Rotary sample table of scanning electron microscope

Abstract

The invention provides a rotary sample table of a scanning electron microscope, and relates to the field of microscopic imaging equipment, the rotary sample table comprises a sample table arranged on a servo base, the upper surface of the sample table is provided with at least one sample groove, and the sample groove is used for bearing a plurality of samples; an auxiliary sample pushing mechanism is further arranged on one side of the sample table, an auxiliary push rod flush with the sample groove is arranged on the auxiliary sample pushing mechanism, and the auxiliary push rod can slide along the sample groove; the auxiliary sample pushing mechanism is provided with a driving mechanism for driving the auxiliary push rod to slide along the sample groove; and the auxiliary push rod pushes the plurality of samples to pass through the central position of the sample table in sequence for scanning. Therefore, a plurality of samples can be sequentially scanned and subjected to image acquisition after one-time vacuumizing, and the working efficiency of the scanning electron microscope is greatly improved. The auxiliary sample pushing mechanism adopted by the invention is very simple in structure and small in occupied space, and the structure of the driving mechanism is also very simple, so that the use requirement on the narrow space of the existing scanning electron microscope is met.

Description

Technical Field

[0001] The invention relates to the field of microscopic imaging equipment for biological samples, in particular to a rotating sample stage for a scanning electron microscope. Background Art

[0002] The sample chamber of a scanning electron microscope (SEM) needs to be evacuated to a vacuum environment because SEM uses a high-energy electron beam to scan the sample surface to produce an image. In a vacuum, electrons can propagate in a straight line without being disturbed by molecules in the air, thereby ensuring the accuracy and stability of the electron beam. In addition, moisture, oxygen and other gas molecules in the air may react with the sample or deposit on the sample, causing contamination and affecting the image quality. Vacuum conditions can reduce this risk. Chinese patent document CN117727610A records a reset control method, device, system and storage medium for the scanning position of a sample stage, which can adjust the sample scanning position with high precision. However, the sample chamber needs to be evacuated again for each sample scan, and the number of samples that can be accommodated on the swingable sample stage is limited, because the sample needs to be located in the middle of the sample stage to obtain a suitable focus position, which makes the operation efficiency of the scanning electron microscope low. In addition, the space in the sample chamber is small, and it works in a negative pressure environment. How to complete the automatic positioning and scanning of multiple samples by evacuating at one time is a technical problem in this field. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide a rotating sample stage for a scanning electron microscope, which can realize scanning of multiple samples by vacuuming once, greatly improving the operating efficiency of the scanning electron microscope, and can fully utilize the narrow space in the sample chamber and the power of the servo base to complete the switching operation of multiple samples.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: a scanning electron microscope rotating sample stage, comprising a sample stage arranged on a servo base, at least one sample slot is arranged on the upper surface of the sample stage, and the sample slot is used to carry multiple samples; an auxiliary sample pushing mechanism is also arranged on one side of the sample stage, and an auxiliary push rod is arranged in the auxiliary sample pushing mechanism and is flush with the sample slot, and the auxiliary push rod can slide along the sample slot; The auxiliary sample pushing mechanism is provided with a driving mechanism for driving the auxiliary push rod to slide along the sample slot; The auxiliary push rod pushes multiple samples to pass through the center position of the sample stage in sequence for scanning.

[0005] In a preferred embodiment, the driving mechanism is a hydraulic cylinder, a pneumatic cylinder or an electric push rod.

[0006] In a preferred solution, the driving mechanism is a push rod driving mechanism arranged in the auxiliary sample pushing mechanism; The auxiliary push rod is slidably arranged in the push rod slide groove, the push rod slide groove is arranged on the support frame, teeth are arranged at the bottom of the auxiliary push rod, the push rod driving mechanism is arranged on the push rod slide groove or the support frame, and the end of the push rod driving mechanism is provided with a ratchet mechanism, the ratchet mechanism and the teeth are meshed and connected, and the push rod driving mechanism is provided with stacked piezoelectric elements. The ratchet mechanism drives the auxiliary push rod to slide unidirectionally along the sample slot through the extension and retraction of the push rod driving mechanism.

