A SICM scanning control method and related apparatus based on feedback quantization

Abstract

This invention relates to the field of microscopy application technology, and in particular to a SICM scanning control method and related device based on feedback quantization. The method acquires the test height, initial scanning speed, initial safe height of the test point, first speed adjustment start point, and second speed adjustment start point of the test point. It controls the scanning probe to descend from the initial safe height of the test point to the first speed adjustment start point at the initial scanning speed, intervenes with first dynamic speed adjustment, continues to descend to the second speed adjustment start point, intervenes with second dynamic speed adjustment, and continues descending until the probe detects a sudden change in ion current and stops descending. This control method solves the problems of low scanning time resolution and poor safety in existing scanning ion conductivity microscopes by setting an initial speed adjustment point that dynamically adjusts the speed according to the probe's descent position.

Description

Technical Field

[0001] This invention relates to the field of microscope application technology, specifically to a SICM scanning control method and related apparatus based on feedback quantization. Background Technology

[0002] Live cell observation is a crucial technique in biological and medical research, allowing researchers to directly observe the morphology, structure, and function of cells while they remain physiologically active. Live cell observation encompasses microscopy and imaging techniques; microscopy techniques include phase-contrast microscopy, differential interference microscopy, Hoffman modulation contrast microscopy, relief phase-contrast microscopy, fluorescence microscopy, and scanning ion conductance microscopy (SICM). SICM, with its high-resolution imaging, non-contact scanning, and diverse imaging modes, enables observation of live cells under physiological conditions without the need for sample fixation or staining. This allows SICM to more realistically reflect the morphological and functional characteristics of live cells in their physiological state, while simultaneously monitoring real-time changes in cell volume, motility, and dynamic changes on the cell surface. This facilitates research on cell behavior, intercellular interactions, and cellular responses to environmental stimuli, making it the optimal tool for live cell observation and increasingly playing a vital role in life sciences, medicine, and pharmacology.

[0003] Scanning ion conductivity microscopy utilizes a microprobe as a detection sensor to detect changes in ion current within the circuit. A piezoelectric motion controller directs the microprobe to descend in equal steps from a certain height. When the distance between the microprobe tip and the surface morphology is less than the probe diameter, the ion current in the circuit changes drastically. Based on this current change, the current morphology height is calculated, and the probe returns to scan the next location. Early equipment, due to limitations in probe control and precise positioning technology, allowed the extremely fine probe to easily come into accidental contact with the sample during scanning, leading to sample damage. Through continuous development, the scanning height detection method of scanning ion conductivity microscopy has evolved from the initial scanning method to a skip scanning method. By setting a safe height, the probe's downward path is shortened, reducing scanning time and enabling non-destructive, high-resolution imaging in liquid environments. It also provides simple, efficient, and low-damage biological / chemical excitation. However, the scanning method returns to the same safe height across different points. In practical scanning, this is limited by varying sample morphologies, easily leading to scanning path redundancy and resulting in lower scanning time resolution. Furthermore, the probe controlled by the piezoelectric controller has inertia and is prone to collisions with the sample, posing new challenges to probe limit control and path return. Therefore, there is an urgent need to develop a rapid scanning method for scanning ion conductivity microscopy that can improve scanning speed while ensuring high scanning safety. Summary of the Invention

[0004] To address the problems of low scanning time resolution and poor safety in existing scanning ion conductivity microscopy (SICM), this invention provides a SICM scanning control method and related device based on feedback quantization.

[0005] To achieve the above objectives, the present invention employs the following technical solution:

[0006] This invention provides a SICM scan control method based on feedback quantization, comprising:

[0007] Obtain the test height and initial scan speed of the test point;

[0008] Based on the test height of the test point, the initial safe height of the test point is obtained;

[0009] Based on the initial safe height of the test point, the first speed at which the test point begins adjustment and the second speed at which the test point begins adjustment are obtained.

[0010] The scanning probe is controlled to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed at which the point is adjusted. The first quantization calculation ratio of the test point is obtained, and the probe speed is adjusted according to the first quantization calculation ratio of the test point. The probe continues to descend to the second speed at which the point is adjusted, and the second quantization calculation ratio of the test point is obtained. The probe speed is adjusted according to the second quantization calculation ratio of the test point. The probe continues to descend until it detects a sudden change in ion current, at which point the descent stops.

