Automatic cooling system for recycled liquid
By designing a recycled liquid automatic cooling system, the problem of diamond wire fracture caused by excessive cutting temperature in solar silicon wafer multi-wire cutting machines is solved, and the reuse efficiency of cutting fluid is improved through distillation and cooling treatment, ensuring the stability and efficiency of the cutting process.
Patent Information
- Application Number
- CN202510210395.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-25
- Publication Date
- 2025-05-16
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In a solar silicon wafer multi-wire cutting machine, the cutting temperature during the cutting process causes the diamond wire to break, and the temperature rises after use, affecting the normal operation of the product.
Design a recycled liquid automatic cooling system, including a spray box, a working box, a filter box, a distillation ring and a cooling cylinder, and the cutting fluid is treated by cooling the spray box, removing impurities from the filter box, distillation ring, and reusing the distillation ring and cooling the cooling cylinder.
It effectively reduces the risk of breaking the diamond wire, improves the efficiency of reuse of cutting fluid, ensures temperature control during cutting, and avoids product abnormalities.
Smart Images

Figure CN120002835A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of cooling and recycling cutting fluid, in particular to an automatic cooling system for recycled fluid. Background Art
[0002] During the cutting process of the solar silicon wafer multi-wire saw, if the cutting temperature is too high, it will cause high-frequency cyclic quenching of the diamond wire, resulting in the breakage of the diamond wire and causing product degradation or scrapping. Therefore, a cutting agent solution (referred to as cutting fluid) is required to assist in cooling the heat generated by the diamond wire when cutting crystalline silicon. The cutting fluid used for diamond wire cutting is replaced once per cut. The collected cutting fluid needs to be pressed, filtered, diluted, and stirred, and the cutting agent is added again for use. In the above process, the cutting fluid temperature will rise and exceed the temperature required by the multi-wire saw, causing product abnormalities.
[0003] The prior art discloses a Chinese patent with application number CN201810977876.X, a silicon wafer cutting machine cutting fluid cooling device and cooling method, which discloses that after the cutting fluid flows out of the cooling tower, a temperature detector 1 can detect whether the water temperature meets the standard. If the water temperature meets the standard, the cutting fluid enters the diverter valve 2 and the chiller is not started. If the water temperature does not meet the standard, the cutting fluid enters the diverter valve 2 and the chiller is started to cool the cutting fluid.
[0004] The above device detects the temperature of the cutting fluid through a temperature detector to determine whether cooling is required. However, after the cutting fluid is used, a large amount of metal impurities are mixed inside. If the cutting fluid is cooled directly, the cutting effect will be affected, and the purity of the cutting fluid will also be affected. Therefore, the cutting fluid needs to be processed for reuse. Summary of the invention
[0005] The object of the present invention is to provide a recovery liquid automatic cooling system to solve the problems raised in the above background technology.
[0006] The purpose of the present invention can be achieved through the following technical solutions:
[0007] A system for automatically cooling recovered liquid comprises a bottom plate, a working box is fixedly mounted on one side of the upper surface of the bottom plate through a mounting frame, the middle part of the working box is sunken, a filter plate is placed in the middle part of the working box, spraying boxes are arranged on both sides of the upper part of the working box, a circulating pump connected to the bottom plate is arranged below the working box, a filtration box connected to the inner cavity of the working box is fixedly mounted on the lower part of one side of the working box, a connecting pipe is fixedly mounted on the side of the filtration box away from the working box, two fixing frames fixedly connected to the base are arranged on the front side of the working box, a water filter ring and a distillation ring are sequentially mounted between the two fixing frames from top to bottom, a containing frame is slidably mounted in the inner cavity of the distillation ring, a plurality of circumferentially arranged vertical pipes are commonly mounted between the water filter ring and the distillation ring, a rectangular pipe connected to the interior of the water filter ring is horizontally fixedly mounted in the middle part of the water filter ring, and a plurality of drainage pipes arranged at equal intervals are commonly mounted between the connecting pipe and the rectangular pipe.
[0008] Furthermore, a cooling cylinder is provided above the water filter ring, and a supporting frame fixed to the bottom plate is provided on the outside of the cooling cylinder, and multiple groups of annularly arranged end tubes are rotatably installed on both sides of the cooling cylinder, and an external tube is commonly connected between each group of end tubes, and an internal tube is provided inside the external tube. A collecting cylinder is fixedly installed in the middle of the cooling cylinder on one side, and a plurality of connecting tubes rotatably connected to the multiple groups of external tubes are provided on the collecting cylinder. Collecting boxes are provided on both sides of the water filter ring, and a drainage pipe is commonly connected between the collecting boxes on both sides and the water filter ring. A guide pipe is fixedly installed on the collecting cylinder, a water pipe is provided between the guide pipe and the circulation pump, and a U-shaped pipe is connected to the circulation pump.
