Liquid ejecting apparatus, nozzle cover, and method for manufacturing

Abstract

The purpose of the present invention is to provide a highly durable liquid ejecting apparatus that controls the propagation direction of ink mist, a nozzle cover, and a method for manufacturing an article. The liquid ejecting apparatus includes: a liquid ejecting head having a recording element substrate on which a plurality of nozzle ports that eject liquid are disposed; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface that covers at least a portion of a surface of the recording element substrate having the plurality of nozzle openings other than the nozzle openings, characterized in that the first surface has a liquid droplet control region in which the liquid droplet control region is provided with a liquid droplet control region in which the liquid droplet control region is provided with a liquid droplet control region in which the liquid droplet control region is provided. A first slip angle in a first direction in which the wiring member extends is larger than a second slip angle in a second direction orthogonal to the first direction.

Description

Technical Field

[0001] The invention relates to a liquid ejection device, a nozzle cover and a method for manufacturing an article. Background Art

[0002] As a liquid ejection device that ejects liquid to a target, there is an inkjet recording device that ejects ink droplets from a liquid ejection head to a recording medium for printing. The inkjet recording device ejects tiny ink droplets from the nozzle of the liquid ejection head to the recording medium to record desired images such as text or graphics. During the recording operation of the inkjet recording device, since the liquid ejection head is close to the recording medium, the ink scattering (hereinafter also referred to as mist) generated when the ink droplets collide with the recording medium sometimes rebounds to the nozzle surface of the liquid ejection head and contaminates the nozzle surface. In particular, in the liquid ejection head of an on-demand type inkjet recording device, the ejection of ink droplets relies on a weak pressure applied to the ink near the nozzle. Therefore, the ejection energy of the ink droplets is small, and they are arranged at a distance of only a few mm from the recording medium, and the rebound of the ink mist is easy to adhere to the nozzle surface.

[0003] However, since the applied pressure is small, once the nozzle is clogged, the clog cannot be easily self-restored. Therefore, in order to prevent or restore the clogging of the nozzle of the liquid ejection head, a suction operation is performed to remove the clogged ink by sucking ink from the nozzle opening when the printing action is not performed. After the suction, ink sometimes remains on the nozzle surface, and if the ink remains, the nozzle surface is sometimes contaminated. Such contamination of the nozzle surface of the liquid ejection head causes the adhesion of fibers or dust of the recording medium, which becomes the cause of nozzle clogging during long-term use of the liquid ejection head, and sometimes causes adverse effects such as failure to eject ink or flight bending of ink droplets during ejection. In order to solve such a problem, for example, in Patent Document 1, a scraper for wiping is proposed to wipe off the ink on the entire surface of the nozzle surface and prevent poor ink ejection.

[0004] In addition, Patent Document 2 proposes absorbing ink in a gap with a nozzle cover in order to prevent the ink from flowing around to the side of the head or the like.

[0005] Prior Art Literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Laid-Open No. 11-277756

[0008] Patent Document 2: Japanese Patent Application Laid-Open No. 2009-220421 Summary of the invention

[0009] Problems to be solved by the invention

[0010] However, even if the scraper for wiping mechanically contacts the entire surface of the nozzle surface to wipe the nozzle surface for cleaning, residual ink and ink mist may reattach. If the reattached ink adheres to the wiring member, it may corrode due to electrolytic corrosion and break the wire.

[0011] In addition, as described in Patent Document 2, even if a structure is adopted to absorb ink in the gap with the nozzle cover in order to prevent the ink from entering the side of the nozzle, the position of the ink mist cannot be controlled when the ink mist reattaches. Therefore, there is a possibility that the ink mist enters the side and spreads to the wiring member.

[0012] Therefore, an object of the present invention is to provide a liquid ejection device that controls the direction in which ink travels and has high durability.

[0013] Solutions to Solve Problems

[0014] A liquid ejection device for solving the above-mentioned problems comprises: a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of a surface of the recording element substrate having the plurality of nozzle openings except for the nozzle openings, wherein the first surface has a droplet control area, in which a first sliding angle in a first direction in which the wiring member extends is greater than a second sliding angle in a second direction orthogonal to the first direction.

[0015] In addition, a liquid ejection device according to one embodiment of the present invention comprises: a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of a surface having the plurality of nozzle openings in the recording element substrate except for the nozzle openings, characterized in that the first surface has a concave-convex structure, and the concave portions and convex portions of the concave-convex structure are alternately repeated in the direction in which the wiring member extends.

[0016] In addition, another embodiment of the present invention provides a liquid ejection device comprising: a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of a surface of the recording element substrate having the plurality of nozzle openings except for the nozzle openings, characterized in that the first surface has a droplet control area having an area in which a hydrophilic portion and a hydrophobic portion are alternately repeated toward a direction in which the wiring member extends.

[0017] In addition, a nozzle cover according to one aspect of the present invention has a first surface that covers at least a portion of a surface of a recording element substrate having a plurality of nozzle openings for ejecting liquid, except for the nozzle openings, and is characterized in that the first surface has a liquid drop control region, and in the liquid drop control region, there is a region in which a first fall angle in a first direction from the position of the nozzle opening toward the outside of the nozzle cover is greater than a second fall angle in a second direction orthogonal to the first direction. In addition, a liquid ejection device according to one aspect of the present invention is characterized in that it comprises: the above-mentioned nozzle cover; a liquid ejection head having the recording element substrate provided with a plurality of nozzle openings for ejecting the liquid; and a wiring member electrically connected to the recording element substrate.

[0018] In addition, a method for manufacturing an article according to one embodiment of the present invention is a method for manufacturing an article comprising a step of ejecting a liquid using the above-mentioned liquid ejecting device, wherein the liquid is ink containing a functional material for forming a functional film or a functional element.

