High-pressure preparation method and equipment for electronic-grade high-purity hydrogen chloride

Abstract

The invention discloses a high-pressure preparation method and equipment for electronic-grade high-purity hydrogen chloride, and belongs to the technical field of hydrogen chloride preparation, and the method is characterized by comprising the following specific steps: S1, hydrogen chloride gas generated by a hydrogen chloride synthesis furnace enters a sulfuric acid drying tower to be dried by sulfuric acid; s2, performing primary compression on the hydrogen chloride gas treated by the sulfuric acid drying process, and further absorbing redundant moisture through a low-pressure adsorption process; s3, performing secondary compression and condensation on the hydrogen chloride treated by the low-pressure adsorption procedure, and rectifying through a rectifying tower; s4, carrying out reduced pressure vaporization on the hydrogen chloride liquid from the bottom of the rectifying tower through a vaporization device, and introducing the vaporized hydrogen chloride liquid into a specially-made gas storage tank for storage; wherein a circulating mechanism is arranged between the rectifying tower and the vaporization device. The energy-saving effect is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of hydrogen chloride preparation, and in particular relates to a method and equipment for preparing electronic grade high-purity hydrogen chloride under high pressure. Background Art

[0002] Hydrogen chloride is a common byproduct in industry. It is a cheap and difficult-to-handle chemical. Electronic grade high-purity hydrogen chloride is an important material for silicon wafer etching, passivation, epitaxy, vapor polishing, impurity gettering and clean processing in integrated circuit production. It can also be widely used in metal smelting, optical communication and scientific research. With the development of large-scale integrated circuits, the requirements for the purity of hydrogen chloride are getting higher and higher. In addition to having a purity of more than 99.999%, the content of hydrocarbons and carbon oxides must be strictly limited to prevent the formation of C during silicon wafer processing.

[0003] The existing Chinese patent with publication number CN109467053A discloses a process for preparing hydrogen chloride. The hydrogen chloride preparation device used in the process includes a reaction tank and a controller. Concentrated hydrochloric acid is contained in the reaction tank. An air outlet is arranged on the other side of the top of the reaction tank. A sulfuric acid nozzle is arranged in the reaction tank. A stirring module is arranged in the reaction tank. The stirring module includes a motor, a rotating shaft, an elastic ball, a connecting rod, a stirring rod, a sealing box and a collar. The motor is fixedly installed at the bottom end of the reaction tank. One end of the rotating shaft passes through the reaction tank and is connected to the motor, and the other end is fixedly connected to the elastic ball. The elastic ball is located in the inner ring of the collar, and the top of the elastic ball is hinged to the center of the bottom of the sealing box through a rod, and a steel ball is arranged in the elastic ball.

[0004] Although the above-mentioned high-purity hydrogen chloride preparation improves the purity of hydrogen chloride gas, a large amount of cold energy is required for condensation, and the process consumes a lot of energy. Improvements are made to this end. Summary of the invention

[0005] The purpose of this application is to provide a method and equipment for preparing electronic grade high-purity hydrogen chloride under high pressure in order to improve the energy saving effect in view of the above-mentioned technical problems.

[0006] The present application provides a method for preparing electronic grade high-purity hydrogen chloride under high pressure, the specific steps of which include:

[0007] S1, hydrogen chloride gas is generated by a hydrogen chloride synthesis furnace and enters a sulfuric acid drying tower for drying by sulfuric acid;

[0008] S2, the hydrogen chloride gas treated by the sulfuric acid drying process is compressed in one stage, and then further absorbs excess water through a low-pressure adsorption process;

[0009] S3, the hydrogen chloride treated in the low-pressure adsorption process is subjected to secondary compression, condensed, and then rectified in a distillation tower;

[0010] S4, the hydrogen chloride liquid coming out from the bottom of the distillation tower is decompressed and vaporized by a vaporizer and then introduced into a special gas storage tank for storage;

[0011] Wherein, a circulation mechanism is arranged between the distillation tower and the vaporization device.

[0012] The condensation of hydrogen chloride gas can be promoted by pressurizing the distillation tower, and then the hydrogen chloride liquid is decompressed and vaporized through a vaporizer. The low temperature generated by the vaporization is transferred to the distillation tower through a circulation mechanism, which further accelerates the condensation of the hydrogen chloride gas, thereby obtaining electronic grade high-purity hydrogen chloride. Heat exchange is carried out through the circulation mechanism, which reduces other condensation structures and improves energy-saving performance.

