Radio frequency power amplifier circuit and radio frequency power supply equipment

Abstract

The invention provides a radio frequency power amplifier circuit and radio frequency power supply equipment. The radio frequency power amplifier circuit comprises a direct current source, a radio frequency inversion unit, a coupling unit and a power adjusting unit. The direct-current source is used for outputting direct-current electric energy. The radio frequency inversion unit is connected with the direct current source, and the radio frequency inversion unit is used for receiving the direct current electric energy and inverting the direct current electric energy into radio frequency electric energy. The coupling unit comprises a first winding and a second winding which are coupled, the first winding is connected with the radio frequency inversion unit, the second winding is used for being connected with a load, and the coupling unit is used for coupling and outputting radio frequency electric energy to the load. The power adjusting unit is connected between the radio frequency inversion unit and the first winding or between the second winding and a load, and the power adjusting unit is used for reducing the current value of radio frequency electric energy output by the radio frequency inversion unit or reducing the current value of radio frequency electric energy output by the coupling unit in a coupling mode. Therefore, the current value of the radio frequency electric energy provided to the load is reduced. According to the invention, the radio frequency power amplifier circuit can be protected.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power amplifier circuit and a radio frequency power supply device. Background Art

[0002] At present, with the development of radio frequency technology, radio frequency power amplifier circuits are often used for power amplification, and the radio frequency power after power amplification is transmitted to the load to provide power to various loads, especially plasma loads. However, radio frequency power amplifier circuits have strict requirements on the working environment and are easily defeated by reflected power when the working environment changes. Therefore, how to protect the radio frequency power amplifier circuit and prevent the radio frequency power amplifier circuit from being defeated by reflected power has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a radio frequency power amplifier circuit and a radio frequency power supply device, which can protect the radio frequency power amplifier circuit.

[0004] In a first aspect, a radio frequency power amplifier circuit is provided, the radio frequency power amplifier circuit comprising a direct current source, a radio frequency inverter unit, a coupling unit and a power adjustment unit. The direct current source is used to output direct current power. The radio frequency inverter unit is connected to the direct current source, and the radio frequency inverter unit is used to receive the direct current power and invert the direct current power into radio frequency power. The coupling unit comprises a first winding and a second winding coupled with each other, the first winding is connected to the radio frequency inverter unit, the second winding is used to be connected to a load, and the coupling unit is used to couple the radio frequency power to the load. The power adjustment unit is connected between the radio frequency inverter unit and the first winding, or between the second winding and the load, and the power adjustment unit is used to reduce the current value of the radio frequency power output by the radio frequency inverter unit, or reduce the current value of the radio frequency power coupled output by the coupling unit, so as to reduce the current value of the radio frequency power provided to the load.

[0005] In a possible implementation manner, the power regulating unit has an adjustable first impedance value, and the reduction factor of the current value of the radio frequency electric energy is related to the first impedance value of the power regulating unit.

[0006] In a possible implementation, the power adjustment unit includes a first capacitor, and the first capacitor is connected between the RF inverter unit and the first winding, or connected between the second winding and the load. The first impedance value of the power adjustment unit is related to the capacitance value of the first capacitor, and the first capacitor is an adjustable capacitor, so that the first impedance value is adjustable.

[0007] In a possible implementation, the power adjustment unit further includes a first inductor, the first inductor is connected in parallel with the first capacitor, and the first impedance value is a composite value of the capacitance value of the first capacitor and the inductance value of the first inductor. When the current value of the radio frequency power transmitted to the load is not zero, the capacitance value of the first capacitor changes within a first adjustment range, so that the parallel resonant frequency of the first capacitor and the first inductor is within a first frequency range, thereby making the reduction factor of the power adjustment unit within a first reduction factor range.

[0008] In a possible implementation manner, the first frequency range is a range from a difference between the frequency of the radio frequency power energy and a first preset frequency to a sum of the frequency of the radio frequency power energy and the first preset frequency.