[0019] Effects of the Invention

[0020] According to the present invention, the direction in which the reattached ink moves can be controlled. According to the present invention, a highly durable liquid ejection device capable of controlling the direction in which the ink travels can be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] FIG1 (a) and (b) are respectively a schematic plan view and a cross-sectional view of a part of a liquid ejection device in Embodiment 1 of the present invention.

[0022] Figure 2 (a) and (b) are respectively a schematic top view and a cross-sectional view of a portion of the liquid ejection device in Example 2 of the present invention.

[0023] Figure 3 (a) and (b) are respectively a schematic top view and a cross-sectional view of a portion of a liquid ejection device in Example 3 of the present invention.

[0024] Figure 4 (a) and (b) are respectively a schematic top view and a cross-sectional view of a portion of a liquid ejection device in Example 4 of the present invention.

[0025] Figure 5 (a) and (b) are respectively a schematic top view and a cross-sectional view of a portion of a liquid ejection device in Example 5 of the present invention.

[0026] Figure 6 (a) and (b) are respectively a schematic top view and a schematic cross-sectional view of an example of a part of the liquid ejecting device of the present invention.

[0027] Figure 7 (a) and (b) are respectively a schematic top view of a portion of a liquid ejecting device in the prior art and a schematic cross-sectional view of a portion of a liquid ejecting device in the prior art.

[0028] Figure 8 (a) and (b) are respectively a top view and a side view schematically showing an example of the liquid ejecting device of the present invention.

[0029] Fig. 9 (a) is a schematic top view illustrating the anisotropy of the present invention, and (b) is a schematic diagram illustrating the slide-off angle of the present invention.

[0030] Fig.10 (a) and (b) are respectively a schematic top view and a cross-sectional view of a portion of a liquid ejection device in Example 6 of the present invention. DETAILED DESCRIPTION

[0031] (Nozzle cover and liquid spraying device)

[0032] The liquid ejection device of the present invention comprises: a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of a surface having the plurality of nozzle openings in the recording element substrate except for the nozzle openings, characterized in that the first surface has a droplet control area, in which a first fall angle in a first direction in which the wiring member extends is greater than a second fall angle in a second direction orthogonal to the first direction. In this specification, the droplet control area refers to an area for controlling the propagation of droplets.

[0033] In addition, the liquid ejection device of the present invention comprises: a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of the surface having the plurality of nozzle openings in the recording element substrate except for the nozzle openings, characterized in that the first surface has a concave-convex structure, and the concave and convex portions of the concave-convex structure are repeated alternately toward the direction in which the wiring member extends. In this specification, a concave portion refers to the lowest surface in the concave-convex structure, and a convex portion refers to a portion higher than the concave portion. In addition, in this specification, a concave-convex structure refers to a structure in which the convex portion exceeds 0.2 μm.

[0034] In addition, in this specification, the liquid processed by the liquid ejection device is sometimes described as "ink", but ink is not limited to liquids used to form text or images. For example, it can also be a liquid containing functional materials for forming functional films such as electrodes or optical filters, functional elements such as organic EL elements. In addition, sometimes the ejection of liquid to an object is described as "recording", but the recording mentioned here is not necessarily limited to recording information such as text or images, for example, it also includes imparting liquid to an object in order to form a functional film or functional element. In addition, sometimes the object to which the liquid is imparted is described as a "recording medium", but the recording medium is not limited to a medium for recording information such as text or images, but also includes a component or article that serves as a substrate for forming a functional film or functional element.

[0035] Figure 7 (a) is a schematic top view of a portion of a liquid ejection device in the prior art, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) in the prior art cut along line GG'. The recording element substrate 702 is connected to the nozzle cover 701 via an adhesive 704, and the recording element substrate 702 is protected by the nozzle cover 701. Figure 7 It is easy to understand in (b) that a part of the adhesive 704 is omitted. The recording element substrate 702 has a plurality of nozzle openings 703. A wiring member 706 (for example, a flexible printed wiring board) for energizing the recording element substrate 702 is bonded to the recording element substrate 702. The recording element substrate 702 is bonded to a liquid chamber 708. In order to maintain the coating state from the nozzle opening 703 well, it is wiped with a wiper 711 after being ejected. However, the ink 705 that becomes mist after wiping sometimes adheres to the nozzle cover 701 again. The surface of the nozzle cover 701 in the prior art is controlled to be either hydrophobic or hydrophilic. The reattached ink 705 moves to the end of the nozzle cover 701 and sometimes adheres to the wiring member 706 from the side.

[0036] Reference Figure 8 (a), (b) and Figure 6 (a) and (b) illustrate an example of the overall structure of the liquid ejecting device of the present invention. Figure 8 (a) is a top view schematically showing an example of the liquid ejecting device of the present invention, Figure 8 (b) is a schematic side view of the liquid ejection device of (a). Figure 6(a) is a schematic top view of an example of a part of the liquid ejecting device of the present invention, and (b) is a schematic cross-sectional view obtained by cutting a part of the liquid ejecting device of (a) on the FF' line. The liquid ejecting device 801 includes a base 809, on which is provided a carrier 810 for setting a recording medium 806. In addition, on the base 809, a sub-scanning guide rail 807 extending in the X direction when viewed from above is fixed via a supporting member 808. A main scanning guide rail 805 serving as a transport device that can move along the X direction on the sub-scanning guide rail 807 is placed on the sub-scanning guide rail 807. A main scanner 804 that can move along the Y direction on the main scanning guide rail 805 is placed on the main scanning guide rail 805. A liquid ejecting unit 802 that can eject liquid toward the recording medium 806 is mounted on the main scanner 804. By moving the main scanning guide 805 in the X direction and the main scanner 804 in the Y direction, the liquid ejection unit 802 can freely scan in the XY directions on the recording medium 806 set on the stage 810.

[0037] The liquid ejection unit 802 is provided with a flow path including a sub-tank for supplying ink to the liquid ejection head 803 .

