Fast reflecting mirror device

By using a combination of a flexible lever amplification mechanism and a piezoelectric ceramic driver in the fast reflector device, the amplification of the displacement output of the piezoelectric ceramic driver is achieved, and the problem of small deflection range of the reflector in the prior art is solved, the deflection range is improved and the shaft drift phenomenon is avoided.

CN119937151AActive Publication Date: 2025-05-06XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

Patent Information

Application Number
CN202510436848.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-04-09
Publication Date
2025-05-06
Estimated Expiration
2045-04-09

AI Technical Summary

Technical Problem

The magnification of the existing amplification mechanism is relatively small, which greatly restricts the deflection range of the reflector and is difficult to meet the needs of large-scale deflection.

Method used

A fast reflector device including a base, a flexible lever amplification mechanism, a piezoelectric ceramic driver, a flexible support table, a reflector and a displacement detector are adopted. The device realizes amplification of the displacement output of the piezoelectric ceramic driver through the cooperation of the flexible lever amplification mechanism and the piezoelectric ceramic driver, and avoids shaft drifting through the flexible support table.

Benefits of technology

The deflection range of the reflector is effectively improved, up to 20mrad, solving the problem that traditional amplification mechanism cannot meet the needs of large-scale deflection, and avoiding shaft drifting through the design of the flexible support table.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119937151A_ABST
    Figure CN119937151A_ABST
Patent Text Reader

Abstract

The invention belongs to the field of optical instruments, and particularly relates to a fast reflecting mirror device. The device comprises a base, N flexible lever amplification mechanisms, N piezoelectric ceramic drivers, a flexible supporting table, a reflecting mirror and N displacement detectors, the fixed ends of the N flexible lever amplification mechanisms are connected with the same side of the base. The N piezoelectric ceramic drivers are installed in the installation spaces of the N flexible lever amplification mechanisms respectively, the installation ends of the N piezoelectric ceramic drivers are connected with the fixed ends of the flexible lever amplification mechanisms, and the driving ends of the N piezoelectric ceramic drivers are connected with the amplification ends of the flexible lever amplification mechanisms. The N displacement detectors are installed at the free ends of the N flexible lever amplification mechanisms correspondingly. The flexible supporting table is provided with a connecting face and N connecting ends, and the N connecting ends are connected with the free ends of the N flexible lever amplifying mechanisms correspondingly. The reflector is connected to the connecting surface. The deflection range of the reflector can be effectively improved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention relates to an optical instrument, in particular to a fast reflecting mirror device. Background Art

[0002] The Fast Steering Mirror (FSM) is an important component of the secondary stabilization system. It has the advantages of fast response, high precision, and high resolution. Its structure mainly includes the following components: mirror, driver, flexible support structure, and base. Fast steering mirrors are widely used in space laser communications, laser weapons, and other fields. They are the core components of capture, tracking, and aiming systems, and can accurately point and capture the tracked object.

[0003] According to the different driving methods, fast reflectors are usually divided into piezoelectric fast reflectors and voice coil fast reflectors. The difference between the two is that the piezoelectric fast reflector is driven by a piezoelectric ceramic driver, which has a faster response but a smaller stroke; the voice coil fast reflector is driven by a voice coil motor, which can meet the needs of a large range of deflection, but is susceptible to external disturbances due to electromagnetic interference.

[0004] Piezoelectric ceramic actuators have the characteristics of large output and high precision. Using them as the actuator of a fast reflector can achieve high positioning accuracy. However, the elongation of the piezoelectric ceramic actuator greatly restricts the deflection range of the reflector. Therefore, an amplification mechanism must be used to amplify the displacement output of the piezoelectric ceramic actuator.

[0005] However, the magnification of the existing magnifying mechanism is relatively small, which greatly restricts the deflection range of the reflector and is difficult to meet the needs of large-range deflection. Summary of the invention

[0006] The purpose of the present invention is to provide a fast reflector device to solve the technical problem that the existing amplification mechanism has a relatively small amplification ratio, which greatly restricts the deflection range of the reflector and is difficult to meet the needs of a large range of deflection.

