A heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD)

Abstract

The present invention relates to the technical field of electron beam preparation, and discloses a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD). The heating device includes a fixing frame, a heating chamber is fixedly installed at the top of the fixing frame, an air extraction pump is fixedly installed at the top of the heating chamber, an air extraction pipe is arranged outside the air extraction pump, the other end of the air extraction pipe is fixedly installed with a sealing block, and a transfer box is fixedly installed outside the air extraction pump. For this heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), when the second screw rotates, since the fixing plate is threadedly connected to the second screw and the slider is slidably connected to the slide rail, the rotation of the fixing plate can be restricted, so that the fixing plate moves along the axial direction of the second screw. When the crucible is not placed, it is convenient to adjust out the crucible, so that the crucible is far away from the heating component. At the same time, electric control can also be adopted to realize the front and back positions of the crucible in the heating chamber, so as to better control the heating process.

Description

Technical Field

[0001] The present invention relates to the technical field of electron beam preparation, and specifically to a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD). Background Art

[0002] With the rapid development of modern aerospace, energy and other fields, the performance requirements for high-temperature components are getting higher and higher. As an important high-temperature protection technology, thermal barrier coatings can effectively increase the working temperature of high-temperature components, reduce thermal stress and extend service life. Electron beam physical vapor deposition (EB-PVD) is an advanced thermal barrier coating preparation technology, which has the advantages of high coating quality, good bonding strength and the ability to prepare coatings with complex shapes;

[0003] The EB-PVD process needs to be carried out within a specific temperature range to ensure the quality and performance of the coating. In order to ensure its quality and performance, a heating device is often used. The heating device can precisely control the temperature of the deposition area to meet the requirements of coating growth. A suitable temperature can promote the evaporation and deposition of the coating material, improve the density and bonding strength of the coating. At the same time, it can also control the crystallinity and microstructure of the coating, thereby improving the thermophysical properties of the coating.

[0004] In the existing technology, although heating for electron beam physical vapor deposition can be achieved, during the heating process, it is not convenient to adjust the front-back position of the crucible in the heating chamber before or after processing. It is not only not convenient to quickly take out the crucible, but also not easy to take out the crucible due to the obstruction of the heating components. Moreover, in the current technology, a clamping component is not designed, and the crucible is prone to move or shake during the heating process, unable to ensure the stable progress of the thermal barrier coating preparation process. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), which can effectively solve the problems in the existing technology that it is not convenient to adjust the front-back position of the crucible in the heating chamber before or after processing, not only not convenient to quickly take out the crucible, but also not easy to take out the crucible due to the obstruction of the heating components, and in the current technology, a clamping component is not designed, and the crucible is prone to move or shake during the heating process, unable to ensure the stable progress of the thermal barrier coating preparation process.

[0006] The technical solution adopted by the present invention is: a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition, including a fixing frame, on the top of which a heating chamber is fixedly installed, on the top of which an air extraction pump is fixedly installed, outside which an air extraction pipe is arranged, the other end of which is fixedly installed with a sealing block, outside which a transfer box is fixedly installed, outside which an exhaust pipe is arranged, on the front side of which a hinge is fixedly installed, the other end of which is fixedly installed with a rotating door, on the front side of which a handle is fixedly installed, outside which a temperature monitor is fixedly installed, outside which a monitoring probe is fixedly installed, inside which a moving component is fixedly installed, inside which a crucible is arranged, and inside which a heating component is fixedly installed, on the top of which a support column is fixedly installed, and on the top of which a control switch is fixedly installed;

[0007] The moving component includes a slide rail and a second screw rod, on the top of which a slider is slidably connected, on the top of which a fixing plate is fixedly installed, on the top of which a baffle is fixedly installed, on the outside of which a first screw rod is threadedly connected, the other end of which is fixedly installed with a first rotating wheel, on the outside of which a sliding column is fixedly installed, on the outside of which a limiting block is slidably connected, on the outside of which a second rotating wheel is fixedly installed, and on the top of which a clamping groove is opened;

[0008] The heating component includes a mounting plate, on the top of which a fixing seat is fixedly installed, on the top of which a connecting block is fixedly installed, on the outside of which a rotating column is rotatably installed, on the top of which an evaporation electron gun is fixedly installed, and at the bottom of which a heating head is fixedly installed.

