Diaphragm valve with leakage detector

Abstract

A diaphragm valve with a leak detector includes a chamber, a diaphragm, and a detector. The diaphragm moves within the chamber. The chamber is blocked when the diaphragm is driven to the bottom of the chamber. The detector is installed above the diaphragm to detect liquid leakage, and the detector is connected with the outside.

Description

Technical Field

[0001] The present invention relates to a valve, and more particularly to a diaphragm valve with a liquid leakage detector for controlling fluids such as chemical solutions and water. Background Art

[0002] In many manufacturing processes, such as when a pharmaceutical factory produces drugs, or when a semiconductor factory coats the surface of a wafer to form a thin film with a uniform thickness, a controlled amount of chemical solution or water is required. Therefore, precise valves are needed in many industries. For example, PTFE (polytetrafluoroethylene) diaphragm valves are used in the chemical fluid systems of the semiconductor industry. Traditional PTFE valves lack self-detection functions and cannot alarm for leaks. Leaks may cause safety accidents and losses of personnel and property. Valves installed in the flow path inevitably have leakage problems, so valves with liquid leakage detection functions are needed. Summary of the Invention

[0003] The present invention provides a diaphragm valve with a liquid leakage detector to detect and handle problems in a timely manner, reducing losses caused by valve failures.

[0004] One aspect of the present invention provides a diaphragm valve including a controller and a body. The controller includes a drive rod and a diaphragm. The drive rod is driven to move the diaphragm. The body includes an opening and a chamber. The opening is covered by the controller. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. A detector for detecting leakage is installed above the diaphragm and is connected to the outside.

[0005] Another aspect of the present invention provides a diaphragm valve including a controller and a body. The controller includes a drive rod, a cylinder, a pneumatic hole, and a diaphragm. The drive rod is driven to move the diaphragm, and a piston is provided in the middle section of the drive rod. The cylinder covers the controller. The pneumatic hole moves the drive rod by pumping air into or discharging air from the space between the cylinder and the piston. The body includes an opening and a chamber. The opening is covered by the controller. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. A detector for detecting leakage is installed above the diaphragm and is connected to the outside.

[0006] Another aspect of the present invention provides a diaphragm valve including a chamber, a diaphragm, and a detector. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. The detector is installed above the diaphragm to detect leakage and is connected to the outside.

[0007] The features and technical advantages of the present invention are outlined extensively above to better understand the embodiments of the present invention. The features and advantages of the present invention will be described below and form the subject matter of the claims of the present invention. Those skilled in the art should understand that the concepts and specific embodiments of the present invention may be modified or designed into other structures or methods for achieving the same purpose as the content of the present invention, and such equivalent configurations do not depart from the spirit and scope of the present invention set forth in the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] A more complete understanding of the present invention can be obtained from the embodiments and the claims in conjunction with the drawings, in which:

[0009] Figure 1 is a perspective view of a diaphragm valve according to an embodiment of the present invention;

[0010] Figure 2 is a perspective view of the controller of the diaphragm valve;

[0011] Figure 3 is Figure 1 a perspective view of the body of the diaphragm valve of

[0012] Figure 4 is according to Figure 2 an embodiment of the cross-sectional view of the controller;

[0013] Figure 5A is according to Figure 2 an embodiment of the exploded view of the controller;

[0014] Figure 5B is according to Figure 5A an embodiment of the perspective view of the knob and the limiting element;

[0015] Figure 6 is a perspective view of a diaphragm valve according to another embodiment of the present invention;

[0016] Figure 7 is Figure 6 a perspective view of the controller of the diaphragm valve in

[0017] Figure 8 is according to Figure 7 an embodiment of the cross-sectional view of the controller;

[0018] Figure 9 is according to Figure 7 an embodiment of the exploded view of the controller;

[0019] Figure 10 is a perspective view of the body of a diaphragm valve according to an embodiment of the present invention, having a mounting seat for mounting a detector; and

[0020] Figure 11 is according toFigure 10 Stereogram of the detector of the embodiment

[0021] Symbol description:

