Columnar prism array contour generation method and array structure

Abstract

The invention discloses a columnar prism array contour generation method and an array structure, the surface type and related parameters of each subunit in the structure generated by the method can be randomly changed, a randomly distributed columnar prism array can be formed, the periodicity of the subunits is broken, the interference effect of laser is destroyed, and the generation efficiency of the columnar prism array contour is improved. Therefore, the influence of interference fringes on homogenized light spots is eliminated, linear structured light emitted by the columnar prism has better uniformity, the precision and performance of the whole system can be effectively improved, the half contour of the subunit generated by the method is in an up-and-down symmetrical structural form, additional smoothing algorithm processing is not needed, and the method is suitable for large-scale popularization and application. A smooth profile curve is formed, the problem of sharp corners between the columnar prism units caused by sudden change of the slope at the connecting point of the cross section curve units is solved, and machining defects are avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of line structure light generation, and relates to a method for generating a cylindrical prism array profile and an array structure. Background Art

[0002] Line structured light with uniform intensity distribution has a wide range of applications in many fields, such as 3D scanning, industrial measurement, and machine vision. In practical applications, the intensity distribution of line structured light has a great impact on the overall accuracy of the system. Line structured light with uniform intensity distribution is one of the key technologies to achieve high-precision 3D scanning. At the same time, the diffusion angle of line structured light determines the measurement range and field of view of the system.

[0003] At present, the common device for generating uniform line structured light is a uniformly distributed cylindrical prism array. When a parallel non-uniform light beam is incident on the cylindrical prism array, it is divided into a large number of small sub-beams by each sub-unit. Compared with the spot size, the size of the sub-unit is extremely small. The incident light received by each sub-unit can be regarded as uniform light. After the sub-beams are diffused, they are superimposed on the target surface at the same position to achieve the purpose of beam homogenization and beam expansion. However, the periodic structure of the uniformly distributed cylindrical prism array will produce interference effects, especially when each sub-beam has strong coherence. This effect will cause the far-field imaging of the cylindrical prism to become light and dark interference fringes, which will affect the performance of the system. The currently developed randomly distributed spherical cylindrical prism array can effectively solve the problem of interference effects, but due to the limitation of the diffusion angle of its spherical configuration (maximum about 25°), it is impossible to further improve the field of view of the system. In addition, sharp corners will be generated between its units, which will cause defects in processing and is not conducive to large-scale generation through nanoimprinting. Even though the problem has been solved to some extent by setting adjacent concave-convex lens units, when the parameters of adjacent concave-convex lenses vary greatly, it will still cause a sudden change in the slope between units. And its random optimization height may cause the maximum height difference of the entire columnar prism array to be too large, causing the problem of difficult etching processing. Summary of the invention

[0004] The purpose of the present invention is to solve the problems in the prior art that the periodic structure of the uniformly distributed cylindrical prism array will produce interference effects and affect the performance of the system, and the randomly distributed spherical cylindrical prism array has a large variation in slope between units, which will produce sharp corners and cause defects during processing. In addition, the maximum height difference of the cylindrical prism array is too large, which causes difficulties in etching processing. A method for generating the contour of a cylindrical prism array and an array structure are provided.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A method for generating a cylindrical prism array profile comprises the following steps:

[0007] Given the surface shape and related parameters, generate sub-units;

[0008] splicing sub-units to generate sub-periods, splicing sub-periods to obtain the outline of the cylindrical prism array;

[0009] The generation step of the subunit comprises:

[0010] Selecting a face shape of the first half-side contour of the subunit, setting parameters of the first half-side contour, and generating a first contour according to the set parameters, wherein the first contour is half of the first half-side contour of the subunit;

[0011] Taking the end of the first outline as the center point, symmetrically copying the first outline to obtain a second outline, and splicing the first outline and the second outline to obtain the first half outline of the subunit;

[0012] Selecting the face shape of the second half-side contour of the subunit, setting parameters of the second half-side contour, and generating a third contour according to the set parameters, wherein the third contour is half of the second half-side contour of the subunit;

[0013] Taking the end of the third contour as the center point, symmetrically copying the third contour to obtain a fourth contour, and splicing the third contour and the fourth contour to obtain a second half-edge contour of the subunit;

[0014] The subunit is obtained by concatenating the first half outline of the subunit and the second half outline of the subunit.

[0015] A further improvement of the present invention is:

[0016] The surface type includes a polynomial-driven free-form surface, an aspherical surface, a spherical surface or a sinusoidal surface.

