Gallium oxide substrate dislocation automatic identification system and identification method thereof

Abstract

The invention discloses a gallium oxide substrate dislocation automatic identification system and an identification method thereof, and relates to the technical field of image processing, and the method comprises the following steps: analyzing and processing a standard gallium oxide substrate image, and obtaining related parameters of the standard gallium oxide substrate image; according to the method, firstly, the standard gallium oxide substrate image is analyzed, the shooting position and the shooting parameters of the gallium oxide substrate to be recognized are determined, the parameters of the gallium oxide substrate image to be recognized and the standard gallium oxide substrate image are kept consistent, and the accuracy of gallium oxide substrate dislocation recognition is improved; performing power spectral density analysis on the standard gallium oxide substrate image and the to-be-identified gallium oxide substrate image in the frequency domain to determine whether the to-be-identified gallium oxide substrate is an abnormal gallium oxide substrate, and finally screening the frequency domain characteristics of the abnormal gallium oxide substrate through the frequency domain characteristics of the dislocation image of the gallium oxide substrate to obtain the abnormal gallium oxide substrate. According to the gallium oxide substrate dislocation information identification method, not only is the working intensity of workers reduced, but also the identification precision is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of image processing, and in particular to a gallium oxide substrate dislocation automatic recognition system and a recognition method thereof. Background Art

[0002] As a wide bandgap semiconductor material, gallium oxide has shown great potential in high-power, high-frequency and high-temperature electronic devices in recent years. The quality of the gallium oxide substrate directly affects the performance of the device. Dislocation, as an important manifestation of substrate defects, is one of the key factors affecting the performance of gallium oxide devices.

[0003] As a wide bandgap semiconductor material, gallium oxide has the characteristic of miniaturization. Therefore, manual identification of dislocations in gallium oxide substrates requires workers to stay focused at all times, which increases their workload. Summary of the invention

[0004] In order to solve the above technical problems, a gallium oxide substrate dislocation automatic identification system and identification method are provided. This technical solution solves the problem that manual dislocation identification of gallium oxide substrates proposed in the above background technology requires workers to stay focused at all times, which increases the work intensity of workers.

[0005] In order to achieve the above purpose, the technical solution adopted by the present invention is:

[0006] A method for automatically identifying dislocations in a gallium oxide substrate, comprising:

[0007] Acquire a standard gallium oxide substrate image, and analyze and process the standard gallium oxide substrate image based on the analysis management terminal to acquire relevant parameters of the standard gallium oxide substrate image, wherein the relevant parameters of the standard gallium oxide substrate image include image shooting background, image shooting parameters, and placement position of the gallium oxide substrate;

[0008] The analysis management terminal takes an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtains the gallium oxide substrate image to be identified;

[0009] Based on the analysis management terminal, a comparison and judgment process is performed on the standard gallium oxide substrate image and the image of the gallium oxide substrate to be identified to determine the type of the gallium oxide substrate to be identified, wherein the type of the gallium oxide substrate to be identified is any one of a standard gallium oxide substrate and an abnormal gallium oxide substrate;

[0010] Based on the analysis management terminal, the type of the gallium oxide substrate to be identified is analyzed and processed to obtain the dislocation information of the gallium oxide substrate.

[0011] Preferably, the acquiring of the standard gallium oxide substrate image comprises the following steps: analyzing and processing the standard gallium oxide substrate image based on the analysis management terminal, and acquiring relevant parameters of the standard gallium oxide substrate image:

[0012] Based on the analysis management terminal, data is retrieved from the database system to obtain the standard gallium oxide substrate image;

[0013] Based on the analysis management terminal, the standard gallium oxide substrate image is analyzed and processed to obtain the image shooting background and image shooting parameters;

[0014] The analysis management terminal establishes a two-dimensional rectangular coordinate system according to the image shooting background, takes the lower left corner of the image shooting background as the coordinate origin, sets the X axis of the two-dimensional rectangular coordinate system in the horizontal direction of the image shooting background, and sets the Y axis of the two-dimensional rectangular coordinate system in the vertical direction of the image shooting background;

[0015] Based on the analysis management terminal, the standard gallium oxide substrate image is placed in a two-dimensional rectangular coordinate system to obtain the placement position of the gallium oxide substrate.

[0016] Preferably, the analysis management terminal takes an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtaining the gallium oxide substrate image to be identified specifically comprises the following steps:

[0017] The analysis management terminal adjusts the parameters of the shooting device according to the image shooting parameters and determines the correction of the shooting device;

[0018] The analysis management terminal places the gallium oxide substrate to be identified in the image shooting background according to the placement position of the gallium oxide substrate;

[0019] The analysis management terminal controls the correction shooting device to collect images of the gallium oxide substrate to be identified, and obtains the image of the gallium oxide substrate to be identified.