[0007] In a preferred solution, the servo base is provided with a Y-axis moving mechanism and an X-axis moving mechanism; A plurality of first auxiliary feeding teeth are provided at the edge of the sample slot of the sample stage; The auxiliary push rod is slidably arranged in the push rod slide groove, the push rod slide groove is arranged on the support frame, and a tooth is arranged at the bottom of the auxiliary push rod, and the inclination angle of one side of the tooth and the first auxiliary feed tooth is higher than the inclination angle of the other side, so that the tooth and the first auxiliary feed tooth form a one-way meshing connection; The Y-direction moving mechanism or the X-direction moving mechanism of the servo base reciprocates along the axis of the auxiliary push rod, drives the auxiliary push rod to slide along the sample slot, and pushes multiple samples to pass through the center position of the sample stage in sequence for scanning.

[0008] In the preferred solution, the push rod slide is connected to the support frame through a swing shaft, and a support rod mechanism is also provided to drive the push rod slide to swing; A tension spring is provided between the push rod slide slot and the auxiliary push rod, one end of the tension spring is connected to the push rod slide slot, and the other end is connected to the auxiliary push rod; The teeth of the auxiliary push rod are disengaged from the first auxiliary advance teeth, and the auxiliary push rod is returned to the initial position; In the preferred scheme, one end of the strut mechanism is connected to the support frame, and the other end is connected to the push rod slide groove. The strut mechanism is a group of stacked piezoelectric elements. The extension action of the strut mechanism causes the push rod slide groove to swing, and the teeth of the auxiliary push rod are disengaged from the first auxiliary advance teeth; the retraction action of the strut mechanism causes the teeth of the auxiliary push rod to resume the engagement with the first auxiliary advance teeth.

[0009] In a preferred solution, the servo base is further provided with a rotating mechanism and a swinging mechanism; There are at least three sample slots and a sample unloading slot, the sample slots and the sample unloading slots form a "cross" shape, and the sample slots and the sample unloading slots are interconnected; When the sample stage needs to be rotated, the extension action of the support rod mechanism causes the auxiliary push rod to be disengaged from the sample slot, and the retraction action of the support rod mechanism causes the auxiliary push rod to fall into the sample slot.

[0010] In a preferred embodiment, the center of the sample slot and the sample stage forms a tight fit with the sample or the sample holder; The sample unloading groove and the sample or the sample bracket form a loose fit. When the swing mechanism swings the sample stage to a certain inclination angle, the sample or the sample bracket in the sample unloading groove can slide out of the sample unloading groove.

[0011] In a preferred solution, a carrier bag is provided around the servo base, and the sample or the sample bracket that slides down from the sample unloading groove falls into the carrier bag.

[0012] In a preferred solution, the sample is set on a bracket, and the structure of the bracket is as follows: upper pressing plates are provided on both sides of the upper part of the frame, the upper pressing plates are used to clamp the sample, the upper pressing plates are pressed on both sides of the sample, and a hollow structure is provided at the position corresponding to the frame and the sample; An extended position is also provided on one side of the frame, and a clamping area and an information area are provided on the edge of the extended position; The sample slot is provided with a dovetail slot structure, and the bracket is provided with a corresponding dovetail structure; The structure of the servo base is as follows: the lower part of the sample stage is connected to the swing mechanism to drive the sample stage to swing, the lower part of the swing mechanism is connected to the rotating mechanism to drive the sample stage and the swing mechanism to rotate, the lower part of the rotating mechanism is connected to the Y-direction moving mechanism and the X-direction moving mechanism to drive the sample stage, the swing mechanism and the rotating mechanism to move along the X-direction or Y-direction, and the lower part of the Y-direction moving mechanism and the X-direction moving mechanism is connected to the lifting mechanism to drive the sample stage, the swing mechanism, the rotating mechanism, the Y-direction moving mechanism and the X-direction moving mechanism to lift and lower.

[0013] The scanning electron microscope rotating sample stage provided by the present invention has the following beneficial effects compared with the prior art: 1. The present invention can load multiple samples at one time, so that after vacuuming once, multiple samples can be scanned and imaged in sequence, and each sample can be observed at an angle, greatly improving the working efficiency of the scanning electron microscope.

