Ultra-pure compressed air supply system in optical lens storage facility

Abstract

The ultra-pure compressed air supply system in the optical lens storage facility comprises a machine box arranged on the periphery of a warehouse, and an air compressor, a first buffer tank, a drying machine, a filtering assembly and a second buffer tank which are sequentially connected through a first air pipeline are arranged in the machine box; the air outlet end of the first air pipeline is communicated with a fold line coil pipeline in the warehouse, a sensor assembly and a purifier are sequentially arranged on the fold line coil pipeline, and purified gas is shunted and conveyed into optical equipment through a second air pipeline. According to the scheme, the ultra-pure compressed air supply system is designed according to the storage requirement of a specially-customized lens, the heatless regeneration adsorption type drying machine is combined with the purifier, ultra-low-humidity air is provided, and the lens is prevented from being mildewed or oxidized; the broken line disc pipeline and flow division design can be flexibly arranged according to the warehouse layout, and the large-area or multi-area gas supply requirement is met; the diaphragm valve and the two-stage pressure reducing valve precisely control airflow distribution, and the gas utilization requirements of different optical devices are met.

Description

Technical Field

[0001] This utility model relates to optical lens storage protection technology, specifically to an ultra-high purity compressed air supply system in an optical lens storage facility. Background Technology

[0002] During the storage of optical lenses and the maintenance of precision optical instruments, environmental contaminants such as dust, moisture, and corrosive gases can contaminate, oxidize, or mold the lens surface, severely affecting optical performance and lifespan. Therefore, the storage environment for optical lenses typically requires highly clean and dry air conditions to maintain their optical accuracy and stability.

[0003] Currently, some storage devices reduce humidity by connecting a sealed drying chamber or filling with nitrogen on one side. However, these methods cannot effectively remove fine particulate matter, and nitrogen supply costs are high, making long-term use uneconomical. Furthermore, they cannot meet the long-term storage needs of multiple optical lenses. Therefore, there is an urgent need for a highly efficient, energy-saving, and intelligent ultra-high purity compressed air supply system that can provide a continuous and stable supply of ultra-clean air to optical lens storage facilities, while also possessing adaptive adjustment capabilities to reduce energy consumption and improve storage security. Utility Model Content

[0004] In view of the shortcomings of the existing technology, this utility model provides an economical and efficient ultra-high purity compressed air supply system.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] An ultra-high purity compressed air supply system for an optical lens storage facility includes a chassis located on the periphery of the warehouse. Inside the chassis are an air compressor, a first buffer tank, a dryer, a filter assembly, and a second buffer tank, which are connected in sequence via a first air duct. The outlet of the first air duct is connected to a zigzag conical pipeline inside the warehouse. A sensor assembly and a purifier are sequentially installed on the zigzag conical pipeline. The purified gas is then diverted and delivered to the optical equipment via a second air duct.

[0007] Furthermore, at least one air compressor is provided.

[0008] Furthermore, the air compressor, the first buffer tank, the filter assembly, and the second buffer tank are all equipped with drain valves at their bottoms, and drain pipes are connected to the drain valves.

[0009] Furthermore, pressure gauges and safety valves are installed on the top of both the first and second buffer tanks.

[0010] Furthermore, the dryer is a heatless regenerative adsorption dryer with a pressure dew point of -70℃; the filter assembly includes two sets of filters, with increasing dust and oil removal precision along the air delivery direction of the first air duct.

[0011] Furthermore, the sensor assembly includes a pressure sensor, a temperature sensor, a dew point meter, and a pressure gauge.

[0012] Furthermore, the first air duct is a BA stainless steel duct, and the second air duct is an EP stainless steel duct.

[0013] Furthermore, the second air duct is equipped with multiple diaphragm valves.

[0014] Furthermore, a diaphragm valve, a secondary pressure reducing valve, a ferrule connector, and a PFA hose are sequentially installed between the second air duct and the optical equipment.

[0015] The beneficial effects of this utility model are as follows: This solution designs an ultra-high purity compressed air supply system for the storage needs of specially customized lenses for lithography machines below 7nm. By setting up a container around the warehouse, a large-footprint air compressor, buffer tank, dryer, filter components, etc. are integrated into the container to form a small air supply station. Among them, the heatless regenerative adsorption dryer (dew point -70℃) combined with the purifier provides ultra-low humidity air (H2O content ≤100ppmv) to prevent lens mold or oxidation; the zigzag coil pipeline + diversion design (second air duct) can be flexibly arranged according to the warehouse layout to meet the air supply needs of large areas or multiple areas; the diaphragm valve + two-stage pressure reducing valve precisely controls the airflow distribution to adapt to the air requirements of different optical equipment. This technical solution achieves precise control of the optical lens storage environment by optimizing the air handling process, improving purification accuracy, and enhancing system stability. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the external air supply route for an ultra-high purity compressed air supply system in an optical lens storage facility.

[0017] Figure 2 This is a schematic diagram of the external air supply structure of an ultra-high purity compressed air supply system in an optical lens storage facility.

[0018] Figure 3 A schematic diagram of the internal air supply route of an ultra-high purity compressed air supply system in an optical lens storage facility.