[0011] Optionally, the method for obtaining the initial safe height of the test point based on the test height of the test point is as follows:

[0012]

[0013] in, The initial safe height for the test point; The test height of the test point. Minimum height to prevent probe collisions.

[0014] Optionally, the height of the first speed start adjustment point is 40% to 60% of the initial safe height; the height of the second speed start adjustment point is 15% to 30% of the initial safe height.

[0015] Optionally, the method for obtaining the first quantization calculation ratio of the test point and adjusting the probe speed according to the first quantization calculation ratio of the test point is as follows:

[0016] Get the probe height at the current moment;

[0017] Based on the probe height at the current moment, the first quantization ratio of the test point is obtained;

[0018] Based on the first quantization calculation ratio of the test point, the first velocity change ratio of the test point is obtained;

[0019] Based on the first velocity change ratio at the test point, the probe velocity at the current moment is obtained, and the probe is controlled to descend according to the probe velocity at the current moment to complete the probe velocity adjustment.

[0020] Optionally, the method for obtaining the first quantization calculation ratio of the test point based on the probe height at the current moment is as follows:

[0021]

[0022] The method for obtaining the first velocity change ratio of the test point based on the first quantization calculation ratio of the test point is as follows:

[0023]

[0024] The method for obtaining the probe velocity at the current moment based on the first velocity change ratio at the test point is as follows:

[0025]

[0026] in, This is the first quantization calculation ratio; This represents the current probe height. This represents the maximum height of the probe along the Z-axis. This represents the percentage change in the first velocity. This represents the current speed at which the probe descends. At this point, the probe's position is between the first speed adjustment point and the second speed adjustment point of the test point. This is the initial scan speed.

[0027] Optionally, the method for obtaining the second quantization calculation ratio of the test point and adjusting the probe speed according to the second quantization calculation ratio of the test point is as follows:

[0028] Get the probe height at the current moment;

[0029] Based on the probe height at the current moment, the second quantization ratio of the test point is obtained;

[0030] The second velocity change ratio of the test point is obtained based on the second quantization calculation ratio of the test point.

[0031] Based on the second velocity change ratio at the test point, the probe velocity at the current moment is obtained, and the probe is controlled to descend according to the probe velocity at the current moment to complete the probe velocity adjustment.

[0032] Optionally, the method for obtaining the second quantization calculation ratio of the test point based on the probe height at the current moment is as follows:

[0033]

[0034] The method for obtaining the second velocity change ratio of the test point based on the second quantization calculation ratio of the test point is as follows:

[0035]

[0036] The method for obtaining the probe velocity at the current moment based on the second velocity change ratio at the test point is as follows:

[0037]

[0038] in, This is the ratio calculated for the second quantization. This represents the current probe height. This represents the maximum height of the probe along the Z-axis. This represents the percentage change in the second velocity. This represents the current speed at which the probe descends, and at this point, the probe's position is below the starting point for adjusting the second speed. The scanning speed is the point at which the probe reaches the second speed and the adjustment position is started.

[0039] The present invention also provides a SICM scanning control system based on feedback quantization, comprising:

[0040] Test point scanning data acquisition module: used to acquire the test height and initial scanning speed of the test point;

[0041] Initial safety height acquisition module: used to obtain the initial safety height of the test point based on the test height of the test point;

[0042] Adjustment point acquisition module: used to obtain the first speed adjustment point and the second speed adjustment point based on the initial safe height of the test point;

[0043] Scanning probe control module: Used to control the scanning probe to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed at which the probe begins to adjust the point, obtain the first quantization calculation ratio of the test point, and adjust the probe speed according to the first quantization calculation ratio of the test point. It continues to descend to the second speed at which the probe begins to adjust the point, obtain the second quantization calculation ratio of the test point, and adjust the probe speed according to the second quantization calculation ratio of the test point. It continues to descend until the probe detects a sudden change in ion current and stops descending.

[0044] A terminal device includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to perform the steps of the method described above.

[0045] A computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps of the method described above.

