A transparent object thickness measurement refraction compensation factor fusion calibration method and system

Abstract

The present application belongs to the field of spectral confocal precision detection, especially to a transparent object thickness measurement refraction compensation factor fusion calibration method and system, comprising the following steps: placing a piece of transparent object with known thickness, recording the upper surface and lower surface focusing wavelength of the transparent object at the starting position; continuously moving the transparent object and recording the upper surface and lower surface focusing wavelength of the transparent object at each position until the end position; combining the displacement and focusing wavelength relationship, calculating the upper surface and lower surface displacement data of the transparent object at each position; calculating and calibrating the refraction compensation factor according to the known thickness and displacement data; using multiple pieces of different thickness transparent object fusion calibration to obtain the comprehensive refraction compensation factor; in actual measurement, applying the comprehensive refraction compensation factor to calculate the actual thickness of the transparent object with unknown thickness; the present application is simple to calculate, high in calibration accuracy, good in environmental interference resistance, and has significant practical value and broad application prospect.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of spectral confocal precision detection, and in particular to a transparent object thickness measurement refraction compensation factor fusion calibration method and system. BACKGROUND

[0002] The spectral confocal measurement technology is widely used in high-precision detection field due to its non-contact, high precision, good repeatability and simple operation. At present, some field technicians and related scholars have proposed many transparent object thickness measurement refraction compensation factor calculation methods. For example, the compensation factor calculation method based on optical mechanism is based on the optical characteristics of the transparent object, combines variables such as wavelength, geometric optical path parameters and refractive index, and derives the compensation factor of thickness measurement through optical principles. The method has high theoretical accuracy, but the accurate calculation of optical parameters is strict. Due to the deviation between theoretical parameters and actual values, the accuracy is often limited in actual thickness measurement. For another example, the compensation factor calibration method based on single-thickness multi-point measurement experiment measures the focusing wavelength of the known thickness transparent standard part at different range positions to calibrate the mapping relationship between the compensation factor and the wavelength. The method does not need complex optical modeling and parameter calculation, but environmental interference will cause the mapping relationship to deviate from the ideal curve, and high-order polynomial fitting is usually used to improve the fitting accuracy, which is easy to cause overfitting. In addition, the use of only one thickness standard part for calibration may introduce accidental errors. SUMMARY

[0003] In order to solve the problems of complex compensation factor calculation and insufficient calibration accuracy in the prior art, the present application provides a transparent object thickness measurement refraction compensation factor fusion calibration method and system which is simple in calculation, can realize high-precision refraction compensation, and has good environmental interference resistance.

[0004] The present application provides the following technical solutions:

[0005] On the one hand, the present application provides a transparent object thickness measurement refraction compensation factor fusion calibration method, comprising the following steps:

[0006] Step S1: using a transparent object with a known thickness as a measured object, moving its upper surface to the starting position of the measurement area, making the focusing wavelength of its upper surface equal to the minimum wavelength in the range, and recording the focusing wavelengths of its upper surface and lower surface at this time;

[0007] Step S2: continuously moving the measured object so that it gradually passes through the measurement area, recording the focusing wavelengths of its upper surface and lower surface at different positions until its lower surface moves to the end position of the measurement area, at which time the focusing wavelength of its lower surface is equal to the maximum wavelength in the range;

[0008] Step S3, according to the focus wavelength of the upper surface and the lower surface of the measured object recorded at each position, the mapping relationship between displacement and focus wavelength is combined to obtain the displacement data of the upper surface and the lower surface of the measured object at each position;

[0009] Step S4, according to the known thickness of the measured object, the obtained displacement data of the upper surface and the lower surface of the measured object at each position is used to calculate and calibrate the refraction compensation factor;

[0010] Step S5, the steps S1 to S4 are repeatedly executed using multiple transparent objects of the same material and different known thicknesses, so as to obtain multiple refraction compensation factors, and the refraction compensation factors are fused and calibrated to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses;

[0011] Step S6, in actual thickness measurement, a transparent object of the same material and unknown thickness is placed in the measurement area as an actual measured object, the focus wavelength of the upper surface and the lower surface thereof is measured, the corresponding displacement data of the upper surface and the lower surface is obtained by using the mapping relationship between displacement and focus wavelength, and the actual thickness of the actual measured object is calculated by combining the comprehensive refraction compensation factor.