[0038] A main tank 811 is provided on the base 809. The main tank 811 stores ink for replenishment when the remaining amount of ink in the sub-tank of the liquid ejection unit 802 is reduced. The main tank 811 is connected to a flow path 812 for circulating the stored ink.

[0039] The liquid ejection unit 802 is provided with a liquid ejection head 803 capable of ejecting liquid toward a recording medium 806. The liquid ejection head 803 has Figure 6 The recording element substrate 602 shown in (b), the liquid chamber 608 joined to the recording element substrate 602, the intermediate member 605, and the supply tank 607. The intermediate member 605 is bonded to the supply tank 607, and then the liquid chamber 608 joined to the recording element substrate 602 is joined. The recording element substrate 602 is formed with a plurality of nozzle openings 603 as through holes for ejecting liquid. Figure 8 (a), (b) and Figure 6 In (a) and (b), the liquid ejection head includes a recording element substrate, a liquid chamber, an intermediate member, and a supply tank, but the present invention also includes a form in which the liquid ejection head does not include a liquid chamber, an intermediate member, and a supply tank.

[0040] Furthermore, a vibration plate member (not shown) is formed on the recording element substrate 602, and piezoelectric elements (not shown) as corresponding energy generating elements are respectively arranged. When a voltage is applied to the piezoelectric element, it is deformed inwardly in a flexural manner. Due to the deformation of the piezoelectric element, the volume in the liquid chamber 608 becomes smaller, and pressure is applied to the liquid supplied from the supply tank 607 via the flow path (not shown) in the liquid chamber 608. Moreover, it is configured so that when pressure is applied to the liquid, a part of the liquid is ejected from the nozzle opening 603 as droplets. In addition, the supply tank 607 may be the above-mentioned sub-tank, but may also be provided separately from the sub-tank. A wiring member 606 (for example, a flexible printed wiring board) is electrically connected to the recording element substrate 602. A nozzle cover 601 is bonded to the recording element substrate 602 via an adhesive 604. In addition, in order to Figure 6 It is easy to understand that in (b), a portion of the adhesive 604 is omitted.

[0041] The nozzle cover 601 has a first surface 609 covering at least a portion of the surface having a plurality of nozzle openings 603 in the recording element substrate 602 except for the nozzle openings 603. The first surface 609 of the nozzle cover 601 has a droplet control region, in which a first drop angle in a first direction in which the wiring member 606 extends is greater than a second drop angle in a second direction orthogonal to the first direction. The first surface 609 of the nozzle cover 601 has a concave-convex structure 610 toward the first direction in which the wiring member 606 extends. That is, the concave portion and the convex portion of the concave-convex structure 610 are repeated alternately toward the direction in which the wiring member 606 extends. Thus, it is possible to suppress the ink from propagating in the first direction in which the wiring member 606 extends.

[0042] Specifically, in the concave-convex structure 610 of the first surface 609 of the nozzle cover 601, the first slide angle in the first direction in which the wiring member 606 extends is greater than the second slide angle in the second direction orthogonal to the first direction. In this case, the concave-convex structure 610 of the first surface 609 of the nozzle cover 601 can be set as a droplet control area. The concave-convex structure of the first surface is preferably in the range of a spacing of more than 10μm and less than 200μm. The spacing refers to the length of the repeating unit of the concave and convex portion. If it is within the above numerical range, the first slide angle in the first direction can be fully increased, and the liquid can be fully suppressed from propagating in the first direction. In addition, the height of the convex portion is preferably in the range of more than 3μm and less than 100μm. If it is within the above numerical range, the second slide angle in the second direction can be fully reduced, and the liquid can easily propagate in the second direction. In addition, the concave-convex structure of the first surface can also be bent relative to the direction in which the wiring member extends. As a result, no concave-convex structure is formed near the nozzle opening, and a liquid ejection device that is easy to remove ink near the nozzle opening and has higher durability can be realized.

[0043] In the above example, the nozzle cover and the liquid ejection device control the propagation direction of the ink by having a concave-convex structure, but the effect of the present invention can also be obtained by other methods. Specifically, the liquid ejection device of the present invention can be set to include: a liquid ejection head having a recording element substrate with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface covering at least a portion of the surface of the recording element substrate having the plurality of nozzle openings except the nozzle openings, characterized in that the first surface has a droplet control area, and the droplet control area has an area in which a hydrophilic part and a hydrophobic part are alternately repeated toward the direction in which the wiring member extends. In this case, the liquid ejection device may also have a concave-convex structure as described above. Moreover, the first surface of the nozzle cover of the liquid ejection device of the present invention has a concave-convex structure, and the concave and convex parts of the concave-convex structure are alternately repeated toward the direction in which the wiring member extends, and the convex part of the concave-convex structure can be a hydrophobic part, and the concave part can be a hydrophilic part. In addition, the hydrophilic part and the hydrophobic part in the droplet control area of ​​the first surface can also be bent relative to the direction in which the wiring member extends. The hydrophobic part may refer to a part having a contact angle of 90 degrees or more. The hydrophilic part may refer to a part having a contact angle of less than 90 degrees. The contact angle may be an angle formed by a droplet (e.g., pure water) falling on the surface of a measurement object and a solid surface.

[0044] The liquid ejection device of the present invention may include a cleaning member for wiping off the liquid attached to the nozzle cover. The cleaning member may move along the concave-convex structure when there is a concave-convex structure in the second direction of the liquid drop control area on the first surface of the nozzle cover. Figure 8 Although not shown in the figure, the liquid ejection device 801 can be provided with a wiper as a cleaning member. Figure 6 In (a), after the liquid is ejected, the wiper 611 wipes the first surface 609 of the nozzle cover 601 in the second direction, and the state of being ejected from the nozzle opening 603 can be well maintained. The nozzle cover 601 and the liquid ejection device 801 are configured so that even if the ink mist adheres to the concave-convex structure 610 again after cleaning with the wiper 611, the ink mist does not move to the first direction with a large sliding angle.

