Exhaust air acid-alkali washing and residual cold recycling compound system for electronic factory building

Abstract

The invention discloses an electronic plant exhaust air acid-alkali washing and residual cold recovery composite system, which is applied to an exhaust system connected with a clean area of an electronic plant and comprises a composite tower body, an exhaust fan and a chimney which are sequentially connected between the clean area of the electronic plant and the atmosphere, an air inlet is formed in the lower part of the side wall of the composite tower body, and an air outlet is formed in the lower part of the side wall of the composite tower body. An exhaust port is formed in the top of the composite tower body; a heat exchange assembly and an alkali washing structure are sequentially arranged between the air inlet and the air outlet in the composite tower body from bottom to top, and the heat exchange assembly is connected with an external refrigerating machine condenser. Waste cold of exhaust air of the electronic plant is recycled to the maximum extent while a large amount of acid-base waste gas of the electronic plant is treated safely and reaches the standard, and the energy-saving effect is good; in addition, the number of part of cooling towers and cooling water pumps of the plant refrigeration system can be reduced, corresponding equipment investment is reduced, and the occupied area of the cooling towers is also reduced.

Description

Technical Field

[0001] The invention relates to the technical field of exhaust waste cooling recovery in electronic workshops, and in particular to an exhaust acid-base washing and waste cooling recovery composite system in electronic workshops. Background Art

[0002] As the electronics manufacturing industry is booming, the scale and number of electronics factories are constantly increasing. As an industry with huge energy consumption, the energy conservation issue of electronics factories urgently needs to be paid attention to and resolved by the industry.

[0003] Many electronic product production processes are equipped with large-volume acid and alkali exhaust and acid and alkali waste gas treatment systems for air cleanliness, temperature and humidity control, or process acid and alkali waste gas discharge. These acid and alkali waste gases often have a lower air temperature (generally 22~23℃), but because they contain harmful acid and alkali gases, it is difficult to recover their low-temperature residual cooling, resulting in a certain amount of energy waste.

[0004] Based on the existing technology in this field, there is an urgent need to develop an economical and efficient large-volume exhaust cold recovery system for electronic factories, which can maximize the recovery of exhaust cold from electronic factories and save energy while ensuring the safety and compliance of acid and alkali waste gas treatment. Summary of the invention

[0005] In view of the above-mentioned defects in the prior art, a composite system for acid-base washing and residual cooling recovery of electronic factory exhaust is provided. While ensuring the safety and compliance of large amounts of acid-base waste gas treatment in the electronic factory, it recovers the residual cooling of the electronic factory exhaust to the greatest extent, achieving good energy-saving effect.

[0006] The technical solution adopted by the present invention to solve the above technical problems is: The composite system of acid-base washing and residual cold recovery for exhaust of electronic factory is used in the exhaust system connected with the clean area of ​​the electronic factory, including a composite tower body, an exhaust fan and a chimney which are sequentially connected between the clean area of ​​the electronic factory and the atmosphere, an air inlet is arranged at the lower part of the side wall of the composite tower body, and an exhaust port is arranged at the top of the composite tower body; heat exchange components and alkali washing structures are sequentially arranged from bottom to top in the composite tower body between the air inlet and the exhaust port, and the heat exchange components are connected to the condenser of an external refrigerator.

[0007] According to the above technical scheme, the alkaline washing structure includes a packing layer arranged at the lower part, a spray assembly arranged at the middle part, a demister arranged at the upper part, and a washing water circulation pipeline assembly connected to the spray assembly; a water collecting chamber is provided at the bottom of the composite tower body, the water inlet is located at the upper part of the water collecting chamber, and the spray assembly is connected to the water collecting chamber through the washing water circulation pipeline assembly.

[0008] According to the above technical solution, the washing water circulation pipeline assembly includes a circulation pipeline and a circulation pump arranged on the circulation pipeline. One end of the circulation pipeline is connected to the bottom of the water collecting chamber, and the other end of the circulation pipeline is connected to the water inlet of the spray assembly.

[0009] According to the above technical solution, the packing layer adopts one or more of honeycomb packing, corrugated packing, oblique staggered packing, and the packing material is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemically resistant materials; the surface of the packing layer is designed to be uniform; The demister adopts one or more of the following: grid demister, wire mesh demister, flat plate demister, folded plate demister, and packing demister. The demister is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemically resistant materials; The impeller and casing of the exhaust fan are made of fiberglass and / or stainless steel, which are resistant to acid and alkali corrosion and have certain mechanical strength.