[0009] In a possible implementation, when the capacitance value of the first capacitor is less than the reference capacitance value, when the capacitance value of the first capacitor decreases within the first adjustment range, the reduction multiple increases, thereby reducing the current value of the RF power transmitted to the load, and when the capacitance value of the first capacitor increases within the first adjustment range, the reduction multiple decreases, thereby increasing the current value of the RF power transmitted to the load; when the capacitance value of the first capacitor is greater than or equal to the reference capacitance value, when the capacitance value of the first capacitor decreases within the first adjustment range, the reduction multiple decreases, thereby increasing the current value of the RF power transmitted to the load, and when the capacitance value of the first capacitor increases within the first adjustment range, the reduction multiple increases, thereby reducing the current value of the RF power transmitted to the load. Wherein, the reference capacitance value is the capacitance value of the first capacitor when the parallel resonant frequency of the first capacitor and the first inductor is equal to the frequency of the RF power.

[0010] In a possible implementation, the radio frequency power amplifier circuit further includes a control unit, the control unit is connected to the first capacitor, and the control unit is used to control and adjust the capacitance value of the first capacitor.

[0011] In a possible implementation, the RF power amplifier circuit further includes an acquisition unit, the acquisition unit is connected between the second winding and the load, or between the first capacitor and the load, and the acquisition unit is connected to the control unit. The acquisition unit is used to acquire the current value of the RF power transmitted to the load and output it to the control unit, and the control unit is used to control and adjust the capacitance value of the first capacitor at least according to the current value of the RF power transmitted to the load, so as to adjust the reduction multiple, thereby making the current value of the RF power transmitted to the load a target current value.

[0012] In a possible implementation, the DC source includes a positive power source and a negative power source, the RF inverter unit includes a positive input terminal, a negative input terminal, a positive output terminal, and a negative output terminal, the positive power source is connected to the positive input terminal, the negative power source is connected to the negative input terminal, the positive output terminal is connected to one end of the first winding, the negative output terminal is connected to the other end of the first winding, and the two ends of the second winding are connected to the two ends of the load accordingly. Wherein, the power adjustment unit also includes a second inductor and a third inductor, the second inductor and the third inductor are connected in sequence between the positive output terminal and one end of the first winding, one end of the first capacitor is connected to the connection point between the second inductor and the third inductor, and the other end of the first capacitor is connected to the connection point between the negative output terminal and the other end of the first winding.

[0013] In a second aspect, a radio frequency power supply device is also provided, the radio frequency power supply device comprising a radio frequency power amplifier circuit. The radio frequency power amplifier circuit comprises a direct current source, a radio frequency inverter unit, a coupling unit and a power regulating unit. The direct current source is used to output direct current power. The radio frequency inverter unit is connected to the direct current source, and the radio frequency inverter unit is used to receive the direct current power and invert the direct current power into radio frequency power. The coupling unit comprises a first winding and a second winding coupled with each other, the first winding is connected to the radio frequency inverter unit, the second winding is used to be connected to a load, and the coupling unit is used to couple the radio frequency power to the load. The power regulating unit is connected between the radio frequency inverter unit and the first winding, or between the second winding and the load, and the power regulating unit is used to reduce the current value of the radio frequency power output by the radio frequency inverter unit, or reduce the current value of the radio frequency power coupled output by the coupling unit, so as to reduce the current value of the radio frequency power provided to the load.

[0014] The RF power amplifier circuit and RF power supply device of the present application, by setting the power adjustment unit to be connected between the RF inverter unit and the first winding, or between the second winding and the load, can reduce the current value of the RF power output by the RF inverter unit, or reduce the current value of the RF power coupled output by the coupling unit, thereby reducing the current value of the RF power provided to the load, and can provide effective protection for the RF power amplifier circuit when needed. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1A block diagram of a radio frequency power amplifier circuit in some embodiments of the present application.

[0017] Figure 2 Another block diagram of a radio frequency power amplifier circuit in some embodiments of the present application.

[0018] Figure 3 Schematic diagram of a circuit of a power regulation unit in some embodiments of the present application.

[0019] Figure 4 Another circuit diagram of a power regulation unit in some embodiments of the present application.

[0020] Figure 5 This is a circuit diagram of a radio frequency power amplifier circuit in some embodiments of the present application.