[0009] Furthermore, an air cooling box is installed in an enclosing manner on the outside of the working box, and through holes connected to the air cooling box are opened around the working box. A fan fixedly connected to the inner wall of the air cooling box is provided on the outside of the through hole, and vertical plates connected to the top of the air cooling box are provided at both ends of the spray box. The vertical plates and the spray box are slidably connected through an electric slider.
[0010] Furthermore, a guide plate is fixedly installed in the middle of the inner cavity of the working box, and receiving plates fixed to the inner wall of the working box are provided on both sides below the guide plate. A push rod slidably connected to the side wall of the working box is provided on the side of the working box close to the filter box, and a cleaning plate located in the inner cavity of the working box is fixedly installed at one end of the push rod, and a fixing plate located outside the working box is provided on one side of the cleaning plate. A threaded rod is rotatably installed on the middle part of the fixing plate, and a blocking plate is rotatably installed on the lower end of the threaded rod. The blocking plate penetrates and slides on the inner wall of the working box, a transversely arranged rotating rod is rotatably installed in the middle part of the filter box, and a circumferentially arranged magnetic suction plate is detachably installed on the outside of the rotating rod, and a transverse groove is provided at the upper end of the filter box.
[0011] Furthermore, an annular groove is provided at the lower part of the distillation circle, and teeth arranged at equal intervals are fixedly installed on the lower end surface of the containing rack. Two fixing parts fixed to the bottom plate are provided below the teeth, and a driving wheel meshing with the teeth is installed between the two fixing parts through the rotation of a motor. A pressure pipe is commonly connected between the multiple discharge pipes, and a pressure cylinder fixed to the connecting pipe is provided at one end of the pressure pipe, and one end of the pressure pipe is connected to the pressure cylinder.
[0012] Furthermore, an outer pipe is fixedly installed on one side of the vertical pipe, a replacement groove connected to the vertical pipe is opened in the middle of the outer pipe, and a filter is placed between the replacement groove and the vertical pipe.
[0013] Furthermore, a water cooling cavity is provided between the external tube and the internal tube, a rotating wheel is fixedly installed on the end tube on one side, an infusion cavity is opened in the middle of the end tube on one side, the infusion cavity is connected with the internal tube, a water delivery cavity is provided on the end tube outside the infusion cavity, the water delivery cavity is connected with the water cooling cavity, and a water injection port is fixedly installed on the end tube on one side, and the water injection port is connected with the water delivery cavity.
[0014] Furthermore, two symmetrically arranged suction pipes are provided at the lower end of the guide pipe, and one end of the suction pipe away from the guide pipe passes through the distillation circle and is located in the holding frame. Two symmetrical air transfer pipes are commonly connected between the distillation circle and the cooling cylinder.
[0015] Furthermore, both ends of the U-shaped tube are respectively connected to liquid supply pipes, and one end of the liquid supply pipe away from the U-shaped tube is connected to the spray box.
[0016] Furthermore, a collecting bucket connected to the inner cavity of the working box is fixedly installed on the outer wall of the working box, a center wheel meshing with the rotating wheel is rotatably installed in the middle of one side of the cooling cylinder, a rotating shaft is fixedly installed in the middle of the center wheel, pulleys are fixedly installed on one end of the rotating rod and the rotating shaft, and a belt is provided between the pulleys.
[0017] Beneficial effects of the present invention:
[0018] 1. The present invention injects a certain proportion of cutting fluid and water into the spray box in advance. When the spray box is turned on, the diamond wire can be cooled when the silicon wafer is cut, so as to avoid the high-frequency cyclic quenching of the diamond wire caused by the cutting temperature being too high, and the diamond wire breaking causing the product degradation or scrapping accident. The working box is set as a sinking type, so that the cutting fluid sprayed on the silicon wafer can be blocked and concentrated to fall through the filter plate. The used cutting fluid flows from the working box to the filter box, and the impurities are adsorbed in the filter box. The cutting fluid is transported to the water filter circle through the connecting pipe and the drain pipe, and finally falls into the distillation circle, so as to complete the subsequent distillation and reuse of the cutting fluid. The distillation circle The cutting fluid can be distilled. Since the cutting fluid is mixed with pure cutting fluid and pure water in proportion when in use, the pure water in the cutting fluid evaporates into the water filter circle when the cutting fluid is distilled after use, and then discharged into the collection box through the drain pipe, and the pure cutting fluid remains in the distillation circle. The distillation circle can distill the cutting fluid. Since the cutting fluid is mixed with pure cutting fluid and pure water in proportion when in use, the pure water in the cutting fluid evaporates into the water filter circle when the cutting fluid is distilled after use, and then discharged into the collection box through the drain pipe, and the pure cutting fluid remains in the distillation circle.