[0014] 2. The auxiliary sample pushing mechanism adopted in the present invention has a very simple structure and occupies a small space. The structure of the driving mechanism is also very simple, which meets the use requirements of the narrow space of the existing scanning electron microscope.

[0015] 3. In an optimized solution of the present invention, a "cross"-shaped arrangement structure is adopted, and the number of samples that can be loaded at one time can reach 13, further improving the experimental efficiency.

[0016] 4. The bracket of the present invention can better carry samples, especially through the adaptation of shape and precision, so that the bracket can better cooperate with the sample slot, for example, to push multiple samples in the sample slot to the center of the sample stage, and to unload the samples located in the center. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments: Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0018] Figure 2 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0019] Figure 3 for Figure 1 A local enlarged schematic diagram of point B in the middle.

[0020] Figure 4 It is a top view of the sample stage and the auxiliary sample pushing mechanism in the present invention.

[0021] Figure 5 It is a schematic diagram of the structure of the bracket of the sample in the present invention.

[0022] Figure 6 It is a partially enlarged schematic diagram of the auxiliary sample pushing mechanism in the present invention. In the figure: bracket 1, clamping area 101, information area 102, upper pressing plate 103, frame 104, sample 2, sample table 3, sample slot 31, first auxiliary feeding tooth 32, sample unloading slot 33, auxiliary sample pushing mechanism 4, auxiliary push rod 41, push rod slide 42, swing shaft 43, support rod mechanism 44, tension spring 45, support frame 46, ratchet mechanism 47, push rod driving mechanism 48, teeth 49, rotating mechanism 5, Y-axis moving mechanism 6, X-axis moving mechanism 7, swing mechanism 8, lifting mechanism 9, loading bag 10, servo base 100. DETAILED DESCRIPTION

[0023] Embodiment 1: See also Figures 1 to 3 As shown in , 6 , a scanning electron microscope rotating sample stage includes a sample stage 3 disposed on a servo base 100 , at least one sample groove 31 is disposed on the upper surface of the sample stage 3 , and the sample groove 31 is used to carry a plurality of samples 2; An auxiliary sample pushing mechanism 4 is also provided on one side of the sample stage 3. The auxiliary sample pushing mechanism 4 is provided with an auxiliary push rod 41 flush with the sample slot 31. The auxiliary push rod 41 can slide along the sample slot 31. The auxiliary sample pushing mechanism 4 is provided with a driving mechanism for driving the auxiliary push rod 41 to slide along the sample slot 31; The auxiliary push rod 41 pushes the multiple samples 2 to pass through the center of the sample stage 3 for scanning. With this structure, a vacuum pumping operation can be performed once to complete the scanning of multiple groups of samples.

[0024] The preferred solution is Figure 1In the embodiment, the structure of the servo base 100 is as follows: the lower part of the sample stage 3 is connected to the swing mechanism 8 to drive the sample stage 3 to swing, the lower part of the swing mechanism 8 is connected to the rotating mechanism 5 to drive the sample stage 3 and the swing mechanism 8 to rotate, the lower part of the rotating mechanism 5 is connected to the Y-direction moving mechanism 6 and the X-direction moving mechanism 7 to drive the sample stage 3, the swing mechanism 8 and the rotating mechanism 5 to move along the X-direction or the Y-direction, and the lower parts of the Y-direction moving mechanism 6 and the X-direction moving mechanism 7 are connected to the lifting mechanism 9 to drive the sample stage 3, the swing mechanism 8, the rotating mechanism 5, the Y-direction moving mechanism 6 and the X-direction moving mechanism 7 to lift and lower. The servo base 100 is a structure of the prior art.

[0025] In a preferred solution, the driving mechanism is a hydraulic cylinder, a gas cylinder or an electric push rod. Preferably, the hydraulic cylinder and the electric push rod are used, especially the hydraulic cylinder, which can achieve a smaller volume, but it is difficult to transmit the control signal into the sample chamber and set up the hydraulic station.

