Compatible piston air valve actuator

Abstract

The present invention provides an improved diaphragm valve that maintains good symmetry to minimize parasitic motion resulting from any thermal expansion, while eliminating sliding or rotation of joints and surfaces that cause friction. [Solution] A diaphragm valve is provided. The valve body includes a valve passage including an inlet passage and an outlet passage. The diaphragm valve further includes a valve seat adjacent to the valve passage. The valve also includes a diaphragm that is movable to be separated from or in contact with the valve seat. Furthermore, the valve includes a piston coupled to the diaphragm and a flexure assembly coupled to the piston. The input force outputs a force that is applied to the piston in a first direction and results in a force that, when the diaphragm is normally in the closed position, results in a force that moves the diaphragm to the open position, and when the diaphragm is normally in the open position, results in a force that moves the diaphragm to the closed position.

Description

Technical Field

[0001] The present disclosure generally relates to diaphragm valves, and more particularly to diaphragm valves having valve components including an annular flexure.

Background Art

[0002] Semiconductor processing apparatuses generally use one or more reactants, such as precursors, as feed chemicals for performing substrate processes, such as deposition, cleaning, and etching processes. Such semiconductor processing apparatuses often include a reaction chamber to which a precursor is supplied to perform a desired process. The supply of the precursor to the reaction chamber may be carried out by a precursor delivery system, and such a precursor delivery system may utilize one or more valves to control the flow of the precursor into the reaction chamber.

[0003] The precursor delivery system may utilize one or more diaphragm valves positioned in the flow path between the precursor source container and the reaction chamber to enable control of the flow of the precursor into the reaction chamber. Precursors, such as vapor-phase precursors, may be pulsed into the reaction chamber by opening and closing appropriate diaphragm valves in the precursor delivery system. The diaphragm valve may include an actuator configured to open and close a flexible diaphragm relative to a valve seat. When the diaphragm valve is in the open position, the precursor can pass through the valve flow path and enter the reaction chamber. When the diaphragm valve is in the closed position, the diaphragm blocks the valve flow path and prevents the precursor from entering the reaction chamber.

[0004] An example of a semiconductor processing apparatus that may utilize a precursor delivery system comprising one or more diaphragm valves is an atomic layer deposition (ALD) apparatus. ALD is a method for depositing thin films on a substrate, comprising sequential and alternating self-saturating surface reactions, in which one or more gas-phase precursors can be pulsed into an ALD reaction chamber to enable film deposition. The ALD process may require precise temperature control of the precursor, not only in the reaction chamber but also in the precursor delivery system used to supply the precursor to the reaction chamber. In particular, precise temperature control of the wet surface of the precursor delivery system, i.e., the surface that is in direct contact with the precursor, may be desirable for optimal film deposition and apparatus lifespan.

[0005] High-speed pulse valves are crucial for atomic layer deposition because a large number of pulses are used in the process. However, current high-speed pulse valves cannot be fitted into confined spaces due to the valves being close together. Furthermore, conventionally available pneumatic high-speed pulse valves have limited velocity and temperature capabilities because the tightly fitting sliding piston joints cause friction and thermal expansion during coupling. Moreover, any thermal expansion can result in asymmetric expansion. [Overview of the project] [Problems that the invention aims to solve]

[0006] Therefore, in this field, there is a need for improved diaphragm valves that do not involve sliding or rotation of joints and surfaces that cause friction, while maintaining good symmetry to minimize parasitic motion resulting from any thermal expansion. [Means for solving the problem]

[0007] This summary is provided to introduce some concepts in a simplified form. These concepts are described in more detail below in the detailed description of the exemplary embodiments of this disclosure. This summary is not intended to identify any major or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0008] A valve is provided. Specifically, in some examples, a diaphragm valve is provided. The valve body includes a valve passage that includes an inlet passage and an outlet passage. The valve further includes a valve seat adjacent to the valve passage. The valve also includes a diaphragm that is movable to contact the valve seat. Furthermore, the valve includes a piston connected to the diaphragm and an annular flexure connected to the piston.

[0009] A method for operating a diaphragm valve is provided. The method includes connecting an annular flexure to the piston of the diaphragm valve. The method further includes connecting the piston to a diaphragm. The method also includes applying an input force to the piston in a first direction and outputting the resulting force such that when the diaphragm is in the normally closed position the resulting force moves the diaphragm to the open position, and when the diaphragm is in the normally open position the resulting force moves the diaphragm to the closed position.

[0010] An actuator is provided. The actuator includes a diaphragm that is movable to separate from or contact with a valve seat. The actuator also includes a piston coupled to the diaphragm. The actuator further includes a flexure assembly coupled to the piston, thereby acting on the diaphragm by applying force to the flexure assembly.