[0045] By making the contact angles in the first direction and the second direction of the first surface 609 of the nozzle cover 601 different, a difference in the sliding angle is generated, which can suppress the spread of ink to the wiring member 606 and realize a highly durable liquid ejection device that is not prone to disconnection caused by ink contamination.

[0046] In addition, the nozzle cover of the present invention can be set as a nozzle cover having a first surface that covers at least a portion of a surface having multiple nozzle openings for ejecting liquid in a recording element substrate except the above-mentioned nozzle openings, and is characterized in that the above-mentioned first surface has a droplet control area, and in the above-mentioned droplet control area, there is an area having a first slide angle in a first direction from the position of the above-mentioned nozzle opening toward the outside of the above-mentioned nozzle cover that is larger than a second slide angle in a second direction orthogonal to the above-mentioned first direction.

[0047] In addition, the liquid ejection device of the present invention can be configured to be characterized in that it comprises: the above-mentioned nozzle cover; a liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; and a wiring member electrically connected to the recording element substrate.

[0048] exist Figure 6 In the figure, the first direction is defined as the direction in which the wiring member 606 extends, but the first direction can also be defined as a direction from the position of the nozzle opening of the recording element substrate toward the outside of the nozzle cover in the droplet control area of ​​the first surface of the nozzle cover. The direction from the position of the nozzle opening of the recording element substrate toward the outside of the nozzle cover can refer to the direction in which the concave portion and the convex portion are repeatedly arranged when the first surface has a concave-convex structure (when the droplet control area is a concave-convex structure). In addition, the direction from the position of the nozzle opening of the recording element substrate toward the outside of the nozzle cover can refer to the direction in which the hydrophilic portion and the hydrophobic portion are repeatedly arranged when the droplet control area of ​​the first surface has a repeated structure of the hydrophilic portion and the hydrophobic portion. That is, the first direction can refer to the direction from the center toward the outside of the nozzle cover when the position of the nozzle opening of the recording element substrate is the center. In the case where the first direction is the direction from the position of the nozzle opening of the recording element substrate toward the outside of the nozzle cover, the second direction refers to a direction orthogonal to the above-mentioned first direction.

[0049] Fig. 9 (a) is a top view schematically showing an example of a portion of a liquid ejecting device for illustrating the anisotropy of the present invention. A wiring member (not shown) is electrically connected to a recording element substrate 902 provided with a plurality of nozzle openings 903 for ejecting liquid. A nozzle cover 901 is bonded to the recording element substrate 902 via an adhesive 904, and the nozzle cover 901 has a first surface 907 covering at least a portion of the surface having a plurality of nozzle openings 903 in the recording element substrate 902 except for the nozzle openings 903. The first surface 907 of the nozzle cover 901 has a droplet control area 905, in which a first slip angle in a first direction in which the wiring member extends is greater than a second slip angle in a second direction orthogonal to the first direction. As a result, the mist 906 of the liquid is difficult to flow in the first direction and is easy to flow in the second direction. Fig. 9(b) is a diagram illustrating the slide angle of the present invention. The slide angle refers to the angle θ at which the pure water starts to move in the direction of the arrow when 20 μL of pure water is dropped on the substrate to be measured and the substrate is tilted. In the measurement of the slide angle, for example, a contact angle meter (DM-501) of Kyowa Interface Science Co., Ltd. can be used to measure the slide angle from the angle displayed on the monitor of the meter.

[0050] The difference between the first slide angle in the first direction and the second slide angle in the second direction perpendicular to the first direction is preferably 20 degrees or more, and more preferably 30 degrees or more.

[0051] (How to make the item)

[0052] The manufacturing method of the article of the present invention is a manufacturing method of the article including a process of ejecting liquid using the liquid ejection device of the present invention, characterized in that the liquid is an ink containing a functional material for forming a functional film or a functional element. In addition, a liquid ejection method characterized by a process of ejecting liquid using the liquid ejection device of the present invention can also be used. Here, the liquid can be an ink containing a functional material for forming a functional film or a functional element. The ink containing the functional material sometimes uses a variety of solvents, but the present invention does not particularly limit the type of solvent used.

[0053] Example

[0054] Hereinafter, the present invention will be described in more detail using Examples, but the present invention is not limited thereto.

[0055] (Example 1)

[0056] Embodiment 1 is described in detail using FIG. 1 . FIG. 1 (a) is a schematic top view of a portion of a liquid ejection device in Embodiment 1 of the present invention, and FIG. 1 (b) is a schematic cross-sectional view of a portion of the liquid ejection device cut along the AA' line in (a). A groove structure is formed on the first surface 107 of a stainless steel nozzle cover 101 using laser processing to form a concave-convex structure 105. Thereafter, a liquid chamber 108 is bonded to a recording element substrate 102 having a plurality of nozzle openings 103 formed thereon to form a liquid ejection head. A wiring member 106 is bonded to the recording element substrate 102, and is bonded to the nozzle cover 101 having the concave-convex structure 105 via an adhesive 104. The nozzle cover 101 has a first surface 107 that covers at least a portion of a surface having a plurality of nozzle openings 103 in the recording element substrate 102 except for the nozzle openings 103, and a concave-convex structure 105 is formed on the first surface 107. In Embodiment 1, the liquid ejection head has a recording element substrate and a liquid chamber, but the present invention also includes a mode in which the liquid ejection head does not include a liquid chamber. In addition, in order to facilitate understanding in Figure 1 (b), a portion of the adhesive 104 is omitted. The dimensions of the concave-convex structure 105 are a groove width of 20 μm, a groove depth (height of the convex portion) of 12.5 μm, and a spacing of 40 μm. As shown in Figures 1 (a) and (b), a concave-convex structure 105 is formed in a first direction extending toward the wiring component 106. The groove width of the concave-convex structure is preferably greater than 5 μm and less than 50 μm, and more preferably greater than 10 μm and less than 40 μm. Within the range of the above-mentioned groove width, the first drop angle in the first direction extending the wiring component 106 can be fully increased.

