Diaphragm valve with leakage detector

Abstract

A diaphragm valve with a leak detector includes a chamber, a diaphragm, and a detector. The diaphragm moves within the chamber. The chamber is blocked when the diaphragm is driven to the bottom of the chamber. The detector is installed above the diaphragm to detect liquid leakage, and the detector is connected with the outside.

Description

TECHNICAL FIELD

[0001] The utility model relates to a valve, in particular to a diaphragm valve with a liquid leakage detector for controlling chemical solution, water and other fluids. BACKGROUND

[0002] In many manufacturing processes, such as when a pharmaceutical factory produces medicine, or when a semiconductor factory coats the surface of a wafer to form a thin film of uniform thickness, a controlled amount of chemical solution or water is required. Therefore, precise valves are required in many industries. For example, PTFE (polytetrafluoroethylene) diaphragm valves are used in chemical fluid systems in the semiconductor industry. Conventional PTFE valves lack self-detection functions and cannot alert leaks. Leaks can cause safety incidents and loss of personnel and property. Valves installed in flow channels inevitably have leakage problems, so valves with liquid leakage detection functions are needed. SUMMARY

[0003] The utility model provides a diaphragm valve with a liquid leakage detector to discover and handle in time, reduce the loss caused by valve failure.

[0004] One aspect of the utility model provides a diaphragm valve comprising a controller and a main body. The controller includes a drive rod and a diaphragm. The drive rod is driven to move the diaphragm. The main body includes an opening and a chamber. The opening is covered by the controller. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. A detector is installed above the diaphragm to detect leaks, and the detector is connected to the outside.

[0005] Another aspect of the utility model provides a diaphragm valve comprising a controller and a main body. The controller includes a drive rod, a cylinder, a pneumatic hole and a diaphragm. The drive rod is driven to move the diaphragm, and the middle section of the drive rod has a piston. The cylinder covers the controller. The pneumatic hole moves the drive rod by pumping air into the space between the cylinder and the piston or expelling air from the space between the cylinder and the piston. The main body includes an opening and a chamber. The opening is covered by the controller. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. A detector is installed above the diaphragm to detect leaks, and the detector is connected to the outside.

[0006] Another aspect of the utility model provides a diaphragm valve comprising a chamber, a diaphragm and a detector. The diaphragm moves within the chamber and blocks the chamber when driven to the bottom of the chamber. The detector is installed above the diaphragm to detect leaks, and the detector is connected to the outside.

[0007] The features and advantages of the present application will be better understood from the detailed description that follows, with reference to the drawings, in which: BRIEF DESCRIPTION OF DRAWINGS

[0008] A more complete understanding of the present application can be obtained by reference to the following detailed description when taken in conjunction with the accompanying drawings, wherein:

[0009] Figure 1 is a perspective view of a diaphragm valve according to an embodiment of the present application;

[0010] Figure 2 is a perspective view of a controller of the diaphragm valve;

[0011] Figure 3 is a perspective view of a diaphragm valve body according to an embodiment of the present application; Figure 1

[0012] Figure 4 is a cross-sectional view of a controller according to an embodiment of the present application; Figure 2

[0013] is an exploded view of a controller according to an embodiment of the present application; Figure 5A Figure 2 is a perspective view of a knob and a limiting element according to an embodiment of the present application;

[0014] Figure 5B Figure 5A is a perspective view of a diaphragm valve according to another embodiment of the present application;

[0015] Figure 6 is a perspective view of a controller of the diaphragm valve in

[0016] Figure 7 is a perspective view of a diaphragm valve body according to an embodiment of the present application, having a mounting seat for mounting a detector; and Figure 6

[0017] Figure 8 is a cross-sectional view of a controller according to an embodiment of the present application; Figure 7

[0018] is an exploded view of a controller according to an embodiment of the present application; Figure 9 Figure 7 is a perspective view of a diaphragm valve body according to an embodiment of the present application, having a mounting seat for mounting a detector; and

[0019] Figure 10

[0020] ​​​​​​Figure 11 is according to Figure 10 a perspective view of a detector according to an embodiment.