[0011] All of these embodiments are intended to be within the scope of the present invention disclosed herein. These embodiments and other embodiments will be readily apparent to those skilled in the art from the following “Modes for Carrying Out the Invention” of certain embodiments with reference to the following appended drawings, and the present invention is not limited to any particular embodiment disclosed.

[0012] This specification specifically points out embodiments of the present invention and concludes in the claims as explicitly stated, while the advantages of the embodiments of this disclosure can be more readily identified from the description of certain embodiments of the embodiments of this disclosure, when read in conjunction with the accompanying drawings. [Brief explanation of the drawing]

[0013] [Figure 1A] This is a cross-sectional view of one exemplary diaphragm valve, illustrating several examples of this technology. [Figure 1B] This is a cross-sectional view of one exemplary diaphragm valve, illustrating several examples of this technology. [Figure 2] This is a cross-sectional view of another exemplary diaphragm valve, illustrating some examples of this technology. [Figure 3] This is a cross-sectional view of yet another exemplary diaphragm valve, illustrating some examples of this technology. [Figure 4] These are cross-sectional views of symmetrical flexure assemblies, such as those shown in Figures 2 and 3, which are some examples of this technology. [Figure 5] These are flowcharts illustrating how to operate the diaphragm valves shown in Figures 1 to 3, using some examples of this technology. [Modes for carrying out the invention]

[0014] Naturally, the elements in the figures are illustrated for simplification and clarity, and are not necessarily drawn to actual size. For example, the relative sizes of some of the elements in the figures may be exaggerated relative to others to help improve understanding of the illustrated embodiments of this disclosure.

[0015] While certain embodiments and examples are disclosed below, it will be understood by those skilled in the art that the scope of the invention extends beyond the specifically disclosed embodiments and / or uses of the invention, as well as obvious modifications and equivalents thereof. Therefore, the scope of the invention disclosed is not intended to be limited by the specific embodiments disclosed below.

[0016] The examples presented herein are not intended to represent any particular material, apparatus, structure, or device in actual terms, but are merely idealized representations used to illustrate embodiments of the disclosure.

[0017] As used herein, the term “substrate” may refer to any substrate material(s) on which a device, circuit, or film may be used or on which a device, circuit, or film may be formed.

[0018] As used herein, the term "atomic layer deposition" (ALD) may refer to a vapor deposition process in which deposition cycles, preferably a plurality of consecutive deposition cycles, are performed within a process chamber. Typically, during each deposition cycle, a precursor chemisorbs onto a deposition surface (e.g., a substrate surface or a previously deposited underlying surface (such as material from a previous ALD cycle)) to form a monolayer or sub-monolayer that does not readily react with additional precursors (i.e., a self-limiting reaction). Thereafter, if desired, a reactant (e.g., another precursor or a reactive gas) may then be introduced into the process chamber for use in converting the chemisorbed precursor into a desired material on the deposition surface. Typically, this reactant is capable of further reacting with the precursor. Additionally, a purge step may also be utilized during each cycle to remove excess precursor from the process chamber after conversion of the chemisorbed precursor and / or to remove excess reactant and / or reaction by-products from the process chamber. Further, the term "atomic layer deposition" as used herein is also meant to include processes indicated by related terms such as "chemical vapor deposition atomic layer deposition", "atomic layer epitaxy" (ALE), molecular beam epitaxy (MBE), gas-source MBE, or organometallic MBE, as well as chemical beam epitaxy when carried out with alternating pulses of precursor compositions, reactive gases, and purge (e.g., inert carrier) gases.

[0019] As used herein, the term "chemical vapor deposition" may refer to any process in which a substrate is exposed to one or more volatile precursors that react and / or decompose on the surface of the substrate to produce a desired deposition.

[0020] As used herein, the term "wet surface" may refer to the surface of a valve that can come into direct contact with a chemical precursor.

[0021] As used herein, the term "non-wet surface" may refer to the surface of a valve that may not come into direct contact with a chemical precursor.

[0022] In this specification, it will be understood that the terms "on" or "over" may be used to describe a relative location relationship. Another element or layer may be directly present on the layer mentioned, or another layer (intermediate layer) or element may be interposed therebetween, or the layer may be disposed on the layer mentioned but does not completely cover the surface of the layer mentioned. Thus, unless the term "directly" is used separately, the terms "on" or "over" will be interpreted as relative concepts. Similarly, it will be understood that the terms "under / below", "underlying", or "below" will be interpreted as relative concepts.

[0023] Embodiments of the present disclosure may include valves, valve components, and related methods for forming valve components. The valve may further include a diaphragm valve, a bellows valve, or any other valve that can incorporate the embodiments described in the present disclosure. In particular, embodiments of the present disclosure provide a diaphragm valve that may incorporate a flexible heater disposed on a non-wetted surface of the diaphragm, and the flexible heater enables accurate temperature control with respect to the wetted surface of the diaphragm. For example, the diaphragm valve of the present disclosure may be used as a component of a precursor delivery system used to deliver one or more precursors to a reaction chamber of a deposition apparatus such as an ALD apparatus, whereby the diaphragm valve of the present disclosure may result in film deposition with a reduced defect rate. Further, the diaphragm valve of the present disclosure can not only extend the operating life (i.e., "operation time") of a semiconductor processing apparatus, but also shorten the period between maintenance cycles.