[0007] To achieve the above purpose, the technical solution adopted by the present invention is: A fast reflector device, which is special in that it includes a base, a flexible lever amplifying mechanism, a piezoelectric ceramic driver, a flexible support table, a reflector and a displacement detector; The number of the flexible lever amplifying mechanism, the piezoelectric ceramic driver and the displacement detector is N, N≥4, and N is an even number; N flexible lever amplifying mechanisms are evenly distributed along the circumference, and their fixed ends are respectively connected to the same side of the base; Each of the N flexible lever amplifying mechanisms is provided with an installation space for installing a piezoelectric ceramic driver. The N piezoelectric ceramic drivers are respectively installed in the installation spaces of the N flexible lever amplifying mechanisms, and the installation ends thereof are connected to the fixed ends of the flexible lever amplifying mechanisms, and the driving ends are connected to the amplifying ends of the flexible lever amplifying mechanisms, so as to transmit the output of the piezoelectric ceramic driver to the free ends; the control ends of the N piezoelectric ceramic drivers are respectively electrically connected to the control ends of the external controllers; N displacement detectors are respectively installed on N flexible lever amplifying mechanisms, and their output ends are respectively electrically connected to the external controller. The N displacement detectors are respectively used to obtain the displacement of the N flexible lever amplifying mechanisms and send it to the external controller, so that the external controller controls the N piezoelectric ceramic drivers to extend or contract respectively according to the displacement of the N flexible lever amplifying mechanisms. The flexible support platform is provided with a connection surface and N connection ends, and the N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms; The back side of the reflector is connected to the connecting surface of the flexible support platform.

[0008] Further, the flexible lever amplification mechanism includes a first connecting arm, a second connecting arm, a third connecting arm, a fourth connecting arm, a fifth connecting arm and a connecting seat; One side of the first connecting arm is connected to the base; one end of the second connecting arm and the third connecting arm are respectively connected to the two ends of the other side of the first connecting arm; the other end of the second connecting arm is connected to one end of the fourth connecting arm through a flexible hinge, and the other end of the third connecting arm is connected to one end of the fifth connecting arm through a flexible hinge; the other end of the fourth connecting arm is connected to the side of the fifth connecting arm close to the first connecting arm through a flexible hinge, and a distance is provided between the connection and one end of the fifth connecting arm; One side of the connecting seat is connected to the middle part of one side of the fourth connecting arm close to the first connecting arm through a flexible hinge; The first connecting arm, the second connecting arm, the third connecting arm and the fourth connecting arm form an installation space; the other side of the first connecting arm serves as a fixed end of the flexible lever amplifying mechanism and is connected to the installation end of the piezoelectric ceramic driver; the other side of the connecting seat serves as an amplifying end of the flexible lever amplifying mechanism and is connected to the driving end of the piezoelectric ceramic driver; The other end of the fifth connecting arm serves as the free end of the flexible lever amplifying mechanism and is connected to a connecting end of the flexible support platform; The displacement detector is arranged at the outer side of the flexible hinge at the connection between the third connecting arm and the fifth connecting arm, and is used to detect the deformation amount of the flexible hinge to obtain the displacement amount of the flexible lever amplification mechanism.

[0009] Further, the first connecting arm, the fourth connecting arm, and the fifth connecting arm are arranged parallel to each other and are all arranged parallel to the connecting surface of the flexible support platform, and the second connecting arm, the third connecting arm, and the output direction of the piezoelectric ceramic driver are arranged parallel to each other and are all arranged perpendicular to the connecting surface of the flexible support platform; A connecting platform matched with the first connecting arm is arranged on the base, and one side of the first connecting arm is connected to the base through the connecting platform.

[0010] Furthermore, a ball head locking bolt is provided at a position corresponding to the connecting platform on the other side of the base, and the ball head end of the ball head locking bolt passes through the base, the connecting platform and the first connecting arm in sequence, and abuts against the mounting end of the piezoelectric ceramic driver.

[0011] Furthermore, a gasket is provided at the abutment portion between the mounting end of the piezoelectric ceramic driver and the ball end of the ball locking bolt.

[0012] Furthermore, the displacement detector is a strain gauge.

[0013] Further, the flexible support platform includes a first support platform, a second support platform and N leaf-type flexible bearings; the N leaf-type flexible bearings are evenly divided into N / 2 groups, two leaf-type flexible bearings in the same group are coaxially arranged, and a gap is arranged between the two leaf-type flexible bearings in the same group close to one end; the N groups of leaf-type flexible bearings are evenly distributed along the circumferential direction; The outer ends of the N leaf spring flexible bearings are N connecting ends, which are respectively connected to the free ends of the N flexible lever amplifying mechanisms; The first support platform and the second support platform are fixedly connected, and a mounting groove adapted to the inner ends of the N leaf spring flexible bearings is respectively provided on one side close to each other, and the inner ends of the N leaf spring flexible bearings are respectively provided in the mounting grooves of the first support platform and the second support platform; A side of the first support platform away from the second support platform is a connecting surface connected to the reflecting mirror.