[0017] When the surface is an aspherical surface, the related parameters include an exit diameter, a radius of curvature, a cone coefficient and an even-order coefficient.

[0018] The surface shape of the first half side contour of the subunit is different from the surface shape of the second half side contour of the subunit.

[0019] The surface shape of the first half-edge contour of the subunit is the same as the surface shape of the second half-edge contour of the subunit, but the parameters are different.

[0020] The splicing sub-cycle also includes the following steps:

[0021] Determine whether the maximum height difference Hm between all sub-units in the obtained sub-period and the height difference Hs between the first and last sub-units in the sub-period are within the set threshold range. If so, perform leveling on the heights of the sub-units in the sub-period, and splice the processed sub-periods to obtain the cylindrical prism array profile;

[0022] If not, the sub-period is discarded and a new sub-period is generated.

[0023] The height leveling process for the sub-period comprises:

[0024] Connect the beginning and end of the sub-period to get a straight line:

[0025] Z1=Kx+b

[0026] Among them, Z1 represents the height of the straight line;

[0027] Get the height of the leveled sub-period along the positive x direction:

[0028] Z2=z-Z1

[0029] Wherein, z is the height position of each point of the original sub-period when the position along the positive direction of the horizontal coordinate is x, and Z2 is the height of the sub-period after leveling along the positive direction of x.

[0030] The threshold range of the maximum height difference Hm between all sub-units in the sub-period is 10-60 um.

[0031] The height difference Hs between the first and last subunits in the sub-period is less than 20 um.

[0032] A cylindrical prism array structure, the outline of which is generated according to the generation method of the present invention.

[0033] Compared with the prior art, the present invention has the following beneficial effects:

[0034] The present invention discloses a method for generating a cylindrical prism array profile. The surface shape and related parameters of each subunit in the structure generated by the method can be randomly changed through random selection, so as to form a randomly distributed cylindrical prism array, break the periodicity of the subunits, destroy the interference effect of the laser, thereby eliminating the influence of the interference fringes on the homogenized light spot, so that the line structure light emitted through the cylindrical prism has better uniformity, and can effectively improve the accuracy and performance of the entire system. The half-edge profile of the subunit generated by the method is a structural form that is symmetrical up and down, and does not need to be processed by an additional smoothing algorithm, so a smooth profile curve is formed, and the sharp corner problem between the cylindrical prism units caused by the sudden change of the slope at the connection point of the cross-sectional curve unit is eliminated, thereby avoiding processing defects.

[0035] Furthermore, by introducing sub-period height restrictions and sub-period leveling methods, the maximum height difference of the cylindrical prism structure is effectively reduced, making the structure more conducive to photolithography processing, reducing the processing depth error caused by excessive processing depth and the possibility of surface defects, and being more conducive to large-scale batch production using nanoimprinting and other methods, effectively improving the reproducibility of the structure, so that the actually processed devices have better performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 A profile structure diagram of a cylindrical prism array generated by the prior art;

[0038] Figure 2 It is a structural diagram of the cylindrical prism array of the present invention;

[0039] Figure 3 Schematic diagram of the subunit generation process of the cylindrical prism array outline structure of the present invention (wherein a is a schematic diagram of the first outline structure; b is a schematic diagram of the second outline structure; c is a schematic diagram of the third outline structure; d is a schematic diagram of the fourth outline structure; e is a schematic diagram of a subunit structure;)

[0040] Figure 4 The sub-period profile diagram of the cylindrical prism array of the present invention (where a represents a sub-period profile composed of sub-units driven by the same parameters and surface shape; b represents a sub-period profile composed of sub-units driven by different parameters and surface shapes);

[0041] Figure 5 Schematic diagram of sub-period related parameters and sub-unit division of the present invention (wherein a is a schematic diagram of sub-unit division in a sub-period; b is a schematic diagram of the maximum height difference Hm and the head-to-tail height difference Hs of a sub-period);

[0042] Figure 6 A schematic diagram of the maximum height difference Hmax of the cylindrical prism array of the present invention;

[0043] Figure 7 A schematic diagram of a sub-period leveling process of the present invention (where a represents the sub-period profile before leveling; b represents the sub-period profile after leveling);

[0044] Figure 8The cross-sectional height diagram of the cylindrical prism array with the same parameters using leveling and not using leveling treatment of the present invention (where a represents the cross-sectional height of the cylindrical prism array using leveling treatment; b represents the cross-sectional height of the cylindrical prism array not using leveling treatment);

[0045] Fig. 9 The figure is a flow chart of the contour generating method of the present invention.

