A MHz frame rate high-speed spectral measurement system and method

Abstract

The present invention discloses a MHz frame rate high-speed spectral measurement system and method, which mainly solves technical problems such as the low frame rate of traditional spectrometers, the inability to capture spectral changes in high-speed dynamic processes in real time, and limited application scenarios. The spectral measurement system includes a slit, a first collimating reflector, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module, and a data processing module; the slit is used to limit the incident space of the light beam and change its divergence angle; the first collimating reflector is located on the side of the slit away from the object to be measured; the spectral dispersion element is located in the reflected light path of the first collimating reflector; the spectral signal amplification module is located in the diffraction light path of the spectral dispersion element; the spectral coupling module, the spectral acquisition module, and the data processing module are arranged in sequence, and the spectral coupling module is used to focus the spectral band captured by the spectral signal amplification module to form a spectral image, which is collected by the spectral acquisition module and transmitted to the data processing module.

Description

Technical Field

[0001] The present invention belongs to the field of spectrum measurement, and in particular relates to a MHz frame rate high-speed spectrum measurement system and method. Background Art

[0002] As a core device in the field of spectral measurement, the performance of a spectrometer is directly related to the accuracy and timeliness of spectral analysis. Spectroscopic analysis technology reveals the composition, structure, and interaction mechanisms of substances by measuring their spectral characteristics at different wavelengths. This technology is currently widely used in fields such as materials science, chemistry, biology, environmental monitoring, and aerospace.

[0003] Conventional spectrometers have made significant progress in spectral resolution, with some even achieving picometer-level resolution. This is crucial for advancing scientific research tasks such as the compositional analysis and structural identification of fine materials. However, the frame rate of such spectrometers is generally low, typically reaching only tens of hertz (Hz) or even lower, which limits the real-time acquisition of spectra from high-speed dynamic processes. To address this, researchers have sought to increase the frame rate of spectral measurements by optimizing optical structures, employing faster detectors, and post-processing the sampled data. However, this approach often comes at the expense of spectral resolution or reducing the spectral window, resulting in less than ideal results. Furthermore, even existing high-speed spectrometers have a maximum frame rate limited to tens of kilohertz (kHz), far from the MHz level. Therefore, they are unable to capture spectral changes in materials during high-speed dynamic processes in real time, making it difficult to simultaneously meet application scenarios requiring both high temporal resolution and high spectral resolution. This, in turn, limits their application in areas such as energetic material reaction history testing, engine combustion product analysis, and efficiency evaluation. Summary of the Invention

[0004] The purpose of the present invention is to solve the technical problems of low frame rate of traditional spectrometers, inability to capture spectral changes in high-speed dynamic processes in real time, and limited application scenarios, and to provide a MHz frame rate high-speed spectral measurement system and method.

[0005] To achieve the above objectives, the technical solutions provided by the present invention are:

[0006] A MHz frame rate high-speed spectrum measurement system, which is special in that:

[0007] It includes a slit, a first collimating reflector, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module and a data processing module;

[0008] The slit is arranged on the optical path of the radiated / transmitted / reflected light of the object to be measured, and is used to limit the incident space of the light beam and change its divergence angle; the first collimating reflector is located on the side of the slit away from the object to be measured, and is used to convert the light beam entering through the slit into a parallel light beam; the spectral dispersion element is located on the reflected light path of the first collimating reflector, and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength;

[0009] The spectral signal amplification module is located in the diffraction light path of the spectral dispersion element, and is used to capture the spectral band and amplify the weak spectral signal therein; the spectral coupling module is arranged close to the spectral signal amplification module, and its output end is connected to the input end of the spectral acquisition module, and the output end of the spectral acquisition module is electrically connected to the input end of the data processing module; the spectral coupling module is used to focus the spectral band captured by the spectral signal amplification module to form a spectral image, and transmit it to the spectral acquisition module, and the spectral acquisition module is used to collect the spectral image and transmit it to the data processing module; the data processing module is used to process the received spectral image and output the spectral data information of the object to be measured.

[0010] Furthermore, it also includes a second collimating reflector, which is located on the diffraction light path of the spectral dispersion element, and the spectral signal amplification module is located on the reflection light path of the second collimating reflector.