[0021] Figure 6 This is another circuit diagram of the power regulation unit in some embodiments of the present application.

[0022] Figure 7 It is a block diagram of a radio frequency power supply device in some embodiments of the present application.

[0023] Explanation of the accompanying drawings: 1000, RF power supply equipment, 10, RF power amplifier circuit, 100, DC source, I+, positive power supply, I-, negative power supply, DC, DC power, 200, RF inverter unit, I1, positive input terminal, I2, negative input terminal, O1, positive output terminal, O2, negative output terminal, S1, first switch, S2, second switch, S3, third switch, S4, fourth switch, RFP, RF power, 300, coupling unit, W1, first winding, W2, second winding, 400, power adjustment unit, C1, first capacitor, L1, first inductor, L2, second inductor, L3, third inductor, 500, control unit, 600, acquisition unit, C2, second capacitor, RL, load. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0027] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0028] Please also read Figure 1 , Figure 2 , Figure 1 is a block diagram of a radio frequency power amplifier circuit in some embodiments of the present application, Figure 2 FIG. 1 is another block diagram of a radio frequency power amplifier circuit in some embodiments of the present application. Figure 1 , Figure 2 As shown, the present application provides a radio frequency power amplifier circuit 10, which includes a DC source 100, a radio frequency inverter unit 200, a coupling unit 300, and a power adjustment unit 400. The DC source 100 is used to output direct current power DC. The radio frequency inverter unit 200 is connected to the DC source 100, and the radio frequency inverter unit 200 is used to receive direct current power DC and invert the direct current power DC into radio frequency power RFP. The coupling unit 300 includes a first winding W1 and a second winding W2 coupled with each other, the first winding W1 is connected to the radio frequency inverter unit 200, and the second winding W2 is used to be connected to a load RL, and the coupling unit 300 is used to couple the radio frequency power RFP to output to the load RL. The power regulating unit 400 is connected between the RF inverter unit 200 and the first winding W1, or between the second winding W2 and the load RL. The power regulating unit 400 is used to reduce the current value of the RF power RFP output by the RF inverter unit 200, or to reduce the current value of the RF power RFP coupled output by the coupling unit 300, so as to reduce the current value of the RF power RFP provided to the load RL.

[0029] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application can reduce the current value of the RF power RFP output by the RF inverter unit 200, or reduce the current value of the RF power RFP coupled output by the coupling unit 300, by setting the power adjustment unit 400 to be connected between the RF inverter unit 200 and the first winding W1, or between the second winding W2 and the load RL, thereby reducing the current value of the RF power RFP provided to the load RL, and can provide effective protection for the RF power amplifier circuit 10 when needed.

[0030] It should be noted that the larger the current value of the RF power RFP output by the RF power amplifier circuit 10 in the working state, the easier it is for the RF power amplifier circuit 10 to be damaged due to reflected power. Therefore, when the reflected power is too large, reducing the current value of the RF power RFP output by the RF power amplifier circuit 10 in the working state can effectively protect the RF power amplifier circuit 10.

[0031] The load RL may be a plasma load.

[0032] In some embodiments, the power regulating unit 400 has an adjustable first impedance value, and the reduction factor of the current value of the radio frequency power RFP is related to the first impedance value of the power regulating unit 400 .

[0033] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application, by configuring the power adjustment unit 400 with an adjustable first impedance value, can adjust the reduction multiple of the current value of the RF power RFP by adjusting the first impedance value of the power adjustment unit 400, thereby performing corresponding protection on the RF power amplifier circuit 10 according to specific circumstances.

[0034] Please also read Figure 3 , Figure 3 FIG. 1 is a circuit diagram of a power regulation unit in some embodiments of the present application. Figure 1 , Figure 2 , Figure 3 As shown, the power regulating unit 400 includes a first capacitor C1, and the first capacitor C1 is connected between the RF inverter unit 200 and the first winding W1, or connected between the second winding W2 and the load RL. The first impedance value of the power regulating unit 400 is related to the capacitance value of the first capacitor C1, and the first capacitor C1 is an adjustable capacitor so that the first impedance value is adjustable.

