Chemical delivery system

Abstract

The invention provides a chemical conveying system which is suitable for conveying high-purity chemicals and comprises a first conveying subsystem, a second conveying subsystem, a switching branch, a detection unit, a cleaning unit and a control unit. The first conveying subsystem and the second conveying subsystem are arranged in parallel, the first conveying subsystem is directly connected with the first supply point, and the second conveying subsystem is directly connected with the second supply point; the switching branch is connected between the first conveying subsystem and the second conveying subsystem and used for enabling the second conveying subsystem to be indirectly connected with a first supply point through the switching branch so as to convey chemicals when the cleaning unit cleans the first conveying subsystem, or used for enabling the second conveying subsystem to be indirectly connected with a second supply point through the switching branch so as to convey chemicals when the cleaning unit cleans the second conveying subsystem. Chemicals can be delivered by indirectly connecting the first delivery subsystem to the second supply point via the switching branch; in this way, cleaning of the conveying system is completed under the condition that supply of chemicals is not interrupted.

Description

Technical Field

[0001] The present application relates to the field of chemical delivery systems, and in particular, to a high-purity chemical delivery system. Background Art

[0002] In modern industrial production, the delivery of high-purity chemicals is an important part of many key process links. These chemicals usually have extremely high purity requirements, and tiny impurities may have a serious impact on the quality and performance of the product. Therefore, the delivery system of high-purity chemicals needs to be able to ensure the purity of the chemicals and avoid the introduction of impurities. At the same time, due to the special properties of high-purity chemicals, the delivery equipment needs to be cleaned regularly to prevent chemicals from remaining in the equipment and affecting the service life and stability of the equipment.

[0003] Existing high-purity chemical delivery systems usually use traditional manual cleaning methods, that is, after the equipment is shut down, the equipment is disassembled and manually cleaned. This method has at least the following disadvantages. On the one hand, cleaning requires shutdown and disassembly, which will cause production interruptions and waste time, affecting production efficiency. On the other hand, this manual cleaning method requires special cleaning equipment and personnel, and it is difficult to monitor and control the cleaning effect. There is a lack of intelligent management and adjustment methods, and it is impossible to ensure the consistency and reliability of the cleaning effect. In addition, the operation is complicated and time-consuming, which increases production costs. Summary of the invention

[0004] The purpose of the present application is to provide a chemical delivery system, which can clean the chemical delivery equipment in the chemical delivery system without interrupting production.

[0005] To this end, the present application proposes a chemical delivery system suitable for high-purity chemical delivery, including a first delivery subsystem A, a second delivery subsystem B, a switching branch, a detection unit, a cleaning unit, and a control unit; The first conveying subsystem A and the second conveying subsystem B are arranged in parallel, the first conveying subsystem A is directly connected to the first supply point 112, and the second conveying subsystem B is directly connected to the second supply point 212; The detection unit is used to monitor characteristic data of the fluid flowing in the first conveying subsystem (A) and the second conveying subsystem (B), wherein the characteristic data includes at least one of concentration and impurity metal ion content; The cleaning unit is used to clean the first conveying subsystem A and / or the second conveying subsystem B; The switching branch is connected between the first conveying subsystem A and the second conveying subsystem B, and is used to enable the second conveying subsystem B to be indirectly connected to the first supply point 112 via the switching branch to convey chemicals when the cleaning unit performs a cleaning operation on the first conveying subsystem A, or to enable the first conveying subsystem A to be indirectly connected to the second supply point 212 via the switching branch to convey chemicals when the cleaning unit performs a cleaning operation on the second conveying subsystem B; The control unit is electrically connected to the first conveying subsystem (A), the second conveying subsystem (B), the switching branch, the detection unit, and the cleaning unit.

[0006] Further, the first conveying subsystem A comprises a first pneumatic diaphragm valve 102, a second pneumatic diaphragm valve 103, a first metering pump 106, a third pneumatic diaphragm valve 110, and a fourth pneumatic diaphragm valve 111 which are sequentially connected in series in the first conveying pipeline; The second delivery subsystem B includes a fifth pneumatic diaphragm valve 202, a sixth pneumatic diaphragm valve 203, a second metering pump 206, a seventh pneumatic diaphragm valve 210, and an eighth pneumatic diaphragm valve 211 which are sequentially connected in series in the second delivery pipeline; The detection unit includes a first concentration meter 107 and a first electrochemical sensor 108 disposed at the outlet of the first metering pump 106 , and a second concentration meter 207 and a second electrochemical sensor 208 disposed at the outlet of the second metering pump 206 .

[0007] Furthermore, one end of the switching branch is connected between the third pneumatic diaphragm valve 110 and the fourth pneumatic diaphragm valve 111, and the other end is connected between the seventh pneumatic diaphragm valve 210 and the eighth pneumatic diaphragm valve 211; a twenty-third pneumatic diaphragm valve 502 is arranged on the switching branch.

[0008] Furthermore, the cleaning unit comprises: a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent circulation recovery branch, and a purge branch; The detection branch is used to detect the chemical sample from the first delivery pipeline and / or the second delivery pipeline; The waste liquid collecting branch is used to recover the waste liquid from the first conveying pipeline and / or the second conveying pipeline, wherein the waste liquid includes residual chemical liquid and residual cleaning agent liquid; The cleaning agent supply branch and the cleaning agent circulation recovery branch cooperate to allow the cleaning agent to circulate in the first delivery pipeline and / or the second delivery pipeline; The purge branch is used to introduce high-pressure nitrogen into the first delivery pipeline and / or the second delivery pipeline.

[0009] Furthermore, one end of the detection branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210; the detection branch is sequentially provided with a seventeenth pneumatic diaphragm valve 506, a spectrometer 507 and an eighteenth pneumatic diaphragm valve 503; wherein the spectrometer 507 is arranged between the seventeenth pneumatic diaphragm valve 506 and the eighteenth pneumatic diaphragm valve 503.

[0010] Furthermore, one end of the waste liquid collection branch is connected between the second pneumatic diaphragm valve 103 and the first metering pump 106, and the other end is connected between the sixth pneumatic diaphragm pump 203 and the second metering pump 206; the waste liquid collection branch is provided with a thirteenth pneumatic diaphragm valve 602, a fourteenth pneumatic diaphragm valve 603 and a waste liquid collector 601; the waste liquid collector 601 is located between the thirteenth pneumatic diaphragm valve 602 and the fourteenth pneumatic diaphragm valve 603.