[0011] Furthermore, the spectral dispersion element is a grating, and the center position of the grating diffraction surface is located at the focal position of the first collimating reflector; the distance between the center point of the grating diffraction surface and the center point of the first collimating reflector surface is L 1Satisfy:

[0012]

[0013] in, is the divergence angle of the light beam after entering the slit; is the incident angle of the grating; f is the focal length of the first collimating mirror.

[0014] Furthermore, the spectral dispersion element is a dispersion prism, and the distance between the geometric center point of the dispersion prism and the center point of the first collimating reflector surface is L 2 Satisfaction:

[0015]

[0016] Among them, Δ x It is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; l is the wavelength of incident light, It represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

[0017] Furthermore, the width of the slit is 5 μm to 200 μm;

[0018] The first collimating reflector is a concave reflector, and its incident angle is (5°±1°) to (15°±2°).

[0019] Furthermore, the spectral signal amplification module is a visible spectrum image intensifier.

[0020] Furthermore, the spectral coupling module is a cylindrical lens focusing system.

[0021] Furthermore, the spectrum acquisition module selects an ultra-high-speed camera with a frame rate of millions, or a linear array CCD or CMOS detector with a frame rate of millions, or a high-speed linear array photomultiplier tube array with a frame rate of millions.

[0022] The present invention also provides a MHz frame rate high-speed spectrum measurement method, comprising the following steps:

[0023] Step 1: Assemble the above-mentioned MHz frame rate high-speed spectrum measurement system;

[0024] Step 2: The radiated light / transmitted light / reflected light from the object to be measured passes through the slit, and then passes through the first collimating mirror and the spectral dispersion element to form a spectral band;

[0025] Step 3: The spectrum signal amplification module captures the spectrum band and amplifies the weak spectrum signal therein to obtain a spectrum band with enhanced intensity;

[0026] Step 4: Correcting the chromatic aberration and spherical aberration of the intensity-enhanced spectral band through the spectral coupling module, shaping the beam, and focusing it to obtain a spectral image, which is then collected by the spectral acquisition module and transmitted to the data processing module; the spectral image is a one-dimensional spectral image;

[0027] Step 5: Process the spectral image through a data processing module and output the spectral data of the object to be measured, thereby achieving MHz frame rate high-speed spectral measurement.

[0028] Furthermore, in step 5, the data processing module processes the spectral image specifically as follows:

[0029] 5.1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix;

[0030] 5.2. Use interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram;

[0031] 5.3. The spectrum intensity distribution diagram is processed in sequence through spectrum smoothing, baseline correction, and feature extraction to obtain the spectrum data of the object to be measured.

[0032] Compared with the prior art, the present invention has the following beneficial effects:

[0033] 1. The present invention provides a MHz frame rate high-speed spectral measurement system, comprising a slit, a first collimating reflector, a spectral dispersion element, a spectral signal amplification module, a spectral coupling module, a spectral acquisition module, and a data processing module, arranged in sequence. The modular structural design makes the overall structure of the spectral measurement system more compact. At the same time, by introducing the spectral signal amplification module into the spectral signal transmission path, it can efficiently capture and amplify weak spectral signals, thereby significantly improving the intensity of the spectral signal and the sensitivity of the measurement system, thereby achieving accurate measurement of spectral changes of substances in high-speed dynamic processes.

[0034] 2. In a MHz frame rate high-speed spectral measurement system provided by the present invention, a second collimating reflector is added to fold the optical path, thereby reducing the system volume while maintaining the required optical performance, thereby further improving the system integration.

[0035] 3. In the MHz frame rate high-speed spectrum measurement system provided by the present invention, the spectrum dispersion element can be selected from a grating or a dispersion prism to ensure the accuracy and uniformity of the spectrum dispersion.

[0036] 4. In a MHz frame rate high-speed spectral measurement system provided by the present invention, the spectral coupling module selects a cylindrical lens focusing system, which can realize distortion-free compressed line imaging of the spectral band, thereby improving the optical coupling efficiency with the spectral acquisition module.

[0037] 5. In the MHz frame rate high-speed spectral measurement system provided by the present invention, the spectral acquisition module selects an ultra-high-speed camera with a frame rate of one million, or a linear array CCD or CMOS detector with a frame rate of one million, or a high-speed linear array photomultiplier tube array with a frame rate of one million, which can realize high-speed spectral data acquisition at the frame rate of one million (MHz), thereby improving measurement accuracy and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 The figure is a structural diagram of an embodiment of a MHz frame rate high-speed spectrum measurement system of the present invention.

