Dilution refrigerator based on superconductor and superconducting quantum computing equipment

Abstract

The invention provides a dilution refrigerator based on a superconductor and superconducting quantum computing equipment. The dilution refrigerator comprises a common ground cable made of a superconductor material, and the common ground cable comprises a first common ground cable section arranged in the second temperature layer; the second common ground cable section is arranged in the third temperature layer; the third common ground cable section is arranged in the fourth temperature layer; the fourth common ground cable section is arranged in the fifth temperature layer; wherein the first common-ground cable section, the second common-ground cable section, the third common-ground cable section and the fourth common-ground cable section are connected through all levels of cold plates between temperature layers of the dilution refrigerator; the attenuation assembly comprises a first attenuator, a second attenuator, a third attenuator, a fourth attenuator and a fifth attenuator; attenuation values of the first attenuator, the second attenuator, the third attenuator, the fourth attenuator and the fifth attenuator are determined according to a preset combination mode.

Description

Technical Field

[0001] The present invention relates to the technical field of dilution refrigerators, and more particularly, to a dilution refrigerator based on a superconductor and a superconducting quantum computing device. Background Art

[0002] Superconducting quantum computing is a physical implementation method that utilizes the quantum properties of superconducting materials to achieve quantum computing. Experiments on superconducting quantum computing must be carried out at ultra-low temperatures (such as less than 20 mK). A dilution refrigerator is a key device for providing ultra-low cooling capacity for superconducting quantum computing. The dilution refrigerator is provided with multiple cold plates, and the cold plate is one of the core components of the dilution refrigerator, which is used to maintain a low-temperature environment and control the temperature. A superconducting quantum chip and various electronic devices (such as attenuators, etc.) are arranged on the cold plate, and signal transmission is carried out between the cold plates of each stage through coaxial cables.

[0003] However, the inventor found that certain heat insulation is required between the cold plates of each stage of the dilution refrigerator, and the coaxial cables connecting the cold plates of each stage need to have good signal transmission performance, and the outer layer of the coaxial cable is required to have low thermal conductivity. This will make the ground loop formed by the coaxial cable and each stage of the cold plate relatively complex, and low-frequency crosstalk between the coaxial cables to the ground will occur due to differences in ground resistance.

[0004] Therefore, the inventor believes that how to reduce the low-frequency crosstalk between the coaxial cables to the ground is a technical problem that needs to be solved.

[0005] The content of the background art section is only the technology known to the applicant and does not necessarily represent the prior art in this field. Summary of the Invention

[0006] According to one aspect of the present invention, the present invention provides a dilution refrigerator based on a superconductor and a superconducting quantum computing device. The temperature layers of the dilution refrigerator at least include a first temperature layer, a second temperature layer, a third temperature layer, a fourth temperature layer, and a fifth temperature layer. The dilution refrigerator includes: a common ground cable, made of a superconductor material, and the common ground cable includes: a first common ground cable segment disposed in the second temperature layer; a second common ground cable segment disposed in the third temperature layer; a third common ground cable segment disposed in the fourth temperature layer; a fourth common ground cable segment disposed in the fifth temperature layer; wherein, the first common ground cable segment, the second common ground cable segment, the third common ground cable segment, and the fourth common ground cable segment are connected through the cold plates between the temperature layers of the dilution refrigerator; an attenuation component, including: a first attenuator disposed in the first temperature layer; a second attenuator disposed in the second temperature layer; a third attenuator disposed in the third temperature layer; a fourth attenuator disposed in the fourth temperature layer; a fifth attenuator disposed in the fifth temperature layer; wherein, the attenuation values of the first attenuator, the second attenuator, the third attenuator, the fourth attenuator, and the fifth attenuator are determined according to a preset combination method.

[0007] According to some embodiments of the present invention, the superconducting material is yttrium barium copper oxide.

[0008] According to some embodiments of the present invention, the superconducting material is rare earth barium copper oxide.