[0012] In a possible implementation, in step S3, the mapping relationship between displacement and focus wavelength is a displacement-focus wavelength conversion curve calculation formula:

[0013]

[0014] In the formula, λ represents the focus wavelength, d represents the converted displacement value, p 0、 p 1、 p 2 is a set of parameters of the conversion curve corresponding to the measuring instrument, and the parameters are obtained by experimental data fitting.

[0015] In a possible implementation, in step S4, the calculation and calibration of the refraction compensation factor includes: according to the known thickness of the measured object, the displacement data of the upper surface and the lower surface of the measured object at each position is used to calculate the refraction compensation factor of each position of the measurement area:

[0016]

[0017] In the formula, λ 1,k represents the focus wavelength of the upper surface at the k position, λ 2,k represents the focus wavelength of the lower surface at the k position, c k represents the focus wavelength of the lower surfaceλ 2,k The refraction compensation factor is given by H, where H represents the known thickness of the transparent object.

[0018] In one possible implementation, the relationship between the refractive compensation factor and the corresponding lower surface focusing wavelength at different locations in the measurement area is analyzed to calibrate the mapping relationship between the refractive compensation factor and the lower surface focusing wavelength:

[0019]

[0020] In the formula, α, β, and γ are the fitting coefficients obtained through data calibration and fitting. λ 2 represents the focusing wavelength of the lower surface.

[0021] In one possible implementation, step S5, the fusion calibration of these refractive compensation factors, includes: for m ( m ≥2) For two transparent objects of the same material but different known thicknesses, the mapping relationship between their refractive compensation factor and the focusing wavelength of their lower surface is as follows:

[0022]

[0023] In the formula, in the formula α k , β k , γ k For the first k The fitting coefficients of the refractive compensation factor obtained by fitting data calibration data of two transparent objects of the same material but different known thicknesses. C k ( λ 2) indicates the first k The mapping relationship between the refractive compensation factor obtained by calibrating transparent objects of the same material but different known thicknesses and the focusing wavelength of the lower surface, and k ∈(1, 2,..., m ).

[0024] In one possible implementation, for the m ( m ≥2) The mapping relationship between the refractive compensation factor and the focusing wavelength of the lower surface of two transparent objects of the same material but different known thicknesses is fused and calibrated to obtain a comprehensive refractive compensation factor applicable to thickness measurement of transparent objects of the same material but different thicknesses:

[0025]

[0026] In the formula Ψ α (·), Ψ β (·), Ψ γ(·) are general fusion operators for different fitting parameters, used to realize parameter fusion calibration.

[0027] In one possible implementation, in step S6, the combining the comprehensive refraction compensation factor, and calculating the actual thickness of the actual measured object comprises:

[0028]

[0029] wherein H 待测 is the thickness of the transparent object to be measured, λ 1 represents the focusing wavelength of the upper surface at the current measurement position, λ 2 represents the focusing wavelength of the lower surface at the current measurement position.

[0030] The present application also provides a transparent object thickness measurement refraction compensation factor fusion calibration system, comprising:

[0031] a sample positioning and displacement control module, configured to accurately position a transparent object with a known thickness at a starting position of a measurement region, and control smooth and continuous movement of the sample in the measurement region;

[0032] a focusing wavelength measurement data acquisition module, configured to record focusing wavelength data of the upper surface and the lower surface of the transparent object during movement in real time;

[0033] a displacement-focusing wavelength conversion module, configured to convert the focusing wavelength data recorded during measurement into corresponding displacement values, and establish a mapping relationship between displacement and focusing wavelength;

[0034] a refraction compensation factor calculation and calibration module, configured to calculate and calibrate the refraction compensation factor based on displacement data of a piece of sample with a known thickness, and establish a mapping relationship between the refraction compensation factor and the focusing wavelength;

[0035] a refraction compensation factor fusion calibration module, configured to fuse refraction compensation factors from multiple pieces of samples of the same material and different known thicknesses, and generate a comprehensive refraction compensation factor;

[0036] a transparent object thickness measurement module, configured to calculate the actual thickness of the transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength during actual measurement.

[0037] On the other hand, the present application provides a computer device, comprising a memory and a processor, the memory pre-stores a computer program comprising a transparent object thickness measurement refraction compensation factor fusion calibration system, and the processor executes the computer program to perform the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method.

[0038] It should be understood that the above general description and the following detailed description are only exemplary and do not limit the present application.

[0039] In the present application, by using a transparent object with a known thickness, recording and analyzing the focusing wavelength data at different positions in the measurement range, and converting these wavelength data into corresponding displacement values, the refraction compensation factor is calculated and calibrated.

