Multi-angle chip defect detection device

Abstract

The invention relates to the technical field of chip detection, and discloses a multi-angle chip defect detection device which comprises a rack and a shell, the shell is arranged on the rack, a cover plate is arranged on the side face of the shell, a driving frame is arranged on the inner top face of the rack, a detection camera is installed on the driving frame, and a fixing plate is fixedly installed at the side edge position of the inner top face of the rack. After the detection camera is reset to the position above the protection cylinder, automatic cleaning can be conducted, movement of a rotating plate triggers meshing of a driving rack and a transmission gear, a shaft rod is driven to rotate, force is stored on a coil spring, after the detection camera is completely in place, under the action of energy release of the coil spring, fan blades rotate at a high speed, strong airflow is generated, and the safety of the camera is improved. Dust and other attachments on the lens of the camera are effectively blown away, manual intervention is not needed in the whole process, the working efficiency is improved, the cleanliness of the lens of the camera is guaranteed, and therefore the accuracy of visual detection is maintained.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and in particular to a multi-angle chip defect detection device. Background Art

[0002] The multi-angle chip defect detection device is an advanced detection device that can perform comprehensive detection of chips from multiple angles and directions, thereby obtaining three-dimensional detection images and improving detection reliability. The working principle of the multi-angle chip defect detection device is mainly based on machine vision technology. Through high-precision image acquisition and processing, fast and accurate defect detection can be performed on the chip surface.

[0003] After searching, the Chinese patent with announcement number CN219201415U discloses a multi-angle chip defect detection device, including: a moving plate driven to move linearly, a material plate driven by a rotating mechanism and a flipping mechanism to flip left and right and front and back along the axis of the moving plate, a QR code scanning gun set on one side of the moving plate for scanning and registering the chip, a camera for photographing the chip, and a light source for providing illumination for photographing the chip. In this way, a comprehensive multi-angle and multi-directional detection of the chip is achieved, and a three-dimensional detection image can be obtained, which overcomes the shortcomings of the original single-plane detection and improves the reliability of the detection. However, this solution still has the following shortcomings when it is actually used:

[0004] In the process of multi-angle defect detection of chips, it is crucial to ensure that the inspection box remains dust-free. However, in actual operation, although the inspection box is designed with strict dust prevention measures, in order to meet the needs of long-term operation, the staff must regularly perform necessary maintenance and inspection on the components inside the inspection box. During this maintenance process, although the staff will wear professional dust-proof clothing to reduce the introduction of external pollutants, it is still difficult to completely avoid some tiny attachments, such as fibers and particles, from being brought into the inspection box. Once these attachments are deposited on the camera, they will gradually accumulate and may affect the clarity of the camera, resulting in a decrease in image quality, which in turn affects the accuracy and efficiency of defect detection.

[0005] Therefore, it is necessary to design a multi-angle chip defect detection device to solve the above problems. Summary of the invention

[0006] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a multi-angle chip defect detection device.

[0007] In order to achieve the above object, the present invention adopts the following technical solutions:

[0008] A multi-angle chip defect detection device comprises a frame and a shell, wherein the shell is arranged on the frame, a cover plate is arranged on the side of the shell, a drive frame is arranged on the inner top surface of the frame, a detection camera is installed on the drive frame, a fixing plate is fixedly installed at the side position of the inner top surface of the frame, a protective cylinder corresponding to the detection camera is fixedly installed on the side of the fixing plate, a connecting component is arranged on the top surface of the protective cylinder for connecting the protective cylinder with the detection camera, a mounting cylinder is penetrated through the bottom surface of the protective cylinder, a cleaning component is arranged on the bottom surface of the mounting cylinder for cleaning attachments on the lens of the detection camera, a rotating plate is arranged on the side of the fixing plate, a guide component is arranged between the rotating plate and the fixing plate for controlling the angle of the rotating plate, a flow structure is arranged on the outer wall of the protective cylinder for collecting attachments and gas flow, and a detection plate adapted to the detection camera is fixedly installed on the inner wall of the frame.

