Perovskite film preparation device

Abstract

The invention relates to the technical field of perovskite thin film preparation, and particularly discloses a perovskite thin film preparation device which comprises a working box, a supporting rod is fixedly installed at the lower end of the working box, a power box is fixedly installed at the lower end of the supporting rod, a working table is rotatably installed in the working box, and a protection assembly is arranged in the working box. Under the action of the first protective cover and the second protective cover, a precursor solution on the surface of a workpiece can be splashed onto the inner walls of the first protective cover and the second protective cover when the workbench rotates at a high speed, so that the precursor solution cannot be splashed into the working box; in this way, an operator can conveniently collect the precursor solution subsequently, resource recovery is improved, the precursor solution can be prevented from polluting the internal structure of the working box under the action of the first protective cover and the second protective cover, and cleaning time is saved.

Description

Technical Field

[0001] The invention relates to the technical field of perovskite film preparation, and in particular to a perovskite film preparation device. Background Art

[0002] Perovskite solar cells are a new type of solar cell that has emerged in recent years. In addition to having high photoelectric conversion efficiency, perovskite solar cells also have the advantages of simple structure, solution preparation, and low price. They are a solar energy utilization technology with great development potential, among which the preparation of perovskite layers is the main content of research.

[0003] During the preparation process, it is necessary to adjust the precursor solution on the upper end surface of the workpiece, and then let the workpiece movement rotate at high speed so that the precursor solution can be evenly spread on the upper surface of the workpiece, and then the solution is baked to form the necessary crystals on the surface of the workpiece.

[0004] However, during the operation, since the workpiece is in high-speed rotation, the utilization rate of the precursor solution used is only about 5% or less, resulting in a waste of resources.

[0005] Therefore, in order to increase resource recycling, we propose a perovskite thin film preparation device. Summary of the invention

[0006] The purpose of the present invention is to provide a perovskite thin film preparation device to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: a perovskite film preparation device, comprising a working box, a support rod is fixedly installed at the lower end of the working box, a power box is fixedly installed at the lower end of the support rod, a workbench is rotatably installed inside the working box, and a protective component is provided inside the working box;

[0008] The protection assembly comprises a second motor fixedly mounted on the top of the working box, a bidirectional output shaft is fixedly mounted on the output shaft of the second motor, and a slide is threadedly mounted on the circumferential surface of the bidirectional output shaft;

[0009] Adjustment rods are rotatably mounted on the inner side of the slide, and the right ends of the upper and lower adjustment rods on the left side are rotatably mounted with a first protective cover, and the left ends of the upper and lower adjustment rods on the right side are rotatably mounted with a second protective cover;

[0010] The workbench is located inside the first protective cover and the second protective cover.

[0011] Preferably, an insertion rod is fixedly installed at the outer edge of the opening of the first protective cover, and a groove is opened at the outer edge of the opening of the second protective cover, and the insertion rod can be slidably installed inside the groove.

[0012] By adopting the above technical solution, the insertion rod can slide into the inside of the groove under the action of the above structure.

[0013] Preferably, arc-shaped grooves are provided on the inner lower end circumferential surfaces of the first protective cover and the second protective cover, a second vacuum pump is fixedly installed on the outer side of the first protective cover, a connecting pipe is fixedly installed on the upper end of the second vacuum pump, one end of the connecting pipe away from the second vacuum pump is fixedly connected to the upper end of the first protective cover, and the connecting pipe and the interior of the first protective cover are communicated.

[0014] By adopting the above technical solution, the interior of the cylinder composed of the first protective cover and the second protective cover can be in a vacuum state under the action of the above structure.

[0015] Preferably, a main motor is fixedly mounted on the lower end surface of the working box, a miniature telescopic cylinder is fixedly mounted on the output shaft of the main motor, and the telescopic portion of the miniature telescopic cylinder is fixedly connected to the lower end of the working table.

