and the vertical adjustment mechanism also include elastic components.
10. The lens adjustment device according to claim 1 or 4, characterized in that: A sealing ring is sleeved on the push rod to achieve sealing inside the lens barrel.
Citation Information
Patent Citations
Lens adjusting device, adjustable optical system, photoetching equipment and centering unit
CN111856884A
Optical element adjusting device
CN112859529A
Lens six-degree-of-freedom micro-motion platform
CN113917644A
Movable lens adjusting mechanism and photoetching equipment
CN115542677A
Device for adjusting the axis of a lens
TW200702763A