[0009] As a preferred technical solution of the present invention, the connecting assembly includes an annular groove opened on the top surface of the protective tube, a sealing airbag ring arranged on the inner wall of the annular groove, and a sealing ring fixedly installed on the top surface of the sealing airbag ring, a connecting frame is fixedly installed on the side of the fixed plate, a pneumatic telescopic rod is fixedly installed on the inner wall of the connecting frame, the fixed end of the pneumatic telescopic rod is connected to the sealing airbag ring through a conduit, and a push plate is fixedly installed on the telescopic end of the pneumatic telescopic rod.

[0010] As a preferred technical solution of the present invention, the push plate is configured to be arc-shaped, and the side surface of the push plate is in contact with the outer wall of the detection camera.

[0011] As a preferred technical solution of the present invention, the cleaning assembly includes an axis rod penetrating the bottom surface of the mounting tube, a rotating seat fixedly mounted on the top end of the axis rod, and a plurality of fan blades fixedly mounted on the outer wall of the rotating seat and distributed in a circular array, the axis rod is rotatably connected to the penetration point, a transmission gear is fixedly mounted on the bottom end of the axis rod, a bracket is slidably mounted on the side of the fixed plate, a driving rack is fixedly mounted on the bottom end of the bracket, and the driving rack is meshed with the transmission gear, and the outer wall of the axis rod located on the outside of the mounting tube is provided with a coil spring.

[0012] As a preferred technical solution of the present invention, the rotating plate is rotatably connected to the top end of the bracket, and a plurality of evenly distributed communication ports are provided on the bottom surface of the mounting tube.

[0013] As a preferred technical solution of the present invention, the guide assembly includes a pressure plate symmetrically fixedly installed on the side of the rotating plate, a guide groove symmetrically opened on the side of the fixed plate corresponding to the rotating plate, and two connecting grooves opened on the side of the fixed plate, and the two connecting grooves are respectively connected to the two guide grooves, two guide rods corresponding to the two guide grooves are fixedly installed on the side of the rotating plate, the side of the fixed plate is located at the position of the two connecting grooves, and magnetic sheets are fixedly installed at both ends of the rotating plate.

[0014] As a preferred technical solution of the present invention, the cross-sectional shapes of the guide rod and the guide groove are both T-shaped, and the relative magnetic poles of two of the four magnetic sheets located on the same side are opposite.

[0015] As a preferred technical solution of the present invention, the circulation structure includes a dust outlet opened on the inner wall of the protective tube, an air guide box fixedly installed on the outer wall of the protective tube corresponding to the dust outlet, and a connecting box fixedly installed on the side of the air guide box, the air guide box is connected to the connecting box and a rotating blade is rotatably installed at the connection point, and an air outlet pipe is arranged through the bottom surface of the connecting box.

[0016] As a preferred technical solution of the present invention, the outer wall of the rotating blade fits with the inner wall of the air guide box, a one-way valve is installed on the inner wall of the air outlet pipe, and a filter is provided at the bottom end of the air outlet pipe.

[0017] As a preferred technical solution of the present invention, the horizontal position of the top surface of the protective tube is at least lower than the horizontal position of the bottom surface of the detection camera.

[0018] The present invention has the following beneficial effects:

[0019] 1. By setting up the protective tube and the connecting assembly, during the resetting process of the detection camera, the outer wall of the detection camera contacts and pushes the push plate, causing the gas inside the pneumatic telescopic rod to compress, thereby causing the sealing airbag ring to expand and fit with the bottom surface of the detection camera, which not only protects the detection camera, but also provides the necessary conditions for the subsequent cleaning steps. In addition, it also ensures that each time the detection camera returns, it can accurately dock with the protective tube, increasing the stability and reliability of the device;

[0020] 2. By setting the guide component and the cleaning component, the detection camera can be automatically cleaned after it is reset to the top of the protective tube. The movement of the rotating plate triggers the meshing of the driving rack and the transmission gear, driving the shaft to rotate and storing force on the coil spring. When the detection camera is fully in place, the fan blades rotate at high speed under the action of the energy released by the coil spring, generating a strong airflow to effectively blow away the dust and other attachments on the detection camera lens. The whole process does not require manual intervention, which not only improves work efficiency, but also ensures the cleanliness of the camera lens, thereby maintaining the accuracy of visual inspection;