[0026] The preferred solution is Figure 6 In the embodiment, the driving mechanism is a push rod driving mechanism 48 provided in the auxiliary sample pushing mechanism 4; The auxiliary push rod 41 is slidably arranged in the push rod slot 42, and the push rod slot 42 is arranged on the support frame 46. A tooth 49 is arranged at the bottom of the auxiliary push rod 41, and a push rod driving mechanism 48 is arranged on the push rod slot 42 or the support frame 46. A ratchet mechanism 47 is arranged at the end of the push rod driving mechanism 48, and the ratchet mechanism 47 is meshed with the tooth 49. The push rod driving mechanism 48 is provided with a stacked piezoelectric element, and the ratchet mechanism 47 drives the auxiliary push rod 41 to slide unidirectionally along the sample slot 31 through the extension and contraction of the push rod driving mechanism 48. With this structure, the sample 2 can be pushed to the center position of the sample stage 3 in sequence for electron microscope scanning by pushing the auxiliary push rod 41. In this example, with reference to TN-1912, the sample stage 3 with a diameter of 38mm can load 4 to 5 samples 2 at a time. Preferably, a copper mesh is used to load the sample in this example.

[0027] The preferred solution is Figure 1 In the embodiment, a carrier bag 10 is provided around the servo base 100 , and the sample 2 or the bracket 1 of the sample 2 that slides down from the sample unloading groove 33 falls into the carrier bag 10 .

[0028] Embodiment 2: The preferred solution is Figures 1 to 4 In the embodiment, the servo base 100 is provided with a Y-direction moving mechanism 6 and an X-direction moving mechanism 7; A plurality of first auxiliary feeding teeth 32 are provided at the edge of the sample slot 31 of the sample stage 3; The auxiliary push rod 41 is slidably arranged in the push rod slide groove 42, and the push rod slide groove 42 is arranged on the support frame 46. A tooth 49 is arranged at the bottom of the auxiliary push rod 41, and the inclination angle of one side of the tooth 49 and the first auxiliary feed tooth 32 is higher than the inclination angle of the other side, so that the tooth 49 and the first auxiliary feed tooth 32 form a one-way meshing connection; The Y-direction moving mechanism 6 or X-direction moving mechanism 7 of the servo base 100 reciprocates along the axis of the auxiliary push rod 41, driving the auxiliary push rod 41 to slide along the sample slot 31, pushing multiple samples 2 to pass through the center position of the sample stage 3 in sequence for scanning. The cleverness of this example lies in the use of the Y-direction moving mechanism 6 and X-direction moving mechanism 7 of the servo base 100 to realize the feeding of the auxiliary push rod 41. Although the displacement of the existing Y-direction moving mechanism 6 and X-direction moving mechanism 7 is not enough to cover at least half of the distance of the entire sample stage 3, the use of Figure 2 As shown in the meshing structure of the tooth 49 and the first auxiliary feed tooth 32, when the sample stage 3 moves to the left, the tooth 49 and the first auxiliary feed tooth 32 disengage from each other and form a new meshing, and when the sample stage 3 moves to the right, the first auxiliary feed tooth 32 moves to the right with the auxiliary push rod 41 through the meshing with the tooth 49, so that the auxiliary push rod 41 pushes the multiple samples 2 to move toward the middle of the sample stage 3.

[0029] In the preferred solution, the push rod slide 42 is connected to the support frame 46 through a swing shaft 43, and a support rod mechanism 44 is also provided to drive the push rod slide 42 to swing; A tension spring 45 is provided between the push rod slot 42 and the auxiliary push rod 41, one end of the tension spring 45 is connected to the push rod slot 42, and the other end is connected to the auxiliary push rod 41; The teeth 49 of the auxiliary push rod 41 are disengaged from the first auxiliary feed teeth 32, and the auxiliary push rod 41 returns to its initial position; The preferred solution is Figure 3 In the figure, one end of the support rod mechanism 44 is connected to the support frame 46, and the other end is connected to the push rod slide groove 42. The support rod mechanism 44 is a group of stacked piezoelectric elements. The extension action of the support rod mechanism 44 causes the push rod slide groove 42 to swing, and the teeth 49 of the auxiliary push rod 41 are disengaged from the first auxiliary advance teeth 32; the retraction action of the support rod mechanism 44 causes the teeth 49 of the auxiliary push rod 41 to resume the meshing state with the first auxiliary advance teeth 32.