[0011] Further, one end of the cleaning agent supply branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203; the cleaning agent supply branch is provided with an eleventh pneumatic diaphragm valve 301, a twelfth pneumatic diaphragm valve 305 and a cleaning agent circulation box 302; the cleaning agent circulation box 302 is located between the eleventh pneumatic diaphragm valve 301 and the twelfth pneumatic diaphragm valve 305; One end of the cleaning agent circulation recovery branch is connected between the outlet of the first metering pump 106 and the third pneumatic diaphragm pump 110, and the other end is connected between the outlet of the second metering pump 206 and the seventh pneumatic diaphragm pump 210; the cleaning agent circulation recovery branch is provided with a nineteenth pneumatic diaphragm valve 304 and a twentieth pneumatic diaphragm valve 306 in sequence; the pipeline between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 is also connected to the cleaning liquid circulation box 302; The eleventh pneumatic diaphragm valve 301 is linked to the nineteenth pneumatic diaphragm valve 304 ; the twelfth pneumatic diaphragm valve 305 is linked to the twentieth pneumatic diaphragm valve 306 .

[0012] Further, the purge branch includes a first purge branch and a second purge branch; the first purge branch is connected in parallel with the cleaning agent supply branch; one end of the first purge branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203; the first purge branch is provided with a fifteenth pneumatic diaphragm valve 404 and a sixteenth pneumatic diaphragm valve 405 in sequence; the pipeline between the fifteenth pneumatic diaphragm valve 404 and the sixteenth pneumatic diaphragm valve 405 is connected to the high-pressure nitrogen supply device 401; The second purge branch is connected in parallel with the cleaning agent circulation recovery branch; one end of the second purge branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210; the second purge branch is provided with a twenty-first pneumatic diaphragm valve 504 and a twenty-second pneumatic diaphragm valve 505 in sequence, and the pipeline between the twenty-first pneumatic diaphragm valve 504 and the twenty-second pneumatic diaphragm valve 505 is connected to the air duct 501; The fifteenth pneumatic diaphragm valve 404 is linked to the twenty-first pneumatic diaphragm valve 504 ; the sixteenth pneumatic diaphragm valve 405 is linked to the twenty-second pneumatic diaphragm valve 505 .

[0013] Furthermore, the control unit is used to receive monitoring data fed back by each concentration meter and each electrochemical sensor in the detection unit; the control unit is also used to switch the open or closed state of each pneumatic diaphragm valve in the first conveying subsystem A, the second conveying subsystem B, the switching branch, and the cleaning unit, or to adjust the opening degree of each pneumatic diaphragm valve.

[0014] To this end, the present application also proposes a cleaning method applicable to the above-mentioned chemical delivery system, the cleaning method comprising the following steps: When the concentration data collected by the first concentration meter 107 is abnormal and / or the first electrochemical sensor 108 collects abnormal impurity metal ion content, the chemical sample from the first delivery pipeline is introduced into the detection branch to perform abnormality determination; When the detection branch determines that the chemical sample from the first delivery pipeline is abnormal, the connection between the first delivery pipeline and the first supply point 112 and the liquid storage container is cut off; Recovering the chemical waste liquid in the first conveying pipeline through the waste liquid collection branch; After the chemical residual liquid is recovered, the cleaning agent supply branch and the cleaning agent circulation recovery branch cooperate to make the cleaning agent circulate in the first delivery pipeline; When the detection data of the first concentration meter 107 and the first electrochemical sensor 108 no longer change, it is determined that the cleaning is finished, and the cleaning agent waste liquid in the first delivery pipeline is recovered through the waste liquid collection branch; After the cleaning agent waste liquid is recovered, high-pressure nitrogen is introduced into the first delivery pipeline and / or the second delivery pipeline through the purge branch.

[0015] Through the chemical delivery system of the present application, it is possible to clean the chemical delivery equipment in the chemical delivery system without interrupting production, control and monitor the cleaning process in real time to ensure the consistency and reliability of the cleaning effect, avoid the introduction of new impurities during the cleaning process, thereby ensuring the purity of the chemicals and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 A schematic diagram of the structure of the chemical delivery system provided for this application; Reference numerals: A-first conveying subsystem; B-second conveying subsystem; 101-first liquid storage container; 102-first pneumatic diaphragm valve; 103-second pneumatic diaphragm valve; 104-first flow meter; 105-first thermometer; 106-first metering pump; 107-first concentration meter; 108-first electrochemical sensor; 109-first pressure gauge; 110-third pneumatic diaphragm valve; 111-fourth pneumatic diaphragm valve; 112-first supply point; 201-second liquid storage container; 202-fifth pneumatic diaphragm valve; 203-sixth pneumatic diaphragm valve; 204-second flow meter; 205-second thermometer; 206-second metering pump; 207-second concentration meter; 208-second electrochemical sensor; 209-second pressure gauge; 210-seventh pneumatic diaphragm valve; 211-eighth pneumatic diaphragm valve; 212-second supply point; 401-high pressure nitrogen supply equipment; 402-ninth pneumatic diaphragm valve; 403-tenth pneumatic diaphragm valve; 503-18th pneumatic diaphragm valve; 506-17th pneumatic diaphragm valve; 507-spectrometer; 601-waste liquid collector; 602-thirteenth pneumatic diaphragm valve, 603-fourteenth pneumatic diaphragm valve; 301-11th pneumatic diaphragm valve; 302 cleaning agent circulation box; 305-12th pneumatic diaphragm valve; 304-19th pneumatic diaphragm valve; 306-20th pneumatic diaphragm valve; 404-fifteenth pneumatic diaphragm valve; 405-sixteenth pneumatic diaphragm valve; 501- air duct 501; the 21st pneumatic diaphragm valve 504, the 22nd pneumatic diaphragm valve 505 502-Twenty-third pneumatic diaphragm valve. DETAILED DESCRIPTION

[0018] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0019] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0020] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product is usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0021] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0022] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0023] Combine the following Figure 1 The composition of a high-purity chemical delivery system according to an embodiment of the present application is described.