[0021] 3. By setting up a circulation structure, the cleaned attachments and gases are guided into the air guide box and finally into the connection box. The gas is discharged through the outlet pipe, and the attachments are captured in the filter net in the connection box. It not only effectively collects the cleaned impurities to prevent them from polluting the detection environment or equipment again, but also facilitates subsequent centralized processing, reduces the impact of impurities on the environment, ensures the cleanliness of the working environment, and is also conducive to extending the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the three-dimensional structure of a multi-angle chip defect detection device proposed by the present invention;

[0023] Figure 2 A schematic diagram of the frame structure of a multi-angle chip defect detection device proposed by the present invention;

[0024] Figure 3 A schematic diagram of the structure of a drive frame of a multi-angle chip defect detection device proposed by the present invention;

[0025] Figure 4 A schematic diagram of the fixing plate structure of a multi-angle chip defect detection device proposed by the present invention;

[0026] Figure 5 A schematic diagram of the protective tube structure of a multi-angle chip defect detection device proposed by the present invention;

[0027] Figure 6 A schematic diagram of a partial cross-section structure of a protective tube of a multi-angle chip defect detection device proposed by the present invention;

[0028] Figure 7 A schematic structural diagram of a protective tube of a multi-angle chip defect detection device proposed by the present invention from another viewing angle;

[0029] Figure 8 for Figure 7 The enlarged structural diagram at A in the middle;

[0030] Fig. 9 for Figure 4 The enlarged structural diagram at B in the middle;

[0031] Fig.10 This is a schematic diagram of the internal structure of a connection box of a multi-angle chip defect detection device proposed by the present invention.

[0032] In the figure: 1. frame; 2. shell; 3. cover plate; 4. drive frame; 5. detection camera; 6. fixing plate; 7. protective tube; 81. annular groove; 82. sealing airbag ring; 83. sealing ring; 84. connecting frame; 85. pneumatic telescopic rod; 86. guide tube; 87. push plate; 9. mounting tube; 101. shaft rod; 102. rotating seat; 103. fan blade; 104. transmission gear; 105. bracket; 106. driving rack; 107. coil spring; 108. connecting port; 11. rotating plate; 121. pressure plate; 122. guide groove; 123. connecting groove; 124. guide rod; 125. magnetic sheet; 131. dust outlet; 132. air guide box; 133. connecting box; 134. rotating blade; 135. air outlet pipe; 14. detection plate. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0034] Reference Figure 1-10 , a multi-angle chip defect detection device, comprising a frame 1 and a shell 2, the shell 2 is arranged on the frame 1, a cover plate 3 is arranged on the side of the shell 2, a driving frame 4 is arranged on the inner top surface of the frame 1, a detection camera 5 is installed on the driving frame 4, a fixing plate 6 is fixedly installed at the side position of the inner top surface of the frame 1, a protective tube 7 corresponding to the detection camera 5 is fixedly installed on the side of the fixing plate 6, the top surface horizontal position of the protective tube 7 is at least lower than the bottom surface horizontal position of the detection camera 5, the top surface of the protective tube 7 is provided with a connecting component for connecting the protective tube 7 with the detection camera 5, the bottom surface of the protective tube 7 is penetrated by a mounting tube 9, the bottom surface of the mounting tube 9 is provided with a cleaning component for cleaning the attachments on the lens of the detection camera 5, a rotating plate 11 is arranged on the side of the fixing plate 6, a guide component is arranged between the rotating plate 11 and the fixing plate 6 for controlling the angle of the rotating plate 11, the outer wall of the protective tube 7 is provided with a circulation structure for collecting attachments and gas circulation, and a detection plate 14 adapted to the detection camera 5 is fixedly installed on the inner wall of the frame 1;