[0040] By calibrating and fusing the refraction compensation factors obtained from multiple transparent objects made of the same material and having different known thicknesses, high-precision refraction compensation and thickness measurement are achieved, significantly improving the accuracy and reliability of the measurement.

[0041] In the present application, the problems of complex calculation of refraction compensation factor, insufficient calibration accuracy and adverse effects of environmental interference on measurement results in the prior art are effectively overcome, and the system design is simple, the calculation process is efficient, and has the advantages of strong real-time performance and less resource occupation, which has wide practical application value. BRIEF DESCRIPTION OF DRAWINGS

[0042] Figure 1 A flow chart of the transparent object thickness measurement refraction compensation factor fusion calibration method provided by the present application is provided.

[0043] Figure 2 A single known thickness transparent object calibration refraction compensation factor diagram of the transparent object thickness measurement refraction compensation factor fusion calibration method provided by the present application is provided.

[0044] Figure 3 A two known thickness transparent object fusion calibration refraction compensation factor diagram of the transparent object thickness measurement refraction compensation factor fusion calibration method provided by the present application is provided.

[0045] Figure 4 A module diagram of the transparent object thickness measurement refraction compensation factor fusion calibration system of the present application is provided.

[0046] Figure 5 A diagram for converting the focusing wavelength of the transparent object to be measured into actual displacement values via a conversion curve is provided.

[0047] Figure 6 A diagram of the thickness measurement results of the transparent object to be measured at different measurement points in the measurement range is provided. DETAILED DESCRIPTION

[0048] The embodiments of the present application will be described below with reference to the accompanying drawings.

[0049] The application provides a transparent object thickness measurement refraction compensation factor fusion calibration method and system, which can be directly applied to the thickness measurement process of a transparent object, and uses multiple transparent objects of the same material and different known thicknesses to perform refraction compensation factor fusion calibration.

[0050] The application effectively overcomes the shortcomings of high requirement for accurate calculation of optical parameters in a conventional optical mechanism method and influence of environmental interference and accidental errors on a single thickness calibration method, and significantly improves the accuracy and reliability of transparent object thickness measurement.

[0051] Referring to Figures 1-3 The transparent object thickness measurement refraction compensation factor fusion calibration method proposed in the embodiment has the following specific implementation steps:

[0052] Step S1, a transparent object with a known thickness and uniform material is selected as a measured object. It is ensured that the surface of the object is smooth and has no obvious defects to reduce measurement errors. The measured object is fixed on a precision displacement platform, and the platform can realize micron-level displacement control. The upper surface is moved to the starting position of the measurement region, the focusing wavelength of the upper surface is equal to the minimum wavelength in the range, and the focusing wavelengths of the upper surface and the lower surface of the measured object at this time are recorded.

[0053] Step S2, according to the range of the measurement region and the required resolution, the moving step of the transparent object is set. For example, the transparent object is moved by 10 microns each time. The transparent object is slowly moved according to the set step, and the focusing wavelengths of the upper surface and the lower surface at different positions are recorded λ 1,k and λ 2,k until the lower surface of the measured object moves to the end position of the measurement region, and the focusing wavelength of the lower surface at this time is equal to the maximum wavelength in the range.

[0054] Step S3, during the movement, the actual displacement value corresponding to each position is calculated by using the moving step and the total moving distance of the precision displacement platform. According to the recorded focusing wavelengths of the upper surface and the lower surface at each position, since there is a nonlinear mapping relationship between the displacement value and the focusing wavelength, a curve fitting method is used, and a displacement-focusing wavelength conversion curve calculation formula is obtained by fitting experimental data to represent

[0055]

[0056] In the formula, f represents the focusing wavelength of the current measurement position, d represents the converted displacement value, λ 0、 p 1、 p 1、 p2 represents a set of parameters for the transformation curve. These parameters were obtained through fitting experimental data; the transformation curve parameters used in this embodiment are... p 0 = -4536.15 p 1 = 10.47 p 2 = 0.00178.

[0057] Step S4, based on the known thickness of the transparent object H Using the obtained displacement data of the upper and lower surfaces at various locations, the refraction compensation factor is calculated and calibrated, including the following process:

[0058] The refraction compensation factor is calculated for each location in the measurement area as follows:

[0059]

[0060] In the formula, λ 1,k Indicates that the object being tested is in k The focusing wavelength of the upper surface of the position. λ 2,k Indicates that the object being tested is in k The focusing wavelength of the lower surface of the position. c k The wavelength of the lower surface is indicated as λ 2,k Refraction compensation factor at time, H This indicates the thickness of a known transparent object.