[0016] By adopting the above technical solution, the main motor can rotate the workbench under the action of the above structure, so the workpiece can rotate synchronously.

[0017] Preferably, an annular groove is provided on the inner lower end circumferential surface of the working box, and a first vacuum pump is rotatably installed inside the annular groove. An adjacent end of the first vacuum pump extends to the outside of the annular groove, and an adjacent end of the first vacuum pump is fixedly installed with an intake pipe, and the upper end of the intake pipe passes through the output shaft of the main motor and is fixedly connected to the workbench, and a suction nozzle is fixedly installed on the upper end of the intake pipe, and the suction nozzle is located on the upper end surface of the workbench.

[0018] By adopting the above technical solution, under the action of the above structure, the first suction nozzle can suck the workpiece and then move the workpiece downward or upward.

[0019] Preferably, a lifting assembly is provided on the outside and inside of the working box, and the lifting assembly includes a telescopic pump fixedly mounted on the upper end surface of the working box, an L-shaped connecting rod fixedly mounted on the telescopic rod of the telescopic pump, a first motor fixedly mounted on the lower end of the L-shaped connecting rod, and a mounting plate fixedly mounted on the lower end of the output shaft of the first motor passing through the working box.

[0020] By adopting the above technical solution, under the action of the above structure, the output shaft of the first motor can rotate with the mounting plate, and then can move the precursor liquid pipe to the top of the workbench.

[0021] Preferably, the lower end surface of the mounting plate is evenly fixedly mounted with precursor liquid tubes in an annular array, the upper ends of the precursor liquid tubes are fixedly mounted with material tubes and air pressure tubes, and the upper ends of the material tubes and air pressure tubes are both located outside the working box.

[0022] By adopting the above technical solution, the interior of the precursor liquid tube can be continuously filled with fluid under the action of the above structure, and the solution can be released under the action of the air pressure tube.

[0023] Preferably, through openings are opened on the left and right sides of the working box, and pick-up and delivery components are provided on the outside and inside of the working box. Third motors are fixedly installed on the left and right sides of the working box. The number of the third motors is four, and they are arranged in groups of two. Threaded rods are fixedly installed on the output shafts of the front and rear two third motors, and sliding lumens are threadedly installed on the circumferential surfaces of the threaded rods.

[0024] By adopting the above technical solution, under the action of the above structure, the output shaft of the third motor can rotate synchronously with the threaded rod.

[0025] Preferably, fixed brackets are fixedly installed on the outer circumferential surfaces of the two front and rear sliding cavities, and a feeding frame is fixedly installed on the right ends of the two front and rear fixed brackets on the right side, a rotating support plate is rotatably installed on the lower end of the feeding frame, and a processing part is slidably installed on the upper end of the rotating support plate inside the feeding frame.

[0026] By adopting the above technical solution, the workpiece can be moved into and out of the working box under the action of the above structure.

[0027] Preferably, a feed tray is fixedly installed on the left side of the two front and rear fixed brackets on the left side, a second suction nozzle is fixedly installed on the lower end face of the feed tray, a third vacuum pump is fixedly installed on the left side face of the working box, a telescopic pipe is fixedly installed on the right side of the third vacuum pump inside the working box, and the right end of the telescopic pipe is fixedly connected to the upper end of the feed tray.

[0028] By adopting the above technical solution, the second suction nozzle can suck the workpiece under the action of the above structure.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] 1. In the present invention, under the action of the first protective cover and the second protective cover, the precursor solution on the surface of the workpiece can be splashed onto the inner walls of the first protective cover and the second protective cover when the workbench rotates at a high speed, so that the precursor solution will not splash onto the interior of the work box, thereby facilitating the subsequent collection of the precursor solution by the operator and improving the recovery of resources. Moreover, under the action of the first protective cover and the second protective cover, the precursor solution can be prevented from contaminating the internal structure of the work box, saving cleaning time.

