Flexible nerve probe

Abstract

A flexible nerve probe (100) comprises a flexible probe body and a monitoring electrode mechanism, the flexible probe body comprises an air pressure control layer (200) and an electrode integration layer (300) which are arranged in a stacked mode, at least one air chamber (400) is formed in the air pressure control layer (200), the flexible probe body is provided with a tip, the monitoring electrode mechanism is arranged on the electrode integration layer (300), and the monitoring electrode mechanism is arranged on the electrode integration layer (300). The monitoring electrode mechanism comprises at least one electrode (700), the electrode (700) is located at the tip of the flexible probe body, and the air pressure in the air chamber (400) is set to be adjustable, so that the flexible probe body deforms and the monitoring position of the electrode (700) is changed.

Description

Flexible neural probes

[0001] The present application relates to the technical field of medical devices, for example, to a flexible neural probe.

[0002] A neural probe is a chip with a special shape that uses a tip implantable electrode to monitor neuronal electrical or chemical signals. Compared with traditional silicon-based probes, neural probes based on flexible polymer materials can not only reduce the size of the wound, thereby reducing the pain of experimental animals or patients, but also avoid the aggregation of astrocytes caused by implantation, making the signal quality obtained by monitoring more reliable. Therefore, neural probes are widely used in many fields such as the treatment of neurological diseases and brain-computer interaction.

[0003] However, a neural probe can only monitor neuronal signals in one area during one implantation. If one wants to monitor neuronal signals in another area, the neural probe needs to be removed from the original monitoring area and then re-implanted in the new monitoring area. This is not only complicated to operate and increases the pain of experimental animals or patients, but also affects the service life of the probe itself.

[0004]

[0005] The present application provides a flexible neural probe, the monitoring position of which in biological tissue can be changed, thereby improving the user experience of a recipient using the flexible neural probe and extending the service life of the flexible neural probe.

[0006] The present application provides a flexible neural probe, comprising: a flexible probe body, the flexible probe body comprising a stacked air pressure control layer and an electrode integration layer, at least one air chamber formed in the air pressure control layer, and the flexible probe body having a tip; a monitoring electrode mechanism, the monitoring electrode mechanism being arranged on the electrode integration layer, and the monitoring electrode mechanism comprising at least one electrode, the electrode being located at the tip of the flexible probe body; wherein the air pressure in the air chamber is set to be adjustable so as to cause the flexible probe body to deform and change the monitoring position of the electrode.

[0007] In one implementation, there are multiple air chambers, and the multiple air chambers are spaced apart in the length direction of the flexible probe body.

[0008] In one implementation, the air pressure control layer is further formed with a gas injection cavity and at least one microchannel, wherein the gas injection cavity is connected to the air chamber through the microchannel, gas can be injected into all the air chambers through the gas injection cavity and the microchannel, and the gas in the air chamber can be discharged through the microchannel and the gas injection cavity.

[0009] In one implementation, the monitoring electrode mechanism further includes a packaging structure and a lead, and the packaging structure is electrically connected to the electrode via the lead.

[0010] In one implementation, there are multiple electrodes, all of which are disposed at the tip of the flexible probe body, and each electrode is connected to the packaging structure via one of the lead wires.

[0011] In one implementation, the length a of the flexible probe body is 1mm-100mm; and / or the width b of the flexible probe body is 200um-2000um; and / or the tip of the flexible probe body includes two waist sides c of equal length and at an angle, and the ratio of the length of the waist side c to the width of the flexible probe body is 0.6-1.5.

[0012] In one implementation, the thickness of the gas pressure control layer is greater than the thickness of the electrode integration layer.

[0013] In one implementation, the thickness of the air pressure control layer is 40um-200um; and / or the thickness of the electrode integration layer is 10um-200um.

[0014] In one implementation, the cross-sectional shape of the air chamber is a polygon.

[0015] In one implementation, the cross-sectional shape of the air chamber is elliptical.

[0016] In one implementation, the air chamber includes a major axis and a minor axis, the major axis is parallel to the width direction of the flexible probe body, and the minor axis is parallel to the length direction of the flexible probe body; the difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100um; the length of the minor axis is less than the length of the flexible probe body, and the ratio of the length of the minor axis to the width of the flexible probe body is less than or equal to 3; the thickness of the air chamber is less than or equal to half the thickness of the air pressure control layer.