[0014] Further, the leaf spring type flexible bearing comprises a first cylindrical shell, a second cylindrical shell and M flexible plates; M ≥ 3, and M is an odd number; The inner circumferential surfaces of the first cylindrical shell and the second cylindrical shell are respectively provided with arc-shaped plates extending in the circumferential direction and the axial direction, one end of the arc-shaped plates is flush with one end of the first cylindrical shell and the second cylindrical shell, and the other end extends to the outside of the other end of the first cylindrical shell and the second cylindrical shell; The other ends of the first cylindrical shell and the second cylindrical shell are arranged facing each other, the arc plate extending from the first cylindrical shell is placed in the second cylindrical shell, the arc plate of the second cylindrical shell is placed in the first cylindrical shell, the arc plates extending from the first cylindrical shell and the second cylindrical shell are symmetrically arranged in the circumferential direction, and the arc plates of the two are close to one end of each other and a gap is arranged in the circumferential direction; M flexible plates are respectively arranged in the space formed by the arc plates of the first cylindrical shell and the second cylindrical shell along the axial direction, two ends of the M flexible plates are respectively connected to the inner walls of the arc plates of the first cylindrical shell and the second cylindrical shell, and the M flexible plates are cross-arranged on the radial plane projection of the first cylindrical shell; One end of the first cylindrical shell is used as a connecting end and is connected to the free end of the flexible lever amplifying mechanism; one end of the second cylindrical shell is installed in correspondence with the first support platform and the second support platform through the installation groove.

[0015] Furthermore, N=4; the four leaf spring flexible bearings are divided into two groups, and the axes of the two groups of leaf spring flexible bearings intersect vertically; the N connecting ends are respectively connected to the free ends of the N flexible lever amplification mechanisms through clamps.

[0016] Furthermore, the fixture includes a connecting plate and an L-shaped plate connected to one side of the connecting plate; the connecting plate is connected to one end of the first cylindrical shell, and the L-shaped plate is connected to the free end of the flexible lever amplification mechanism through bolts.

[0017] A circular hole is provided at the center position of the first supporting platform and the second supporting platform on the side away from each other.

[0018] The beneficial effects of the present invention are: 1. The piezoelectric ceramic driver and the flexible lever amplification mechanism cooperate with each other to achieve the amplification of the displacement output of the piezoelectric ceramic driver, which can effectively solve the problem of small elongation of the piezoelectric ceramic driver and increase the deflection range of the reflector. 20 mrad .

[0019] 2. The leaf spring type flexible bearing in the flexible support platform of the present invention has an internal flexible plate cross-arranged in the first cylindrical shell and the second cylindrical shell. When the reflector is deflected, the twisted cylindrical hollow structure makes the axial drift of the internal flexible plate complementary, which can effectively avoid the axial drift phenomenon.

[0020] 3. The present invention adopts a flexible lever amplification mechanism, which can effectively solve the technical problem that traditional rigid support components cannot meet the requirements of zero friction and zero clearance, and require lubrication to maintain a long life. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of an embodiment of the present invention; Figure 2 yes Figure 1 The main view of Figure 3 is a schematic structural diagram of a flexible support platform in an embodiment of the present invention; Figure 4 yes Figure 3 Explosion diagram of Figure 5 is a schematic structural diagram of a reed-type flexible bearing in an embodiment of the present invention; Figure 6 yes Figure 5 Explosion diagram.

[0022] In the figure: 1-base; 2-flexible lever amplification mechanism, 21-first connecting arm, 22-second connecting arm, 23-third connecting arm, 24-fourth connecting arm, 25-fifth connecting arm, 26-connecting seat; 3-piezoelectric ceramic driver, 4-clamp, 41-connecting plate, 42-L-shaped plate; 5-flexible support platform, 51-first support platform, 52-second support platform, 53-reed type flexible bearing, 531-first cylindrical shell, 532-second cylindrical shell, 533-flexible plate, 534-arc plate, 54-circular hole; 6-reflector, 7-connecting platform, 8-ball head locking bolt, 9-gasket, 10-strain gauge. DETAILED DESCRIPTION

[0023] In order to make the purpose, advantages and features of the present invention clearer, a fast reflector device proposed by the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. According to the following specific implementation methods, the advantages and features of the present invention will be clearer. It should be noted that: the drawings are all in a very simplified form and are not in precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention; secondly, the structures shown in the drawings are often part of the actual structure.

[0024] See also Figure 1 and Figure 2 The present embodiment is a fast reflector device, which mainly includes a base 1, a flexible lever amplifying mechanism 2, a piezoelectric ceramic driver 3, a clamp 4, a flexible support platform 5, a reflector 6 and a displacement detector, etc.; wherein, the number of the flexible lever amplifying mechanism 2, the piezoelectric ceramic driver 3, the clamp 4 and the displacement detector is 4.