[0035] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application can reduce the current value of the RF power RFP provided to the load RL by setting a first capacitor C1 connected between the RF inverter unit 200 and the first winding W1 or between the second winding W2 and the load RL, and by adjusting the capacitance value of the first capacitor C1, the first impedance value of the power adjustment unit 400 can be adjusted.

[0036] Please also read Figure 4 , Figure 4 FIG. 1 is another circuit diagram of a power regulation unit in some embodiments of the present application. Figure 1 , Figure 2 , Figure 4 As shown, the power regulating unit 400 also includes a first inductor L1, the first inductor L1 is connected in parallel with the first capacitor C1, and the first impedance value is a composite value of the capacitance value of the first capacitor C1 and the inductance value of the first inductor L1. When the current value of the radio frequency power RFP transmitted to the load RL is not zero, the capacitance value of the first capacitor C1 changes within a first adjustment range, so that the parallel resonant frequency of the first capacitor C1 and the first inductor L1 is within a first frequency range, thereby making the reduction factor of the power regulating unit 400 within a first reduction factor range.

[0037] That is, the capacitance value of the first capacitor C1 varies within the first adjustment range so that the current value of the radio frequency power RFP transmitted to the load RL is not zero, thereby preventing the radio frequency power amplifier circuit 10 from being damaged due to the parallel resonant frequency of the first capacitor C1 and the first inductor L1 being outside the first frequency range.

[0038] Thus, the above-mentioned RF power amplifier circuit 10 in the present application, by setting a first inductor L1 connected in parallel with the first capacitor C1, can change the capacitance value of the first capacitor C1 within a first adjustment range when the current value of the RF power RFP transmitted to the load RL is not zero, so that the parallel resonant frequency of the first capacitor C1 and the first inductor L1 is within the first frequency range, thereby enabling the reduction factor of the power adjustment unit 400 to be within the first reduction factor range.

[0039] The first reduction multiple range is related to the power value of the radio frequency power RFP obtained by the radio frequency inverter unit 200 .

[0040] In some embodiments, the first frequency range is a range from a difference between the frequency of the radio frequency power RFP and the first preset frequency to a sum of the frequency of the radio frequency power RFP and the first preset frequency.

[0041] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application can avoid the current value of the RF power RFP transmitted to the load RL being zero by limiting the first frequency range to the range between the difference between the frequency of the RF power RFP and the first preset frequency and the sum of the frequency of the RF power RFP and the first preset frequency.

[0042] The first preset frequency may be 40%, 50%, 60%, etc., of the frequency of the radio frequency power RFP.

[0043] In some embodiments, when the capacitance value of the first capacitor C1 is less than the reference capacitance value, when the capacitance value of the first capacitor C1 decreases within the first adjustment range, the reduction factor increases, thereby reducing the current value of the radio frequency power RFP transmitted to the load RL, and when the capacitance value of the first capacitor C1 increases within the first adjustment range, the reduction factor decreases, thereby increasing the current value of the radio frequency power RFP transmitted to the load RL; when the capacitance value of the first capacitor C1 is greater than or equal to the reference capacitance value, when the capacitance value of the first capacitor C1 decreases within the first adjustment range, the reduction factor decreases, thereby increasing the current value of the radio frequency power RFP transmitted to the load RL, and when the capacitance value of the first capacitor C1 increases within the first adjustment range, the reduction factor increases, thereby reducing the current value of the radio frequency power RFP transmitted to the load RL. Wherein, the reference capacitance value is the capacitance value of the first capacitor C1 when the parallel resonant frequency of the first capacitor C1 and the first inductor L1 is equal to the frequency of the radio frequency power RFP.

[0044] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application, by determining the reference capacitance value and adjusting the capacitance value of the first capacitor C1 according to the relationship between the capacitance value of the first capacitor C1 and the reference capacitance value, can correspondingly increase or decrease the reduction factor, thereby causing the current value of the RF power RFP transmitted to the load RL to increase or decrease accordingly.