[0009] Preferably, the air extraction pump, the air extraction pipe, the sealing block, the transfer box and the exhaust pipe are communicated, the other end of the sealing block is fixedly installed with the heating chamber, and the sealing block is made of rubber material.

[0010] Through the above technical solution, through the cooperation of the air extraction pump, the air extraction pipe, the sealing block, the transfer box and the exhaust pipe, during use, the air extraction pump extracts the air in the heating chamber through the air extraction pipe and the sealing block, and discharges it through the transfer box and the exhaust pipe, which can create a high-vacuum environment in the heating chamber, is beneficial to the process of electron beam physical vapor deposition, and avoids the adverse effects of impurities in the air on the quality of the thermal barrier coating.

[0011] Preferably, the heating chamber and the rotating door are made of heat-insulating materials, the rotating door is rotatably installed with the heating chamber through a hinge, and the control switch, the air extraction pump, the heating component and the temperature monitor are electrically connected.

[0012] Through the above technical solution, with the design of the rotating door, the rotating door is rotatably installed on the heating chamber through hinges. Opening the rotating door allows components such as crucibles to be placed or removed. Moreover, the heating chamber and the rotating door are made of heat-insulating materials, which can effectively reduce heat dissipation, lower energy consumption, facilitate operation, improve work efficiency, and also extend the service life of the heating chamber and the rotating door, avoiding damage to the heating chamber and the rotating door due to excessive internal temperature. Additionally, the on-off of the air extraction pump, heating component, and temperature monitor can be controlled through a control switch.

[0013] Preferably, there are two identical temperature monitors and monitoring probes. The two temperature monitors and monitoring probes are respectively located on both sides of the heating chamber, and both monitoring probes penetrate the heating chamber and extend to its inner side.

[0014] Through the above technical solution, the temperature in the heating chamber is monitored in real time by the temperature monitor through the monitoring probe. The two temperature monitors and monitoring probes are respectively located on both sides of the heating chamber, which can more accurately monitor the temperature, provide data support for precisely controlling the heating process, and ensure the stable quality of the thermal barrier coating.

[0015] Preferably, the slide rail is slidably connected to the slider, the fixing plate is threadedly connected to the second screw, the length of the slider is shorter than that of the slide rail, the other end of the second screw is rotatably connected to the heating chamber, and the outer side of the slide rail is fixedly installed on the inner wall of the heating chamber.

[0016] Through the above technical solution, when the second screw rotates, since the fixing plate is threadedly connected to the second screw and the slider is slidably connected to the slide rail, the rotation of the fixing plate can be restricted, so that the fixing plate moves along the axial direction of the second screw. When the crucible is not placed, it is convenient to adjust the crucible to move the crucible away from the heating component. At the same time, electric control can also be adopted to realize the front-back position of the crucible in the heating chamber, so as to better control the heating process.

[0017] Preferably, the limiting block is adapted to the sliding column, the limiting block is threadedly connected to the second screw, the clamping groove is adapted to the crucible, and the cross-section of the clamping groove is in a "C" - shaped structure.

[0018] Through the above technical solution, when the second screw rotates, since the limiting block is threadedly connected to the second screw, the limiting block will move along the axial direction of the second screw. At the same time, the limiting block is adapted to the sliding column, and the sliding column plays a guiding role to ensure the stability of the movement of the limiting block. When the two limiting blocks approach each other, the "C" - shaped clamping groove will gradually clamp the crucible, which can firmly fix the crucible, prevent the crucible from moving or shaking during the heating process, thereby ensuring the stable progress of the preparation process of the thermal barrier coating. The adapted clamping groove and crucible can fit better, improve the clamping effect, and further enhance the reliability of the device.

[0019] Preferably, there are two identical sets of the first screw, the first rotating wheel, the sliding column and the limiting block, and the two sets of the first screw, the first rotating wheel, the sliding column and the limiting block are symmetrically distributed about the center line of the fixing plate.