[0061] By analyzing the relationship between the refractive compensation factor at different locations and the focusing wavelength of the lower surface, a mapping relationship between a refractive compensation factor and the focusing wavelength of the lower surface can be determined. Specifically, this is expressed as:

[0062]

[0063] In the formula α , β , γ These are the fitting coefficients. λ 2 represents the focusing wavelength of the lower surface at the current measurement position, which is obtained through data calibration and fitting.

[0064] Step S5: In this embodiment, without loss of generality, steps S1 to S4 are repeated using two transparent objects of the same material with known thicknesses of 505.50 μm and 1986.81 μm, respectively, to obtain two refractive compensation factors. These two refractive compensation factors are then fused and calibrated to obtain a comprehensive refractive compensation factor suitable for measuring the thickness of transparent objects made of this material. This process includes the following steps:

[0065] For the two pieces of the same material and different known thickness of transparent objects, the mapping relationship between the refractive compensation factor and the focusing wavelength of the lower surface can be obtained by calculating the calibration as follows:

[0066]

[0067] wherein α k 、 β k 、 γ k is the first k The fitting coefficients of the refractive compensation factor of the two pieces of the same material and different known thickness of transparent objects are obtained by data calibration fitting. Wherein α 1= -2.936×10 -7 , β 1=3.354×10 -4 , γ 1 = 1.361, α 2=-3.393×10 -7 , β 2=4.254×10 -4 , γ 2 = 1.321。

[0068] By fusing the calibration formula, the comprehensive refractive compensation factor suitable for the thickness measurement of the transparent object of the material is obtained as follows:

[0069]

[0070] wherein Ψ α (·), Ψ β (·), and Ψ γ (·) are general fusion operators for different fitting parameters, which are used to realize parameter fusion calibration. In the embodiment, without loss of generality, the arithmetic mean is selected to realize the operator of parameter fusion calibration, that is,

[0071]

[0072] Therefore, the comprehensive refractive compensation factor is:

[0073]

[0074] wherein, ( α 1+ α 2) / 2= -3.165×10 -7 , ( β 1+ β 2) / 2=3.804×10 -4 , ( γ 1+γ 2) / 2 = 1.341.

[0075] In step S6, in the actual thickness measurement, the transparent object of the same material and unknown thickness is placed in the measurement area, the focusing wavelengths of the upper surface and the lower surface are measured, the displacement data of the corresponding upper surface and lower surface are obtained by using the relationship between displacement and focusing wavelength, and the actual thickness of the transparent object is calculated by combining the comprehensive refraction compensation factor of the fusion calibration. The formula for calculating the actual thickness of the transparent object by combining the comprehensive refraction compensation factor of the fusion calibration is:

[0076]

[0077] In the formula, t is the thickness of the transparent object to be measured, H 待测 t is the thickness of the transparent object to be measured, λ 1 represents the focusing wavelength of the upper surface at the current measurement position, Figure 4 2 represents the focusing wavelength of the lower surface at the current measurement position.

[0078] Referring to Figure 5 , the embodiment of the present application also provides a refraction compensation factor fusion calibration system for transparent object thickness measurement, which specifically comprises the following modules:

[0079] A sample positioning and displacement control module is used to accurately position the transparent object of known thickness at the starting position of the measurement area and control the smooth and continuous movement of the sample in the measurement area.

[0080] A focusing wavelength measurement data acquisition module is used to record the focusing wavelength data of the upper surface and the lower surface of the transparent object in real time during movement.

[0081] A displacement-focusing wavelength conversion module is used to convert the focusing wavelength data recorded during measurement into corresponding displacement values and establish a mapping relationship between displacement and focusing wavelength.

[0082] A refraction compensation factor calculation and calibration module is used to calculate and calibrate the refraction compensation factor based on the displacement data of a piece of sample of known thickness and establish a mapping relationship between the refraction compensation factor and the focusing wavelength.

[0083] A refraction compensation factor fusion calibration module is used to fuse the refraction compensation factors from multiple pieces of sample of the same material and different known thicknesses to generate a comprehensive refraction compensation factor.

[0084] A transparent object thickness measurement module is used to calculate the actual thickness of the transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength in the actual measurement.