[0010] According to the above technical scheme, a water supply pipe interface and a chemical supply port are provided in the area of ​​the composite tower body located above the water collecting chamber, the water supply pipe interface is connected to the water supply pipe, and the chemical supply port is connected to the chemical supply pipe; a drain outlet is provided on the bottom wall or the lower part of the side wall of the water collecting chamber, and the drain outlet is connected to an external wastewater treatment station through a drainage pipe.

[0011] According to the above technical solution, if the water supply pipe interface and the chemical agent supply port are located on the same vertical line, the chemical agent supply port is located directly above the water supply pipe interface.

[0012] According to the above technical scheme, the heat exchange component includes a heat exchange coil placed in the composite tower body, and a cooling water supply pipe and a cooling water return pipe connected to the heat exchange coil. The cooling water supply pipe and the cooling water return pipe pass through the side wall of the composite tower body and are connected to the external refrigeration machine condenser.

[0013] According to the above technical scheme, the tube type of the heat exchange coil adopts one or more of elliptical tubes, round tubes, twisted tubes, fins, etc.; the material of the heat exchange coil adopts one or more of copper tubes, 316L stainless steel, modified fluoroplastic tubes, or other materials that are resistant to acid and alkali corrosion and have good heat exchange performance.

[0014] According to the above technical solution, a hood is arranged on the top of the chimney; and an inspection port is arranged on the side of the composite tower body.

[0015] According to the above technical solution, a water accumulation cavity is provided at the bottom of the chimney, which is connected to the external wastewater treatment system through a sewage pipe; the area where the exhaust fan is connected to the chimney is located on the side wall between the chimney top outlet and the water accumulation cavity.

[0016] The present invention has the following beneficial effects: 1. Heat exchange components are set in the composite tower body, and the low-temperature acid and alkaline waste gas discharged from the electronic factory is used to cool the circulating cooling water of the external refrigerator condenser. At the same time, the corresponding neutralizing washing liquid in the "acid-base washing and residual cold recovery composite tower" is used to transfer heat and mass with the acid and alkaline substances in the exhaust air and perform neutralization chemical reactions to achieve waste gas washing treatment and meet emission standards.

[0017] In summer, the circulating cooling water treated by this system is lower in temperature than that treated by conventional cooling towers, which can further improve the COP (coefficient of performance) of the refrigeration unit and save operating energy consumption; it can also save some cooling towers and reduce initial investment. The circulating cooling water of this system is set in a closed heat exchange tube to avoid direct contact with acid and alkali waste liquids, ensuring the safety of the refrigeration system.

[0018] Based on the above structure, while ensuring the safety and compliance of large amounts of acid and alkali waste gas treatment in the electronic factory, the excess coolness of the exhaust air in the electronic factory is recovered to the greatest extent, with good energy-saving effect; and the present invention can reduce the number of some cooling towers and cooling water pumps in the factory refrigeration system, reduce the corresponding equipment investment, and also reduce the floor space occupied by the cooling tower.

[0019] 2. Installing a demister in the alkaline washing structure can reduce the mist droplets carried in the exhaust air and achieve the effect of collecting water and defogger.

[0020] 3. A water accumulation chamber is set at the bottom of the chimney to further collect the droplets in the treated flue gas to prevent the droplets from gathering at the smoke exhaust fan and affecting the smoke exhaust fan.

[0021] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. The specific implementation of the present invention is given in detail by the following embodiments and their accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings described herein are used to provide further understanding of the present invention and constitute a part of this application. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0023] Figure 1 It is a schematic diagram of an embodiment of the present invention; In the figure, 1. composite tower body; 1-1. water collecting chamber; 2. exhaust fan; 3. chimney; 4. air inlet; 5. exhaust port; 6. heat exchange component; 6-1. heat exchange coil; 6-2. cooling water supply pipe; 6-3. cooling water return pipe; 7. alkaline washing structure; 7-1. packing layer; 7-2. spray component; 7-3. demister; 7-4. washing water circulation pipeline component; 7-41. circulation pipeline; 7-42. circulation pump; 8. external refrigerator condenser; 9. water supply pipe interface; 9-1. water source; 10. chemical agent supply port; 10-1. chemical agent supply source; 11. drain port; 12. wind hood; 13. maintenance port; 14. water accumulation chamber; 15. electronic factory clean area; 16. processing station; 17. exhaust duct; 18. external wastewater treatment system. DETAILED DESCRIPTION

[0024] The following is combined with Figure 1 The principles and features of the present invention are described, and the examples are only used to explain the present invention and are not used to limit the scope of the present invention. In the following paragraphs, the present invention is described in more detail by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer according to the following description and claims. It should be noted that the drawings are all in a very simplified form and are not in precise proportions, and are only used to facilitate and clearly assist in explaining the purpose of the embodiments of the present invention.