[0046] Wherein: 10-base plate; 20-columnar prism array; 30-sub-period; 40-sub-unit. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0048] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0050] In the description of the embodiments of the present invention, it should be noted that if the terms "upper", "lower", "horizontal", "inner", etc. indicate an orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the invention is usually placed when in use, it is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0051] In addition, if the term "horizontal" appears, it does not mean that the component must be absolutely horizontal, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", which does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0052] In the description of the embodiments of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] The present invention is further described in detail below in conjunction with the accompanying drawings:

[0054] See also Figure 2 The embodiment of the present invention discloses a method for generating the contour of a cylindrical prism array. In the design process for the subunit, the cylindrical prism subunit is divided into four parts for processing, and the upper and lower parts of the left (right) half of the contour of the subunit are centrally symmetrical, avoiding the problem of sharp corners. Due to the uniqueness of the design method, the left (right) half of the contour of the subunit of the cylindrical prism array can be asymmetrically designed, and its parameters can be different. Moreover, due to the surface types (semicircular, aspherical, polynomial free-form surface and sinusoidal) of the subunit composition, the slope at the lowest point and the highest point is 0, which ensures the smoothness of the cylindrical prism array. The "screening" and "leveling" processing of the sub-period of the cylindrical prism array can effectively reduce the maximum height difference of the array and facilitate processing. The structural parameters (polynomial parameters, aperture, curvature, vector height, cone coefficient, etc.) of each subunit of the cylindrical prism are different and randomly distributed. The random distribution method can be uniform distribution, normal distribution, etc. The contour curve of the cylindrical prism array can be a free-form surface, an aspherical surface, a spherical surface or a sinusoidal surface driven by a polynomial, which has greater freedom in parameter design; specifically, the following steps are included:

[0055] See also Figures 2 to 9 The embodiment of the present invention discloses a cylindrical prism array profile structure, including a base plate 10 and a cylindrical prism array 20, wherein the cylindrical prism array is composed of a plurality of sub-periods 30, each of which includes m sub-units 40.

[0056] See also Figure 3 The process of forming subunits with both left and right halves being aspherical and with the same parameters:

[0057] This method divides a subunit into four parts for generation. First, the generation of a subunit outline includes:

[0058] Step 1, select the surface type of the left half of the subunit contour, which can be a polynomial-driven free-form surface, an aspherical surface, a spherical surface or a sinusoidal surface. The left half of the subunit contour is the surface type of the first half contour.

[0059] Step 2, giving corresponding parameters according to the face shape, generating the contour of the lower half of the left half of the subunit, the contour of the lower half of the left half of the subunit is the first contour;

[0060] The parameters in this step include: selecting the aspheric surface type, and providing the aperture, radius of curvature, cone coefficient, and even-order coefficient.

[0061] Step 3, symmetric the lower half of the outline at the right vertex (the end of the first outline) to obtain the upper half of the left half of the subunit outline. The complete left half of the subunit outline can be obtained by splicing. The upper half of the left half of the subunit outline is the second outline.

[0062] Step 4, select the face shape of the right half of the subunit outline, which can be consistent with the left half face shape, or a different face shape can be selected. The right half of the subunit outline is the second half of the subunit outline;

[0063] Step 5, giving corresponding parameters according to the face shape. When the same face shape is selected as the left half, the parameters can be the same as or different from the left half contour parameters. The upper half contour of the right half of the subunit is generated by the face shape and the corresponding parameters. The upper half contour of the right half of the subunit is the third contour.

[0064] Step 6, symmetric the upper half of the outline at the right vertex to obtain the lower half of the right half of the subunit outline, and splicing to obtain a complete right half of the subunit outline. The lower half of the right half of the subunit outline is the fourth outline.

[0065] Step 7, splice the two side contours at the right vertex of the left half contour and the left vertex of the right half contour to obtain the complete contour of the subunit. Since the slopes of the curves at each splicing point are equal, the subunit is completely smooth and has no sharp corners.

[0066] The "left half", "right half", "right vertex" and "left vertex" mentioned in the above steps are all based on Figure 3 The directions shown are for schematic illustration.