[0017] In one implementation, the length of the major axis is 100um-1900um; and / or, the length of the minor axis is 20um-5000um; and / or, the thickness of the air chamber is 20um-100um.

[0018] In one implementation, there are multiple air chambers, and the ratio of the distance between the geometric centers of two adjacent air chambers to the length of the short axis is greater than or equal to 1.5.

[0019] In one implementation, the width of the microchannel is 10 um-40 um; and / or the height of the microchannel is equal to the height of the gas injection chamber.

[0020] In one implementation, the air pressure control layer is a sheet structure made of a flexible polymer material, and the flexible polymer material is one of polydimethylsiloxane, polyimide, polycarbonate and polyparaxylene.

[0021] In one implementation, the electrode integration layer is a sheet structure made of a flexible polymer material, and the flexible polymer material is one of polyimide, polyparaxylene, polycarbonate and polymethyl methacrylate.

[0022] In one implementation, the air pressure control layer and the electrode integrated layer are bonded; or, the air pressure control layer and the electrode integrated layer are connected by thermocompression bonding; or, the air pressure control layer and the electrode integrated layer are connected by ultrasonic bonding; or, the air pressure control layer and the electrode integrated layer are connected by laser bonding.

[0023] FIG1 is a schematic diagram of a flexible neural probe provided in an embodiment of the present application;

[0024] FIG2 is a cross-sectional view of a flexible neural probe provided in an embodiment of the present application;

[0025] FIG3 is a schematic diagram of an air pressure control layer of a flexible neural probe provided in an embodiment of the present application;

[0026] FIG4 is a schematic diagram of an air pressure control layer of another flexible neural probe provided in an embodiment of the present application;

[0027] FIG5 is a schematic diagram of an electrode integration layer of a flexible neural probe provided in an embodiment of the present application;

[0028] FIG6 is a schematic diagram of an air pressure control layer of a flexible neural probe provided in an embodiment of the present application;

[0029] FIG7 is a schematic diagram of an air pressure control layer of another flexible neural probe provided in an embodiment of the present application;

[0030] FIG8 is a schematic diagram of an air pressure control layer of another flexible neural probe provided in an embodiment of the present application;

[0031] FIG. 9 is a manufacturing process diagram of a flexible neural probe provided in an embodiment of the present application.

[0032] In the figure:

[0033] 100. Flexible neural probe;

[0034] 200, air pressure control layer;

[0035] 300, electrode integration layer;

[0036] 400, air chamber;

[0037] 500, gas injection chamber;

[0038] 600, microfluidic channel;

[0039] 700, electrode;

[0040] 800, lead wire;

[0041] 900. Packaging structure.

[0042] The technical solution of the present application will be described below in conjunction with the accompanying drawings, and the described embodiments are part of the embodiments of the present application.

[0043] In the description of the present application, the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0044] In the description of this application, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the meanings of the above terms in this application can be understood according to the circumstances.

[0045] As shown in FIG. 1 , the present application discloses a flexible neural probe 100 , which can be applied in a living body (such as an experimental animal or a patient) to monitor neuronal electrical signals or chemical signals in the living body.

[0046] The flexible neural probe 100 includes a flexible probe body and a monitoring electrode mechanism. The flexible probe body is a multilayer sheet structure made of a flexible material, which is roughly arrow-shaped. The flexible probe body has a tip and a connection end. The connection end of the flexible probe body is configured to connect to an external mechanism, where the external mechanism can be an inflation and exhaust mechanism. The tip of the flexible probe body is configured to pierce biological tissue and enter the body. As shown in Figures 2 to 5, the flexible probe body includes a stacked air pressure control layer 200 and an electrode integrated layer 300. In some embodiments, the air pressure control layer 200 and the electrode integrated layer 300 have the same shape. At least one air chamber 400 is formed in the air pressure control layer 200, and the air pressure in the air chamber 400 is configured to be adjustable. The monitoring electrode mechanism is disposed on the electrode integrated layer 300, and the monitoring electrode mechanism includes at least one electrode 700, which is located at the tip of the flexible probe body.