[0024] Figure 1 shows a cross-sectional view of an exemplary diaphragm valve 100 according to an embodiment of the present disclosure. It should be noted that the diaphragm valve 100 in Figure 1 is a non-limiting exemplary configuration for a valve incorporating a valve component having a flexible heater. Alternative configurations of valves that may incorporate the flexible heater of the present disclosure may be envisioned. It should also be noted that Figure 1 shows a simplified cross-sectional view of an exemplary valve illustrating the main features of the valve necessary to understand the embodiments of the present disclosure.

[0025] More specifically, Figure 1A shows a cross-sectional view of an exemplary diaphragm valve 100 in the open position, where the valve passage 120 located between the inlet passage 122 and the outlet passage 124 is not blocked by the flexible diaphragm 108, thereby allowing the precursor to flow freely through the diaphragm valve 100. Figure 1B shows a cross-sectional view of an exemplary diaphragm valve 100 in the closed position, where the valve passage 120 located between the inlet passage 122 and the outlet passage 124 is blocked by the flexible diaphragm 108, thereby preventing the precursor from flowing through the diaphragm valve 100.

[0026] More specifically, the valve body 102 may comprise a valve flow path 120 including an inlet passage 122 and an outlet passage 124. The inlet passage 122 may be fluidly connected to a raw material container (not shown) containing a suitable precursor. For example, the raw material container may contain a solid-phase, liquid-phase, gaseous precursor, or a mixture thereof. In embodiments where the precursor is solid-phase or liquid-phase, the raw material container may also include means for converting the precursor to a gaseous precursor, such as one or more heaters. The outlet passage 124 may be fluidly connected to a reaction chamber of a semiconductor processing apparatus. For example, the reaction chamber may be used for one or more deposition processes, etching processes, and / or cleaning processes. In certain embodiments of this disclosure, the outlet passage 124 may be fluidly connected to a reaction chamber of a semiconductor deposition apparatus, such as an atomic layer deposition (ALD) apparatus or a chemical vapor deposition (CVD) apparatus.

[0027] The valve seat 118 may be positioned adjacent to the valve passage 120 or may surround the upper part of the inlet passage 122. The valve seat 118 includes an upper surface 116 that presents a sealing surface against which the wet surface 114 of the flexible diaphragm 108 is pressed to close the valve passage 120. The upper surface 116 of the valve seat 118 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between the valve seat 118 and the flexible diaphragm 108 when the flexible diaphragm 108 is in the closed position, as shown in Figure 2. Although the upper surface 116 of the valve seat 118 is shown as a plane in Figures 1A and 1B, alternative sealing surfaces for the upper surface 116 may be used. For example, the upper surface 116 of the valve seat 118 may include a seating ridge (not shown) extending upward from the upper surface 116 toward the flexible diaphragm 108, the seating ridge being sufficiently protruding and of an appropriate size to deform the wet surface of the flexible diaphragm 108 when the flexible diaphragm 108 is pressed against the valve seat 118.

[0028] The flexible diaphragm 108 may include a wet surface 114, i.e., a surface that may be in direct contact with the precursor flowing through the diaphragm valve 100, and a non-wet surface 112, i.e., a surface that may not be in direct contact with the precursor flowing through the diaphragm valve 100. The flexible diaphragm 108 may be disposed adjacent to the valve passage 120 and may be fixed to the valve body 102 by a rim 126. The valve may further include a flexible heater, which may be disposed on the non-wet surface 112 of the flexible diaphragm 108.

[0029] The diaphragm valve 100 further comprises an actuator which may be operable to open and close the valve passage 120 by moving the surface of the flexible diaphragm 108 between a contact state and a non-contact state with the valve seat. More specifically, the actuator may be coupled to a blade flexure 106. The blade flexure 106 is further coupled to a piston 104 which contacts the upper surface of the flexible diaphragm 108. The actuator may include several operating mechanisms, including but not limited to pneumatic, hydraulic, and piezoelectric mechanisms.

[0030] The blade flexure 106 is designed to flex in the direction of axis 152. Furthermore, the blade flexure 106 is fixed to the piston 104 at one end 162 and left unfixed at the other end. Therefore, when subjected to an external force perpendicular to its length, the blade flexure 106 deforms, allowing rotational movement around the intersection of axes 152a, 152b, and 154.