[0020] Through the above technical solution, through the design of the two first screws, the first rotating wheels, the sliding columns and the limiting blocks, when clamping the crucible, the force can be applied simultaneously from both sides, so that the clamping force is more evenly distributed on the crucible, ensuring that the crucible is firmly fixed in the card slot of the limiting block, effectively preventing the crucible from shifting or shaking due to uneven force during the heating process, ensuring the stability and reliability of the thermal barrier coating preparation process, and the symmetrical distribution makes the operation more balanced and stable. Whether adjusting the clamping degree or performing other operations, the force and direction can be better controlled, improving the operation accuracy and efficiency.

[0021] Preferably, the mounting plate is located inside the heating chamber. The mounting plate and the fixed seat are fixedly installed by bolts. The evaporation electron gun is rotatably installed through the rotating column and the connecting block. The heating head is located on top of the limiting block.

[0022] Through the above technical solution, since the mounting plate is located inside the heating chamber, the evaporation electron gun can be closer to the crucible to be heated, reducing heat loss and improving heating efficiency. And through the bolt fixed installation, this connection method is firm and reliable, ensuring that the position of the evaporation electron gun is stable during the heating process and will not shift due to vibration or other external forces, contributing to maintaining the uniformity and stability of heating. And the evaporation electron gun is rotatably installed through the rotating column and the connecting block, enabling the heating head to flexibly adjust the angle. When not in use, the evaporation electron gun can be rotated to play an anti-fooling role.

[0023] Preferably, there are four identical sets of the fixed seat, the evaporation electron gun, the rotating column and the connecting block, and the four sets of the fixed seat, the evaporation electron gun, the rotating column and the connecting block are equidistantly distributed.

[0024] Through the above technical solution, through the design of the four fixed seats, the evaporation electron guns, the rotating columns and the connecting blocks, a more powerful heating power can be provided, accelerating the evaporation speed of the materials in the crucible and improving the preparation efficiency of the thermal barrier coating. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns heat the crucible from different angles, ensuring that all parts of the materials in the crucible can receive uniform heat, reducing the adverse effects caused by temperature differences, and improving the density and uniformity of the thermal barrier coating and enhancing its performance.

[0025] Compared with the prior art, the present invention provides a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), having the following beneficial effects:

[0026] 1. The heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD). When the second screw rotates, since the fixing plate is threadedly connected to the second screw and the slider is slidably connected to the slide rail, the rotation of the fixing plate can be restricted, so that the fixing plate moves along the axial direction of the second screw. When the crucible is not placed, it is convenient to adjust out the crucible, making the crucible away from the heating component. At the same time, it can also be electrically controlled, so as to realize the front and back positions of the crucible in the heating chamber, in order to better control the heating process;

[0027] 2. The heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD). When the second screw is rotated, since the limiting block is threadedly connected to the second screw, the limiting block will move along the axial direction of the second screw. At the same time, the limiting block is adapted to the sliding column, and the sliding column plays a guiding role to ensure the stability of the movement of the limiting block. When the two limiting blocks approach each other, the "C"-shaped clamping groove will gradually clamp the crucible, which can firmly fix the crucible, prevent the crucible from moving or shaking during the heating process, so as to ensure the stable progress of the preparation process of the thermal barrier coating. The adapted clamping groove and crucible can fit better, improve the clamping effect, and further enhance the reliability of the device;

[0028] 3. The heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD). Through the design of the fixed seat, evaporation electron gun, rotating column and connecting block, it can provide a more powerful heating power, accelerate the evaporation speed of the materials in the crucible, and improve the preparation efficiency of the thermal barrier coating. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns heat the crucible from different angles, which can ensure that all parts of the materials in the crucible can receive uniform heat, reduce the adverse effects brought by temperature differences, and can improve the density and uniformity of the thermal barrier coating and enhance its performance;

[0029] 4. The heating device for preparing thermal barrier coatings by electron beam physical vapor deposition (EB-PVD). Through the design of the rotating door, the rotating door is rotatably installed in the heating chamber through hinges. Opening the rotating door can put in or take out components such as the crucible. And the heating chamber and the rotating door are made of heat-insulating materials, which can effectively reduce heat dissipation, reduce energy consumption, be convenient for operation, improve work efficiency, and can also improve the service life of the heating chamber and the rotating door, avoiding damage to the heating chamber and the rotating door easily caused by too high internal temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 is a schematic three-dimensional structure diagram of the present invention;