[0025] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0026] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0027] Reference Figure 1 As shown, the electronic factory exhaust acid and alkali washing and residual cold recovery composite system provided by the present invention is applied to the exhaust system connected to the clean area of ​​the electronic factory.

[0028] Example 1 The invention comprises a composite tower body 1, an exhaust fan 2 and a chimney 3 which are sequentially connected between the clean area 15 of the electronic factory and the atmosphere, and each component is connected through an exhaust duct 17. An air inlet 4 is arranged at the lower part of the side wall of the composite tower body, and an exhaust port 5 is arranged at the top of the composite tower body; a heat exchange component 6 and an alkali washing structure 7 are sequentially arranged from bottom to top in the composite tower body between the air inlet and the exhaust port, and the heat exchange component is connected to an external refrigerator condenser 8.

[0029] A heat exchange component is set in the tower body of the composite tower, and the low-temperature acid and alkaline waste gas discharged from the electronic factory is used to cool the circulating cooling water of the external refrigerator condenser. At the same time, the corresponding neutralizing washing liquid in the "acid-base washing and residual cold recovery composite tower" is used to transfer heat and mass with the acid and alkaline substances in the exhaust air, as well as neutralization chemical reactions, to achieve waste gas washing treatment and meet emission standards.

[0030] In summer, the circulating cooling water treated by this system is lower in temperature than that treated by conventional cooling towers, which can further improve the COP of the refrigeration unit and save operating energy consumption; it can also save some cooling towers and reduce initial investment. The circulating cooling water of this system is set in a closed heat exchange tube to avoid direct contact with acid and alkali waste liquids, ensuring the safety of the refrigeration system.

[0031] Based on the above structure, while ensuring the safety and compliance of large amounts of acid and alkali waste gas treatment in the electronic factory, the excess coolness of the exhaust air in the electronic factory is recovered to the greatest extent, with good energy-saving effect; and the present invention can reduce the number of some cooling towers and cooling water pumps in the factory refrigeration system, reduce the corresponding equipment investment, and also reduce the floor space occupied by the cooling tower.

[0032] Example 2 The structure and principle of Example 2 are similar to those of Example 1, except that: a preferred alkali washing structure is provided, which includes a packing layer 7-1 arranged at the bottom, a spray assembly 7-2 arranged at the middle, a demister 7-3 arranged at the top, and a washing water circulation pipeline assembly 7-4 connected to the spray assembly; a water collecting chamber 1-1 is provided at the bottom of the composite tower body, a water inlet is located at the top of the water collecting chamber, and the spray assembly is connected to the water collecting chamber through the washing water circulation pipeline assembly. The spray assembly adopts the existing structure.

[0033] The structural form of the alkali washing structure is not limited to the preferred embodiment provided in this application, and other structural forms can also be adopted. The improvement of this application is that a heat exchange component is arranged in the tower body of the composite tower, and while the exhaust gas is washed, the residual cooling in the exhaust gas can also be utilized. The alkali washing structure is not limited to the above structure.

[0034] The washing circulation pipeline assembly includes a circulation pipeline 7-41 and a circulation pump 7-42 arranged on the circulation pipeline, one end of the circulation pipeline is connected to the bottom of the water collecting chamber, and the other end of the circulation pipeline is connected to the water inlet of the spray assembly.

[0035] In Example 2, the packing layer uses one or more of honeycomb packing, corrugated packing, and oblique staggered packing, and the packing material is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemically resistant materials; the surface of the packing layer is designed to be uniform, so that the liquid can flow evenly to various parts of the surface of the packing material; The demister adopts one or more of the following: grid demister, wire mesh demister, flat plate demister, folded plate demister, and packing demister. The demister is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemically resistant materials. It can reduce the mist droplets carried in the exhaust air and achieve the effect of water collection and demisting. The impeller and casing of the exhaust fan are made of glass fiber reinforced plastics and / or stainless steel and other materials that are resistant to acid and alkali corrosion and have certain mechanical strength.