[0031] During operation, air is injected into the cylinder that holds the diaphragm valve 100. Therefore, the internal pressure increases within the internal space 130 of the diaphragm valve 100. When pressurized, the piston 104 attempts to become spherical, and as a result, the blade flexure 106 bends and extends, allowing for translational degrees of freedom. Thus, the piston 104 is actuated by the internal pressure, compressing the flexible diaphragm 108 and acting the diaphragm valve 100 (see Figure 1B). When the pressure is released, the flexible diaphragm 108 is depressurized, and the diaphragm valve 100 opens.

[0032] Figure 2 shows a cross-sectional view of another exemplary diaphragm valve 200 according to an embodiment of the present disclosure. In Figure 2, the diaphragm valve 200 is shown in the open position, that is, the valve passage 220, which is located between the inlet passage 222 (functioning similarly to the inlet passage 122) and the outlet passage 224 (functioning similarly to the outlet passage 124), is not blocked by the flexible diaphragm 208 (functioning similarly to the flexible diaphragm 108), thereby allowing the precursor to flow freely through the diaphragm valve 200.

[0033] Similar to the diaphragm valve 100 in Figure 1, the valve seat 218 may be positioned adjacent to the valve passage 220 or surround the upper part of the inlet passage 222. The valve seat 218 includes an upper surface 216 (functioning similarly to the upper surface 116) that presents a sealing surface against which the wet surface 214 of the flexible diaphragm 208 is pressed to close the valve passage 220. The upper surface 216 of the valve seat 218 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between the valve seat 218 and the flexible diaphragm 108 when the flexible diaphragm 108 is in the closed position.

[0034] The flexible diaphragm 208 may include a wet surface 214 (functioning similarly to the wet surface 114 in Figure 1), i.e., a surface that may be in direct contact with the precursor flowing through the diaphragm valve 200, and a non-wet surface 212 (functioning similarly to the non-wet surface 112), i.e., a surface that may not be in direct contact with the precursor flowing through the diaphragm valve 200. In exemplary embodiments, the diaphragm valve 200 may be actuated using a blade flexure 206 (functioning similarly to the blade flexure 106). In exemplary embodiments, the diaphragm valve 200 may be actuated via an actuator (functioning similarly to the actuator in Figure 1), which may include, but is not limited to, pneumatic, hydraulic, and piezoelectric mechanisms.

[0035] Furthermore, the diaphragm valve 200 includes a symmetrical flexure assembly 400, which is described in more detail in Figure 4. The symmetrical flexure assembly 400 includes a first flexure section 410 and a second flexure section 420. As shown in Figure 4, in an exemplary embodiment, the first flexure section 410 is nested within the second flexure section 420. In an exemplary embodiment, the first flexure section 410 and the second flexure section 420 are two separate parts. Both the first flexure section 410 and the second flexure section 420 include a thin segment and a thick segment.

[0036] The first flexure section 410 includes one thick, elongated segment 412a and 412b of the flexure. The one thick, elongated segment 412a and 412b of the flexure is parallel to the axis 452. The first flexure section 410 also includes one thick, short segment 414a, 414b, 414c, and 414d of the flexure. Furthermore, the first flexure section 410 includes one thin, angular segment 418a, 418b, 418c, and 418d of the flexure. The first flexure section 410 also includes one thin connecting segment 416a and 416b of the flexure.

[0037] In exemplary embodiments, one thicker, longer segment 412a and 412b of the flexure is thicker than one thicker, shorter segment 414a, 414b, 414c, and 414d of the flexure. Furthermore, in exemplary embodiments, one thin, angular segment 418a, 418b, 418c, and 418d of the flexure is nonlinear (i.e., curved). In exemplary embodiments, one thin, connecting segment 416a and 416b of the flexure is nonlinear (i.e., curved). In exemplary embodiments, one thicker, shorter segment 414a, 414b, 414c, and 414d of the flexure is angled inward to form an acute angle with one thicker, longer segment 412a and 412b of the flexure. Furthermore, one of the thicker, shorter segments 414a and 414b of the flexure forms an obtuse angle, and one of the thicker, shorter segments 414c and 414d of the flexure also form an obtuse angle.

[0038] As shown in Figure 4, one thick, long segment 412a of the flexure connects to one thin corner segment 418a of the flexure. One thin corner segment 418a of the flexure connects to one thick, short segment 414b of the flexure. One thick, short segment 414b of the flexure connects to one thin connecting segment 416a of the flexure. One thin connecting segment 416a of the flexure connects to one thick, short segment 414a of the flexure. One thick, short segment 414a of the flexure connects to one thin corner segment 418d of the flexure. One thin corner segment 418d of the flexure connects to one thick, long segment 412b of the flexure. One thick, long segment 412b of the flexure connects to one thin corner segment 418c of the flexure. One thin corner segment 418c of the flexure connects to one thick, short segment 414d of the flexure. One thick, short segment 414d of the flexure connects to one thin connecting segment 416b of the flexure. One thin connecting segment 416b of the flexure connects to one thick, short segment 414c of the flexure. One thick, short segment 414c of the flexure connects to one thin corner segment 418b of the flexure. One thin corner segment 418b of the flexure connects to one thick, long segment 412a of the flexure.