[0019] 2. The present invention can transport the purified cutting fluid to the collecting tube through the guide tube. The purified cutting fluid in the collecting tube has a high temperature and needs to be cooled when it is used for the second time. The high-temperature cutting fluid is transported to the built-in tube through the connecting tube. The cold water in the water-cooling chamber can perform water cooling on the high-temperature cutting fluid in the built-in tube. The built-in tube and the external tube are both spirally arranged and the external tube surrounds the built-in tube in all directions. Therefore, the high-temperature cutting fluid can be cooled to a certain extent when it flows and is injected into the built-in tube and contacts the wall of the built-in tube. The setting of the cooling tube can It is able to collect the hot air generated by the high-temperature cutting fluid during cooling and heat exchange, and transmit it to the distillation circle through the air transfer pipe, so as to collect the hot air required for purification of the used cutting fluid, so that the hot air generated when the cutting fluid is cooled can be collected and reused. The cutting fluid after cooling in the built-in pipe is retained in the collecting cylinder through the connecting pipe, and then transported to the circulating pump through the water pipe between the guide pipe and the circulating pump. Then, the circulating pump is turned on to transport the cooled cutting fluid to the spray box through the U-tube and the liquid supply pipe, so that the treated cutting fluid can be reused.
[0020] 3. The present invention can make the cutting fluid flowing down from the top flow slowly to the bottom of the working box through the arrangement of the guide plate and the receiving plate, so as to settle the dust in the cutting fluid at the bottom of the working box when the silicon wafer is cut, and the impurities in the working box can be cleaned by pushing the push rod, and the push rod drives the cleaning plate to move, and the threaded rod is rotated, and the blocking plate is driven to rise when the threaded rod rotates, and the cutting fluid in the working box flows into the filtration box when the blocking plate rises, and the cutting fluid impacts the magnetic suction plate when flowing, and the multiple magnetic suction plates rotate continuously to absorb the metal impurities in the cutting fluid when the silicon wafer is cut, so as to recycle them, and the magnetic suction plates that have been used for a period of time are disassembled and cleaned through the transverse grooves, thereby ensuring the adsorption performance of the magnetic suction plates on the metal impurities in the cutting fluid.
[0021] 4. The present invention starts the motor to drive the driving wheel to rotate. When the driving wheel rotates, it meshes with the teeth to drive the holding rack to rotate in the distillation circle, so that the cutting fluid in the holding rack rotates continuously during distillation, so that the purification of the cutting fluid can be completed more fully and evenly. Water is injected into the water injection port so that the injected cold water flows through the water transfer cavity to the water cooling cavity, so as to cool down the high-temperature cutting fluid injected into the built-in tube. The setting of the rotating wheel can make multiple external tubes rotate when the central wheel rotates, thereby causing the cutting fluid in the built-in tube to rotate, thereby accelerating the cooling of the cutting fluid. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative work.
[0023] Figure 1 It is a schematic diagram of the front structure of the present invention;
[0024] Figure 2 The present invention Figure 1 A schematic diagram of the enlarged structure of part A;
[0025] Figure 3 It is a schematic diagram of the rear structure of the present invention;
[0026] Figure 4 It is a schematic diagram of the overall side sectional structure of the present invention;
[0027] Figure 5 The present invention Figure 4 A schematic diagram of the enlarged structure of part B;
[0028] Figure 6 It is a schematic diagram of the upper structure of the bottom plate of the present invention;
[0029] Figure 7 It is a schematic diagram of the distillation circle and the water filter circle of the present invention when viewed from above;
[0030] Figure 8 It is a schematic diagram of the cross-sectional structure of the distillation circle and the water filter circle of the present invention;
[0031] Fig. 9 The present invention Figure 8 Schematic diagram of the enlarged structure of part C;
[0032] Fig.10 It is a schematic diagram of the outer structure of the cooling cylinder of the present invention;
[0033] Fig.11 It is a schematic diagram of the internal structure of the cooling cylinder of the present invention;
[0034] Fig.12 It is a schematic diagram of the cross-sectional structure between the end tube and the external tube of the present invention.