[0024] Reference Figure 1 , this embodiment provides a chemical delivery system, in particular, a high-purity chemical delivery system suitable for the delivery of high-purity chemicals. The chemical delivery system includes: a first delivery subsystem A, a second delivery subsystem B, a switching branch, a detection unit, a cleaning unit and a control unit (not shown). The first delivery subsystem A and the second delivery subsystem B are arranged in parallel. The cleaning unit can be used to clean the first delivery subsystem A and / or the second delivery subsystem B. The switching branch is connected between the first delivery subsystem A and the second delivery subsystem B, so that when the above-mentioned cleaning unit cleans one of the first delivery subsystem A and the second delivery subsystem B, the chemicals can be delivered to the target supply point through the other of the first delivery subsystem A and the second delivery subsystem B, so as to realize mutual backup, thereby completing the cleaning of the delivery pipeline without interrupting the chemical supply.

[0025] Specifically, the first delivery subsystem A includes a first pneumatic diaphragm valve 102, a second pneumatic diaphragm valve 103, a first metering pump 106, a third pneumatic diaphragm valve 110, and a fourth pneumatic diaphragm valve 111 which are sequentially connected in series in the first delivery pipeline. The first delivery subsystem A also includes a first liquid storage container 101, which is connected upstream of the first pneumatic diaphragm valve 102 and is used to store and supply high-purity chemicals to be transported. The first delivery pipeline is finally connected to a first supply point 112, which is used to supply high-purity chemicals to the first supply point 112. The first supply point 112 is located downstream of the first delivery pipeline.

[0026] The second delivery subsystem B includes a fifth pneumatic diaphragm valve 202, a sixth pneumatic diaphragm valve 203, a second metering pump 206, a seventh pneumatic diaphragm valve 210, and an eighth pneumatic diaphragm valve 211 which are sequentially connected in series in the second delivery pipeline. The second delivery subsystem B also includes a second liquid storage container 201, which is connected upstream of the fifth pneumatic diaphragm valve 202 and is used to store and supply high-purity chemicals to be transported. The second delivery pipeline is finally connected to a second supply point 212, which is used to supply high-purity chemicals to the second supply point 212. The second supply point 212 is located downstream of the second delivery pipeline. In the present application, upstream specifically refers to the front side along the flow direction of the chemical during the chemical delivery process; downstream refers to the rear side along the flow direction of the chemical during the chemical delivery process.

[0027] In some optional embodiments, the first liquid storage container 101 and the second liquid storage container 201 may be the same container.

[0028] The first pneumatic diaphragm valve 102 is used to connect or disconnect the first delivery pipeline and the first liquid storage container 101. The fourth pneumatic diaphragm valve 111 is used to connect or disconnect any delivery pipeline and the first supply point 112. The second pneumatic diaphragm valve 103 can adjust the flow rate of the chemical in the first delivery pipeline. The third pneumatic diaphragm valve 110 is used to prevent the chemical transported by the second delivery pipeline from flowing into the first delivery pipeline through the switching branch when the first delivery pipeline is cleaned.

[0029] The fifth pneumatic diaphragm valve 202 is used to connect or disconnect the second delivery pipeline and the second liquid storage container 201. The eighth pneumatic diaphragm valve 211 is used to connect or disconnect any delivery pipeline and the second supply point 212. The sixth pneumatic diaphragm valve 203 can adjust the flow rate of the chemical in the second delivery pipeline. The seventh pneumatic diaphragm valve 210 is used to prevent the chemical transported by the first delivery pipeline from flowing into the second delivery pipeline through the switching branch when the second delivery pipeline is cleaned.

[0030] Furthermore, one end of the switching branch is connected between the third pneumatic diaphragm valve 110 and the fourth pneumatic diaphragm valve 111, and the other end is connected between the seventh pneumatic diaphragm valve 210 and the eighth pneumatic diaphragm valve 211. A twenty-third pneumatic diaphragm valve 502 is provided on the switching branch. When the twenty-third pneumatic diaphragm valve 502 is opened, high-purity chemicals can be supplied to the second supply point 212 through the first conveying subsystem A; similarly, high-purity chemicals can also be supplied to the first supply point 112 through the second conveying subsystem B. For example, when the first conveying subsystem A needs to be cleaned but needs to supply chemicals to the first supply point 112, the third pneumatic diaphragm valve 110 is closed, the twenty-third pneumatic diaphragm valve 502 is opened, and high-purity chemicals are supplied to the first supply point 112 through the second conveying subsystem B. Alternatively, when the demand for chemical usage at the first supply point 112 increases and the supply demand cannot be met only by the first delivery subsystem A, the twenty-third pneumatic diaphragm valve 502 is opened, so that the first delivery subsystem A and the second delivery subsystem B simultaneously supply chemicals to the first supply point 112, thereby meeting the large-flow chemical supply demand. In this way, the first delivery subsystem A and the second delivery subsystem can serve as backup for each other by setting the switching branch.

[0031] In order to monitor the flow rate and temperature of the chemical liquid at the outlet of the second pneumatic diaphragm valve 103 , a first flow meter 104 and a first thermometer 105 are provided between the second pneumatic diaphragm valve 103 and the first metering pump 106 .

[0032] Furthermore, the detection unit includes a first concentration meter 107, a first electrochemical sensor 108, and a first pressure gauge 109, which are arranged at the outlet of the first metering pump 106. The first concentration meter 107 is used to monitor the concentration of chemicals in the pipeline at the outlet of the first metering pump 106 in real time. The first electrochemical sensor 108 is used to monitor in real time whether the chemicals in the pipeline at the outlet of the first metering pump 106 contain metal ion impurities. The first pressure gauge 109 is used to monitor the pressure in the pipeline at the outlet of the first metering pump 106.

[0033] Likewise, in order to monitor the flow rate and temperature of the chemical liquid at the outlet of the sixth pneumatic diaphragm valve 203 , a second flow meter 204 and a second thermometer 205 are provided between the sixth pneumatic diaphragm valve 203 and the second metering pump 206 .