[0021] Symbol explanation:

[0022] 10: diaphragm valve

[0023] 10a: diaphragm valve

[0024] 100: controller

[0025] 100a: controller

[0026] 120: knob

[0027] 120a: cylinder

[0028] 121: open housing

[0029] 122: limiting element

[0030] 122a: limiting element

[0031] 124: color ring

[0032] 126: threaded sleeve

[0033] 128: inner housing

[0034] 128a: inner housing

[0035] 129: housing mount

[0036] 130: O-ring

[0037] 130a: O-ring

[0038] 130b: O-ring

[0039] 130c: O-ring

[0040] 131: piston

[0041] 132: drive rod

[0042] 132a: drive rod

[0043] 133: protruding ring

[0044] 136: flange

[0045] 136a: flange

[0046] 137: bore

[0047] 137a: bore

[0048] 138: gasket

[0049] 140: diaphragm

[0050] 141: notch

[0051] 142: conical protrusion

[0052] 144: annular groove

[0053] 145: flat area

[0054] 146: flexible ring

[0055] 148: channel ring

[0056] 152: transparent cover

[0057] 154: pneumatic outlet

[0058] 156: pneumatic inlet

[0059] 200: main body

[0060] 210: opening

[0061] 220: reinforcing rib

[0062] 222: annular protrusion

[0063] 224: septum mount

[0064] 226: solenoid

[0065] 230: threaded tube

[0066] 232: wire hole

[0067] 234: wire hole

[0068] 240a: solenoid

[0069] 240b: solenoid

[0070] 260a: inlet

[0071] 260b: outlet

[0072] 280: channel

[0073] 285: chamber

[0074] 290: arrow

[0075] 340a: line connector

[0076] 340b: line connector

[0077] 360a: line

[0078] 360b: line

[0079] 400: detector

[0080] 422: electrical wire

[0081] 424: electrical wire

[0082] 440: nut DETAILED DESCRIPTION

[0083] A number of different embodiments are provided below for different features for implementing the present utility model. Drawing references can be repeated throughout the embodiments, but do not necessarily mean that a feature of one embodiment is applicable to another embodiment, even if they have the same reference. It should be understood that although the terms first, second, third, etc. can be used to describe various elements, components, regions, layers or segments, these elements, components, regions, layers or segments are not limited to these terms. Instead, these terms are only used to distinguish one element, component, region, layer or segment from another region, layer or segment. The terms used herein are only for describing specific embodiments and are not intended to limit the present utility model. As used herein, the singular forms "a," "an," and "the" are intended to include plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the terms "comprise" and "include" in the present specification mean the stated features, integers, steps, operations, elements, or components, as well as additional features, integers, steps, operations, elements, components or groups thereof.

[0084] The valve of the present utility model embodiment will be described in detail below with reference to the accompanying drawings.

[0085] Figure 1 is a perspective view of the diaphragm valve 10 according to the present utility model embodiment. Figure 2 is Figure 1 is a perspective view of the controller 100 of the diaphragm valve 10 in Figure 3 is Figure 1 is a perspective view of the main body 200 of the diaphragm valve 10 in Figure 1 As shown in Figure 2 As shown in Figure 3 As shown in Figure 1 As shown in

[0086] As shown in Figure 1 and Figure 3As shown, the diaphragm valve 10 is installed between pipelines 360a and 360b. The pipelines 360a and 360b are connected to the inlet 260a and outlet 260b of the diaphragm valve 10, respectively, and the pipeline connectors 340a and 340b are installed on the solenoids 240a and 240b, respectively. In addition, the reinforcing ribs 220 strengthen the structure of the chamber 285, and the arrows 290 shown on the side indicate the direction of flow.

[0087] Figure 4 is based on Figure 2 A cross-sectional view of the controller 100 of an embodiment, Figure 5A is based on Figure 2 The controller 100 of the embodiment of the present invention is an exploded view. The controller 100 includes a driving rod 132 and a diaphragm 140. The driving rod 132 is provided with a knob 120 for rotating the driving rod 132. The knob 120 moves along with the driving rod 132. The driving rod 132 is driven to move a certain distance, thereby driving the diaphragm 140. The diaphragm 140 is Figure 3 The chamber 285 shown moves inside. The chamber 285 is blocked by the diaphragm 140 that is driven to the bottom of the chamber 285. The limiting element 122 is screwed into and around the drive rod 132 to accommodate a section of the drive rod 132. The knob 120 has an open housing 121 to accommodate the limiting element 122.

[0088] Figure 5B is based on Figure 5A 1. A perspective view of a knob 120 and a limiting element 122 of an embodiment of the present invention. The inner wall of the open housing 121 of the knob 120 has longitudinal protrusions and grooves to cooperate with the longitudinal protrusions and grooves on the outer wall of the limiting element 122.