[0031] Figure 2 is a schematic diagram of the rotating structure of the rotating door of the present invention;

[0032] Figure 3 is a schematic diagram of the split structure of the temperature monitor of the present invention;

[0033] Figure 4 Schematic diagram of the split structure of the heating chamber and the air extraction pump of the present invention;

[0034] Figure 5 Schematic diagram of the installation structure of the heating chamber and the moving component of the present invention;

[0035] Figure 6 Schematic diagram of the split structure of the moving component and the heating component of the present invention Figure 1 ;

[0036] Figure 7 Schematic diagram of the split structure of the moving component and the heating component of the present invention Figure 2 ;

[0037] Figure 8 Schematic diagram of the three-dimensional structure of the moving component and the heating component of the present invention Figure 1 ;

[0038] Figure 9 Schematic diagram of the three-dimensional structure of the moving component and the heating component of the present invention Figure 2 。

[0039] Wherein: 1, fixed frame; 2, heating chamber; 3, air extraction pump; 4, air extraction pipe; 5, sealing block; 6, transfer box; 7, exhaust pipe; 8, hinge; 9, rotating door; 10, handle; 11, temperature monitor; 12, monitoring probe; 13, moving component; 1301, slide rail; 1302, slider; 1303, fixing plate; 1304, baffle; 1305, screw one; 1306, rotating wheel one; 1307, sliding column; 1308, limiting block; 1309, screw two; 1310, rotating wheel two; 1311, card slot; 14, crucible; 15, heating component; 1501, mounting plate; 1502, fixing seat; 1503, connecting block; 1504, rotating column; 1505, evaporation electron gun; 1506, heating head; 16, support column; 17, control switch. Detailed implementation manners

[0040] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0041] Embodiment 1: As Figure 1-9As shown in the figure, a heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD) provided by the present invention includes a fixing frame 1. At the top of the fixing frame 1, a heating chamber 2 is fixedly installed. At the top of the heating chamber 2, an air extraction pump 3 is fixedly installed. Outside the air extraction pump 3, an air extraction pipe 4 is arranged. The other end of the air extraction pipe 4 is fixedly installed with a sealing block 5. Outside the air extraction pump 3, a transfer box 6 is fixedly installed. Outside the transfer box 6, an exhaust pipe 7 is arranged. At the front side of the heating chamber 2, a hinge 8 is fixedly installed. The other end of the hinge 8 is fixedly installed with a rotating door 9. At the front side of the rotating door 9, a handle 10 is fixedly installed. Outside the heating chamber 2, a temperature monitor 11 is fixedly installed. Outside the temperature monitor 11, a monitoring probe 12 is fixedly installed. Inside the heating chamber 2, a moving component 13 is fixedly installed. Inside the moving component 13, a crucible 14 is arranged. Inside the heating chamber 2, a heating component 15 is fixedly installed. At the top of the fixing frame 1, a support column 16 is fixedly installed. At the top of the support column 16, a control switch 17 is fixedly installed;

[0042] The moving component 13 includes a slide rail 1301 and a second screw 1309. At the top of the slide rail 1301, a slider 1302 is slidably connected. At the top of the slider 1302, a fixing plate 1303 is fixedly installed. At the top of the fixing plate 1303, a baffle 1304 is fixedly installed. Outside the baffle 1304, a first screw 1305 is threadedly connected. The other end of the first screw 1305 is fixedly installed with a first rotating wheel 1306. Outside the baffle 1304, a sliding column 1307 is fixedly installed. Outside the sliding column 1307, a limiting block 1308 is slidably connected. Outside the second screw 1309, a second rotating wheel 1310 is fixedly installed. At the top of the limiting block 1308, a clamping groove 1311 is opened;

[0043] The heating component 15 includes a mounting plate 1501. At the top of the mounting plate 1501, a fixing seat 1502 is fixedly installed. At the top of the fixing seat 1502, a connecting block 1503 is fixedly installed. Outside the connecting block 1503, a rotating column 1504 is rotatably installed. At the top of the rotating column 1504, an evaporation electron gun 1505 is fixedly installed. At the bottom of the evaporation electron gun 1505, a heating head 1506 is fixedly installed.