[0039] In exemplary embodiments, one thin connecting segment 416a and 416b of the flexure also includes a thicker portion. That is, one thin connecting segment 416a of the flexure may include a first thin portion connected to one thicker, shorter segment 414a of the flexure. One thicker, shorter segment 414a of the flexure is further connected to the thicker connecting portion, which is further connected to a second thin portion connected to one thicker, shorter segment 414b of the flexure. Similarly, one thin connecting segment 416b of the flexure may include a third thin portion connected to one thicker, shorter segment 414c of the flexure. One thicker, shorter segment 414c of the flexure is further connected to the thicker connecting portion, which is further connected to a fourth thin portion connected to one thicker, shorter segment 414d of the flexure. Such a design makes the first flexure section 410 more robust so that when pressure is applied to the first flexure section 410, one of the thin connecting segments 416a or 416b of the flexure has the ability to cope with the increased force.

[0040] The second flexure section 420 includes two thicker, longer segments 424a and 424b of the flexure. The two thicker, longer segments 424a and 424b of the flexure are parallel to the axis 454. The second flexure section 420 also includes two thicker, shorter segments 422a, 422b, 422c, and 422d of the flexure. Furthermore, the second flexure section 420 includes two thinner, angular segments 428a, 428b, 428c, and 428d of the flexure. The second flexure section 420 also includes two thinner connecting segments 426a and 426b of the flexure.

[0041] In the exemplary embodiment, the two thin corner segments 428a, 428b, 428c, and 428d of the flexure are nonlinear (i.e., curved). In the exemplary embodiment, the two thin connecting segments 426a and 426b of the flexure are nonlinear (i.e., curved). In the exemplary embodiment, the two thicker, shorter segments 422a, 422b, 422c, and 422d of the flexure are angled inward to form acute angles with the two thicker, longer segments 424a and 424b of the flexure. Furthermore, the two thicker, shorter segments 422a and 422b of the flexure form obtuse angles, and the two thicker, shorter segments 422c and 422d of the flexure form obtuse angles.

[0042] As shown in Figure 4, the two thick, elongated segments 424a of the flexure are connected to the two thin corner segments 428a of the flexure. The two thin corner segments 428a of the flexure are connected to the two thick, short segments 422a of the flexure. The two thick, short segments 422a of the flexure are connected to the two thin connecting segments 426a of the flexure. The two thin connecting segments 426a of the flexure are connected to the two thick, short segments 422b of the flexure. The two thick, short segments 422b of the flexure are connected to the two thin corner segments 428b of the flexure. The two thin corner segments 428b of the flexure are connected to the two thick, elongated segments 424b of the flexure. Two thick, long segments 424b of the flexure are connected to two thin corner segments 428c of the flexure. Two thin corner segments 428c of the flexure are connected to two thick, short segments 422c of the flexure. Two thick, short segments 422c of the flexure are connected to two thin connecting segments 426b of the flexure. Two thin connecting segments 426b of the flexure are connected to two thick, short segments 422d of the flexure. Two thick, short segments 422d of the flexure are connected to two thin corner segments 428d of the flexure. Two thin corner segments 428d of the flexure are connected to two thick, long segments 424a of the flexure.

[0043] In exemplary embodiments, the two thin connecting segments 426a and 426b of the flexure also include thicker portions. That is, the two thin connecting segments 426a of the flexure may include a first thin portion connected to two thicker, shorter segments 422a of the flexure. The two thicker, shorter segments 422a of the flexure are further connected to a thicker connecting portion, which in turn connects to a second thin portion connected to two thicker, shorter segments 422b of the flexure. Similarly, the two thin connecting segments 426b of the flexure may include a third thin portion connected to two thicker, shorter segments 422c of the flexure. The two thicker, shorter segments 422c of the flexure are further connected to a thicker connecting portion, which in turn connects to a fourth thin portion connected to two thicker, shorter segments 422d of the flexure. Such a design makes the second flexure section 420 more robust so that when pressure is applied to the second flexure section 420, the two thin connecting segments 426a or 426b of the flexure have the ability to cope with the increased force.

[0044] As further shown in Figure 4, the first flexure section 410 may be nested within the second flexure section 420 such that when an input force (such as force 432) is applied to the second flexure section 420, two thin connecting segments 426a of the flexure connect to one thicker, longer segment 412a of the flexure, and two thin connecting segments 426b of the flexure connect to one thicker, longer segment 412b of the flexure. During operation, when force 432 is applied to the two thicker, longer segments 424a of the flexure of the second flexure section 420 in a direction along the axis 452, the resulting force 434 is output inward along the axis 454. Because the two thin connecting segments 426b of the flexure and the one thicker, longer segment 412b of the flexure are connected, the resulting force 434 in the second flexure section 420 is the force applied to the one thicker, longer segment 412b of the flexure. The resulting force 436 is output along the axis 452 in the opposite direction to force 432.