[0047] After the flexible neural probe 100 is implanted in a living body, the electrode 700 at the tip can monitor the neuronal electrical signals or chemical signals at the location thereof. When the monitoring position needs to be adjusted, it is only necessary to change the air pressure in the air chamber 400 by inflation, so that the tip of the flexible probe body is bent. When the tip of the flexible probe body is bent, the position of the electrode 700 at the tip changes accordingly, so as to reach a new monitoring position and monitor the neuronal electrical signals or chemical signals at the position. Compared with the related art that requires the neural probe to be removed from the body and then implanted into the body to a new monitoring position, the flexible neural probe 100 provided in the present application does not need to be removed and then implanted into the body, and can be directly moved to a new monitoring position in the body. This not only avoids the pain caused to the body by removing and then implanting the neural probe, improves the use experience of the body, but also avoids the damage to the neural probe caused by removing and then implanting the neural probe, which helps to extend the service life of the flexible neural probe 100.

[0048] The bending force of the tip can be changed by changing the air pressure in the air chamber 400. According to experiments, the bending force of the tip is approximately linearly positively correlated with the air pressure. When the flexible neural probe 100 is implanted in a living body, the air pressure needs to be increased to reduce the damage to the biological tissue caused by the implantation action and avoid signal noise caused by the generation of astrocytes. The air pressure can be reduced after the implantation is completed.

[0049] In some embodiments, the air pressure control layer 200 and the electrode integration layer 300 are both sheet structures made of flexible materials, and the types of flexible materials used by the two can be the same or different. In some embodiments, the air pressure control layer 200 is made of one of polydimethylsiloxane (PDMS), polyimide (PI), polycarbonate (PC) and parylene; the electrode integration layer 300 is made of one of PI, parylene, PC and polymethyl methacrylate (PMMA). In addition to these materials, the air pressure control layer 200 and the electrode integration layer 300 can also be made of other flexible materials according to needs. In other words, the flexible neural probe 100 has almost no restrictions on the choice of flexible materials, and any flexible polymer material can be used as the structural material of the flexible neural probe 100. In addition, the manufacturing process of the flexible neural probe 100 is simple and easy to operate, and has the potential for large-scale mass production.

[0050] The air pressure control layer 200 and the electrode integration layer 300 are connected together after being manufactured separately. In some embodiments, the air pressure control layer 200 and the electrode integration layer 300 are connected by bonding. In addition to bonding, the air pressure control layer 200 and the electrode integration layer 300 can also be directly connected by hot pressing bonding, ultrasonic bonding or laser bonding. In some other embodiments, the air pressure control layer 200 and the electrode integration layer 300 can also be bonded through an intermediate layer, and the material of the intermediate layer is not limited here.

[0051] In some embodiments, the length a of the flexible probe body is 1 mm-100 mm. The width b of the flexible probe body is 200 um-2000 um. The tip of the flexible probe body includes two waists c of equal length and at an angle, and the ratio of the length of the waist c to the width of the flexible probe body is 0.6-1.5. If the length of the flexible probe body is too long, the structural stress thereof will cause the flexible neural probe 100 itself to be unable to be implanted vertically, and if the width is too wide, the implantation wound will be too large.

[0052] In some embodiments, the thickness of the air pressure control layer 200 is greater than the thickness of the electrode integration layer 300. In some embodiments, the thickness of the air pressure control layer 200 is 40um-200um; the thickness of the electrode integration layer 300 is 10um-200um. Whether it is the air pressure control layer 200 or the electrode integration layer 300, too small a thickness will result in low structural strength and thus fail to ensure the probe process molding, while too large a thickness will result in too large an implantation wound.

[0053] In some embodiments, the cross-section of the air chamber 400 is a polygon, such as a rectangle (as shown in FIG. 4 ), a triangle, a diamond or other polygons. In addition to a regular shape, the cross-section of the air chamber 400 can also be an irregular shape.

[0054] In some parallel embodiments, as shown in FIG3 , the cross-sectional shape of the air chamber 400 is an ellipse, and the elliptical air chamber 400 has a major axis and a minor axis, the major axis is parallel to the width direction of the flexible probe body, and the minor axis is parallel to the length direction of the flexible probe body. In some embodiments, the difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100um, for example, the length of the major axis is 100um-1900um; the length of the minor axis is less than the length of the flexible probe body, and the ratio of the length of the minor axis to the width of the flexible probe body is less than or equal to 3, for example, the length of the minor axis is 20um-5000um; the thickness of the air chamber 400 is less than or equal to half the thickness of the air pressure control layer 200, for example, the thickness of the air chamber 400 is 20um-100um.