[0035] During use, the cover plate 3 on the outer shell 2 can be opened to place the chip to be inspected on the inspection board 14, and then the driving frame 4 on the frame 1 can be opened to drive the inspection camera 5 to move to perform visual inspection on the chip to be inspected on the inspection board 14, so as to ensure that the surface defects of the chip can be discovered, which is convenient for subsequent processing. After the inspection is completed, the inspection camera 5 can be reset. During the resetting process driven by the driving frame 4, the inspection camera 5 can be moved to the top of the protective tube 7 on the side of the fixed plate 6. During the resetting process, the inspection camera 5 and the protective tube 7 can be connected through a connecting component, and the cleaning component can be driven to operate through a guide component, so as to clean the lens of the inspection camera 5 to avoid the accumulation of attachments, and the circulating gas and the cleaned attachments can be processed through the circulation structure to ensure the cleanliness of the lens of the inspection camera 5. The working principle and connection method of the driving frame 4 and the inspection camera 5 are all existing mature technologies, which will not be elaborated here.

[0036] The connecting assembly includes an annular groove 81 provided on the top surface of the protective tube 7, a sealing airbag ring 82 provided on the inner wall of the annular groove 81, and a sealing ring 83 fixedly installed on the top surface of the sealing airbag ring 82. A connecting frame 84 is fixedly installed on the side of the fixing plate 6, and a pneumatic telescopic rod 85 is fixedly installed on the inner wall of the connecting frame 84. The fixed end of the pneumatic telescopic rod 85 is connected to the sealing airbag ring 82 through a conduit 86. A push plate 87 is fixedly installed on the telescopic end of the pneumatic telescopic rod 85. The push plate 87 is arranged in an arc shape, and the side of the push plate 87 is in contact with the outer wall of the detection camera 5.

[0037] During the resetting process of the detection camera 5, its outer wall can contact with the push plate 87, and with the drive frame 4, the detection camera 5 can squeeze and move the push plate 87 when it moves, so that the pneumatic telescopic rod 85 shortens and compresses the internal gas. After the gas in the pneumatic telescopic rod 85 is compressed, it can enter the sealing airbag ring 82 through the conduit 86, so that the sealing airbag ring 82 expands out of the annular groove 81, and pushes the sealing ring 83. When the detection camera 5 stops, it can fit exactly with the bottom surface of the detection camera 5, thereby realizing the connection between the protective tube 7 and the detection camera 5 for subsequent cleaning.

[0038] The cleaning assembly includes a shaft 101 penetrating the bottom surface of the installation tube 9, a rotating seat 102 fixedly installed at the top of the shaft 101, and a plurality of fan blades 103 fixedly installed on the outer wall of the rotating seat 102 and distributed in a circular array. The shaft 101 is rotatably connected to the penetration, a transmission gear 104 is fixedly installed at the bottom end of the shaft 101, a bracket 105 is slidably installed on the side of the fixed plate 6, the rotating plate 11 is rotatably connected to the top of the bracket 105, a driving rack 106 is fixedly installed at the bottom end of the bracket 105, and the driving rack 106 is meshed with the transmission gear 104, the outer wall of the shaft 101 located outside the installation tube 9 is sleeved with a coil spring 107, and a plurality of evenly distributed communication ports 108 are opened on the bottom surface of the installation tube 9;

[0039] When the detection camera 5 moves, the guide component can drive the bracket 105 and the driving rack 106 to slide, and the driving rack 106 can mesh with the transmission gear 104, thereby driving the transmission gear 104 to rotate. When the transmission gear 104 rotates, it can drive the shaft 101 to rotate and store force on the coil spring 107. When the driving rack 106 is separated from the transmission gear 104, the shaft 101 can be reversed under the action of the stored force of the coil spring 107, and drive the rotating seat 102 and the fan blade 103 to rotate at high speed, so that the gas can be sucked in through the connecting port 108 on the bottom of the mounting tube 9 and the gas can flow to the lens on the bottom of the detection camera 5, thereby cleaning the detection camera 5.