[0057] The groove depth (height of the convex portion) is preferably 3 μm to 50 μm, more preferably 5 μm to 40 μm. Within the above groove depth range, the second fall angle in the second direction orthogonal to the first direction can be sufficiently reduced.

[0058] The pitch of the concavo-convex structure is preferably 10 μm to 100 μm, more preferably 20 μm to 80 μm. Within the above pitch range, the first slide angle in the first direction can be sufficiently increased.

[0059] In the above-mentioned size range, the difference between the first sliding angle in the first direction and the second sliding angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist (the propagation direction of the ink). In the concave-convex structure in Example 1, the first sliding angle in the first direction is 80 degrees, the second sliding angle in the second direction is 40 degrees, and the sliding angle difference is 40 degrees.

[0060] By performing printing using the liquid ejection device provided with the above-described members, it was confirmed that even if the ink mist adhered to the nozzle cover, it did not move in the first direction, which is the direction in which the wiring member extended.

[0061] This achieves a highly durable liquid ejection device that can suppress the spread of ink to wiring members and suppress the occurrence of disconnection and the like due to ink contamination.

[0062] In this embodiment, stainless steel is used as the material of the nozzle cover, but a processable metal or a processable resin may be used to obtain the same effect in the same shape as above.

[0063] (Example 2)

[0064] use Figure 2 Embodiment 2 is described in detail. Figure 2 (a) is a schematic top view of a portion of the liquid ejection device in Example 2 of the present invention, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) cut along line BB'. A 40 μm silicon film is formed on a stainless steel nozzle cover 201 by sputtering.

[0065] Next, patterning is performed through a photolithography process to form a resist pattern with a pitch of 80 μm and a pattern width of 40 μm. Next, the silicon film is etched to a depth of 20 μm by dry etching using a fluorine-based gas, and the resist is then stripped to form a concave-convex structure 205. Thereafter, a liquid chamber 208 is bonded to a recording element substrate 202 having a plurality of nozzle openings 203 formed thereon to form a liquid ejection head. A wiring member 206 is bonded to the recording element substrate 202, and bonded to a nozzle cover 201 having a concave-convex structure 205 formed thereon via an adhesive 204. The nozzle cover 201 has a first surface 207 that covers at least a portion of a surface having a plurality of nozzle openings 203 in the recording element substrate 202, excluding the nozzle openings 203, and a concave-convex structure 205 is formed on the first surface 207. In Example 2, the liquid ejection head has a recording element substrate and a liquid chamber, but the present invention also includes a method in which the liquid ejection head does not include a liquid chamber. In addition, in order to Figure 2 It is easy to understand that a part of the adhesive 204 is omitted in (b). The size of the concave-convex structure 205 of the silicon film formed on the nozzle cover 201 is 80 μm in pitch, 40 μm in pattern width, and 20 μm in depth (height of the convex part). Figure 2 As shown in (a) and (b), a concavo-convex structure 205 is formed in the first direction extending toward the wiring member 206. The pitch of the concavo-convex structure is preferably 20 μm to 150 μm, more preferably 40 μm to 120 μm. Within this range, the first drop angle in the first direction extending the wiring member 206 can be sufficiently increased.

[0066] The pattern width of the concavo-convex structure is preferably 10 μm to 100 μm, more preferably 20 μm to 80 μm. Within this range, the first slide angle in the first direction can be sufficiently increased.

[0067] The depth of the concavo-convex structure (height of the convex portion) is preferably 5 μm to 50 μm, more preferably 10 μm to 40 μm. Within this range, the second fall angle in the second direction orthogonal to the first direction can be sufficiently reduced.

[0068] In the above-mentioned size range, the difference between the first sliding angle in the first direction and the second sliding angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist (the propagation direction of the ink). In the concave-convex structure in Example 2, the first sliding angle in the first direction is 60 degrees, the second sliding angle in the second direction is 10 degrees, and the difference in sliding angle is 50 degrees.

[0069] By printing with a liquid ejection device provided with the above-mentioned components, it was confirmed that even if the ink mist adhered to the nozzle cover, it would not move in the first direction, which is the direction in which the wiring member extends. By further increasing the sliding angle difference, the effect of suppressing the spread of ink to the wiring member can be improved, so that a highly durable liquid ejection device that further suppresses disconnection caused by ink contamination can be realized.

[0070] In this embodiment, a silicon film is used as the material of the concave-convex structure, but any material that can be dry-etched can be used to obtain the same effect in the same shape as above. For example, an oxide film such as a silicon oxide film, a silicon nitride film, an aluminum oxide film, or a titanium oxide film, or a metal such as stainless steel, silicon, aluminum, or titanium can also be used.

[0071] (Example 3)

[0072] use Figure 3 Embodiment 3 is described in detail. Figure 3 (a) is a schematic top view of a portion of the liquid ejection device in Example 3 of the present invention, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) cut along the CC' line. A mask is provided on the first surface 307 of the stainless steel nozzle cover 301, and Canon Optron (Strain) SURFCLEAR100, which is a hydrophobic film composed of a fluorine system, is heated at 120°C for 2 hours after evaporation.

[0073] Then, the mask is removed, and a hydrophobic portion 305-1 formed of a fluorine-based hydrophobic film is formed. Thereafter, a liquid chamber 308 is bonded to a recording element substrate 302 having a plurality of nozzle openings 303 formed thereon, thereby forming a liquid ejection head. A wiring member 306 is bonded to the recording element substrate 302, and bonded to the nozzle cover 301 via an adhesive 304.