[0030] The preferred solution is Figure 1 In the embodiment, the servo base 100 is further provided with a rotating mechanism 5 and a swinging mechanism 8; There are at least three sample slots 31 and a sample unloading slot 33. The sample slots 31 and the sample unloading slots 33 form a "cross" shape. The sample slots 31 and the sample unloading slots 33 are interconnected. When the sample stage 3 needs to be rotated, the extension action of the support rod mechanism 44 causes the auxiliary push rod 41 to be disengaged from the sample slot 31 , and the retraction action of the support rod mechanism 44 causes the auxiliary push rod 41 to fall into the sample slot 31 .

[0031] The preferred solution is Figure 4 In the embodiment, the center position of the sample slot 31 and the sample stage 3 forms a tight fit with the sample 2 or the bracket 1 of the sample 2; that is, the sample slot 31 can form a damping structure with the sample 2 or the bracket 1 to prevent the sample 2 or the bracket 1 from falling when the bracket 1 is tilted.

[0032] The sample unloading groove 33 and the sample 2 or the bracket 1 of the sample 2 form a loose fit, that is, there is no damping between the sample 2 or the bracket 1 and the sample unloading groove 33.

[0033] When the swing mechanism 8 swings the sample stage 3 to a certain inclination angle, for example, above 25°, the sample 2 in the sample unloading groove 33 or the bracket 1 of the sample 2 can slide out of the sample unloading groove 33 and fall into the object pocket 10 .

[0034] In a preferred solution, the sample 10 is arranged on the bracket 1, and the structure of the bracket 1 is as follows: upper pressing plates 103 are arranged on both sides above the frame 104, and the upper pressing plates 103 are used to clamp the sample 10, and the upper pressing plates 103 are pressed on the positions on both sides of the sample 10, and a hollow structure is arranged at the position of the frame 104 corresponding to the sample 10; An extended position is also provided on one side of the frame 104, and a clamping area 101 and an information area 102 are provided at the edge of the extended position; The sample slot 31 is configured as a dovetail slot structure, and the bracket 1 is configured as a corresponding dovetail structure; the bracket 1 can better adapt to the accuracy of the sample slot 31. The bracket 1 is configured as a conductive structure, such as conductive plastic or conductive rubber.

[0035] Embodiment 3: Taking the structure of Example 2 as an example, the method of using the present invention is described. In this example, the sample stage 3 of TN-1912 with a diameter of 38 mm is referred to. Figure 4 In the embodiment, after installing a bracket 1 for each sample 2, a total of 13 samples 2 are installed in three sample slots 31 distributed at 90 degrees apart and in the middle. The bracket 1 is rectangular, which can better define and position in the sample slot 31. After vacuuming, Figures 1 to 3As shown, the support rod mechanism 44 is in a retracted state, the end of the auxiliary push rod 41 falls on the edge of the sample stage 3, and the tooth 49 and the first auxiliary feed tooth 32 form a one-way meshing structure. When the sample stage 3 moves to the left, the tooth 49 disengages from the first auxiliary feed tooth 32. At this time, in the retracted state of the support rod mechanism 44, the tension spring 45 is not enough to retract the auxiliary push rod 41, and the tooth 49 and the first auxiliary feed tooth 32 slide relative to each other for multiple tooth pitches, while pushing the sample 2 to move to the right for a distance, and then the sample stage 3 moves to the right, and the first auxiliary feed tooth 32 pulls the auxiliary push rod 41 to move to the right through the tooth 49 until a sample 2 moves to the center position of the sample stage 3. At this time, the sample 2 at the center position begins to be scanned. After scanning and image acquisition are completed, the reciprocating movement of the sample stage 3 is repeated, and the samples 2 in the current sample slot 31 are scanned in sequence. All samples 2 in the sample slot 31 enter the sample unloading slot 33. When other operations of the sample stage 3 are required, the support rod mechanism 44 is extended, the auxiliary push rod 41 is separated from the sample slot 31, and the sample stage 3 can be rotated, swung, lifted and displaced to complete multiple focus search operations. After completion, the sample stage 3 returns to a horizontal state, and the sample slot 31 is aligned with the auxiliary push rod 41, and the pushing operation of the sample 2 can be continued.