[0045] See also Figure 5 , Figure 5 FIG. 1 is a circuit diagram of a radio frequency power amplifier circuit in some embodiments of the present application. Figure 5 As shown, the RF power amplifier circuit 10 further includes a control unit 500 , which is connected to the first capacitor C1 , and the control unit 500 is used to control and adjust the capacitance value of the first capacitor C1 .

[0046] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application can control and adjust the capacitance value of the first capacitor C1 by setting the control unit 500.

[0047] like Figure 5As shown, the RF power amplifier circuit 10 further includes an acquisition unit 600, which is connected between the second winding W2 and the load RL, or between the first capacitor C1 and the load RL, and is connected to the control unit 500. The acquisition unit 600 is used to acquire the current value of the RF power RFP transmitted to the load RL and output it to the control unit 500, and the control unit 500 is used to control and adjust the capacitance value of the first capacitor C1 at least according to the current value of the RF power RFP transmitted to the load RL, so as to adjust the reduction multiple, so that the current value of the RF power RFP transmitted to the load RL is the target current value.

[0048] Therefore, the above-mentioned RF power amplifier circuit 10 in the present application, by setting the acquisition unit 600, can control and adjust the capacitance value of the first capacitor C1 according to the current value of the RF power RFP transmitted to the load RL, so as to adjust the reduction multiple, and thereby make the current value of the RF power RFP transmitted to the load RL the target current value, thereby realizing controllable protection of the RF power amplifier circuit 10.

[0049] In some embodiments, the acquisition unit 600 may include a current sensor.

[0050] In some embodiments, the control unit 500 may also control and adjust the capacitance value of the first capacitor C1 according to output parameters such as reflection coefficient and standing wave ratio. For example, when the output parameters such as reflection coefficient and standing wave ratio are greater than a preset threshold, the control unit 500 controls and adjusts the capacitance value of the first capacitor C1 according to the current value of the radio frequency power RFP transmitted to the load RL to adjust the reduction multiple, thereby making the current value of the radio frequency power RFP transmitted to the load RL the target current value.

[0051] In some embodiments, the control unit 500 may include a controller and a rotating motor. The controller is mainly used to control the rotating motor to adjust the capacitance value of the first capacitor C1 at least according to the current value of the radio frequency power RFP transmitted to the load RL, and the rotating motor is mainly used to adjust the capacitance value of the first capacitor C1.

[0052] Among them, the controller can be a general processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0053] Please also read Figure 6 , Figure 6 FIG. 1 is another circuit diagram of a power regulation unit in some embodiments of the present application. Figure 6 The power regulating unit 400 includes a first capacitor C1 for illustration. Figure 5 , Figure 6 As shown, the DC source 100 includes a positive power supply electrode I+ and a negative power supply electrode I-, and the RF inverter unit 200 includes a positive input terminal I1, a negative input terminal I2, a positive output terminal O1, and a negative output terminal O2. The positive power supply electrode I+ is connected to the positive input terminal I1, the negative power supply electrode I- is connected to the negative input terminal I2, the positive output terminal O1 is connected to one end of the first winding W1, the negative output terminal O2 is connected to the other end of the first winding W1, and the two ends of the second winding W2 are connected to the two ends of the load RL. Among them, the power adjustment unit 400 also includes a second inductor L2 and a third inductor L3, the second inductor L2 and the third inductor L3 are connected in sequence between the positive output terminal O1 and one end of the first winding W1, one end of the first capacitor C1 is connected to the connection point between the second inductor L2 and the third inductor L3, and the other end of the first capacitor C1 is connected to the connection point between the negative output terminal O2 and the other end of the first winding W1.

[0054] Therefore, the above-mentioned radio frequency power amplifier circuit 10 in the present application can provide more effective protection by setting the second inductor L2 and the third inductor L3 to cooperate with the first capacitor C1.