[0035] The reference numerals in the figures are as follows:
[0036] 1. Bottom plate; 21. Working box; 22. Filter plate; 23. Air cooling box; 231. Vertical plate; 232. Spray box; 24. Through port; 25. Fan; 26. Guide plate; 261. Receiver plate; 27. Push rod; 271. Cleaning plate; 272. Collecting bucket; 28. Fixed plate; 281. Threaded rod; 282. Blocking plate; 29. Filter box; 291. Rotating rod; 292. Magnetic plate; 293. Connecting pipe; 31. Fixed frame; 32. Distillation circle; 321. Annular groove; 322. Container; 323. Teeth; 33. Water filter circle; 331. Rectangular tube; 332. Drain pipe; 333. Pressurized pipe ; 334, pressurizing cylinder; 34, fixing piece; 341, driving wheel; 35, vertical pipe; 351, outer edge pipe; 352, replacement groove; 353, filter screen; 36, drain pipe; 41, support frame; 42, cooling cylinder; 43, end pipe; 430, rotating wheel; 431, water delivery cavity; 432, infusion cavity; 433, water injection port; 434, connecting pipe; 44, external pipe; 440, water cooling cavity; 441, internal pipe; 45, collecting cylinder; 46, guide pipe; 461, suction pipe; 47, air transfer pipe; 48, center wheel; 481, rotating shaft; 5, collecting box; 51, circulating pump; 52, U-shaped pipe; 53, liquid supply pipe. DETAILED DESCRIPTION
[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0038] like Figure 1-Figure 12 As shown, a recycling liquid automatic cooling system comprises a bottom plate 1, a working box 21 is fixedly installed on one side of the upper end surface of the bottom plate 1 through a mounting frame, the middle of the working box 21 is sunken, a filter plate 22 is placed in the middle of the working box 21, spray boxes 232 are arranged on both sides of the upper part of the working box 21, a circulating pump 51 connected to the bottom plate 1 is arranged below the working box 21, a filter box 29 connected to its inner cavity is fixedly installed at the lower part of one side of the working box 21, and a connecting pipe 293 is fixedly installed on the side of the filter box 29 away from the working box 21 Two fixing frames 31 fixedly connected to the base are provided on the front side of the working box 21, and a water filter ring 33 and a distillation ring 32 are installed between the two fixing frames 31 from top to bottom in sequence, a holding frame 322 is slidably installed in the inner cavity of the distillation ring 32, and a plurality of circumferentially arranged vertical pipes 35 are installed between the water filter ring 33 and the distillation ring 32, a rectangular tube 331 connected to the interior of the water filter ring 33 is fixedly installed horizontally in the middle part of the water filter ring 33, and a plurality of drainage pipes 332 arranged at equal intervals are installed between the connecting pipe 293 and the rectangular tube 331.
[0039] The silicon wafer placed on the filter plate 22 is cut by an external multi-wire cutting machine. A certain proportion of cutting fluid and water is injected into the spray box 232 in advance. When the spray box 232 is opened, the diamond wire can be cooled when the silicon wafer is cut to avoid high-frequency cyclic quenching of the diamond wire due to too high cutting temperature, which may cause the diamond wire to break and cause product degradation or scrapping. The operation box 21 is set as a sinking type, which can resist and block the cutting fluid sprayed on the silicon wafer, so that it can be concentrated and fall through the filter plate 22. The used cutting fluid flows from the operation box 21 to the filter box 29 and And the impurities are adsorbed in the filter box 29, and the cutting fluid is transported to the water filter circle 33 through the connecting pipe 293 and the drain pipe 332 and finally falls into the distillation circle 32, so as to complete the subsequent distillation and reuse of the cutting fluid. The distillation circle 32 can distill the cutting fluid. Since the cutting fluid is mixed with pure cutting fluid and pure water in proportion when in use, when the cutting fluid is distilled after use, the pure water in the cutting fluid evaporates into the water filter circle 33, and then discharged into the collection box 5 through the drain pipe 36, and the pure cutting fluid remains in the distillation circle 32.
[0040] A cooling cylinder 42 is provided above the water filter ring 33, and a support frame 41 fixed to the bottom plate 1 is provided on the outside of the cooling cylinder 42. Multiple groups of annularly arranged end tubes 43 are rotatably installed on both sides of the cooling cylinder 42, and an external tube 44 is commonly connected between each group of end tubes 43. An internal tube 441 is provided inside the external tube 44. A collecting cylinder 45 is fixedly installed in the middle of the cooling cylinder 42 on one side, and a plurality of connecting tubes 434 rotatably connected to the multiple groups of external tubes 44 are provided on the collecting cylinder 45. Collecting boxes 5 are provided on both sides of the water filter ring 33, and a drainage pipe 36 is commonly connected between the collecting boxes 5 on both sides and the water filter ring 33. A guide pipe 46 is fixedly installed on the collecting cylinder 45, and a water pipe is provided between the guide pipe 46 and the circulation pump 51, and a U-shaped pipe 52 is connected to the circulation pump 51.
[0041] The purified cutting fluid can be transported to the collecting tube 45 through the guide tube 46. The purified cutting fluid in the collecting tube 45 needs to be cooled down when it is used for the second time because of its high temperature. The high-temperature cutting fluid is transported to the built-in tube 441 through the connecting tube 434. The cold water in the water-cooling chamber 440 can cool the high-temperature cutting fluid in the built-in tube 441. The built-in tube 441 and the external tube 44 are both spirally arranged and the external tube 44 surrounds the built-in tube 441 in all directions. Therefore, the high-temperature cutting fluid can be cooled down to a certain extent when it flows and is injected into the built-in tube 441 and contacts the wall of the built-in tube 441. The device can collect the hot air generated by the high-temperature cutting fluid during cooling and heat exchange, and transmit it to the distillation circle 32 through the air transfer pipe 47, so as to collect the hot air required for purification of the used cutting fluid, so that the hot air generated when the cutting fluid is cooled can be collected and reused. The cutting fluid that has been cooled in the built-in pipe 441 is retained in the collecting cylinder 45 through the connecting pipe 434, and then is transported to the circulating pump 51 through the water pipe between the guide pipe 46 and the circulating pump 51. Then, the circulating pump 51 is turned on to transport the cooled cutting fluid through the U-tube 52 and the liquid supply pipe 53 to the spray box 232, so that the treated cutting fluid can be reused.