[0074] At this time, the portion where the hydrophobic portion 305-1 is not formed is the hydrophilic portion 305-2 of stainless steel. The nozzle cover 301 has a first surface 307 that covers at least a portion of the surface having the nozzle opening 303 in the recording element substrate 302 except for the nozzle opening 303. Moreover, on the first surface 307, the hydrophobic portion 305-1 and the hydrophilic portion 305-2 are formed in a manner of alternating and repeating in a direction extending toward the wiring member 306. In Example 3, the liquid ejection head has a recording element substrate and a liquid chamber, but the present invention also includes a method in which the liquid ejection head does not include a liquid chamber. In addition, in order to Figure 3 It is easy to understand that a portion of the adhesive 304 is omitted in (b).

[0075] The contact angle measured using pure water of the hydrophobic portion 305 - 1 in Example 3 was 100 to 110 degrees, and the contact angle measured using pure water of the hydrophilic portion 305 - 2 (stainless steel) was 50 to 70 degrees.

[0076] The spacing of the repetitive structure of the hydrophobic part 305-1 and the hydrophilic part 305-2 of the hydrophobic film composed of fluorine formed on the nozzle cover 301 is 100μm, the pattern width of the hydrophobic part 305-1 is 50μm, and the thickness is 0.1μm. The spacing of the repetitive structure of the hydrophobic part and the hydrophilic part is preferably 50μm or more and 200μm or less, more preferably 80μm or more and 180μm or less. Within this range, the first slide angle in the first direction in which the wiring member 306 extends can be sufficiently increased. The pattern width of the hydrophobic part is preferably 10μm or more and 100μm or less, more preferably 20μm or more and 80μm or less. Within this range, the first slide angle in the first direction can be sufficiently increased. In addition, when the hydrophobic part is made using the above method, a thickness of 0.02 to 0.2μm is sometimes generated.

[0077] In the above-mentioned size range, the difference between the first sliding angle in the first direction and the second sliding angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist (the propagation direction of the ink). In the repeated structure of the hydrophobic part and the hydrophilic part in Example 3, the first sliding angle in the first direction is 80 degrees, the second sliding angle in the second direction is 20 degrees, and the difference in sliding angle is 60 degrees.

[0078] By printing with a liquid ejection device provided with the above-mentioned components, it was confirmed that even if the ink mist adheres to the nozzle cover, it does not move in the first direction, which is the direction in which the wiring member extends. Thus, the spread of ink to the wiring member can be suppressed, and the occurrence of disconnection caused by ink contamination can be suppressed. Moreover, since there is no concave-convex structure, a liquid ejection device with higher durability as a structure that is difficult for mist to be adsorbed can be realized.

[0079] In this embodiment, a fluorine-based hydrophobic film is selected as the hydrophobic portion, but there is no problem even if other hydrophobic films are used as long as the sliding angle difference can be maintained.

[0080] In addition, the hydrophobic membrane used this time is SURFCLEAR100 of Canon Optron (strain), but the same effect is obtained by using the hydrophobic membrane of OF-SR made by this company. The hydrophobic membrane is a hydrophobic membrane formed by chemical bonding of fluorine compounds through siloxane bonds. In addition, as the hydrophilic part, metals such as stainless steel, silicon, aluminum, and titanium can be cited. Using the above materials, the same effect is obtained in the same shape as above.

[0081] (Example 4)

[0082] use Figure 4 Embodiment 4 is described in detail. Figure 4 (a) is a schematic top view of a portion of the liquid ejection device in Example 4 of the present invention, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) cut along line DD'. A mask having a curved surface shape is provided on a stainless steel nozzle cover 401, and a 50 μm silicon oxide film is evaporated by an evaporation device.

[0083] Then, the mask is removed to form a concave-convex structure 405 having a convex structure of a silicon oxide film. A liquid chamber 408 is joined to a recording element substrate 402 having a plurality of nozzle openings 403 to form a liquid ejection head. A wiring member 406 is bonded to the recording element substrate 402, and bonded to a nozzle cover 401 having a concave-convex structure 405 via an adhesive 404. The nozzle cover 401 has a first surface 407 that covers at least a portion of a surface having a plurality of nozzle openings 403 in the recording element substrate 402 except for the nozzle openings 403, and a concave-convex structure 405 is formed on the first surface 407 in a manner bent relative to a direction in which the wiring member 406 extends. In Example 4, the liquid ejection head has a recording element substrate and a liquid chamber, but the present invention also includes a method in which the liquid ejection head does not include a liquid chamber. In addition, in order to Figure 4 It is easy to understand that in (b), a portion of the adhesive 404 is omitted.

[0084] The size of the concave-convex structure 405 having a convex structure of a silicon oxide film formed on the nozzle cover 401 is 120 μm in the cross-sectional view, the pattern width of the convex structure is 40 μm, and the height of the convex structure (convex portion) is 50 μm. The spacing of the concave-convex structure is preferably 40 μm or more and 200 μm or less, more preferably 80 μm or more and 180 μm or less, within which range, the first drop angle in the first direction in which the wiring member 406 extends can be sufficiently increased. The pattern width of the convex structure is preferably 10 μm or more and 100 μm or less, more preferably 20 μm or more and 80 μm or less, within which range, the first drop angle in the first direction can be sufficiently increased. The height of the convex structure (convex portion) is preferably 10 μm or more and 80 μm or less, more preferably 20 μm or more and 60 μm or less, within which range, the second drop angle in the second direction orthogonal to the first direction can be sufficiently reduced.

[0085] Within the above-mentioned size range, the difference in the first drop angle in the first direction and the second drop angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist. In the concave-convex structure in Example 4, the first drop angle in the first direction is 80 degrees, the second drop angle in the second direction is 30 degrees, and the difference in the drop angle is 50 degrees. Printing is performed by a liquid ejection device provided with the above-mentioned components, and it is confirmed that even if the ink mist adheres to the nozzle cover, it is easy to flow in the second direction without the wiring component, and will not move in the first direction as the direction in which the wiring component extends.