[0045] Referring again to Figure 2, the symmetrical flexure assembly 400 is connected to the piston 204. As shown in Figure 2, the upper piston portion 204-1 (functioning like a conventional piston) is connected to two thicker, longer segments 424a of the flexure, and the lower piston portion 204-2 (functioning like a conventional piston stem) is connected to one thinner connecting segment 416b of the flexure. Due to the operation of the symmetrical flexure assembly 400, when a force 432 is applied downward to the piston 204 along axis 252 (aligned with axis 452), the resulting force 436 is output in the opposite direction to the force 432 that holds the flexible diaphragm 208 in the open position. In contrast, when the force 432 is released, the resulting force 436 is in the opposite direction, pushing the flexible diaphragm 208 to the closed position. Therefore, in the exemplary embodiment shown in Figure 4, the flexible diaphragm 208 naturally moves to the closed position to close the valve passage 220. However, when the input force 432 is applied to the piston 204, the flexible diaphragm 208 is pulled upward and moved to the open position, as a result opening the valve passage 220.

[0046] Figure 3 shows a cross-sectional view of another exemplary diaphragm valve 300 according to an embodiment of the present disclosure. In Figure 3, the diaphragm valve 300 is shown in the open position, that is, the valve passage 320, located between the inlet passage 322 (functioning similarly to the inlet passage 122) and the outlet passage 324 (functioning similarly to the outlet passage 124), is not blocked by the flexible diaphragm 308 (functioning similarly to the flexible diaphragm 108), thereby allowing the precursor to flow freely through the diaphragm valve 300.

[0047] Similar to the diaphragm valve 100 in Figure 1, the valve seat 318 may be positioned adjacent to the valve passage 320 or surround the upper part of the inlet passage 322. The valve seat 318 includes an upper surface 316 (functioning similarly to the upper surface 116) that presents a sealing surface against which the wet surface 314 of the flexible diaphragm 308 is pressed to close the valve passage 320. The upper surface 316 of the valve seat 318 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between the valve seat 318 and the flexible diaphragm 308 when the flexible diaphragm 308 is in the closed position.

[0048] The flexible diaphragm 308 may include a wet surface 314 (functioning similarly to the wet surface 114 in Figure 1), i.e., a surface that may be in direct contact with the precursor flowing through the diaphragm valve 300, and a non-wet surface 312 (functioning similarly to the non-wet surface 112), i.e., a surface that may not be in direct contact with the precursor flowing through the diaphragm valve 300.

[0049] In exemplary embodiments, the diaphragm valve 300 may be actuated using a blade flexure 306 (functioning similarly to the blade flexure 106). In exemplary embodiments, the diaphragm valve 300 may be actuated via a flexure assembly 310 (functioning similarly to the actuator in Figure 1), which may include, but is not limited to, pneumatic, hydraulic, and piezoelectric mechanisms. However, unlike the diaphragm valves 100 and 200, the flexure assembly 310 is connected perpendicularly to the valve body 302 of the diaphragm valve 300. That is, instead of a force applied along axis 352 (aligned with axes 152, 252, and 452), the input force 332 is applied along axis 354 (aligned with axes 154, 254, and 454). Therefore, another component may be accommodated in the open space. The diaphragm valve 300 further includes a first piston portion 304 and a second piston portion 364. The flexure assembly 310 is connected to the first piston portion 304, and the second piston portion 364 is connected to the flexible diaphragm 308.

[0050] In exemplary embodiments, the flexure assembly 310 may be the first flexure portion 410 of a symmetric flexure assembly 400, but it does not include a second flexure portion 420. Therefore, the function of the flexure assembly 310 will be described using the first flexure portion 410 as a reference. As shown in Figure 3, the flexure assembly 310 is arranged along axes 352 (which may be aligned with axis 452) and 354 (which may be aligned with axis 454). One thicker, longer segment 412b of the flexure may be connected to the first piston portion 304, and one thinner connecting segment 416b of the flexure may be connected to the second piston portion 364. Furthermore, in exemplary embodiments, one thicker, longer segment 412a of the flexure may be fixed to a wall support 382. Thus, the flexure assembly 310 remains centered at the intersection of axes 352 and 354.