[0055] The number of air chambers 400 can be set to one or more according to needs. Through the design and number of air chambers 400, combined with simulation data, different multi-site testing needs can be met. Moreover, according to simulation data, after the flexible neural probe 100 is implanted in a biological body, under the same air pressure, the more air chambers 400 there are, the greater the degree of bending of the probe.

[0056] 3 and 4, there are multiple air chambers 400, and the multiple air chambers 400 are spaced apart in the length direction of the flexible probe body. When the shape of the air chamber 400 is elliptical, and there are multiple air chambers 400, the ratio of the distance between the geometric centers of two adjacent air chambers 400 to the length of the minor axis is greater than or equal to 1.5.

[0057] 3, in order to adjust the air pressure in the air chamber 400, the air pressure control layer 200 is further formed with a gas injection cavity 500 and a microchannel 600, the gas injection cavity 500 is communicated with the air chamber 400 through the microchannel 600, and the gas injection cavity 500 can be connected to the inflation and exhaust mechanism. Gas can be injected into all the air chambers 400 through the gas injection cavity 500 and the microchannel 600, and the gas in the air chamber 400 can be discharged through the microchannel 600 and the gas injection cavity 500, so as to increase or decrease the air pressure in the air chamber 400.

[0058] The number of the microchannel 600 can be one or more according to the requirements. In some embodiments, the width of the microchannel 600 is 10um-40um; the height of the microchannel 600 is equal to the height of the gas injection chamber 500.

[0059] Continuing with reference to FIG. 5 , the monitoring electrode mechanism further includes a packaging structure 900 and a lead 800. The packaging structure 900 is electrically connected to the electrode 700 through the lead 800. The electrode 700 can both collect signals and apply electrical stimulation to the implanted tissue site. In some embodiments, the number of electrodes 700 is multiple, and the multiple electrodes 700 are all arranged at the tip of the flexible probe body, and each electrode 700 is connected to the packaging structure 900 through a lead 800. The multiple electrodes 700 are arranged at the tip of the flexible probe body to form an electrode area array, and the array arrangement here includes but is not limited to a circular array arrangement, a rectangular array arrangement, and a horizontal array arrangement.

[0060] In some embodiments, the electrode 700, the lead 800 and the packaging structure 900 are made of common conductive materials in semiconductor processes, such as metal, conductive glass indium tin oxide (ITO) and (3,4-ethylenedioxythiophene) polymer (Poly (3,4-ethylenedioxythiophene), PEDOT), etc.

[0061] The flexible neural probe 100 has the following advantages:

[0062] 1. Compared with silicon-based probes and ordinary flexible probes, the flexible neural probe 100 can dynamically adjust the tip implant bending force through air pressure, thereby reducing the damage to the tissue caused by the implantation and avoiding the signal noise caused by the production of astrocytes; 2. After implantation, the flexible neural probe 100 can adjust the test position of the probe tip electrode 700 by adjusting the air pressure to achieve the effect of one-time implantation and multi-site testing; 3. The flexible neural probe 100 can meet different multi-site testing requirements by adjusting the shape and number of the air chamber 400 of the air pressure control layer 200 and combining simulation data; 4. The flexible neural probe 100 has almost no restrictions on manufacturing materials. Any flexible polymer material can be used as the structural material of the probe, and the manufacturing process is simple and easy to operate, with the potential for large-scale mass production.

[0063] Embodiment 1:

[0064] The structure of a flexible neural probe 100 according to an embodiment of the present application will be described below with reference to FIG. 6 .

[0065] As shown in FIG6 , the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and an air pressure control layer 200. The electrode integration layer 300 is made of PI, and the air pressure control layer 200 is made of PDMS. The structural thickness of the electrode integration layer 300 and the air pressure control layer 200 are both 100 um. The length of the flexible neural probe 100 is 10 mm, the width is 1 mm, and the thickness of the air chamber 400 in all probes is 20 um.

[0066] The flexible nerve probe 100 is only provided with one air chamber 400 at the tip. The cross-section of the air chamber 400 is elliptical, and the short axis of the air chamber 400 is 0.5 mm and the long axis is 0.8 mm.

[0067] Embodiment 2:

[0068] The structure of a flexible neural probe 100 according to an embodiment of the present application will be described below with reference to FIG. 7 .