[0067] Figure 5 This is the process of forming subunits whose left and right halves are both aspherical but with different parameters. At this time, the subunit outlines are not symmetrical, which is significantly different from the common cylindrical prism subunit outlines.

[0068] Furthermore, in the process of forming the sub-unit, the contour of the sub-unit can be composed of a free-form surface, a non-cylindrical surface, a cylindrical surface or a sinusoidal surface driven by a polynomial, and the parameters satisfied by different surface shapes are:

[0069] (1) The parameters of the subunit contour driven by the cylindrical surface are the aperture D and the radius of curvature R, and its partial contour satisfies:

[0070] z is the height of the cylindrical surface when the position along the positive direction of the horizontal coordinate is x;

[0071] (2) The partial contour of the subunit driven by the non-cylindrical surface satisfies:

[0072]

[0073] Among them, z is the height of the non-cylindrical surface when the position along the positive direction of the horizontal coordinate is x, c is the curvature of the non-cylindrical surface, k is the cone coefficient of the non-cylindrical surface, and a i are the coefficients of the even-order terms.

[0074] (3) The partial contour of the subunit driven by the polynomial surface shape satisfies:

[0075]

[0076] Where z is the height of the polynomial surface when the position along the positive direction of the horizontal coordinate is x, and b i are the coefficients of the polynomial surface, and n is the number of polynomial terms.

[0077] (4) The partial profile of the subunit driven by the sinusoidal surface satisfies z=Asin(Bx), where z is the height of the sinusoidal surface when the position along the positive direction of the horizontal coordinate is x, and A and B are the coefficients of the sinusoidal surface.

[0078] Step 8: Connect multiple sub-units to form a sub-cycle. A sub-cycle contains m sub-units (m>=2). Figure 2 and Figure 4 The subunits constituting each subperiod may have different surface shapes, and their constituent parameters may also be different, and may be randomly distributed following a uniform distribution or a normal distribution.

[0079] See also Figure 4 middle, Figure 4 The array profile of a is a sub-periodic profile composed of sub-units with the same surface shape and parameter driving.

[0080] See also Figure 4 middle, Figure 4 The array profile of b is a sub-periodic profile composed of sub-units driven by different surface shapes and parameters. The use of randomly distributed composition parameters and different sub-unit surface shapes can effectively break the periodicity of the cylindrical prism, thereby effectively suppressing the interference effect of the cylindrical prism array in the process of beam homogenization and improving the uniformity of imaging.

[0081] Furthermore, due to the random variation of the sub-units in the sub-period, the maximum height difference Hm and the head-to-tail height difference of the sub-period may be too large, which in turn causes the maximum height difference Hmax of the entire cylindrical prism array to be too large, which is not conducive to photolithography and nanoimprinting. Figure 6 , "screening" and "leveling" processing will be added to the production sub-cycle.

[0082] The specific method of "screening" processing is to limit the maximum height difference Hm and the head-to-tail height difference Hs of the sub-period. If the given random parameters cannot make the Hm and Hs of the sub-period meet the requirements, the sub-period will be discarded and regenerated using a new parameter group.

[0083] See also Figure 7 , respectively, are the sub-periods before and after leveling. The specific method of "leveling" is:

[0084] By connecting the beginning and the end of the sub-period, we can get the straight line Z1=Kx+b, where z is the height position of each point in the original sub-period when the position along the positive direction of the horizontal coordinate is x. Let Z2=z-Z1, and the obtained Z2 is the height of the sub-period after leveling along the positive direction of x. When the height difference Hs between the beginning and the end of the sub-period is within the allowable range and the sub-period passes the "screening" step, the maximum height difference Hmax of the cylindrical prism array can be significantly reduced with little change to the sub-period morphology, see Figure 8 ,in Figure 8 a and Figure 8 b are the cross-sectional height diagrams of the cylindrical prism array with the same parameters with and without leveling processing.

[0085] After n sub-periods have passed the "screening" and "leveling" processes, all sub-periods are spliced ​​together to obtain the final cylindrical prism array.

[0086] Furthermore, in this embodiment, the range of the first height difference of the Hs sub-period is less than 20um, and the Hs of the 25-degree diffusion angle array in the embodiment is 3um, and the Hs of the 40-degree diffusion angle array is 5um; the range of the maximum height difference of the Hm sub-period is 10-60um, and the Hm of the 25-degree diffusion angle array in the embodiment is 18um, and the Hm of the 40-degree diffusion angle is 30um.