[0025] In other embodiments of the present invention, if it is necessary to achieve more angles of deflection of the reflector 6, 6, 8 or more even numbers of flexible lever amplifiers 2, piezoelectric ceramic drivers 3, clamps 4 and displacement detectors can be set according to actual needs, but the increase in quantity will lead to a more complex structure and higher cost.

[0026] The flexible lever amplifying mechanism 2 is a secondary lever amplifying mechanism, which is used to realize the displacement output amplification function of the piezoelectric ceramic driver 3. The maximum length of the flexible lever amplifying mechanism 2 is 17 mm , with a maximum width of 5 mm , the maximum height is 37.6 mm The size of the flexible lever amplification mechanism 2 is related to the displacement output amplification ratio, and in this embodiment, the amplification ratio can reach 8.55.

[0027] The four flexible lever amplifying mechanisms 2 are evenly distributed along the circumferential direction, so that the angle between two adjacent flexible lever amplifying mechanisms 2 along the circumferential direction is 90°.

[0028] Specifically, the flexible lever amplifying mechanism 2 includes a first connecting arm 21, a second connecting arm 22, a third connecting arm 23, a fourth connecting arm 24, a fifth connecting arm 25 and a connecting seat 26. Figure 1 With reference to the "upper" and "lower" directions in the figure, four connecting platforms 7 corresponding to and matching the four first connecting arms 21 are arranged on the upper side of the base 1. The four connecting platforms 7 are used to determine the installation positions of the four first connecting arms 21. The lower side of the first connecting arm 21 is connected to the upper side of the corresponding connecting platform 7 on the base 1; the lower ends of the second connecting arm 22 and the third connecting arm 23 are respectively connected to the two ends of the upper side of the first connecting arm 21, and the second connecting arm 22 and the third connecting arm 23 are arranged parallel to each other; the upper end of the second connecting arm 22 is connected to one end of the fourth connecting arm 24 through a flexible hinge, and the thickness of the flexible hinge is 0.6 mm The upper end of the third connecting arm 23 is connected to one end of the fifth connecting arm 25 through a flexible hinge, and the thickness of the flexible hinge is 0.6 mm By setting the above two thick flexible hinges, the structural stability of the flexible lever amplification mechanism 2 can be ensured; the fourth connecting arm 24 and the fifth connecting arm 25 are arranged parallel to the first connecting arm 21, and the length of the third connecting arm 23 is greater than the length of the second connecting arm 22; the other end of the fourth connecting arm 24 is connected to the lower side of the fifth connecting arm 25 through a flexible hinge, and the thickness of the flexible hinge is 0.5 mm , 0.5 mm The relative position of the flexible hinge is 0.6 mm The size of the flexible hinge is smaller and more flexible to ensure the rotation effect. A gap is set between the connection point between the fourth connecting arm 24 and the fifth connecting arm 25 and one end of the fifth connecting arm 25; the length of the fifth connecting arm 25 is greater than the length of the fourth connecting arm 24. The upper side of the connecting seat 26 is connected to the middle part of the lower side of the fourth connecting arm 24 through a flexible hinge. The thickness of the flexible hinge is 0.4 mm , 0.4 mm The flexible hinge is used as the input point of the piezoelectric ceramic driver 3 and has the thinnest thickness to ensure that the force and displacement input of the piezoelectric ceramic driver 3 are concentrated at one point as much as possible to reduce displacement loss.

[0029] The first connecting arm 21, the second connecting arm 22, the third connecting arm 23 and the fourth connecting arm 24 enclose an installation space for installing the piezoelectric ceramic driver 3. The piezoelectric ceramic driver 3 is arranged in the installation space. The size of the piezoelectric ceramic driver 3 is 5 mm ×5 mm ×26 mm; The nominal stroke of the piezoelectric ceramic driver 3 is 39.6 , indicating that the maximum extension of the drive is 39.6 The output direction of the piezoelectric ceramic driver 3 is parallel to the length direction of the second connecting arm 22; the lower side of the first connecting arm 21 is connected to the mounting end of the piezoelectric ceramic driver 3 as the fixed end of the flexible lever amplification mechanism 2. The control end of the piezoelectric ceramic driver 3 is electrically connected to the control end of the external controller, so that it can be extended or contracted under the control of the external controller.