[0089] When the opening housing 121 is inserted by the limiting element 122, the limiting element 122 is configured to be fixed at a position of the driving rod 132 to prevent the driving rod 132 from being overdriven. The controller 100 is internally mounted with an inner housing 128 having a through hole for accommodating a portion of the driving rod 132. The threaded sleeve 126 surrounds the inner housing 128 and covers the opening 210 (see FIG. 1 ). Figure 3 ). The limiting element 122 moves together with the drive rod 132 until the limiting element 122 contacts the inner shell 128. When the limiting element 122 stops moving, the drive rod 132 stops moving. Optionally, a protruding ring 133 surrounds the bottom end of the drive rod 132 to prevent the drive rod 132 from detaching from the inner shell 128. Below the drive rod 132, the connector 134 has a rod for inserting the diaphragm 140 and a circular recess for inserting the drive rod 132. The flange 136 and the gasket 138 are installed above the diaphragm 140 and inside the inner shell 128. Optionally, the color ring 124 surrounds the upper opening of the inner shell 128. When the diaphragm 140 reaches a fully blocked state, the drive rod 132 stops moving. Figure 3The color ring 124 is completely covered by the knob 120 when the position of the chamber 285 of the body 200 is shown.

[0090] Reference is made to Figure 4 A detector (not shown) is installed above the diaphragm 140 to detect a leak above the diaphragm 140 and is connected to an external wire through a hole 137. The detection space is located between the diaphragm 140, the flange 136 and the connector 134. The hole 137 passes through the inner shell 128, the flange 136 and Figure 3 The wall of the opening 210 of the body 200 is shown. To prevent a leak, an O-ring 130 is installed to seal the edge of the inner shell 128.

[0091] Figure 6 is a perspective view of a diaphragm valve 10a according to another embodiment of the present application. Figure 7 is Figure 6 is a perspective view of a controller 100a of the diaphragm valve 10a in Figure 2 The controller 100 of Figure 7 is shown can be replaced by a pneumatic controller 100a. As Figure 6 shown, the diaphragm valve 10a comprises a controller 100a and a body 200. As Figure 7 shown, the controller 100a comprises a cylinder 120a and a diaphragm 140. Air is pumped and discharged via a pneumatic outlet 154 and a pneumatic inlet 156 to drive the diaphragm 140.

[0092] Figure 8 is a cross-sectional view of a controller according to an embodiment of Figure 7 and Figure 9 is an exploded view of a controller according to an embodiment of Figure 7 In the controller 100a, the drive rod 132a has a piston 131 at the middle section. The cylinder 120a covers the controller 100a. The pneumatic outlet 154 and the pneumatic inlet 156 move the drive rod 132a by pumping air into and discharging air from the space between the cylinder 120a and the piston 131. When the drive rod 132a moves, the diaphragm 140 is driven by the drive rod 132a. To stabilize the assembly, a flange 136a and a bushing 135 are installed above the diaphragm 140 and Figure 3 inside the opening 210 of the body 200 is shown. The opening 210 is covered by the controller 100a. The diaphragm 140 moves inside the chamber 285 and the chamber 285 is blocked by the diaphragm 140 reaching the bottom of the chamber 285. The inner shell 128a is installed inside the controller 100a, wherein the inner shell 128a has a through hole for accommodating a section of the drive rod 132a. The threaded sleeve 126 surrounds the inner shell 128a and covers Figure 3The inner housing 128a and the housing mount 129 are connected to secure the threaded sleeve 126. The cylinder 120a is mounted on the inner housing 128a, and the housing mount 129 is positioned within the opening 210. The limiting element 122a is mounted on the inner housing 128a to surround the drive rod 132a, accommodate a portion of the drive rod 132a, and separate the piston 131 from the inner housing 128a. The piston 131 moves with the drive rod 132a until the piston 131 contacts the limiting element 122a. When the piston 131 stops moving, the drive rod 132a stops moving. The thickness of the limiting element 122a is adjustable to set the length of the drive rod 132a accommodated, thereby preventing the drive rod 132a from being overdriven. To prevent leakage, a first O-ring 130a is located at the edge of the piston 131, and a second O-ring 130b surrounds the drive rod 132a below the piston 131.

[0093] refer to Figure 8 , a detector (not shown) is installed to detect leakage above the diaphragm 140, and the detector is connected to the outside through the hole 137a. The detection space is located between the diaphragm 140 and the flange 136a. The hole 137a passes through the flange 136a and Figure 3 The walls of the opening 210 of the main body 200 are shown.