[0034] Furthermore, the detection unit further includes a second concentration meter 207, a second electrochemical sensor 208, and a second pressure gauge 209 disposed at the outlet of the second metering pump 206. The second concentration meter 207 is used to monitor in real time the concentration of chemicals in the pipeline at the outlet of the second metering pump 206. The second electrochemical sensor 208 is used to monitor in real time whether the chemicals in the pipeline at the outlet of the second metering pump 206 contain metal ion impurities. The second pressure gauge 209 is used to monitor the pressure in the pipeline at the outlet of the second metering pump 206.

[0035] The first supply point 112 and the second supply point 212 can be the same position on the chemical use equipment or different positions. The chemical delivery system of this embodiment supplies high-purity chemicals to the chemical use equipment at a fixed point and in a fixed quantity by controlling the opening or closing of each pneumatic diaphragm valve in each delivery pipeline and the output power of the metering pump.

[0036] The first liquid storage container 101 and the second liquid storage container 201 can be intermediate bulk containers. After the chemicals to be stored are used up, the intermediate bulk container can be directly replaced. If these intermediate bulk containers are required to be cleaned, they can be cleaned separately after replacement. Furthermore, the connecting pipes between the first liquid storage container 101 and the first pneumatic diaphragm valve 102, and between the second liquid storage container 201 and the second pneumatic diaphragm valve 202 can be corrugated hoses, which can be replaced together with the first liquid storage container 101 and the second liquid storage container 201.

[0037] The chemical delivery system also includes a high-pressure nitrogen supply branch. One end of the high-pressure nitrogen supply branch is connected to the air inlet at the top of the first liquid storage container 101, and the other end is connected to the air inlet at the top of the second liquid storage container 201. The high-pressure nitrogen supply branch is provided with a ninth pneumatic diaphragm valve 402 and a tenth pneumatic diaphragm valve 403 in sequence. The pipeline between the ninth pneumatic diaphragm valve 402 and the tenth pneumatic diaphragm valve 403 is connected to the high-pressure nitrogen supply device 401. The nitrogen provided by the high-pressure nitrogen supply device 401 not only has a higher pressure than the atmospheric pressure, but also has a relatively high purity and will not react with the chemical liquid. For example, the ninth pneumatic diaphragm valve 402 is in an open state, and the high-pressure nitrogen from the high-pressure nitrogen supply device 401 is introduced into the first liquid storage container 101, giving the chemical liquid in the first liquid storage container 101 a downward high air pressure, so that the chemical liquid can flow out smoothly from the discharge pipe (not shown) inserted into the first liquid storage container 101 and enter the above-mentioned connecting pipe connected to the first liquid storage container 101 and the first pneumatic diaphragm valve 102.

[0038] Furthermore, the cleaning unit of this embodiment includes a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent circulation recovery branch, and a purge branch. The detection branch, the waste liquid collection branch, the cleaning agent supply branch, the cleaning agent circulation recovery branch, and the purge branch are all connected between the first conveying subsystem A and the second conveying subsystem B, and are used to clean the first conveying subsystem A and / or the second conveying subsystem B.

[0039] The detection branch is used to perform quantitative analysis on chemical samples from the first delivery pipeline and / or the second delivery pipeline. The waste liquid collection branch is used to recover waste liquid from the first delivery pipeline and / or the second delivery pipeline, and the waste liquid includes chemical residual liquid and cleaning agent residual liquid. The cleaning agent supply branch and the cleaning agent circulation recovery branch work together to allow the cleaning agent to circulate in the first delivery pipeline and / or the second delivery pipeline. The purge branch is used to introduce high-pressure nitrogen into the first delivery pipeline and / or the second delivery pipeline.

[0040] The cleaning unit of this embodiment can clean the first conveying subsystem A and the second conveying subsystem B at the same time, or clean a single conveying subsystem, so that the two conveying subsystems can be used as a backup. Next, each branch in the cleaning unit is described in detail.

[0041] Specifically, one end of the detection branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210. The detection branch is provided with the seventeenth pneumatic diaphragm valve 506, the spectrometer 507, and the eighteenth pneumatic diaphragm valve 503 in sequence, and the spectrometer 507 is provided between the seventeenth pneumatic diaphragm valve 506 and the eighteenth pneumatic diaphragm valve 503. When the concentration data collected by the first concentration meter 107 and the second concentration meter 207 are abnormal and / or the first electrochemical sensor 108 and the second electrochemical sensor 208 collect abnormal impurity metal ion content in the chemical, the chemical sample from the first delivery pipeline and / or the second delivery pipeline is quantitatively analyzed through the detection branch. For example, when the first electrochemical sensor 108 detects that the content of impurity metal ions in the chemical transported by the first transport pipeline is abnormal, the seventeenth pneumatic diaphragm valve 506 is opened, and the chemical sample in the first transport pipeline is introduced into the spectrometer 507. Similarly, when the second electrochemical sensor 208 detects that the content of impurity metal ions in the chemical transported by the second transport pipeline is abnormal, the eighteenth pneumatic diaphragm valve 503 is opened, and the chemical sample in the second transport pipeline is introduced into the spectrometer 507.

[0042] Further, one end of the waste liquid collection branch is connected between the second pneumatic diaphragm valve 103 and the first metering pump 106, and the other end is connected between the sixth pneumatic diaphragm pump 203 and the second metering pump 206. The waste liquid collection branch is provided with a thirteenth pneumatic diaphragm valve 602, a fourteenth pneumatic diaphragm valve 603 and a waste liquid collector 601. Among them, the waste liquid collector 601 is located between the thirteenth pneumatic diaphragm valve 602 and the fourteenth pneumatic diaphragm valve 603. When the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample exceeds a predetermined value, the residual chemicals in the first delivery pipeline and / or the second delivery pipeline are discharged through the waste liquid collection branch, so as to clean the corresponding delivery pipeline and the pneumatic diaphragm valve and metering pump arranged on the delivery pipeline. For example, when the spectrometer 507 analyzes that the content of impure metal ions in the chemical sample from the first delivery pipeline exceeds a predetermined value, the first pneumatic diaphragm valve 102 in the first delivery subsystem A is closed, and the thirteenth pneumatic diaphragm valve 602 is opened to collect the residual chemicals in the first delivery pipeline to the waste liquid collector 601. Similarly, when the spectrometer 507 analyzes that the content of impure metal ions in the chemical sample from the second delivery pipeline exceeds a predetermined value, the fifth pneumatic diaphragm valve 202 in the second delivery subsystem B is closed, and the fourteenth pneumatic diaphragm valve 603 is opened to collect the residual chemicals in the second delivery pipeline to the waste liquid collector 601.