[0039] The reference numerals are as follows:

[0040] 1- slit, 2- first collimating mirror, 3- spectral dispersion element, 4- second collimating mirror, 5- spectral signal amplification module, 6- spectral coupling module, 7- spectral acquisition module. DETAILED DESCRIPTION

[0041] In order to make the objects, advantages and features of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and specific examples. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0042] like Figure 1 As shown, this embodiment provides a MHz frame rate high-speed spectral measurement system, including a slit 1, a first collimating reflector 2, a spectral dispersion element 3, a spectral signal amplification module 5, a spectral coupling module 6, a spectral acquisition module 7 and a data processing module (not shown in the figure).

[0043] The slit 1 is set in the optical path of the radiation light / transmitted light / reflected light of the object to be measured, which is used to limit the incident space of the light beam and change its divergence angle. At the same time, the slit 1 can also define the spatial resolution and light flux of the spectrum measurement system. In this embodiment, the width of the slit 1 is S for:

[0044]

[0045] Where, is the wavelength of incident light; R is the spectral resolution; D is the linear dispersion rate (nm / mm) of the spectral dispersive element 3. To balance system resolution and light flux, the width of the slit 1 is usually between 5μm and 200μm, and the height of the slit 1 matches the pixel height of the detector in the spectrum acquisition module 7.

[0046] The first collimating mirror 2 is located on the side of the slit 1 away from the object to be measured and is used to convert the light beam entering through the slit 1 into a parallel beam. In this embodiment, the first collimating mirror 2 is a concave mirror. Its reflective optical design eliminates chromatic aberration and is suitable for the entire ultraviolet, visible, and infrared wavelength range. High-precision aluminum / gold coating achieves a broadband reflection efficiency of >95% (Al@250-2500nm, Au@2-20μm). To optimize the balance between aberration suppression and light flux, the concave mirror's angle of incidence is between (5°±1°) and (15°±2°). The specific parameters can be adjusted based on system requirements.

[0047] The spectral dispersion element 3 is located on the reflection light path of the first collimating reflector 2 and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength.

[0048] Preferably, the spectral dispersion element 3 is a high-precision grating. The selection of the grating is based on the target spectral range and resolution requirements to ensure the accuracy and uniformity of the spectral dispersion. In this embodiment, the selection of the grating must meet the following conditions:

[0049] (a) The line density of the grating is between 300 lines / mm and 3600 lines / mm. Holographic gratings are used in high-resolution scenarios, while ruled gratings are used in wide-band scenarios.

[0050] (b) The blaze wavelength of the grating matches the center wavelength of the target band.

[0051] (c) Incident angle of the grating i i Satisfy the grating equation ml = d (sin i i +sin i m ),in m is the diffraction order, l is the wavelength of incident light, d is the grating constant, i m is the diffraction angle of the grating.

[0052] (d) The center of the grating is set at the focal position of the first collimating reflector 2, so that the incident light is collimated by the first collimating reflector 2 and then incident on the grating surface.

[0053] (e) The distance between the first collimating reflector 2 and the grating (i.e., the distance between the center point of the incident surface of the first collimating reflector 2 and the center point of the grating diffraction surface) Need to meet:

[0054]

[0055] At the same time, the following conditions must also be met:

[0056]

[0057] in, is the divergence angle of the light beam after entering slit 1; is the incident angle of the grating; f is the focal length of the first collimating reflector 2; W is the width of the illuminated grating; N is the line density of the grating; R is the spectral resolution of the grating, m is the diffraction order.

[0058] Alternatively, the spectral dispersive element 3 may be a dispersive prism. The selection of the dispersive prism must meet the following conditions:

[0059] (a) The material of the dispersion prism is selected according to the working band. Fused silica is used in the ultraviolet band, BK7 glass is used in the visible light band, and calcium fluoride or zinc selenide is used in the infrared band.

[0060] (b) The apex angle of the dispersion prism ranges from 30° to 60° to balance dispersion efficiency and aberration.