[0009] According to some embodiments of the present invention, the preset combination method includes a first combination method, and the first combination method is: the attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is the first specified attenuation value; the attenuation value of the third attenuator is 0 dB; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0010] According to some embodiments of the present invention, the preset combination method includes a second combination method, and the second combination method is: the attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is the first specified attenuation value; the attenuation value of the third attenuator is the second specified attenuation value; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0011] According to some embodiments of the present invention, the preset combination method includes a third combination method, and the third combination method is: the attenuation value of the first attenuator is the third specified attenuation value; the attenuation value of the second attenuator is the second specified attenuation value; the attenuation value of the third attenuator is the second specified attenuation value; the attenuation value of the fourth attenuator is the fourth specified attenuation value; the attenuation value of the fifth attenuator is 0 dB.

[0012] According to some embodiments of the present invention, the preset combination method includes a fourth combination method, and the fourth combination method is: the attenuation value of the first attenuator is the fourth specified attenuation value; the attenuation value of the second attenuator is the second specified attenuation value; the attenuation value of the third attenuator is the second specified attenuation value; the attenuation value of the fourth attenuator is the third specified attenuation value; the attenuation value of the fifth attenuator is 0 dB.

[0013] According to another aspect of the present invention, the present invention also provides a superconducting quantum computing device. The superconducting quantum computing device includes the dilution refrigerator as described above.

[0014] Beneficial effects

[0015] Through the method of the common ground cable, the present invention can introduce the redundant feedback current and interference in the dilution refrigerator circuit into the ground, and can suppress the low-frequency crosstalk between the coaxial cables to the ground. And by selecting the common ground cable made of superconducting material, the present invention can utilize the characteristic of the low thermal conductivity of the superconducting material to avoid affecting the refrigeration efficiency of each cold plate due to too high heat conduction efficiency. In addition, the present invention also suppresses the low-frequency crosstalk between the coaxial cables to the ground in different ways by setting the attenuation components and controlling the combination of the attenuation values of the attenuators in different temperature layers through impedance distribution. Brief Description of the Drawings

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0017] Figure 1 Schematic diagram showing the structure of the dilution refrigerator according to an embodiment of the present invention;

[0018] Figure 2 Schematic diagram showing the preset combination mode according to an embodiment of the present invention.

[0019] Description of the reference numerals:

[0020] Common ground cable 10; attenuation component 20;

[0021] First common ground cable segment 11; second common ground cable segment 12; third common ground cable segment 13; fourth common ground cable segment 14;

[0022] First attenuator 21, second attenuator 22, third attenuator 23, fourth attenuator 24 and fifth attenuator 25. Detailed Description of the Embodiments

[0023] Now, the exemplary embodiments will be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be implemented in various forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. Identical reference numerals in the figures denote identical or similar parts, and thus their repeated description will be omitted.

[0024] The described features, structures or characteristics can be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided to give a thorough understanding of the embodiments of the present disclosure. However, those skilled in the art will realize that the technical solutions of the present disclosure can be practiced without one or more of these specific details, or can be implemented in other ways, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials or operations will not be shown or described in detail.

[0025] In addition, the terms "comprising", "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but may optionally further include steps or units not listed, or may optionally further include other steps or units inherent to these processes, methods, products or devices.

[0026] The terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order.

[0027] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0028] The grounding resistance is the resistance encountered when the current flows into the ground through the grounding device and then flows through the ground to another grounding body or diffuses far away. The grounding resistance includes the grounding wire, the grounding body itself, the contact between the grounding body and the ground, and the resistance between two grounding bodies or from the grounding body to the far ground. The grounding resistance can be a criterion for judging whether the grounding device is in good contact with the ground.

[0029] The inventor found that in a dilution refrigerator, due to the different settings of the cold plates at each level, in the technical solution of the grounding circuit of the cold plates of the dilution refrigerator, the following aspects need to be considered:

[0030] 1. The common grounding connection of the cold plates at each level;

[0031] 2. The common grounding cable used for the cold plates at each level has good electrical conductivity;

[0032] 3. The common grounding cable used for the cold plates at each level needs to have a low thermal conductivity.