[0043] Furthermore, one end of the cleaning agent supply branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203. The cleaning agent supply branch is provided with an eleventh pneumatic diaphragm valve 301, a twelfth pneumatic diaphragm valve 305 and a cleaning agent circulation box 302. The cleaning agent circulation box 302 is located between the eleventh pneumatic diaphragm valve 301 and the twelfth pneumatic diaphragm valve 305.

[0044] Furthermore, one end of the cleaning agent circulation recovery branch is connected between the outlet of the first metering pump 106 and the third pneumatic diaphragm pump 110, and the other end is connected between the outlet of the second metering pump 206 and the seventh pneumatic diaphragm pump 210. The cleaning agent circulation recovery branch is provided with a nineteenth pneumatic diaphragm valve 304 and a twentieth pneumatic diaphragm valve 306 in sequence. The pipeline between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 is also connected to the cleaning liquid circulation box 302. The eleventh pneumatic diaphragm valve 301 is linked with the nineteenth pneumatic diaphragm valve 304, and the twelfth pneumatic diaphragm valve 305 is linked with the twentieth pneumatic diaphragm valve 306.

[0045] When the first delivery pipeline needs to be cleaned, when the eleventh pneumatic diaphragm valve 301 and the nineteenth pneumatic diaphragm valve 304 are in the open state, the cleaning agent in the cleaning agent circulation box 302 can enter the first delivery pipeline under the suction of the first metering pump 106, so as to clean the first delivery pipeline and the second pneumatic diaphragm pump 103 and the first metering pump 106 arranged thereon, and then return to the cleaning agent circulation box 302 through the nineteenth pneumatic diaphragm valve 304. Correspondingly, when the second delivery pipeline needs to be cleaned, when the twelfth pneumatic diaphragm valve 305 and the twentieth pneumatic diaphragm valve 306 are in the open state, the cleaning agent in the cleaning agent circulation box 302 can enter the second delivery pipeline under the suction of the second metering pump 206, so as to clean the second delivery pipeline and the sixth pneumatic diaphragm pump 203 and the first metering pump 206 arranged thereon, and then return to the cleaning agent circulation box 302 through the twentieth pneumatic diaphragm valve 306.

[0046] The cleaning unit further includes a heating device 303. The heating device 303 is disposed between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 and the cleaning liquid circulation box 302, and is used to control the temperature of the cleaning agent flowing back from the first delivery pipeline and the second delivery pipeline to the cleaning liquid circulation box 302, so that the cleaning liquid is kept within the optimal working temperature range, thereby achieving a better cleaning effect.

[0047] Furthermore, the purge branch includes a first purge branch and a second purge branch. The first purge branch is connected in parallel with the cleaning agent supply branch. One end of the first purge branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203. The first purge branch is provided with a fifteenth pneumatic diaphragm valve 404 and a sixteenth pneumatic diaphragm valve 405 in sequence. The pipeline between the fifteenth pneumatic diaphragm valve 404 and the sixteenth pneumatic diaphragm valve 405 is also connected to the high-pressure nitrogen supply device 401.

[0048] The second purge branch is connected in parallel with the cleaning agent circulation recovery branch. One end of the second purge branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210. The second purge branch is provided with a twenty-first pneumatic diaphragm valve 504 and a twenty-second pneumatic diaphragm valve 505 in sequence, and the pipeline between the twenty-first pneumatic diaphragm valve 504 and the twenty-second pneumatic diaphragm valve 505 is also connected to the air duct 501. Among them, the fifteenth pneumatic diaphragm valve 404 is linked to the twenty-first pneumatic diaphragm valve 504, and the sixteenth pneumatic diaphragm valve 405 is linked to the twenty-second pneumatic diaphragm valve 505.

[0049] After the first delivery pipeline is cleaned with the cleaning fluid, the fifteenth pneumatic diaphragm valve 404 and the twenty-first pneumatic diaphragm valve 504 are opened, and the high-pressure nitrogen enters the first delivery pipeline through the fifteenth pneumatic diaphragm valve 404, and the first delivery pipeline and the second pneumatic diaphragm pump 103 and the first metering pump 106 arranged thereon are purged to remove impurities and moisture in the first delivery pipeline, thereby ensuring that the pipeline is clean and dry. Similarly, after the second delivery pipeline is cleaned with the cleaning fluid, the sixteenth pneumatic diaphragm valve 405 and the twenty-second pneumatic diaphragm valve 505 are opened, and the high-pressure nitrogen enters the second delivery pipeline through the sixteenth pneumatic diaphragm valve 405, and the second delivery pipeline and the sixth pneumatic diaphragm pump 103 and the first metering pump 106 arranged thereon are purged to remove impurities and moisture in the first delivery pipeline, thereby ensuring that the pipeline is clean and dry.

[0050] Furthermore, the chemical delivery system also includes a control unit. The control unit is electrically connected to each pneumatic diaphragm valve in the chemical delivery system to control each pneumatic diaphragm valve to open or close or control the opening size. The control unit is also electrically connected to the first metering pump 106 and the second metering pump 206 to control the start and stop of the first metering pump 106 and the second metering pump 206 and the output flow size.

[0051] Next, the working principle of the chemical delivery system in this embodiment will be described in detail.

[0052] During normal chemical delivery, the first delivery subsystem A and the second delivery subsystem B can work separately or simultaneously. This embodiment takes the simultaneous operation of the two as an example to illustrate the control process of the chemical delivery system.