[0040] The guide assembly includes a pressing plate 121 symmetrically fixedly mounted on the side of the rotating plate 11, a guide groove 122 symmetrically opened on the side of the fixed plate 6 and corresponding to the rotating plate 11, and two connecting grooves 123 opened on the side of the fixed plate 6, and the two connecting grooves 123 are respectively connected to the two guide grooves 122, and two guide rods 124 corresponding to the two guide grooves 122 are fixedly mounted on the side of the rotating plate 11, and the cross-sectional shapes of the guide rods 124 and the guide grooves 122 are both T-shaped, and magnetic sheets 125 are fixedly mounted on the side of the fixed plate 6 at the positions of the two connecting grooves 123 and at both ends of the rotating plate 11, and the two magnetic sheets 125 located on the same side of the four magnetic sheets 125 have opposite magnetic poles;

[0041] During the movement and reset process of the detection camera 5, the outer wall of the detection camera 5 first contacts the pressure plate 121 on the side of the rotating plate 11, and the rotating plate 11 is in an inclined state under the magnetic attraction of the magnetic sheet 125, and the guide rod 124 at one end of the rotating plate 11 is located in the guide groove 122, and one of the two pressure plates 121 can contact the outer wall of the detection camera 5, and the pressure plate 121 and the rotating plate 11 can be driven as the detection camera 5 moves, and as the detection camera 5 is completely moved to the top of the protective tube 7, the rotating plate 11 moves to the end of the guide groove 122 at this time, and the rotating plate 11 can be rotated under the action of the magnetic sheet 125, so that the guide rod 124 moves out of the guide groove 122, and the other guide rod 124 can enter the other guide groove 122 through the connecting groove 123, ensuring that when the detection camera 5 moves again, it can drive the bracket 105 and the driving rack 106 to reset so that they can be used again.

[0042] The circulation structure includes a dust outlet 131 provided on the inner wall of the protective tube 7, an air guide box 132 fixedly installed on the outer wall of the protective tube 7 corresponding to the dust outlet 131, and a connecting box 133 fixedly installed on the side of the air guide box 132. The air guide box 132 is connected to the connecting box 133, and a rotating blade 134 is rotatably installed at the connecting point. The outer wall of the rotating blade 134 is in contact with the inner wall of the air guide box 132. An air outlet pipe 135 is provided through the bottom surface of the connecting box 133. A one-way valve is installed on the inner wall of the air outlet pipe 135, and a filter is provided at the bottom end of the air outlet pipe 135.

[0043] The attachments and gas on the cleaned lenses can enter the air guide box 132 through the dust outlet 131 and blow the rotating blades 134. The gas and attachments can enter the connecting box 133 along the gap between the rotating blades 134 and the air guide box 132. At the same time, the gas can be discharged through the air outlet pipe 135, and the attachments can remain in the connecting box 133 under the action of the filter net for subsequent centralized treatment.

[0044] The specific working principle of the present invention is as follows:

[0045] When in use, the cover plate 3 on the shell 2 can be opened to place the chip to be detected on the detection board 14, and then the driving frame 4 on the frame 1 can be opened to drive the detection camera 5 to move to perform visual inspection on the chip to be detected on the detection board 14, so as to ensure that the surface defects of the chip can be found, which is convenient for subsequent processing. After the inspection is completed, the detection camera 5 can be reset. During the resetting process driven by the driving frame 4, the detection camera 5 can be moved to the top of the protective cylinder 7 on the side of the fixed plate 6. During the resetting process, the detection camera 5 and the protective cylinder 7 can be connected through a connecting component, and the cleaning component is driven to operate through the guide component, so as to clean the lens of the detection camera 5 to avoid the accumulation of attachments, and the circulating gas and the cleaned attachments can be processed by the circulation structure to ensure the neatness of the lens of the detection camera 5. The working principle and connection method of the driving frame 4 and the detection camera 5 are all existing mature technologies, which will not be described in detail here.