[0055] like Figure 5As shown, the RF inverter unit 200 may include a first switch S1, a second switch S2, a third switch S3 and a fourth switch S4, wherein the first switch S1 and the third switch S3 are connected in series between the input positive electrode and the input negative electrode, and the connection point between the first switch S1 and the third switch S3 is the output positive electrode, the second switch S2 and the fourth switch S4 are connected in series between the input positive electrode and the input negative electrode, and the connection point between the second switch S2 and the fourth switch S4 is the output negative electrode. The first switch S1 and the fourth switch S4 are synchronously turned on, the second switch S2 and the third switch S3 are synchronously turned on, and the first switch S1 and the third switch S3 are complementary turned on.

[0056] Furthermore, the first switch S1, the second switch S2, the third switch S3 and the fourth switch S4 can receive corresponding radio frequency signals, and be periodically turned on or off under the control of the radio frequency signals to invert the direct current power DC into radio frequency power RFP.

[0057] like Figure 5 As shown, the coupling unit 300 may include a radio frequency transformer, the primary winding of the radio frequency transformer is a first winding W1, and the secondary winding of the radio frequency transformer is a second winding W2. The radio frequency transformer may be a balun transformer.

[0058] like Figure 5 As shown, the RF power amplifier circuit 10 may further include a second capacitor C2, one end of the second capacitor C2 is connected to the connection point between the positive power supply electrode I+ and the positive input terminal I1, and the other end of the second capacitor C2 is connected to the connection point between the negative power supply electrode I- and the negative input terminal I2.

[0059] The RF power amplifier circuit 10 of the present application, through the above-mentioned structure, can accurately, controllably and effectively protect the RF power amplifier circuit 10, prevent the RF power amplifier circuit 10 from being destroyed by reflected power, thereby maintaining the output stability of the RF power amplifier circuit 10.

[0060] See also Figure 7 , Figure 7 FIG. 1 is a block diagram of a radio frequency power supply device in some embodiments of the present application. Figure 7 As shown, the present application further provides a radio frequency power supply device 1000, and the radio frequency power supply device 1000 includes the radio frequency power amplifier circuit 10 in any of the aforementioned embodiments.

[0061] Please refer again Figure 1 .like Figure 1As shown, the RF power amplifier circuit 10 includes a DC source 100, an RF inverter unit 200, a coupling unit 300 and a power adjustment unit 400. The DC source 100 is used to output DC power DC. The RF inverter unit 200 is connected to the DC source 100, and the RF inverter unit 200 is used to receive the DC power DC and invert the DC power DC into RF power RFP. The coupling unit 300 includes a first winding W1 and a second winding W2 coupled with each other, the first winding W1 is connected to the RF inverter unit 200, and the second winding W2 is used to be connected to the load RL, and the coupling unit 300 is used to couple the RF power RFP to the load RL. The power regulating unit 400 is connected between the RF inverter unit 200 and the first winding W1, or between the second winding W2 and the load RL. The power regulating unit 400 is used to reduce the current value of the RF power RFP output by the RF inverter unit 200, or to reduce the current value of the RF power RFP coupled output by the coupling unit 300, so as to reduce the current value of the RF power RFP provided to the load RL.

[0062] The more specific structure of the RF power amplifier circuit 10 can refer to the relevant content of the RF power amplifier circuit 10 in any of the aforementioned embodiments, which will not be repeated here.

[0063] The RF power amplifier circuit 10 and RF power supply device 1000 of the present application, through the above-mentioned structure, can accurately, controllably and effectively protect the RF power amplifier circuit 10, prevent the RF power amplifier circuit 10 from being destroyed by reflected power, thereby maintaining the output stability of the RF power amplifier circuit 10.

[0064] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A radio frequency power amplifier circuit, characterized in that: include: A DC source for outputting DC power; A radio frequency inverter unit connected to the DC source, the radio frequency inverter unit is used to receive the DC power and invert the DC power into radio frequency power; A coupling unit, comprising a first winding and a second winding coupled to each other, wherein the first winding is connected to the RF inverter unit, and the second winding is used to be connected to a load, and the coupling unit is used to couple the RF power to the load: A power regulating unit is connected between the RF inverter unit and the first winding, or between the second winding and the load, and is used to reduce the current value of the RF power output by the RF inverter unit, or to reduce the current value of the RF power coupled output by the coupling unit, so as to reduce the current value of the RF power provided to the load.