[0053] When transporting chemicals normally, only the pneumatic diaphragm valves on the first transport pipeline, the second transport pipeline and the high-pressure nitrogen supply branch are in an open state, and the other pneumatic diaphragm valves are in a closed state. Specifically, the ninth pneumatic diaphragm valve 402 and the tenth pneumatic diaphragm valve 403 on the high-pressure nitrogen supply branch are both opened, and the high-pressure nitrogen provided by the high-pressure nitrogen supply device 401 enters the first liquid storage container 101 and the second liquid storage container 201 through the ninth pneumatic diaphragm valve 402 and the tenth pneumatic diaphragm valve 403, respectively, to transport high-purity chemicals from the chemicals in the first liquid storage container 101 and the second liquid storage container 201 to the first transport pipeline and the second transport pipeline, respectively. The first pneumatic diaphragm valve 102, the second pneumatic diaphragm valve 103, the third pneumatic diaphragm valve 110, and the fourth pneumatic diaphragm valve 111 in the first transport pipeline are all opened, and the first metering pump 106 is in an open state to supply chemicals to the first supply point 112. The fifth pneumatic diaphragm valve 202 , the sixth pneumatic diaphragm valve 203 , the seventh pneumatic diaphragm valve 210 , and the eighth pneumatic diaphragm valve 211 in the second delivery pipeline are all opened, and the second metering pump is in an on state to supply chemicals to the second supply point 212 .

[0054] The control unit is electrically connected to the above-mentioned first concentration meter 107, the second concentration meter 207, the first electrochemical sensor 108 and the second electrochemical sensor 208 and other sensors to receive the detection data transmitted by the above-mentioned sensors. In detail, the first concentration meter 107 and the second concentration meter 207 respectively collect the concentration data of the chemicals in the pipeline at the outlet of the first metering pump 106 and the outlet of the second metering pump 206 in real time, and transmit the detected concentration data to the above-mentioned control unit. The first electrochemical sensor 108 and the second electrochemical sensor 208 respectively monitor in real time whether the chemicals in the pipeline at the outlet of the first metering pump 106 and the outlet of the second metering pump 206 contain impure metal ions, and transmit the monitored impure metal ion content abnormal data to the above-mentioned control unit.

[0055] The control unit is also used to analyze the data obtained by the sensor, such as comparing with historical data or with a preset threshold or a preset threshold range, or predicting the purity of the chemical through a data model, and then determining whether the chemicals supplied to each supply point meet the requirements.

[0056] Another embodiment of the present application discloses a cleaning method for a chemical delivery system, which includes the steps of chemical abnormality detection and analysis, discharge of residual chemicals, introduction of cleaning agent for cyclic cleaning, discharge of residual cleaning agent, purging and drying, and the like.

[0057] When the concentration data collected by the first concentration meter 107 changes and / or the first electrochemical sensor 108 collects abnormal content of impurity metal ions in the chemical, the seventeenth pneumatic diaphragm valve 506 on the detection branch is opened to introduce the chemical delivered by the first metering pump 106 into the spectrometer 507. The spectrometer 507 performs quantitative analysis on the chemical sample from the first delivery pipeline. The above-mentioned metal ions include Ca+, Mg+, Fe+, Zn+, Cr+, and Ni+.

[0058] When the concentration data collected by the second concentration meter 207 changes and / or the second electrochemical sensor 208 collects abnormal content of impurity metal ions in the chemical, the eighteenth pneumatic diaphragm valve 503 on the detection branch is opened to introduce the chemical delivered by the second metering pump 206 into the spectrometer 507. The spectrometer 507 performs quantitative analysis on the chemical sample from the second delivery pipeline.

[0059] When the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample from the first delivery pipeline exceeds a predetermined value, the connection between the first delivery pipeline and the first liquid storage solution 101 and the first supply point 112 is cut off. That is, the ninth pneumatic diaphragm valve 402 on the high-pressure nitrogen supply branch is closed to stop the chemical in the first liquid storage container 101 from being pressed into the first delivery pipeline; at the same time, the first pneumatic diaphragm valve 102 and the third pneumatic diaphragm valve 110 in the first delivery pipeline are closed to facilitate the cleaning unit to clean the first delivery pipeline.

[0060] When the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample from the second delivery pipeline exceeds a predetermined value, the connection between the second delivery pipeline and the second liquid storage solution 201 and the second supply point 212 is cut off. That is, the tenth pneumatic diaphragm valve 403 on the high-pressure nitrogen supply branch is closed to stop pressing the chemical in the second liquid storage container 201 into the second delivery pipeline; at the same time, the fifth pneumatic diaphragm valve 202 and the seventh pneumatic diaphragm valve 210 in the second delivery pipeline are closed to facilitate the cleaning unit to clean the second delivery pipeline.

[0061] Next, the action logic of the pneumatic diaphragm valves on each branch of the cleaning unit during the cleaning operation is explained in detail.

[0062] Take the cleaning operation of the first conveying pipeline as an example. First, the control unit sends an instruction to open the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch to discharge the residual high-purity chemicals in the first conveying pipeline to the waste liquid collector 601 respectively. After the residual liquid is discharged, the control unit sends an instruction to close the thirteenth pneumatic diaphragm valve 602. The judgment of whether the residual liquid has been discharged can be completed by a preset time, which can be set in advance and can be changed. For example, assuming that the residual liquid can be discharged in 5 minutes, when the thirteenth pneumatic diaphragm valve 602 is opened for 5 minutes, the control unit can determine that the residual liquid has been discharged and send an instruction to close the thirteenth pneumatic diaphragm valve 602.

[0063] Next, the control unit sends a command to open the eleventh pneumatic diaphragm valve 301 on the cleaning agent supply branch and the nineteenth pneumatic diaphragm valve 304 on the cleaning agent circulation and recovery branch, and the cleaning agent flows out from the cleaning agent circulation box 302 to clean the first delivery pipeline and the pneumatic diaphragm valve and metering pump thereon. During the cleaning process, the control unit receives the detection data of the first concentration meter 107 and the first electrochemical sensor 108. When the detection data of the first concentration meter 107 and the first electrochemical sensor 108 no longer change, it is determined that the cleaning is completed, and the control unit sends a command to close the eleventh pneumatic diaphragm valve 301 on the cleaning agent supply branch and the nineteenth pneumatic diaphragm valve 304 on the cleaning agent circulation and recovery branch.

[0064] Then, the control unit sends an instruction to open the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch to discharge the residual cleaning agent in the first delivery pipeline into the waste liquid collector 601. Similarly, after the preset time is reached, the control unit sends an instruction to close the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch.