[0094] Figure 10 It is a three-dimensional view of a diaphragm valve body according to one embodiment of the present invention, having a mounting seat for mounting a detector. Figure 11 is based on Figure 10 A three-dimensional view of a detector of an embodiment of the present invention. The detector 400 includes two wires 422, 424. The threaded tube 230 on the wall of the opening 210 fixes the two wires 422, 424 by a nut 440. The two wires 422, 424 are separate, and one end of each wire is located in the detection space above the diaphragm 140. If there is a liquid leakage, it will cause a short circuit between the two wires 422, 424, and the wires 422, 424 will be conductive. Optionally, a sensing module (not shown) is connected to the wires 422, 424. The sensing module detects the electrical conductivity of the two wires 422, 424, and sends a signal to the transmitter if the two wires 422, 424 are electrically conductive.

[0095] In summary, the diaphragm valve described in the embodiment of the present invention can perform precise and accurate fluid control, and is advantageous for use in, for example, semiconductor production lines or various chemical production lines.

[0096] While the present application and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the application as defined by the appended claims. For example, many of the processes discussed above can be implemented in different methodologies and replaced by other processes or combinations thereof. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As such, other devices, processes, compositions, means, methods and steps not expressly discussed herein but which are a part of the scope of the present application are intended to be embraced by the language of the following claims.

Claims

1. A diaphragm valve with a liquid leakage detector, characterized in that: include: A controller comprising: a drive rod; and a diaphragm driven by the drive rod; A subject, including: an opening covered by the controller; and a chamber that accommodates the diaphragm moving therein, wherein the chamber is blocked by the diaphragm being driven to the bottom of the chamber; and A detector detects leakage above the diaphragm, wherein the detector is connected to the outside.

2. The diaphragm valve according to claim 1, wherein The detector includes: Two wires, one end of each wire is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage that causes a short circuit between the detectors, the two wires are connected; and a sensing module connected to the two wires, wherein the sensing module detects electrical continuity between the two wires and sends a signal to a transmitter or a processor if the two wires are electrically conductive. The two electric wires pass through a hole on a wall of the opening, and a threaded tube on the wall of the opening fixes the two electric wires through a nut.

3. The diaphragm valve according to claim 2, wherein: Also includes: a threaded sleeve covering the opening; and An inner shell is installed in the threaded sleeve, wherein the inner shell has a through hole for accommodating a part of the driving rod, and the two wires pass through the inner shell.

4. The diaphragm valve according to claim 3, wherein: Also includes: a flange located above the diaphragm and within the inner shell, and through which the two wires pass; a connector having a rod inserted into the diaphragm and a circular recess into which the driving rod is inserted, wherein the detection space is located between the diaphragm, the flange and the connector; and An O-ring is located on an edge of the inner shell.

5. A diaphragm valve with a liquid leakage detector, characterized in that: include: A controller comprising: a drive rod with a piston mounted thereon; One cylinder; a pneumatic port for moving the drive rod by pumping air into or exhausting air from the space between the cylinder and the piston; a diaphragm driven by the drive rod; and A subject, including: an opening covered by the controller; and a chamber that accommodates the diaphragm moving therein, wherein the chamber is blocked by the diaphragm being driven to the bottom of the chamber; and A detector is installed above the diaphragm to detect a leak, wherein the detector is connected to the outside.

6. The diaphragm valve according to claim 5, wherein: The detector includes two wires, one end of each of which is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage causing a short circuit between the detectors, the two wires are connected, The two electric wires pass through a hole on a wall of the opening, and a threaded tube on the wall of the opening fixes the two electric wires through a nut.

7. The diaphragm valve according to claim 6, wherein: Also includes: A sensing module is connected to the two wires, wherein the sensing module detects electrical conduction between the two wires and transmits a signal to a transmitter or a processor if the two wires are conductive.

8. The diaphragm valve according to claim 6, wherein: Also includes: a threaded sleeve covering the opening; an inner housing mounted in the threaded sleeve, wherein the inner housing has a through hole for accommodating a portion of the driving rod, and the two wires pass through the inner housing; and A flange is located above the diaphragm and inside the opening, and the two wires pass through the flange.

9. A diaphragm valve with a liquid leakage detector, characterized in that: include: One chamber, a diaphragm that moves within the chamber; and A detector is installed above the diaphragm to detect a leak, wherein the detector is connected to the outside.

10. The diaphragm valve according to claim 9, wherein The detector includes two wires, one end of each wire is located in a detection space above the diaphragm, and the two wires are separated, wherein if there is a leakage resulting in a short circuit between the detectors, the two wires are connected.

Images