[0020] Preferably, the comparison and judgment processing of the standard gallium oxide substrate image and the gallium oxide substrate image to be identified based on the analysis management terminal to determine the type of the gallium oxide substrate to be identified specifically includes the following steps:

[0021] Based on the analysis management terminal, the standard gallium oxide substrate image and the gallium oxide substrate image to be identified are binarized to obtain the standard gallium oxide substrate grayscale image and the gallium oxide substrate grayscale image to be identified;

[0022] Based on the two-dimensional Fourier algorithm, the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image are respectively converted into frequency domains to obtain the frequency domain information of the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image;

[0023] Based on the analysis management terminal, the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0024] Based on the analysis management terminal, the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified are judged and processed to determine the type of the gallium oxide substrate to be identified;

[0025] The specific calculation formula for obtaining the frequency domain information of the standard gallium oxide substrate grayscale image is:

[0026]

[0027] Wherein, F(u, v) is the frequency domain information of the standard gallium oxide substrate grayscale image; u is the frequency of the standard gallium oxide substrate grayscale image in the horizontal direction of the frequency domain; v is the frequency of the standard gallium oxide substrate grayscale image in the vertical direction of the frequency domain; I(x, y) is the standard gallium oxide substrate grayscale image; M is the lateral size of the standard gallium oxide substrate grayscale image; N is the longitudinal size of the standard gallium oxide substrate grayscale image; x is the lateral coordinate of the standard gallium oxide substrate grayscale image; y is the longitudinal coordinate of the standard gallium oxide substrate grayscale image.

[0028] Preferably, the method of calculating and processing the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image based on the analysis management terminal to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image specifically comprises the following steps:

[0029] Based on the analysis management terminal, the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image;

[0030] The specific calculation formula for obtaining the amplitude spectrum of the standard gallium oxide substrate grayscale image is:

[0031]

[0032] Where |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate; R e (F(u, v)) is the real part of F(u, v); I m (F(u, v)) is the imaginary part of F(u, v);

[0033] Based on the analysis management terminal, the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image;

[0034] The specific calculation formula for obtaining the power spectrum of the standard gallium oxide substrate grayscale image is:

[0035] P(u,v)=|F(u,v)| 2 ;

[0036] Where, P(u, v) is the power spectrum of the grayscale image of the standard gallium oxide substrate; |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate;

[0037] Based on the analysis management terminal, the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0038] The specific calculation formula of the power spectral density of the standard gallium oxide substrate grayscale image is:

[0039]

[0040] In the formula, PSD ( u,v ) is the power spectral density of the grayscale image of the standard gallium oxide substrate; P ( u,v ) is the power spectrum of the grayscale image of a standard gallium oxide substrate.

[0041] Preferably, the method of judging and processing the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image based on the analysis management terminal to determine the type of the to-be-identified gallium oxide substrate specifically comprises the following steps:

[0042] Based on the analysis management terminal, the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the gallium oxide substrate grayscale image to be identified are judged and processed;

[0043] If the power spectrum density of the grayscale image of the gallium oxide substrate to be identified is greater than or less than the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate;

[0044] If the power spectrum density of the grayscale image of the gallium oxide substrate to be identified is equal to the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the gallium oxide substrate to be identified is a standard gallium oxide substrate.

[0045] Preferably, the step of analyzing and processing the type of the gallium oxide substrate to be identified based on the analysis management terminal to obtain the dislocation information of the gallium oxide substrate specifically comprises the following steps:

[0046] If the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate;

[0047] Based on the analysis management terminal, information extraction processing is performed on the database system to obtain a dislocation image of the gallium oxide substrate, wherein relevant parameters of the dislocation image of the gallium oxide substrate are consistent with relevant parameters of the standard gallium oxide substrate image;

[0048] Based on the analysis management terminal, the dislocation image of the gallium oxide substrate is binarized to obtain the dislocation grayscale image of the gallium oxide substrate;

[0049] Based on the two-dimensional Fourier algorithm, the dislocation grayscale image of the gallium oxide substrate is transformed into the frequency domain to obtain the frequency domain information of the dislocation grayscale image of the gallium oxide substrate;

[0050] Based on the analysis and management terminal, the frequency domain information of the dislocation grayscale image of the gallium oxide substrate is analyzed and processed to obtain the frequency spectrum characteristics of the dislocation of the gallium oxide substrate;

[0051] Based on the analysis and management terminal, the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image are analyzed and processed to obtain the gallium oxide substrate dislocation information.

[0052] Preferably, the method of analyzing and processing the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image based on the analysis management terminal to obtain the gallium oxide substrate dislocation information specifically includes the following steps:

[0053] Based on the analysis management terminal, the frequency domain information of the grayscale image of the standard gallium oxide substrate is analyzed and processed to obtain the frequency spectrum characteristics of the standard gallium oxide substrate;

[0054] Based on the analysis management terminal, the frequency domain information of the abnormal gallium oxide substrate grayscale image is analyzed and processed to obtain the frequency spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images;

[0055] Based on the analysis and management terminal, the spectral characteristics of the standard gallium oxide substrate, the spectral characteristics of the gallium oxide substrate dislocation and the spectral characteristics of multiple groups of abnormal gallium oxide substrate grayscale images are analyzed and processed to obtain the gallium oxide substrate dislocation information.