[0046] Specifically, during the movement and resetting of the detection camera 5, the outer wall of the detection camera 5 first contacts the pressure plate 121 on the side of the rotating plate 11, and the rotating plate 11 is in an inclined state under the magnetic attraction of the magnetic sheet 125. The guide rod 124 at one end of the rotating plate 11 is located in the guide groove 122, and one of the two pressure plates 121 can contact the outer wall of the detection camera 5. As the detection camera 5 moves, the pressure plate 121 and the rotating plate 11 can be driven, thereby driving the bracket 105 and the driving rack 106 to slide, and the driving rack 106 is engaged with the transmission gear 104, which can drive the transmission gear 104 to rotate. When the detection camera 5 is moved, the outer wall thereof can contact the push plate 87, and with the driving of the driving frame 4, the detection camera 5 can squeeze and move the push plate 87, so that the pneumatic telescopic rod 85 shortens and compresses the gas inside. After the gas in the pneumatic telescopic rod 85 is compressed, it can enter the sealing airbag ring 82 through the conduit 86, so that the sealing airbag ring 82 expands out of the annular groove 81, and pushes the sealing ring 83. When the detection camera 5 stops, it can fit the bottom surface of the detection camera 5, so as to realize the connection between the protective tube 7 and the detection camera 5, so as to facilitate subsequent cleaning.

[0047] As the detection camera 5 is completely moved to the top of the protective tube 7, the rotating plate 11 moves to the end of the guide groove 122, and the rotating plate 11 can be rotated under the action of the magnetic sheet 125, so that the guide rod 124 moves out of the guide groove 122, and the other guide rod 124 can enter the other guide groove 122 through the connecting groove 123, ensuring that when the detection camera 5 moves again, it can drive the bracket 105 and the driving rack 106 to reset so that they can be used again. At this time, the driving rack 106 can be separated from the transmission gear 104, and the shaft 101 can be reversed under the action of the coil spring 107, and drive the rotating seat 102 and the fan blade 103 to rotate at high speed, so that the gas can be sucked in through the connecting port 108 on the bottom of the mounting tube 9 and the gas can flow to the lens on the bottom of the detection camera 5, so as to realize the cleaning of the detection camera 5; the attachments on the cleaned lens and the gas can be discharged through the dust outlet 131 enters into the air guide box 132 and blows the rotating blades 134. The gas and attachments can enter into the connecting box 133 along the gap between the rotating blades 134 and the air guide box 132. At the same time, the gas can be discharged through the air outlet pipe 135, and the attachments can be retained in the connecting box 133 under the action of the filter net for subsequent centralized treatment. Through the above steps, the attachments on the detection camera 5 can be cleaned and the detection camera 5 can be protected when not in use. When the detection camera 5 is used again and moved out of the protective tube 7, the pneumatic telescopic rod 85 can be reset and the gas in the sealing airbag ring 82 can be extracted to separate the sealing ring 83 from the detection camera 5. As the detection camera 5 moves, the bracket 105 and the drive rack 106 can be reset for use again. The working principle of the pneumatic telescopic rod 85 is an existing mature technology and will not be elaborated here.

[0048] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A multi-angle chip defect detection device, comprising a frame (1) and a shell (2), wherein the shell (2) is arranged on the frame (1), a cover plate (3) is arranged on the side of the shell (2), a driving frame (4) is arranged on the inner top surface of the frame (1), and a detection camera (5) is installed on the driving frame (4), characterized in that: A fixing plate (6) is fixedly installed at the side edge of the inner top surface of the frame (1); a protective tube (7) corresponding to the detection camera (5) is fixedly installed on the side of the fixing plate (6); a connecting component is provided on the top surface of the protective tube (7) for connecting the protective tube (7) with the detection camera (5); a mounting tube (9) is provided through the bottom surface of the protective tube (7); a cleaning component is provided on the bottom surface of the mounting tube (9) for cleaning the attachments on the lens of the detection camera (5); a rotating plate (11) is provided on the side of the fixing plate (6); a guide component is provided between the rotating plate (11) and the fixing plate (6) for controlling the angle of the rotating plate (11); a circulation structure is provided on the outer wall of the protective tube (7) for collecting attachments and gas circulation; a detection plate (14) adapted to the detection camera (5) is fixedly installed on the inner wall of the frame (1).