[0030] Specifically, a ball head locking bolt 8 is provided at a position corresponding to the connecting platform 7 on the lower side of the base 1. The ball head end of the ball head locking bolt 8 passes through the base 1, the connecting platform 7 and the first connecting arm 21 in sequence, and abuts against the mounting end of the piezoelectric ceramic driver 3. A gasket 9 is provided at the abutment between the mounting end of the piezoelectric ceramic driver 3 and the ball head locking bolt 8. The size of the gasket 9 is 5 mm ×5 mm , thickness is 0.5 mm The provision of the gasket 9 is beneficial to reducing the extrusion damage of the head of the ball head locking bolt 8 to the mounting end of the piezoelectric ceramic driver 3 , thereby increasing the service life of the piezoelectric ceramic driver 3 .

[0031] The lower side of the connecting seat 26 serves as the amplifying end of the flexible lever amplifying mechanism 2 and is bonded to the driving end of the piezoelectric ceramic driver 3 by glue; the other end of the fifth connecting arm 25 serves as the free end of the flexible lever amplifying mechanism 2 and is connected to the clamp 4.

[0032] In this embodiment, the displacement detector is preferably a strain gauge 10. Four strain gauges 10 are respectively arranged on the outside of the flexible hinge where the third connecting arm 23 and the fifth connecting arm 25 of the four flexible lever amplification mechanisms 2 are connected. The width of the strain gauge 10 is 3.5 mm , with a length of 4.3 mm , and the short side is parallel to the upper surface of the fifth connecting arm 25, and the pasting position is 1.3 mm The long side is 0.7 away from the two corresponding sides of the flexible hinge. mm The four strain gauges 10 are electrically connected to the external controller respectively. The deformation of the flexible hinge at the connection between the third connecting arm 23 and the fifth connecting arm 25 in the flexible lever amplification mechanism 2 is measured by the strain gauge 10 to obtain the displacement of the flexible lever amplification mechanism 2. The displacement is converted into the deflection angle of the reflector 6 using the existing conversion formula, and then the deflection angle is sent to the external controller. Real-time feedback can be performed in the control to control the elongation or extension of the corresponding piezoelectric ceramic driver 3 to form a closed-loop system. For example, the target angle of the device is to deflect 18 to the right. mrad , it is detected that the deflection angle of the reflector 6 is 16 to the right mrad, the external controller will continue to control the right piezoelectric ceramic driver 3 to extend, so that the reflector 6 continues to deflect to the right until the deflection angle reaches 18 mrad .

[0033] See also Figure 3 and Figure 4 The flexible support platform 5 includes a first support platform 51, a second support platform 52 and four reed-type flexible bearings 53; the four reed-type flexible bearings 53 are divided into two groups, and the two reed-type flexible bearings 53 in the same group are coaxially arranged, and the two reed-type flexible bearings 53 in the same group are arranged with a gap at one end close to each other; the axes of the two groups of reed-type flexible bearings 53 cross each other; the outer ends of the four reed-type flexible bearings 53 are four connecting ends, which are respectively connected to the four clamps 4; the first support platform 51 and the second support platform 52 are interlocked and connected with each other, and mounting grooves matched with the inner ends of the four reed-type flexible bearings 53 are respectively arranged on the side where the first support platform 51 and the second support platform 52 are close to each other, and the inner ends of the four reed-type flexible bearings 53 are respectively installed in the mounting grooves of the first support platform 51 and the second support platform 52, so that the four reed-type flexible bearings 53 are fixed on the first support platform 51 and the second support platform 52. The side of the first support platform 51 away from the second support platform 52 is a connecting surface, which is coaxially bonded to the reflector 6 ; and the aforementioned connecting surface is arranged parallel to the first connecting arm 21 and perpendicular to the second connecting arm 22 .

[0034] Preferably, circular holes 54 are provided at the center positions of the first support platform 51 and the second support platform 52 on the side away from each other, so as to prevent the reflector 6 from being initially positioned not in a horizontal position due to excessively high requirements on flatness when adhering the reflector 6 .

[0035] See also Figure 5 and Figure 6 , and Figure 6 With reference to the directions of "up", "down", "left" and "right" in the figure, the leaf spring flexible bearing 53 comprises a first cylindrical shell 531, a second cylindrical shell 532 and three flexible plates 533; arc plates 534 extending in the circumferential direction and the axial direction are respectively arranged on the inner circumferences of the first cylindrical shell 531 and the second cylindrical shell 532, the left end of the arc plate 534 on the first cylindrical shell 531 is arranged flush with its left end, and the right end extends beyond its right end, and at the same time, the arc plate 534 on the first cylindrical shell 531 is located in the upper half of its inner circumference; the right end of the arc plate 534 on the second cylindrical shell 532 is arranged flush with its right end, and the left end extends beyond its left end, and at the same time, the arc plate 534 on the second cylindrical shell 532 is located in the lower half of its inner circumference.