[0056] Preferably, the method of analyzing and processing the spectral characteristics of the standard gallium oxide substrate, the spectral characteristics of the gallium oxide substrate dislocation, and the spectral characteristics of multiple groups of abnormal gallium oxide substrate grayscale images based on the analysis management terminal to obtain the gallium oxide substrate dislocation information specifically includes the following steps:

[0057] The analysis management terminal compares and screens the frequency spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images through the frequency spectrum characteristics of the standard gallium oxide substrate to obtain multiple groups of abnormal frequency spectrum characteristics;

[0058] The analysis management terminal compares and screens multiple groups of abnormal spectrum features through the spectrum features of the gallium oxide substrate dislocation to obtain the gallium oxide substrate dislocation information.

[0059] Furthermore, a gallium oxide substrate dislocation automatic identification system is proposed, which is used to implement the gallium oxide substrate dislocation automatic identification method as described above, comprising:

[0060] An analysis and management terminal, which is used to control each module to perform frequency analysis, power spectrum density comparison, abnormal gallium oxide substrate determination and gallium oxide substrate dislocation identification on the gallium oxide substrate image to be identified, and is used to realize data transmission and information exchange between each module;

[0061] A database system, the database system being used to store standard gallium oxide substrate images and gallium oxide substrate dislocation images;

[0062] A photographing device, wherein the photographing device is used to collect images of the gallium oxide substrate to be identified, and obtain an image of the gallium oxide substrate to be identified;

[0063] A parameter adjustment module, wherein the parameter adjustment module adjusts the parameters of the shooting device according to the image shooting parameters to determine the correction of the shooting device;

[0064] A coordinate system construction module, wherein the coordinate system construction module is used to analyze the standard gallium oxide substrate image and determine the shooting position of the standard gallium oxide substrate;

[0065] An image graying module, the image graying module is used to gray-scale the standard gallium oxide substrate image, the gallium oxide substrate image to be identified, and the gallium oxide substrate dislocation image;

[0066] An image processing module, the image processing module is used to perform frequency domain conversion on a standard gallium oxide substrate grayscale image, a to-be-identified gallium oxide substrate grayscale image, and a gallium oxide substrate dislocation grayscale image;

[0067] A data calculation module, wherein the data calculation module calculates and processes the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image, respectively, to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0068] an abnormal gallium oxide substrate determination module, wherein the abnormal gallium oxide substrate determination module analyzes and determines the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified, and determines the abnormal gallium oxide substrate;

[0069] A gallium oxide substrate dislocation identification module is used to analyze and judge the abnormal gallium oxide substrate to determine the gallium oxide substrate dislocation information.

[0070] Compared with the prior art, the present invention provides a gallium oxide substrate dislocation automatic identification system and identification method, which has the following beneficial effects:

[0071] The present invention first analyzes the standard gallium oxide substrate image to determine the shooting position and shooting parameters of the gallium oxide substrate to be identified, so that the parameters of the gallium oxide substrate image to be identified and the standard gallium oxide substrate image are consistent, thereby improving the accuracy of dislocation identification of the gallium oxide substrate. Then, power spectral density analysis is performed on the standard gallium oxide substrate image and the gallium oxide substrate image to be identified in the frequency domain to determine whether the gallium oxide substrate to be identified is an abnormal gallium oxide substrate. Finally, the characteristics of the abnormal gallium oxide substrate in the frequency domain are screened by the characteristics of the gallium oxide substrate dislocation image in the frequency domain to determine the dislocation information of the gallium oxide substrate. The above identification method not only reduces the work intensity of the staff, but also improves the identification accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0072] Figure 1 A schematic flow chart of steps S100-S400 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0073] Figure 2 This is a flow chart of steps S101-S104 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0074] Figure 3 This is a flow chart of steps S201-S203 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0075] Figure 4 A schematic flow chart of steps S301-S304 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0076] Figure 5 A schematic flow chart of steps S3031-S3033 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0077] Figure 6 This is a flow chart of steps S3041-S3043 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0078] Figure 7 A schematic flow chart of steps S401-S406 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0079] Figure 8 A schematic flow chart of steps S4061-S4063 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0080] Fig. 9 This is a flow chart of steps S40631-S40632 in a method for automatically identifying dislocations in a gallium oxide substrate proposed by the present invention;

[0081] Fig.10 This is a structural block diagram of an automatic dislocation identification system for gallium oxide substrates proposed by the present invention. DETAILED DESCRIPTION

[0082] The following description is used to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are only examples, and those skilled in the art may think of other obvious variations.