[0033] Therefore, the inventor found that conventional wires with high electrical conductivity and high thermal conductivity cannot be used as the common grounding cables for dilution refrigerators.

[0034] Based on this, according to one aspect of the present invention, the present invention provides a dilution refrigerator based on a superconductor.

[0035] Figure 1 The structural schematic diagram of the dilution refrigerator showing the embodiments of the present invention.

[0036] According to an exemplary embodiment, the dilution refrigerator includes at least a first temperature layer, a second temperature layer, a third temperature layer, a fourth temperature layer and a fifth temperature layer.

[0037] The dilution refrigerator may include five - stage cold plates, such as Figure 1 the first cold plate, the second cold plate, the third cold plate, the fourth cold plate, and the fifth cold plate shown. Different temperature layers are provided between adjacent cold plates among the first cold plate, the second cold plate, the third cold plate, the fourth cold plate, and the fifth cold plate.

[0038] For example, as Figure 1 shown, above the first cold plate is the first temperature layer, between the first cold plate and the second cold plate is the second temperature layer, between the second cold plate and the third cold plate is the third temperature layer, between the third cold plate and the fourth cold plate is the fourth temperature layer, and between the fourth cold plate and the fifth cold plate is the fifth temperature layer.

[0039] Exemplarily, the first cold plate may be a 50K cold plate, the second cold plate may be a 4K cold plate, the third cold plate may be a 600mK distillation - layer cold plate, the fourth cold plate may be a 100mK cold plate, and the fifth cold plate may be a 10mK mixing - chamber cold plate.

[0040] According to an exemplary embodiment, as Figure 1 shown, the dilution refrigerator includes a common - ground cable 10 and an attenuation component 20.

[0041] The common - ground cable 10 may include a first common - ground cable segment 11, a second common - ground cable segment 12, a third common - ground cable segment 13, and a fourth common - ground cable segment 14. The first common - ground cable segment 11 is disposed in the second temperature layer. The second common - ground cable segment 12 is disposed in the third temperature layer. The third common - ground cable segment 13 is disposed in the fourth temperature layer. The fourth common - ground cable segment 14 is disposed in the fifth temperature layer.

[0042] The first common - ground cable segment 11, the second common - ground cable segment 12, the third common - ground cable segment 13, and the fourth common - ground cable segment 14 are connected through the respective cold plates between the temperature layers of the dilution refrigerator.

[0043] For example, as Figure 1 shown, the first common - ground cable segment 11 is connected and disposed between the first cold plate and the second cold plate, the second common - ground cable segment 12 is connected and disposed between the second cold plate and the third cold plate, the third common - ground cable segment 13 is connected and disposed between the third cold plate and the fourth cold plate, and the fourth common - ground cable segment 14 is connected and disposed between the fourth cold plate and the fifth cold plate.

[0044] Exemplarily, each common - ground cable segment can be fixed to the corresponding cold plate by a screw - fixing method, so that the overall common - ground connection of each common - ground cable segment can be achieved.

[0045] According to an exemplary embodiment, the common - ground cable 10 may be made of a superconducting material.

[0046] The superconducting material has the Meissner effect, that is, when the superconducting material is cooled below the superconducting transition temperature (Tc), the magnetic induction intensity inside the superconducting material is zero, and it can exhibit perfect diamagnetism. The superconducting material can completely eliminate resistance under specific low-temperature conditions and has the characteristic that the resistance is zero after superconductivity.

[0047] According to the exemplary embodiment, the attenuation component 20 includes a first attenuator 21, a second attenuator 22, a third attenuator 23, a fourth attenuator 24, and a fifth attenuator 25. The first attenuator 21 is disposed in the first temperature layer; the second attenuator 22 is disposed in the second temperature layer; the third attenuator 23 is disposed in the third temperature layer; the fourth attenuator 24 is disposed in the fourth temperature layer. The fifth attenuator 25 is disposed in the fifth temperature layer.