[0022] 10: Diaphragm valve

[0023] 10a: Diaphragm valve

[0024] 100: Controller

[0025] 100a: Controller

[0026] 120: Knob

[0027] 120a: Cylinder

[0028] 121: Open housing

[0029] 122: Limiting element

[0030] 122a: Limiting element

[0031] 124: Color ring

[0032] 126: Threaded sleeve

[0033] 128: Inner housing

[0034] 128a: Inner housing

[0035] 129: Housing mounting seat

[0036] 130: O-ring

[0037] 130a: O-ring

[0038] 130b: O-ring

[0039] 130c: O-ring

[0040] 131: Piston

[0041] 132: Drive rod

[0042] 132a: Drive rod

[0043] 133: Protruding ring

[0044] 136: Flange

[0045] 136a: Flange

[0046] 137: Duct

[0047] 137a: Duct

[0048] 138: Washer

[0049] 140: Diaphragm

[0050] 141: Notch

[0051] 142: Conical protrusion

[0052] 144: Annular groove

[0053] 145: Flat area

[0054] 146: Flexible ring

[0055] 148: Grooved ring

[0056] 152: Transparent cover

[0057] 154: Pneumatic outlet

[0058] 156: Pneumatic inlet

[0059] 200: Body

[0060] 210: Opening

[0061] 220: Reinforcing rib

[0062] 222: Annular protrusion

[0063] 224: Diaphragm mount

[0064] 226: Solenoid

[0065] 230: Threaded tube

[0066] 232: Wire perforation

[0067] 234: Wire perforation

[0068] 240a: Solenoid

[0069] 240b: Solenoid

[0070] 260a: Inlet

[0071] 260b: Outlet

[0072] 280: Channel

[0073] 285: Chamber

[0074] 290: Arrow

[0075] 340a: Pipeline connector

[0076] 340b: Pipeline connector

[0077] 360a: Pipeline

[0078] 360b: Pipeline

[0079] 400: Detector

[0080] 422: Electric wire

[0081] 424: Electric wire

[0082] 440: Nut Detailed implementation manners

[0083] Many different embodiments for implementing the different features of the present invention are provided below. The schematic reference numerals may be repeated throughout the embodiments, but this does not necessarily mean that the features of one embodiment are applicable to another embodiment, even if they have the same reference numerals. It should be understood that although terms such as first, second, third, etc. may be used to describe various elements, components, regions, layers or segments, these elements, components, regions, layers or segments are not limited to these terms. On the contrary, these terms are only used to distinguish one element, component, region, layer or segment from another region, layer or segment. The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. As used herein, the singular forms "a", "an" and "the" also mean including the plural forms, unless the context clearly dictates otherwise. It should also be understood that the terms "comprising" and "including" in this specification mean that the stated features, wholes, steps, operations, elements or components are also intended to include other additional features, wholes, steps, operations, elements, components or groups thereof.

[0084] The valve of the embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0085] Figure 1 is a perspective view of a diaphragm valve 10 according to an embodiment of the present invention. Figure 2 is Figure 1 a perspective view of a controller 100 of the diaphragm valve 10 in Figure 3 is Figure 1 a perspective view of a main body 200 of the diaphragm valve 10 in Figure 1 As shown, the diaphragm valve 10 of the present invention includes a controller 100 and a main body 200. As Figure 2 shown, the controller 100 includes a knob 120 and a diaphragm 140. The diaphragm 140 is connected to the knob 120 and is driven by the knob 120. As Figure 3 shown, the main body 200 includes an opening 210, a chamber 285 and a channel 280. The opening 210 is covered and sealed by a threaded sleeve 126 of the controller 100 as Figure 1 shown. The controller 100 is screwed into a solenoid tube 226 of the opening 210.

[0086] As Figure 1 and Figure 3As shown, the diaphragm valve 10 is installed between pipelines 360a and 360b. Pipelines 360a and 360b are respectively connected to the inlet 260a and the outlet 260b of the diaphragm valve 10, while pipeline connectors 340a and 340b are respectively installed on the solenoids 240a and 240b. In addition, the reinforcing rib 220 strengthens the structure of the chamber 285, and the arrow 290 shown on the side indicates the direction of flow.

[0087] Figure 4 is a cross-sectional view of the controller 100 according to Figure 2 an embodiment of Figure 5A is an exploded view of the controller 100 according to Figure 2 an embodiment of. The controller 100 includes a drive rod 132 and a diaphragm 140. A knob 120 is installed on the drive rod 132 for rotating the drive rod 132, and the knob 120 moves along with the drive rod 132. The drive rod 132 is driven to move a certain distance, thereby driving the diaphragm 140. The diaphragm 140 moves inside the Figure 3 chamber 285 shown. This chamber 285 is blocked by the diaphragm 140 that reaches the bottom of the chamber 285. A limiting element 122 is screwed onto and surrounds a section of the drive rod 132 to accommodate the drive rod 132. The knob 120 has an open housing 121 to accommodate the limiting element 122.