2. The multi-angle chip defect detection device according to claim 1, characterized in that: The connecting assembly comprises an annular groove (81) provided on the top surface of the protective tube (7), a sealing airbag ring (82) arranged on the inner wall of the annular groove (81), and a sealing ring (83) fixedly mounted on the top surface of the sealing airbag ring (82); a connecting frame (84) is fixedly mounted on the side of the fixing plate (6); a pneumatic telescopic rod (85) is fixedly mounted on the inner wall of the connecting frame (84); the fixed end of the pneumatic telescopic rod (85) is connected to the sealing airbag ring (82) via a conduit (86); and a push plate (87) is fixedly mounted on the telescopic end of the pneumatic telescopic rod (85).

3. The multi-angle chip defect detection device according to claim 2, characterized in that: The push plate (87) is configured to be arc-shaped, and the side surface of the push plate (87) fits against the outer wall of the detection camera (5).

4. The multi-angle chip defect detection device according to claim 1, characterized in that: The cleaning assembly comprises an axle (101) penetrating the bottom surface of the mounting tube (9), a rotating seat (102) fixedly mounted on the top of the axle (101), and a plurality of fan blades (103) fixedly mounted on the outer wall of the rotating seat (102) and distributed in a ring array, the axle (101) being rotatably connected to the penetration point, a transmission gear (104) being fixedly mounted on the bottom end of the axle (101), a bracket (105) being slidably mounted on the side of the fixing plate (6), a driving rack (106) being fixedly mounted on the bottom end of the bracket (105), and the driving rack (106) being meshed with the transmission gear (104), and a coil spring (107) being sleeved on the outer wall of the axle (101) located on the outer side of the mounting tube (9).

5. The multi-angle chip defect detection device according to claim 4, characterized in that: The rotating plate (11) is rotatably connected to the top end of the bracket (105), and the bottom surface of the mounting tube (9) is provided with a plurality of evenly distributed communication ports (108).

6. The multi-angle chip defect detection device according to claim 1, characterized in that: The guide assembly comprises a pressure plate (121) symmetrically fixedly mounted on the side of the rotating plate (11), a guide groove (122) symmetrically opened on the side of the fixed plate (6) and corresponding to the rotating plate (11), and two connecting grooves (123) opened on the side of the fixed plate (6), and the two connecting grooves (123) are respectively connected to the two guiding grooves (122), two guide rods (124) respectively corresponding to the two guiding grooves (122) are fixedly mounted on the side of the rotating plate (11), the side of the fixed plate (6) is located at the position of the two connecting grooves (123), and magnetic sheets (125) are fixedly mounted at both ends of the rotating plate (11).

7. The multi-angle chip defect detection device according to claim 6, characterized in that: The cross-sectional shapes of the guide rod (124) and the guide groove (122) are both T-shaped, and the relative magnetic poles of two of the four magnetic sheets (125) located on the same side are opposite.

8. The multi-angle chip defect detection device according to claim 1, characterized in that: The circulation structure comprises a dust outlet (131) provided on the inner wall of the protective tube (7), an air guide box (132) fixedly mounted on the outer wall of the protective tube (7) corresponding to the dust outlet (131), and a connecting box (133) fixedly mounted on the side of the air guide box (132); the air guide box (132) is connected to the connecting box (133) and a rotating blade (134) is rotatably mounted at the connection point; an air outlet pipe (135) is provided through the bottom surface of the connecting box (133).

9. The multi-angle chip defect detection device according to claim 8, characterized in that: The outer wall of the rotating blade (134) is in contact with the inner wall of the air guide box (132), a one-way valve is installed on the inner wall of the air outlet pipe (135), and a filter screen is arranged at the bottom end of the air outlet pipe (135).

10. The multi-angle chip defect detection device according to claim 1, characterized in that: The horizontal position of the top surface of the protective tube (7) is at least lower than the horizontal position of the bottom surface of the detection camera (5).

Images