[0061] (c) The distance from the first collimating reflector 2 to the dispersive prism (i.e., the distance between the center point of the incident surface of the first collimating reflector 2 and the geometric center point of the dispersive prism) Need to meet:

[0062]

[0063] Among them, Δ x It is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; l is the wavelength of incident light, It represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

[0064] Spectral signal amplification module 5, located in the diffraction optical path of spectral dispersive element 3, is used to capture spectral bands and amplify the weak spectral signals within them. Spectral signal amplification module 5 is a high-performance image intensifier placed in the output path of the dispersed spectrum. Due to its excellent optical gain, fast response time, and wide spectral response, the image intensifier can efficiently capture and amplify weak spectral signals within spectral bands, significantly improving spectral signal intensity and the sensitivity of the spectral measurement system.

[0065] The image intensifier must be selected based on the required spectral range and resolution. Precise installation and commissioning of the image intensifier ensures close alignment with the focal plane of the spectral coupling module 6, thereby minimizing light loss and improving measurement accuracy. The image intensifier in this embodiment operates in the visible spectrum and can be sized from 18mm to 150mm. The phosphor screen can be selected from P20, P24, P43, P46, or P47. The photocathode can be made of a variety of materials, including cesium ion (CsI), silver cesium oxide (Ag-O-Cs), and multi-alkali photocathodes (Bi-alkali). Shutter times can range from 200ps to 200ns.

[0066] The spectral coupling module 6 is located near the spectral signal amplification module 5 and is used to focus the spectral band captured by the spectral signal amplification module 5 to form a spectral image. In this embodiment, a lens assembly primarily composed of cylindrical lenses is precisely designed to serve as the spectral coupling module 6 after the amplified spectral band. Utilizing the unique linear focusing properties of cylindrical lenses, the amplified spectral band can be focused into a bright and clear one-dimensional spectral image by adjusting the focal length and position of the cylindrical lenses. The lens assembly is selected to meet the following conditions:

[0067] (a) The lens group must be able to correct spherical aberration and chromatic aberration;

[0068] (b) The lens group needs to have the functions of beam shaping and coupling, which is used to reduce the image size of the spectral measurement system to D The spot size of 1 is enlarged / reduced to D 2 on the detector target surface, and the magnification / reduction ratio of the lens group is D 2 / D 1.

[0069] The input of the spectrum acquisition module 7 is connected to the output of the spectrum coupling module 6, and the output is electrically connected to the input of the data processing module. The spectrum acquisition module 7 is used to acquire the spectral image output by the spectrum coupling module 6 and transmit it to the data processing module. The spectrum acquisition module 7 can be equipped with an ultra-high-speed camera with a frame rate of one million frames, a linear array CCD or CMOS detector with a frame rate of one million frames, or a high-speed linear array photomultiplier tube (PMT) array with a frame rate of one million frames. Ultra-high-speed cameras with a frame rate of one million frames can capture spectral images at extremely high speeds, enabling spectral data acquisition at a frame rate of one million MHz. The selection of an ultra-high-speed camera requires consideration of parameters such as its resolution, frame rate, spectral response range, and data output interface. Furthermore, during installation, its position must be precisely adjusted to ensure that the ultra-high-speed camera's photosensitive surface closely aligns with the image plane of the one-dimensional spectral image focused by the spectrum coupling module 6, thereby meeting the requirements of the corresponding application scenario and achieving the effect of capturing spectral images at a frame rate of one million frames.

[0070] The data processing module processes the received spectral image and outputs the spectral data of the object under test. This module utilizes the calibration methods and software typically used with conventional spectrometers. It calibrates the spectrum acquisition module 7 through wavelength calibration and spectral response correction, converting the acquired spectral image into a spectral intensity distribution graph to ensure the accuracy of the spectral data. The spectral intensity distribution graph is then processed and analyzed using algorithms such as spectral smoothing, baseline correction, and feature extraction. Ultimately, high-temporal-resolution and high-spectral-resolution spectral information is extracted and output.

[0071] In order to improve the integration of the system, this embodiment also includes a second collimating mirror 4, which is located on the diffraction light path of the spectral dispersion element 3, and the spectral signal amplification module 5 is located on the reflection light path of the second collimating mirror 4. The setting of the second collimating mirror 4 can adjust the light path structure and fold the light path. While maintaining the required optical performance, the system volume is reduced, thereby further improving the integration of the system.