[0031] 2. The present invention, under the action of the pick-up and delivery assembly, can complete the drying operation of the workpiece without moving the position, thereby avoiding the shaking of the surface of the workpiece, and further ensuring that the thickness of the film is in a consistent state after drying. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 It is an external view of the main body of the present invention;

[0034] Figure 2 It is the internal structure diagram of the working box of the present invention;

[0035] Figure 3 It is a cross-sectional view of the working box of the present invention;

[0036] Figure 4 It is a schematic diagram of a workbench of the present invention;

[0037] Figure 5 It is a schematic diagram of the interior of the working box of the present invention;

[0038] Figure 6 It is a schematic diagram of the lifting assembly of the present invention;

[0039] Figure 7 It is a schematic diagram of the protection component and the pick-up component of the present invention;

[0040] Figure 8 It is a structural diagram of the protection component of the present invention;

[0041] Fig. 9 It is a schematic diagram of the pick-up and delivery component of the present invention.

[0042] Description of reference numerals:

[0043] 1. Power box; 101. Support rod; 2. Working box; 201. Through hole; 202. Ring groove;

[0044] 301, main motor; 302, micro telescopic cylinder; 303, workbench; 304, first vacuum pump; 305, suction pipe; 306, first suction nozzle;

[0045] 4. Lifting assembly; 401. Telescopic pump; 402. L-shaped connecting rod; 403. First motor; 404. Mounting plate; 405. Precursor liquid pipe; 406. Material pipe; 407. Air pressure pipe;

[0046] 5. Protection assembly; 501. Second motor; 502. Bidirectional output shaft; 503. Slide; 504. Adjustment rod; 505. First protective cover; 506. Second protective cover; 507. Insertion rod; 508. Groove; 509. Arc groove; 510. Second vacuum pump; 511. Connecting pipe;

[0047] 6. Pick-up and delivery assembly; 601. third motor; 602. threaded rod; 603. sliding cavity tube; 604. fixed bracket; 605. feeding frame; 606. rotating support plate; 607. workpiece; 608. feeding tray; 609. third vacuum pump; 610. second suction nozzle; 611. telescopic pipe. DETAILED DESCRIPTION

[0048] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] See also Figures 1 to 9 , the present invention provides a technical solution:

[0050] A perovskite film preparation device includes a power box 1, which is used to transmit power to the equipment for subsequent operation to ensure that the equipment can operate normally, and then six support rods 101 are evenly fixedly installed in a circular array on the upper end surface of the power box 1, and a working box 2 is fixedly installed on the upper ends of the six support rods 101. The interior of the working box 2 is a cavity structure, such as Figure 3 As shown, it should be noted that the top of the working box 2 is in an openable state, so as to ensure that personnel can collect the precursor solution.

[0051] A main motor 301 is fixedly mounted at the center of the lower end surface of the working box 2. The output shaft of the main motor 301 extends into the interior of the working box 2. In addition, four miniature telescopic cylinders 302 are fixedly mounted on the output shaft of the main motor 301. Figure 4 shown.

[0052] A workbench 303 is fixedly installed on the top of the telescopic rods of the four miniature telescopic cylinders 302. Secondly, an annular groove 202 is opened on the inner wall of the lower end of the working box 2, and four first vacuum pumps 304 are evenly rotated and installed in an annular array inside the annular groove 202.

[0053] The adjacent ends of the four first vacuum pumps 304 are all fixedly mounted with suction pipes 305, wherein the upper ends of the suction pipes 305 pass through the output shaft of the main motor 301 and are located at the upper end of the output shaft of the main motor 301. Figure 4 As shown, four first suction nozzles 306 are fixedly installed on the upper end surface of the workbench 303 , and the upper ends of the suction pipes 305 are fixedly connected to the corresponding first suction nozzles 306 .