[0088] Figure 5B is a perspective view of the knob 120 and the limiting element 122 according to Figure 5A an embodiment of. The inner wall of the open housing 121 of the knob 120 has longitudinal protrusions and grooves to cooperate with the longitudinal protrusions and grooves on the outer wall of the limiting element 122.

[0089] When the open housing 121 is inserted by the limiting element 122, the limiting element 122 is configured to be fixed at a position of the drive rod 132 to prevent the drive rod 132 from being over-driven. An inner shell 128 is installed inside the controller 100. The inner shell 128 has through holes for accommodating a part of the drive rod 132. A threaded sleeve 126 surrounds the inner shell 128 and covers the opening 210 (please refer to Figure 3 ). The limiting element 122 moves together with the drive rod 132 until the limiting element 122 contacts the inner shell 128. When the limiting element 122 stops moving, the drive rod 132 stops moving. Optionally, a protruding ring 133 surrounds the bottom end of the drive rod 132 to prevent the drive rod 132 from detaching from the inner shell 128. Below the drive rod 132, the connector 134 has a rod for the diaphragm 140 to insert and a circular notch for the drive rod 132 to insert. A flange 136 and a washer 138 are installed above the diaphragm 140 and inside the inner shell 128. Optionally, a color ring 124 surrounds the upper opening of the inner shell 128. When the diaphragm 140 reaches complete blocking Figure 3When in the position of the chamber 285 of the main body 200 shown, the color ring 124 is completely covered by the knob 120.

[0090] Reference Figure 4 , a detector (not shown) is installed above the diaphragm 140 to detect leaks above the diaphragm 140 and is connected to an external wire through a duct 137. The detection space is located between the diaphragm 140, the flange 136, and the connector 134. The duct 137 passes through the inner shell 128, the flange 136, and Figure 3 the wall of the opening 210 of the main body 200 shown. To prevent leakage, an O-ring 130 is installed to seal the edge of the inner shell 128.

[0091] Figure 6 is a perspective view of a diaphragm valve 10a according to another embodiment of the present invention. Figure 7 is Figure 6 a perspective view of the controller 100a of the diaphragm valve 10a in Figure 2 . As an alternative embodiment, Figure 7 the controller 100 can be Figure 6 replaced by the pneumatic controller 100a shown. As Figure 7 shown, the diaphragm valve 10a includes a controller 100a and a main body 200. As

[0092] Figure 8 is according to Figure 7 an embodiment of the controller, and Figure 9 is according to Figure 7 an embodiment of the controller's exploded view. In the controller 100a, the drive rod 132a has a piston 131 in the middle section. The cylinder 120a covers the controller 100a. The pneumatic outlet 154 and the pneumatic inlet 156 pump and discharge air to move the drive rod 132a by pumping air into and out of the space between the cylinder 120a and the piston 131. When the drive rod 132a moves, the diaphragm 140 is driven by the drive rod 132a. To stabilize the components, the flange 136a and the bushing 135 are installed above the diaphragm 140 and Figure 3 inside the opening 210 of the main body 200 shown. The opening 210 is covered by the controller 100a. The diaphragm 140 moves inside the chamber 285, and the chamber 285 is blocked by the diaphragm 140 driven to the bottom of the chamber 285. An inner shell 128a is installed inside the controller 100a, where the inner shell 128a has a through hole for accommodating a section of the drive rod 132a. The threaded sleeve 126 surrounds the inner shell 128a and covers Figure 3The opening 210 shown. The inner shell 128a and the shell mounting seat 129 are connected to fix the threaded sleeve 126. The cylinder 120a is mounted on the inner shell 128a, and the shell mounting seat 129 is disposed within the opening 210. The limiting element 122a is mounted on the inner shell 128a to surround a section of the drive rod 132a to accommodate it and separate the piston 131 from the inner shell 128a. The piston 131 moves with the drive rod 132a until the piston 131 contacts the limiting element 122a. When the piston 131 stops moving, the drive rod 132a stops moving. The thickness of the limiting element 122a is adjustable to set the length of the drive rod 132a accommodated to prevent the drive rod 132a from being over-driven. To prevent leakage, the first O-ring 130a is located at the edge of the piston 131, and the second O-ring 130b surrounds the drive rod 132a below the piston 131.

[0093] Reference Figure 8 , a detector (not shown) is installed to detect leakage above the diaphragm 140, and the detector is connected to the outside through the channel 137a. The detection space is located between the diaphragm 140 and the flange 136a. The channel 137a passes through the flange 136a and Figure 3 the wall of the opening 210 of the main body 200 shown.