[0087] The contour generated by the method used in this embodiment is a completely smooth wavy curve, which is conducive to its manufacture through precision machining, photolithography and nanoimprinting.

[0088] The cylindrical prisms in the embodiments of the present invention may have a free-form surface and a random arrangement, and may obtain uniform line structured light with a large diffusion angle. Specific embodiments include a cylindrical prism array that generates 40° diffusion angle line structured light and 25° diffusion angle line structured light.

[0089] The subunit aperture of the cylindrical prism array designed by this method can be 10-200um, and the subunit height can be 5-100um. When using a spherical or aspherical surface, the subunit curvature radius should be greater than 5um, and the subunit cone coefficient should be within 0 to -2.

[0090] The unique feature of the cylindrical prism array design method in the embodiment of the present invention is that the sub-unit contour is divided into four parts, namely the upper (lower) part of the left (right) half contour. In fact, the upper and lower parts of each half contour are obtained by central symmetry, but the contour surface shape and structural parameters of the two halves may be different, so the constructed cylindrical prism sub-units may be asymmetric. Combined with the random distribution changes in the cylindrical prism array, the interference effect in the cylindrical prism array beam expansion process can be more effectively broken.

[0091] In this design method, the cylindrical prism array is divided into multiple sub-periods, and "screening" and "leveling" are applied to each sub-period. If the "screening" and "leveling" processes are directly applied to the entire cylindrical prism array, it will lead to too many "screening" times or no solution can be found, and the "leveling" process will cause serious surface distortion of some sub-units. At the same time, the "screening" and "leveling" processes for sub-periods can also effectively improve the calculation speed in the process of cylindrical prism formation.

[0092] The profile of the cylindrical prism array in the embodiment of the present invention is significantly different from that of the conventional cylindrical prism array as follows:

[0093] Common cylindrical prism array profiles are as follows: Figure 1 The contour of each sub-unit is semicircular or semi-elliptical, the slopes of the sub-units are not equal on the left and right sides, and there are V-shaped sharp corners. The contour of the cylindrical prism array is completely smooth without any sharp corners.

[0094] The surface shape of common cylindrical prism array units is mostly semicircular. The surface shape of the cylindrical prism of the present invention can be a free-form surface driven by a polynomial, a non-cylindrical surface, a cylindrical surface or a sinusoidal surface. The surface shape in common cylindrical prism arrays is mostly one type of surface shape. In the embodiment of the present invention, the cylindrical prism array can be composed of sub-units of different types of surface shapes, and the contour surface shapes of the left and right halves of the sub-units can also be different.

[0095] The subunits of common cylindrical prism arrays are all bilaterally symmetrical. The left and right half contours of the cylindrical prism array subunits in the embodiments of the present invention can be composed of the same surface shape and the same parameters, the same surface shape with different parameters, or different surface shapes with different parameters, so the subunits can be bilaterally symmetrical or asymmetrical.

[0096] Embodiment 1 of the cylindrical prism array structure designed and processed using the above-mentioned cylindrical prism array is a cylindrical prism array with a diffusion angle of 25°, and its sub-unit surface types are all aspherical surfaces, with a curvature radius of 30um, a cone coefficient of -1.7, a sub-unit aperture mean of 60um, an aperture variance of 6um, a sub-unit height mean of 15um, a variance of 2um, and the aperture and height changes conform to the normal distribution.

[0097] Embodiment 2 of the cylindrical prism array structure designed and processed using the above-mentioned cylindrical prism array is a cylindrical prism array with a diffusion angle of 45°, and its sub-unit surface types are all aspherical surfaces, with a curvature radius of 30um, a cone coefficient of -1.5, a sub-unit aperture mean of 100um, an aperture variance of 12um, a sub-unit height mean of 30um, a variance of 3um, and the aperture and height changes conform to the normal distribution.

[0098] The randomly distributed cylindrical prism array provided in the embodiment of the present invention breaks the periodicity of the sub-units and destroys the interference effect of the laser through random changes in the aperture, surface shape and sagittal height of each unit, thereby eliminating the influence of the interference fringes on the homogenized light spot, so that the line structured light emitted through the cylindrical prism has better uniformity, which can effectively improve the accuracy and performance of the entire system.

[0099] The surface shape of the cylindrical prism unit described in the embodiment of the present invention can be composed of a free-form surface, an aspherical surface, a spherical surface or a sinusoidal surface driven by a polynomial, and can be optimized for different incident light and the field of view FOV required by the system. Compared with the traditional spherical surface design, it has greater degrees of freedom and can achieve a larger field of view to help the system obtain a larger scanning range. At the same time, it can also improve the uniformity of the cylindrical prism array imaging.