[0054] Therefore, during use, the main motor 301 is started, and the output shaft of the main motor 301 will rotate synchronously with the micro telescopic cylinder 302, and the telescopic rod of the micro telescopic cylinder 302 will operate synchronously with the workbench 303, so that the workbench 303 can rotate synchronously with the subsequent processed part 607 (because the film production processes currently on the market mostly adopt a rotary type, so that the solution on the surface of the processed part 607 can be in a uniform state), and then, the output shaft of the main motor 301 will rotate synchronously with the suction pipe 305, and the suction pipe 305 will rotate with the first vacuum pump 304, and during the rotation of the first vacuum pump 304, one end of the outer side thereof will rotate inside the annular groove 202. Therefore, due to the limitation of the annular groove 202, the outer end of the first vacuum pump 304 will not vibrate, thereby ensuring that the workbench 303 will not vibrate, thereby ensuring the quality of processing.

[0055] Secondly, when the first vacuum pump 304 is operating, the first suction nozzle 306 can generate a greater suction force through the suction pipe 305, so that the first suction nozzle 306 can suck the workpiece 607 of the subsequent operation, so that the workpiece 607 is in a fixed state.

[0056] In addition, a telescopic pump 401 in the lifting assembly 4 is fixedly installed on the outer top of the working box 2, wherein an L-shaped connecting rod 402 is fixedly installed on the telescopic rod of the telescopic pump 401. Figure 5As shown, a first motor 403 is fixedly installed at the lower end of the L-shaped connecting rod 402, and the lower end of the output shaft of the first motor 403 extends into the interior of the working box 2, and a mounting plate 404 is fixedly installed at one end of the output shaft of the first motor 403 located inside the working box 2, as shown in FIG. Figure 5 shown.

[0057] Four precursor liquid pipes 405 are evenly fixedly mounted in an annular array on the lower end surface of the mounting plate 404 (wherein the output shaft of the first motor 403 and the workbench 303 inside the working box 2 are not at the same center, and the workbench 303 and the precursor liquid pipes 405 above are at the same center, as shown in FIG. Figure 5 As shown), therefore, during use, when the output shaft of the first motor 403 rotates with the mounting plate 404, the precursor liquid pipe 405 is always located above the workbench 303, so as to ensure that the liquid drips onto the upper surface of the workpiece 607.

[0058] like Figure 5 As shown, four precursor liquid tubes 405 are fixedly installed at the lower end of the mounting plate 404, and different proportions of solutions are mixed inside each precursor liquid tube 405, so that the four precursor liquid tubes 405 can rotate different workpieces 607; then, a material pipe 406 and an air pressure tube 407 are fixedly installed at the upper end of the precursor liquid tube 405, and the upper ends of the material pipe 406 and the air pressure tube 407 extend to the outside of the working box 2 and are connected to the corresponding pipelines of the outside world. It should be noted that the material pipe 406 and the air pressure tube 407 located inside the working box 2 have a certain length, so as to avoid the material pipe 406 and the air pressure tube 407 being insufficient in length when the mounting plate 404 rotates, which makes the mounting plate 404 unable to rotate.

[0059] Therefore, during use, the telescopic rod of the telescopic pump 401 moves upward with the L-shaped connecting rod 402, and the L-shaped connecting rod 402 can move upward synchronously with the first motor 403, and then the output shaft of the first motor 403 will move synchronously with the mounting disk 404, and the mounting disk 404 will move upward synchronously with the precursor liquid tube 405. On the contrary, when the telescopic rod of the telescopic pump 401 moves downward, the L-shaped connecting rod 402 can move downward synchronously with the first motor 403, and the output shaft of the first motor 403 can move downward with the mounting disk 404, and the mounting disk 404 can move downward with the precursor liquid tube 405, and in the process of the up and down movement of the mounting disk 404, the material tube 406 and the air pressure tube 407 will show stretching and contraction.