[0044] Specifically, the air extraction pump 3, the air extraction pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7 are interconnected. The other end of the sealing block 5 is fixedly installed with the heating chamber 2. The sealing block 5 is made of rubber material. The advantage is that through the cooperation of the air extraction pump 3, the air extraction pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7, during use, the air extraction pump 3 extracts the air in the heating chamber 2 through the air extraction pipe 4 and the sealing block 5, and discharges it through the transfer box 6 and the exhaust pipe 7, which can create a high vacuum environment in the heating chamber 2, is beneficial to the process of electron beam physical vapor deposition, and avoids the adverse effects of impurities in the air on the quality of the thermal barrier coating.

[0045] Specifically, the heating chamber 2 and the rotating door 9 are made of heat-insulating materials. The rotating door 9 is rotatably installed on the heating chamber 2 through a hinge 8. The control switch 17, the air extraction pump 3, the heating component 15, and the temperature monitor 11 are electrically connected. The advantages are as follows: Through the design of the rotating door 9, the rotating door 9 is rotatably installed on the heating chamber 2 through the hinge 8. Opening the rotating door 9 allows components such as the crucible 14 to be placed or removed. Moreover, the heating chamber 2 and the rotating door 9 are made of heat-insulating materials, which can effectively reduce heat dissipation, lower energy consumption, facilitate operation, improve work efficiency, and also extend the service life of the heating chamber 2 and the rotating door 9, avoiding damage to the heating chamber 2 and the rotating door 9 due to excessive internal temperature. Additionally, the control switch 17 can be used to turn on and off the air extraction pump 3, the heating component 15, and the temperature monitor 11.

[0046] Embodiment 2: As Figure 2-9 shown, as an improvement over the previous embodiment.

[0047] Specifically, there are two identical temperature monitors 11 and monitoring probes 12. The two temperature monitors 11 and monitoring probes 12 are respectively located on both sides of the heating chamber 2. Both monitoring probes 12 penetrate the heating chamber 2 and extend to its inner side. The advantages are as follows: The temperature monitor 11 can monitor the temperature inside the heating chamber 2 in real time through the monitoring probe 12. The two temperature monitors 11 and monitoring probes 12 are respectively located on both sides of the heating chamber 2, which can more accurately monitor the temperature, provide data support for precise control of the heating process, and ensure the stable quality of the thermal barrier coating.

[0048] Specifically, the slide rail 1301 and the slider 1302 are slidably connected. The fixing plate 1303 and the second screw 1309 are threadedly connected. The length of the slider 1302 is shorter than that of the slide rail 1301. The other end of the second screw 1309 is rotatably connected to the heating chamber 2. The outer side of the slide rail 1301 is fixedly installed on the inner wall of the heating chamber 2. The advantages are as follows: When the second screw 1309 rotates, since the fixing plate 1303 and the second screw 1309 are threadedly connected and the slider 1302 and the slide rail 1301 are slidably connected, the rotation of the fixing plate 1303 can be restricted, so that the fixing plate 1303 moves along the axial direction of the second screw 1309. When the crucible 14 is not placed, it is convenient to adjust the crucible 14 to move the crucible 14 away from the heating component 15. At the same time, electric control can also be adopted to realize the front and back positions of the crucible 14 in the heating chamber 2, so as to better control the heating process.

[0049] Specifically, the limiting block 1308 is adapted to the sliding column 1307. The limiting block 1308 is threadedly connected to the second screw 1309. The clamping groove 1311 is adapted to the crucible 14. The cross-section of the clamping groove 1311 is in a "C" shape. The advantage is that when the second screw 1309 is rotated, since the limiting block 1308 is threadedly connected to the second screw 1309, the limiting block 1308 will move along the axial direction of the second screw 1309. At the same time, the limiting block 1308 is adapted to the sliding column 1307, and the sliding column 1307 plays a guiding role to ensure the stability of the movement of the limiting block 1308. When the two limiting blocks 1308 approach each other, the "C"-shaped clamping groove 1311 will gradually clamp the crucible 14, and the crucible 14 can be firmly fixed to prevent the crucible 14 from moving or shaking during the heating process, thereby ensuring the stable progress of the preparation process of the thermal barrier coating. The adapted clamping groove 1311 and the crucible 14 can fit better, improving the clamping effect and further enhancing the reliability of the device.