[0069] As shown in FIG7 , the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and an air pressure control layer 200. The electrode integration layer 300 is made of PI, and the air pressure control layer 200 is made of PDMS. The structural thickness of the electrode integration layer 300 and the air pressure control layer 200 are both 100 um. The length of the flexible neural probe 100 is 10 mm, the width is 1 mm, and the thickness of the air chamber 400 in all probes is 20 um.

[0070] The flexible neural probe 100 is provided with 10 air chambers 400 . The cross-sectional shape of each air chamber 400 is elliptical, and the short axis of each air chamber 400 is 0.5 mm and the long axis is 0.8 mm.

[0071] Embodiment three:

[0072] The structure of a flexible neural probe 100 according to an embodiment of the present application will be described below with reference to FIG. 8 .

[0073] As shown in Figure 8, the flexible neural probe 100 provided in this embodiment includes an electrode integration layer 300 and an air pressure control layer 200. The electrode integration layer 300 is made of PI, and the air pressure control layer 200 is made of PDMS. The structural thickness of the electrode integration layer 300 and the air pressure control layer 200 is both 100um. The length of the flexible neural probe 100 is 10mm, the width is 1mm, and the thickness of the air chamber 400 in all probes is 20um.

[0074] The flexible neural probe 100 is provided with 50 air chambers 400 . The cross-sectional shape of each air chamber 400 is elliptical, and the short axis of each air chamber 400 is 0.1 mm and the long axis is 0.8 mm.

[0075] The flexible neural probe 100 provided in this embodiment is manufactured using a standard micro-nano processing technology, as shown in FIG9 . The process flow is as follows:

[0076] Step 1: First, negative photoresist SU8 is spin-coated on the surface of the silicon wafer, and the thickness of the photoresist layer is 20um. Then, a standard photolithography process (pre-bake-mask photolithography-post-bake-development-high temperature curing) is used to form a microchannel 600 template; finally, after using oxygen plasma to remove the residual glue, a layer of silane is self-assembled on the surface of the template in the vapor phase to make the template surface super-hydrophobic, thereby forming a surface silanized microfluidic template as shown in C1 in Figure 9.

[0077] Step 2: First, the PDMS base and hardener are mixed in a ratio of 10:1, stirred thoroughly, and vacuum degassed to obtain a PDMS mixed liquid; then, the PDMS mixed liquid is spin-coated on the microfluidic channel 600 template, and the thickness of the PDMS is 60um; then, it is baked at 80°C for 5 hours to fully cure the PDMS, and then cooled to room temperature; finally, a 100um thick PI tape is evenly attached to the PDMS, and the excess corners are trimmed to form a structure shown in C2 in Figure 9, which includes a microfluidic template and a microfluidic structure formed on the microfluidic template.

[0078] Step 3: First, a 40 um thick PDMS is spin-coated on a rectangular quartz glass, and the PDMS is cured by baking at 80°C for 5 hours. Then, the microfluidic structure formed in the second step is peeled off from the microfluidic template, and the microfluidic structure includes the entire probe pattern. Finally, the microfluidic structure and the PDMS layer on the quartz glass are hydrophilized with oxygen plasma and then hot-pressed to form a structure as shown in C3 in FIG9 .

[0079] Step 4: Use an excimer laser to cut out the structure of the probe, and peel off the entire probe from the quartz glass. C4 in FIG. 9 shows the structure of the peeled-off probe.

[0080] The flexible neural probe provided by the present application includes a flexible probe body and a monitoring electrode mechanism, wherein the flexible probe body includes a stacked air pressure control layer and an electrode integration layer, wherein at least one air chamber is formed in the air pressure control layer, and the flexible probe body has a tip, wherein the monitoring electrode mechanism is arranged on the electrode integration layer, and the monitoring electrode mechanism includes at least one electrode, and the electrode is located at the tip of the flexible probe body. By adjusting the air pressure in the air chamber of the flexible neural probe, the flexible probe body can be deformed, and when the flexible probe body is deformed, the tip of the flexible probe body bends, thereby moving the monitoring position of the electrode located at the tip. The process of changing the monitoring position of the flexible neural probe does not require removal from the patient or experimental animal and reinsertion, which can effectively reduce the pain of the patient or experimental animal and increase the service life of the flexible neural probe.