[0042] An air cooling box 23 is installed in an enclosing manner on the outside of the working box 21. Through holes 24 connected to the air cooling box 23 are opened around the working box 21. A fan 25 fixedly connected to the inner wall of the air cooling box 23 is provided on the outside of the through hole 24. Vertical plates 231 connected to the top of the air cooling box 23 are provided at both ends of the spray box 232. The vertical plates 231 and the spray box 232 are slidably connected by an electric slider.
[0043] By turning on the fan 25, the diamond wire can be air-cooled when cutting the silicon wafer, so that the diamond wire can be cooled by the cutting fluid while also being air-cooled, thereby achieving multiple cooling operations. In addition, by setting the air-cooling box 23 and the through-hole 24, the fan 25 can be turned on to cool the surrounding areas of the sunken working box 21.
[0044] A guide plate 26 is fixedly installed in the middle of the inner cavity of the work box 21, and receiving plates 261 fixed to the inner wall of the work box 21 are provided on both sides below the guide plate 26. A push rod 27 slidably connected to the side wall of the work box 21 is provided on the side of the work box 21 close to the filter box 29. A cleaning plate 271 located in the inner cavity of the work box 21 is fixedly installed at one end of the push rod 27. A fixed plate 28 located on the outside of the work box 21 is provided on one side of the cleaning plate 271. A threaded rod 281 is rotatably installed on the middle part of the fixed plate 28, and a blocking plate 282 is rotatably installed on the lower end of the threaded rod 281. The blocking plate 282 penetrates and slides on the inner wall of the work box 21. A transversely arranged rotating rod 291 is rotatably installed in the middle part of the filter box 29, and a circumferentially arranged magnetic suction plate 292 is detachably installed on the outside of the rotating rod 291. A transverse groove is provided at the upper end of the filter box 29.
[0045] By setting the guide plate 26 and the receiving plate 261, the cutting fluid flowing down from the top can slowly flow to the bottom of the working box 21, so that the dust in the cutting fluid at the bottom of the working box 21 when the silicon wafer is cut can be precipitated. By pushing the push rod 27, the push rod 27 drives the cleaning plate 271 to move, so as to clean the impurities in the working box 21, and rotate the threaded rod 281. When the threaded rod 281 rotates, it drives the blocking plate 282 to rise. When the blocking plate 282 rises, the cutting fluid in the working box 21 flows into the filtration box 29, and the cutting fluid impacts the magnetic suction plate 292 when flowing. The multiple magnetic suction plates 292 rotate continuously to absorb the metal impurities in the cutting fluid when the silicon wafer is cut, so as to recycle them, and the magnetic suction plates 292 that have been used for a period of time are disassembled and cleaned through the transverse grooves, so as to ensure the adsorption performance of the magnetic suction plates 292 on the metal impurities in the cutting fluid.
[0046] An annular groove 321 is provided at the lower part of the distillation ring 32, and teeth 323 arranged at equal intervals are fixedly installed on the lower end surface of the receiving frame 322. Two fixing parts 34 fixed to the bottom plate 1 are provided below the teeth 323, and a driving wheel 341 meshing with the teeth 323 is installed between the two fixing parts 34 through the rotation of a motor. A pressurizing pipe 333 is commonly connected to the multiple discharge pipes 332, and a pressurizing cylinder 334 fixed to the connecting pipe 293 is provided at one end of the pressurizing pipe 333, and one end of the pressurizing pipe 333 is connected to the pressurizing cylinder 334.
[0047] The motor is turned on to drive the driving wheel 341 to rotate. When the driving wheel 341 rotates, it engages with the teeth 323 to drive the holding rack 322 to rotate in the distillation circle 32, so that the cutting fluid in the holding rack 322 rotates continuously during distillation, so that the purification of the cutting fluid can be completed more fully and evenly.
[0048] An outer pipe 351 is fixedly installed on one side of the vertical pipe 35 , a replacement groove 352 communicating with the vertical pipe 35 is opened in the middle of the outer pipe 351 , and a filter screen 353 is placed between the replacement groove 352 and the vertical pipe 35 .
[0049] By providing the replacement groove 352 , the filter screen 353 in the vertical pipe 35 can be replaced so as to better purify the cutting fluid.