[0050] Embodiment 2: As Figure 2-9 shown, as an improvement over the previous embodiment.

[0051] Specifically, there are two identical sets of the first screw 1305, the first rotating wheel 1306, the sliding column 1307 and the limiting block 1308. The two sets of the first screw 1305, the first rotating wheel 1306, the sliding column 1307 and the limiting block 1308 are symmetrically distributed about the center line of the fixing plate 1303. The advantage is that through the design of the two sets of the first screw 1305, the first rotating wheel 1306, the sliding column 1307 and the limiting block 1308, when clamping the crucible 14, force can be applied simultaneously from both sides, making the clamping force more evenly distributed on the crucible 14, ensuring that the crucible 14 is firmly fixed in the clamping groove 1311 of the limiting block 1308, and effectively preventing the crucible 14 from shifting or shaking due to uneven force during the heating process, guaranteeing the stability and reliability of the thermal barrier coating preparation process. And the symmetrical distribution makes the operation more balanced and stable. Whether adjusting the clamping degree or performing other operations, the force and direction can be better controlled, improving the accuracy and efficiency of the operation.

[0052] Specifically, the mounting plate 1501 is located inside the heating chamber 2. The mounting plate 1501 and the fixed seat 1502 are fixedly installed by bolts. The evaporation electron gun 1505 is rotatably installed with the connecting block 1503 through the rotating column 1504. The heating head 1506 is located on top of the limiting block 1308. The advantages are as follows: Since the mounting plate 1501 is located inside the heating chamber 2, the evaporation electron gun 1505 can be closer to the crucible 14 to be heated, reducing heat loss and improving heating efficiency. And through the bolted fixed installation, this connection method is firm and reliable, which can ensure the stable position of the evaporation electron gun 1505 during the heating process and prevent it from shifting due to vibration or other external forces, contributing to maintaining the uniformity and stability of heating. Moreover, the evaporation electron gun 1505 is rotatably installed with the connecting block 1503 through the rotating column 1504, enabling the heating head 1506 to flexibly adjust the angle. When not in use, the evaporation electron gun 1505 can be rotated to play an anti-fooling role.

[0053] Specifically, there are four identical sets of the fixed seat 1502, the evaporation electron gun 1505, the rotating column 1504, and the connecting block 1503. The four sets of the fixed seat 1502, the evaporation electron gun 1505, the rotating column 1504, and the connecting block 1503 are arranged at equal intervals. The advantages are as follows: Through the design of the four sets of the fixed seat 1502, the evaporation electron gun 1505, the rotating column 1504, and the connecting block 1503, a more powerful heating power can be provided, accelerating the evaporation rate of the material in the crucible 14 and improving the preparation efficiency of the thermal barrier coating. The equal-interval arrangement makes the heating more uniform. The four evaporation electron guns 1505 heat the crucible 14 from different angles, ensuring that all parts of the material in the crucible 14 can receive uniform heat, reducing the adverse effects caused by temperature differences, and improving the density and uniformity of the thermal barrier coating and enhancing its performance.