Claims

A flexible neural probe, comprising: A flexible probe body, the flexible probe body comprising a stacked air pressure control layer (200) and an electrode integration layer (300), at least one air chamber (400) being formed in the air pressure control layer (200), and the flexible probe body having a tip; a monitoring electrode mechanism, the monitoring electrode mechanism being arranged on the electrode integration layer (300), and the monitoring electrode mechanism comprising at least one electrode (700), the electrode (700) being located at the tip of the flexible probe body; wherein the air pressure in the air chamber (400) is arranged to be adjustable so as to cause the flexible probe body to deform and change the monitoring position of the electrode (700). The flexible neural probe according to claim 1, wherein: There are a plurality of air chambers (400), and the plurality of air chambers (400) are arranged at intervals in the length direction of the flexible probe body. The flexible neural probe according to claim 2, wherein: A gas injection cavity (500) and at least one microchannel (600) are also formed in the air pressure control layer (200); the gas injection cavity (500) is connected to the air chamber (400) through the microchannel (600); gas is injected into all the air chambers (400) through the gas injection cavity (500) and the microchannel (600); and the gas in the air chamber (400) can be discharged through the microchannel (600) and the gas injection cavity (500). The flexible neural probe according to claim 1, wherein: The monitoring electrode mechanism further comprises a packaging structure (900) and a lead wire (800), and the packaging structure (900) is electrically connected to the electrode (700) via the lead wire (800). The flexible neural probe according to claim 4, wherein: There are a plurality of electrodes (700), each of which is arranged at the tip of the flexible probe body, and each electrode (700) is connected to the packaging structure (900) via a lead wire (800). According to the flexible neural probe according to claim 1, at least one of the following is satisfied: the length a of the flexible probe body is 1mm-100mm; the width b of the flexible probe body is 200um-2000um; the tip of the flexible probe body includes two waist sides c of equal length and at an angle, and the ratio of the length of the waist side c to the width b of the flexible probe body is 0.6-1.

5. The flexible neural probe according to claim 1, wherein: The thickness of the gas pressure control layer (200) is greater than the thickness of the electrode integration layer (300). According to the flexible neural probe of claim 7, at least one of the following conditions is satisfied: the thickness of the air pressure control layer (200) is 40um-200um; the thickness of the electrode integration layer (300) is 10um-200um. The flexible neural probe according to claim 1, wherein: The cross-sectional shape of the air chamber (400) is polygonal. The flexible neural probe according to claim 1, wherein: The cross-sectional shape of the air chamber (400) is elliptical. The flexible neural probe according to claim 9, wherein: The air chamber (400) includes a major axis and a minor axis, the major axis is parallel to the width direction of the flexible probe body, and the minor axis is parallel to the length direction of the flexible probe body; the difference between the width of the flexible probe body and the length of the major axis is greater than or equal to 100um; the length of the minor axis is less than the length of the flexible probe body, and the ratio of the length of the minor axis to the width of the flexible probe body is less than or equal to 3; the thickness of the air chamber (400) is less than or equal to half the thickness of the air pressure control layer (200). According to the flexible neural probe of claim 11, at least one of the following conditions is satisfied: the length of the long axis is 100um-1900um; the length of the short axis is 20um-5000um; and the thickness of the air chamber (400) is 20um-100um. The flexible neural probe according to claim 11, wherein: The number of the air chambers (400) is multiple, and the ratio of the distance between the geometric centers of two adjacent air chambers (400) to the length of the short axis is greater than or equal to 1.

5. According to the flexible neural probe of claim 3, at least one of the following conditions is satisfied: the width of the microchannel (600) is 10um-40um; the height of the microchannel (600) is equal to the height of the gas injection chamber (500). The flexible neural probe according to any one of claims 1 to 14, wherein: The air pressure control layer (200) is a sheet structure made of a flexible polymer material, and the flexible polymer material is one of polydimethylsiloxane, polyimide, polycarbonate and polyparaxylene. The flexible neural probe according to any one of claims 1 to 14, wherein: The electrode integration layer (300) is a sheet structure made of a flexible polymer material, wherein the flexible polymer material is one of polyimide, polyparaxylene, polycarbonate and polymethyl methacrylate. The flexible neural probe according to any one of claims 1 to 14 satisfies at least one of the following conditions: the air pressure control layer (200) and the electrode integrated layer (300) are bonded; the air pressure control layer (200) and the electrode integrated layer (300) are connected by hot pressing bonding; the air pressure control layer (200) and the electrode integrated layer (300) are connected by ultrasonic bonding; the air pressure control layer (200) and the electrode integrated layer (300) are connected by laser bonding.

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