[0083] Reference Figure 1 As shown, a method for automatically identifying dislocations in a gallium oxide substrate comprises:

[0084] S100, obtaining a standard gallium oxide substrate image, and analyzing and processing the standard gallium oxide substrate image based on the analysis management terminal to obtain relevant parameters of the standard gallium oxide substrate image, wherein the relevant parameters of the standard gallium oxide substrate image include image shooting background, image shooting parameters, and gallium oxide substrate placement position;

[0085] S200, the analysis management terminal captures an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtains the gallium oxide substrate image to be identified;

[0086] S300, based on the analysis management terminal, performing comparison and judgment processing on the standard gallium oxide substrate image and the image of the gallium oxide substrate to be identified, and determining the type of the gallium oxide substrate to be identified, wherein the type of the gallium oxide substrate to be identified is any one of a standard gallium oxide substrate and an abnormal gallium oxide substrate;

[0087] S400, based on the analysis management terminal, analyzing and processing the type of the gallium oxide substrate to be identified, and obtaining dislocation information of the gallium oxide substrate;

[0088] It can be understood by those skilled in the art that semiconductors have the characteristic of miniaturization, and gallium oxide substrates designed with gallium oxide as the raw material of semiconductors also have the characteristic of miniaturization. When dislocation of gallium oxide substrates is performed manually, workers need to maintain a high degree of concentration at all times, and maintaining a high degree of concentration at all times will make the workers feel tired. When the workers are in a tired state, the misjudgment rate will increase. Therefore, in order to reduce the work intensity and misjudgment rate of the workers, the dislocation of the gallium oxide substrate is identified by the difference between the gallium oxide substrate image to be identified and the standard gallium oxide substrate image in the frequency domain.

[0089] Reference Figure 2 As shown, obtaining a standard gallium oxide substrate image, analyzing and processing the standard gallium oxide substrate image based on the analysis management terminal, and obtaining relevant parameters of the standard gallium oxide substrate image specifically include the following steps:

[0090] S101, based on the analysis management terminal, performing data retrieval on the database system to obtain a standard gallium oxide substrate image;

[0091] S102, analyzing and processing the standard gallium oxide substrate image based on the analysis management terminal to obtain the image shooting background and image shooting parameters;

[0092] S103, the analysis management terminal establishes a two-dimensional rectangular coordinate system according to the image shooting background, takes the lower left corner of the image shooting background as the coordinate origin, sets the X axis of the two-dimensional rectangular coordinate system in the horizontal direction of the image shooting background, and sets the Y axis of the two-dimensional rectangular coordinate system in the vertical direction of the image shooting background;

[0093] S104 . Based on the analysis management terminal, the standard gallium oxide substrate image is placed in a two-dimensional rectangular coordinate system to obtain a placement position of the gallium oxide substrate.

[0094] Reference Figure 3 As shown, the analysis management terminal takes an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtaining the gallium oxide substrate image to be identified specifically includes the following steps:

[0095] S201, the analysis management terminal adjusts the parameters of the shooting device according to the image shooting parameters, and determines to calibrate the shooting device;

[0096] S202, the analysis management terminal places the gallium oxide substrate to be identified in the image shooting background according to the placement position of the gallium oxide substrate;

[0097] S203, the analysis management terminal controls the correction shooting device to collect images of the gallium oxide substrate to be identified, and obtains the image of the gallium oxide substrate to be identified;

[0098] In this embodiment, in order to improve the recognition accuracy, the image of the gallium oxide substrate to be identified is captured with the same parameters as the standard gallium oxide substrate, so that the image of the gallium oxide substrate to be identified and the image of the standard gallium oxide substrate have the same equipment parameters and shooting positions, making the subsequent analysis process more convenient and faster, without the need to adjust the two images, and shortening the recognition time of the gallium oxide substrate dislocation. It is worth noting that when the two images have different parameters, comparative analysis thereof will produce a large error.

[0099] Reference Figure 4 As shown, based on the analysis management terminal, the standard gallium oxide substrate image and the gallium oxide substrate image to be identified are compared and judged to determine the type of the gallium oxide substrate to be identified, which specifically includes the following steps:

[0100] S301, based on the analysis management terminal, binarizing the standard gallium oxide substrate image and the gallium oxide substrate image to be identified respectively to obtain the standard gallium oxide substrate grayscale image and the gallium oxide substrate grayscale image to be identified;

[0101] S302, based on a two-dimensional Fourier algorithm, performing frequency domain conversion on the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image, respectively, to obtain frequency domain information of the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image;

[0102] S303, based on the analysis management terminal, respectively calculating and processing the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0103] S304, based on the analysis management terminal, judging and processing the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified, and determining the type of the gallium oxide substrate to be identified;

[0104] The specific calculation formula for obtaining the frequency domain information of the standard gallium oxide substrate grayscale image is:

[0105]