[0046] Compared with the prior art, the present invention has the following beneficial effects:

[0047] This invention discloses a SICM scanning control method based on feedback quantization. The method acquires the test height and initial scanning speed of the test point. Based on the test height, it sequentially obtains the initial safe height, the first speed adjustment start point, and the second speed adjustment start point of the test point. The scanning probe is controlled to descend from the initial safe height of the test point at the initial scanning speed to the first speed adjustment start point, acquiring the first quantization calculation ratio of the test point, and adjusting the probe speed according to this ratio. The probe continues to descend to the second speed adjustment start point, acquiring the second quantization calculation ratio, and adjusting the probe speed according to this ratio. This descent continues until the probe detects a sudden change in ion current, at which point the descent stops. This method achieves SICM scanning control by setting an initial speed adjustment point and dynamically adjusting the speed according to the probe's descent position. While controlling the probe's rapid descent, it can switch to an extremely slow speed to approximate the changes in the sample's ion current. This highly flexible control reduces scanning instability caused by sudden speed changes and better controls the interaction force between the probe and the sample, avoiding sample damage or probe wear due to excessive force. This not only improves SICM probe scanning speed but also ensures the safety of the probe and sample during the scanning process, enhancing the accuracy and efficiency of SICM scanning. The method is simple and can better adapt to the complex morphologies of different sample surfaces, thus obtaining more comprehensive scanning information and enabling the widespread application of SICM in various fields.

[0048] This invention also provides a SICM scanning control system based on feedback quantization. By highly integrating a test point scanning data acquisition module, an initial safety height acquisition module, an adjustment point acquisition module, and a scanning probe control module, it achieves the acquisition of the test height, initial safety height, first speed adjustment point, and second speed adjustment point of the test point. It also controls the scanning probe to descend from the initial safety height of the test point at the initial scanning speed to the first speed adjustment point, acquire the first quantization calculation ratio of the test point, adjust the probe speed according to the first quantization calculation ratio, continue descending to the second speed adjustment point, acquire the second quantization calculation ratio of the test point, adjust the probe speed according to the second quantization calculation ratio, and continue descending until the probe detects a sudden change in ion current, at which point the descent stops. The test point scanning data acquisition module is responsible for acquiring the test height and initial scanning speed of the test point, laying the foundation for subsequent quantization calculations and probe speed adjustment; the initial safety height acquisition module is responsible for acquiring the initial safety height, providing a guarantee for the safe descent of the probe; the adjustment point acquisition module is responsible for obtaining the first speed adjustment point and the second speed adjustment point of the test point based on the initial safety height of the test point, providing a point basis for subsequent probe speed adjustment; the scanning probe control module is responsible for precisely controlling the probe descent speed according to instructions, achieving rapid scanning while improving scanning accuracy and safety. This structure is simple, responsive, and applicable to the acquisition of sample morphology in different fields.

[0049] The present invention also provides a terminal device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement the steps of the above-described method. The device has a simple structure, low modification cost, and minimal resource consumption.

[0050] A computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the method described above. This storage medium is portable and versatile. Attached Figure Description

[0051] Figure 1 This is a schematic flowchart of a SICM scanning control method based on feedback quantization according to the present invention.

[0052] Figure 2 This is a diagram of a SICM scanning control process based on feedback quantization in an embodiment of the present invention.

[0053] Figure 3This is a structural diagram of a SICM scanning control system based on feedback quantization according to the present invention. Detailed Implementation

[0054] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0055] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0056] The present invention will be further described in detail below with reference to specific embodiments. These descriptions are for explanation purposes only and are not intended to limit the scope of the invention.

[0057] See Figure 1 This invention discloses a SICM scan control method based on feedback quantization, comprising:

[0058] S1: Obtain the test height and initial scanning speed of the test point; the test height of the test point is the height value obtained during the initial preparation process of searching the substrate; the initial scanning speed is the initial probe descent speed, which is set according to the characteristics of the scanned sample and the specific situation during scanning.

[0059] S2: Based on the test height of the test point, obtain the initial safe height of the test point, specifically as follows:

[0060]

[0061] in, The initial safe height for the test point; The test height of the test point. Minimum height to prevent probe collisions.