[0019] 1. Chassis; 2. First air duct; 3. Air compressor; 4. First buffer tank; 5. Dryer; 6. Filter assembly; 7. Second buffer tank; 8. Zigzag coil tubing; 9. Sensor assembly; 10. Purifier; 11. Second air duct; 12. Optical equipment; 13. Drain valve; 14. Drain pipe; 15. Pressure gauge; 16. Safety valve; 17. Diaphragm valve; 18. Secondary pressure reducing valve; 19. Compression fitting; 20. PFA hose. Detailed Implementation

[0020] The present invention will be further described in detail below with reference to the embodiments, so that those skilled in the art can implement it based on the description.

[0021] Example: This case provides, for example... Figures 1 to 3 The diagram shows an ultra-high purity compressed air supply system for an optical lens storage facility, which consists of two parts: an internal warehouse structure and an external warehouse structure.

[0022] The system includes a housing 1 located on the periphery of the warehouse. In this application, the housing is a ground-mounted container. Inside the housing 1 are an air compressor 3, a first buffer tank 4, a dryer 5, a filter assembly 6, and a second buffer tank 7, which are connected in sequence via a first air duct 2. The outlet of the first air duct 2 is connected to a zigzag conduit 8 inside the warehouse. A sensor assembly 9 and a purifier 10 are installed in sequence on the zigzag conduit 8. The purified gas is then diverted and transported to the optical device 12 via a second air duct 11.

[0023] In another embodiment, the air compressor 3 has a pressure dew point of 3~7°C, and a backup air compressor can be provided as needed.

[0024] In this embodiment, the air compressor 3, the first buffer tank 4, the filter assembly 6 and the second buffer tank 7 are all equipped with drain valves 13 at the bottom. A drain pipe 14 is connected to the drain valve 13 to periodically discharge condensate and impurities, thereby extending the equipment life.

[0025] In this embodiment, pressure gauges 15 and safety valves 16 are installed on the top of both the first buffer tank 4 and the second buffer tank 7; the dual buffer tank design plays a role in balancing air pressure fluctuations, and is equipped with pressure gauges and safety valves to monitor in real time and automatically release pressure to ensure safety.

[0026] In this embodiment, the dryer 5 is a heatless regenerative adsorption dryer with a pressure dew point of -70℃; the filter assembly 6 includes two sets of filters, with the dust and oil removal accuracy of the two sets of filters increasing along the air delivery direction of the first air duct 2.

[0027] In this embodiment, the sensor assembly 9 includes a pressure sensor, a temperature sensor, a dew point meter, and a pressure gauge, which monitor the gas state in real time. The data can be connected to the central control system to achieve dynamic adjustment.

[0028] In this embodiment, the first air duct 2 is a BA stainless steel duct, and the second air duct 11 is an EP stainless steel duct. Multiple diaphragm valves 17 are installed on the second air duct 11. Between the second air duct 11 and the optical device 12, a diaphragm valve 17, a secondary pressure reducing valve 18, a compression fitting 19, and a PFA hose 20 are sequentially arranged. The matching design of the diaphragm valve 17 and the secondary pressure reducing valve 18 precisely controls the airflow distribution, adapting to the air requirements of different optical devices; the compression fitting 19 and the PFA hose 20 facilitate quick connection to the optical device, reducing installation complexity.

[0029] The air quality ultimately delivered to the optical lens storage chamber by the ultra-high purity compressed air supply system in the optical lens storage facility provided in this case is shown in Table 1.

[0030] Table 1

[0031]

[0032] Based on Table 1, this case, through the above structural design, optimizes the air handling process, improves purification accuracy, and enhances system stability, enabling precise control over the optical lens storage environment.

[0033] Although the embodiments of this utility model have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this utility model. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, this utility model is not limited to the specific details.

Claims

1. An ultra-high purity compressed air supply system for an optical lens storage facility, characterized in that, It includes a chassis located on the periphery of the warehouse, inside which are installed an air compressor, a first buffer tank, a dryer, a filter assembly, and a second buffer tank connected in sequence via a first air duct; the outlet of the first air duct is connected to a zigzag coil pipeline inside the warehouse, on which a sensor assembly and a purifier are installed in sequence, and the purified gas is diverted and delivered to the optical equipment via a second air duct.

2. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, At least one air compressor shall be installed.

3. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, The air compressor, the first buffer tank, the filter assembly, and the second buffer tank are all equipped with drain valves at their bottoms, and drain pipes are connected to the drain valves.

4. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, Pressure gauges and safety valves are installed on the top of both the first and second buffer tanks.

5. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, The dryer is a heatless regenerative adsorption dryer with a pressure dew point of -70℃; the filter assembly includes two sets of filters, with increasing dust and oil removal precision along the air delivery direction of the first air duct.

6. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, The sensor assembly includes a pressure sensor, a temperature sensor, a dew point meter, and a pressure gauge.

7. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, The first air duct is a BA stainless steel duct, and the second air duct is an EP stainless steel duct.

8. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, The second air duct is equipped with multiple diaphragm valves.

9. The ultra-high purity compressed air supply system in the optical lens storage facility according to claim 1, characterized in that, A diaphragm valve, a secondary pressure reducing valve, a ferrule connector, and a PFA hose are sequentially installed between the second air duct and the optical equipment.

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