[0048] For example, as Figure 1 shown, the first attenuator 21 is disposed on the first cold plate in the first temperature layer; the second attenuator 22 is disposed on the second cold plate in the second temperature layer; the third attenuator 23 is disposed on the third cold plate in the third temperature layer; the fourth attenuator 24 is disposed on the fourth cold plate in the fourth temperature layer; the fifth attenuator 25 is disposed on the fifth cold plate in the fifth temperature layer.

[0049] According to the exemplary embodiment, the attenuation values of the first attenuator 21, the second attenuator 22, the third attenuator 23, the fourth attenuator 24, and the fifth attenuator 25 are determined according to a preset combination method.

[0050] For example, the attenuation values of the first attenuator 21, the second attenuator 22, the third attenuator 23, the fourth attenuator 24, and the fifth attenuator 25 can be different, and the attenuation values corresponding to the first attenuator 21, the second attenuator 22, the third attenuator 23, the fourth attenuator 24, and the fifth attenuator 25 can be determined according to a preset combination method.

[0051] An attenuator is an electronic component that can reduce the intensity of an electrical signal. The unit of the attenuation value is decibel (dB), which can describe the degree of power reduction of the signal after passing through the attenuator.

[0052] Through the above embodiments, the present invention can introduce the redundant feedback current and interference in the dilution refrigerator circuit into the ground through the coaxial cable with a common ground, and can suppress the low-frequency crosstalk between the coaxial cables to the ground. And the present invention can utilize the characteristic of the lower thermal conductivity of the superconducting material by selecting the coaxial cable made of the superconducting material to avoid affecting the refrigeration efficiency of each cold plate due to too high heat conduction efficiency. In addition, the present invention also realizes the low-frequency crosstalk between the coaxial cables to the ground through impedance distribution by setting the attenuation component and controlling the combination of the attenuation values of the attenuators in different temperature layers.

[0053] Optionally, the superconducting material can be yttrium barium copper oxide.

[0054] For example, yttrium barium copper oxide (YBCO) is a high-temperature superconducting material that exhibits superconductivity at the temperature of liquid nitrogen (77K). The superconducting transition temperature of YBCO is around 90K, and its thermal conductivity is lower than 2 W / (m·K). Exemplarily, the tape can be selected to be stainless steel encapsulated, the width of the wire can be 12 mm, and the total thickness can be 200 μm.

[0055] Optionally, the superconducting material is rare earth barium copper oxide.

[0056] For example, rare earth barium copper oxide (REBCO) is a high-temperature superconducting material, which has the characteristics of zero resistance and high current density. Exemplarily, according to the thickness of the copper plating layer, wires with a thermal conductivity of 10 - 20 W / (m·K) can be selected, such as the width can be 12 mm and the total thickness can be 200 μm.

[0057] In the present invention, at the connection between the common ground cable and the cold plate, a superconducting connection method is adopted to connect the superconducting core wire to the cold plate. With such a setting, both the common ground effect can be ensured and the heat conduction phenomenon can be avoided. Compared with the method of not using superconducting wires in the prior art, the present invention can reduce the introduced resistance and heat conduction, and can reduce the common ground crosstalk.

[0058] Optionally, the second common ground cable segment 12, the third common ground cable segment 13, and the fourth common ground cable segment 14 can also be made of niobium-titanium with a diameter of 3 mm.

[0059] For example, in all temperature layers below the 4K cold plate, the common ground cable segments can be made of niobium-titanium.

[0060] The experimental data of the present invention can show that in all temperature layers below the 4K cold plate, when the common ground cable segments are made of niobium-titanium, the ground resistance can be reduced. Exemplarily, the ground crosstalk can be reduced from -60 dB to -75.9 dB.

[0061] Optionally, the attenuation value of the attenuation component can be a preset attenuation value.