[0085] The processing procedure of the displacement-focus wavelength conversion module includes receiving the focus wavelength data of the upper surface and the lower surface at each position from the focus wavelength measurement data acquisition module, and calculating the corresponding displacement value by using the displacement-focus wavelength conversion curve formula, and then outputting the result to the refraction compensation factor calculation and calibration module. The processing procedure of the refraction compensation factor calculation and calibration module includes analyzing the relationship between the refraction compensation factor and the focus wavelength of the lower surface, calibrating the mapping relationship between the two, and transmitting the mapping relationship to the refraction compensation factor fusion calibration module. The processing procedure of the refraction compensation factor fusion calibration module includes receiving the mapping relationship between the refraction compensation factor and the focus wavelength of the transparent object with different thicknesses from the refraction compensation factor calculation and calibration module, performing fusion calibration, and then outputting the comprehensive mapping relationship between the refraction compensation factor and the focus wavelength to the transparent object thickness measurement module. The specific implementation of each module is similar to the aforementioned transparent object thickness measurement refraction compensation factor fusion calibration method.

[0086] The embodiment also provides a computer device, which includes a memory and a processor. The memory pre-stores a computer program. When the processor runs the computer program, the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method are executed.

[0087] In order to better show the implementation effect of the method, in the embodiment, a transparent object with a true value of 1006.33 μm is selected as the test object. As shown in Figure 6 Fig. 6, the focus wavelength of the 1006.33 μm transparent object at the 150th measurement point in the measurement range is converted into the displacement value by the conversion curve. As shown in ​ Fig. 7, the measured value and the true value of the thickness measurement of the 1006.33 μm transparent object at different measurement points in the measurement range are compared.

[0088] In order to better demonstrate the implementation effect of the method of the present application, in the present embodiment, the performance of different refractive compensation factor calibration methods is compared, and the related results are shown in Table 1. As can be seen from the table, the fitting effect of quadratic fitting calibration is general; when the polynomial degree is increased to five, the measurement accuracy is improved. However, when the polynomial fitting degree is further increased to eight, an obvious overfitting phenomenon occurs. This result verifies the aforementioned point that although high-degree polynomial fitting can improve the fitting accuracy, it is also easy to cause overfitting problem. In addition, the analysis shows that for the same refractive compensation factor calibration method, selecting transparent objects with different thicknesses for calibration will lead to differences in the measurement accuracy of the measured object. This further verifies the problem that using a single thickness of transparent standard part for calibration may introduce accidental error. The refractive compensation factor fusion calibration method proposed by the present application significantly improves the measurement accuracy by optimizing the calibration strategy. The measurement mean absolute error (MAE) is 0.78, and the measurement standard deviation (STD) is 0.87, which are better than other calibration methods. This result fully proves the superiority of the method of the present application, effectively improves the accuracy and reliability of the thickness measurement of transparent objects.

[0089] Table 1 Comparison of different refractive compensation factor calibration methods

[0090]

[0091] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application; in the case of no conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A transparent object thickness measurement refractive compensation factor fusion calibration method, characterized by, The method comprises the following steps: Step S1, using a transparent object with a known thickness as the measured object, moving its upper surface to the starting position of the measurement area, making its upper surface focus wavelength equal to the minimum wavelength in the range, and recording the focus wavelength of its upper and lower surfaces at this time; Step S2, continuously moving the measured object so that it gradually passes through the measurement area, recording the focus wavelength of its upper and lower surfaces at different positions until its lower surface moves to the end position of the measurement area, at which time its lower surface focus wavelength is equal to the maximum wavelength in the range; Step S3, according to the recorded focus wavelength of the upper and lower surfaces of the measured object at each position, and combining the mapping relationship between displacement and focus wavelength, the displacement data of the upper and lower surfaces of the measured object at each position is obtained; Step S4, according to the known thickness of the measured object, using the obtained displacement data of the upper and lower surfaces of the measured object at each position, the refraction compensation factor is calculated and calibrated; Step S5, using multiple transparent objects of the same material and different known thicknesses to repeat steps S1 to S4, thereby obtaining multiple refraction compensation factors, and calibrating the refraction compensation factors to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses; In step S5, the fusing calibration of the refraction compensation factors comprises: for m Bulk homogeneous material and different known thickness transparent objects, wherein m ≥2, the mapping relationship between the refraction compensation factor and the focusing wavelength of the lower surface is: In the formula, in the formula α k , β k , γ k For the first k The fitting coefficients of the refractive compensation factor obtained by fitting data calibration data of two transparent objects of the same material but different known thicknesses. C k ( λ 2) indicates the first k The mapping relationship between the refractive compensation factor obtained by calibrating transparent objects of the same material but different known thicknesses and the focusing wavelength of the lower surface, and k ∈(1, 2,..., m ); Step S6, in actual thickness measurement, a transparent object of the same material and unknown thickness is placed in the measurement area as the actual measured object, the focus wavelength of its upper and lower surfaces is measured, the corresponding displacement data of the upper and lower surfaces is obtained by using the mapping relationship between displacement and focus wavelength, and the actual thickness of the actual measured object is calculated by combining the comprehensive refraction compensation factor; the mapping relationship between the refraction compensation factor and the lower surface focus wavelength is calibrated to obtain a comprehensive refraction compensation factor suitable for thickness measurement of transparent objects of the same material and different thicknesses: Ψ α (·), Ψ β (·), Ψ γ (·) are general fusion operators for different fitting parameters, used to realize parameter fusion calibration; in step S6, the combination of the comprehensive refraction compensation factor and the calculation of the actual thickness of the actual measured object include: wherein H 待测 is the thickness of the transparent object to be measured, λ 1 denotes the focusing wavelength of the upper surface at the current measurement position, λ 2 denotes the focusing wavelength of the lower surface at the current measurement position.