[0065] Finally, the control unit sends a command to open the fifteenth pneumatic diaphragm valve 404 and the twenty-first pneumatic diaphragm valve 504 on the purge branch to purge the first conveying pipeline and the pneumatic diaphragm valves, metering pumps, etc. installed thereon to remove residual cleaning agent and perform a drying process.

[0066] The above steps are also used for the cleaning operation of the second conveying pipeline. The control unit sends corresponding instructions to control the action of the pneumatic diaphragm valves on each branch of the cleaning unit.

[0067] Specifically, first, the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch is opened to discharge the residual high-purity chemicals in the second conveying pipeline to the waste liquid collector 601. After the residual liquid is discharged, the fourteenth pneumatic diaphragm valve 603 is closed. Next, the twelfth pneumatic diaphragm valve 305 on the cleaning agent supply branch and the twentieth pneumatic diaphragm valve 306 on the cleaning agent circulation recovery branch are opened, and the cleaning agent flows out from the cleaning agent circulation box 302 to clean the second conveying pipeline and the pneumatic diaphragm valve and metering pump thereon. During the cleaning process, when the measurement data of the second concentration meter 207 and the second electrochemical sensor 208 no longer change, it is judged that the cleaning is completed, so that the twelfth pneumatic diaphragm valve 305 on the cleaning agent supply branch and the twentieth pneumatic diaphragm valve 306 on the cleaning agent circulation recovery branch are closed. Then, the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch is opened to discharge the residual cleaning agent in the pipeline into the waste liquid collector 601; after the preset time is reached, the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch is closed. Finally, the sixteenth pneumatic diaphragm valve 405 and the twenty-second pneumatic diaphragm valve 505 on the purge branch are used to purge the second delivery pipeline and the pneumatic diaphragm valves, metering pumps, etc. arranged thereon to remove the residual cleaning agent.

[0068] The two delivery pipelines may not be cleaned at the same time, and the second delivery pipeline may be supplied with liquid normally when the first delivery pipeline is cleaned, or the first delivery pipeline may be supplied with liquid normally when the second delivery pipeline is cleaned. Of course, the two delivery pipelines may also be cleaned at the same time.

[0069] By setting up the switching branch, the cleaning operation of one of the delivery pipelines will not affect the supply of high-purity chemicals to the corresponding supply point, so as to achieve continuous production. For example, when the first delivery pipeline needs to be cleaned, high-purity chemicals can be provided to the first supply point through the second delivery pipeline and the switching branch. Specifically, close the third pneumatic diaphragm valve 110 and open the twenty-third pneumatic diaphragm valve 502 and the fourth pneumatic diaphragm valve 111, the second delivery pipeline can temporarily supply chemicals to the first supply point, so that the delivery equipment can be automatically cleaned without interrupting production. By controlling the opening and closing of each pneumatic diaphragm valve, the cleaning of different pipelines can be achieved, and at the same time In this way, by setting up a cleaning unit, the chemical delivery system of this embodiment can be automatically cleaned, and by setting up a switching branch, the chemical delivery system of this embodiment can automatically clean one of the delivery pipelines without interrupting production. During the cleaning process, the consistency and reliability of the cleaning effect can be guaranteed by monitoring the data of the concentration meter and the electrochemical sensor. In summary, the chemical delivery system of this embodiment forms an efficient and stable chemical delivery network, which can meet the needs of providing chemicals to two supply points at the same time; it can also be used to achieve one backup and one use when providing chemicals to a single supply point, thereby improving the reliability of the equipment.

[0070] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A chemical delivery system, suitable for high-purity chemical delivery, characterized in that: It includes a first conveying subsystem (A), a second conveying subsystem (B), a switching branch, a detection unit, a cleaning unit and a control unit; The first conveying subsystem (A) and the second conveying subsystem (B) are arranged in parallel, the first conveying subsystem (A) is directly connected to the first supply point (112), and the second conveying subsystem (B) is directly connected to the second supply point (212); The detection unit is used to monitor characteristic data of the fluid flowing in the first conveying subsystem (A) and the second conveying subsystem (B), wherein the characteristic data includes at least one of concentration and impurity metal ion content; The cleaning unit is used to clean the first conveying subsystem (A) and / or the second conveying subsystem (B); The switching branch is connected between the first conveying subsystem (A) and the second conveying subsystem (B), and is used to enable the second conveying subsystem (B) to be indirectly connected to the first supply point (112) via the switching branch to convey chemicals when the cleaning unit performs a cleaning operation on the first conveying subsystem (A), or to enable the first conveying subsystem (A) to be indirectly connected to the second supply point (212) via the switching branch to convey chemicals when the cleaning unit performs a cleaning operation on the second conveying subsystem (B); The control unit is electrically connected to the first conveying subsystem (A), the second conveying subsystem (B), the switching branch, the detection unit, and the cleaning unit.

2. The chemical delivery system according to claim 1, characterized in that: The first conveying subsystem (A) comprises a first pneumatic diaphragm valve (102), a second pneumatic diaphragm valve (103), a first metering pump (106), a third pneumatic diaphragm valve (110), and a fourth pneumatic diaphragm valve (111) which are sequentially connected in series in a first conveying pipeline; The second conveying subsystem (B) comprises a fifth pneumatic diaphragm valve (202), a sixth pneumatic diaphragm valve (203), a second metering pump (206), a seventh pneumatic diaphragm valve (210), and an eighth pneumatic diaphragm valve (211) which are sequentially connected in series in the second conveying pipeline; The detection unit comprises a first concentration meter (107) and a first electrochemical sensor (108) arranged at the outlet of the first metering pump (106), and a second concentration meter (207) and a second electrochemical sensor (208) arranged at the outlet of the second metering pump (206).

3. The chemical delivery system according to claim 2, characterized in that: One end of the switching branch is connected between the third pneumatic diaphragm valve (110) and the fourth pneumatic diaphragm valve (111), and the other end is connected between the seventh pneumatic diaphragm valve (210) and the eighth pneumatic diaphragm valve (211); a twenty-third pneumatic diaphragm valve (502) is provided on the switching branch.