[0106] In the formula, F ( u,v ) is the frequency domain information of the grayscale image of the standard gallium oxide substrate; u is the frequency of the grayscale image of the standard gallium oxide substrate in the horizontal direction of the frequency domain; v is the frequency of the grayscale image of the standard gallium oxide substrate in the vertical direction of the frequency domain; I ( x,y )is the grayscale image of the standard gallium oxide substrate; M is the lateral size of the grayscale image of the standard gallium oxide substrate; N is the longitudinal size of the grayscale image of the standard gallium oxide substrate; x is the lateral coordinate of the grayscale image of the standard gallium oxide substrate; y is the longitudinal coordinate of the grayscale image of the standard gallium oxide substrate;

[0107] In this embodiment, when the shooting positions, shooting parameters and shooting backgrounds of the two images are the same, if the two images are exactly the same, the power spectrum density of their grayscale images is the same. Therefore, the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified are judged to determine whether the gallium oxide substrate to be identified is an abnormal gallium oxide substrate.

[0108] Reference Figure 5 As shown, based on the analysis management terminal, the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image, which specifically includes the following steps:

[0109] S3031, based on the analysis management terminal, respectively calculating and processing the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image to obtain the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image;

[0110] The specific calculation formula for obtaining the amplitude spectrum of the standard gallium oxide substrate grayscale image is:

[0111]

[0112] Where |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate; R e (F(u, v)) is the real part of F(u, v); I m (F(u, v)) is the imaginary part of F(u, v);

[0113] S3032, based on the analysis management terminal, respectively calculating and processing the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image to obtain the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image;

[0114] The specific calculation formula for obtaining the power spectrum of the standard gallium oxide substrate grayscale image is:

[0115] P(u,v)=|F(u,v)| 2 ;

[0116] Where, P(u, v) is the power spectrum of the grayscale image of the standard gallium oxide substrate; |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate;

[0117] S3033, based on the analysis management terminal, respectively calculating and processing the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0118] The specific calculation formula of the power spectral density of the standard gallium oxide substrate grayscale image is:

[0119]

[0120] Where, PSD(u, v) is the power spectral density of the grayscale image of the standard gallium oxide substrate; P(u, v) is the power spectrum of the grayscale image of the standard gallium oxide substrate;

[0121] In this embodiment, when the two images have the same parameters, if the two images are completely the same, the energy of each frequency component thereof should be the same, so the abnormal gallium oxide substrate is determined by judging whether the power spectrum densities of the two grayscale images are the same.

[0122] Reference Figure 6 As shown, based on the analysis management terminal, the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image are judged and processed to determine the type of the to-be-identified gallium oxide substrate, specifically including the following steps:

[0123] S3041, based on the analysis management terminal, judging and processing the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0124] S3042: If the power spectrum density of the grayscale image of the gallium oxide substrate to be identified is greater than or less than the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate;

[0125] S3043: If the power spectrum density of the grayscale image of the to-be-identified gallium oxide substrate is equal to the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the to-be-identified gallium oxide substrate is a standard gallium oxide substrate.

[0126] Reference Figure 7 As shown, based on the analysis management terminal, the type of the gallium oxide substrate to be identified is analyzed and processed, and the dislocation information of the gallium oxide substrate is obtained, which specifically includes the following steps:

[0127] S401, if the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate;

[0128] S402, based on the analysis management terminal, performing information extraction processing on the database system to obtain a dislocation image of the gallium oxide substrate, wherein relevant parameters of the dislocation image of the gallium oxide substrate are consistent with relevant parameters of a standard gallium oxide substrate image;

[0129] S403, based on the analysis management terminal, binarizing the gallium oxide substrate dislocation image to obtain a gallium oxide substrate dislocation grayscale image;

[0130] S404, performing frequency domain conversion on the dislocation grayscale image of the gallium oxide substrate based on a two-dimensional Fourier algorithm to obtain frequency domain information of the dislocation grayscale image of the gallium oxide substrate;

[0131] S405, analyzing and processing the frequency domain information of the dislocation grayscale image of the gallium oxide substrate based on the analysis management terminal to obtain the frequency spectrum characteristics of the dislocation of the gallium oxide substrate;

[0132] S406: Based on the analysis management terminal, the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image are analyzed and processed to obtain the gallium oxide substrate dislocation information.

[0133] Reference Figure 8 As shown, based on the analysis and management terminal, the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image are analyzed and processed, and the gallium oxide substrate dislocation information is obtained, which specifically includes the following steps:

[0134] S4061. Analyze and process the frequency domain information of the grayscale image of the standard gallium oxide substrate based on the analysis management terminal to obtain the frequency spectrum characteristics of the standard gallium oxide substrate;

[0135] S4062, based on the analysis management terminal, analyzing and processing the frequency domain information of the abnormal gallium oxide substrate grayscale image to obtain frequency spectrum features of multiple groups of abnormal gallium oxide substrate grayscale images;

[0136] S4063. Based on the analysis management terminal, the frequency spectrum characteristics of the standard gallium oxide substrate, the frequency spectrum characteristics of the gallium oxide substrate dislocation, and the frequency spectrum characteristics of the plurality of groups of abnormal gallium oxide substrate grayscale images are analyzed and processed to obtain the gallium oxide substrate dislocation information.