[0054] Working principle: During use, through the cooperation of the air extraction pump 3, the air extraction pipe 4, the sealing block 5, the transfer box 6 and the exhaust pipe 7, the air extraction pump 3 extracts the air in the heating chamber 2 through the air extraction pipe 4 and the sealing block 5, and discharges it through the exhaust pipe 7 after passing through the transfer box 6. This can create a high-vacuum environment in the heating chamber 2, which is beneficial to the progress of the electron beam physical vapor deposition process and avoids the adverse effects of impurities in the air on the quality of the thermal barrier coating. Through the design of the rotating door 9, the rotating door 9 is rotatably installed on the heating chamber 2 through the hinge 8. Opening the rotating door 9 allows components such as the crucible 14 to be placed or removed. Moreover, the heating chamber 2 and the rotating door 9 are made of heat-insulating materials, which can effectively reduce heat dissipation, lower energy consumption, facilitate operation, improve work efficiency, and also extend the service life of the heating chamber 2 and the rotating door 9, avoiding damage to the heating chamber 2 and the rotating door 9 due to excessive internal temperature. In addition, the on-off of the air extraction pump 3, the heating component 15, and the temperature monitor 11 can be controlled through the control switch 17. The temperature monitor 11 monitors the temperature in the heating chamber 2 in real time through the monitoring probe 12. The two temperature monitors 11 and the monitoring probes 12 are located on both sides of the heating chamber 2 respectively, which can more accurately monitor the temperature and provide data support for the precise control of the heating process to ensure the stable quality of the thermal barrier coating. When the second screw 1309 rotates, since the fixed plate 1303 is threadedly connected to the second screw 1309 and the slider 1302 is slidably connected to the slide rail 1301, the rotation of the fixed plate 1303 can be restricted, so that the fixed plate 1303 moves along the axial direction of the second screw 1309. When the crucible 14 is not placed, it is convenient to adjust the crucible 14 to move the crucible 14 away from the heating component 15. At the same time, electric control can also be adopted to realize the front-back position of the crucible 14 in the heating chamber 2 for better control of the heating process. When the second screw 1309 is rotated, since the limit block 1308 is threadedly connected to the second screw 1309, the limit block 1308 will move along the axial direction of the second screw 1309. At the same time, the limit block 1308 is adapted to the sliding column 1307, and the sliding column 1307 plays a guiding role to ensure the stability of the movement of the limit block 1308.When the two limit blocks 1308 approach each other, the card slots 1311 of the "C"-shaped structure will gradually clamp the crucible 14, which can firmly fix the crucible 14, prevent the crucible 14 from moving or shaking during the heating process, thereby ensuring the stable progress of the thermal barrier coating preparation process. The matching card slots 1311 and crucible 14 can fit better, improve the clamping effect, and further enhance the reliability of the device. Through the design of the two first screws 1305, the first rotating wheels 1306, the sliding columns 1307 and the limit blocks 1308, when clamping the crucible 14, force can be applied simultaneously from both sides, so that the clamping force is more evenly distributed on the crucible 14, ensuring that the crucible 14 is firmly fixed in the card slots 1311 of the limit blocks 1308, and effectively preventing the crucible 14 from shifting or shaking due to uneven force during the heating process, guaranteeing the stability and reliability of the thermal barrier coating preparation process. And the symmetric distribution makes the operation more balanced and stable. Whether adjusting the clamping degree or performing other operations, the force and direction can be better controlled, improving the operation accuracy and efficiency. By locating the mounting plate 1501 inside the heating chamber 2, the evaporation electron gun 1505 can be closer to the heated crucible 14, reducing heat loss and improving the heating efficiency. And it is fixed by bolts, and this connection method is firm and reliable, ensuring that the position of the evaporation electron gun 1505 is stable during the heating process and will not shift due to vibration or other external forces, contributing to maintaining the uniformity and stability of heating. And the evaporation electron gun 1505 is rotatably mounted on the connecting block 1503 through the rotating column 1504, so that the heating head 1506 can flexibly adjust the angle. When not in use, the evaporation electron gun 1505 can be rotated to play an anti-fooling role. Through the design of the four fixing seats 1502, the evaporation electron gun 1505, the rotating column 1504 and the connecting block 1503, a more powerful heating power can be provided, accelerating the evaporation speed of the materials in the crucible 14 and improving the preparation efficiency of the thermal barrier coating. The equidistant distribution design makes the heating more uniform. The four evaporation electron guns 1505 heat the crucible 14 from different angles, ensuring that all parts of the materials in the crucible 14 can receive uniform heat.