[0072] In addition, in this embodiment, the spectral dispersion element 3 can be replaced with a Raman spectrometer or a micro-spectrometer while other designs remain unchanged, thereby realizing MHz frame rate high-speed Raman spectroscopy measurement or MHz frame rate high-speed micro-spectroscopy measurement.

[0073] To address the trade-off between frame rate and spectral resolution in existing spectral measurement systems, the present invention provides a modularly designed MHz frame rate high-speed spectral measurement system. Based on high-precision grating spectral dispersion, the present invention introduces a high-performance image intensifier to achieve effective amplification of spectral signals in their transmission path, significantly improving spectral signal intensity and system sensitivity. Simultaneously, precise adjustment of the cylindrical lens focusing system enables distortion-free compressed line imaging of the spectral band, improving the optical coupling efficiency with subsequent ultra-high-speed cameras or ultra-high-speed linear array detectors. Ultimately, high-speed spectral data acquisition at the mega-frame rate (MHz) level is achieved through an ultra-high-speed camera with a mega-frame rate.

[0074] In addition, this embodiment also provides a MHz frame rate high-speed spectrum measurement method, including the following steps:

[0075] Step 1: According to the application scenario, various components are selected and assembled to obtain the MHz frame rate high-speed spectrum measurement system described in this embodiment.

[0076] Step 2: The radiated light / transmitted light / reflected light from the object to be measured passes through the slit 1, and then passes through the first collimating mirror 2 and the spectral dispersion element 3 in sequence to form spectral bands of different angles.

[0077] Step 3: The spectral band is captured by the spectral signal amplification module 5 after passing through the second collimating reflector 4. At the same time, the spectral signal amplification module 5 amplifies the weak spectral signal in the spectral band, thereby obtaining a spectral band with enhanced intensity.

[0078] Step 4: Spectral coupling module 6 corrects chromatic and spherical aberrations for the enhanced spectral band, shapes the beam, and focuses it to produce a one-dimensional spectral image. This image is then collected by spectral acquisition module 7 and transmitted to the data processing module. During this process, the focal length and position of the cylindrical lens in spectral coupling module 6 can be adjusted to achieve distortion-free compressed line imaging of the spectral band, thereby improving the optical coupling efficiency with the subsequent spectral acquisition module 7.

[0079] Step 5: Process the spectral image through a data processing module and output the spectral data of the object to be measured, thereby achieving MHz frame rate high-speed spectral measurement.

[0080] In this embodiment, the spectral image is processed by the data processing module specifically as follows:

[0081] 5.1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix.

[0082] 5.2. Use the interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram.

[0083] 5.3. The spectrum intensity distribution diagram is processed in sequence through spectrum smoothing, baseline correction, and feature extraction to obtain the spectrum data of the object to be measured.

[0084] Based on the above-mentioned embodiments, the present invention implements a MHz frame rate high-speed spectral measurement method, which amplifies weak spectral signals while maintaining high spectral resolution, realizes high-speed spectral acquisition with a MHz high frame rate (high time resolution), and can capture spectral changes in high-speed dynamic processes in real time. It has broad application prospects in fields such as energetic material reaction history testing, engine combustion product analysis, and efficiency evaluation.

[0085] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the present invention.

Claims

1. A MHz frame rate high-speed spectrum measurement system, characterized by: It comprises a slit (1), a first collimating reflector (2), a spectral dispersion element (3), a spectral signal amplification module (5), a spectral coupling module (6), a spectral acquisition module (7) and a data processing module; The slit (1) is arranged on the optical path of the radiated light / transmitted light / reflected light of the object to be measured, and is used to limit the incident space of the light beam and change its divergence angle; the first collimating reflector (2) is located on the side of the slit (1) away from the object to be measured, and is used to convert the light beam entering through the slit (1) into a parallel light beam; the spectral dispersion element (3) is located on the reflected light path of the first collimating reflector (2), and is used to disperse the parallel light beam into spectral bands of different angles according to wavelength; The spectral signal amplification module (5) is located on the diffraction light path of the spectral dispersion element (3) and is used to capture the spectral band and amplify the weak spectral signal therein; the spectral coupling module (6) is arranged close to the spectral signal amplification module (5), and its output end is connected to the input end of the spectral acquisition module (7), and the output end of the spectral acquisition module (7) is connected to the input end of the data processing module through an optical fiber; the spectral coupling module (6) is used to focus the spectral band captured by the spectral signal amplification module (5) to form a spectral image, and transmit it to the spectral acquisition module (7), and the spectral acquisition module (7) is used to collect the spectral image and transmit it to the data processing module; the data processing module is used to process the received spectral image and output spectral data information of the object to be measured.

2. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: It also includes a second collimating reflector (4), the second collimating reflector (4) is located on the diffraction light path of the spectral dispersion element (3), and the spectral signal amplification module (5) is located on the reflection light path of the second collimating reflector (4).

3. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: The spectral dispersion element (3) is a grating, and the center position of the grating diffraction surface is located at the focal position of the first collimating reflector (2); the distance between the center point of the grating diffraction surface and the center point of the surface of the first collimating reflector (2) is L 1Satisfy: ； in, is the divergence angle of the light beam after entering the slit (1); is the incident angle of the grating; f is the focal length of the first collimating mirror (2).

4. The MHz frame rate high-speed spectrum measurement system according to claim 1, characterized in that: The spectral dispersion element (3) is a dispersion prism, and the distance between the geometric center point of the dispersion prism and the center point of the surface of the first collimating reflector (2) is L 2 Satisfaction: ； Among them, Δ x It is the separation distance of light of different wavelengths on the focal plane after being deflected by the dispersion prism; A is the apex angle of the dispersion prism; n is the refractive index of the dispersion prism; λ is the wavelength of incident light, It represents the rate of change of different refractive indices with the wavelength of incident light, is the difference between different wavelengths in the incident light.

5. The MHz frame rate high-speed spectrum measurement system according to any one of claims 1 to 4, characterized in that: The width of the slit (1) is 5 μm to 200 μm; The first collimating reflector (2) is a concave reflector, and its incident angle is (5°±1°) to (15°±2°).

6. The MHz frame rate high-speed spectrum measurement system according to claim 5, characterized in that: The spectral signal amplification module (5) is a visible spectrum image intensifier.

7. The MHz frame rate high-speed spectrum measurement system according to claim 6, characterized in that: The spectral coupling module (6) is a cylindrical lens focusing system.

8. The MHz frame rate high-speed spectrum measurement system according to claim 7, characterized in that: The spectrum acquisition module (7) is selected from an ultra-high-speed camera with a frame rate of millions, or a linear array CCD or CMOS detector with a frame rate of millions, or a high-speed linear array photomultiplier tube array with a frame rate of millions.

9. A MHz frame rate high-speed spectrum measurement method, characterized in that: The following steps are involved: Step 1: Assemble the MHz frame rate high-speed spectrum measurement system according to any one of claims 1 to 8; Step 2: The radiation light / transmitted light / reflected light from the object to be measured passes through the slit (1), and then passes through the first collimating reflector (2) and the spectral dispersion element (3) to form a spectral band; Step 3: The spectrum signal amplification module (5) captures the spectrum band and amplifies the weak spectrum signal therein to obtain a spectrum band with enhanced intensity; Step 4: Correcting the chromatic aberration and spherical aberration of the intensity-enhanced spectral band through the spectral coupling module (6), shaping the beam, and focusing to obtain a spectral image, which is then collected by the spectral acquisition module (7) and transmitted to the data processing module; the spectral image is a one-dimensional spectral image; Step 5: Process the spectral image through a data processing module and output the spectral data of the object to be measured, thereby achieving MHz frame rate high-speed spectral measurement.

10. The MHz frame rate high-speed spectrum measurement method according to claim 9, characterized in that: In step 5, the data processing module processes the spectral image specifically as follows: 5.

1. Use a standard light source combined with a fitting algorithm to perform wavelength calibration and spectral response correction on the spectral image to obtain a calibrated wavelength-intensity data matrix; 5.

2. Use interpolation algorithm to convert the calibrated wavelength-intensity data matrix into a spectral intensity distribution diagram; 5.

3. The spectrum intensity distribution diagram is processed in sequence through spectrum smoothing, baseline correction, and feature extraction to obtain the spectrum data of the object to be measured.

Images