[0050] A water cooling chamber 440 is provided between the external tube 44 and the internal tube 441, a rotating wheel 430 is fixedly installed on the end tube 43 on one side, an infusion chamber 432 is opened in the middle of the end tube 43 on one side, the infusion chamber 432 is communicated with the internal tube 441, a water delivery chamber 431 opened on the end tube 43 is provided outside the infusion chamber 432, the water delivery chamber 431 is communicated with the water cooling chamber 440, and a water injection port 433 is fixedly installed on the end tube 43 on one side, and the water injection port 433 is communicated with the water delivery chamber 431.
[0051] By injecting water into the water injection port 433, the injected cold water flows into the water cooling chamber 440 through the water delivery chamber 431, so as to cool down the high-temperature cutting fluid injected into the built-in tube 441. By setting the rotating wheel 430, the multiple external tubes 44 can rotate when the central wheel 48 rotates, thereby causing the cutting fluid in the built-in tube 441 to rotate, thereby accelerating the cooling of the cutting fluid.
[0052] Two symmetrically arranged suction pipes 461 are provided at the lower end of the guide pipe 46. One end of the suction pipe 461 away from the guide pipe 46 passes through the distillation circle 32 and is located in the holding frame 322. Two symmetrical air transfer pipes 47 are commonly connected between the distillation circle 32 and the cooling cylinder 42.
[0053] By providing the suction pipe 461 , the cutting fluid that has been distilled and purified in the containing rack 322 can be transported to the collecting cylinder 45 so as to enter the multiple built-in pipes 441 for cooling.
[0054] Both ends of the U-shaped tube 52 are connected to liquid supply tubes 53 , respectively. One end of the liquid supply tube 53 away from the U-shaped tube 52 is connected to the spray box 232 .
[0055] A collecting bucket 272 connected to the inner cavity of the working box 21 is fixedly installed on the outer wall of the working box 21, a center wheel 48 meshing with the rotating wheel 430 is rotatably installed in the middle of one side of the cooling cylinder 42, a rotating shaft 481 is fixedly installed in the middle of the center wheel 48, and pulleys are fixedly installed on one end of the rotating rod 291 and the rotating shaft 481, and a belt is provided between the pulleys.
[0056] The setting of the collecting bucket 272 can collect impurities pushed by the cleaning plate 271, and the setting of the pulley and the belt can synchronously drive the rotating shaft 481 and the center wheel 48 to rotate when the rotating rod 291 rotates, thereby causing the multiple rotating wheels 430 to drive the multiple external tubes 44 to rotate.
[0057] When the present invention is in use, the silicon wafer placed on the filter plate 22 is cut by an external multi-wire cutting machine. By pre-injecting a certain proportion of cutting fluid and water into the spray box 232, the diamond wire can be cooled when the silicon wafer is cut to avoid high-frequency cyclic quenching of the diamond wire due to too high cutting temperature, which may cause the diamond wire to break and cause product degradation or scrapping. The operation box 21 is set as a sinking type, which can resist and block the cutting fluid sprayed on the silicon wafer, so that it can be concentrated and fall through the filter plate 22. The used cutting fluid flows in the operation box 21 to the filter box 232. 9, and the impurities are adsorbed in the filter box 29, and the cutting fluid is transported to the filter circle 33 through the connecting pipe 293 and the drain pipe 332, and finally falls into the distillation circle 32, so as to complete the subsequent distillation and reuse of the cutting fluid. The distillation circle 32 can distill the cutting fluid. Since the cutting fluid is mixed with pure cutting fluid and pure water in proportion when in use, when the cutting fluid is distilled after use, the pure water in the cutting fluid evaporates into the filter circle 33, and then is discharged into the collection box 5 through the drain pipe 36, and the pure cutting fluid remains in the distillation circle 32;
[0058] The purified cutting fluid can be transported to the collecting tube 45 through the guide tube 46. The purified cutting fluid in the collecting tube 45 needs to be cooled down when it is used for the second time because of its high temperature. The high-temperature cutting fluid is transported to the built-in tube 441 through the connecting tube 434. The cold water in the water-cooling chamber 440 can cool the high-temperature cutting fluid in the built-in tube 441. The built-in tube 441 and the external tube 44 are both spirally arranged and the external tube 44 surrounds the built-in tube 441 in all directions. Therefore, the high-temperature cutting fluid can be cooled down to a certain extent when it flows and is injected into the built-in tube 441 and contacts the wall of the built-in tube 441. The device can collect the hot air generated by the high-temperature cutting fluid during cooling and heat exchange, and transmit it to the distillation circle 32 through the air transmission pipe 47, so as to collect the hot air required for purification of the used cutting fluid, so that the hot air generated when the cutting fluid is cooled can be collected and reused. The cutting fluid that has been cooled in the built-in pipe 441 is retained in the collection cylinder 45 through the connecting pipe 434, and then is transported to the circulation pump 51 through the water pipe between the guide pipe 46 and the circulation pump 51. Then, the circulation pump 51 is turned on to transport the cooled cutting fluid to the spray box 232 through the U-tube 52 and the liquid supply pipe 53, so that the treated cutting fluid can be reused.