[0086] This can suppress the spread of ink to the wiring components, suppress the occurrence of wire breakage caused by ink contamination, and because no concave-convex structure is formed near the nozzle opening, a more durable liquid ejection device that can easily remove ink near the nozzle opening can be realized.

[0087] In this embodiment, a silicon oxide film is selected as the convex structure, but other oxide films or metal films that can maintain the sliding angle difference are also acceptable. In addition, the material of the nozzle cover can also be other metals such as aluminum. The same effect can be obtained by using the above materials in the same shape as above.

[0088] (Example 5)

[0089] use Figure 5 Embodiment 5 is described in detail. Figure 5 (a) is a schematic top view of a portion of the liquid ejection device in Example 5 of the present invention, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) cut along line EE'. A 30 μm silicon film is formed on the first surface 507 of the stainless steel nozzle cover 501 by sputtering.

[0090] Next, patterning is performed through a photolithography process to form a resist pattern with a pitch of 100 μm and a pattern width of 50 μm. Next, the silicon film is etched to a depth of 30 μm by dry etching using a fluorine-based gas, and then the resist is stripped to form a convex structure, thereby forming a concave-convex structure 505. Because the substrate is stainless steel, selective etching using the fluorine-based gas can be achieved. Thereafter, a liquid chamber 508 is bonded to a recording element substrate 502 having a plurality of nozzle openings 503 to form a liquid ejection head. A wiring member 506 is bonded to the recording element substrate 502, and then bonded to a nozzle cover 501 having a concave-convex structure 505 via an adhesive 504. The nozzle cover 501 has a first surface 507 that covers at least a portion of a surface having a plurality of nozzle openings 503 in the recording element substrate 502 except for the nozzle openings 503, and a concave-convex structure 505 is formed on the first surface 507 in a manner that surrounds the nozzle openings 503 on four sides. In Embodiment 5, the liquid ejection head includes a recording element substrate and a liquid chamber, but the present invention also includes a mode in which the liquid ejection head does not include a liquid chamber. Figure 5 In (b), a portion of the adhesive 504 is omitted for ease of understanding. The size of the concave-convex structure 505 having a convex structure of a silicon film formed on the nozzle cover 501 has a spacing of 100 μm in the cross-sectional view, a pattern width of the convex structure of 50 μm, and a height of the convex structure (convex portion) of 30 μm. The spacing of the concave-convex structure is preferably greater than 20 μm and less than 150 μm, and more preferably greater than 40 μm and less than 120 μm. Within this range, the first slip angle in the first direction toward the outside of the nozzle cover 501 can be fully increased.

[0091] The pattern width of the convex structure is preferably 10 μm to 100 μm, more preferably 20 μm to 80 μm. Within this range, the first slide angle in the first direction can be sufficiently increased.

[0092] The height of the convex structure (convex portion) is preferably 5 μm to 50 μm, more preferably 10 μm to 40 μm. Within this range, the second fall angle in the second direction orthogonal to the first direction can be sufficiently reduced.

[0093] In the above-mentioned size range, the difference between the first sliding angle in the first direction and the second sliding angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist (the propagation direction of the ink). In the concave-convex structure in Example 5, the first sliding angle in the first direction is 70 degrees, the second sliding angle in the second direction is 20 degrees, and the difference in sliding angle is 50 degrees.

[0094] By performing printing using the liquid ejection device provided with the above-described components, it was confirmed that even if the ink mist adhered to the nozzle cover, it was difficult for the ink mist to flow in the first direction toward the outside of the nozzle cover.

[0095] By providing the concavo-convex structure so as to surround the four sides of the nozzle opening, it is possible to suppress the mixing of ink into all the side surfaces of the nozzle cover, thereby also suppressing the ink contamination of the liquid ejection head.

[0096] This makes it possible to realize a nozzle cover that suppresses ink contamination, and thus to realize a nozzle cover and a liquid ejection device with higher durability.

[0097] In this embodiment, a silicon oxide film is used as the material of the convex structure (convex portion), but other metals and oxide films may be used as long as they can be selectively etched with stainless steel. In addition, other metals such as aluminum can also be used as the material of the nozzle cover. The same effect can be obtained by using the above materials in the same shape as above.

[0098] (Example 6)

[0099] use Fig.10 Embodiment 6 is described in detail. Fig.10 (a) is a schematic top view of a portion of the liquid ejection device in Example 6 of the present invention, and (b) is a schematic cross-sectional view of a portion of the liquid ejection device in (a) cut along line HH'. A 40 μm anti-etching resin film is formed on the first surface 1007 of the stainless steel nozzle cover 1001 using a coating machine.

[0100] Next, according to the exposure conditions and development conditions of the photolithography process, a resist pattern having a semicircular cross section with a pitch of 120 μm and a pattern width of 60 μm was formed.

[0101] Then, the resist pattern is cured by heating at 120°C for 1 hour to form a concave-convex structure 1005 having a convex structure with a semicircular cross section. The contact angle of the resist resin film in pure water is 93 to 98 degrees. Then, a liquid chamber 1008 is bonded to a recording element substrate 1002 having a plurality of nozzle openings 1003 to form a liquid ejection head. A wiring member 1006 is bonded to the recording element substrate 1002 and bonded to a nozzle cover 1001 having a concave-convex structure 1005 via an adhesive 1004.