2. The radio frequency power amplifier circuit according to claim 1, characterized in that: The power regulating unit has an adjustable first impedance value, and the reduction factor of the current value of the radio frequency electric energy is related to the first impedance value of the power regulating unit.

3. The radio frequency power amplifier circuit according to claim 2, characterized in that: The power adjustment unit includes a first capacitor, and the first capacitor is connected between the RF inverter unit and the first winding, or connected between the second winding and the load; The first impedance value of the power adjustment unit is related to the capacitance value of the first capacitor, and the first capacitor is an adjustable capacitor, so that the first impedance value is adjustable.

4. The radio frequency power amplifier circuit according to claim 3, characterized in that: The power adjustment unit further includes a first inductor, the first inductor is connected in parallel with the first capacitor, and the first impedance value is a composite value of a capacitance value of the first capacitor and an inductance value of the first inductor; When the current value of the RF power transmitted to the load is not zero, the capacitance value of the first capacitor changes within a first adjustment range so that the parallel resonant frequency of the first capacitor and the first inductor is within a first frequency range, thereby making the reduction factor of the power adjustment unit within a first reduction factor range.

5. The radio frequency power amplifier circuit according to claim 4, characterized in that: The first frequency range is a range from a difference between the frequency of the radio frequency power energy and a first preset frequency to a sum of the frequency of the radio frequency power energy and the first preset frequency.

6. The radio frequency power amplifier circuit according to claim 5, characterized in that: When the capacitance value of the first capacitor is less than the reference capacitance value, when the capacitance value of the first capacitor decreases within the first adjustment range, the reduction multiple increases, thereby reducing the current value of the radio frequency electric energy transmitted to the load, and when the capacitance value of the first capacitor increases within the first adjustment range, the reduction multiple decreases, thereby increasing the current value of the radio frequency electric energy transmitted to the load; when the capacitance value of the first capacitor is greater than or equal to the reference capacitance value, when the capacitance value of the first capacitor decreases within the first adjustment range, the reduction multiple decreases, thereby increasing the current value of the radio frequency electric energy transmitted to the load, and when the capacitance value of the first capacitor increases within the first adjustment range, the reduction multiple increases, thereby reducing the current value of the radio frequency electric energy transmitted to the load; The reference capacitance value is the capacitance value of the first capacitor when the parallel resonant frequency of the first capacitor and the first inductor is equal to the frequency of the radio frequency power.

7. The radio frequency power amplifier circuit according to claim 3, characterized in that: The RF power amplifier circuit also includes a control unit, which is connected to the first capacitor and is used to control and adjust the capacitance value of the first capacitor.

8. The radio frequency power amplifier circuit according to claim 7, characterized in that: The RF power amplifier circuit further includes an acquisition unit, which is connected between the second winding and the load, or between the first capacitor and the load, and is connected to the control unit; Among them, the acquisition unit is used to obtain the current value of the radio frequency power energy transmitted to the load and output it to the control unit, and the control unit is used to control and adjust the capacitance value of the first capacitor at least according to the current value of the radio frequency power energy transmitted to the load, so as to adjust the reduction factor, thereby making the current value of the radio frequency power energy transmitted to the load the target current value.

9. The radio frequency power amplifier circuit according to claim 3, characterized in that: The DC source includes a positive power source and a negative power source, the RF inverter unit includes a positive input terminal, a negative input terminal, a positive output terminal, and a negative output terminal, the positive power source is connected to the positive input terminal, the negative power source is connected to the negative input terminal, the positive output terminal is connected to one end of the first winding, the negative output terminal is connected to the other end of the first winding, and the two ends of the second winding are connected to the two ends of the load correspondingly; Wherein, the power regulating unit also includes a second inductor and a third inductor, the second inductor and the third inductor are connected between the positive output terminal and one end of the first winding in sequence, one end of the first capacitor is connected to the connection point between the second inductor and the third inductor, and the other end of the first capacitor is connected to the connection point between the negative output terminal and the other end of the first winding.

10. A radio frequency power supply device, characterized in that: Comprising the radio frequency power amplifier circuit as described in any one of claims 1-9.

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