[0059] By turning on the fan 25, the diamond wire can be cooled by air when cutting the silicon wafer, so that the diamond wire can be cooled by air while being cooled by the cutting fluid, thereby realizing multiple cooling operations. In addition, by setting the air cooling box 23 and the through-hole 24, the fan 25 can be turned on to cool the surrounding areas of the sinking operation box 21. By setting the guide plate 26 and the receiving plate 261, the cutting fluid flowing down from the top can slowly flow to the bottom of the operation box 21, so that the dust in the cutting fluid at the bottom of the operation box 21 when the silicon wafer is sliced can be precipitated. By pushing the push rod 27, the push rod 27 drives the cleaning The cleaning plate 271 moves to clean the impurities in the working box 21, and rotates the threaded rod 281. When the threaded rod 281 rotates, the blocking plate 282 is driven to rise. When the blocking plate 282 rises, the cutting fluid in the working box 21 flows into the filter box 29, and the cutting fluid impacts the magnetic plate 292 when flowing. The multiple magnetic plates 292 rotate continuously to absorb the metal impurities in the cutting fluid when the silicon wafer is cut, so as to recycle them, and the magnetic plates 292 that have been used for a period of time are disassembled and cleaned through the transverse groove, so as to ensure the adsorption performance of the magnetic plates 292 on the metal impurities in the cutting fluid;
[0060] The motor is turned on to drive the driving wheel 341 to rotate. When the driving wheel 341 rotates, it engages with the teeth 323 to drive the holding rack 322 to rotate in the distillation circle 32, so that the cutting fluid in the holding rack 322 rotates continuously during distillation, so that the purification of the cutting fluid can be completed more fully and evenly. The filter screen 353 in the vertical pipe 35 can be replaced by the setting of the replacement groove 352, so that the cutting fluid can be better purified. The cold water injected into the water injection port 433 flows through the water delivery cavity 431 to the water cooling cavity 440, so as to cool down the high-temperature cutting fluid injected into the built-in tube 441. The setting of the rotating wheel 430 can make the multiple external tubes 44 rotate when the center wheel 48 rotates, thereby causing the cutting fluid in the built-in tube 441 to rotate, thereby accelerating the cooling of the cutting fluid. The setting of the suction pipe 461 can transport the cutting fluid that has completed distillation and purification in the holding rack 322 to the collecting cylinder 45, so that it enters the multiple built-in tubes 441 for cooling.
[0061] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.
Claims
1. A recycling liquid automatic cooling system, comprising a bottom plate (1), characterized in that: A work box (21) is fixedly mounted on one side of the upper end surface of the bottom plate (1) via a mounting frame. The middle of the work box (21) is sunken, a filter plate (22) is placed in the middle of the work box (21), spray boxes (232) are arranged on both sides of the upper part of the work box (21), a circulating pump (51) connected to the bottom plate (1) is arranged below the work box (21), a filter box (29) in communication with its inner cavity is fixedly mounted at the lower part of one side of the work box (21), a connecting pipe (293) is fixedly mounted on the side of the filter box (29) away from the work box (21), and a front end of the work box (21) is provided with a filter box (293). Two fixing frames (31) fixedly connected to the base are arranged on the side, a water filter ring (33) and a distillation ring (32) are installed in sequence from top to bottom between the two fixing frames (31), a holding frame (322) is slidably installed in the inner cavity of the distillation ring (32), a plurality of vertical pipes (35) arranged in an annular direction are installed between the water filter ring (33) and the distillation ring (32), a rectangular pipe (331) communicating with the inside of the water filter ring (33) is fixedly installed in the middle of the water filter ring (33) in a transverse direction, and a plurality of drainage pipes (332) arranged at equal intervals are installed between the connecting pipe (293) and the rectangular pipe (331).
2. The automatic cooling system for recovered liquid according to claim 1, characterized in that: A cooling cylinder (42) is provided above the water filter ring (33). A support frame (41) fixed to the bottom plate (1) is sleeved on the outside of the cooling cylinder (42). Multiple groups of annularly arranged end tubes (43) are rotatably installed on both sides of the cooling cylinder (42). An external tube (44) is commonly connected between each group of end tubes (43). An internal tube (441) is arranged inside the external tube (44). A collecting cylinder (45) is fixedly installed in the middle of the cooling cylinder (42) on one side. The collecting cylinder (45) is provided with multiple connecting tubes (434) rotatably connected to the multiple groups of external tubes (44). Collection boxes (5) are provided on both sides of the water filter ring (33). A drainage pipe (36) is commonly connected between the collection boxes (5) on both sides and the water filter ring (33). A guide pipe (46) is fixedly installed on the collecting cylinder (45). A water pipe is arranged between the guide pipe (46) and the circulation pump (51). The circulation pump (51) is connected to a U-shaped pipe (52).