[0102] The nozzle cover 1001 has a first surface 1007 that covers at least a portion of the surface having the nozzle opening 1003 in the recording element substrate 1002 except for the nozzle opening 1003, and a concave-convex structure 1005 is formed on the first surface 1007 to surround the nozzle opening 1003 on four sides. At this time, the anti-etching resin is hydrophobic and the stainless steel is hydrophilic, so the convex part of the concave-convex structure 1005 is a hydrophobic part and the concave part is a hydrophilic part. In Example 6, the liquid ejection head has a recording element substrate and a liquid chamber, but the present invention also includes a method in which the liquid ejection head does not include a liquid chamber. In addition, in order to Fig.10It is easy to understand in (b) that a part of the adhesive 1004 is omitted. The dimensions of the concave-convex structure 1005 having a convex structure with a semicircular cross-section formed on the nozzle cover 1001 are a spacing of 120 μm, a pattern width of the convex structure of 60 μm, and a height of the convex structure (convex portion) of 40 μm in the cross-sectional view. The spacing of the concave-convex structure is preferably greater than 20 μm and less than 150 μm, and more preferably greater than 40 μm and less than 120 μm. Within this range, the first slide angle in the first direction toward the outside of the nozzle cover 1001 can be fully increased.

[0103] The pattern width of the convex structure is preferably 10 μm to 100 μm, more preferably 20 μm to 80 μm. Within this range, the first slide angle in the first direction can be sufficiently increased.

[0104] The height of the convex structure (convex portion) is preferably 5 μm to 50 μm, more preferably 10 μm to 40 μm. Within this range, the second fall angle in the second direction orthogonal to the first direction can be sufficiently reduced.

[0105] In the above-mentioned size range, the difference between the first sliding angle in the first direction and the second sliding angle in the second direction is 20 degrees or more, which can fully control the directionality of the ink mist (the propagation direction of the ink). In the concave-convex structure in Example 6, the first sliding angle in the first direction is 60 degrees, the second sliding angle in the second direction is 20 degrees, and the difference in sliding angle is 40 degrees.

[0106] By performing printing using the liquid ejection device provided with the above-described components, it was confirmed that even if the ink mist adhered to the nozzle cover, it was difficult for the ink mist to flow in the first direction toward the outside of the nozzle cover.

[0107] By providing the concavo-convex structure so as to surround the four sides of the nozzle opening, it is possible to suppress the ink from entering all the side surfaces of the nozzle cover, thereby suppressing the ink contamination of the liquid ejection head.

[0108] This makes it possible to realize a nozzle cover that suppresses ink contamination, and thus to realize a nozzle cover and a liquid ejection device with higher durability.

[0109] In this embodiment, a resist resin is used as the material of the convex structure, but other materials are also acceptable as long as they can be formed by a photosensitive resin in a photolithography process. In addition, other metals such as aluminum can also be used as the material of the nozzle cover. The same effect can be obtained by using the above materials in the same shape as above.

Claims

1. A liquid ejection device, comprising: A liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface that covers at least a portion of a surface of the recording element substrate having the plurality of nozzle openings except for the nozzle openings, It is characterized in that The first surface has a droplet control area, In the liquid drop control region, a first slide-off angle in a first direction in which the wiring member extends is larger than a second slide-off angle in a second direction orthogonal to the first direction.

2. The liquid ejection device according to claim 1, characterized in that: The difference between the first slide angle and the second slide angle is greater than 20 degrees.

3. A liquid ejection device, comprising: A liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface that covers at least a portion of a surface of the recording element substrate having the plurality of nozzle openings except for the nozzle openings, It is characterized in that The first surface has a concave-convex structure, The concave and convex portions of the concave-convex structure are repeated alternately in the direction in which the wiring member extends.

4. The liquid ejection device according to claim 1 or 3, characterized in that: The first surface has a concave-convex structure, The concave and convex parts of the concave-convex structure are repeated alternately in the direction in which the wiring member extends. The pitch of the concavo-convex structure is greater than or equal to 10 μm and less than or equal to 200 μm.

5. The liquid ejection device according to claim 1 or 3, characterized in that: The first surface has a concave-convex structure, The concave and convex parts of the concave-convex structure are repeated alternately in the direction in which the wiring member extends. The height of the convex portion of the concavo-convex structure is greater than or equal to 3 μm and less than or equal to 100 μm.

6. The liquid ejection device according to claim 1 or 3, characterized in that: The first surface has a concave-convex structure, The concave and convex parts of the concave-convex structure are repeated alternately in the direction in which the wiring member extends. The convex part of the concavo-convex structure is a hydrophobic part and the concave part is a hydrophilic part.

7. The liquid ejection device according to claim 1 or 3, characterized in that: The first surface has a concave-convex structure, The concave and convex parts of the concave-convex structure are repeated alternately in the direction in which the wiring member extends. The concavo-convex structure is curved relative to a direction in which the wiring member extends.

8. A liquid ejection device comprising: A liquid ejection head having a recording element substrate provided with a plurality of nozzle openings for ejecting liquid; a wiring member electrically connected to the recording element substrate; and a nozzle cover having a first surface that covers at least a portion of a surface of the recording element substrate having the plurality of nozzle openings except for the nozzle openings, It is characterized in that The first surface has a droplet control area, The liquid droplet control region has a region in which hydrophilic portions and hydrophobic portions are alternately repeated in a direction in which the wiring member extends.

9. The liquid ejection device according to claim 1, 3 or 8, characterized in that: The liquid ejection device includes a cleaning member for wiping off the liquid attached to the nozzle cover.

10. A nozzle cover having a first surface that covers at least a portion of a surface of a recording element substrate having a plurality of nozzle openings for ejecting liquid, excluding the nozzle openings, characterized in that: The first surface has a droplet control area, The liquid drop control region has a region where a first fall angle in a first direction from the position of the nozzle opening toward the outside of the nozzle cover is larger than a second fall angle in a second direction orthogonal to the first direction.

11. A liquid ejection device, characterized in that: The liquid ejection device comprises: The nozzle cover according to claim 10; a liquid ejection head having the recording element substrate provided with a plurality of nozzle openings for ejecting the liquid; and A wiring member is electrically connected to the recording element substrate.

12. A method for manufacturing an article, comprising the step of ejecting a liquid using the liquid ejecting device according to any one of claims 1 to 9 and 11, characterized in that: The liquid is ink containing a functional material for forming a functional film or a functional element.

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