[0013] The present application also provides a device for a high-pressure preparation method of electronic-grade high-purity hydrogen chloride, wherein the distillation tower comprises:

[0014] The cylinder body includes a cylinder top, a middle section, and a cylinder bottom;

[0015] Condenser, installed in the middle section;

[0016] A compression pump connected to the top of the cylinder;

[0017] The valve body assembly is installed between the bottom of the cylinder and the vaporizing device;

[0018] The vaporizing device is connected to the bottom of the cylinder, and the circulation mechanism is connected between the condenser and the vaporizing device.

[0019] The top, middle section and bottom of the cylinder are connected and installed by fasteners to form a distillation tower. The dried hydrogen chloride gas is input into the top of the cylinder through a compression pump, and the pressure in the distillation tower is controlled at the same time. The hydrogen chloride gas condenses into hydrogen chloride liquid when passing through the condenser and flows into the bottom of the cylinder. The speed of the hydrogen chloride liquid flowing to the vaporization device is controlled by the valve body assembly. The circulation mechanism is connected between the condenser and the vaporization device to transfer the low temperature generated by vaporization to the condenser, thereby further improving the condensation efficiency of the condenser.

[0020] Furthermore, the circulation mechanism comprises:

[0021] Circulation pump;

[0022] Connecting pipe, connected to the circulation pump;

[0023] A first winding tube, wound around the spiral wire of the condenser tube;

[0024] Wherein, the vaporization device is provided with a pressure reducing pipe, and the pressure reducing pipe is provided with a second winding pipe, and the second winding pipe is wound along the spiral line of the pressure reducing pipe.

[0025] The circulation mechanism transfers heat through the coolant, and the coolant circulates through the circulation pump. The first winding tube is wound around the condenser tube, so that the coolant exchanges heat with the condenser tube through the first winding tube, and the second winding tube is wound around the pressure reducing tube, so that the coolant exchanges heat with the pressure reducing tube through the second winding tube, and the hydrogen chloride liquid is re-vaporized into hydrogen chloride gas through the pressure reducing tube.

[0026] Furthermore, the first winding tube and the second winding tube are both provided with a heat conducting member, and the heat conducting member includes:

[0027] The winding part abuts against the outer wall surface of the corresponding condenser pipe and pressure reducing pipe;

[0028] The heat conducting part is connected to the winding part, and the heat conducting part is inserted into the corresponding first winding tube and the second winding tube.

[0029] The contact area with the outer wall of the condenser tube and the pressure reducing tube is increased by the winding part, thereby improving the heat conduction efficiency. The contact area with the coolant is increased by the heat conduction part, thereby further improving the heat conduction efficiency. The winding part is integrally connected with the heat conduction part, and the heat conducting part is integrally connected with the corresponding first winding tube and second winding tube.

[0030] Furthermore, the valve body assembly includes:

[0031] The valve seat is placed at the bottom of the cylinder;

[0032] The first cavity is placed at the bottom of the cylinder;

[0033] A first piston is disposed in the first cavity;

[0034] A rod body connected to the first piston;

[0035] A telescopic column, mounted and connected to the valve seat;

[0036] A telescopic chamber is disposed at the bottom of the cylinder and is adapted to the telescopic column;

[0037] A second piston is disposed in the telescopic chamber and connected to the telescopic column;

[0038] An adjusting mechanism, mounted and connected to the valve seat;

[0039] Wherein, the telescopic cavity is connected to the first cavity.

[0040] The valve seat is movably installed at the bottom of the cylinder. The position of the valve seat is adjusted by an adjusting mechanism to open the valve seat. The valve seat is installed and connected to the rod body, and the rod body is installed and connected to the first piston. The first piston is movably installed in the first cavity. When the pressure at the bottom of the cylinder rises, the pressure acts on the valve seat to move the first piston in the first cavity. The first cavity is connected to the telescopic cavity, which transmits the pressure to the telescopic cavity, so that the second piston and the telescopic column in the telescopic cavity move, thereby realizing fine adjustment of the opening of the valve seat according to the pressure at the bottom of the cylinder.