3. The automatic cooling system for recovered liquid according to claim 1, characterized in that: An air cooling box (23) is installed in a surrounding manner on the outside of the working box (21); a through hole (24) communicating with the air cooling box (23) is provided around the working box (21); a fan (25) fixedly connected to the inner wall of the air cooling box (23) is provided on the outside of the through hole (24); vertical plates (231) connected to the top of the air cooling box (23) are provided at both ends of the spraying box (232); the vertical plates (231) and the spraying box (232) are slidably connected via an electric slider.
4. The automatic cooling system for recovered liquid according to claim 1, characterized in that: A guide plate (26) is fixedly installed in the middle of the inner cavity of the working box (21), and receiving plates (261) fixed to the inner wall of the working box (21) are provided on both sides below the guide plate (26). A push rod (27) slidably connected to the side wall of the working box (21) is provided on one side of the working box (21) close to the filter box (29), and a cleaning plate (271) located in the inner cavity of the working box (21) is fixedly installed at one end of the push rod (27), and a cleaning plate (271) located in the inner cavity of the working box (21) is provided on one side of the cleaning plate (271). A fixing plate (28) is fixed on the outside, a threaded rod (281) is rotatably mounted on the middle of the fixing plate (28), a blocking plate (282) is rotatably mounted on the lower end of the threaded rod (281), the blocking plate (282) penetrates and slides on the inner wall of the working box (21), a transversely arranged rotating rod (291) is rotatably mounted on the middle of the filter box (29), a circumferentially arranged magnetic attraction plate (292) is detachably mounted on the outside of the rotating rod (291), and a transverse groove is arranged on the upper end of the filter box (29).
5. The automatic cooling system for recovered liquid according to claim 1, characterized in that: The lower part of the distillation ring (32) is provided with an annular groove (321), and the lower end surface of the containing frame (322) is fixedly provided with teeth (323) arranged at equal intervals, and two fixing members (34) fixed to the bottom plate (1) are provided below the teeth (323), and a driving wheel (341) meshing with the teeth (323) is installed between the two fixing members (34) through the rotation of a motor, and a pressurizing pipe (333) is commonly connected between the plurality of liquid discharge pipes (332), and one end of the pressurizing pipe (333) is provided with a pressurizing cylinder (334) fixed to the connecting pipe (293), and one end of the pressurizing pipe (333) is connected to the pressurizing cylinder (334).
6. The automatic cooling system for recovered liquid according to claim 1, characterized in that: An outer pipe (351) is fixedly mounted on one side of the vertical pipe (35), a replacement groove (352) communicating with the vertical pipe (35) is provided in the middle of the outer pipe (351), and a filter screen (353) is placed between the replacement groove (352) and the vertical pipe (35).
7. The automatic cooling system for recovered liquid according to claim 2, characterized in that: A water cooling chamber (440) is provided between the external tube (44) and the internal tube (441); a rotating wheel (430) is fixedly mounted on the end tube (43) on one side; an infusion chamber (432) is provided in the middle of the end tube (43) on one side; the infusion chamber (432) is communicated with the internal tube (441); a water delivery chamber (431) is provided on the end tube (43) outside the infusion chamber (432); the water delivery chamber (431) is communicated with the water cooling chamber (440); a water injection port (433) is fixedly mounted on the end tube (43) on one side; the water injection port (433) is communicated with the water delivery chamber (431).
8. The automatic cooling system for recovered liquid according to claim 2, characterized in that: The lower end of the guide pipe (46) is provided with two symmetrically arranged suction pipes (461), and one end of the suction pipe (461) away from the guide pipe (46) passes through the distillation circle (32) and is located in the holding frame (322), and two symmetrical air transfer pipes (47) are commonly connected between the distillation circle (32) and the cooling cylinder (42).
9. The automatic cooling system for recovered liquid according to claim 2, characterized in that: Both ends of the U-shaped tube (52) are respectively connected to a liquid supply tube (53), and one end of the liquid supply tube (53) away from the U-shaped tube (52) is connected to a spray box (232).
10. The automatic cooling system for recovered liquid according to claim 1, characterized in that: A collecting bucket (272) connected to the inner cavity of the working box (21) is fixedly installed on the outer wall of the working box (21); a center wheel (48) meshing with the rotating wheel (430) is rotatably installed in the middle of one side of the cooling cylinder (42); a rotating shaft (481) is fixedly installed in the middle of the center wheel (48); pulleys are fixedly installed on one end of the rotating rod (291) and the rotating shaft (481), and a belt is provided between the pulleys.
Citation Information
Patent Citations
A silicon wafer cutting machine cutting fluid cooling device and cooling method
CN108858832B