[0036] When the first cylindrical shell 531 and the second cylindrical shell 532 are assembled, the right end of the arc plate 534 on the first cylindrical shell 531 is placed inside the second cylindrical shell 532 and is flush with the right end of the second cylindrical shell 532; the left end of the arc plate 534 on the second cylindrical shell 532 is placed inside the first cylindrical shell 531 and is flush with the left end of the first cylindrical shell 531; the arc plates 534 of the first cylindrical shell 531 and the second cylindrical shell 532 are symmetrically arranged in the circumferential direction, and the arc plates 534 of the two are close to each other at one end and are provided with a gap in the circumferential direction, so that relative rotation can be achieved. The three flexible plates 533 are respectively arranged in the space formed by the arc plates 534 of the first cylindrical shell 531 and the second cylindrical shell 532, and the two ends of the three flexible plates 533 are respectively connected to the inner walls of the arc plates 534 of the first cylindrical shell 531 and the second cylindrical shell 532. On the left-right projection of the first cylindrical shell 531 or the second cylindrical shell 532, the three flexible plates 533 are arranged crosswise. The left end of the first cylindrical shell 531 is used as a connection end and is installed in cooperation with the clamp 4; the right end of the second cylindrical shell 532 is installed in cooperation with the first support platform 51 and the second support platform 52 through the installation groove.

[0037] It should be noted that the specific number of the above flexible boards 533 is only a preferred embodiment of the present invention. In other embodiments of the present invention, those skilled in the art can reasonably determine the number M of the flexible boards 533 according to actual needs, as long as M≥3 and M is an odd number.

[0038] Specifically, the clamp 4 includes a connecting plate 41 and an L-shaped plate 42 connected to one side of the connecting plate 41 . The connecting plate 41 is connected to the left end of the first cylindrical shell 531 , and the L-shaped plate 42 is connected to the other end of the fifth connecting arm 25 by bolts.

[0039] The device is driven by four piezoelectric ceramic drivers 3, and utilizes the inverse piezoelectric effect, that is, when a certain voltage is applied across the two ends of the piezoelectric ceramic driver 3, the piezoelectric ceramic driver 3 can be extended, and displacement output can be achieved.

[0040] Since the piezoelectric ceramic driver 3 can only extend but not contract when the voltage is pre-applied, when realizing the uniaxial deflection of the reflector 6, it is necessary to apply voltage to the two piezoelectric ceramic drivers 3 on the same deflection axis at the same time to extend 1 / 2 of the nominal stroke, i.e. 19.8 , and then one of the piezoelectric ceramic drivers 3 is continuously extended by applying voltage, and at the same time, the voltage of the other piezoelectric ceramic driver 3 is reduced to make it contract. At this time, the flexible lever amplification mechanism 2 connected to the piezoelectric ceramic driver 3 at the extension end is subjected to the upward displacement input, and the flexible hinge of the flexible lever amplification mechanism 2 will bend and deform. Using the principle of lever, the free end at the top of the flexible lever amplification mechanism 2, that is, the end where the fifth connecting arm 25 is connected to the clamp 4, will have an upward output displacement, and the output displacement is: the elongation of the piezoelectric ceramic driver × the amplification ratio of the flexible lever amplification mechanism. Similarly, the flexible lever amplification mechanism 2 connected to the contracting piezoelectric ceramic driver 3 will produce a downward displacement output at the top free end, and the output displacement is: the contraction of the piezoelectric ceramic driver after extending 1 / 2 of the nominal stroke × the amplification ratio of the flexible lever amplification mechanism.

[0041] Since the flexible lever amplifying mechanism 2 is connected to the flexible support platform 5 through the clamp 4, the two ends of the flexible support platform 5 along the deflection axis are subjected to a push and a pull in two opposite directions and displacements. At this time, the two leaf spring flexible bearings 53 perpendicular to the deflection axis, such as Figure 5 As shown, it rotates due to the drive of the flexible support platform 5. It should be noted that there needs to be enough clearance between the arc plate 534 of the first cylindrical shell 531 and the second cylindrical shell 532, and no interference will occur when the device is rotated to the maximum angle that can be reached. At this time, the flexible support platform 5 deflects, driving the reflector 6 to deflect.

[0042] If dual-axis deflection is to be performed, the four piezoelectric ceramic drivers 3 need to be controlled to extend and contract in the manner described above.