[0060] Secondly, the output shaft of the first motor 403 rotates synchronously with the mounting disk 404, and the mounting disk 404 rotates synchronously with the precursor liquid tube 405, so that the corresponding precursor liquid tube 405 can operate on the workpiece 607; in addition, under the action of the material tube 406, the interior of the precursor liquid tube 405 will always be in a state of having a solution, and the air pressure tube 407 will deliver air pressure to the interior of the precursor liquid tube 405, thereby squeezing out the solution inside the precursor liquid tube 405.

[0061] In addition, a protection assembly 5 is provided inside the working box 2, wherein two second motors 501 in the protection assembly 5 are fixedly mounted on the inner upper end of the working box 2, and the two second motors 501 are in a symmetrical state, and a bidirectional output shaft 502 is fixedly mounted on the output shaft of each of the second motors 501, and a slide 503 is threadedly rotatably mounted on the circumferential surface of the bidirectional output shaft 502, and an adjusting rod 504 is rotatably mounted on the inner side surface of the slide 503, such as Figure 8 shown.

[0062] like Figure 8 As shown, the right ends of the two adjustment rods 504 on the left are rotatably mounted with the first protective cover 505, while the left ends of the two adjustment rods 504 on the right are rotatably mounted with the second protective cover 506 (wherein, the outer side of the first protective cover 505 is rotatably connected to the adjustment rod 504, and a return spring is arranged inside it. The upper return spring generates a counterclockwise force, and the lower one generates a clockwise force. After the two forces are offset, the first protective cover 505 can be in a vertical state without being in a tilted state. The force generated at the connection position between the second protective cover 506 and the adjustment rod 504 is in an opposite state to the force generated by the first protective cover 505. The second protective cover 506 Clockwise at the top and counterclockwise at the bottom, so that the second protective cover 506 is in a vertical state), an insertion rod 507 is fixedly installed at the edge of the opening on the right side surface of the first protective cover 505, and a groove 508 is opened at the outer edge of the left opening of the second protective cover 506, and then, arc grooves 509 are opened at the lower ends of the inner parts of the first protective cover 505 and the second protective cover 506, and then, a second vacuum pump 510 is fixedly installed on the outer side of the first protective cover 505, and a connecting pipe 511 is fixedly installed on the upper end of the second vacuum pump 510, and the other end of the connecting pipe 511 is fixedly connected to the first protective cover 505, and is in a through state with the interior of the first protective cover 505.

[0063] Therefore, during use, the second motor 501 is started, and the output shaft of the second motor 501 will rotate with the bidirectional output shaft 502. When the bidirectional output shaft 502 rotates, the upper and lower slides 503 can move in different directions. When the upper and lower slides 503 are close to each other, the adjusting rod 504 can drive the first protective cover 505 and the second protective cover 506 to gradually approach each other, and finally the insertion rod 507 can be slidably installed inside the groove 508, so that the corresponding arc grooves 509 are combined into a ring structure.

[0064] When the two slides 503 gradually move, the first protective cover 505 and the second protective cover 506 can be separated.

[0065] Secondly, start the second vacuum pump 510. Under the action of the connecting pipe 511, the second vacuum pump 510 can put the interior of the combination of the first protective cover 505 and the second protective cover 506 into a vacuum state, so that the workpiece 607 of the subsequent operation can be rotated. It should be noted that ultraviolet lamps are provided at the top of the interior of the first protective cover 505 and the second protective cover 506, which are used to dry the solution on the surface of the workpiece 607 to allow the solution to crystallize. It should be noted that the device currently only uses ultraviolet lamps as a drying method, and the specific drying method needs to be set according to actual conditions.

[0066] Therefore, under the action of the above-mentioned multiple structures, when the workbench 303 rotates, the liquid will be thrown onto the inner walls of the first protective cover 505 and the second protective cover 506 without contaminating other structures. Under the action of the second vacuum pump 510, the workpiece 607 can proceed to the next operation without moving its position, thereby avoiding the flow of liquid on the surface of the workpiece 607 during the movement, which may lead to inconsistent thickness of the subsequently formed film.