[0062] S3: Based on the initial safe height of the test point, determine the first speed at which the test point begins adjustment and the second speed at which the test point begins adjustment, specifically as follows:

[0063] The height of the first speed adjustment start point is 40% to 60% of the initial safe height, preferably 50%; the height of the second speed adjustment start point is 30% of the initial safe height. Both the first and second speed adjustment start points are points where the speed feedback calculation program intervenes, and precise control of speed changes begins from these points.

[0064] S4: Control the scanning probe to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed of the test point to start adjusting the point, obtain the first quantization calculation ratio of the test point, and adjust the probe speed according to the first quantization calculation ratio of the test point. Continue to descend to the second speed of the test point to start adjusting the point, obtain the second quantization calculation ratio of the test point, and adjust the probe speed according to the second quantization calculation ratio of the test point. Continue to descend until the probe detects a sudden change in ion current and stops descending.

[0065] The method for obtaining the first quantization calculation ratio of the test point and adjusting the probe speed according to the first quantization calculation ratio of the test point is as follows:

[0066] S4101: Get the probe height at the current moment;

[0067] S4102: Based on the probe height at the current moment, obtain the first quantization calculation ratio of the test point, specifically:

[0068]

[0069] in, This is the first quantization calculation ratio; This represents the current probe height. This represents the maximum height of the probe along the Z-axis.

[0070] S4103: Based on the first quantization calculation ratio of the test point, the first velocity change ratio of the test point is obtained, specifically:

[0071]

[0072] in, This represents the percentage change in the first velocity.

[0073] S4104: Based on the first velocity change ratio at the test point, obtain the probe velocity at the current moment, and control the probe to descend according to the probe velocity at the current moment to complete the probe velocity adjustment, specifically:

[0074]

[0075] in, This represents the current speed at which the probe descends. At this point, the probe's position is between the first speed adjustment point and the second speed adjustment point of the test point. This is the initial scan speed.

[0076] The method for obtaining the second quantization calculation ratio of the test point and adjusting the probe speed according to the second quantization calculation ratio of the test point is as follows:

[0077] S4201: Get the probe height at the current moment;

[0078] S4202: Based on the probe height at the current moment, the second quantization calculation ratio of the test point is obtained, specifically:

[0079]

[0080] in, This is the ratio calculated for the second quantization. This represents the current probe height. This represents the maximum height of the probe along the Z-axis.

[0081] S4203: Based on the second quantization calculation ratio of the test point, the second velocity change ratio of the test point is obtained, specifically:

[0082]

[0083] in, This represents the percentage change in the second velocity.

[0084] S4204: Based on the second velocity change ratio at the test point, obtain the probe velocity at the current moment, and control the probe to descend according to the probe velocity at the current moment to complete the probe velocity adjustment, specifically:

[0085]

[0086] in, This represents the current speed at which the probe descends, and at this point, the probe's position is below the starting point for adjusting the second speed. The scanning speed is the point at which the probe reaches the second speed and the adjustment position is started.

[0087] Taking the observation of a single living cell as an example, the above method will be further explained:

[0088] See Figure 2 The preliminary preparation process has been completed, and the test height of the test points obtained during the preliminary preparation process has been determined through preliminary exploration. According to the test height The initial safe height is calculated. Set the initial speed to The scanning probe is set to descend from the initial safe height of the test point to initialize the height information. Once the probe reaches the first speed, the position is adjusted. Initially, the first speed adjustment is initiated, and the probe height is set to... The first quantization ratio is calculated according to formula (2). According to formula (3), the change ratio of the first velocity is calculated as follows: Then, the probe's downward velocity at the current moment can be calculated according to formula (4). The probe's descent is controlled based on the probe's descent speed acquired at each moment. When the probe reaches the second speed adjustment point... At that time, the second speed adjustment begins to intervene, assuming the probe height is... The second quantization ratio is calculated according to formula (5). The change ratio of the second velocity is calculated according to formula (6). The probe's downward velocity at the current moment is calculated according to formula (7). The probe is controlled to descend based on the probe descent speed acquired at each moment. When the probe detects a sudden change in ion current, it stops descending, records the current height and current information, and moves to the next measurement point to repeat the above process until all measurement points are scanned.