Claims

1. A fast reflector device, characterized in that: It comprises a base (1), a flexible lever amplifying mechanism (2), a piezoelectric ceramic driver (3), a flexible support platform (5), a reflector (6) and a displacement detector; The number of the flexible lever amplifying mechanism (2), the piezoelectric ceramic driver (3) and the displacement detector is N, N≥4, and N is an even number; The N flexible lever amplifying mechanisms (2) are evenly distributed along the circumference, and their fixed ends are respectively connected to the same side of the base (1); the N flexible lever amplifying mechanisms (2) are all provided with installation spaces for installing piezoelectric ceramic drivers (3), and the N piezoelectric ceramic drivers (3) are respectively installed in the installation spaces of the N flexible lever amplifying mechanisms (2), and their installation ends are connected to the fixed ends of the flexible lever amplifying mechanisms (2), and their driving ends are connected to the amplifying ends of the flexible lever amplifying mechanisms (2), and are used to transmit the output of the piezoelectric ceramic drivers (3) to the free ends; the control ends of the N piezoelectric ceramic drivers (3) are respectively electrically connected to external controllers; N displacement detectors are respectively mounted on N flexible lever amplifying mechanisms (2), and their output ends are respectively electrically connected to an external controller. The N displacement detectors are respectively used to obtain the displacement amounts of the N flexible lever amplifying mechanisms (2) and send them to the external controller, so that the external controller controls the N piezoelectric ceramic drivers (3) to extend or contract respectively according to the displacement amounts of the N flexible lever amplifying mechanisms (2); The flexible support platform (5) is provided with a connection surface and N connection ends, and the N connection ends are respectively connected to the free ends of the N flexible lever amplification mechanisms (2); The back surface of the reflector (6) is connected to the connection surface of the flexible support platform (5).

2. A fast reflector device according to claim 1, characterized in that: The flexible lever amplifying mechanism (2) comprises a first connecting arm (21), a second connecting arm (22), a third connecting arm (23), a fourth connecting arm (24), a fifth connecting arm (25) and a connecting seat (26); One side of the first connecting arm (21) is connected to the base (1); one end of the second connecting arm (22) and the third connecting arm (23) are respectively connected to two ends of the other side of the first connecting arm (21); the other end of the second connecting arm (22) is connected to one end of the fourth connecting arm (24) through a flexible hinge, and the other end of the third connecting arm (23) is connected to one end of the fifth connecting arm (25) through a flexible hinge; the other end of the fourth connecting arm (24) is connected to a side of the fifth connecting arm (25) close to the first connecting arm (21) through a flexible hinge, and a spacing is provided between the connection and one end of the fifth connecting arm (25); One side of the connecting seat (26) is connected to the middle part of one side of the fourth connecting arm (24) close to the first connecting arm (21) through a flexible hinge; The first connecting arm (21), the second connecting arm (22), the third connecting arm (23) and the fourth connecting arm (24) enclose the installation space; the other side of the first connecting arm (21) serves as the fixed end of the flexible lever amplifying mechanism (2) and is connected to the installation end of the piezoelectric ceramic driver (3); the other side of the connecting seat (26) serves as the amplifying end of the flexible lever amplifying mechanism (2) and is connected to the driving end of the piezoelectric ceramic driver (3); The other end of the fifth connecting arm (25) serves as the free end of the flexible lever amplifying mechanism (2) and is connected to a connecting end of the flexible supporting platform (5); The displacement detector is arranged on the outside of the flexible hinge at the connection between the third connecting arm (23) and the fifth connecting arm (25) and is used to detect the deformation amount of the flexible hinge to obtain the displacement amount of the flexible lever amplification mechanism (2).

3. A fast reflector device according to claim 2, characterized in that: The first connecting arm (21), the fourth connecting arm (24), and the fifth connecting arm (25) are arranged in parallel with each other and are all arranged in parallel with the connecting surface of the flexible support platform (5); the second connecting arm (22), the third connecting arm (23), and the output direction of the piezoelectric ceramic driver (3) are arranged in parallel with each other and are all arranged perpendicular to the connecting surface of the flexible support platform (5); The base (1) is provided with a connecting platform (7) adapted to the first connecting arm (21), and one side of the first connecting arm (21) is connected to the base (1) via the connecting platform (7).

4. A fast reflector device according to claim 3, characterized in that: A ball head locking bolt (8) is provided at a position on the other side of the base (1) corresponding to the connecting platform (7); the ball head end of the ball head locking bolt (8) passes through the base (1), the connecting platform (7) and the first connecting arm (21) in sequence, and abuts against the mounting end of the piezoelectric ceramic driver (3).