[0067] Finally, through openings 201 are provided from the left side to the right side of the working box 2, and then two third motors 601 in the pick-up assembly 6 are fixedly installed on the left side and the right side of the working box 2, and threaded rods 602 are highly installed on the output shafts of the third motors 601, and the threaded rods 602 are located inside the working box 2, and the adjacent ends are in a fitted state, such as Figure 1 and Figure 7 shown.

[0068] Then, a sliding cavity tube 603 is rotatably installed on the circumferential surface of the threaded rod 602, and fixed brackets 604 are fixedly installed on the outer circumferential surfaces of the front and rear sliding cavities 603, and a feeding frame 605 is fixedly installed on the two fixed brackets 604 on the right side. The upper end surface of the feeding frame 605 is in a through state to the center position of the lower end surface, and the lower end surface is a concave structure, and a symmetrical rotating support plate 606 is rotatably installed inside the concave structure, wherein the rotating support plate 606 is rotatably connected to the feeding frame 605 by a rotating shaft, and reset springs are installed at both ends of the rotating shaft to allow the rotating support plate 606 to automatically reset, and a processing part 607 is slidably placed inside the feeding frame 605, and the lower surface of the processing part 607 and the upper end surface of the rotating support plate 606 are in a fitted state.

[0069] Then, a feeding tray 608 is fixedly installed on the left side of the two fixed brackets 604 on the left side, and then, a third vacuum pump 609 is fixedly installed on the left side surface of the working box 2, and a telescopic pipe 611 is fixedly installed on the right side of the third vacuum pump 609, and the right end of the telescopic pipe 611 is fixedly connected to the upper end surface of the feeding tray 608, and a plurality of second suction nozzles 610 are fixedly installed on the lower end surface of the feeding tray 608.

[0070] At this time, the workpiece 607 is placed inside the feeding frame 605, and the two third motors 601 on the right are started. The output shaft of the third motor 601 drives the threaded rod 602 to rotate. When the threaded rod 602 rotates, the sliding cavity tube 603 moves, and then the sliding cavity tube 603 drives the fixed bracket 604 to move to the left, and the fixed bracket 604 drives the feeding frame 605 to move to the upper end surface of the workbench 303.

[0071] At this time, when the telescopic rod of the micro telescopic cylinder 302 is operating, the workbench 303 can move upward with the suction nozzle, and the first vacuum pump 304 is started. The first vacuum pump 304 allows the first suction nozzle 306 to generate suction, and the first suction nozzle 306 can firmly hold the workpiece 607. Then, the telescopic rod of the micro telescopic cylinder 302 moves downward, and the workpiece 607 can be removed under the action of the first suction nozzle 306. At this time, the rotating support plate 606 will reset itself under the action of the reset spring to receive the next workpiece 607.

[0072] It should be noted that the sliding lumens 603 on the circumferential surfaces of the two right threaded rods 602 can be rotated to the circumferential surfaces of the two left threaded rods 602, and the same is true for the two left sliding lumens 603.

[0073] Finally, start the two third motors 601 on the left side. Under the action of the threaded rod 602, the sliding cavity tube 603 can move the fixed bracket 604. The fixed bracket 604 moves and moves the feeding tray 608 to the upper end surface of the workbench 303. Then, under the action of the micro telescopic cylinder 302, the workbench 303 moves the processed workpiece 607 to the bottom of the second suction nozzle 610.

[0074] The third vacuum pump 609 is started, and the third vacuum pump 609 allows the second suction nozzle 610 to suck the workpiece 607 through the telescopic pipe 611. Then, under the action of the threaded rod 602, the feeding tray 608 carries the workpiece 607 through the through-hole 201 and moves to the outside of the working box 2.