[0089] See Figure 3 This invention provides a SICM scanning control system based on feedback quantization, comprising:

[0090] Test point scanning data acquisition module: used to acquire the test height and initial scanning speed of the test point;

[0091] Initial safety height acquisition module: used to obtain the initial safety height of the test point based on the test height of the test point;

[0092] Adjustment point acquisition module: used to obtain the first speed adjustment point and the second speed adjustment point based on the initial safe height of the test point;

[0093] Scanning probe control module: Used to control the scanning probe to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed at which the probe begins to adjust the point, obtain the first quantization calculation ratio of the test point, and adjust the probe speed according to the first quantization calculation ratio of the test point. It continues to descend to the second speed at which the probe begins to adjust the point, obtain the second quantization calculation ratio of the test point, and adjust the probe speed according to the second quantization calculation ratio of the test point. It continues to descend until the probe detects a sudden change in ion current and stops descending.

[0094] This invention provides a terminal device comprising: a processor, a memory, and a computer program stored in the memory and executable on the processor. When the processor executes the computer program, it implements the steps in the various method embodiments described above. Alternatively, when the processor executes the computer program, it implements the functions of each module / unit in the various device embodiments described above.

[0095] The computer program can be divided into one or more modules / units, which are stored in the memory and executed by the processor to complete the present invention.

[0096] The terminal device may be a desktop computer, laptop, handheld computer, or cloud server, etc. The terminal device may include, but is not limited to, a processor and a memory.

[0097] The processor may be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.

[0098] The memory can be used to store the computer program and / or module. The processor implements various functions of the terminal device by running or executing the computer program and / or module stored in the memory and calling the data stored in the memory.

[0099] If the modules / units integrated into the terminal device are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, all or part of the processes in the methods of the above embodiments can also be implemented by a computer program instructing related hardware. The computer program can be stored in a computer-readable storage medium, and when executed by a processor, it can implement the steps of the various method embodiments described above. The computer program includes computer program code, which can be in the form of source code, object code, executable files, or certain intermediate forms. The computer-readable medium can include: any entity or device capable of carrying the computer program code, recording media, USB flash drives, portable hard drives, magnetic disks, optical disks, computer memory, read-only memory (ROM), random access memory (RAM), electrical carrier signals, telecommunication signals, and software distribution media, etc. It should be noted that the content included in the computer-readable medium can be appropriately added or removed according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electrical carrier signals and telecommunication signals.

[0100] In summary, this invention provides a SICM scanning control method and related device based on feedback quantization. This invention calculates the corresponding speed based on the probe's different positions during the descent process, controlling the probe to descend rapidly. This method can switch to an extremely slow speed to approximate the changes in the ion current detected in the sample, achieving highly flexible probe descent, improving rapid SICM probe scanning, ensuring probe and sample safety during the scanning process, enhancing the accuracy and efficiency of SICM scanning, and providing possibilities for the widespread application of SICM in various fields.

[0101] The above description is merely a preferred embodiment of the present invention and is not intended to limit the technical solution of the present invention in any way. Those skilled in the art should understand that, without departing from the spirit and principles of the present invention, the technical solution can be modified and replaced in several simple ways, and these modifications and replacements are all within the scope of protection covered by the claims.

Claims

1. A method of SICM scanning control based on feedback quantification, characterised in that, include: Obtain the test height and initial scan speed of the test point; Based on the test height of the test point, the initial safe height of the test point is obtained; Based on the initial safe height of the test point, the first speed at which the test point begins adjustment and the second speed at which the test point begins adjustment are obtained. The scanning probe is controlled to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed at which the point is adjusted. The first quantization calculation ratio of the test point is obtained, and the probe speed is adjusted according to the first quantization calculation ratio of the test point. The probe continues to descend to the second speed at which the point is adjusted, and the second quantization calculation ratio of the test point is obtained. The probe speed is adjusted according to the second quantization calculation ratio of the test point. The probe continues to descend until it detects a sudden change in ion current, at which point the descent stops. The method for obtaining the first quantization ratio of the test point based on the probe height at the current moment is as follows: The method for obtaining the first velocity change ratio of the test point based on the first quantization calculation ratio is as follows: The method for obtaining the probe velocity at the current moment based on the first velocity change ratio at the test point is as follows: in, This is the first quantization calculation ratio; This represents the current probe height. This represents the maximum height of the probe along the Z-axis. This represents the percentage change in the first velocity. This represents the current speed at which the probe descends. At this point, the probe's position is between the first speed adjustment point and the second speed adjustment point of the test point. This is the initial scan speed.

2. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that, The method for obtaining the initial safe height of the test point based on the test height is as follows: in, The initial safe height for the test point; The test height of the test point. Minimum height to prevent probe collisions.

3. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that, The height of the first speed adjustment point is 40% to 60% of the initial safe height; the height of the second speed adjustment point is 15% to 30% of the initial safe height.

4. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that, The method for obtaining the first quantization calculation ratio of the test point and adjusting the probe speed according to the first quantization calculation ratio of the test point is as follows: Get the probe height at the current moment; Based on the probe height at the current moment, the first quantization ratio of the test point is obtained; Based on the first quantization calculation ratio of the test point, the first velocity change ratio of the test point is obtained; Based on the first velocity change ratio at the test point, the probe velocity at the current moment is obtained, and the probe is controlled to descend according to the probe velocity at the current moment to complete the probe velocity adjustment.

5. The SICM scanning control method based on feedback quantization according to claim 1, characterized in that, The method for obtaining the second quantization calculation ratio of the test point and adjusting the probe speed according to the second quantization calculation ratio of the test point is as follows: Get the probe height at the current moment; Based on the probe height at the current moment, the second quantization ratio of the test point is obtained; The second velocity change ratio of the test point is obtained based on the second quantization calculation ratio of the test point. Based on the second velocity change ratio at the test point, the probe velocity at the current moment is obtained, and the probe is controlled to descend according to the probe velocity at the current moment to complete the probe velocity adjustment.

6. The SICM scanning control method based on feedback quantization according to claim 5, characterized in that, The method for obtaining the second quantization calculation ratio of the test point based on the probe height at the current moment is as follows: The method for obtaining the second velocity change ratio of the test point based on the second quantization calculation ratio of the test point is as follows: The method for obtaining the probe velocity at the current moment based on the second velocity change ratio at the test point is as follows: in, This is the ratio calculated for the second quantization. This represents the current probe height. This represents the maximum height of the probe along the Z-axis. This represents the percentage change in the second velocity. This represents the current speed at which the probe descends, and at this point, the probe's position is below the starting point for adjusting the second speed. The scanning speed is the point at which the probe reaches the second speed and the adjustment position is started.

7. A SICM scanning control system based on feedback quantization, characterized in that, include: Test point scanning data acquisition module: used to acquire the test height and initial scanning speed of the test point; Initial safety height acquisition module: used to obtain the initial safety height of the test point based on the test height of the test point; Adjustment point acquisition module: used to obtain the first speed adjustment point and the second speed adjustment point based on the initial safe height of the test point; Scanning probe control module: Used to control the scanning probe to descend from the initial safe height of the test point at the initial scanning speed of the test point to the first speed of the test point, adjust the point, obtain the first quantization calculation ratio of the test point, and adjust the probe speed according to the first quantization calculation ratio of the test point, continue to descend to the second speed of the test point, obtain the second quantization calculation ratio of the test point, and adjust the probe speed according to the second quantization calculation ratio of the test point, continue to descend until the probe detects a sudden change in ion current, and then stops descending; The method for obtaining the first quantization ratio of the test point based on the probe height at the current moment is as follows: The method for obtaining the first velocity change ratio of the test point based on the first quantization calculation ratio is as follows: The method for obtaining the probe velocity at the current moment based on the first velocity change ratio at the test point is as follows: in, This is the first quantization calculation ratio; This represents the current probe height. This represents the maximum height of the probe along the Z-axis. This represents the percentage change in the first velocity. This represents the current speed at which the probe descends. At this point, the probe's position is between the first speed adjustment point and the second speed adjustment point of the test point. This is the initial scan speed.

8. A terminal device, comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the steps of the method as described in any one of claims 1-6.

9. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by a processor, it implements the steps of the method as described in any one of claims 1-6.

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