[0094] Figure 10 is a perspective view of a diaphragm valve body according to an embodiment of the present invention, having a mounting seat for installing a detector. Figure 11 is according to Figure 10 the embodiment of the detector. The detector 400 includes two wires 422, 424. The threaded tube 230 on the wall of the opening 210 fixes the two wires 422, 424 through the nuts 440. The two wires 422, 424 are separated, and one end of each wire is located in the detection space above the diaphragm 140. If there is liquid leakage, it will cause a short circuit between the two wires 422, 424, then the wires 422, 424 are conducted. Optionally, a sensing module (not shown) is connected to the wires 422, 424. The sensing module detects the electrical conduction of the two wires 422, 424, and if the two wires 422, 424 are electrically conducted, it sends a signal to the transmitter.

[0095] In summary, the diaphragm valve described in the embodiment of the present invention can perform precise and accurate fluid control, which is beneficial for use in, for example, semiconductor production lines or various chemical production lines.

[0096] Although the present invention has been described in detail with its advantages, it should be understood that various changes, substitutions and alterations can be made without departing from the spirit and scope of the invention as defined by the claims. For example, many of the processes discussed above can be implemented in different ways and replaced by other processes or combinations thereof. In addition, the scope of the present invention is not limited to the specific embodiments of the devices, processes, compositions, means, methods or steps described in the specification. Therefore, the appended claims are intended to embrace such devices, processes, compositions, means, methods or steps within their scope.

Claims

1. A diaphragm valve with a liquid leakage detector, characterized in that: include: A controller, comprising: a drive rod; and a diaphragm driven by the drive rod; A subject, including: an opening covered by the controller; and a chamber that accommodates the diaphragm moving therein, wherein the chamber is blocked by the diaphragm being driven to the bottom of the chamber; and A detector detects leakage above the diaphragm, wherein the detector is connected to the outside.

2. The diaphragm valve according to claim 1, characterized in that: The detector includes: Two wires, one end of each wire is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage that causes a short circuit between the detectors, the two wires are connected; and a sensing module connected to the two wires, wherein the sensing module detects electrical conduction between the two wires and sends a signal to a transmitter or a processor if the two wires are electrically conductive, The two electric wires pass through a hole on a wall of the opening, and a threaded tube on the wall of the opening fixes the two electric wires through a nut.

3. The diaphragm valve according to claim 2, characterized in that: Also includes: a threaded sleeve covering the opening; and An inner shell is installed in the threaded sleeve, wherein the inner shell has a through hole for accommodating a part of the driving rod, and the two wires pass through the inner shell.

4. The diaphragm valve according to claim 3, characterized in that: Also includes: a flange located above the diaphragm and inside the inner shell, and through which the two wires pass; a connector having a rod inserted into the diaphragm and a circular recess into which the driving rod is inserted, wherein the detection space is located between the diaphragm, the flange and the connector; and An O-ring is located on an edge of the inner shell.

5. A diaphragm valve with a liquid leakage detector, characterized in that: include: A controller, comprising: a driving rod with a piston disposed thereon; One cylinder; a pneumatic hole for moving the drive rod by pumping air into or exhausting air from the space between the cylinder and the piston; a diaphragm driven by the drive rod; and A subject, including: an opening covered by the controller; and a chamber that accommodates the diaphragm moving therein, wherein the chamber is blocked by the diaphragm being driven to the bottom of the chamber; and A detector is mounted above the diaphragm to detect a leak, wherein the detector is connected to the outside.

6. The diaphragm valve according to claim 5, characterized in that The detector includes two wires, one end of each wire is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage resulting in a short circuit between the detectors, the two wires are connected, The two electric wires pass through a hole on a wall of the opening, and a threaded tube on the wall of the opening fixes the two electric wires through a nut.

7. The diaphragm valve according to claim 6, characterized in that Also includes: A sensing module is connected to the two wires, wherein the sensing module detects the electrical conduction of the two wires, and if the two wires are conductive, a signal is transmitted to a transmitter or a processor.

8. The diaphragm valve according to claim 6, characterized in that: Also includes: a threaded sleeve covering the opening; an inner shell installed in the threaded sleeve, wherein the inner shell has a through hole for accommodating a portion of the driving rod, and the two wires pass through the inner shell; and A flange is located above the diaphragm and inside the opening, and the two wires pass through the flange.

9. A diaphragm valve with a liquid leakage detector, characterized in that: include: One chamber, a diaphragm that moves within the chamber; and A detector is mounted above the diaphragm to detect a leak, wherein the detector is connected to the outside.

10. The diaphragm valve according to claim 9, characterized in that The detector includes two wires, one end of each wire is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage resulting in a short circuit between the detectors, the two wires are connected.

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