2. The method of claim 1, wherein the method further comprises: In step S3, the displacement-focus wavelength conversion curve of the mapping relationship between displacement and focus wavelength is calculated as follows: In the formula, λ represents the focusing wavelength, d represents the converted displacement value, p 0, p 1, p 2 is a set of parameters corresponding to the conversion curve of the measuring instrument, and the parameters are obtained by fitting experimental data.

3. The method for fusion calibration of refraction compensation factor for thickness measurement of transparent objects according to claim 2, characterized in that, In step S4, the calculation and calibration of the refraction compensation factor comprises: according to the known thickness of the measured object, using the obtained displacement data of the upper and lower surfaces of the measured object at each position, calculating the refraction compensation factor of each position of the measurement area: wherein λ 1,k represents the focusing wavelength at the k position on the upper surface, λ 2,k represents the focusing wavelength at the k position on the lower surface, c k represents the focusing wavelength at the lower surface, λ 2,k refractive compensation factor when the focusing wavelength at the lower surface is 4. The method for fusion calibration of refraction compensation factor for thickness measurement of transparent objects according to claim 3, characterized in that, The relationship between the refraction compensation factor and the corresponding lower surface focus wavelength at different positions of the measurement area is analyzed, and the mapping relationship between the refraction compensation factor and the lower surface focus wavelength is calibrated: wherein a, β, γ are fitting coefficients obtained by data calibration fitting, λ 2 is the lower surface focusing wavelength.

5. A transparent object thickness measurement refractive compensation factor fusion calibration system, characterized by, The steps for performing the transparent object thickness measurement refraction compensation factor calibration method of any one of claims 1-4 comprise: A sample positioning and displacement control module for accurately positioning a transparent object with a known thickness at the starting position of the measurement area and controlling the smooth and continuous movement of the sample in the measurement area; A focus wavelength measurement data acquisition module for recording the focus wavelength data of the upper and lower surfaces of the transparent object in real time during movement; A displacement-focus wavelength conversion module for converting the focus wavelength data recorded during measurement into corresponding displacement values, establishing a mapping relationship between displacement and focus wavelength; The refraction compensation factor calculation and calibration module is configured to calculate and calibrate the refraction compensation factor based on displacement data of a sample with a known thickness, and establish a mapping relationship between the refraction compensation factor and the focusing wavelength. The refraction compensation factor fusion calibration module is configured to fuse refraction compensation factors from multiple samples made of the same material and having different known thicknesses, and generate a comprehensive refraction compensation factor. The transparent object thickness measurement module is configured to calculate the actual thickness of a transparent object to be measured according to the fused refraction compensation factor and the measured focusing wavelength in an actual measurement.

6. A computer device comprising a memory and a processor, characterized in that, The computer program comprising the transparent object thickness measurement refraction compensation factor fusion calibration system according to claim 5 is pre-stored in the memory, and the processor executes the computer program to perform the steps of the transparent object thickness measurement refraction compensation factor fusion calibration method according to any one of claims 1-4.

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