[0036] For the two sample slots 31 perpendicular to the sample unloading slot 33, the first sample slot 31 can be pushed with a sample 2 for scanning and collection, and then the sample stage 3 can be rotated 90°, and then the sample 2 located at the center can be pushed into the sample unloading slot 33 from the sample slot 31 that has been pushed completely, and then the sample stage 3 can be rotated 90° in the opposite direction to continue pushing the next sample 2. The second sample slot 31 can be directly pushed into the opposite empty sample slot 31, or the above steps can be used to push it into the sample unloading slot 33 in sequence. Through the above steps, the scanning of all samples 2 can be completed in one vacuum operation.

[0037] The above-mentioned embodiments are only preferred technical solutions of the present invention and should not be regarded as limitations of the present invention. The embodiments and features in the embodiments of the present application can be arbitrarily combined with each other without conflict. The protection scope of the present invention shall be the technical solutions recorded in the claims, including the equivalent replacement solutions of the technical features in the technical solutions recorded in the claims. That is, equivalent replacement improvements within this scope are also within the protection scope of the present invention.

Claims

1. A rotating sample stage for a scanning electron microscope, characterized in that: It comprises a sample stage (3) arranged on a servo base (100), wherein at least one sample groove (31) is arranged on the upper surface of the sample stage (3), and the sample groove (31) is used to carry a plurality of samples (2); An auxiliary sample pushing mechanism (4) is also provided on one side of the sample table (3), and an auxiliary push rod (41) flush with the sample groove (31) is provided on the auxiliary sample pushing mechanism (4), and the auxiliary push rod (41) can slide along the sample groove (31); The auxiliary sample pushing mechanism (4) is provided with a driving mechanism for driving the auxiliary push rod (41) to slide along the sample groove (31); The auxiliary push rod (41) pushes the plurality of samples (2) to sequentially pass through the center position of the sample stage (3) for scanning.

2. The scanning electron microscope rotating sample stage according to claim 1, characterized in that: The driving mechanism is a hydraulic cylinder, a pneumatic cylinder or an electric push rod.

3. The scanning electron microscope rotating sample stage according to claim 1, characterized in that: The driving mechanism is a push rod driving mechanism (48) arranged on the auxiliary sample pushing mechanism (4); The auxiliary push rod (41) is slidably arranged in a push rod slide groove (42), the push rod slide groove (42) is arranged on a support frame (46), a tooth (49) is arranged at the bottom of the auxiliary push rod (41), a push rod driving mechanism (48) is arranged in the push rod slide groove (42) or on the support frame (46), a ratchet mechanism (47) is arranged at the end of the push rod driving mechanism (48), the ratchet mechanism (47) and the tooth (49) are meshedly connected, and the push rod driving mechanism (48) is provided with stacked piezoelectric elements, and the ratchet mechanism (47) drives the auxiliary push rod (41) to slide unidirectionally along the sample groove (31) through the extension and retraction of the push rod driving mechanism (48).

4. The scanning electron microscope rotating sample stage according to claim 1, characterized in that: The servo base (100) is provided with a Y-direction moving mechanism (6) and an X-direction moving mechanism (7); A plurality of first auxiliary feeding teeth (32) are provided on the edge of the sample groove (31) of the sample stage (3); The auxiliary push rod (41) is slidably arranged in the push rod slide groove (42), the push rod slide groove (42) is arranged on the support frame (46), and a tooth (49) is arranged at the bottom of the auxiliary push rod (41), and the inclination angle of one side of the tooth (49) and the first auxiliary advance tooth (32) is higher than the inclination angle of the other side, so that the tooth (49) and the first auxiliary advance tooth (32) form a one-way meshing connection; The Y-axis moving mechanism (6) or the X-axis moving mechanism (7) of the servo base (100) reciprocates along the axis of the auxiliary push rod (41), driving the auxiliary push rod (41) to slide along the sample slot (31), thereby pushing the plurality of samples (2) to sequentially pass through the center position of the sample stage (3) for scanning.