[0041] Furthermore, the regulating mechanism comprises:

[0042] A first electromagnet is mounted on the second piston;

[0043] The second electromagnet is installed in the telescopic cavity and corresponds to the first electromagnet.

[0044] The first electromagnet is installed on the second piston, and the second electromagnet is installed in the telescopic chamber. The first electromagnet and the second electromagnet control the movement of the valve seat by generating a mutually repelling force.

[0045] Furthermore, the distillation tower further comprises:

[0046] Coil, placed on top of the cylinder;

[0047] a first control valve connected to the vaporizing device;

[0048] a second control valve connected to the coil;

[0049] The first control valve is connected to the circulation pump and the first winding pipe, and the second control valve is connected to the coil and the circulation pump.

[0050] The coil is arranged on the top of the cylinder. When the distillation tower just starts to work, the condenser is connected to the coil through the second control valve, and the condenser is disconnected from the vaporization device through the first control valve, so as to improve the temperature uniformity in the distillation tower and improve the stability of the condensation performance of the hydrogen chloride cavity. When the specified hydrogen chloride liquid is produced at the bottom of the cylinder, the control valve body assembly is opened. At this time, the condenser is connected to the vaporization device through the first control valve, and the condenser is disconnected from the coil through the second control valve, so as to realize the heat exchange cycle between the vaporization device and the condenser. The first control valve and the second control valve are both two-position four-way solenoid valves or three-position four-way solenoid valves.

[0051] Furthermore, a gas phase outlet is provided at the top of the cylinder top.

[0052] The other separated impurity gases in the distillation tower are discharged through the gas outlet, which is located at the top of the cylinder.

[0053] The beneficial effects of this application are:

[0054] 1. The hydrogen chloride is transformed between the gas phase and the liquid phase through the distillation tower and the vaporization device, thereby improving the distillation effect of the distillation tower, reducing the use of other cooling systems, and improving energy-saving performance.

[0055] 2. When hydrogen chloride gas passes through the condenser, it condenses into hydrogen chloride liquid and flows into the bottom of the cylinder.

[0056] 3. Control the speed of hydrogen chloride liquid flowing to the vaporizing device through the valve body assembly.

[0057] 4. The circulation mechanism is connected between the condenser and the vaporization device to transfer the low temperature generated by vaporization to the condenser, further improving the condensation efficiency of the condenser. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] Figure 1 The structure of the distillation tower of this application is shown in FIG. Figure 1 ;

[0059] Figure 2 The structure of the distillation tower of this application is shown in FIG. Figure 2 ;

[0060] Figure 3 For this application Figure 2 A magnified view of point A;

[0061] Figure 4 This is a schematic diagram of the structure of the vaporization device of the present application;

[0062] Figure 5 This is a schematic diagram of the structure of the heat conducting element of the present application;

[0063] The reference numerals in the figure are as follows: 100, distillation tower; 110, cylinder; 111, cylinder top; 112, middle section; 113, cylinder bottom; 114, gas phase outlet; 120, condenser; 130, compression pump; 140, coil; 150, first control valve; 160, second control valve; 200, vaporization device; 201, circulation mechanism; 210, circulation pump; 220, connecting pipe; 230, first winding pipe; 240, pressure reducing pipe; 250, second winding pipe; 260, heat conducting member; 261, winding part; 262, heat conducting part; 300, valve body assembly; 310, valve seat; 320, first cavity; 330, first piston; 340, rod; 350, telescopic column; 360, telescopic cavity; 370, second piston; 380, adjustment mechanism; 381, first electromagnet; 382, ​​second electromagnet. DETAILED DESCRIPTION

[0064] The following will be combined with the drawings in the embodiments of the present application to clearly describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments in the present application belong to the scope of protection of this application.