[0055] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD), comprising a fixing frame (1), characterized in that: A heating chamber (2) is fixedly mounted on the top of the fixed frame (1), an air extraction pump (3) is fixedly mounted on the top of the heating chamber (2), an air extraction pipe (4) is arranged outside the air extraction pump (3), a sealing block (5) is fixedly mounted on the other end of the air extraction pipe (4), a transfer box (6) is fixedly mounted outside the air extraction pump (3), an exhaust pipe (7) is arranged outside the transfer box (6), a hinge (8) is fixedly mounted on the front side of the heating chamber (2), a rotating door (9) is fixedly mounted on the other end of the hinge (8), and the rotating door (9) A handle (10) is fixedly mounted on the front side, a temperature monitor (11) is fixedly mounted on the outside of the heating chamber (2), a monitoring probe (12) is fixedly mounted on the outside of the temperature monitor (11), a moving component (13) is fixedly mounted on the inside of the heating chamber (2), a crucible (14) is arranged on the inside of the moving component (13), a heating component (15) is fixedly mounted inside the heating chamber (2), a support column (16) is fixedly mounted on the top of the fixed frame (1), and a control switch (17) is fixedly mounted on the top of the support column (16); The moving assembly (13) comprises a slide rail (1301) and a second screw rod (1309); the top of the slide rail (1301) is slidably connected to a slider (1302); the top of the slider (1302) is fixedly mounted with a fixing plate (1303); the top of the fixing plate (1303) is fixedly mounted with a baffle (1304); the outer side of the baffle (1304) is threadedly connected to a first screw rod (1305); the other end of the first screw rod (1305) is fixedly mounted with a first rotating wheel (1306); the outer side of the baffle (1304) is fixedly mounted with a sliding column (1307); the outer side of the sliding column (1307) is slidably connected to a limiting block (1308); the outer side of the second screw rod (1309) is fixedly mounted with a second rotating wheel (1310); and the top of the limiting block (1308) is provided with a slot (1311); The heating component (15) comprises a mounting plate (1501), a fixing seat (1502) is fixedly mounted on the top of the mounting plate (1501), a connecting block (1503) is fixedly mounted on the top of the fixing seat (1502), a rotating column (1504) is rotatably mounted on the outside of the connecting block (1503), an evaporation electron gun (1505) is fixedly mounted on the top of the rotating column (1504), and a heating head (1506) is fixedly mounted on the bottom of the evaporation electron gun (1505).

2. A heating device for preparing a thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 1, characterized in that: The vacuum pump (3), the vacuum pipe (4), the sealing block (5), the transfer box (6) and the exhaust pipe (7) are connected to each other. The other end of the sealing block (5) is fixedly mounted on the heating chamber (2). The sealing block (5) is made of rubber material.

3. A heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 2, characterized in that: The heating chamber (2) and the rotating door (9) are made of heat-insulating materials; the rotating door (9) is rotatably mounted on the heating chamber (2) via a hinge (8); and the control switch (17), the vacuum pump (3), the heating component (15), and the temperature monitor (11) are electrically connected.

4. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 3, characterized in that: Two identical temperature monitors (11) and monitoring probes (12) are provided, and the two temperature monitors (11) and monitoring probes (12) are respectively located on both sides of the heating chamber (2), and the two monitoring probes (12) both penetrate the heating chamber (2) and extend to the inside thereof.

5. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 4, characterized in that: The slide rail (1301) and the slider (1302) are slidably connected, the fixed plate (1303) and the second screw rod (1309) are threadedly connected, the length of the slider (1302) is shorter than the length of the slide rail (1301), the other end of the second screw rod (1309) is rotationally connected to the heating chamber (2), and the outer side of the slide rail (1301) and the inner wall of the heating chamber (2) are fixedly installed.

6. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 5, characterized in that: The limit block (1308) is matched with the sliding column (1307), the limit block (1308) is threadedly connected with the second screw rod (1309), the clamping groove (1311) is matched with the crucible (14), and the cross section of the clamping groove (1311) is a "C"-shaped structure.

7. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 6, characterized in that: The screw rod 1 (1305), the rotating wheel 1 (1306), the sliding column (1307) and the limiting block (1308) are provided in two identical ones, and the two screw rods 1 (1305), the rotating wheel 1 (1306), the sliding column (1307) and the limiting block (1308) are symmetrically distributed about the center line of the fixed plate (1303).

8. The heating device for preparing thermal barrier coating by electron beam physical vapor deposition (EB-PVD) according to claim 7, characterized in that: The mounting plate (1501) is located inside the heating chamber (2); the mounting plate (1501) and the fixing seat (1502) are fixedly mounted by bolts; the evaporation electron gun (1505) is rotatably mounted via a rotating column (1504) and a connecting block (1503); the heating head (1506) is located on top of the limiting block (1308); and the fixing seat (1502), the evaporation electron gun (1505), the rotating column (1504) and the connecting block (1503) are provided in equal numbers, and the four fixing seats (1502), the evaporation electron gun (1505), the rotating column (1504) and the connecting block (1503) are arranged to be equidistantly distributed.

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