[0075] Working principle: First, place the workpiece 607 inside the feeding frame 605, start the third motor 601, and the output shaft of the third motor 601 rotates with the threaded rod 602, so that the sliding cavity 603 moves with the fixed bracket 604, and the fixed bracket 604 moves with the feeding frame 605 to the top of the workbench 303.

[0076] Start the micro telescopic cylinder 302, the telescopic rod of the micro telescopic cylinder 302 moves the workbench 303 upward, the workbench 303 moves the first suction nozzle 306 and the suction pipe 305 downward, the suction pipe 305 can be stretched, and the first suction nozzle 306 fits the lower end surface of the workpiece 607.

[0077] The first vacuum pump 304 is started, and the first vacuum pump 304 allows the first suction nozzle 306 to suck the workpiece 607 through the suction pipe 305. The telescopic rod of the micro telescopic cylinder 302 moves the workbench 303 downward, and then moves the workpiece 607 downward synchronously.

[0078] At this time, the output shaft of the first motor 403 rotates with the mounting disk 404, and the mounting disk 404 rotates synchronously with the precursor liquid tube 405. Then, under the action of the pneumatic tube 407, the solution inside the precursor liquid tube 405 falls onto the upper surface of the workpiece 607. Finally, under the action of the telescopic rod of the telescopic pump 401, the L-shaped connecting rod 402 moves upward, and the L-shaped connecting rod 402 moves upward with the first motor 403. The output shaft of the first motor 403 moves upward synchronously with the mounting disk 404.

[0079] Start the second motor 501, and the output shaft of the second motor 501 rotates with the bidirectional output shaft 502. When the bidirectional output shaft 502 rotates, the slide 503 approaches. When the slide 503 approaches, the adjusting rod 504 rotates. Then, the first protective cover 505 and the second protective cover 506 can be combined into a sealed cylindrical structure, and the boss on the circumferential surface of the workbench 303 will be rotatably installed inside the arc groove 509, further improving the sealing effect.

[0080] Finally, the main motor 301 is started, the output shaft of the main motor 301 rotates synchronously with the micro telescopic cylinder 302, the micro telescopic cylinder 302 rotates synchronously with the workbench 303, and the workbench 303 rotates synchronously with the workpiece.

[0081] When the workpiece 607 rotates, the solution thrown out splashes onto the inside of the first protective cover 505 and the second protective cover 506 without contaminating other structures. After completion, an ultraviolet lamp is used to perform drying and crystallization operations.

[0082] Finally, the finished workpiece 607 is taken out by the feeding tray 608 .

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A perovskite thin film preparation device, comprising a working box (2), a support rod (101) being fixedly mounted at the lower end of the working box (2), and a power supply box (1) being fixedly mounted at the lower end of the support rod (101), characterized in that: A workbench (303) is rotatably mounted inside the working box (2), and a protection component (5) is provided inside the working box (2); The protection assembly (5) comprises a second motor (501) fixedly mounted on the top of the inner part of the working box (2); a bidirectional output shaft (502) is fixedly mounted on the output shaft of the second motor (501); a slide table (503) is threadedly rotatably mounted on the circumferential surface of the bidirectional output shaft (502); Adjustment rods (504) are rotatably mounted on the inner side of the slide (503); the right ends of the two upper and lower adjustment rods (504) on the left side are rotatably mounted with a first protective cover (505); and the left ends of the two upper and lower adjustment rods (504) on the right side are rotatably mounted with a second protective cover (506); The workbench (303) is located inside the first protective cover (505) and the second protective cover (506).

2. A perovskite thin film preparation device according to claim 1, characterized in that: An insertion rod (507) is fixedly installed at the outer edge of the opening of the first protective cover (505), and a groove (508) is opened at the outer edge of the opening of the second protective cover (506), and the insertion rod (507) can be slidably installed inside the groove (508).