[0051] The operation of the first flexure portion 410 causes the input force 332 to be applied inward along the axis 354 (aligned with the axis 454) to the first piston portion 304, causing the first flexure portion 410 to bend and produce an upward force 334 along the axis 352. Thus, the force 334 pushes the flexible diaphragm 308 up to the open position. In contrast, when the force 332 is released, the resulting output force 334 is downward and is released in such a way that the flexible diaphragm 308 returns to the closed position. Therefore, in the exemplary embodiment shown in Figure 3, the flexible diaphragm 308 naturally moves to the closed position to close the valve passage 320. However, when the force 332 is applied to the first piston portion 304, the flexible diaphragm 308 is pulled upward and moved to the open position, as a result opening the valve passage 320.

[0052] Figure 5 shows a method 500 for operating a diaphragm valve, such as diaphragm valve 100. Method 500 includes connecting a flexure assembly (such as blade flexure 106, flexure assembly 310, or first flexure section 410) to the piston 104 or 20 or first piston section 304 of the diaphragm valve, as shown in box 502. In exemplary embodiments of Method 500, the flexure assembly is a symmetrical flexure assembly (such as flexure assembly 310 or symmetrical flexure assembly 400) that connects to the piston and diaphragm.

[0053] In an exemplary embodiment of Method 500, connecting a symmetrical flexure assembly to a piston further includes connecting a first flexure portion, such as 410, to the piston and connecting a second flexure portion, such as 420, to the diaphragm. Method 500 may further include nesting the second flexure portion within the first flexure portion. Method 500 further includes connecting the piston to the diaphragm, as shown in box 504.

[0054] Method 500 also outputs a resulting force, including a force input to the piston in a first direction, as shown in box 506, thereby causing the diaphragm to move to the open position when it is normally in the closed position, and the resulting force to move the diaphragm to the closed position when it is normally in the open position. In exemplary embodiments of Method 500, the resulting force is output in a second direction. In exemplary embodiments of Method 500, the first and second directions are perpendicular to each other. In exemplary embodiments of Method 500, the first direction is opposite to the second direction.

[0055] The exemplary embodiments of this disclosure described above are merely examples of embodiments of the invention as defined by the appended claims and their legal equivalents, and do not limit the scope of the invention. Any equivalent embodiments are intended to fall within the scope of the invention. In fact, various modifications of this disclosure, in addition to those shown and described herein, such as useful alternative combinations of the elements described, may be apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims. [Explanation of Symbols]

[0056] 100 Diaphragm valve 102 Valve body 104 Pistons 106 Blade Flexure 108 Flexible diaphragm 112 Non-wet surfaces 114 Wet surface 116 Top surface 118 valve seats 120 Valve flow path 122 Inflow channel 124 Outflow channel 126 rim 130 Interior space 162 End 200 Diaphragm valve 204 Pistons 206 Blade Flexure 208 Flexible diaphragm 212 Non-wet surfaces 214 Wet surface 216 Top 218 valve seat 220 Valve flow path 222 Inflow channel 224 Outflow channel 300 Diaphragm valve 302 Valve body 304 First piston section 306 Blade Flexure 308 Flexible diaphragm 310 Flexure Assembly 312 Non-wet surfaces 314 Wet surface 316 Top surface 318 valve seat 320 Valve flow path 322 Inflow channel 324 Outflow channel 364 Second piston section 382 Wall support 400 Symmetrical Flexure Assembly 410 First flexure section 420 Second flexure section

Claims

1. It is a valve, A valve body having a valve passage, wherein the valve passage includes an inlet passage and an outlet passage, A valve seat adjacent to the valve passage, A diaphragm that is movable to separate from or to contact the valve seat, The piston connected to the diaphragm, A flexure assembly connected to the piston, A valve equipped with a valve.

2. The aforementioned flexure assembly, The valve according to claim 1, further comprising a blade flexure connected to the piston and the valve body such that when an input force is applied to the piston, the diaphragm moves and contacts the valve seat.

3. The valve according to claim 2, wherein the blade flexure is configured to actuate the valve by increasing the internal pressure of the valve.

4. The aforementioned flexure assembly, A symmetrical flexure assembly connected to a piston, the symmetrical flexure assembly further connected to a diaphragm, wherein when a force input in a first direction is applied to the piston, the resulting force is output in a second direction, thereby moving the diaphragm to separate from the valve seat when the diaphragm is normally in a closed position, and moving the diaphragm to contact the valve seat when the diaphragm is normally in an open position, according to claim 1.