[0137] Reference Fig. 9 As shown, based on the analysis management terminal, the spectrum characteristics of the standard gallium oxide substrate, the spectrum characteristics of the gallium oxide substrate dislocation and the spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images are analyzed and processed to obtain the gallium oxide substrate dislocation information, which specifically includes the following steps:

[0138] S40631. The analysis management terminal compares and screens the frequency spectrum features of multiple groups of abnormal gallium oxide substrate grayscale images through the frequency spectrum features of the standard gallium oxide substrate to obtain multiple groups of abnormal frequency spectrum features;

[0139] S40632, the analysis management terminal compares and screens multiple groups of abnormal spectrum features through spectrum features of gallium oxide substrate dislocations to obtain gallium oxide substrate dislocation information;

[0140] In this embodiment, the abnormal gallium oxide substrate may have dislocations, or may have surface abnormalities, such as depressions or protrusions or foreign matter. However, the dislocations of the gallium oxide substrate have unique spectral characteristics in the frequency domain. Therefore, the abnormal gallium oxide substrate is identified by the spectral characteristics of the dislocations of the gallium oxide substrate in the frequency domain, and the dislocation information in the abnormal gallium oxide substrate is determined.

[0141] Reference Fig.10 As shown, a gallium oxide substrate dislocation automatic identification system is used to implement the above-mentioned gallium oxide substrate dislocation automatic identification method, comprising:

[0142] An analysis and management terminal, which is used to control each module to perform frequency analysis, power spectrum density comparison, abnormal gallium oxide substrate determination and gallium oxide substrate dislocation identification on the gallium oxide substrate image to be identified, and is used to realize data transmission and information exchange between each module;

[0143] A database system, the database system being used to store standard gallium oxide substrate images and gallium oxide substrate dislocation images;

[0144] A photographing device, wherein the photographing device is used to collect images of the gallium oxide substrate to be identified, and obtain an image of the gallium oxide substrate to be identified;

[0145] A parameter adjustment module, wherein the parameter adjustment module adjusts the parameters of the shooting device according to the image shooting parameters to determine the correction of the shooting device;

[0146] A coordinate system construction module, wherein the coordinate system construction module is used to analyze the standard gallium oxide substrate image and determine the shooting position of the standard gallium oxide substrate;

[0147] An image graying module, the image graying module is used to gray-scale the standard gallium oxide substrate image, the gallium oxide substrate image to be identified, and the gallium oxide substrate dislocation image;

[0148] An image processing module, the image processing module is used to perform frequency domain conversion on a standard gallium oxide substrate grayscale image, a to-be-identified gallium oxide substrate grayscale image, and a gallium oxide substrate dislocation grayscale image;

[0149] A data calculation module, wherein the data calculation module calculates and processes the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image, respectively, to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image;

[0150] an abnormal gallium oxide substrate determination module, wherein the abnormal gallium oxide substrate determination module analyzes and determines the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified, and determines the abnormal gallium oxide substrate;

[0151] A gallium oxide substrate dislocation identification module is used to analyze and judge the abnormal gallium oxide substrate to determine the gallium oxide substrate dislocation information.

[0152] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions only describe the principles of the present invention. The present invention may be subject to various changes and improvements without departing from the spirit and scope of the present invention. These changes and improvements fall within the scope of the present invention. The scope of protection claimed by the present invention is defined by the attached claims and their equivalents.

Claims

1. A method for automatically identifying dislocations in a gallium oxide substrate, characterized in that: include: Acquire a standard gallium oxide substrate image, and analyze and process the standard gallium oxide substrate image based on the analysis management terminal to acquire relevant parameters of the standard gallium oxide substrate image, wherein the relevant parameters of the standard gallium oxide substrate image include image shooting background, image shooting parameters, and placement position of the gallium oxide substrate; The analysis management terminal takes an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtains the gallium oxide substrate image to be identified; Based on the analysis management terminal, a comparison and judgment process is performed on the standard gallium oxide substrate image and the image of the gallium oxide substrate to be identified to determine the type of the gallium oxide substrate to be identified, wherein the type of the gallium oxide substrate to be identified is any one of a standard gallium oxide substrate and an abnormal gallium oxide substrate; Based on the analysis management terminal, the type of the gallium oxide substrate to be identified is analyzed and processed to obtain the dislocation information of the gallium oxide substrate.

2. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 1, characterized in that: The step of acquiring the standard gallium oxide substrate image, analyzing and processing the standard gallium oxide substrate image based on the analysis management terminal, and acquiring relevant parameters of the standard gallium oxide substrate image specifically includes the following steps: Based on the analysis management terminal, data is retrieved from the database system to obtain the standard gallium oxide substrate image; Based on the analysis management terminal, the standard gallium oxide substrate image is analyzed and processed to obtain the image shooting background and image shooting parameters; The analysis management terminal establishes a two-dimensional rectangular coordinate system according to the image shooting background, takes the lower left corner of the image shooting background as the coordinate origin, sets the X axis of the two-dimensional rectangular coordinate system in the horizontal direction of the image shooting background, and sets the Y axis of the two-dimensional rectangular coordinate system in the vertical direction of the image shooting background; Based on the analysis management terminal, the standard gallium oxide substrate image is placed in a two-dimensional rectangular coordinate system to obtain the placement position of the gallium oxide substrate.

3. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 1, characterized in that: The analysis management terminal takes an image of the gallium oxide substrate to be identified according to relevant parameters of the standard gallium oxide substrate image, and obtaining the gallium oxide substrate image to be identified specifically includes the following steps: The analysis management terminal adjusts the parameters of the shooting device according to the image shooting parameters and determines the correction of the shooting device; The analysis management terminal places the gallium oxide substrate to be identified in the image shooting background according to the placement position of the gallium oxide substrate; The analysis and management terminal controls the correction and shooting equipment to collect images of the gallium oxide substrate to be identified, and obtains the image of the gallium oxide substrate to be identified.

4. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 1, characterized in that: The method of comparing and judging the standard gallium oxide substrate image and the gallium oxide substrate image to be identified based on the analysis management terminal to determine the type of the gallium oxide substrate to be identified specifically includes the following steps: Based on the analysis management terminal, the standard gallium oxide substrate image and the gallium oxide substrate image to be identified are binarized to obtain the standard gallium oxide substrate grayscale image and the gallium oxide substrate grayscale image to be identified; Based on the two-dimensional Fourier algorithm, the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image are respectively converted into frequency domains to obtain the frequency domain information of the standard gallium oxide substrate grayscale image and the to-be-identified gallium oxide substrate grayscale image; Based on the analysis management terminal, the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image; Based on the analysis management terminal, the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified are judged and processed to determine the type of the gallium oxide substrate to be identified; The specific calculation formula for obtaining the frequency domain information of the standard gallium oxide substrate grayscale image is: In the formula, F ( u,v ) is the frequency domain information of the grayscale image of the standard gallium oxide substrate; u is the frequency of the standard gallium oxide substrate grayscale image in the horizontal direction of the frequency domain; v is the frequency of the standard gallium oxide substrate grayscale image in the vertical direction of the frequency domain; I ( x,y ) is the grayscale image of the standard gallium oxide substrate; M is the lateral size of the grayscale image of the standard gallium oxide substrate; N is the longitudinal size of the grayscale image of the standard gallium oxide substrate; x is the lateral coordinate of the grayscale image of the standard gallium oxide substrate; y is the longitudinal coordinate of the grayscale image of the standard gallium oxide substrate.

5. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 4, characterized in that: The method of calculating and processing the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image based on the analysis management terminal to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image specifically includes the following steps: Based on the analysis management terminal, the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image; The specific calculation formula for obtaining the amplitude spectrum of the standard gallium oxide substrate grayscale image is: Where |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate; R e (F(u, v)) is the real part of F(u, v); I m (F(u, v)) is the imaginary part of F(u, v); Based on the analysis management terminal, the amplitude spectrum of the standard gallium oxide substrate grayscale image and the amplitude spectrum of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image; The specific calculation formula for obtaining the power spectrum of the standard gallium oxide substrate grayscale image is: P(u,v)=|F(u,v)| 2 ; Where, P(u, v) is the power spectrum of the grayscale image of the standard gallium oxide substrate; |F(u, v)| is the amplitude spectrum of the grayscale image of the standard gallium oxide substrate; Based on the analysis management terminal, the power spectrum of the standard gallium oxide substrate grayscale image and the power spectrum of the to-be-identified gallium oxide substrate grayscale image are respectively calculated and processed to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image; The specific calculation formula of the power spectral density of the standard gallium oxide substrate grayscale image is: In the formula, PSD ( u,v ) is the power spectral density of the grayscale image of the standard gallium oxide substrate; P ( u,v ) is the power spectrum of the grayscale image of a standard gallium oxide substrate.

6. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 4, characterized in that: The method of judging and processing the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image based on the analysis management terminal to determine the type of the to-be-identified gallium oxide substrate specifically includes the following steps: Based on the analysis management terminal, the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the gallium oxide substrate grayscale image to be identified are judged and processed; If the power spectrum density of the grayscale image of the gallium oxide substrate to be identified is greater than or less than the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate; If the power spectrum density of the grayscale image of the gallium oxide substrate to be identified is equal to the power spectrum density of the grayscale image of the standard gallium oxide substrate, the type of the gallium oxide substrate to be identified is a standard gallium oxide substrate.

7. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 1, characterized in that: The method of analyzing and processing the type of the gallium oxide substrate to be identified based on the analysis management terminal and obtaining the dislocation information of the gallium oxide substrate specifically includes the following steps: If the type of the gallium oxide substrate to be identified is an abnormal gallium oxide substrate; Based on the analysis management terminal, information extraction processing is performed on the database system to obtain a dislocation image of the gallium oxide substrate, wherein relevant parameters of the dislocation image of the gallium oxide substrate are consistent with relevant parameters of the standard gallium oxide substrate image; Based on the analysis management terminal, the dislocation image of the gallium oxide substrate is binarized to obtain the dislocation grayscale image of the gallium oxide substrate; Based on the two-dimensional Fourier algorithm, the dislocation grayscale image of the gallium oxide substrate is transformed into the frequency domain to obtain the frequency domain information of the dislocation grayscale image of the gallium oxide substrate; Based on the analysis and management terminal, the frequency domain information of the dislocation grayscale image of the gallium oxide substrate is analyzed and processed to obtain the frequency spectrum characteristics of the dislocation of the gallium oxide substrate; Based on the analysis and management terminal, the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image are analyzed and processed to obtain the gallium oxide substrate dislocation information.

8. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 7, characterized in that: The method of analyzing and processing the frequency spectrum characteristics of the gallium oxide substrate dislocation and the frequency domain information of the abnormal gallium oxide substrate grayscale image based on the analysis management terminal to obtain the gallium oxide substrate dislocation information specifically includes the following steps: Based on the analysis management terminal, the frequency domain information of the grayscale image of the standard gallium oxide substrate is analyzed and processed to obtain the frequency spectrum characteristics of the standard gallium oxide substrate; Based on the analysis management terminal, the frequency domain information of the abnormal gallium oxide substrate grayscale image is analyzed and processed to obtain the frequency spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images; Based on the analysis and management terminal, the spectral characteristics of the standard gallium oxide substrate, the spectral characteristics of the gallium oxide substrate dislocation and the spectral characteristics of multiple groups of abnormal gallium oxide substrate grayscale images are analyzed and processed to obtain the gallium oxide substrate dislocation information.

9. The method for automatically identifying dislocations in a gallium oxide substrate according to claim 8, characterized in that: The method of analyzing and processing the frequency spectrum characteristics of the standard gallium oxide substrate, the frequency spectrum characteristics of the gallium oxide substrate dislocation, and the frequency spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images based on the analysis management terminal to obtain the gallium oxide substrate dislocation information specifically includes the following steps: The analysis management terminal compares and screens the frequency spectrum characteristics of multiple groups of abnormal gallium oxide substrate grayscale images through the frequency spectrum characteristics of the standard gallium oxide substrate to obtain multiple groups of abnormal frequency spectrum characteristics; The analysis management terminal compares and screens multiple groups of abnormal spectrum features through the spectrum features of the gallium oxide substrate dislocation to obtain the gallium oxide substrate dislocation information.

10. A gallium oxide substrate dislocation automatic identification system, used to implement a gallium oxide substrate dislocation automatic identification method according to any one of claims 1 to 9, characterized in that: include: An analysis and management terminal, which is used to control each module to perform frequency analysis, power spectrum density comparison, abnormal gallium oxide substrate determination and gallium oxide substrate dislocation identification on the gallium oxide substrate image to be identified, and is used to realize data transmission and information exchange between each module; A database system, the database system being used to store standard gallium oxide substrate images and gallium oxide substrate dislocation images; A photographing device, wherein the photographing device is used to collect images of the gallium oxide substrate to be identified, and obtain an image of the gallium oxide substrate to be identified; A parameter adjustment module, wherein the parameter adjustment module adjusts the parameters of the shooting device according to the image shooting parameters to determine the correction of the shooting device; A coordinate system construction module, wherein the coordinate system construction module is used to analyze the standard gallium oxide substrate image and determine the shooting position of the standard gallium oxide substrate; An image graying module, the image graying module is used to gray-scale the standard gallium oxide substrate image, the gallium oxide substrate image to be identified, and the gallium oxide substrate dislocation image; An image processing module, the image processing module is used to perform frequency domain conversion on a standard gallium oxide substrate grayscale image, a to-be-identified gallium oxide substrate grayscale image, and a gallium oxide substrate dislocation grayscale image; A data calculation module, wherein the data calculation module calculates and processes the frequency domain information of the standard gallium oxide substrate grayscale image and the frequency domain information of the to-be-identified gallium oxide substrate grayscale image, respectively, to obtain the power spectrum density of the standard gallium oxide substrate grayscale image and the power spectrum density of the to-be-identified gallium oxide substrate grayscale image; an abnormal gallium oxide substrate determination module, wherein the abnormal gallium oxide substrate determination module analyzes and determines the power spectrum density of the grayscale image of the standard gallium oxide substrate and the power spectrum density of the grayscale image of the gallium oxide substrate to be identified, and determines the abnormal gallium oxide substrate; A gallium oxide substrate dislocation identification module is used to analyze and judge the abnormal gallium oxide substrate to determine the gallium oxide substrate dislocation information.

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