[0062] The magnitude of the ground resistance of the attenuator provided on the coaxial cable between the cold plates at all levels also affects the magnitude of the ground crosstalk. For example, the ground resistance of a 3 dB attenuator is about 150 Ω, the ground resistance of a 6 dB attenuator is about 90 Ω, the ground resistance of a 10 dB attenuator is about 60 Ω, the ground resistance of a 20 dB attenuator is about 50 Ω, etc. It can be understood here that the smaller the ground resistance of the attenuator, the smaller the ground crosstalk generated.

[0063] In the present invention, by controlling the combination of the attenuation values of the attenuators in different temperature layers, different inhibitions of the low-frequency ground crosstalk between the coaxial cables can be achieved through impedance distribution.

[0064] Optionally, the preset combination mode may include a first combination mode, and the first combination mode is as follows:

[0065] The attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is the first specified attenuation value; the attenuation value of the third attenuator is 0 dB; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0066] Figure 2 A schematic diagram showing the preset combination mode of the embodiments of the present invention.

[0067] It can be understood here that the first specified attenuation value, the second specified attenuation value, the third specified attenuation value, and the fourth specified attenuation value correspond to different specified attenuation values.

[0068] Exemplarily, in the present invention, hereinafter, taking the first specified attenuation value as 20 dB, the second specified attenuation value as 10 dB, the third specified attenuation value as 6 dB, and the fourth specified attenuation value as 3 dB as examples, an exemplary introduction is made.

[0069] For example, as Figure 2 shown, in the first combination mode, the attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is 20 dB; the attenuation value of the third attenuator is 0 dB; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0070] Optionally, the preset combination mode may include a second combination mode, and the second combination mode is as follows:

[0071] The attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is the first specified attenuation value; the attenuation value of the third attenuator is the second specified attenuation value; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0072] For example, as Figure 2 shown, in the second combination mode, the attenuation value of the first attenuator is 0 dB; the attenuation value of the second attenuator is 20 dB; the attenuation value of the third attenuator is 10 dB; the attenuation value of the fourth attenuator is 0 dB; the attenuation value of the fifth attenuator is 0 dB.

[0073] Optionally, the preset combination mode may include a third combination mode, and the third combination mode is as follows:

[0074] The attenuation value of the first attenuator is the third specified attenuation value; the attenuation value of the second attenuator is the second specified attenuation value; the attenuation value of the third attenuator is the second specified attenuation value; the attenuation value of the fourth attenuator is the fourth specified attenuation value; the attenuation value of the fifth attenuator is 0 dB.

[0075] For example, asFigure 2 As shown, in the third combination mode, the attenuation value of the first attenuator is 6 dB; the attenuation value of the second attenuator is 10 dB; the attenuation value of the third attenuator is 10 dB; the attenuation value of the fourth attenuator is 3 dB; the attenuation value of the fifth attenuator is 0 dB.

[0076] Optionally, the preset combination mode may include a fourth combination mode, and the fourth combination mode is:

[0077] The attenuation value of the first attenuator is the fourth specification attenuation value; the attenuation value of the second attenuator is the second specification attenuation value; the attenuation value of the third attenuator is the second specification attenuation value; the attenuation value of the fourth attenuator is the third specification attenuation value; the attenuation value of the fifth attenuator is 0 dB.

[0078] For example, as Figure 2 As shown, in the fourth combination mode, the attenuation value of the first attenuator is 3 dB; the attenuation value of the second attenuator is 10 dB; the attenuation value of the third attenuator is 10 dB; the attenuation value of the fourth attenuator is 6 dB; the attenuation value of the fifth attenuator is 0 dB.

[0079] Exemplarily, the present invention performs a signal strength test on the ground crosstalk based on the attenuation components provided by the above four combination modes. In the first combination mode, the signal strength of the ground crosstalk is -52 dB; in the second combination mode, the signal strength of the ground crosstalk is -64 dB; in the third combination mode, the signal strength of the ground crosstalk is -65 dB; in the fourth combination mode, the signal strength of the ground crosstalk is -65 dB.