[0036] Example 3 The structure and principle of Example 3 are similar to those of Examples 1 and 2, except that: a water supply pipe interface 9 and a chemical supply port 10 are provided in the area of ​​the composite tower body located above the water collection chamber, the water supply pipe interface is connected to the water supply pipe, and the chemical supply port is connected to the chemical supply pipeline; a drainage port 11 is provided on the bottom wall or the lower part of the side wall of the water collection chamber, and the drainage port is connected to the external wastewater treatment station 16 through a drainage pipeline. The composite tower body is equipped with a chemical liquid storage barrel and related detection instruments, which can adjust the supply of chemicals, tower body circulating spray water replenishment and waste liquid discharge through signals such as the pH value, conductivity, and temperature of the neutralized washing liquid in the tower. Among them, the water supply pipe interface is connected to the external water source 9-1; the chemical supply port is connected to the external chemical supply source 10-1.

[0037] If the water supply pipe interface and the chemical supply port are located on the same vertical line, the chemical supply port is located directly above the water supply pipe interface. If the water supply pipe interface and the chemical supply port are not on the same vertical line, there is no restriction on the relative position of the two, and they can be at the same horizontal height or at different heights.

[0038] Example 4 The structure and principle of Example 4 are similar to those of Examples 1-3, except that: a preferred heat exchange assembly is provided, which includes a heat exchange coil 6-1 placed in the composite tower body, and a cooling water supply pipe 6-2 and a cooling water return pipe 6-3 connected to the heat exchange coil, the cooling water supply pipe and the cooling water return pipe pass through the side wall of the composite tower body, and are connected to the external refrigerator condenser. The circulating cooling water is in the sealed heat exchange coil, cooling water supply pipe and cooling water return pipe to avoid direct contact with the acid and alkali waste liquid in the tower body.

[0039] Among them, the tube type of the heat exchange coil adopts one or more of elliptical tubes, round tubes, twisted tubes, fins, etc.; the material of the heat exchange coil adopts one or more of copper tubes, 316L stainless steel, modified fluoroplastic tubes, or other materials that are resistant to acid and alkali corrosion and have good heat exchange performance.

[0040] In Examples 1-4, a hood 12 is provided on the top of the chimney; and an inspection port 13 is provided on the side of the composite tower body.

[0041] In Examples 1-4, in order to prevent water contained in the flue gas after alkali washing from gathering at the exhaust fan, a water accumulation chamber 14 is provided at the bottom of the chimney, and the water accumulation chamber is connected to the external wastewater treatment system 18 through a sewage pipe; the area where the exhaust fan is connected to the chimney is located on the side wall between the top outlet of the chimney and the water accumulation chamber.

[0042] Working principle of the present invention: In summer, when a large volume of low-temperature acid-containing waste gas (23°C) discharged from an electronic factory is discharged into the composite tower through the air duct, it first passes through the heat exchange component and exchanges heat with the circulating cooling water (37°C) inside the heat exchange coil. Then it passes through the packing layer and conducts heat transfer, mass transfer and neutralization chemical reaction with the corresponding alkaline washing liquid to reduce the concentration of waste acid substances in the exhaust air. Then it passes through the demister to reduce the droplets carried in the exhaust air. The exhaust air that is safe and up to standard after being treated by the composite tower is then discharged to the sky through the exhaust fan, chimney and hood. The alkaline washing liquid in the composite tower is pressurized by the circulating spray pump of the washing water circulation pipeline assembly and evenly sprayed on the packing layer and the heat exchange coil through the spray pipe assembly; it fully contacts and reacts with the exhaust air in the packing layer, and exchanges sensible heat and latent heat with the circulating cooling water (37°C) inside the coil on the heat exchange coil to take away the heat. The conductivity and pH value in the alkaline washing liquid meet the emission standards and are discharged to the wastewater treatment station. The circulating cooling water (37°C) of the plant refrigeration system is connected to the composite tower of this system to exchange sensible heat and latent heat with the low-temperature acid and alkali exhaust and neutralizing liquid, fully recovering the residual cold in the exhaust, and producing lower cooling water return water (about 25°C), which is lower than the cooling tower return water temperature of conventional projects (32°C). The lower cooling tower return water temperature can improve the coefficient of performance (COP) of the refrigeration unit, reduce the operating energy consumption of the electronic plant, and save operating costs. It effectively recovers the low-temperature residual cold in the large-volume low-temperature acid-containing waste gas, saves energy consumption, and can save some cooling towers, saving the cost and floor space of the corresponding cooling towers and cooling water pumps.