4. The chemical delivery system according to claim 3, characterized in that: The cleaning unit comprises: a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent circulation recovery branch, and a purge branch; The detection branch is used to perform quantitative analysis on the chemical sample from the first delivery pipeline and / or the second delivery pipeline; The waste liquid collecting branch is used to recover the waste liquid from the first conveying pipeline and / or the second conveying pipeline, wherein the waste liquid includes residual chemical liquid and residual cleaning agent liquid; The cleaning agent supply branch and the cleaning agent circulation recovery branch cooperate to allow the cleaning agent to circulate in the first delivery pipeline and / or the second delivery pipeline; The purge branch is used to introduce high-pressure nitrogen into the first delivery pipeline and / or the second delivery pipeline.

5. The chemical delivery system according to claim 4, characterized in that: One end of the detection branch is connected between the first metering pump (106) and the third pneumatic diaphragm valve (110), and the other end is connected between the second metering pump (206) and the seventh pneumatic diaphragm valve (210); a seventeenth pneumatic diaphragm valve (506), a spectrometer (507) and an eighteenth pneumatic diaphragm valve (503) are arranged in sequence on the detection branch; wherein the spectrometer (507) is arranged between the seventeenth pneumatic diaphragm valve (506) and the eighteenth pneumatic diaphragm valve (503).

6. The chemical delivery system according to claim 5, characterized in that: One end of the waste liquid collection branch is connected between the second pneumatic diaphragm valve (103) and the first metering pump (106), and the other end is connected between the sixth pneumatic diaphragm pump (203) and the second metering pump (206); a thirteenth pneumatic diaphragm valve (602), a fourteenth pneumatic diaphragm valve (603) and a waste liquid collector (601) are provided on the waste liquid collection branch; the waste liquid collector (601) is located between the thirteenth pneumatic diaphragm valve (602) and the fourteenth pneumatic diaphragm valve (603).

7. The chemical delivery system according to claim 6, characterized in that One end of the cleaning agent supply branch is connected between the first pneumatic diaphragm valve (102) and the second pneumatic diaphragm valve (103), and the other end is connected between the fifth pneumatic diaphragm valve (202) and the sixth pneumatic diaphragm valve (203); an eleventh pneumatic diaphragm valve (301), a twelfth pneumatic diaphragm valve (305) and a cleaning agent circulation box (302) are provided on the cleaning agent supply branch; the cleaning agent circulation box (302) is located between the eleventh pneumatic diaphragm valve (301) and the twelfth pneumatic diaphragm valve (305); One end of the cleaning agent circulation recovery branch is connected between the outlet of the first metering pump (106) and the third pneumatic diaphragm pump (110), and the other end is connected between the outlet of the second metering pump (206) and the seventh pneumatic diaphragm pump (210); a nineteenth pneumatic diaphragm valve (304) and a twentieth pneumatic diaphragm valve (306) are sequentially arranged on the cleaning agent circulation recovery branch; a pipeline between the nineteenth pneumatic diaphragm valve (304) and the twentieth pneumatic diaphragm valve (306) is also connected to the cleaning liquid circulation box (302); The eleventh pneumatic diaphragm valve (301) is linked to the nineteenth pneumatic diaphragm valve (304); the twelfth pneumatic diaphragm valve (305) is linked to the twentieth pneumatic diaphragm valve (306).

8. The chemical delivery system according to claim 7, characterized in that The purge branch comprises a first purge branch and a second purge branch; the first purge branch is connected in parallel with the cleaning agent supply branch; one end of the first purge branch is connected between the first pneumatic diaphragm valve (102) and the second pneumatic diaphragm valve (103), and the other end is connected between the fifth pneumatic diaphragm valve (202) and the sixth pneumatic diaphragm valve (203); a fifteenth pneumatic diaphragm valve (404) and a sixteenth pneumatic diaphragm valve (405) are arranged in sequence on the first purge branch; a pipeline between the fifteenth pneumatic diaphragm valve (404) and the sixteenth pneumatic diaphragm valve (405) is connected to a high-pressure nitrogen supply device (401); The second purge branch is connected in parallel with the cleaning agent circulation recovery branch; one end of the second purge branch is connected between the first metering pump (106) and the third pneumatic diaphragm valve (110), and the other end is connected between the second metering pump (206) and the seventh pneumatic diaphragm valve (210); a twenty-first pneumatic diaphragm valve (504) and a twenty-second pneumatic diaphragm valve (505) are sequentially arranged on the second purge branch, and the pipeline between the twenty-first pneumatic diaphragm valve (504) and the twenty-second pneumatic diaphragm valve (505) is connected to the air duct (501); The fifteenth pneumatic diaphragm valve (404) is linked to the twenty-first pneumatic diaphragm valve (504); the sixteenth pneumatic diaphragm valve (405) is linked to the twenty-second pneumatic diaphragm valve (505).

9. The chemical delivery system according to claim 8, characterized in that The control unit is used to receive monitoring data fed back by each concentration meter and each electrochemical sensor in the detection unit; the control unit is also used to switch the open or closed state of each pneumatic diaphragm valve in the first conveying subsystem (A), the second conveying subsystem (B), the switching branch, and the cleaning unit, or to adjust the opening degree of each pneumatic diaphragm valve.

10. A cleaning method for a chemical delivery system according to any one of claims 4 to 9, characterized in that: The cleaning method comprises the following steps: When the concentration data collected by the first concentration meter (107) is abnormal and / or the first electrochemical sensor (108) collects abnormal impurity metal ion content, introducing the chemical sample from the first delivery pipeline into the detection branch to perform abnormality determination; When the detection branch determines that the chemical sample from the first delivery pipeline is abnormal, the connection between the first delivery pipeline and the first supply point (112) and the liquid storage container is cut off; Recovering the chemical waste liquid in the first conveying pipeline through the waste liquid collection branch; After the chemical residual liquid is recovered, the cleaning agent supply branch and the cleaning agent circulation recovery branch cooperate to make the cleaning agent circulate in the first delivery pipeline; When the detection data of the first concentration meter (107) and the first electrochemical sensor (108) no longer change, it is determined that the cleaning is finished, and the cleaning agent waste liquid in the first conveying pipeline is recovered through the waste liquid collection branch; After the cleaning agent waste liquid is recovered, high-pressure nitrogen is introduced into the first delivery pipeline and / or the second delivery pipeline through the purge branch.

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