5. The valve according to claim 4, wherein the first direction and the second direction are perpendicular.

6. The symmetrical flexure assembly includes a first flexure portion, and the first flexure portion is One thick, long segment of the first flexure and one thick, long segment of the second flexure, One thick, short segment of the first flexure, one thick, short segment of the second flexure, one thick, short segment of the third flexure, and one thick, short segment of the fourth flexure, A segment of one thin corner of the first flexure, a segment of one thin corner of the second flexure, a segment of one thin corner of the third flexure, and a segment of one thin corner of the fourth flexure, One thin connecting segment of the first flexure, and one thin connecting segment of the second flexure, It further includes, One thick, long segment of the first flexure is connected to one thin corner segment of the first flexure, and one thin corner segment of the first flexure is connected to one thick, short segment of the first flexure, and one thick, short segment of the first flexure is connected to one thin connecting segment of the first flexure, and one thin connecting segment of the first flexure is connected to one thick, short segment of the second flexure, and one thick, short segment of the second flexure is connected to one thin corner segment of the second flexure, and one thin corner segment of the second flexure is connected to one thick, long segment of the second flexure, and the second The valve according to claim 5, wherein one thick, long segment of the first flexure is connected to one thin corner segment of the third flexure, the thin corner segment of the third flexure is connected to one thick, short segment of the third flexure, the thick, short segment of the third flexure is connected to one thin connecting segment of the second flexure, the thin connecting segment of the second flexure is connected to one thick, short segment of the fourth flexure, the thick, short segment of the fourth flexure is connected to one thin corner segment of the fourth flexure, and the thin corner segment of the fourth flexure is connected back to one thick, long segment of the first flexure.

7. The valve according to claim 4, wherein the first direction is opposite to the second direction.

8. The valve according to claim 4, wherein the symmetrical flexure assembly comprises a first flexure portion and a second flexure portion, the first flexure portion is nested within the second flexure portion such that the first flexure portion is connected to the diaphragm and the second flexure portion is connected to the piston, and when the input force is applied to the piston in the first direction, the resulting force is output in the second direction to separate the diaphragm from contact with the valve seat.

9. The valve according to claim 7, wherein the first direction is opposite to the second direction.

10. It comprises a second flexure portion, and the second flexure portion is The first flexure has two thick, long segments and the second flexure has two thick, long segments, The first flexure has two thick, short segments, the second flexure has two thick, short segments, the third flexure has two thick, short segments, and the fourth flexure has two thick, short segments, The two thin corner segments of the first flexure, the two thin corner segments of the second flexure, the two thin corner segments of the third flexure, and the two thin corner segments of the fourth flexure, The first flexure has two thin connecting segments and the second flexure has two thin connecting segments, It further possesses, Two thick, long segments of the first flexure are connected to two thin corner segments of the first flexure, and the two thin corner segments of the first flexure are connected to two thick, short segments of the first flexure, and the two thick, short segments of the first flexure are connected to two thin connecting segments of the first flexure, and the two thin connecting segments of the first flexure are connected to two thick, short segments of the second flexure, and the two thick, short segments of the second flexure are connected to two thin corner segments of the second flexure, and the two thin corner segments of the second flexure are connected to two thick, long segments of the second flexure, and the second flexure The valve according to claim 7, wherein two thick, elongated segments of the flexure are connected to two thin, angular segments of the third flexure, the two thin, angular segments of the third flexure are connected to two thick, short segments of the third flexure, the two thick, short segments of the third flexure are connected to two thin connecting segments of the second flexure, the two thin connecting segments of the second flexure are connected to two thick, short segments of the fourth flexure, the two thick, short segments of the fourth flexure are connected to two thin, angular segments of the fourth flexure, and the two thin, angular segments of the fourth flexure are connected back to two thick, elongated segments of the first flexure.

11. The valve according to claim 1, wherein the valve is a diaphragm valve.

12. The valve according to claim 1, wherein the flexure assembly is an annular flexure.

13. A method for operating a diaphragm valve, Connecting the flexure assembly to the piston of the diaphragm valve, The piston is connected to the diaphragm, By applying the input force to the piston in a first direction and outputting the resulting force, the resulting force moves the diaphragm to the open position when the diaphragm is normally in the closed position, and the resulting force moves the diaphragm to the closed position when the diaphragm is normally in the open position. Methods that include...

14. The method according to claim 13, wherein the resulting force is output in a second direction.

15. The method according to claim 14, wherein the first direction and the second direction are perpendicular to each other.

16. The method according to claim 14, wherein the first direction is opposite to the second direction.

17. Connecting the flexure assembly to the piston means Connecting the symmetrical flexure assembly to the piston, Connecting the symmetrical flexure assembly to the diaphragm, Applying the input force in the first direction to the piston, The method according to claim 13, further comprising:

18. Connecting the symmetrical flexure assembly to the piston includes connecting the first flexure portion to the piston. Connecting the symmetrical flexure assembly to the diaphragm includes connecting the second flexure portion to the diaphragm. The method according to claim 16, wherein the second flexure portion is nested within the first flexure portion.

19. The method according to claim 13, wherein connecting the flexure assembly to the piston further includes connecting the blade flexure to the piston.

20. It is an actuator, A diaphragm that is movable to separate from or contact with the valve seat, The piston connected to the diaphragm, A flexure assembly connected to the piston, An actuator equipped with the following features.

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