[0043] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any ordinary technician in the industry can smoothly implement the present invention as shown in the drawings and described above. However, any equivalent changes, modifications and evolutions made by technicians familiar with the profession without departing from the scope of the technical solution of the present invention using the technical content disclosed above are all equivalent embodiments of the present invention. At the same time, any equivalent changes, modifications and evolutions made to the above embodiments based on the essential technology of the present invention are still within the protection scope of the technical solution of the present invention.

Claims

1. A composite system for acid and alkali washing and residual cooling recovery of exhaust air in electronic workshops, characterized by: The invention is used in an exhaust system connected to a clean area of ​​an electronic factory, and includes a composite tower body, an exhaust fan and a chimney which are sequentially connected between the clean area of ​​the electronic factory and the atmosphere. An air inlet is arranged at the lower part of the side wall of the composite tower body, and an exhaust port is arranged at the top of the composite tower body. A heat exchange component and an alkaline washing structure are sequentially arranged from bottom to top in the composite tower body between the air inlet and the exhaust port, and the heat exchange component is connected to a condenser of an external refrigerator.

2. The electronic factory exhaust acid-base washing and residual cooling recovery composite system according to claim 1 is characterized by: The alkaline washing structure includes a packing layer arranged at the bottom, a spray assembly arranged at the middle, a demister arranged at the top, and a washing water circulation pipeline assembly connected to the spray assembly; a water collecting chamber is arranged at the bottom of the composite tower body, a water inlet is located at the upper part of the water collecting chamber, and the spray assembly is connected to the water collecting chamber through the washing water circulation pipeline assembly.

3. The electronic factory exhaust acid-base washing and residual cooling recovery composite system according to claim 2 is characterized by: The washing water circulation pipeline assembly comprises a circulation pipeline and a circulation pump arranged on the circulation pipeline, one end of the circulation pipeline is connected to the bottom of the water collecting chamber, and the other end of the circulation pipeline is connected to the water inlet of the spray assembly.

4. The electronic factory exhaust acid-base washing and residual cooling recovery composite system according to claim 2 is characterized by: The packing layer adopts one or more of honeycomb packing, corrugated packing and oblique staggered packing, and the packing material is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemical corrosion resistant materials; the surface of the packing layer is designed to be uniform; The demister adopts one or more of the following: grid demister, wire mesh demister, flat plate demister, folded plate demister, and packing demister. The demister is made of polypropylene, acrylonitrile-butadiene-styrene copolymer, polyethylene, polyvinyl chloride or other chemically resistant materials; The impeller and casing of the exhaust fan are made of fiberglass and / or stainless steel.

5. The electronic factory exhaust acid-base washing and residual cold recovery composite system according to claim 2 is characterized by: A water supply pipe interface and a chemical supply port are provided in the area of ​​the composite tower body above the water collecting chamber, the water supply pipe interface is connected to the water supply pipe, and the chemical supply port is connected to the chemical supply pipeline; a drainage port is provided on the bottom wall or the lower part of the side wall of the water collecting chamber, and the drainage port is connected to an external wastewater treatment station through a drainage pipeline.

6. The electronic factory exhaust acid-base washing and residual cooling recovery composite system according to claim 5 is characterized by: If the water supply pipe interface and the chemical agent supply port are located on the same vertical line, the chemical agent supply port is located directly above the water supply pipe interface.

7. The electronic factory exhaust acid-base washing and residual cold recovery composite system according to claim 1 is characterized by: The heat exchange component includes a heat exchange coil placed in the composite tower body, and a cooling water supply pipe and a cooling water return pipe connected to the heat exchange coil. The cooling water supply pipe and the cooling water return pipe pass through the side wall of the composite tower body and are connected to the external refrigerator condenser.

8. The electronic factory exhaust acid-base washing and residual cooling recovery composite system according to claim 7 is characterized by: The heat exchange coil is made of one or more of an elliptical tube, a round tube, a twisted tube, and a fin; the heat exchange coil is made of one or more of a copper tube, 316L stainless steel, a modified fluoroplastic tube, or other materials that are resistant to acid and alkali corrosion and have good heat exchange performance.

9. The electronic factory exhaust acid-base washing and residual cold recovery composite system according to claim 1 is characterized by: A wind hood is arranged on the top of the chimney; and an inspection port is arranged on the side of the composite tower body.

10. The electronic factory exhaust acid-base washing and residual cold recovery composite system according to claim 1 is characterized by: A water accumulation cavity is provided at the bottom of the chimney, and the water accumulation cavity is connected to an external wastewater treatment system through a sewage pipe; the area where the exhaust fan is connected to the chimney is located on the side wall between the chimney top outlet and the water accumulation cavity.

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