5. The scanning electron microscope rotating sample stage according to claim 4, characterized in that: The push rod slide groove (42) is connected to the support frame (46) via a swing shaft (43), and is also provided with a support rod mechanism (44) for driving the push rod slide groove (42) to swing; A tension spring (45) is provided between the push rod slide groove (42) and the auxiliary push rod (41), one end of the tension spring (45) is connected to the push rod slide groove (42), and the other end is connected to the auxiliary push rod (41); The teeth (49) of the auxiliary push rod (41) are disengaged from the first auxiliary advance teeth (32), and the auxiliary push rod (41) is returned to the initial position.

6. The scanning electron microscope rotating sample stage according to claim 5, characterized in that: One end of the support rod mechanism (44) is connected to the support frame (46), and the other end is connected to the push rod slide groove (42). The support rod mechanism (44) is a group of stacked piezoelectric elements. The extension action of the support rod mechanism (44) causes the push rod slide groove (42) to swing, and the teeth (49) of the auxiliary push rod (41) and the first auxiliary advance teeth (32) are disengaged; the retraction action of the support rod mechanism (44) causes the teeth (49) of the auxiliary push rod (41) and the first auxiliary advance teeth (32) to resume the meshing state.

7. The scanning electron microscope rotating sample stage according to any one of claims 4 to 6, characterized in that: The servo base (100) is further provided with a rotating mechanism (5) and a swinging mechanism (8); There are at least three sample slots (31) and a sample unloading slot (33), the sample slots (31) and the sample unloading slot (33) form a "cross" shape, and the sample slots (31) and the sample unloading slot (33) are interconnected; When the sample stage (3) needs to be rotated, the extension action of the support rod mechanism (44) causes the auxiliary push rod (41) to be disengaged from the sample slot (31), and the retraction action of the support rod mechanism (44) causes the auxiliary push rod (41) to fall into the sample slot (31).

8. The scanning electron microscope rotating sample stage according to claim 7, characterized in that: The center position of the sample groove (31) and the sample stage (3) forms a tight fit with the sample (2) or the bracket (1) of the sample (2); The sample unloading groove (33) and the sample (2) or the bracket (1) of the sample (2) form a loose fit, and when the swing mechanism (8) swings the sample stage (3) to a certain inclination angle, the sample (2) or the bracket (1) of the sample (2) in the sample unloading groove (33) can slide out of the sample unloading groove (33).

9. The scanning electron microscope rotating sample stage according to claim 8, characterized in that: A loading pocket (10) is provided around the servo base (100), and the sample (2) or the bracket (1) of the sample (2) that slides down from the sample unloading groove (33) falls into the loading pocket (10).

10. The scanning electron microscope rotating sample stage according to any one of claims 7 to 9, characterized in that: The sample (10) is arranged on a bracket (1), and the bracket (1) has the following structure: upper pressing plates (103) are arranged on both sides above a frame (104), the upper pressing plates (103) are used to clamp the sample (10), the upper pressing plates (103) are pressed on both sides of the sample (10), and a hollow structure is arranged at a position corresponding to the frame (104) and the sample (10); An extended position is also provided on one side of the frame (104), and a clamping area (101) and an information area (102) are provided at the edge of the extended position; The sample slot (31) is provided with a dovetail slot structure, and the bracket (1) is provided with a corresponding dovetail structure; The structure of the servo base (100) is as follows: the lower part of the sample stage (3) is connected to the swing mechanism (8) to drive the sample stage (3) to swing; the lower part of the swing mechanism (8) is connected to the rotating mechanism (5) to drive the sample stage (3) and the swing mechanism (8) to rotate; the lower part of the rotating mechanism (5) is connected to the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) to drive the sample stage (3), the swing mechanism (8) and the rotating mechanism (5) to move along the X-direction or the Y-direction; the lower parts of the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) are connected to the lifting mechanism (9) to drive the sample stage (3), the swing mechanism (8), the rotating mechanism (5), the Y-direction moving mechanism (6) and the X-direction moving mechanism (7) to lift and lower.

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