3. A perovskite thin film preparation device according to claim 1, characterized in that: An arc groove (509) is provided on the inner lower end circumferential surface of the first protective cover (505) and the second protective cover (506); a second vacuum pump (510) is fixedly installed on the outer side of the first protective cover (505); a connecting pipe (511) is fixedly installed on the upper end of the second vacuum pump (510); one end of the connecting pipe (511) away from the second vacuum pump (510) is fixedly connected to the upper end of the first protective cover (505), and the connecting pipe (511) and the interior of the first protective cover (505) are connected.

4. The perovskite thin film preparation device according to claim 1, characterized in that: A main motor (301) is fixedly mounted on the lower end surface of the working box (2), a miniature telescopic cylinder (302) is fixedly mounted on the output shaft of the main motor (301), and the telescopic portion of the miniature telescopic cylinder (302) is fixedly connected to the lower end of the working table (303).

5. The perovskite thin film preparation device according to claim 1, characterized in that: An annular groove (202) is provided on the circumferential surface of the inner lower end of the working box (2), and a first vacuum pump (304) is rotatably installed inside the annular groove (202), and an adjacent end of the first vacuum pump (304) extends to the outside of the annular groove (202), and an adjacent end of the first vacuum pump (304) is fixedly installed with a suction pipe (305), and the upper end of the suction pipe (305) passes through the output shaft of the main motor (301) and is fixedly connected to the workbench (303), and the upper end of the suction pipe (305) is fixedly installed with a first suction nozzle (306), and the first suction nozzle (306) is located on the upper end surface of the workbench (303).

6. A perovskite thin film preparation device according to claim 5, characterized in that: A lifting assembly (4) is provided on the outside and inside of the working box (2), and the lifting assembly (4) comprises a telescopic pump (401) fixedly mounted on the upper end surface of the working box (2); an L-shaped connecting rod (402) is fixedly mounted on the telescopic rod of the telescopic pump (401); a first motor (403) is fixedly mounted on the lower end of the L-shaped connecting rod (402); and a mounting plate (404) is fixedly mounted on the lower end of the output shaft of the first motor (403) passing through the working box (2).

7. A perovskite thin film preparation device according to claim 6, characterized in that: The lower end surface of the mounting plate (404) is evenly and fixedly mounted with precursor liquid tubes (405) in an annular array, and the upper ends of the precursor liquid tubes (405) are fixedly mounted with material tubes (406) and air pressure tubes (407), and the upper ends of the material tubes (406) and air pressure tubes (407) are both located outside the working box (2).

8. The perovskite thin film preparation device according to claim 1, characterized in that: The left and right sides of the working box (2) are provided with through openings (201), the outside and inside of the working box (2) are provided with pick-up and delivery components (6), the left and right sides of the working box (2) are fixedly installed with third motors (601), the number of the third motors (601) is four, and they are arranged in groups of two, and threaded rods (602) are fixedly installed on the output shafts of the front and rear third motors (601), and sliding lumens (603) are threadedly installed on the circumferential surfaces of the threaded rods (602).

9. A perovskite thin film preparation device according to claim 8, characterized in that: A fixed bracket (604) is fixedly installed on the outer circumferential surface of the two front and rear sliding lumens (603), and a feeding frame (605) is fixedly installed on the right end of the two front and rear fixed brackets (604) on the right side. A rotating support plate (606) is rotatably installed at the lower end of the feeding frame (605), and a processing part (607) is slidably installed at the upper end of the rotating support plate (606) inside the feeding frame (605).

10. The perovskite thin film preparation device according to claim 9, characterized in that: A feeding tray (608) is fixedly installed on the left side of the two front and rear fixed brackets (604) on the left side, and a second suction nozzle (610) is fixedly installed on the lower end surface of the feeding tray (608). A third vacuum pump (609) is fixedly installed on the left side surface of the working box (2). A telescopic pipe (611) is fixedly installed on the right side of the third vacuum pump (609) inside the working box (2), and the right end of the telescopic pipe (611) is fixedly connected to the upper end of the feeding tray (608).

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