[0065] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0066] The following provides a detailed description of the embodiments of the present application through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0067] Embodiment 1:

[0068] like Figure 1 As shown, the embodiment of the present application provides a method for preparing electronic grade high-purity hydrogen chloride under high pressure, and the specific steps include:

[0069] S1, hydrogen chloride gas is generated by a hydrogen chloride synthesis furnace and enters a sulfuric acid drying tower for drying by sulfuric acid;

[0070] S2, the hydrogen chloride gas treated by the sulfuric acid drying process is compressed in one stage, and then further absorbs excess water through a low-pressure adsorption process;

[0071] S3, the hydrogen chloride treated in the low-pressure adsorption step is subjected to secondary compression, condensed, and then distilled in a distillation tower 100;

[0072] S4, the hydrogen chloride liquid coming out from the bottom of the distillation tower 100 is introduced into a special gas storage tank for storage after being decompressed and vaporized by the vaporization device 200;

[0073] Wherein, a circulation mechanism 201 is provided between the distillation tower 100 and the vaporization device 200 .

[0074] The condensation of hydrogen chloride gas can be promoted by pressurizing the distillation tower 100, and then the hydrogen chloride liquid is decompressed and vaporized through the vaporization device 200, and the low temperature generated by the vaporization is transferred to the distillation tower 100 through the circulation mechanism 201, so as to further accelerate the condensation of the hydrogen chloride gas, thereby obtaining electronic grade high-purity hydrogen chloride. Heat exchange is performed through the circulation mechanism 201, which reduces other condensation structures and improves energy-saving performance.

[0075] Embodiment 2:

[0076] like Figure 1-Figure 4 As shown, the present application also provides a device for a high-pressure preparation method of electronic grade high-purity hydrogen chloride, wherein the distillation tower 100 comprises:

[0077] The cylinder 110 includes a cylinder top 111, a middle section 112, and a cylinder bottom 113;

[0078] The condenser 120 is installed in the middle section 112;

[0079] A compression pump 130 connected to the cylinder top 111;

[0080] The valve body assembly 300 is installed between the cylinder bottom 113 and the vaporization device 200;

[0081] The vaporization device 200 is connected to the cylinder bottom 113 , and the circulation mechanism 201 is connected between the condenser 120 and the vaporization device 200 .

[0082] The top 111, the middle section 112 and the bottom 113 of the cylinder are connected and installed by fasteners to form a distillation tower 100. The dried hydrogen chloride gas is input into the top 111 of the cylinder through the compression pump 130, and the pressure in the distillation tower 100 is controlled at the same time. The hydrogen chloride gas condenses into hydrogen chloride liquid when passing through the condenser 120 and flows into the bottom 113 of the cylinder. The speed of the hydrogen chloride liquid flowing to the vaporization device 200 is controlled by the valve body assembly 300. The circulation mechanism 201 is connected between the condenser 120 and the vaporization device 200 to transfer the low temperature generated by vaporization to the condenser 120, thereby further improving the condensation efficiency of the condenser 120.

[0083] Furthermore, the circulation mechanism 201 includes:

[0084] Circulation pump 210;

[0085] A connecting pipe 220 connected to the circulation pump 210;

[0086] A first winding tube 230, wound around the spiral wire of the condenser tube 120;

[0087] The vaporization device 200 is provided with a pressure reducing pipe 240 , and the pressure reducing pipe 240 is provided with a second winding pipe 250 , and the second winding pipe 250 is wound along the spiral line of the pressure reducing pipe 240 .

[0088] The circulation mechanism 201 transfers heat through the coolant, and the coolant circulates through the circulation pump 210. The first winding tube 230 is wound around the condenser tube 120, so that the coolant exchanges heat with the condenser tube 120 through the first winding tube 230. The second winding tube 250 is wound around the pressure reducing tube 240, so that the coolant exchanges heat with the pressure reducing tube 240 through the second winding tube 250, and the hydrogen chloride liquid is re-vaporized into hydrogen chloride gas through the pressure reducing tube 240.

[0089] Furthermore, the first winding tube 230 and the second winding tube 250 are both provided with a heat conducting member 260, and the heat conducting member 260 includes:

[0090] The winding portion 261 abuts against the outer wall surface of the corresponding condensing pipe 120 and the pressure reducing pipe 240;

[0091] The heat conducting portion 262 is connected to the winding portion 261 , and the heat conducting portion 262 is inserted into the corresponding first winding tube 230 and the second winding tube 250 .