5. A fast reflector device according to claim 4, characterized in that: A gasket (9) is provided at the point where the mounting end of the piezoelectric ceramic driver (3) abuts against the ball end of the ball locking bolt (8).

6. A fast reflector device according to any one of claims 1 to 5, characterized in that: The displacement detector is a strain gauge (10).

7. A fast reflector device according to any one of claims 1 to 5, characterized in that: The flexible support platform (5) comprises a first support platform (51), a second support platform (52) and N reed-type flexible bearings (53); The N leaf-type flexible bearings (53) are evenly divided into N / 2 groups, and the two leaf-type flexible bearings (53) in the same group are coaxially arranged, and the two leaf-type flexible bearings (53) in the same group are arranged with a gap near one end of each other; the N groups of leaf-type flexible bearings (53) are evenly distributed along the circumferential direction; The outer ends of the N reed-type flexible bearings (53) are the N connecting ends, which are respectively connected to the free ends of the N flexible lever amplifying mechanisms (2); The first support platform (51) and the second support platform (52) are fixedly connected, and a mounting groove adapted to the inner ends of the N leaf spring type flexible bearings (53) is respectively arranged on one side close to each other, and the inner ends of the N leaf spring type flexible bearings (53) are respectively arranged in the mounting grooves of the first support platform (51) and the second support platform (52); The side of the first support platform (51) away from the second support platform (52) is the connecting surface, which is connected to the reflector (6).

8. A fast reflector device according to claim 7, characterized in that: The leaf spring type flexible bearing (53) comprises a first cylindrical shell (531), a second cylindrical shell (532) and M flexible plates (533); M≥3, and M is an odd number; The inner circumferential surfaces of the first cylindrical shell (531) and the second cylindrical shell (532) are respectively provided with arc-shaped plates (534) extending in the circumferential direction and the axial direction, one end of the arc-shaped plate (534) is flush with one end of the first cylindrical shell (531) and the second cylindrical shell (532), and the other end extends to the outside of the other end of the first cylindrical shell (531) and the second cylindrical shell (532); The other ends of the first cylindrical shell (531) and the second cylindrical shell (532) are arranged facing each other, the arc-shaped plate (534) extending from the first cylindrical shell (531) is placed in the second cylindrical shell (532), and the arc-shaped plate (534) extending from the second cylindrical shell (532) is placed in the first cylindrical shell (531), the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532) are symmetrically arranged in the circumferential direction, and the arc-shaped plates (534) of the two are close to each other at one end and a gap is arranged in the circumferential direction; The M flexible plates (533) are respectively arranged in the axial direction in the space formed by the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532), the two ends of the M flexible plates (533) are respectively connected to the inner walls of the arc-shaped plates (534) of the first cylindrical shell (531) and the second cylindrical shell (532), and the M flexible plates (533) are arranged crosswise with each other on the radial plane projection of the first cylindrical shell (531); One end of the first cylindrical shell (531) serves as a connecting end and is connected to the free end of the flexible lever amplifying mechanism (2); one end of the second cylindrical shell (532) is correspondingly mounted with the first support platform (51) and the second support platform (52) through a mounting groove.

9. A fast reflector device according to claim 8, characterized in that: Said N=4; The four leaf spring flexible bearings (53) are divided into two groups, and the axes of the two groups of leaf spring flexible bearings (53) intersect vertically; The four connection ends are respectively connected to the free ends of the four flexible lever amplification mechanisms (2) through clamps (4).

10. A fast reflector device according to claim 9, characterized in that: The clamp (4) comprises a connecting plate (41) and an L-shaped plate (42) connected to one side of the connecting plate (41); The connecting plate (41) is connected to one end of the first cylindrical shell (531), and the L-shaped plate (42) is connected to the free end of the flexible lever amplification mechanism (2) by means of bolts; A circular hole (54) is provided at the center position of the first supporting platform (51) and the second supporting platform (52) on the side away from each other.

Citation Information

Patent Citations

  • High-frequency response two-dimensional micro angular deflection control reflector based on double-shaft flexible hinge

    CN102323656A

  • Micro-vibration platform of deflecting mirror

    CN106226899A

  • Two-dimensional rapid control reflector

    CN107976802A

  • Compact high-stability phase shift scanning device based on piezoelectric ceramic driving

    CN115046636A

  • Low-profile dual-axis deflection device having deflection axes intersecting at mirror surfaceand method for achieving dual-axila deflection

    US20190271827A1

Cited By

  • Wide-angle compact fast reflecting mirror and control method thereof

    CN121978828A

  • A large-angle compact fast reflector and its control method

    CN121978828B