[0100] The cylindrical prism surface shape completely eliminates the sharp corner problem between the cylindrical prism units due to the sudden change of slope at the connection point of the cross-sectional curve unit through the innovative sub-unit symmetry design. Since the cylindrical prism itself has a completely smooth contour curve, there is no need for additional smoothing algorithm processing (which will cause some areas of the contour curve to not meet the design parameters). Under ideal conditions, the structural contour can be completely reproduced through prop processing, photolithography and other methods.

[0101] By introducing sub-period height restrictions and sub-period leveling schemes, the maximum height difference of the columnar prism structure (height of the highest point of the structure - height of the lowest point of the structure) is effectively reduced, making the structure more conducive to photolithography processing, reducing the processing depth error caused by excessive processing depth and the possibility of surface defects, and being more conducive to large-scale batch production using methods such as nanoimprinting, effectively improving the reproducibility of the structure, so that the actually processed devices have better performance.

[0102] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A method for generating a cylindrical prism array profile, characterized in that: The following steps are involved: Given the surface shape and related parameters, generate sub-units; splicing sub-units to generate sub-periods, splicing sub-periods to obtain the outline of the cylindrical prism array; The generation step of the subunit comprises: Selecting a face shape of the first half-side contour of the subunit, setting parameters of the first half-side contour, and generating a first contour according to the set parameters, wherein the first contour is half of the first half-side contour of the subunit; Taking the end of the first outline as the center point, symmetrically copying the first outline to obtain a second outline, and splicing the first outline and the second outline to obtain the first half outline of the subunit; Selecting the face shape of the second half-side contour of the subunit, setting parameters of the second half-side contour, and generating a third contour according to the set parameters, wherein the third contour is half of the second half-side contour of the subunit; Taking the end of the third contour as the center point, symmetrically copying the third contour to obtain a fourth contour, and splicing the third contour and the fourth contour to obtain a second half-edge contour of the subunit; The subunit is obtained by concatenating the first half outline of the subunit and the second half outline of the subunit.

2. The method for generating a cylindrical prism array profile according to claim 1, characterized in that: The surface type includes a polynomial-driven free-form surface, an aspherical surface, a spherical surface or a sinusoidal surface.

3. The method for generating a cylindrical prism array profile according to claim 1, characterized in that: When the surface is an aspherical surface, the related parameters include an exit diameter, a radius of curvature, a cone coefficient and an even-order coefficient.

4. The method for generating a cylindrical prism array profile according to claim 1, characterized in that: The surface shape of the first half side contour of the subunit is different from the surface shape of the second half side contour of the subunit.

5. The method for generating a cylindrical prism array profile according to claim 1, characterized in that: The surface shape of the first half-edge contour of the subunit is the same as the surface shape of the second half-edge contour of the subunit, but the parameters are different.

6. The method for generating a cylindrical prism array profile according to claim 1, characterized in that: The splicing sub-cycle also includes the following steps: Determine whether the maximum height difference Hm between all sub-units in the obtained sub-period and the height difference Hs between the first and last sub-units in the sub-period are within the set threshold range. If so, perform leveling on the heights of the sub-units in the sub-period, and splice the processed sub-periods to obtain the cylindrical prism array profile; If not, the sub-period is discarded and a new sub-period is generated.

7. The method for generating a cylindrical prism array profile according to claim 6, characterized in that: The height leveling process for the sub-period comprises: Connect the beginning and end of the sub-period to get a straight line: Z1=Kx+b Among them, Z1 represents the height of the straight line; Get the height of the leveled sub-period along the positive x direction: Z2=z-Z1 Wherein, z is the height position of each point of the original sub-period when the position along the positive direction of the horizontal coordinate is x, and Z2 is the height of the sub-period after leveling along the positive direction of x.

8. The method for generating a cylindrical prism array profile according to claim 6, characterized in that: The threshold range of the maximum height difference Hm between all sub-units in the sub-period is 10-60 um.

9. The method for generating a cylindrical prism array profile according to claim 6, characterized in that: The height difference Hs between the first and last subunits in the sub-period is less than 20 um.

10. A cylindrical prism array structure, characterized in that: Outline of the cylindrical prism array structure Generated according to the generation method of claim 1.

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