[0092] The contact area with the outer wall of the condenser 120 and the pressure reducing tube 240 is increased by the winding portion 261, thereby improving the heat conduction efficiency. The contact area with the coolant is increased by the heat conduction portion 262, thereby further improving the heat conduction efficiency. The winding portion 261 is integrally connected with the heat conduction portion 262, and the heat conducting member 260 is integrally connected with the corresponding first winding tube 230 and second winding tube 250.

[0093] Embodiment 3:

[0094] like Figure 2 , Figure 3 As shown, the embodiment of the present application provides a device for a high-pressure preparation method of electronic-grade high-purity hydrogen chloride. Further, the valve body assembly 300 includes:

[0095] The valve seat 310 is disposed at the bottom 113 of the cylinder;

[0096] The first cavity 320 is disposed at the bottom 113 of the cylinder;

[0097] A first piston 330 is disposed in the first cavity 320;

[0098] The rod body 340 is connected to the first piston 330;

[0099] The telescopic column 350 is installed and connected with the valve seat 310;

[0100] The telescopic chamber 360 is disposed at the bottom 113 of the cylinder and is adapted to the telescopic column 350;

[0101] A second piston 370 is disposed in the telescopic chamber 360 and connected to the telescopic column 350;

[0102] The regulating mechanism 380 is installed and connected with the valve seat 310;

[0103] The telescopic cavity 360 is connected to the first cavity 320 .

[0104] The valve seat 310 is movably installed on the bottom of the cylinder 113. The position of the valve seat 310 is adjusted by the adjusting mechanism 380 to open the valve seat 310. The valve seat 310 is installed and connected to the rod body 340. The rod body 340 is installed and connected to the first piston 330. The first piston 330 is movably installed in the first cavity 320. When the pressure in the bottom of the cylinder 113 rises, the pressure acts on the valve seat 310, so that the first piston 330 is placed in the first cavity 320 and moves. The first cavity 320 is connected with the telescopic cavity 360, so that the pressure is transmitted to the telescopic cavity 360, so that the second piston 370 and the telescopic column 350 in the telescopic cavity 360 move, thereby realizing the fine adjustment of the opening of the valve seat 310 according to the pressure in the bottom of the cylinder 113.

[0105] Furthermore, the adjustment mechanism 380 includes:

[0106] A first electromagnet 381 is mounted on the second piston 370;

[0107] The second electromagnet 382 is installed in the telescopic cavity 360 and corresponds to the first electromagnet 381 .

[0108] The first electromagnet 381 is installed on the second piston 370 , and the second electromagnet 382 is installed in the telescopic chamber 360 . The first electromagnet 381 and the second electromagnet 382 control the movement of the valve seat 310 by generating a mutually repelling force.

[0109] Embodiment 4:

[0110] like Figure 1 , Figure 2 As shown, the embodiment of the present application provides an apparatus for a high-pressure preparation method of electronic-grade high-purity hydrogen chloride. Further, the distillation tower 100 also includes:

[0111] The coil 140 is placed on the top 111 of the cylinder;

[0112] A first control valve 150 is connected to the vaporization device 200;

[0113] A second control valve 160 connected to the coil 140;

[0114] The first control valve 150 is connected to the circulation pump 210 and the first winding pipe 230 , and the second control valve 160 is connected to the coil 140 and the circulation pump 210 .

[0115] The coil 140 is arranged at the top 111 of the cylinder. When the distillation tower just starts to work, the condenser 120 is connected to the coil 140 through the second control valve 160, and the condenser 120 is disconnected from the vaporization device 200 through the first control valve 150, so as to improve the temperature uniformity in the distillation tower and improve the stability of the condensation performance of the hydrogen chloride cavity. When the specified hydrogen chloride liquid is produced at the bottom 113 of the cylinder, the control valve body assembly 300 is opened. At this time, the condenser 120 is connected to the vaporization device 200 through the first control valve 150, and the condenser 120 is disconnected from the coil 140 through the second control valve 160, so as to realize the heat exchange cycle between the vaporization device 200 and the condenser 120. The first control valve 150 and the second control valve 160 are both two-position four-way solenoid valves or three-position four-way solenoid valves.

[0116] Furthermore, a gas phase outlet 114 is provided at the top of the cylinder top 111 .

[0117] The other impurity gases separated in the distillation tower are discharged through the gas outlet, which is located at the top of the cylinder top 111.