[0080] The experimental data of the present invention can show that by controlling the combination of the attenuation values of the attenuators in different temperature layers, the suppression of the low-frequency crosstalk between coaxial cables to the ground can be achieved by means of impedance distribution.

[0081] It can be understood here that the exemplary embodiments provided by the present invention are only combination modes of the attenuation values of four attenuators, but the present invention is not limited to these four combination modes. Any combination improvement based on "by controlling the combination of the attenuation values of the attenuators in different temperature layers" disclosed in the present invention belongs to the protection scope of the present invention, and the present invention does not limit this.

[0082] According to another aspect of the present invention, the present invention also provides a superconducting quantum computing device. The superconducting quantum computing device includes a dilution refrigerator as described above.

[0083] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or perform equivalent replacements on some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A superconductor-based dilution refrigerator, characterized in that: The temperature layers of the dilution refrigerator at least include a first temperature layer, a second temperature layer, a third temperature layer, a fourth temperature layer and a fifth temperature layer, and the dilution refrigerator includes: The common ground cable is made of superconductor material and includes: A first common ground cable segment is arranged in the second temperature layer; A second common ground cable segment is arranged in the third temperature layer; a third common ground cable segment, arranged in the fourth temperature layer; a fourth common ground cable segment, arranged in the fifth temperature layer; Wherein, the first common ground cable segment, the second common ground cable segment, the third common ground cable segment and the fourth common ground cable segment are connected through cold plates of various levels between the temperature layers of the dilution refrigerator; Attenuation components, including: A first attenuator, disposed in the first temperature layer; a second attenuator, disposed in the second temperature layer; A third attenuator, disposed in the third temperature layer; a fourth attenuator, disposed in the fourth temperature layer; a fifth attenuator, disposed in the fifth temperature layer; The attenuation values ​​of the first attenuator, the second attenuator, the third attenuator, the fourth attenuator and the fifth attenuator are determined according to a preset combination.

2. The dilution refrigerator according to claim 1, characterized in that The superconductor material is yttrium barium copper oxide.

3. The dilution refrigerator according to claim 1, characterized in that The superconductor material is rare earth barium copper oxide.

4. The dilution refrigerator according to claim 1, characterized in that The preset combination method includes a first combination method, and the first combination method is: The attenuation value of the first attenuator is 0dB; The attenuation value of the second attenuator is a first specification attenuation value; The attenuation value of the third attenuator is 0dB; The attenuation value of the fourth attenuator is 0dB; The attenuation value of the fifth attenuator is 0dB.

5. The dilution refrigerator according to claim 1, characterized in that The preset combination method includes a second combination method, and the second combination method is: The attenuation value of the first attenuator is 0dB; The attenuation value of the second attenuator is a first specification attenuation value; The attenuation value of the third attenuator is a second specification attenuation value; The attenuation value of the fourth attenuator is 0dB; The attenuation value of the fifth attenuator is 0dB.

6. The dilution refrigerator according to claim 1, characterized in that The preset combination method includes a third combination method, and the third combination method is: The attenuation value of the first attenuator is a third specification attenuation value; The attenuation value of the second attenuator is a second specification attenuation value; The attenuation value of the third attenuator is a second specification attenuation value; The attenuation value of the fourth attenuator is a fourth specification attenuation value; The attenuation value of the fifth attenuator is 0dB.

7. The dilution refrigerator according to claim 1, characterized in that The preset combination method includes a fourth combination method, and the fourth combination method is: The attenuation value of the first attenuator is a fourth specification attenuation value; The attenuation value of the second attenuator is a second specification attenuation value; The attenuation value of the third attenuator is a second specification attenuation value; The attenuation value of the fourth attenuator is a third specification attenuation value; The attenuation value of the fifth attenuator is 0dB.

8. A superconducting quantum computing device, characterized in that: It comprises a dilution refrigerator as described in any one of claims 1 to 7.

Images