[0118] It should be noted that, in this article, the terms "comprise", "include" or any other variant thereof are intended to cover non-exclusive inclusion, so that the process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise one..." do not exclude the presence of other identical elements in the process, method, article or device including the element. In addition, it should be pointed out that the scope of the methods and devices in the embodiments of the present application is not limited to performing functions in the order shown or discussed, and may also include performing functions in a substantially simultaneous manner or in reverse order according to the functions involved, for example, the described method may be performed in an order different from that described, and various steps may also be added, omitted, or combined. In addition, the features described with reference to certain examples may be combined in other examples.

[0119] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A method for preparing electronic grade high-purity hydrogen chloride under high pressure, characterized in that: The specific steps include: S1, hydrogen chloride gas is generated by a hydrogen chloride synthesis furnace and enters a sulfuric acid drying tower for drying by sulfuric acid; S2, the hydrogen chloride gas treated by the sulfuric acid drying process is compressed in one stage, and then further absorbs excess water through a low-pressure adsorption process; S3, the hydrogen chloride treated in the low-pressure adsorption step is subjected to secondary compression, condensed, and then distilled in a distillation tower (100); S4, the hydrogen chloride liquid coming out from the bottom of the distillation tower (100) is introduced into a special gas storage tank for storage after being decompressed and vaporized by the vaporization device (200); Wherein, a circulation mechanism (201) is provided between the distillation tower (100) and the vaporization device (200).

2. An apparatus suitable for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 1, characterized in that: The distillation tower (100) comprises: The cylinder (110) comprises a cylinder top (111), a middle section (112), and a cylinder bottom (113); A condenser (120) is installed in the middle section (112); A compression pump (130) connected to the cylinder top (111); A valve body assembly (300) is installed between the cylinder bottom (111) and the vaporization device (200); The vaporization device (200) is connected to the bottom of the cylinder (113), and the circulation mechanism (201) is connected between the condenser (120) and the vaporization device (200).

3. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 2 is characterized in that: The circulation mechanism (201) comprises: Circulation pump (210); A connecting pipe (220) connected to the circulation pump (210); A first winding tube (230) wound around the spiral wire of the condenser tube (120); The vaporization device (200) is provided with a pressure reducing pipe (240), and the pressure reducing pipe (240) is provided with a second winding pipe (250), and the second winding pipe (250) is wound along the spiral line of the pressure reducing pipe (240).

4. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 3 is characterized in that: The first winding tube (230) and the second winding tube (250) are both provided with a heat conducting member (260), and the heat conducting member (260) comprises: The winding portion (261) abuts against the outer wall surface of the corresponding condensing pipe (120) and the pressure reducing pipe (240); The heat conducting part (262) is connected to the winding part (261), and the heat conducting part (262) is inserted into the corresponding first winding tube (230) and the second winding tube (250).

5. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 4, characterized in that: The valve body assembly (300) comprises: A valve seat (310) is disposed on the bottom of the cylinder (113); A first cavity (320) is disposed at the bottom of the cylinder (113); A first piston (330) is disposed in the first cavity (320); A rod body (340) connected to the first piston (330); A telescopic column (350) is installed and connected to the valve seat (310); A telescopic chamber (360) is disposed at the bottom of the cylinder (113) and is adapted to the telescopic column (350); A second piston (370) is disposed in the telescopic chamber (360) and connected to the telescopic column (350); An adjusting mechanism (380) is installed and connected to the valve seat (310); Wherein, the telescopic cavity (360) is connected to the first cavity (320).

6. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 5, characterized in that: The adjustment mechanism (380) comprises: A first electromagnet (381) is mounted on the second piston (370); The second electromagnet (382) is installed in the telescopic cavity (360) and corresponds to the first electromagnet (381).

7. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 6, characterized in that: The distillation tower (100) further comprises: The coil (140) is placed on the top of the cylinder (111); A first control valve (150) connected to the vaporization device (200); A second control valve (160) connected to the coil (140); The first control valve (150) is connected to the circulation pump (210) and the first winding pipe (230), and the second control valve (160) is connected to the coil (140) and the circulation pump (210).

8. The equipment for the high-pressure preparation method of electronic grade high-purity hydrogen chloride according to claim 7, characterized in that: A gas phase outlet (114) is provided at the top of the cylinder top (111).

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